CN1447640A - Mfg. appts. of laminator - Google Patents

Abstract

The invention discloses the practical compact equipment for manufacturing multiplayer body cheaply by raising the speed for preparing each layer so as to increase the producibility. The basal disks can be moved to and fro as well up and down linearly within preset interval path. The formation equipment and drying device are allocated on the path. The formation equipment includes one or more the insulation layer forming devices for spitting out ceramics mucilage or insulating resin paste as well as the conduction-forming device for spraying conductor paste in jet ink mode. The drying device dries the said mulcilage and the conductor paste. Within the period of the basal disks moving to and fro for one and more times in the internal path, the thin film layer with preset conducting pattern is formed on the insulation layer.

Description

The manufacturing installation of laminated body

Technical field

The present invention relates to the laminated body manufacturing apparatus, at length relate to the manufacturing installation of laminate type electronic components such as the electric capacity that is installed on the laminated base plate, inductance, resistance, magnetic, filter etc.

Background technology

So far, we know that the general manufacture method as the ceramic laminated body of representative laminated body is with scraping the skill in using a kitchen knife in cookery ceramic slurry to be coated on the long carrier film that is made of polyethylene terephthalate thin film etc., then use wire mark method printed conductor cream in the above, form ceramic film through super-dry, after this, peel off above-mentioned thin layer from carrier film, simultaneously the position with its inner conductor pattern is a benchmark severing established practice setting shape, with the thin layer of the severing lamination method (please refer to Japan and put down into 10 years disclosed 10-15929 patent gazettes) of getting up in turn.

But, if according to this existing mode, then because after the thin layer that forms on the carrier film peeled off layer by layer with they laminations, so need this stripping machine mechanism and lamination mechanism, device is maximized, and productivity is worsened, in a single day produce the precision problem that gets up to make their position to overlap for the thin layer lamination after will peeling off simultaneously.

Again, so far, as other manufacture, we know the mode (please refer to Japan and put down into 9 years disclosed 9-232174 patent gazettes) that forms insulating barrier and the direct laminate film floor of the operation of regulation conductive pattern on metal substrate repeatedly.

If according to this patent gazette, then by with the mechanism of servo motor and ball screw etc., can be on X and Y direction moving substrate, still, as an example, also can replace aforesaid substrate with metal endless belt, at this moment, along the direct of travel of above-mentioned endless belt, set the slurry injector head of the number of being wanted with the regulation order, the conductor paste of the number of wanting sprays first-class, is accompanied by endless belt and advances to a direction, little by little produces laminated body.

; even if replacing with metal endless belt in the situation of aforesaid substrate; also exist the number that sets that need append slurry injector head and conductor paste injector head; with in order to improve the drying device of productive insulating barrier and conductor layer, false compression bonding apparatus and true compression bonding apparatus, further; if the recovery zoning of the laminated body that consideration forms etc.; then identical in the past with prior art, need the big floor area that is provided with that device is maximized, increase rough sledding such as cost of equipment.

Because above the substrate that moves along the XY direction, spray ceramic slurry and functional material conductor paste formation laminated body repeatedly from slurry injector head and conductor paste injector head, so be difficult to guarantee the flatness of each layer again.

Promptly, in above-mentioned prior art, because form on by the surface of spraying the thin layer that ceramic slurry or functional material conductor paste form small unevenly, so exist the bad more problem of top section flatness, the internal accuracy of the laminated body of finishing becomes a query.In addition, because by spraying the ceramic layer that ceramic slurry forms flat condition, so also exist the problem that this spraying operation needs a lot of times of spend.

Again, if by on above-mentioned ceramic layer, forming the layer that constitutes by the internal circuit key element, form 1 layer film layer, then produce the cancave embedded part branch between the electrode layer in the layer that constitutes by above-mentioned internal circuit key element, damaged the flatness of above-mentioned thin layer, when this thin layer of lamination, produce the space, become the reason that the space takes place probably on the electronic unit behind the sintering because above-mentioned cancave embedded part divides.

Summary of the invention

The present invention is in view of above-mentioned prior art problem proposes, and the objective of the invention is to provide at an easy rate the manufacturing speed by increasing each layer of laminated body (containing laminated base plate) to improve productivity, and manufacturing installation that can small practicalization.

Even if providing to use for miniaturization makes the mode of scope of operation rotation, other purpose of the present invention also can not hinder the laminated body manufacturing apparatus of practicability.

Further, other purpose of the present invention provides by flatness and well forms the thin layer with conductive pattern accurately, can be with the laminated body manufacturing apparatus of the high high-quality laminated body of high manufacturing speed production internal accuracy.

Laminated body manufacturing apparatus of the present invention like this, it makes basal disc move back and forth and to be provided with up or down basal disc on the interval path of the regulation of linearity, and on this interval path, respectively and the insulating barrier of establishing one or more spue ceramic slurry or insulating resin cream form device, the conductor layer that sprays conductor paste with ink-jetting style forms device, with make above-mentioned slurry, the drying device of conductor paste drying, above-mentioned basal disc on the above-mentioned interval path 1 time or repeatedly move back and forth during, on insulating barrier, form the thin layer that has set the regulation conductive pattern, carry out these processes repeatedly and form laminated body.

Promptly, the feature of above-mentioned laminated body manufacturing apparatus is and establishes 1 or essential minimum number insulating barrier and form device, conductor layer forms device and drying device, basal disc is moved back and forth on their the interval path of linearity of configuration, and can be this when mobile forward and reply the operation of stipulating effectively in each operation when mobile.

With the operation that forms insulating barrier by ceramic slurry or insulating resin cream, the flow chart that is formed the operation etc. of conductor layer by conductor paste is correspondingly suitably set above-mentioned insulating barrier and is formed device, conductor layer forms setting of device and drying device, but because use the frequency of the drying process that is undertaken by above-mentioned drying device very big, so, can improve operating efficiency effectively with at least 1 in these one or more drying devices substantial middle part that is configured in above-mentioned interval path.

This drying device can be heating or warm wind mode, the rayed mode, any mode in the hot plate crimping mode of the described false compression bonding apparatus of laser irradiation mode or dual-purpose back etc. makes above-mentioned insulating barrier, and conductor layer is in such semi-harden state that is not clamminess.

Above-mentioned insulating barrier forms device and adopts the scraper mode that generally knows that, ink-jetting style or cylinder coating method etc., but for corresponding raising precision with the densification of insulating barrier, preferably at least wherein 1 adopt ink-jetting style.But for the part that on one deck of thin layer, forms insulating barrier all sidedly, also can adopt above-mentioned scraper mode and cylinder coating method, be about to ink-jetting style and alternate manner combination in any and get up.

For example, if by on above-mentioned insulating barrier, forming conductor layer (electrode layer), form 1 layer film layer, then between these electrode layers, produce the cancave embedded part branch, damaged the flatness of thin layer, when these thin layers of lamination, produce the space, become the reason that the space takes place on the electronic unit behind the sintering because above-mentioned cancave embedded part divides.

Flatness in order to ensure above-mentioned insulating barrier, must bury above-mentioned cancave embedded part branch with insulating barrier, for this reason, above-mentioned insulating barrier forms device and is included in by conductor layer and forms the cancave embedded part branch between the electrode layer that device forms or remove ceramic slurry of filling or insulating resin cream in the extra-regional regulation zone that forms conductor layer.At this moment insulating barrier forms and adopts above-mentioned ink-jetting style to be fit in the device.

In addition, be used for the situation of inductance, need to form and connect the through hole electrode of the conductor layer (electrode layer) of thin layer up and down in laminated body.

Because it is ink-jetting style that above-mentioned conductor layer forms device, form through hole electrode so also can form device with this conductor layer.Be that best above-mentioned conductor layer formation device sprays conductor paste by ink-jetting style on above-mentioned conductive pattern, form through hole electrode.

In addition, as carrying out usually, also can form above-mentioned through hole electrode with thin layer ink-jetting style filling conductor paste in this through hole getting through hole on the insulating barrier.Also can use the laser drilling mode of perforating device again.At this moment, on above-mentioned interval path and establish the laser drilling device that appends, the conductor layer with above-mentioned ink-jetting style in the through hole of getting with this laser drilling device forms device filling conductor paste, forms through hole electrode.

Again, for fine uneven carrying out evenly on the ceramic slurry of above-mentioned thin layer, insulating resin cream, conductor paste, producing, guarantee flatness, improve the lamination precision by lamination being carried out homogenizing, be preferably in the proper time of each formation 1 layer film layer etc., push this layer above.For this reason, on the above-mentioned interval path that above-mentioned basal disc moves and establish the false compression bonding apparatus that constitutes by hot plate and cylinder etc. that appends.

And, as mentioned above, if on false compression bonding apparatus, use hot plate then drying device and false compression bonding apparatus can be dual-purposes.

In addition, the work timing of false compression bonding apparatus also can be each when forming 1 layer film layer or forming the multi-layer thin rete at every turn, any one the when basal disc that further moves back and forth is each mobile forward or at every turn replying when mobile etc.In addition, as described above, during the cancave embedded part between electrode layer grades in the situation of filling pottery slurry or insulating resin cream, so not necessarily need false compression bonding apparatus because can guarantee flatness to a certain degree.

The good concrete formation of above-mentioned false compression bonding apparatus is that contact is carried out dried ceramic slurry, insulating resin cream, conductor paste by drying device, and have atomic little adhesively from the teeth outwards, make to have adhesive Dust-proof rotary drum and contact with this cylinder by pressure roller.

Therefore, ceramic slurry, insulating resin cream, conductor paste with coatings such as ink-jetting styles, after being dried to the degree that is not clamminess by drying device, it is flatly even fine uneven press pressure roller by contact, and the particulate sheet that strips down from protuberance is attached to being removed by pressure roller, and attached to this by the particulate sheet on the pressure roller attached to being removed on the Dust-proof rotary drum.

Again, also can make basal disc move back and forth in the regulation interval and up or down basal disc is arranged on the operation post, above above-mentioned operation post and establish a plurality of holding componentss, and the insulating barrier of releasably one or more are spued ceramic slurry or insulating resin cream forms the unit, the conductor layer formation unit and the drying machine unit that spray conductor paste are installed on these holding componentss, above-mentioned basal disc in above-mentioned interval 1 time or repeatedly move back and forth during, on insulating barrier, form the thin layer that has set the regulation conductive pattern, carry out these processes repeatedly and form laminated body.

Above-mentioned insulating barrier forms the unit and conductor layer forms the scraper mode that the unit employing generally knows that, ink-jetting style or cylinder coating method etc., but for corresponding raising precision with the densification of conductor layer and insulating barrier, preferably conductor layer forms the unit and adopts ink-jetting style, and insulating barrier forms at least 1 employing ink-jetting style in the unit.

But, forming all sidedly on the part of insulating barrier on one deck of thin layer, adopt above-mentioned scraper mode and cylinder coating method, be about to ink-jetting style and alternate manner combination in any and get up.

When above-mentioned conductor layer forms unit employing ink-jetting style, also can form the connection through hole electrode of the conductor layer of thin layer up and down with this unit.That is, can produce the laminated body of the inductance that is used to have through hole electrode.

And at this moment above-mentioned through hole electrode as carrying out usually, also can preferably adopt the laser drilling mode as perforating device getting through hole filling conductor paste in this through hole on the insulating barrier of thin layer.Specifically, further has releasably installation is used for getting the laser drilling device of through hole on above-mentioned insulating barrier formation.

Again, in order fine unevenly evenly to guarantee flatness to what on the ceramic slurry of above-mentioned thin layer and insulating resin cream, produce, improve the lamination precision by lamination being carried out homogenizing, be preferably in the proper time of each formation 1 layer film layer etc., push this layer above.For this reason, further has the formation that releasably installation is used for the false compression bonding apparatus on push the proper time of the above-mentioned thin layer of lamination.

This false crimping unit has hot plate and cylinder etc., in the situation of the false crimping unit that uses this hot plate, because have the function of above-mentioned drying machine unit concurrently, so also can omit this drying machine unit.

In addition, the work timing of false crimping unit also can be each when forming 1 layer film layer or when forming the multi-layer thin rete at every turn, any one the when basal disc that further moves back and forth is each mobile forward or in replying when mobile etc.

Further, form the unit in order to check by above-mentioned insulating barrier, conductor layer forms the insulating barrier that the unit forms, conductor layer finish precision, the ccd video camera unit need be set.The ccd video camera unit of making a video recording for the state that detects above-mentioned thin layer promptly further releasably is installed.

Use this camera unit, made a video recording in the surface of the thin layer that forms at the appropriate time,, detect the pin hole that has or not the insulating barrier that the reasons such as spray orifice obstruction owing to inkjet nozzle cause or the defective modes such as broken string of conductor layer by it is carried out image processing.

And, also can make and go up the continuous smooth scope of operation external week and carry out the going barrel of the polygon of zoning and rotate off and on going barrel is set like that, be arranged on the film feed mechanism that lays film on above-mentioned each scope of operation of rolling up carrier film on this going barrel periphery, halted state at above-mentioned going barrel is facing toward on the operation post of the above-mentioned scope of operation, the insulating barrier that sets one or more spue ceramic slurry or insulating resin cream respectively forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and makes above-mentioned slurry, the drying device of conductor paste drying, when each rotation of above-mentioned going barrel, on the carrier film of the above-mentioned scope of operation, on insulating barrier, form the 1 layer film layer that has set the regulation conductive pattern at least, and form laminated body by carrying out this spinning movement repeatedly.

Promptly, its feature is a fabrication process platform on the scope of operation of the going barrel periphery that each rotates off and on, form the thin layer of laminated body by formation operation or the drying operation of on each operation post, implementing insulating barrier and/or conductor layer, and positively keep the layer-by-layer state of thin layer by the carrier film on each scope of operation that is laid in.

On above-mentioned going barrel, for above-mentioned carrier film is contacted with its each scope of operation closely with tense situation, be preferably in the adsorption hole that carries out vacuum attraction internally be set on the scope of operation of above-mentioned going barrel, by this adsorption hole with carrier film absorption remain on the scope of operation.

Again, in order to improve the manufacturing speed of thin layer, in other words, in order to shorten the once required time of going barrel rotation, after forming insulating barrier or conductor layer, preferably make drying above these layers immediately, directly on the operation post of above-mentioned insulating barrier formation device or conductor layer formation device back, dispose above-mentioned drying device respectively.

Above-mentioned drying device can be heating or warm wind mode, the rayed mode, any mode in the hot plate crimping mode of false compression bonding apparatus that laser irradiation mode or dual-purpose are stated later or compression bonding apparatus (true crimping) etc., make above-mentioned insulating barrier, conductor layer is in such semi-harden state that is not clamminess.

Above-mentioned insulating barrier forms device and adopts the scraper mode that generally knows that, ink-jetting style or cylinder coating method etc., but with the operation post of the corresponding raising precision of the densification of insulating barrier on, preferably wherein adopt ink-jetting style at least 1 time.But for the part that on one deck of thin layer, forms insulating barrier all sidedly, also can adopt above-mentioned scraper mode and cylinder coating method, be about to ink-jetting style and alternate manner combination in any and get up.

And when above-mentioned insulating barrier formation device and conductor layer formation device were ink-jetting style, it was important that the position of inkjet nozzle is controlled.When above-mentioned conductor layer formation device begins to carry out work on each scope of operation, on carrier film, set up reference mark by this device, the operation post that forms device facing to the insulating barrier that has disposed above-mentioned conductor layer formation device and ink-jetting style sets ccd video camera, determines above-mentioned conductor layer formation device and above-mentioned insulating barrier to form the position of device by the said reference mark with this video camera picked-up being carried out image processing.

Again, when above-mentioned insulating barrier forms device and forms insulating barrier with ink-jetting style, be preferably on the operation post of this back and set the false compression bonding apparatus of pushing above-mentioned insulating barrier, therefore can be to the top homogenizing of flatly carrying out of insulating barrier.

In addition, be used for the situation of inductance, need to form and connect the through hole electrode of the conductor layer (electrode layer) of thin layer up and down in laminated body.

Because it is ink-jetting style that above-mentioned conductor layer forms device, form through hole electrode so also can form device with this conductor layer.Be that best above-mentioned conductor layer formation device sprays conductor paste formation through hole electrode with ink-jetting style on above-mentioned conductive pattern.At this moment, can dispose on same operation post also that conductor layer forms device and insulating barrier forms device, form device with insulating barrier and form insulating barrier forming between the electrode layer that device forms ceramic slurry of filling or insulating resin cream by conductor layer.

Again,, improve the lamination precision on the ceramic slurry of above-mentioned thin layer, insulating resin cream, conductor paste by lamination being carried out homogenizing for the fine uneven homogenizing of carrying out that produces is guaranteed flatness, preferably push thin layer above.For this reason, on 1 operation post of above-mentioned going barrel, set the false compression bonding apparatus above pushing the proper time at the above-mentioned thin layer of lamination of appending.

In addition, the work timing of false compression bonding apparatus also can be each when forming 1 layer film layer, or in when at every turn forming the multi-layer thin rete etc. any one.

Further, by make going barrel with stated number be rotated on each scope of operation form insulating barrier after, need reclaim this laminated body from going barrel., on the above-mentioned operation post of above-mentioned going barrel, set by the above-mentioned carrier film of cut-out on each scope of operation for this reason, the shearing device of disjunction laminated body, and on next operation post, set and reclaim the laminated body recovering mechanism that divides the above-mentioned laminated body of having no progeny.

And in the good configuration of above-mentioned shearing device and laminated body recovering mechanism, shearing device is the next operation post that has disposed the operation post of above-mentioned false compression bonding apparatus, and the laminated body recovering mechanism is that the scope of operation of above-mentioned going barrel stops at operation post bottom.

Again, also can be above operation post, the insulating barrier that spue ceramic slurry or insulating resin cream can be set respectively with coming in and going out forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and makes above-mentioned slurry, the drying device of conductor paste drying, by making above-mentioned insulating barrier form device, drying device and conductor layer form device discrepancy operation post top, on insulating barrier, forming the thin layer that has set the regulation conductive pattern on the operation post, by making this insulating barrier form device repeatedly, drying device and conductor layer formation device are come in and gone out and are formed the laminated body that is made of the regulation thin layer.

Promptly, its feature is that to make operation post be Locating Type, the insulating barrier of coming in and going out above this operation post forms device, conductor layer forms device and drying device forms insulating barrier on operation post, on this insulating barrier, form conductor layer, insulating barrier and conductor layer are carried out drying, carry out these processes repeatedly in Locating Type operation post superimposed layer laminated body.

Above-mentioned drying device can be heating or warm wind mode, the rayed mode, and any mode in laser irradiation mode or the hot plate crimping mode etc. makes above-mentioned insulating barrier, and conductor layer is in such semi-harden state that is not clamminess.

Again, insulating barrier forms device, and conductor layer forms device and adopts the scraper mode of selling on the open market, ink-jetting style or cylinder coating method etc., but for corresponding raising precision, preferably adopt ink-jetting style with the densification of conductor layer and insulating barrier.

Further, when on insulating barrier, passing through to form conductor layer, when forming 1 layer film layer, between these electrode layers, produce the cancave embedded part branch, damaged the flatness of thin layer, when these thin layers of lamination, produce the space, become the reason that the space takes place on the electronic unit behind the sintering because above-mentioned cancave embedded part divides.In order to ensure the flatness of above-mentioned insulating barrier, must bury above-mentioned cancave embedded part branch with insulating barrier, for this reason, above-mentioned insulating barrier forms device and is being formed ceramic slurry of filling or insulating resin cream between the electrode layer that device forms by conductor layer with ink-jetting style.

Again, also can spray ceramic slurry or insulating resin cream and form insulating barrier with through hole with ink-jetting style, and be injected on the conductor paste this through hole the through hole electrode that forms conductive pattern and in this through hole, form forming device from the conductor layer that constitutes by ink-jetting style.When doing like this, do not need other perforating device, this is all very favourable for the occupied area that reduces equipment cost and equipment.

Certainly, for the part that on one deck of thin layer, forms insulating barrier all sidedly, also can at random adopt above-mentioned scraper mode, ink-jetting style or cylinder coating method, at this moment, on insulating barrier, get through hole with laser drilling device, form device at the conductor layer that constitutes by ink-jetting style and be injected on the conductor paste in this through hole and form through hole electrode.

And, insulating barrier is formed device, drying device, conductor layer form device and laser drilling device be integrated into above-mentioned operation post around, be favourable to reducing that the space is set.

At this moment, it has in the situation of all opening aspect supposition makes four on the operation post, form device from each open portion insulating barrier, drying device, conductor layer forms can come in and go out the individually formation of operation post top of device and laser drilling device, when not needing laser drilling device, it has insulating barrier and forms device, drying device and conductor layer form can come in and go out individually respectively from three aspects formation of operation post top of device, when supposing two aspects that only are opened in the operation post top, can aspect two dispersedly and front and back or about and insulating barrier be set with establishing form device, drying device, conductor layer forms device and laser drilling device, can come in and go out the independently top of operation post of these devices.That is,, set the plan of establishment of each device according to the layout of the open portion on the operation post.

Again, fine uneven when when 1～a plurality of thin layer of each formation is set, pushing the false compression bonding apparatus of these thin layers for what evenly on thin layer, produce, improve each thin layer closely then property all be effectively.

By false crimping evenly on thin layer, produce fine uneven, the flatness that can access and the insulating barrier of levelness and conductor layer and each thin layer, laminated body shape collapse etc. in the time of just can preventing true crimping in advance.

Again, the false crimping of false compression bonding apparatus work regularly also can be each when forming 1 layer film layer, or in when at every turn forming the multi-layer thin rete any one.

And, when guarantee above the operation post and this operation post between be used for the above-mentioned thin layer of lamination space when this false compression bonding apparatus is set like that, we can say that the miniaturization to device is very favourable.

And the good concrete formation of compression bonding apparatus is the light pressure that can add regulation on the pressing plate that can control up or down, move back and forth on the left and right directions by pressure roller on add the structure etc. of the light pressure of regulation.

And as after false crimping, the device that carries out true crimping is

Compression bonding apparatus is set above operation post, and make the insulating barrier of spue ceramic slurry or insulating resin cream form device, the conductor layer that sprays conductor paste with ink-jetting style forms device, with the drying device that makes above-mentioned slurry, conductor paste drying, these devices can be set between each operation post and compression bonding apparatus with coming in and going out

When making this insulating barrier form device, when drying device and conductor layer formation device retreat, at least be provided with make the operation post top the space that is used for lamination not with the cut-off of air communication with the vacuum plant of formation vacuum atmosphere in the space that is used in lamination is set at least

At every turn by making above-mentioned insulating barrier form device repeatedly, drying device and conductor layer form device and come in and go out, carry out false crimping with compression bonding apparatus when forming the thin layer of the number of wanting, in the false crimping laminated body of the regulation film number of plies with the above-mentioned space that is used for lamination of cut-off obturation, one side makes vacuum plant work, and one to carry out true crimping in the face of this laminated body be effectively.

The structure of dual-purpose when this compression bonding apparatus also can have false crimping and during true crimping, the compression bonding apparatus when compression bonding apparatus in the time of also can being respectively false crimping and true crimping.In each situation, false compression bonding apparatus is adopted come in and go out the drum-type of pushing that the space that is used for lamination moves back and forth, make true compression bonding apparatus adopt the pressing plate push type.When dual-purpose, we enumerate the pressing plate push type as an example.

The purpose of true crimping is to get rid of the air that remains between insulating barrier and the electrode layer as described above, makes each layer fixing.

For this reason, as mentioned above, each carry out false crimping with compression bonding apparatus when forming 1～a plurality of thin layer, after forming the laminated body of the regulation film number of plies, the space that is used for lamination with the inaccessible operation post of cut-off top, one side makes the work of fan equal vacuum device, and one side can make this device have the function of false press-connection machine and true press-connection machine concurrently by the true crimping laminated body of plus-pressure with regulation.

As above-mentioned cut-off, can enumerate the window of slide down dynamic formula, gate is as its example.

Above-mentioned compression bonding apparatus is not limited to pressing plate, also can be above-mentioned move back and forth like that by pressure roller.In order in false crimping and true crimping, to add different pressure, press the situation of pressure roller, can control and support this to push cylinder drive up or down, preferably use can change stressed transmission device.

Again, in order to become the manufacturing purpose laminated body is to be formed by alternately laminated insulation layer and the conductor layer thin layer to stated number, can control and constitute up or down as top operation post of at length recording and narrating or insulating barrier formation device, conductor layer forms device and drying device, and disposes relatively.When relative with operation post, when spuing (injection) ceramic slurry or insulating resin cream and each when spraying conductor paste at every turn, drop to ormal weight, forming device with insulating barrier, conductor layer forms in the device situation relative with drying device, when spuing (injection) ceramic slurry or insulating resin cream and each when spraying conductor paste equally at every turn, rise to ormal weight and control like that.

And, it is to have the insulating trip laminated device that makes insulating trip overlapping, the conductor layer that sprays conductor paste on insulating trip forms device, ceramic slurry or insulating resin cream are injected in the laminated body manufacturing apparatus that insulating barrier on the same insulating trip forms device, also can have the laminated body of the thin layer that has set the regulation conductive pattern by using above-mentioned each device repeatedly, between each insulating trip of multilayer insulation sheet, forming.

Promptly, its feature is and establishes 1 or essential minimum insulating barrier forms device and conductor layer forms device, basal disc is moved back and forth on the interval path of the linearity that has set these devices, and the operation that in this moves and reply each operation when mobile forward, can stipulate effectively.

Above-mentioned insulating barrier forms device and adopts the scraper mode that generally knows that, ink-jetting style or cylinder coating method etc., but for corresponding raising precision, preferably adopt ink-jetting style with the densification of insulating barrier.

Again, also can make basal disc on the interval path of the regulation of linearity, move back and forth and to be provided with up or down basal disc, and on this interval path, respectively and establish that one or more above-mentioned conductor layers form devices and above-mentioned insulating barrier forms device, above-mentioned basal disc on the above-mentioned interval path 1 time or repeatedly move back and forth during, supply with insulating trip by above-mentioned insulating trip laminated device, form device and above-mentioned insulating barrier by above-mentioned conductor layer and form device and on this insulating trip, form the thin layer that has set the regulation conductive pattern, form laminated body by carrying out these processes repeatedly.

And, also can form the conductor layer formation unit that device is the injection conductor paste by above-mentioned conductor layer, and it is that the spue insulating barrier of ceramic slurry or insulating resin cream forms the unit that above-mentioned insulating barrier forms device, basal disc can travelling backwards be moved and up or down basal disc is arranged on the operation post in the regulation interval, above above-mentioned operation post and establish a plurality of holding componentss, and releasably one or more above-mentioned insulating barriers are formed unit and above-mentioned conductor layer respectively and form the unit and be installed on these holding componentss.

Again, also can make to rotate off and on going barrel is set like that by the going barrel that the smooth scope of operation continuous on the periphery is carried out the polygon of zoning, in the halted state of above-mentioned going barrel, facing toward on the operation post of the above-mentioned scope of operation, set one or more above-mentioned insulating trip laminated devices respectively, above-mentioned insulating barrier forms device, form device with above-mentioned conductor layer, when each rotation of above-mentioned going barrel, on the insulating trip of the above-mentioned scope of operation of supplying with by above-mentioned insulating trip laminated device, at least form the 1 layer film layer that has set the regulation conductive pattern, and form laminated body by carrying out this spinning movement repeatedly.In addition,, insulating trip is remained on the scope of operation with adsorbing, above-mentioned carrier film is followed closely with tense situation and each scope of operation by this adsorption hole if the adsorption hole that carries out vacuum attraction internally is set on the scope of operation of above-mentioned going barrel.

Further, also can have by making above-mentioned insulating trip laminated device, above-mentioned insulating barrier forms device and above-mentioned conductor layer formation device is provided with these devices respectively with coming in and going out above basal disc, make these insulating trip laminated devices, insulating barrier forms device and conductor layer formation device is come in and gone out above basal disc, on insulating trip, forming the thin layer that has set the regulation conductive pattern on the basal disc, coming in and going out, forming the formation of laminated body by making these each devices repeatedly.

Again, in above-mentioned whichever invention, if have and push press device above the insulating trip in the proper time that insulating trip is overlapped, then because with press device push insulating trip above, so by making planarization above the insulating trip improve the lamination precision of next thin layer, by improving the tight then property of insulating trip and thin layer, make each layer homogeneous integrated simultaneously, high-quality laminated body can be provided.

And, also can above basal disc, be provided with and work as the press device of pushing the proper time that insulating trip is overlapped above the insulating trip, and should make above-mentioned insulating trip laminated device respectively, above-mentioned conductor layer forms device and above-mentioned insulating barrier formation device is provided with these devices with coming in and going out above basal disc, when making these insulating trip laminated devices, conductor layer forms device, when retreating with insulating barrier formation device, at least be provided with make the basal disc top the space that is used for lamination not with the cut-off of air communication with the vacuum plant of formation vacuum atmosphere in the space that is used in lamination is set at least, one side makes vacuum plant work with the inaccessible above-mentioned space that is used for lamination of above-mentioned cut-off, one side is pushed by making above-mentioned insulating trip laminated device repeatedly with above-mentioned press device, insulating barrier forms device and conductor layer forms the laminated body that device is come in and gone out and formed.

As insulating resin cream, can enumerate epoxy resin, polyimide resin etc.

In addition, above-mentioned ceramic slurry, as glass composite material, use will add dopant (for example, MgO, CaO, Al in the material that forms pyrex ₂O ₃, K ₂O, ZnO etc.) glass powder and the aluminium oxide that obtains, mullite, cordierite, the mixture of pottery such as quartz as the sintered glass ceramics material, use cordierite system, the raw material that the sintered glass ceramics powder of α spodumene etc. constitutes as raw material.

Again, be used for the conductor paste of conductive pattern, using for example conductor material of copper system, or tungsten W, molybdenum Mo, manganese Mn etc. are being used for the conductor paste of through hole electrode, use the conductor material of the little silver system of conductor resistance, for example, silver, silver-palladium, silvery white gold, silver-palladium-platinum etc.

In addition, in the conductor paste of resistance pattern, use carbon, carbon-Yin etc.

In addition, at above-mentioned ceramic slurry, insulating resin cream in the material of conductor paste, also can contain the photo-hardening material that is promoted drying by illumination.

Description of drawings

Fig. 1 is the side view of expression the 1st brief summary of the invention.

Fig. 2 is the side view of the flow chart of expression the 1st embodiment.

Fig. 3 is the side view of the flow chart of expression the 2nd embodiment.

Fig. 4 is the side view of the flow chart of expression the 3rd embodiment.

Fig. 5 is the side view of the flow chart of expression the 4th embodiment.

Fig. 6 is the side view of the flow chart of expression the 5th embodiment.

Fig. 7 is the side view of the flow chart of expression the 6th embodiment.

Fig. 8 is the side view of the flow chart of expression the 7th embodiment.

Fig. 9 is the side view of the flow chart of expression the 8th embodiment.

To be expression form the enlarged drawing that insulating barrier that device carries out forms operation by insulating barrier to Figure 10.

To be expression form the enlarged drawing that partition insulating barrier that device carries out forms operation by insulating barrier to Figure 11.

To be expression form the enlarged drawing that conductor layer that device carries out forms operation by insulating barrier to Figure 12.

To be expression form the enlarged drawing that insulating barrier that device carries out forms operation by insulating barrier to Figure 13.

To be expression form the enlarged drawing that through hole electrode that device carries out forms operation by conductor layer to Figure 14.

Figure 15 is the enlarged drawing of the drying process that undertaken by drying device of expression.

Figure 16 is the enlarged drawing of the concrete example of the false compression bonding apparatus of expression.

Figure 17 is the enlarged drawing that the expression insulating barrier forms other embodiment of device.

Figure 18 is the front elevation of the laminated body manufacturing apparatus of expression the 2nd invention.

Figure 19 is the side view that cuts a part of Fig. 1.

Figure 20 is the oblique view of the installation constitution of each unit of explanation.

Figure 21 is the partial cross section enlarged drawing of the installation constitution of each unit of expression.

Figure 22 is the oblique view of other example of the installation constitution of each unit of explanation.

Figure 23 is the front elevation of the flow chart of explanation the 1st embodiment.

Figure 24 is the front elevation of the same flow chart of explanation the 2nd embodiment.

Figure 25 is the front elevation of the same flow chart of explanation the 3rd embodiment.

Figure 26 is the front elevation of the same flow chart of explanation the 4th embodiment.

Figure 27 is the front elevation of the same flow chart of explanation the 5th embodiment.

Figure 28 is the front elevation of the same flow chart of explanation the 6th embodiment.

Figure 29 is the front elevation of the laminated body manufacturing apparatus summary of expression the 3rd invention.

Figure 30 is the side view of same device.

Figure 31 is the enlarged drawing of major part among Fig. 1.

Figure 32 is the synoptic diagram of the flow chart of expression the 1st embodiment.

Figure 33 is the synoptic diagram of the same flow chart of expression the 2nd embodiment.

Figure 34 is the amplification sectional view that is formed the flow chart of insulating barrier by the slurry injection unit.

Figure 35 is the amplification sectional view that is formed the flow chart of conductor layer and reference mark by the conductor paste injection apparatus.

Figure 36 is the amplification sectional view that is formed the flow chart of partition insulating barrier and through hole electrode by slurry injection apparatus and conductor paste injection apparatus.

Figure 37 is other embodiment of expression manufacturing installation, the enlarged drawing of the major part corresponding with Figure 29.

Figure 38 is the figure that belongs to Figure 37.

Figure 39 is the amplification sectional view that is formed the flow chart of insulating barrier by the slurry injection apparatus of scraper mode.

Figure 40 roughly represents the front cross-sectional view of the 1st embodiment of the 4th laminated body manufacturing apparatus of inventing.

Figure 41 roughly represents the plan cross-sectional view of transversal same body.

Figure 42 is the flow chart of laminated body when (being used for inductance) made in explanation according to embodiment a synoptic diagram.

Figure 43 is the 2nd embodiment of the flow chart of laminated body when (being used for inductance) is made in explanation with same laminated body manufacturing apparatus a synoptic diagram.

Figure 44 is a side view of roughly representing the laminated body manufacturing apparatus of the 3rd embodiment, omits drying device.

Figure 45 roughly represents the plan cross-sectional view of transversal body.

Figure 46 is the synoptic diagram of the flow chart of explanation when making laminated body according to the 3rd embodiment.

Figure 47 roughly represents the front side view of the laminated body manufacturing apparatus of the 4th embodiment.

Figure 48 roughly represents the plan cross-sectional view of transversal body.

Figure 49 is the synoptic diagram of the true crimped status of expression.

Figure 50 roughly represents the front elevation of the laminated body manufacturing apparatus of the 5th invention.

Figure 51 is the sectional view of expression according to the manufacturing process of the laminated body of same manufacturing installation.

Figure 52 is a sectional view of representing the manufacturing process of same laminated body in more detail.

Figure 53 is the sectional view of expression by other example of the laminated body of same manufacturing installation manufacturing.

Figure 54 is the enlarged drawing of insulating trip laminated device.

Figure 55 represents releasably insulating barrier to be formed the unit, and conductor layer forms the unit and pushes the oblique view that the unit is installed in an example of the formation on the supporting wall respectively.

Figure 56 represents releasably insulating barrier to be formed the unit, and conductor layer forms the unit and pushes the oblique view that the unit is installed in other example of the formation on the supporting wall respectively.

Figure 57 is the front elevation of the laminated body manufacturing apparatus of the 6th invention.

Figure 58 is the front elevation of the laminated body manufacturing apparatus of the 7th invention.

Embodiment

Below, we illustrate example of the present invention with reference to the accompanying drawings.

Below explanation example of the present invention in this example, illustrates the lamination-type capacitor as laminate type electronic component, the situation of lamination-type inductance.

That is, illustrate and make lamination-type electric capacity, the manufacturing installation of lamination-type inductance, manufacture process is to carry out following operation repeatedly, forms device coating ceramic binder by insulating barrier, sets electrode pattern with conductor with the formation device and form thin layer on this insulating barrier.

When the 1st invention of the laminated body manufacturing apparatus of key diagram 1～shown in Figure 17, Fig. 1 represents the summary of manufacturing installation, device is set in the unillustrated in the drawings casing, can reciprocatingly movable table be located in 2 years on the guide rail 1 of linearity horizontal arrangement, and constitute the upper part of movable table 2 by the basal disc 3 of the stainless steel that can move up and down, form the interval path 1a that basal disc 3 moves back and forth by above-mentioned guide rail 1.

Interval path 1a is the straight line path that has with the roughly the same width of the width of basal disc 3, at an upper portion thereof and establish as insulating barrier and form the scraper of device C and inkjet nozzle etc., form the inkjet nozzle of device E as conductor layer, thermal exposure device as drying device L, photo-thermal irradiation unit etc., further suitably and establish laser drilling device P and the false compression bonding apparatus that appends.

The length of this interval path 1a is about 1.5～2m.

But by unillustrated among the figure generally be servo motor, impulse motor, the drive source of stepper motor and the screw shaft that rotates by motor, movable table 2 is moved back and forth along the length direction (directions X) of above-mentioned interval path 1a, thereby basal disc is moved along above-mentioned interval path 1a, this moving direction and speed are controlled by controller.

Again, by servo motor, impulse motor, the drive source of stepper motor and the screw shaft that is rotated by motor also make basal disc 3 move up and down, and correspondingly this are moved up and down by controller and lamination procedure and control, and basal disc 3 is descended in turn.

Along the direction of transversal above-mentioned interval path 1a with small interval and establish a plurality of nozzles and form the inkjet nozzle that device C and conductor layer form device E as above-mentioned insulating barrier, again, along the cross-directional of interval path 1a also and establish drying device L.

Fig. 2 is the 1st embodiment of the 1st invention, expression is used for the manufacturing installation of the laminated body A1 of inductance, it has substantial middle at interval path 1a and partly sets light irradiation device L as drying device, sprays the conductor paste injection apparatus E of conductor paste and the formation of spraying the slurry injection apparatus C of slurry from inkjet nozzle from the inkjet nozzle that is configured in its both sides respectively.

When platform 4 platform 5 to the right in basal disc 3 left side from figure moves, be called forward and move, and to reciprocal be called when mobile to reply move, represent light irradiation device L respectively, conductor paste nozzle E and slurry nozzle C apply the operating state or the operating state when basal disc 3 arrives of each parts of their bottoms.In addition, this point all is identical up to the 8th following embodiment.

In this 1st embodiment, carry out the flow chart of (a)～(e) among Fig. 2.

In Fig. 2 (a), carry out initial when mobile forward from platform 4 when basal disc 3, left side slurry nozzle C and light irradiation device L work, spray ceramic slurry forms the regulation area on basal disc 3 base insulating layer 10 (details please refer to Figure 10) by this slurry nozzle C, by light irradiation device L this insulating barrier 10 is carried out drying then, make it become the semi-harden state (details please refer to Figure 15) that is not clamminess such.

In Fig. 2 (b) when carrying out above-mentioned answer when mobile, right side slurry nozzle C, conductor paste nozzle E and light irradiation device L work.

Form partition insulating barrier 11 (details please refer to Figure 11) by spraying ceramic slurry on the zone outside the conductive pattern 12a of this slurry nozzle C on removing above-mentioned base insulating layer 10, then, basal disc 3 passes through under conductor paste nozzle E, spray conductor paste by conductor paste nozzle E, on above-mentioned conductive pattern 12a, form conductor layer 12 (details please refer to Figure 12).

After this when basal disc 3 passes through light irradiation device L, make the above-mentioned partition insulating barrier 11 and conductor layer 12 dryings that on predetermined pattern, form.

In Fig. 2 (c), carry out when mobile left side slurry nozzle C, conductor paste nozzle E and light irradiation device L work once more forward when basal disc 3 then.

By slurry nozzle C, the ceramic slurry that spues on the zone outside the through hole electrode part 14a on removing above-mentioned partition insulating barrier 11 and conductor layer 12 forms insulating barrier 13 (details please refer to Figure 13), then, basal disc 3 passes through under conductor paste nozzle E, spray conductor paste by this conductor paste nozzle E, on above-mentioned conductive pattern 14a, form via conductors layer 14 (details please refer to Figure 14).

And, above-mentioned operation is formed on the thin layer of base insulating layer 10 among Fig. 2 (a), at this above thin layer, the once reciprocal operation of basal disc 3 be formed on Fig. 2 (b) (c) in by conductor layer 12 with by partition insulating barrier 11 with through hole electrode 14, the thin layer S1 that insulating barrier 13 constitutes.

After this, by repeating above-mentioned Fig. 2 (b) Fig. 2 (d) (c) continuously (e) ... operation, the laminated body A1 that is used for inductance of a plurality of thin layer S1 that produced lamination.

The lamination number that this laminated body A1, the thickness of wherein above-mentioned thin layer S1 are about 20～200 μ m and it is about ten multilayers, for example, on the platform 5 of device, or moves to other place and is subjected to true crimping, after this obtains inductance through oversintering.

In addition, in the drawings, in mapping, on thin layer S1, only demonstrate conductive pattern seldom, form a plurality of patterns at thin layer S1 like that but in fact can obtain a plurality of inductance from laminated body A1.Even if this point also is identical in the following embodiments.

Fig. 3 is the 2nd embodiment of the 1st invention, expression is used for the manufacturing installation of the laminated body A2 of inductance, it has substantial middle at interval path 1a and partly sets light irradiation device L as drying device, only dispose the slurry nozzle C that sprays ceramic slurry from inkjet nozzle in this 4 one side, spray the conductor paste nozzle E of conductor paste and the formation of spraying the slurry nozzle C of ceramic slurry from inkjet nozzle from inkjet nozzle in the opposite side configuration.

That is, be used for the situation of capacitor, because do not need above-mentioned through hole electrode, so omitted the conductor paste nozzle E of a side.In addition, this abridged conductor paste nozzle E both can unload and also can dispose as before but do not work.

In this 2nd embodiment, carry out the flow chart of (a)～(e) among Fig. 3.

In Fig. 3 (a), carry out initial when mobile forward from platform 4 when basal disc 3, left side slurry nozzle C and light irradiation device L work, C sprays ceramic slurry forms the regulation area on basal disc 3 base insulating layer 20 by this slurry nozzle, by light irradiation device L this insulating barrier 20 is carried out drying then.

In Fig. 3 (b), reply when mobile right side slurry nozzle C, conductor paste nozzle E and light irradiation device L work when above-mentioned basal disc 3.

On the regulation zone on the above-mentioned base insulating layer 20, spray ceramic slurry by this slurry nozzle C and form partition insulating barrier 21, then, basal disc 3 passes through under conductor paste nozzle E, spray conductor paste by this conductor paste nozzle E, on the not dispensing area of above-mentioned partition insulating barrier 21, form conductor layer 22.

After this when basal disc 3 passes through light irradiation device L, make the above-mentioned partition insulating barrier 21 and conductor layer 22 dryings that on predetermined pattern, form.

Then, form the thin layer S2 that forms by conductor layer 22 and insulating barrier 21,20 at once reciprocal Fig. 3 of basal disc 3 (a) in (b).

After this, by repeating above-mentioned Fig. 3 (a) Fig. 3 (c) (b) continuously (d) ... operation, the laminated body A2 that is used for electric capacity of a plurality of thin layer S2 that produced lamination.

Fig. 4 is the 3rd embodiment of the 1st invention, expression is used for the manufacturing installation of the laminated body A3 of inductance, it has the light irradiation device L that sets in the substantial middle of interval path 1a part and compartment of terrain, the left and right sides thereof as drying device, the light irradiation device L of one side (platform 4 one sides), configuration slurry nozzle C between the L, and at the light irradiation device L of opposite side (platform 5 one sides), the formation of configuration conductor paste nozzle E between the L.

In this 3rd embodiment, carry out the flow chart of (a)～(d) among Fig. 4.

In Fig. 4 (a) when basal disc 3 carry out from platform 4 initial when mobile forward, slurry nozzle C, conductor paste nozzle E, central authorities and right side light irradiation device L work.

Spray ceramic slurry forms the regulation area at basal disc 3 base insulating layer 30 from slurry nozzle C, when this base insulating layer 30 under central optical irradiation unit L by the time carry out drying, when base insulating layer 30 is passed through under conductor paste injection apparatus E then, spray conductor paste from this conductor paste nozzle E and form the conductor layer 32 that constitutes by the regulation conductive pattern.

When this conductor layer 32 under the light irradiation device L of right side by the time carry out drying.

In Fig. 4 (b), reply when mobile slurry nozzle C and left side light irradiation device L work when above-mentioned basal disc 3.

By this slurry nozzle C, imbed and spray ceramic slurry between the conductor layer 32 on the above-mentioned base insulating layer 30 like that and form partition insulating barrier 31, when this partition insulating barrier 31 under the light irradiation device L of left side by the time carry out drying.

Secondly in Fig. 4 (c), when basal disc 3 is mobile forward once more, slurry nozzle C, conductor paste nozzle E, central authorities and right side light irradiation device L work.

By slurry injection apparatus C, on the regulation zone on above-mentioned partition insulating barrier 31 and the conductor layer 32, spray ceramic slurry and form insulating barrier 33, after by light irradiation device L this insulating barrier 33 being carried out drying, when basal disc 3 under conductor paste injection apparatus E by the time, on the not coated zone of above-mentioned insulating barrier 33, spray conductor paste by this conductor paste nozzle E and form through hole electrode 34.This through hole electrode 34 carries out drying by right side light irradiation device L.

Secondly in Fig. 4 (d), when basal disc 3 is replied when mobile once more, conductor paste nozzle E, slurry nozzle C, central authorities and left side light irradiation device L work.

By this conductor paste nozzle E, on insulating barrier 33 and through hole electrode 34, spray conductor paste and form the conductor layer 32 that constitutes by the regulation conductive pattern, after by light irradiation device L this conductor layer 32 being carried out drying, when basal disc 3 passes through under slurry nozzle C, spray ceramic slurry by this slurry nozzle C on above-mentioned conductor layer 32 not coated zones and form partition insulating barrier 31, this partition insulating barrier 31 carries out drying by left side light irradiation device L.

After the above-mentioned figure (a)～(d), the laminated body A3 that is used for inductance of the thin layer S3 that forms by the conductor layer 32 that repeats figure (c) that basal disc 3 once moves back and forth (d), can access to have through hole electrode 34 and insulating barrier 31,33 by lamination.

If according to this 3rd embodiment, by drying device each aspect is carried out drying during then because of each formation insulating barrier or conductor layer, so can improve partition insulating barrier 31, conductor layer 32, the coating or the printing precision of insulating barrier 33 and through hole electrode 34.

Fig. 5 is the 4th embodiment of the 1st invention, and expression is used for the manufacturing installation of laminated body A4 of electric capacity, and it has on interval path 1a and disposes light irradiation device L in the same manner with above-mentioned the 3rd embodiment, slurry nozzle C, the formation of conductor paste nozzle E.

In this 4th embodiment, carry out the flow chart of (a)～(d) among Fig. 5.

In Fig. 5 (a) when basal disc 3 carry out from platform 4 initial when mobile forward, slurry nozzle C, conductor paste nozzle E, central authorities and right side light irradiation device L work.

Spray ceramic slurry forms the regulation area on basal disc 3 insulating barrier 40 by slurry nozzle C, when this base insulating layer 40 under central light irradiation device L by the time carry out drying, when insulating barrier 40 passes through under conductor paste nozzle E then, spray conductor paste by this conductor paste nozzle E and form the conductor layer 42 that constitutes by the conductive pattern of stipulating.

When this conductor layer 42 under the light irradiation device L of right side by the time carry out drying.

In Fig. 5 (b), reply when mobile slurry injection apparatus C and left side light irradiation device L work when above-mentioned basal disc 3.

By this slurry nozzle C, imbed and spray ceramic slurry between the conductor layer 42 on the above-mentioned insulating barrier 40 like that and form partition insulating barrier 41, when this partition insulating barrier 41 under the light irradiation device L of left side by the time carry out drying.

And, once reciprocal Fig. 5 of basal disc 3 (a) (b) in, form the thin layer S4 that forms by conductor layer 42 and insulating barrier 40,41.

After this, by repeating above-mentioned Fig. 5 (a) Fig. 5 (c) (b) continuously (d) ... operation, the laminated body A4 that is used for electric capacity of a plurality of thin layer S4 that produced lamination.

In this 4th embodiment, also can improve partition insulating barrier 41, the coating or the printing precision of conductor layer 42 and insulating barrier 40.

Fig. 6 is the 5th embodiment of the 1st invention, expression is used for the manufacturing installation of the laminated body A5 of inductance, it has substantial middle at interval path 1a and partly sets light irradiation device L as drying device, at its left side (platform 4 one sides) configuration slurry nozzle C, the formation of (platform 5 one sides) configuration conductor paste nozzle E on its right side.

In this 5th embodiment, carry out the flow chart of (a)～(e) among Fig. 6.

In Fig. 6 (a) when basal disc 3 carry out from platform 4 initial when mobile forward, slurry nozzle C, light irradiation device L and conductor paste nozzle E all work.

Spray ceramic slurry forms the regulation area on basal disc 3 base insulating layer 50 by slurry nozzle C, when this base insulating layer 50 under light irradiation device L by the time carry out drying, when base insulating layer 50 is passed through under conductor paste nozzle E then, spray conductor paste by this conductor paste nozzle E and form the conductor layer 52 that constitutes by the regulation conductive pattern.

In Fig. 6 (b), reply when mobile light irradiation device L and slurry nozzle C work when above-mentioned basal disc 3.

The above-mentioned conductor layer 52 that forms by Fig. 6 (a) under light irradiation device L by the time carry out drying after, by slurry nozzle C, imbed and spray ceramic slurry between the conductor layer 52 on the above-mentioned base insulating layer 50 like that and form partition insulating barrier 51.

Secondly in Fig. 6 (c), when basal disc 3 was mobile forward once more, light irradiation device L and conductor paste nozzle E worked.

When the above-mentioned insulating barrier 51 that forms by Fig. 6 (b) under light irradiation device L by the time carry out drying after, when from conductor paste nozzle E down by the time, spray conductor paste by this conductor paste nozzle E and on the assigned position on the above-mentioned conductor layer 52, form through hole electrode 54.

Secondly in Fig. 6 (d), when basal disc 3 is replied when mobile slurry nozzle C, light irradiation device L work once more.

When the above-mentioned through hole electrode 54 that forms by Fig. 6 (c) under light irradiation device L by the time carry out drying after, on above-mentioned through hole electrode 54 not coated zones, spray ceramic slurry by slurry nozzle C and form insulating barrier 53.

In Fig. 6 (e), basal disc 3 carries out moving forward once more, light irradiation device L and conductor paste nozzle E work when this is mobile forward.

After the insulating barrier 53 that is formed by Fig. 6 (d) carries out drying by light irradiation device L, spray conductor paste by conductor paste nozzle E at above-mentioned insulating barrier 53 with above the through hole electrode 54 and form the conductor layer 52 that constitutes by the regulation conductive pattern.

After above-mentioned Fig. 6 (a)～(e), the laminated body A5 that is used for inductance of the thin layer S5 that constitutes by the conductor layer 52 that repeats the figure (b)～(e) that basal disc 3 secondaries move back and forth, can access to have through hole electrode 54 and insulating barrier 51,53 by lamination.

If according to this 5th embodiment, the process number that then is used to form thin layer S5 becomes many, but can make slurry nozzle C, conductor paste nozzle E, and the number of light irradiation device L is minimum, thereby can shorten the length of interval path 1a.

Fig. 7 is the 6th embodiment of the 1st invention, expression is used for the manufacturing installation of the laminated body A6 of electric capacity, it has on interval path 1a, is configured in the slurry nozzle C in light irradiation device L left side in the same manner with above-mentioned the 5th embodiment, in the formation of the conductor paste nozzle E on light irradiation device L right side.

In this 6th embodiment, carry out the flow chart of (a)～(d) among Fig. 7.

In Fig. 7 (a), carry out initial when mobile forward from platform 4 when basal disc 3, slurry nozzle C, light irradiation device L and conductor paste nozzle E all work, at first, spray ceramic slurry forms the regulation area on basal disc 3 insulating barrier 60 by slurry nozzle C, when this insulating barrier 60 under light irradiation device L by the time carry out drying.

When insulating barrier 60 passes through under conductor paste nozzle E then, spray conductor paste by this conductor paste nozzle E and form the conductor layer 62 that constitutes by the conductive pattern of stipulating.

In Fig. 7 (b), reply when mobile light irradiation device L and slurry nozzle C and work when above-mentioned basal disc 3.

The above-mentioned conductor layer 62 that forms by Fig. 7 (a) under light irradiation device L by the time carry out drying after, by slurry nozzle C, imbed and spray ceramic slurry between the conductor layer 62 on the above-mentioned insulating barrier 60 like that and form partition insulating barrier 61.

Secondly in Fig. 7 (c), do not arrive the short interval of position in the way of platform 5 at basal disc 3, in detail, basal disc 3 moves back and forth light irradiation device L and slurry nozzle C work during this interval from platform 4 to the position by light irradiation device L.

And, in this short interval when mobile forward, the above-mentioned partition insulating barrier 61 that forms by Fig. 7 (b) under light irradiation device L by the time carry out drying, when basal disc 3 passes through under slurry nozzle C when answer is mobile, spray ceramic slurry by this slurry nozzle C and on above-mentioned conductor layer 62, form insulating barrier 60.

After this in Fig. 7 (d), basal disc 3 carries out moving forward, light irradiation device L and conductor paste nozzle E work when this is mobile forward.

After the insulating barrier 60 that is formed by Fig. 7 (c) carries out drying by light irradiation device L, on above-mentioned insulating barrier 60, spray conductor paste by conductor paste nozzle E and form the conductor layer 62 that constitutes by the conductive pattern of stipulating.

After above-mentioned Fig. 7 (a)～(d), by repeating above-mentioned Fig. 7 (b)～(d), the laminated body A6 that is used for electric capacity of the thin layer S6 that forms by conductor layer 62 and insulating barrier 60,61 that can access lamination.

In this 6th embodiment, also can make slurry nozzle C, conductor paste nozzle E, the number of light irradiation device L is minimum, thereby can shorten the length of interval path 1a.

Fig. 8 is the 7th embodiment of the 1st invention, and expression is used for the laminated body manufacturing apparatus of inductance, is the situation of making the through hole that is used to form through hole electrode of laser drilling device P in detail.

That is, it has on interval path 1a except the configuration slurry nozzle C suitable with above-mentioned the 5th embodiment, outside light irradiation device L and the conductor paste nozzle E, has also disposed the formation of laser drilling device P.With slight gap and be located on the direction of transversal above-mentioned interval path 1a, each laser head is connected with unillustrated laser generator among the figure with a plurality of such laser drilling device P.

In this 7th embodiment, carry out the flow chart of (a)～(e) among Fig. 8.

In Fig. 8 (a), carry out initial when mobile forward from platform 4 when basal disc 3, slurry nozzle C, light irradiation device L and conductor paste nozzle E work, spray ceramic slurry forms the regulation area on basal disc 3 base insulating layer 70 by slurry nozzle C, when this base insulating layer 70 under light irradiation device L by the time carry out drying.

When base insulating layer 70 is passed through under conductor paste nozzle E then, spray conductor paste by this conductor paste nozzle E and form the conductor layer 72 that constitutes by the regulation conductive pattern.

In Fig. 8 (b), reply when mobile light irradiation device L and slurry nozzle C work when above-mentioned basal disc 3.

The above-mentioned conductor layer 72 that forms by Fig. 8 (a) under light irradiation device L by the time carry out drying after, by slurry nozzle C, imbed and spray ceramic slurry between the conductor layer 72 on the above-mentioned base insulating layer 70 like that and form partition insulating barrier 71.

Secondly in Fig. 8 (c), when basal disc 3 is mobile forward once more, slurry nozzle C, light irradiation device L and above-mentioned laser drilling device P work.

When basal disc 3 from slurry nozzle C down by the time, slurry nozzle C sprays ceramic slurry and covers formation insulating barrier 73 above above-mentioned partition insulating barrier 71 and conductor layer 72 whole, when this insulating barrier 73 under light irradiation device L by the time carry out drying.

Secondly, when basal disc 3 passes through, on the assigned position of above-mentioned insulating barrier 73, get the through hole 75 that connects above-mentioned conductor layer 72 by this laser drilling device P under laser drilling device P.

Secondly in Fig. 8 (d), basal disc 3 begins to reply mobile from platform 5, but do not get back to the short interval of position in the way of platform 4 at basal disc 3, in detail, basal disc 3 is replied the interval from platform 5 to the position by light irradiation device L and is moved and move forward, light irradiation device L and conductor paste nozzle E work during this.

And, when this short interval answer is mobile, when under conductor paste nozzle E, passing through, sprays the conductor paste filling by this conductor paste nozzle E and advance in the above-mentioned through hole 75 to form through hole electrode 74, this through hole electrode 74 carries out drying by light irradiation device L.On the other hand, in short interval, carry out when mobile forward, by conductor paste nozzle E at insulating barrier 73 with form the conductor layer 72 of predetermined pattern above the through hole electrode 74.

After this in Fig. 8 (e), reply when mobile slurry nozzle C, light irradiation device L work when basal disc 3.

When the above-mentioned conductor layer 72 that forms by Fig. 8 (d) under light irradiation device L by the time carry out drying after, on above-mentioned conductor layer 72 not coated zones, spray ceramic slurry by slurry nozzle C and form insulating barrier 71.

After above-mentioned Fig. 8 (a)～(e),, can access the laminated body that be used for inductance identical with above-mentioned the 5th embodiment by repeating above-mentioned Fig. 8 (c)～(e).

In addition, this 7th embodiment is to replace at the 1st embodiment, the 3rd embodiment, the formation of the through hole electrode that illustrates among the 5th embodiment also can be adopted the example of laser drilling device, situation according to the 5th embodiment is illustrated, but also goes for the 1st embodiment and the 3rd embodiment.

Fig. 9 is the 8th embodiment of the 1st invention, and expression is used for the laminated body manufacturing apparatus of inductance, is the situation of setting up false compression bonding apparatus on above-mentioned interval path 1a in detail.

In false compression bonding apparatus, can use the pressing plate that can move up and down and by pressure roller.In this 8th embodiment, be illustrated in the situation that sets on the interval path 1a of the 1st embodiment by pressure roller R for example.

This 8th embodiment (Fig. 9) is because have the identical flow chart of flow chart with the 1st embodiment shown in Figure 2 that has stated, so for convenience of explanation, add identical label and omission explanation in the drawings to them, but between central optical irradiation unit L and right conductor cream nozzle E, can set up or down, should in Fig. 9 (c), carry out work (moving down) by pressure roller R by pressure roller R.

Promptly, when carrying out respectively the working of above-mentioned Fig. 9 (c), the insulating barrier 13 that has formed through hole electrode 14 under the light irradiation device L by after carrying out drying, be moved down into by pressure roller R and carrying out forward by pushing the top of through hole electrode 14 and insulating barrier 13 thin layer being carried out false crimping on the basal disc 3 that moves.By this false crimping, homogenize for fine uneven evenly realization that on thin layer, produces, and improved closely then property with the thin layer of lower floor.

In addition, this false compression bonding apparatus has been described in the situation of the 1st embodiment, but obviously also has been suitable for, again, also can at random set configuration for other embodiment.

Figure 16 represents the good form of above-mentioned false compression bonding apparatus.

In Figure 16, by by pressure roller R to can be configured in with rotating freely holding components 100 ' on cylinder surface implement the atomic little surface treatment of adherence, can make to have adhesive Dust-proof rotary drum 100 and this surface and contact with rotating freely, the contact condition that makes both constant but can be provided with up or down holding components 100 '.

Above-mentioned by pressure roller R when the work as mentioned above by push through hole electrode 14 and insulating barrier 13 above thin layer is carried out false crimping, and when through hole electrode 14 and insulating barrier 13 are peeled off the particulate sheet, remove from thin layer by this particulate sheet is adhered to from the teeth outwards, attached to by the particulate sheet on the pressure roller R from transfer to the surface of Dust-proof rotary drum 100 by pressure roller R with high adhesion.

Then, the particulate sheet of transferring to Dust-proof rotary drum 100 can take off cleaning from this Dust-proof rotary drum 100 in due course and fall, or preferably removes the particulate sheet by peeling member (not drawing among the figure) is contacted with Dust-proof rotary drum 100.

In the above-described embodiments, we have illustrated and have adopted the situation of the slurry nozzle of ink-jetting style to form device as insulating barrier, but also can adopt the slurry head C ' of employing scraper mode as shown in figure 17 and/or ceramic slurry is coated on painting drum mode on the contact-making surface of this cylinder by the cylinder rotation.

Particularly as base insulating layer 10, insulating barrier 20 grades are such, when being coated with ceramic slurry all sidedly in the regulation zone, can adopt scraper mode and painting drum mode.Again, even if when back fillings such as forming conductor layer is coated with the partition insulating barrier, also can adopt the scraper mode by make intensive dryings such as conductor layer by drying device.

Again, in the above-described embodiments, we have illustrated that basal disc 3 forms the situation of thin layer at 1 to 2 time during back and forth, but in order to increase the bed thickness of ceramic slurry, also can increase reciprocal time arbitrarily.

In addition, this 1st invention is as long as along its aim, be not limited to the record of embodiment, can suitably change above-mentioned insulating barrier form device etc. each device set number, flow chart etc.

Below we illustrate the laminated body manufacturing apparatus of the 2nd invention of Figure 18～shown in Figure 28, Figure 18～all the summaries of Figure 20 indication device, in Figure 18, casing 4 is by on the basket stylobate part 4a of the wide about 2m of horizontal stroke, with left and right sides wall 4b, 4b and basket back wall part 4c are assembled into one, firm supporting wall 4d are provided in this back wall part 4c go up to constitute, and can install two in front with opening and closing and cut apart or three transparent cover 4e of cutting apart shape.

Again, casing 4 sets display part and control desk in the suitable place of front one side of as shown in the figure basket stylobate part 4a etc., and configuration control cabinet and electrical power wiring assembly (omitting among the figure) etc. in basket stylobate part 4a and the basket back wall part 4c.

Said machine casing 4 is provided with operation post 5 at the upper part of basket stylobate part 4a.

Operation post 5 is the platforms that are made of the some small sizes on above-mentioned basket stylobate part 1, carry and fit over along on the left and right rail 15 of fore-and-aft direction extension, it can move in short distance along fore-and-aft direction (Y direction), and pass through by servo motor, the drive source M that impulse motor, stepper motor constitute and move back and forth along Y direction by these motor drive shaft rotating (screw shaft) 35.

Again, operation post 5 lays front and back two guide rails 25,25 at interval abreast with above-mentioned supporting wall 4d in the above, uploads at these two guide rails 25,25 and establishes movable table 2, and movable table 2 can move back and forth along left and right directions (X-direction) along this guide rail 25,25.

Movable table 2 is passed through by servo motor, impulse motor, the drive source M that stepper motor constitutes and controlled along moving back and forth of X-direction by these motor drive shaft rotating (screw shafts) 45 by air slide 2a, sets the basal disc 3 of Stainless Steel system on this movable table 2.

So, basal disc 3 is moved back and forth in the regulation interval along X-direction along above-mentioned supporting wall 4d abreast by above-mentioned drive source M and driving shaft 45, in short distance, move back and forth along Y direction by above-mentioned drive source M and driving shaft 35, and move up and down by above-mentioned air slide 2a.

Above-mentioned basal disc 3 is one distolateral ST at operation post 5 along moving back and forth of X-direction ₁(solid line position of Figure 18) and other end side stage ST ₂Move back and forth in the interval of (two one scribing position of Figure 18).

And moving back and forth and move up and down by the control device of unillustrated above-mentioned control cabinet among the figure of basal disc 3 controlled, and can be adjusted the data of this control device by above-mentioned control desk part.

On the other hand, on the supporting wall 4d of above-mentioned basket back wall part 4c, set the holding components of forming by two steady arms 17,17 of configuration at interval in the upper and lower 7, and between the steady arm 17,17 of each group, set nut bore 27.

Holding components 7, along a plurality of group (in the drawings example are 7 group) of directions X with predetermined distance configuration holding components 7, make these each steady arms horizontal outstanding on operation post 5, utilize these holding componentss 7, can load onto respectively and install 1 with unloading to a plurality of insulating barrier formation unit that form device as insulating barrier, the conductor layer that forms device as conductor layer forms the unit, drying unit as drying device, as the perforation unit of perforating device, as the false crimping unit and the camera unit of false compression bonding apparatus.Specifically, insulating barrier forms the unit, and conductor layer forms the unit and drying unit is essential, they one or more must be installed, but perforation unit, false crimping unit and camera unit selectively are installed as required.

We have enumerated at above-mentioned insulating barrier and have formed in the unit, use slurry injection unit (the being the slurry nozzle in detail) C that sprays ceramic slurry with ink-jetting style, form in the unit at above-mentioned conductor layer, use conductor paste injection unit (the being the conductor paste nozzle in detail) E that sprays conductor paste with ink-jetting style, in above-mentioned drying unit, use the example that ceramic slurry and conductor paste is dried to be not clamminess the light irradiation unit L of such semi-harden state by rayed.

Slurry injection unit C is with slight gap and establish a plurality of inkjet nozzles and constitute, and is same from the nozzle ejection pottery slurry of selecting, and conductor paste injection unit E is also with slight gap and establish a plurality of inkjet nozzles and constitute, from the nozzle ejection conductor paste of selecting.

Again, we have enumerated in above-mentioned perforation unit, use is with slight gap and establish the laser drilling device P that a plurality of laser drilling heads constitute, in above-mentioned false compression bonding apparatus, use is used the example of the ccd video camera unit Q that is made of ccd video camera by the cylinder crimping unit that constitutes by pressure roller R that can move up and down in above-mentioned camera unit.

Laser drilling unit P couples together above-mentioned each laser cell and laser generator, and the laser cell emission laser from selecting punches on insulating barrier.

Cylinder crimping unit R push at the appropriate time the thin layer that constitutes by insulating barrier that forms and conductor layer above carry out false crimping.

Ccd video camera unit Q makes a video recording to the surperficial image of above-mentioned thin layer at the appropriate time and is transmitted to image-processing system.

Above-mentioned each unit, be slurry injection unit C, conductor paste injection unit E, light irradiation unit L, laser drilling unit P, cylinder crimping unit R and ccd video camera unit Q have the identical structure to the mounting portion 37 of holding components 7 that forms on the first half separately.

Promptly, each mounting portion 37 has and the steady arm 17 of above-mentioned holding components 7 rectangle of equal length roughly, to get two installing hole 37a that connect at the rectangle length direction, 37a up and down at interval, and at two installing hole 37a, axis hole 37b is got at the rectangle length direction in the centre of 37a with connecting.And, at above-mentioned installing hole 37a, in the 37a, standing shape is installed and can collects the tubular guard ring 37d (please refer to Figure 21) of the fine ball 37c of diameter rotatably.

The above-mentioned C that respectively installs, E, L, P, R and Q, when using them, the steady arm 17 of above-mentioned holding components 7 is plugged in the guard ring 37d of their mounting portions 37 separately and connects installing hole 37a like that, after this, by fastening bolt B is inserted axis hole 37b, front end is screwed in the nut bore 27 of supporting wall 4d, mounting portion 37 is fixed on the supporting wall 4d tightly, thereby each device is placed on the assigned position.

And, can extract mounting portion 37 from steady arm 17 by pulling up above-mentioned fastening bolt B.That is, can load and unload each unit, or replace each unit.

Secondly, Figure 22 represents other embodiment (adding that on this holding components label 47 is illustrated) of above-mentioned holding components 7.

In Figure 22, each holding components 47 be on the both sides, bottom of the rectangular slab of suitable thickness, form rail portion 7a and in front middle body the holding components of nut bore 7b is set.

Fixedly on operation post 5, give prominence to a plurality of holding componentss 47 and be located on the supporting wall 4d of above-mentioned basket back wall part 4c on shape ground with predetermined distance along X-direction horizontally.

On the other hand, above-mentioned each unit C, E, L, P, the embedded part 7c that each mounting portion 57 grafting of R and Q embed the rail portion 7a of above-mentioned holding components 47 forms along length direction, and assembles up with the baffle plate 7d that is connected previously of above-mentioned holding components 47 at front end integratedly, can rotationally fastening bolt B be installed on this baffle plate 7d.

With above-mentioned each unit C, E, L, P, the embedded part 7c of R and Q mounting portion 57 separately pegs graft and is embedded into the rail portion 7a of holding components 47, baffle plate 7d by the front that is pressed in holding components 47, is screwed in nut bore 7b with fastening bolt B and fixes, go up the above-mentioned C that respectively installs thereby be fixed on supporting wall 4d by this mounting portion 57, E, L, P, R and Q are placed on the assigned position.

And, in Figure 18 the 1st embodiment of the 2nd invention, expression is provided in platform ST with light irradiation unit L ₁And ST ₂The substantial middle part in interval, dispose conductor paste injection unit E and slurry injection unit C respectively in its both sides, at platform ST ₁The formation of top configuration ccd video camera unit Q.

In addition, label 80 shown in Figure 180 is bonding liquid baths from ceramic slurry to slurry injection unit C that supply with, in figure, and the 90th, to the conductor paste groove of conductor paste injection unit E supply conductor paste.

The 1st embodiment of the 2nd invention is a situation of making the laminated body that is used for inductance, and its flow chart is described by Figure 23.

In Figure 23, basal disc 3 is from platform ST ₁Move to platform ST ₂The time be traveling time forward, be the answer traveling time in the other direction when mobile, expression light irradiation unit L, conductor paste injection unit E, slurry injection unit C and ccd video camera unit Q, omit their mounting portions 37,57 separately, be coated with the operating state of each parts of their bottoms or basal disc 3 operating state when arriving.

In the 1st embodiment, carry out the flow chart of (a)～(e) among Figure 23.

In Figure 23 (a), carry out initial when mobile forward when basal disc 3, left side slurry injection unit C and light irradiation unit L work, spray ceramic slurry forms the regulation area on basal disc 3 base insulating layer 100 (details please refer to Figure 10) by this slurry injection unit C, by light irradiation unit L this insulating barrier 100 is carried out drying then, make it become the semi-harden state (details please refer to Figure 15) that is not clamminess such.

In Figure 23 (b), reply when mobile right side slurry injection unit C, conductor paste injection unit E and light irradiation unit L work when above-mentioned basal disc 3.

Form partition insulating barrier 101 (details please refer to Figure 11) by spraying ceramic slurry on the zone outside the conductive pattern part 102a of this slurry injection unit C on removing above-mentioned base insulating layer 100, then, when basal disc 3 passes through under conductor paste injection unit E, spray conductor paste by conductor paste injection unit E, on above-mentioned conductive pattern part 102a, form conductor layer 102 (details please refer to Figure 12).

After this when basal disc 3 passes through light irradiation unit L, make the above-mentioned partition insulating barrier 101 and conductor layer 102 dryings that on predetermined pattern, form.

Get back to platform ST when basal disc 3 again, ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 101 of formation and the surface of conductor layer 102.

In Fig. 2 (c), carry out when mobile left side slurry injection unit C, conductor paste injection unit E and light irradiation unit L work once more forward when basal disc 3 then.

By slurry injection unit C, spray ceramic slurry on the zone outside the through hole electrode part 104a on removing above-mentioned partition insulating barrier 101 and conductor layer 102 and form insulating barrier 103 (details please refer to Figure 13), then, when basal disc 3 passes through under conductor paste injection unit E, spray conductor paste by this conductor paste injection unit E, on above-mentioned through hole electrode part 104a, form through hole electrode 104 (details please refer to Figure 14).

And, in above-mentioned Figure 23 (a), form the thin layer of base insulating layer 100, on it, once reciprocal Figure 23 (b) of basal disc 3 (c) in, form by conductor layer 102 with through hole electrode 104 and the thin layer S7 that constitutes by insulating barrier 101,103.

After this, by repeating above-mentioned Figure 23 (b) Figure 23 (d) (c) continuously (e) ... operation, the laminated body A7 that is used for inductance of a plurality of thin layers that produced lamination.

In addition, in above-mentioned Figure 23 (b) or Figure 23 (d), the surperficial image of making a video recording is transmitted to image-processing system (not drawing among the figure), detecting insulating barrier 101,103 has free of pinholes and conductor layer 102,104 to have or not broken string, when detecting sometimes, make the thin layer of operation work Halfway Stopping from basal disc 3 eliminatings are made, and slurry injection unit C or conductor paste injection unit E are checked, replace the blocked bad inkjet nozzle of spray orifice.

Figure 24 is the 2nd embodiment of the 2nd invention, and expression manufacturing is used for the situation of the laminated body A8 of electric capacity, has at platform ST ₁And ST ₂Between substantial middle partly set light irradiation unit L, at platform ST ₁Side only disposes slurry injection unit C, at opposite side configuration conductor paste injection unit E and slurry injection unit C, at platform ST ₁The formation of top configuration ccd video camera unit Q.

That is, be used for the situation of electric capacity, because do not need above-mentioned through hole electrode, so omit the conductor paste injection unit E of a side.

In this 2nd embodiment, carry out the flow chart of (a)～(d) among Figure 24.

In Figure 24 (a), carry out initial when mobile forward when basal disc 3, left side slurry injection unit C and light irradiation unit L work, C sprays ceramic slurry forms the regulation area on basal disc 3 insulating barrier 120 by this slurry injection unit, by light irradiation unit L insulating barrier 120 is carried out drying then.

In Figure 24 (b), reply when mobile the slurry injection unit C on right side, conductor paste injection unit E and light irradiation unit L work when above-mentioned basal disc 3.

By this slurry injection unit C, on the regulation zone on the above-mentioned insulating barrier 120, spray ceramic slurry and form partition insulating barrier 121, secondly, when basal disc 3 passes through under conductor paste injection unit E, spray conductor paste by this conductor paste injection unit E, on the not coated zone of above-mentioned partition insulating barrier 121, form conductor layer 122.

After this, when basal disc 3 passes through, make the above-mentioned partition insulating barrier 121 and conductor layer 122 dryings that on predetermined pattern, form under light irradiation unit L.

Get back to platform ST when basal disc 3 again, ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 121 of formation and the surface of conductor layer 122, and is same as described above, will be used to check that the surperficial image of inkjet nozzle is transmitted to image-processing system.

And, once reciprocal Figure 24 of basal disc 3 (a) (b) in, form the thin layer S2 that constitutes by conductor layer 122 and insulating barrier 120,121.

After this, by repeating above-mentioned Figure 24 (a) Figure 24 (c) (b) continuously (d) ... operation, the laminated body A8 that is used for electric capacity of a plurality of thin layer S2 that produced lamination.

Figure 25 is the 3rd embodiment of the 2nd invention, and expression manufacturing is used for the situation of the laminated body A9 of inductance, has at platform ST ₁And ST ₂Between substantial middle part and compartment of terrain, the left and right sides thereof set light irradiation unit L, at one side (platform ST ₁Side) light irradiation unit L, configuration slurry injection unit C between the L, and at the light irradiation device L of opposite side, configuration conductor paste injection unit E between the L is at platform ST ₁The formation of top configuration ccd video camera unit Q.

In this 3rd embodiment, carry out the flow chart of (a)～(d) among Figure 25.

In Figure 25 (a) when basal disc 3 carry out initial when mobile forward, slurry injection unit C, conductor paste injection unit E, central authorities and right side light irradiation unit L work.

Spray ceramic slurry forms the regulation area on basal disc 3 base insulating layer 130 by slurry injection unit C, when this base insulating layer 130 under central light irradiation unit L by the time carry out drying, then, when base insulating layer 130 is passed through under conductor paste injection unit E, spray conductor paste by this conductor paste injection unit E and form the conductor layer 132 that constitutes by the regulation conductive pattern.

When this conductor layer 132 under the light irradiation unit L on right side by the time carry out drying.

In Figure 25 (b), reply when mobile the light irradiation unit L work in slurry injection unit C and left side when above-mentioned basal disc 3.

By this slurry injection unit C, imbed and spray ceramic slurry between the conductor layer 132 on the above-mentioned base insulating layer 130 like that and form partition insulating barrier 131, when this partition insulating barrier 131 under the light irradiation unit L in left side by the time carry out drying.

Then, get back to platform ST when basal disc 3 ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 131 of formation and the surface of conductor layer 132, and is same as described above, will be used to check that the surperficial image of inkjet nozzle is transmitted to image-processing system.

Secondly in Figure 25 (c), when basal disc 3 is mobile forward once more, slurry injection unit C, conductor paste injection unit E, central authorities and right side light irradiation unit L work.

By slurry injection unit C, on the regulation zone on above-mentioned partition insulating barrier 131 and the conductor layer 132, spray ceramic slurry and form insulating barrier 133, after by light irradiation unit L this insulating barrier 133 being carried out drying, when basal disc 3 under conductor paste injection unit E by the time, on the not coated zone of above-mentioned insulating barrier 133, spray conductor paste by this conductor paste injection unit E and form through hole electrode 134.This through hole electrode 134 carries out drying by right side light irradiation unit L.

Secondly in Figure 25 (d), when basal disc 3 is replied when mobile once more, conductor paste injection unit E, slurry injection unit C, central authorities and left side light irradiation unit L work.

By this conductor paste injection unit E, on insulating barrier 133 and through hole electrode 134, spray conductor paste and form the conductor layer 132 that constitutes by the regulation conductive pattern, after by light irradiation unit L this conductor layer 132 being carried out drying, when basal disc 3 passes through under slurry injection unit C, on above-mentioned conductor layer 132 not coated zones, spray ceramic slurry by this slurry injection unit C and form partition insulating barrier 131.This partition insulating barrier 131 carries out drying by left side light irradiation unit L.

Then, get back to platform ST when basal disc 3 ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 131 of formation and the surface of conductor layer 132.

After above-mentioned Figure 25 (a)～(d), by repeating figure (c) that basal disc 3 once moves back and forth (d), the laminated body A9 that is used for inductance of the thin layer S3 that constitutes by conductor layer 132 with through hole electrode 134 and insulating barrier 131,133 that can access lamination.

If according to this 3rd embodiment, by light irradiation unit L each aspect is carried out drying during then because of each formation insulating barrier and conductor layer, so can improve partition insulating barrier 131, conductor layer 132, the coating or the printing precision of insulating barrier 133 and through hole electrode 134.

Figure 26 is the 4th embodiment of the 2nd invention, and expression manufacturing is used for the situation of the laminated body A10 of electric capacity, has at platform ST ₁And ST ₂Between substantial middle partly set light irradiation unit L, at its left side configuration slurry injection unit C, and at right side configuration conductor paste injection unit E, at platform ST ₁The formation of top configuration ccd video camera unit Q.

In this 4th embodiment, carry out the flow chart of (a)～(d) among Figure 26.

In Figure 26 (a), carry out initial when mobile forward when basal disc 3, slurry injection unit C, light irradiation unit L and conductor paste injection unit E all work, at first, spray ceramic slurry forms the regulation area on basal disc 3 insulating barrier 140 by slurry injection unit C, when this insulating barrier 140 under light irradiation unit L by the time carry out drying.

Then, when insulating barrier 140 passes through under conductor paste injection unit E, spray conductor paste by this conductor paste injection unit E and form the conductor layer 142 that constitutes by the regulation conductive pattern.

In Figure 26 (b), reply when mobile light irradiation unit L and slurry injection unit C work when above-mentioned basal disc 3.

The above-mentioned conductor layer 142 that forms by Figure 26 (a) under light irradiation unit L by the time carry out drying after, by slurry injection unit device C, imbed and spray ceramic slurry between the conductor layer 142 on the above-mentioned insulating barrier 140 like that and form partition insulating barrier 141.

Then, get back to platform ST when basal disc 3 ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 141 of formation and the surface of conductor layer 142.

Secondly in Figure 26 (c), do not arrive platform ST at basal disc 3 ₂The way in position short interval, in detail, basal disc 3 is from platform ST ₁In the interval of the position by light irradiation unit L, move back and forth light irradiation unit L and slurry injection unit C work during this.

And, in this short interval when mobile forward, the above-mentioned partition insulating barrier 141 that forms by Figure 26 (b) under light irradiation unit L by the time carry out drying, when basal disc 3 passes through under slurry injection unit C when answer is mobile, spray ceramic slurry by this slurry injection unit C and on above-mentioned conductor layer 142, form insulating barrier 140.

Get back to platform ST when basal disc 3 again, ₁The time, same as described above, above-mentioned ccd video camera unit Q work is made a video recording to the surface of the insulating barrier 140 that forms.

Secondly in Figure 26 (d), basal disc 3 carries out moving forward, light irradiation unit L and conductor paste injection unit E work when this is mobile forward.

After the insulating barrier 140 that is formed by Figure 26 (c) carries out drying by light irradiation unit L, on above-mentioned insulating barrier 140, spray conductor paste by conductor paste injection unit E and form the conductor layer 142 that constitutes by the conductive pattern of stipulating.

After above-mentioned Figure 26 (a)～(d), by repeating above-mentioned Figure 26 (b)～(d), the laminated body A10 that is used for electric capacity of the thin layer S4 that forms by conductor layer 142 and insulating barrier 140,141 that can access lamination.

In this 4th embodiment, also can make slurry injection unit C, conductor paste injection unit E, the number of light irradiation unit L is minimum, thereby can shorten the displacement of basal disc 3.

Figure 27 is the 5th embodiment of the 2nd invention, and expression manufacturing is used for the situation of the laminated body of inductance, is the situation of making the through hole that is used to form through hole electrode of laser drilling device P in detail.

That is, it has except the configuration slurry injection unit C suitable with above-mentioned the 2nd embodiment, and light irradiation unit L outside conductor paste injection unit E and the ccd video camera unit, has also set the formation of laser drilling device P.

In this 5th embodiment, carry out the flow chart of (a)～(e) among Figure 27.

In Figure 27 (a), carry out initial when mobile forward when basal disc 3, slurry injection unit C, light irradiation unit L and conductor paste injection unit E work, spray ceramic slurry forms the regulation area on basal disc 3 base insulating layer 150 by slurry injection unit C, when this base insulating layer 150 under light irradiation unit L by the time carry out drying.

When base insulating layer 150 is passed through under conductor paste injection unit E then, spray conductor paste by this conductor paste injection unit E and form the conductor layer 152 that constitutes by the regulation conductive pattern.

In Figure 27 (b), reply when mobile light irradiation unit L and slurry injection unit C work when above-mentioned basal disc 3.

The above-mentioned conductor layer 152 that forms by Figure 27 (a) under light irradiation unit L by the time carry out drying after, by slurry injection unit C, imbed and spray ceramic slurry between the conductor layer 152 on the above-mentioned base insulating layer 150 like that and form partition insulating barrier 151.

Then, get back to platform ST when basal disc 3 ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 151 of formation and the surface of conductor layer 152.

Secondly in Figure 27 (c), when basal disc 3 is mobile forward once more, slurry injection unit C, light irradiation unit L and above-mentioned laser drilling unit P work.

When basal disc 3 passes through under slurry injection unit C, slurry injection unit C sprays ceramic slurry and forms the whole top insulating barriers 153 that cover above-mentioned partition insulating barrier 151 and conductor layer 152, when this insulating barrier 153 under light irradiation unit L by the time carry out drying.

Secondly, when basal disc 3 passes through, on the assigned position of above-mentioned insulating barrier 153, get the through hole 155 that connects above-mentioned conductor layer 152 by this laser drilling unit P under laser drilling unit P.

Secondly in Figure 27 (d), basal disc 3 is from platform ST ₂Begin to reply and move, but do not get back to platform ST at basal disc 3 ₁The way in position short interval, in detail, basal disc 3 is from platform ST ₂Reply in the interval of the position by light irradiation unit L and move and move forward, light irradiation unit L and conductor paste injection unit E work during this.

And, reply in this short interval when mobile, when from conductor paste injection unit E down by the time, spray the conductor paste filling by this conductor paste injection unit E and advance in the above-mentioned through hole 155 to form through hole electrodes 154, this through hole electrode 154 carries out drying during by light irradiation unit L.On the other hand, in short interval, carry out when mobile forward, by conductor paste injection unit E at insulating barrier 153 with form the conductor layer 152 of predetermined pattern above the through hole electrode 154.

After this in Figure 27 (e), when basal disc 3 is replied when mobile slurry injection unit C, light irradiation unit L work.

When the above-mentioned conductor layer 152 that forms by Figure 27 (d) under light irradiation unit L by the time carry out drying after, on above-mentioned conductor layer 152 not coated zones, spray ceramic slurry by slurry injection unit C and form insulating barrier 151.

Then, get back to platform ST when basal disc 3 ₁The time, above-mentioned ccd video camera unit Q work is made a video recording to the insulating barrier 151 of formation and the surface of conductor layer 152.

After above-mentioned Figure 27 (a)～(e),, can access the laminated body that be used for inductance identical with above-mentioned the 2nd embodiment by repeating above-mentioned Figure 27 (c)～(e).

Figure 28 is the 6th embodiment of the 2nd invention, and the situation of the laminated body be used for inductance is made in expression, is that expression is set up by the situation as the cylinder crimping unit that constitutes by pressure roller R of false compression bonding apparatus in detail.Particularly, be illustrated in the situation of appending cylinder crimping unit in the configuration formation of the 1st embodiment for example.

Because stated Figure 28 of the flow chart that is this 6th embodiment according to Figure 23, so for convenience of explanation, add identical label and omission explanation in the drawings to them, but can set cylinder crimping unit R up or down between central optical illumination unit L and right conductor cream injection unit E, this cylinder crimping unit R is being carried out work (moving down) in Figure 28 (c).

Promptly, when carrying out respectively the working of above-mentioned Figure 28 (c), the insulating barrier 103 that has formed through hole electrode 104 under light irradiation unit L by the time carry out drying after, cylinder crimping unit R is moved down into is carrying out by push through hole electrode 104 and insulating barrier 103 top thin layer being carried out false crimping on the basal disc 3 that moves forward.

By this false crimping, fine uneven evenly realization that produces on thin layer homogenized, and improved closely then property with the thin layer of lower floor.

Because the concrete structure of above-mentioned cylinder crimping unit R is identical with above-mentioned Figure 16, so omit specifying to them.

In addition, in the various embodiments described above, each mobile forward or reply when mobile when basal disc 3, the basal disc 3 that moves down that is accompanied by movable table 2 moves down, this moves down distance and is equivalent to forward to move or to reply the insulating barrier that forms when mobile, the thickness of conductor layer, always keep each unit and above the cambium layer between constant distance.

Again, above-mentioned basal disc 3 can move the distance than the mobile weak point of the Y direction of movable table 2, but after can being used for being arranged on each unit on the holding components, the length (length of Y direction) of advancing inwards with each unit is adjusted the position that basal disc is positioned at its below accordingly.

And, in the various embodiments described above, insulating barrier is formed the unit, and the concrete structure of each unit of conductor layer formation unit etc. sets, flow chart is illustrated, but as long as along aim of the present invention, be not limited to the record of embodiment, can suitably change these and set, number, flow chart etc.

For example, forming the unit as insulating barrier can be the scraper mode, and the holding components that each unit is installed is not limited to the structure of Figure 20 or Figure 22, perhaps can be with the ccd video camera configuration of cells at platform ST ₂Make a video recording to surperficial image etc. when basal disc moves forward or reply when mobile in the top at every turn.

Secondly we illustrate Figure 29～the 3rd laminated body manufacturing apparatus of inventing shown in Figure 39, Figure 29 and Figure 30 represent the summary of manufacturing installation, on the vertical supporting wall 4f of the previous section that constitutes casing 4, going barrel 160 can be installed rotatably, and set feed mechanism 170 from carrier film f to above-mentioned going barrel 160 that supply with near below one side of this going barrel 160, directly below going barrel 160, set the laminated body recovering mechanism 180 that reclaims produced laminated body.

In casing 4, be provided with the motor M and the deceleration control system thereof that drive above-mentioned going barrel 160 together, again, do not draw among the figure, but disposed the slurry case of accommodating ceramic slurry, accommodate the conductor paste case of conductor paste, vacuum mechanism, control cabinet, and electrical power wiring assembly.

Going barrel 160 is by metal polygonal drum such as stainless steel (being exemplified as among the figure 12 dihedrals), smooth scope of operation 160a continuous on the periphery to going barrel 160 carries out zoning, gets the adsorption hole 161...... that is produced sucking action by vacuum on each scope of operation 160a.

Make this going barrel 160 rotate continuously or intermittently rotate and set going barrel like that by said motor, when this going barrel is supplied with carrier film f, this going barrel 160 is rotated from carrier film feed mechanism 170 continuously, this carrier film f is twisted on above-mentioned each scope of operation 160a that is laid on the periphery.

Again, in the halted state when going barrel 160 intermittently rotates, configuration is implemented the operation post of each operation or standby operation post facing to above-mentioned each scope of operation 160a, on these operation posts, suitably sets insulating barrier and forms device, conductor layer forms device, drying device, camera head, press device, false compression bonding apparatus, shearing device etc.

Specifically, we are at Figure 29, among Figure 31, illustrate to make going barrel 160 along intermittently rotation clockwise, with 1 position of its halted state as the 1st ST ₁, be the 2nd ST clockwise ₂, the 3rd ST ₃... the 12nd ST ₁₂Situation.

Above-mentioned ST ₁As preparation platform, ST ₂As the erecting bed of above-mentioned carrier film f, at ST ₃On set slurry injection unit C and ccd video camera unit Q, at ST ₄On set drying unit L, at ST ₅On set and push unit R, at ST ₆On set conductor paste injection unit E and ccd video camera unit Q, at ST ₇On set drying unit L.

Again, at above-mentioned ST ₈On set slurry injection unit C, conductor paste injection unit E and ccd video camera unit Q are at ST ₉On set drying unit L, at ST ₁₀On set false crimping unit R, at ST ₁₁On set shearing device, ST ₁₂Being located immediately at below going barrel 160, is the recovery platform that reclaims above-mentioned laminated body A.

Dispose above-mentioned each device, promptly insulating barrier forms unit C, and conductor layer forms unit E, drying unit L pushes unit R ", ccd video camera unit Q; false crimping unit R, cutting unit X can load and unload them and alternatively is installed on each support frame 4g that is contained on the above-mentioned supporting wall 4f.

Slurry injection unit C is with slight gap and establish a plurality of inkjet nozzles formations, is the example from the ink-jetting style of this nozzle ejection of selecting pottery slurry.

Equally, conductor paste injection unit E has from the ink-jetting style of the nozzle ejection conductor paste of selecting also with slight gap and establish a plurality of inkjet nozzles and constitute.

Represent that for example drying unit L uses the situation that ceramic slurry and conductor paste is dried to be not clamminess the drying machine of such semi-harden state by the heat air-supply.In addition, also can be with the drying machine that makes ceramic slurry and conductor paste drying by rayed as drying unit L.

" use rotation press pressure roller freely, have the formation same with foregoing invention, one in the face of carrying out homogenizing above the thin layer that is made of insulating barrier that forms and conductor layer, simultaneously pushes for press device R.

In above-mentioned slurry injection unit C and conductor paste injection apparatus E, can be on scope of operation 160a along X-direction (circumferencial direction of going barrel 160), Y direction (Width of going barrel 160) sets these inkjet nozzles movably and can control this amount of movement, simultaneously can set these inkjet nozzles movably and can control this amount of movement along the Z-direction that vertically moves up and down on scope of operation 160a (contact departure direction).

Again, pushing unit R " in, can X-direction and Z-direction set movably it by pressure roller.

Ccd video camera unit Q, reference mark on carrier film f described later or the initial insulating barrier that forms made a video recording be transmitted to image-processing system, therefore, in order to make above-mentioned slurry injection unit C, the position of conductor paste injection unit E and insulating barrier (face of coating object) overlaps, can be to this unit C, the X-direction of E and the position of Y direction are controlled.

False crimping unit R, wherein express the pressing plate 190 that moves up and down in scope of operation 160a upper edge Z-direction for example, by the decline of this pressing plate 190,, carry out false crimping above pushing the thin layer that constitutes by insulating barrier that on scope of operation 160a, forms and conductor layer to per 1 layer or a plurality of lamination layer.

Cutting unit X, wherein express on the scope of operation 160a cropper 210 that can set movably along X-direction and Z-direction for example, by the decline of this cropper 210, cut off the carrier film f on this scope of operation 160a, and it is separated with the carrier film f of other zoning.

Film feed mechanism 170, the membrane cylinder 171 of the carrier film f that constitutes from the synthetic resin film that is involved in by polyethylene terephthalate etc. takes out above-mentioned carrier film f and supplies with going barrel 160, lead arm 172 by what absorption kept carrier film f leading section, cropper 173 and tension roller 174 constitute.

Lead 2nd ST of arm 172 at going barrel 160 places ₂Nearby can contact and leave scope of operation 160a and can joltily dispose like that, when near the scope of operation 160a, extradite carrier film f (please refer to Figure 31) contiguously with the carrier film f that is keeping.

Above-mentioned going barrel 160 by the vacuum attraction of adsorption hole 161, holds behind the leading section of above-mentioned film f rotation continuously once, therefore carrier film f is laid on each scope of operation 160a with rotating a circle.

Above-mentioned cropper 173 cuts off carrier film f and they is separated in going barrel 160 rotations once stopping back.

Laminated body recovering mechanism 180 is configured in above-mentioned the 12nd ST at going barrel 160 places ₁₂On, by directly going barrel 160 below the recovery platform 181 of lifting moving and driving mechanism 182 move back and forth and the recovery arm 183 of opposite rotation constitutes to above-mentioned recovery platform 181.

This recovering mechanism 180 is in the final stage that forms laminated body on the carrier film f that is rotated in of the stated number by going barrel 160, at the 11st ST ₁₁Go up by cutting unit X and cut off isolated vectors film f, arrive the 12nd ST ₁₂, when stopping, the sucking action of this scope of operation 160a accepts attached to the laminated body A on the above-mentioned carrier film f by reclaiming platform 181, and by recovery arm 183 it is housed in the collection box 184 and (please refer to Figure 31).

Below, we are made the flow chart of laminated body A by above-mentioned going barrel 160 according to Figure 32 explanation.

At first, as mentioned above, rotate once continuously by going barrel 160, after laying carrier film f on each scope of operation 160a of going barrel 160 (please refer to Figure 31), when going barrel 160 intermittently rotated, beginning was by the flow chart of Figure 32 explanation then.In addition, Figure 32 explanation is used for the manufacturing situation of the laminated body of inductance.

In Figure 32 (a), when the scope of operation 160a of going barrel 160 stops at ST ₃When last, at this ST ₃Last slurry injection unit C work, this slurry injection unit C one side moves along X-direction, and one side is sprayed ceramic slurry forms the regulation area on carrier film f base insulating layer 220 (details please refer to Figure 34).

In Figure 32 (b), when above-mentioned scope of operation 160a moves to ST ₄When last, by this ST ₄Drying unit L such semi-harden state of the top drying of above-mentioned base insulating layer 220 being become be not clamminess.In Figure 32 (c), when above-mentioned scope of operation 160a moves to ST ₅The time, at this ST ₅, " work, contacting along X-direction with above-mentioned base insulating layer 220 by pressure roller of it moved to push unit R.Therefore, the micro concavo-convex injustice that produces on base insulating layer 220 with ink-jetting style is evenly realized homogenizing.

Secondly in Figure 32 (d), when above-mentioned scope of operation 160a moves to ST ₆The time, at this ST ₆Conductor paste injection unit E work, this conductor paste injection unit E one side moves one side along X-direction and spray conductor paste on base insulating layer 220, the conductor layer 222 that formation is made of predetermined pattern, and on the assigned position on the diagonal, form reference mark 221 (details please refer to Figure 35).In addition, have only and when rotating the initial intermittence of going barrel 160, just form reference mark 221.

In Figure 32 (e), when above-mentioned scope of operation 160a moves to ST ₇The time, by at this ST ₇Drying unit L to carrying out drying above the conductor layer 222.

Secondly in Figure 32 (f), when above-mentioned scope of operation 160a arrives ST ₈The time, at ST ₈Slurry injection unit C and conductor paste injection unit E work, this slurry injection unit C one side moves along X-direction sprays ceramic slurry formation partition insulating barrier 223 on the zone of one side outside removing above-mentioned conductor layer 222, again, conductor paste injection unit E one side moves one side injection conductor paste on the assigned position of above-mentioned conductor layer 222 along X-direction and forms through hole electrode 224 (details please refer to Figure 36).

In addition, make above-mentioned slurry injection unit C and conductor paste injection unit E work earlier, pass through ST ₈Ccd video camera unit Q said reference mark 221 is made a video recording, to this mark 221 is controlled as the slurry injection unit C of benchmark and X-axis-Y-axis coordinate of conductor paste injection unit E.

In Figure 32 (g), when above-mentioned scope of operation 160a moves to ST ₉The time, by this ST ₉Drying device L above-mentioned partition insulating barrier 223 and through hole electrode 224 are carried out drying.

After this, above-mentioned scope of operation 160a is at ST ₁₀～ST ₁₂～ST ₂Do not implement any operation ground and pass through, move to ST once more ₃

In Figure 32 (h), when above-mentioned scope of operation 160a stops at ST ₃The time, at this ST ₃Slurry injection unit C work, this slurry injection unit C one side are moved one side along X-direction and are sprayed ceramic slurry, form insulating barrier 225 on the current zone outside removing above-mentioned through hole electrode 224.

In addition, make above-mentioned slurry injection unit C work earlier, ST ₃Ccd video camera unit Q said reference mark 221 is made a video recording, X-axis-Y-axis coordinate of slurry injection unit C is controlled.

In Figure 32 (i), when above-mentioned scope of operation 160a moves to ST ₄The time, with similarly above-mentioned, by this ST ₄Drying device L to carrying out drying above the above-mentioned insulating barrier 225.

In Figure 32 (j), when above-mentioned scope of operation 160a moves to ST ₅The time, at this ST ₅Press device R " work, move along X-direction, and the micro concavo-convex injustice that produces above of insulating barrier 225 is carried out evenly by contacting with above-mentioned insulating barrier 225 simultaneously by the pressure roller one side of it.

In Figure 32 (k), when above-mentioned scope of operation 160a to ST ₆When mobile, at this ST ₆Conductor paste injection unit E work, this conductor paste injection unit E one side are moved one side along X-direction and spray conductor paste on through hole electrode 224 and insulating barriers 225, with similarly above-mentioned, form the conductor layer 222 that is made of predetermined pattern.

In addition, same as described abovely the position of conductor paste injection unit E is controlled by ccd video camera unit Q.

In Figure 32 (l), when above-mentioned scope of operation 160a moves to ST ₇The time, with above-mentioned Figure 32 (e) similarly, to carrying out drying above the conductor layer 222.

Secondly in Figure 32 (m), when above-mentioned scope of operation 160a arrives ST ₈The time, with above-mentioned Figure 32 (f) similarly, slurry injection unit C and conductor paste injection unit E work forms partition insulating barrier 223 and through hole electrode 224.

In Figure 32 (n), when above-mentioned scope of operation 160a moves to ST ₉The time, with above-mentioned Figure 32 (g) similarly, above-mentioned partition insulating barrier 223 and through hole electrode 224 are carried out drying.

After this, by repeating above-mentioned Figure 32 (h)～(n) stipulated number, a plurality of thin layers that are made of insulating barrier 223,225 and conductor layer 222,224 of lamination are still implemented next Figure 32 (o) proper time during this.

In Figure 32 (o), when above-mentioned scope of operation 160a moves to ST ₁₀When stopping, false compression bonding apparatus R work by the decline of this pressing plate 190, is implemented false crimping to pushing above the above-mentioned insulating barrier that forms on scope of operation 160a.Therefore, can improve closely then property between the thin layer.

In addition, the ST when the last rotation of above-mentioned going barrel 160 ₈, form partition insulating barrier 223 and through hole electrode 224 by slurry injection unit C and conductor paste injection unit E, and become the pseudo-insulating barrier 226 of the superiors.

Again, when the last rotation of above-mentioned going barrel 160 at above-mentioned Figure 32 (p) that is embodied as next operation in Figure 32 (o) back.

In Figure 32 (p), when above-mentioned scope of operation 160a moves to ST ₁₁When stopping, the cutter of shearing device X 210 descends, and cuts off and separates carrier film f on this scope of operation 160a.

And, by the laminated body A11 that is used for inductance of a plurality of thin layers of above-mentioned flow chart manufacturing lamination.

This is used for the laminated body A11 of inductance, at ST ₁₂, as mentioned above, the recovery platform 181 from scope of operation 160a extradites laminated body recovering mechanism 180 is housed in the collection box 184 by reclaiming arm 183.

In addition, in the mapping in the drawings, on thin layer, demonstrate conductive pattern seldom, form a plurality of patterns at thin layer like that but in fact can obtain a plurality of inductance from laminated body A11.

Again, in above-mentioned specification, we have illustrated that with a scope of operation 160a be the situation that benchmark is implemented flow chart in turn, but at ST ₃～ST ₉, in each scope of operation 160a of going barrel 160, implement each operation simultaneously by each device.

Figure 33 represents to be made by above-mentioned going barrel 160 flow chart of the laminated body that is used for electric capacity.

This situation that is used for the laminated body A12 of electric capacity is not have by the constituting of the through hole electrode of the above-mentioned flow chart explanation that is used for inductance, we only explanation at the ST suitable with it ₈Figure 33 (f), (m) with at the 2nd postrotational ST ₃Figure 33 (h) those places different with Figure 32, and omit explanation to other same processes part.

In Figure 33 (f), at above-mentioned ST ₈, disposing slurry injection unit C and conductor paste injection unit E, but in this operation, having only slurry injection unit C work, conductor paste injection unit E does not work.

That is, as scope of operation 160a arrival ST ₈The time, at this ST ₈Slurry injection unit C one side moves along X-direction simultaneously sprays ceramic slurry formation partition insulating barrier 223 on the zone outside the conductor layer 222 of formation in removing Figure 33 (d).

In addition, this operation is also identical with Figure 33 (m).

In Figure 33 (h), when above-mentioned scope of operation 160a stops at ST ₃The time, at this ST ₃Slurry injection unit C one side moves one side along X-direction and sprays ceramic slurry, the partition insulating barrier 223 that forms in above-mentioned Figure 33 (f) and whole insulating barriers 225 that upward form above the conductor layer 222.

And, if according to the flow chart of Figure 33, then can produce the laminated body A12 that is used for inductance of a plurality of thin layers that constitute by insulating barrier 223,225 and conductor layer 222 of lamination.

Secondly, Figure 37 represents other embodiment of manufacturing installation.

The manufacturing installation of Figure 37 possess with Figure 31 in the identical going barrel 160 that illustrates, film feed mechanism 170, laminated body recovering mechanism 180 forms the slurry injection dress unit C ' that uses the scraper mode in one of device but have at insulating barrier, in addition, append the formation of laser drilling device P.

That is, with above-mentioned preparation platform ST ₁As the erecting bed of above-mentioned carrier film f, at ST ₂On set the slurry injection apparatus C ' of scraper mode and ccd video camera unit Q, at ST ₃On set drying unit L, at ST ₄On set the laser drilling unit P that appends, and ST ₅～ST ₁₂Identical with above-mentioned Figure 31.

Slurry injection unit C ' will be coated on from the ceramic slurry of this scraper on the whole width of scraper and form insulating barrier (please refer to Figure 39), carry out work in operation shown in Figure 38 (a) with (h).

Laser drilling unit P is by with slight gap and establish a plurality of laser heads and constitute, and each laser head is connected with laser generator, and suitably selects the work of laser head by control section, launches laser from this laser head of selecting.

Above-mentioned laser drilling unit P just works after the 2nd rotation once not working in the rotation at first that going barrel 160 intermittently rotates.

Promptly, in flow chart shown in Figure 38, because laser drilling unit P does not work in once rotating at first, so Figure 38 (a)～(i), except by above-mentioned Figure 38 (a) of the ceramic slurry of slurry injection unit C ' coating (h), identical with the explanation of the operation (a)～(i) of Figure 32.And, Figure 38 (j) (k) in laser drilling unit P and push unit R and " implement operation as follows.

In Figure 38 (j), when the scope of operation 160a of going barrel 160 stops at ST ₄The time, at this ST ₄Laser drilling unit P work, P one side in this laser drilling unit moves one side in prescribed limit along X-direction, and at length the through hole electrode 224 upper part irradiating lasers that form in Figure 38 (f) make and expose this through hole electrode 224.

Promptly, in Figure 38 (h), to implement because by above-mentioned slurry injection unit C ', the through hole electrode 224 upper parts coating that forms in Figure 33 (f) also covers insulating barrier, so this partial insulating layer owing to laser radiation is dispersed, is exposed the operation of through hole electrode 224.

In Figure 38 (k), when above-mentioned scope of operation 160a moves to ST ₅The time, at this ST ₅" work, contacting with above-mentioned insulating barrier 225 simultaneously by the pressure roller one side of it moved along X-direction to push unit R.Therefore, in Figure 38 (j), make the slurry chip that disperses to insulating barrier attached to by removing from insulating barrier on the pressure roller.

In addition, after Figure 38 (k), produce the laminated body A11 that is used for inductance through the operation (l)～(q) identical with (k)～(p) that illustrated among Figure 32.

In the various embodiments described above, slurry injection unit C, C ', conductor paste injection unit E, pushing unit R " cutting unit X etc. once just move to X-direction whenever going barrel 160 intermittently rotates, but the insulating barrier of this displacement and formation; the thickness of conductor layer is suitable, therefore makes each unit and always keeps certain distance above the cambium layer.

In the above-described embodiments, we have illustrated slurry injection unit C, C ', conductor paste injection unit E pushes unit R ", unit R is pushed in vacation; the concrete structure of each unit such as cutting unit X; set, and flow chart, but as long as along aim of the present invention; be not limited to above-mentioned explanation; can suitably change setting of these unit, number and flow chart etc.

Secondly, in order to represent the manufacturing installation of the 4th laminated body of inventing, respectively, Figure 40～Figure 42 represents the 1st embodiment, Figure 43 represents the 2nd embodiment of same invention, and Figure 44～Figure 46 represents the 3rd embodiment of same invention, and Figure 47～Figure 49 represents the 4th embodiment of same invention.

At first we illustrate Figure 40～the 1st embodiment shown in Figure 42.

This manufacturing installation, as Figure 40, shown in Figure 41, have on support platform 250 body 251 is set, the insulating barrier formation device C of ceramic slurry is sprayed in side configuration in the position, the left and right sides that clips this body 251 (position of X-axis line direction) and the conductor layer of injection conductor paste forms device E, makes the formation of the drying device L of this slurry or conductor paste drying respectively in the opposing party's configuration.

Body 251 has seeing from the side to present can (can control) on the lower plate 251a of body that mouthful word lacks a perpendicular shape configuration operation post ST up or down mobile on the z axis direction, on the upper plate 251c of same body, can control movably (on the z axis direction, can control mobile) up and down and support compression bonding apparatus R ', with the space S such formation of the space between the top of operation post ST and the compression bonding apparatus R ' as the lamination laminated body facing to operation post ST.

Above-mentioned operation post ST has with the servo motor that will be connected with the support on the lower position that is arranged on it, impulse motor, stepper motor etc. can electric control motor as the ball screw mechanism of drive source, on the platform controlling organization 253 of formations such as guiding device, can control mobile formation up and down, above-mentioned again compression bonding apparatus R ' has by the motor of the electric control pressing plate 254 similarly ball screw mechanism as drive source, can control the formation that is supported in movably on the body upper plate 251c up and down in the pressing plate controlling organization 255 of formations such as guiding device.

Insulating barrier formation device C is with slight gap and establishes the unit that a plurality of inkjet nozzles constitute, employing is from the ink-jetting style of this nozzle ejection of selecting pottery slurry, again, similarly, conductor layer formation device E also is with slight gap and establishes the unit that a plurality of inkjet nozzles constitute, employing is from the ink-jetting style of the nozzle ejection conductor paste selected at the control device that they are linked (not drawing the figure), and this all is identical for each embodiment.

In this embodiment, as Figure 40 and shown in Figure 41, have and passing through servo motor, impulse motor, stepper motor etc. can electric control motor as the ball screw mechanism of drive source, the control mobile device 260 of guiding device etc., a side direction body 251 moves (near leaving) can control the supporting arm 260a that constitutes movably like that at left and right directions (X-axis line direction) front end from the side, along left and right directions and establish insulating barrier and form device C, conductor layer forms device E, each installs C, the E formation in the above-mentioned space S that is used for lamination of can coming in and going out, form device C by this insulating barrier and come in and go out and spray ceramic slurry in the space S that is used for lamination and form insulating barrier, form device E by this conductor layer equally again and come in and go out and spray conductor paste on inherent this insulating barrier of space S that is used for lamination and form conductor layer.

Drying device L is illustrated in and uses the situation that ceramic slurry and conductor paste is dried to be not clamminess the drying unit L of such semi-harden state by heat air-supply among the 1st embodiment.In addition, also can be with the drying unit that makes ceramic slurry and conductor paste drying by rayed as drying device, same as described above, insulating barrier is formed device C, conductor layer forms device E and is arranged on an opposite side of clamping body 251, be arranged on by with servo motor, impulse motor, stepper motor etc. can electric control motor as the ball screw mechanism of drive source, control mobile device 280 with guiding device etc., a side direction body 251 moves (near leave) can control the supporting arm 280a that constitutes movably like that at left and right directions (X-axis line direction) front end from the side, in the above-mentioned space S that is used for lamination of can coming in and going out.

When forming unit C, each insulating barrier enters the space S that is used for lamination, spray ceramic slurry and form insulating barrier, similarly each conductor layer forms unit E and enters the space S that is used for lamination and spray conductor paste and form these unit C behind the conductor layer, after E retreats, this drying device L faces each layer and enters like that in the same space S that is used for lamination, make insulating barrier, conductor layer is dried to semi-harden state.

Again, spray ceramic slurry when form unit C with insulating barrier at every turn, when forming the unit injection conductor paste with conductor layer, making above-mentioned operation post ST drop to ormal weight (z axis direction) controls like that, compression bonding apparatus R ', decline by pressing plate 254, above the thin layer that the insulating barrier of the semi-harden state that forms on by operation post ST and conductor layer constitute, on per 1 layer or multilayer, carry out false add with pressing plate 254 with the light pressure of stipulating and press, the fine uneven homogenizing of carrying out that produces on thin layer is guaranteed flatness and levelness and made each layer tightr then.

Then, we illustrate the flow chart of making laminated body with the manufacturing installation of the 1st embodiment, and Figure 42 represents to make the situation of the laminated body A13 that is used for inductance.

Following in turn carrying out:

In Figure 42 (a), insulating barrier forms unit C and simultaneously enters in the space S that is used for lamination, and one side is sprayed ceramic slurry from each slurry injection nozzle on the regulation zone of operation post ST, become the insulating barrier 270 of substrate on this operation post ST.

In Figure 42 (b), when this insulating barrier formed unit C and retreats, drying unit L entered in the space S that is used for lamination, make insulating barrier 270 above be dried to such semi-harden state that is not clamminess.

In Figure 42 (c), when this drying unit L retreats, conductor layer forms unit E and enters in the space S that is used for lamination, on this becomes the insulating barrier 270 of semi-harden state of substrate, spray conductor paste, on insulating barrier 270, form the conductor layer 271 of regulation Wiring pattern from the desired conductor paste injection nozzle of selecting.

In Figure 42 (d), drying unit L similarly enters, and makes conductor layer 271 partial desiccations.

In Figure 42 (e), after this drying unit L retreats, insulating barrier forms unit C and simultaneously enters the space S that is used for lamination, one side is sprayed ceramic slurry from the slurry injection nozzle of selecting, the cancave embedded part that the slurry filling is remained between the conductor layer 271,271 divides formation partition insulating barrier 273 in 272.

In Figure 42 (f), form unit C by insulating barrier and retreat, drying unit L enters in the space S that is used for lamination once more, makes partition insulating barrier 273 be dried to semi-harden state.

In Figure 42 (g), after drying unit L retreated, conductor layer formed unit E and enters in the space S that is used for lamination, sprayed conductor paste from the conductor paste injection nozzle of selecting, and formed through hole electrode 274.

Then, in Figure 42 (h), conductor layer forms unit E and retreats.Drying unit L makes this through hole electrode 274 be dried to semi-harden state.

In Figure 42 (i), drying unit L retreats.Except through hole electrode 274 ends, spray ceramic slurry by each the slurry injection nozzle selected that forms unit C from the insulating barrier that enters the space S that is used for lamination, form insulating barrier 275.

In Figure 42 (j), insulating barrier forms unit C and retreats.Drying device L makes this insulating barrier 275 be dried to semi-harden state.

Then, in Figure 42 (k), this thin layer is carried out false crimping with pressing plate 254.

Then, with above-mentioned Figure 42 (c)～(k) as 1 circulation in turn to carrying out repetition through the laminate of false crimping, shown in Figure 42 (r), the thin layer that reaches before the regulation number of plies is carried out the laminated body A13 that false crimping is formed for inductance.In this Figure 42, put down in writing (l)～(q) suitable with above-mentioned Figure 42 (c)～(h) continuously, and omitted suitable operation with above-mentioned (i)～(k) again.

Again, in the 1st embodiment, because insulating barrier forms device C, conductor layer forms device E and all adopts ink-jetting style, so in last operation with insulating barrier form device C form have the insulating barrier 270 of through hole after, the operation that can be inserted in filling through hole electrode in the through hole forms laminated body as operation midway.

Then, we illustrate the 2nd embodiment, this the 2nd embodiment relates to the manufacturing installation of the laminated body that is used for electric capacity, because the basic comprising of manufacturing installation is identical with above-mentioned the 1st embodiment, so when describing according to manufacturing process shown in Figure 43, this manufacturing process implements false crimping process as (g) of the back operation of above-mentioned Figure 42 (a)～(f) with 254 pairs of thin layers that are made of insulating barrier 270 and conductor layer 271 of pressing plate.Then, above-mentioned Figure 42 (a)～(g) is repeated in turn as a circulation (h)～(n), shown in (f), the thin layer that reaches before the regulation number of plies is carried out the laminated body A14 that false crimping is formed for electric capacity.

Secondly, we illustrate Figure 44～the 3rd embodiment shown in Figure 46, this embodiment supports on the platform 250 laser drilling device P to be set in the place ahead of above-mentioned body 251, and P gets through hole on insulating barrier with this laser drilling device, the through hole electrode filling can be advanced the example of this through hole.

The motor of laser drilling device P by can electric control is as the ball screw mechanism of drive source, the control mobile device 290 of guiding etc., can control the front end of the supporting arm 290a that constitutes movably like that in Y-axis line direction from the place ahead near leaving body 251, the support wrist 290b of the long chi shape of direction (X-axis line direction) to the left and right is set, can control the laser drilling unit P that will have laser head movably along X-axis line direction is supported on this support wrist 290b, this laser drilling unit P is connected with laser generator, by moving with the control on Y-axis line direction in the control mobile device 290 simultaneously, move with the control on the X-axis line direction that faces toward the laser drilling unit P that supports wrist 290b, enter the space S that is used for lamination from the place ahead open portion of body 251, use from the laser head emitted laser and punch in the position of wanting of insulating barrier.

Secondly, our explanation manufacturing in the manufacturing installation of embodiment shown in Figure 46 is used for the manufacturing process of the laminated body of inductance.

Up to Figure 46 (a)～(d), all identical with above-mentioned the 1st embodiment, but as Figure 46 (e), divide 272 through the cancave embedded part that the slurry filling is advanced to remain on the conductor layer 271, further the Zone Full above it forms the operation of insulating barrier 275, implement the drying process of Figure 46 (f), and Figure 46 (g), implement the operation of false crimping with 254 pairs of thin layers that constitute by insulating barrier and conductor layer of pressing plate.Then, as Figure 46 (h), by controlling above-mentioned laser drilling device P, by laser processing the insulating barrier 270 on upper strata want to get on the position through hole of through hole 274a.As Figure 46 (i), form through hole electrode 274 and form conductor layer 271 to through hole 274a filling conductor paste by on the regulation Wiring pattern, spraying conductor paste, then in Figure 46 (j), this conductor layer 271 is carried out drying.Then, divide 272 through the cancave embedded part that once more the slurry filling is advanced to remain on the conductor layer 271, further after the Zone Full above it forms Figure 46 (k) of insulating barrier 275, carry out the drying process of Figure 46 (l), implement the false crimping process among Figure 46 (m).

Then, above-mentioned Figure 46 (h)～(m) is carried out repetition in turn as a circulation, shown in Figure 46 (g), the thin layer that reaches before the regulation number of plies is carried out the laminated body A15 that false crimping is formed for inductance.In Figure 46, put down in writing (n)～(p) suitable with above-mentioned (h)～(i) continuously, and omitted suitable operation with above-mentioned (k)～(m) again.

Further, we illustrate Figure 47～the 4th embodiment shown in Figure 49, and this embodiment is illustrated in the laminated body manufacturing apparatus of not only implementing false crimping in the above-mentioned body 251 but also implementing true crimping.

The formations different with above-mentioned the 1st～the 3rd embodiment are, body 251 presents the case shape this point of inner hollow shape, the open portion 251b that forms from 2 relative sides at this body 251, the above-mentioned insulating barrier of 251b forms device C, drying device L, conductor layer forms device E can constitute this point with coming in and going out, with be provided with by closing the open portion 251b of these 2 sides, 251b makes the space S that is used for lamination on the operation post ST cut-off H that is not communicated with extraneous gas and vacuum plant 1 this point that makes formation vacuum atmosphere in this space S that is used for lamination.

On figure, represented not use the manufacturing installation of laser drilling device, relative open portion 251b on body 251, the window part or the photochopper that can slide up and down are set on the 251b, constitute cut-off H, by with this cut-off H, inaccessible open portion 251b, 251b can be used in the space S of lamination and not be communicated with extraneous gas.

Vacuum plant 1 will be used for air in the space S of lamination and be discharged to outside exhaust apparatus (multiple wing pump, axial-flow pump) and be arranged on the upper plate 251c of body 251.Again, in this embodiment, the compression bonding apparatus when the compression bonding apparatus R ' that will use when false crimping is also used as true crimping.

Again, as possessing the manufacturing installation shown in above-mentioned the 3rd embodiment of laser drilling device, also make 3 styles of opening in body 251 previous sections, also can on this open portion the window part or the photochopper that can slide up and down be set, constitute cut-off H with open portion.

And, in this embodiment, when forming insulating barrier and when forming conductor layer, make each open portion 251b...... be in open state, when each insulating barrier forms device C, drying device L, conductor layer forms device E, laser drilling device P comes in and goes out from these open portions 251b...... and is used in the space S of lamination when needing, these respectively install C, L, E, when P forms the thin layer of the number of plies of wanting in the manufacture process of the origin position (going-back position) that is returned to machinery, this thin layer is carried out false crimping.

To after reaching thin layer before the regulation number of plies and carrying out false crimping, with inaccessible each the open portion 251b...... of cut-off H, be not communicated with by the space S that is used in lamination with extraneous gas, get rid of the air in the space S that is used for lamination with vacuum plant 1, and use than the strong authorized pressure of false crimping laminated body CS pressurization carrying out true crimping (g ') (please refer to Figure 49).

Like this, we can provide from being communicated with a space S that is used for lamination, these open portions 251b...... of the body 251 in open two side～four directions, insulating barrier forms device C, drying device L, conductor layer forms device E, adding when needing that laser drilling device P can come in and go out is used in the space S of lamination, and can will be used for the evacuated vacuum plant 1 of space S of lamination with inaccessible these open portions 251b...... of window or photochopper by setting up, form these devices C, L, E, P are integrated into the compact arrangement around the body, implement simultaneously to be crimped onto the device that laminated body is made in true crimping from vacation.

Secondly, we illustrate the 5th invention, and insulating trip is used in this 5th invention, and forms electrode on this insulating trip.

If the summary of the manufacturing installation of the 5th invention is described according to Figure 50, then this laminated body manufacturing apparatus is set in the unillustrated in the drawings casing, can reciprocatingly movable table be located in 2 years on the guide rail 1 that linearity flatly disposes, and the basal disc 3 of the upper part setting that the is used in movable table 2 stainless steel that can move up and down, fabrication process platform 5, form the interval path 1a that basal disc 3 moves back and forth by above-mentioned guide rail 1, these are all identical with the 1st inventive embodiment.

Interval path 1a is the straight line path that has with the width width about equally of basal disc 3, at an upper portion thereof and establish the inkjet nozzle that forms device C as insulating barrier, form the inkjet nozzle of device E as conductor layer, further suitably and establish append as press device R by pressure roller with as the laser drilling unit of laser drilling device P, the length in this interval path is about 1.5～2m.And, dispose insulating trip laminated device K respectively in the both sides of this interval path 1a.

But by among the figure unillustrated generally be servo motor or impulse motor drive source and by its rotation screw shaft, movable table 2 is moved back and forth along the length direction (directions X) in above-mentioned interval path, thereby make basal disc 3 along above-mentioned interval path movement, this moving direction and speed are controlled by controller.

Again,, basal disc 3 is moved up and down, correspondingly this is moved up and down by controller and lamination procedure and control, basal disc 3 is descended in turn by the drive source of servo motor or impulse motor and the screw shaft that rotates by its.

As above-mentioned insulating barrier form inkjet nozzle that device C and conductor layer form device E be along the direction in transversal above-mentioned interval path with small interval and a plurality of nozzles of establishing, press device R is also on the cross-directional in interval path.

In addition, preferably make above-mentioned insulating barrier form device C, conductor layer forms device E, press device R, and laser drilling device P blocking can be loaded and unloaded when suitable when needing, and can adjust the position is set.For example, as with Figure 55, Figure 56 be shown in the example like that, supporting wall 4d is arranged on the position of the rear side that becomes operation post 5, the above-mentioned insulating barrier that one or more blocking releasably are installed respectively on this supporting wall 4d forms device C, and conductor layer forms device E, press device R and laser drilling device P, because this is identical with above-mentioned the 2nd invention, also omit explanation to them so add identical label.

Above-mentioned insulating trip laminated device K, as Figure 54 in detail shown in, adhere to the output mechanism 310 of the ribbon T of insulating trip ZS by output, absorption is from the insulating trip ZS that ribbon T strips down, the absorption connecting gear 320 that is sent on the basal disc 3 constitutes.

Above-mentioned ribbon T is that adhering to is the insulating trip ZS of laminar ceramic slurry on the surface of the carrier film k of the band shape that the synthetic resin film by polyethylene terephthalate etc. constitutes.

Output mechanism 310, to roll from the ribbon T of output roller 311 outputs by coiler drum 312, in the way between this output is rolled, set the mechanism for stripping 330 with acute angle portion 313 with carrier film k one side joint of ribbon T one side end (direction of transfer one side end) that contacts to earth in the downstream, the ribbon T of transmission is bent to acute angle.

And if according to this output mechanism 310, then ribbon T is bent to acute angle by above-mentioned acute angle portion 313, makes attached to its lip-deep insulating trip ZS to strip down.

Absorption connecting gear 320 possess lifting along the vertical direction and can along guide rail 323 move horizontally by vacuum mechanism absorption or the absorbed portion 321 that breaks away from insulating trip ZS, and a side sets downward cut-out blade 322 in the side of this absorbed portion 321,320 absorption of this absorption connecting gear also transmit by stripping down with cut-out blade 322 from ribbon T of above-mentioned output mechanism 310 outputs and cut into the insulating trip ZS of regulation shape, and insulating trip ZS is overlapped with assigned position on basal disc 3.

In addition, above-mentioned insulating trip laminated device K is an example of banded insulating trip ZS of expression cutting and the formation that overlaps on basal disc 3, but also can be that the insulating trip ZS that will be pre-formed the regulation shape overlaps such formation on basal disc 3.

And, if according to above-mentioned manufacturing installation, insulating trip lamination procedure by repeating to make insulating trip ZS to overlap (please refer to Figure 52 (a) and (d), (h)), the conductor layer that sprays conductor paste on insulating trip ZS forms operation and (please refer to Figure 52 (b) and (f), (j)), the insulating barrier that sprays the ceramic slurry be used for partition on insulating trip ZS forms each operation of operation (please refer to Figure 52 (c) and (g)) etc., between each insulating trip ZS of multilayer insulation sheet ZS, form laminated body A16 with the thin layer that has set the regulation conductive pattern.

Below, an example when we are used for the laminated body of inductance by manufacturing explains above-mentioned manufacturing process.

(please refer to Figure 51 (a) and Figure 52 (a)) is by on being laid in insulating trip ZS basal disc 3 at the absorption connecting gear 320 on the insulating trip laminated device K of left side.

Then, when basal disc 3 during from left end one side direction right-hand member one side shifting, the inkjet nozzle that forms device E from the right conductor layer sprays conductor paste (please refer to Figure 51 (a)), on insulating trip ZS, form the conductor layer 341 (please refer to Fig. 5 (b)) of regulation area, secondly, in the moving of same basal disc 3, the inkjet nozzle that forms device C from insulating barrier sprays ceramic slurry (please refer to Figure 51 (a)), forming insulating barrier 340 between the conductor layer 341 on the same insulating trip ZS and on the adjacent part of conductor layer 341, form the thin layer S16 (please refer to Figure 52 (c)) that constitutes by conductor layer 341 and insulating barrier 340.

Then, at above-mentioned conductor layer 341 with above the insulating barrier 340, by right side absorption connecting gear 320 laminated insulation sheet ZS (please refer to Figure 51 (b) and Figure 52 (d)).

Further, when basal disc 3 during from right-hand member one side direction left end one side shifting, the insulating trip ZS with portion of the superiors of pushing by right side press device R is crimped onto on conductor layer 341 below it and the insulating barrier 340 (please refer to Figure 51 (b)), in the moving of same basal disc 3, on the assigned position of the insulating trip ZS of portion of the superiors, get through hole 342 by laser drilling device P, further, in the moving of same basal disc 3, the inkjet nozzle that forms device E from the left conductor layer sprays conductor paste (please refer to Figure 51 (b)), form the through hole electrode 343 of imbedding above-mentioned through hole electrode 342 by this electrode conductor cream, and on insulating trip ZS, form the conductor layer 341 (please refer to Figure 52 (f)) of regulation area, secondly, the inkjet nozzle that forms device C from the left side insulating barrier sprays ceramic slurry (please refer to Figure 51 (b)), forming insulating barrier 340 between the conductor layer 341 on the same insulating trip ZS and on the adjacent part of conductor layer 341, form the thin layer S16 (please refer to Figure 52 (g)) that constitutes by conductor layer 341 and insulating barrier 340.

After this, repetition conductor layer 341 and above the insulating barrier 340 by operation and the press device R of absorption connecting gear 320 laminated insulation sheet ZS, laser drilling device P, conductor layer forms device E, insulating barrier forms the operation (please refer to Figure 51 (c) and Figure 52 (h)～(j)) that device C works in turn, is configured for the laminated body A16 of inductance on basal disc 3.

In addition, above-mentioned operation is the example of manufacturing process that expression is used for the laminated body of inductance, if but according to the manufacturing installation of above-mentioned formation, then also can make the illustrative laminated body A17 that is used for inductance of Figure 53.

We do not describe operation at this moment in detail, but it is the operation of saving after the work of being undertaken by laser drilling device P in above-mentioned operation haply.

Below, we illustrate the laminated body manufacturing apparatus of the invention of the 6th shown in Figure 57.

Figure 57 represents the summary of manufacturing installation, do not draw in the drawings and going barrel 160 can be installed rotatably on the vertical supporting wall, and set near the side below the going barrel 160 with the insulating trip laminated device K in the manufacturing installation of above-mentioned the 5th invention roughly the same insulating trip ZS is overlapped insulating trip laminated device K on the scope of operation 160a at above-mentioned going barrel, directly below going barrel 160, set the laminated body recovering mechanism 180 of the produced laminated body of recovery.

Again, same manufacturing installation possesses, the motor and the deceleration control system of the above-mentioned going barrel 160 of unillustrated in the drawings driving, accommodate the slurry case of ceramic slurry, accommodate the conductor paste case of conductor paste, the vacuum mechanism that vacuumizes in the going barrel 160, control cabinet and electrical power wiring assembly etc.

Going barrel 160 is identical with above-mentioned the 3rd invention to be by metal polygonal drum such as stainless steel (being exemplified as among the figure 12 dihedrals), smooth scope of operation 160a continuous on the outer peripheral face to going barrel 160 carries out zoning, gets the adsorption hole 161...... that is produced sucking action by vacuum on scope of operation 160a.

These adsorption holes 161 have, and are open when absorption insulating trip ZS by the slip breaker 350 that the slip that is arranged on scope of operation 160a the inside one side drives, and close such formation again when insulating trip ZS is broken away from.

Make this going barrel 160 rotate continuously or intermittently rotate and set this going barrel 160 like that by said motor, when rotation stops, the insulating trip ZS that will supply with from the absorption connecting gear 320 of above-mentioned insulating trip laminated device K is adsorbed on the scope of operation 160a facing to the absorbed portion 321 of absorption connecting gear 320.

Above-mentioned insulating trip laminated device K is because roughly the same with the formation of insulating trip laminated device of the manufacturing installation of above-mentioned the 5th invention, so no longer they are done detailed explanation, but export the ribbon T that constitutes by insulating trip ZS and carrier film k from cylinder 311, and it is twisted on the coiler drum 312, between this output is rolled in the way of process, by mechanism for stripping 330 insulating trip ZS is stripped down from ribbon T, and it is cut into the regulation shape by cutting off blade 322, with the insulating trip ZS after this cut-out, absorption by absorbed portion 321, be sent to position, it is overlapped on scope of operation 160a facing to scope of operation 160a.

Again, in the halted state when going barrel 160 intermittently rotates, the operation post or the reserve position of each operation implemented in configuration facing to above-mentioned each scope of operation 160a, on these operation posts ST, by clockwise, suitably set the 1st press device R1, laser drilling device P, conductor layer forms device E, and insulating barrier forms device C, the 2nd press device R2 etc., further, at laser drilling device P, conductor layer forms device E, can be equipped with ccd video camera unit Q when needing in each device of insulating barrier formation device C.

The 1st press device R1, laser drilling device P, conductor layer forms device E, each device of insulating barrier formation device C has can be in scope of operation 160a upper edge X-direction ((circumferencial direction of going barrel 160), Y direction (Width of going barrel 160) moves and can control this amount of movement, can set movably and can control such formation to this amount of movement along the Z-direction that vertically moves up and down on scope of operation 160a (contact departure direction) simultaneously.

Again, the 2nd press device R2 is an example that is illustrated in the pressing plate that scope of operation 160a upper edge Z-direction moves up and down, it is the decline by this pressing plate, in the end the stage pushes the laminated body that is stacked on the scope of operation 160a, by improving the tight then property between insulating trip and conductor layer and the insulating barrier, each layer carried out the device of homogenizing.

Again, ccd video camera unit Q makes a video recording to the reference mark on the insulating trip, be transmitted to image-processing system, in order to make above-mentioned laser drilling device P, conductor layer forms device E, the position that insulating barrier forms device C overlaps, and with it the X-direction of these devices and the position of Y direction is controlled, and perhaps is used to find the ccd video camera of the broken string of the pin hole of insulating barrier and conductor layer.

Again, above-mentioned laminated body recovering mechanism 180, in the final stage that forms laminated body on the scope of operation 160a that is rotated in of the stated number by going barrel 160, accept laminated body by reclaiming platform 181, laminated body is housed in the collection box 184 (please refer to above-mentioned Figure 31) by reclaiming arm 183.

Again, when laminated body is accepted by laminated body recovering mechanism 180, by by slip breaker 350 facing to the inside one side of the scope of operation 160a that reclaims platform 181, close the adsorption hole 161 of same scope of operation 160a, break away from the attraction that causes by the vacuum in the going barrel 160 and open.

And, if according to above-mentioned manufacturing installation, then in the proper time that stops by the going barrel 160 that intermittently rotates clockwise, by the insulating trip laminated device K facing to above-mentioned each scope of operation 160a, the 1st press device R1, laser drilling device P, conductor layer forms device E, and insulating barrier forms device C, the 2nd press device R2, the work of laminated body recovering mechanism 180 grades can be made laminated body.

We do not state the job order of above-mentioned each device and mechanism in detail, but for example, the situation that is used for the laminated body of inductance in manufacturing, according to the laminated layer sequence shown in above-mentioned Figure 52, halted state when going barrel 160 intermittently rotates, make above-mentioned each device and mechanism's work, can produce laminated body facing to each scope of operation 160a.

In addition, in above-mentioned manufacturing installation, shown the good sample attitude that the press device that is made of the 1st press device R1 and the 2nd press device R2 is set, but as saving the wherein formation of either party press device, during each laminated insulation sheet, or lamination behind the last insulating trip, also can push above the insulating trip with the press device that does not wherein save a side.

Secondly, we illustrate the laminated body manufacturing apparatus of the invention of the 7th shown in Figure 58.

This manufacturing installation has on support platform 360 body 361 is set, the insulating barrier formation device C of ceramic slurry is sprayed in side configuration in the position, the left and right sides of clamping this body 361 (position of X-axis line direction) and the conductor layer of injection conductor paste forms device E, on insulating trip ZS, get the laser drilling device P of through hole, push the 1st press device R1 above the insulating trip ZS with cylinder, the formation of insulating trip laminated device K is set the opposing party.

Body 361 has formation opening portion 261b on 2 relative sides, can (on the z axis direction, can control movably) configuration basal disc 362 on the lower plate 361a on the case shape body of 261b up or down, on the upper plate 361c of same body, can control movably (on the z axis direction, can control movably) and basal disc 362 up and down and relatively support the 2nd press device R2, will on basal disc 362, be used as the such formation of the space S that is used for lamination of laminated body with the space between the 2nd press device R2.

Further, this body 361 the both ends of upper plate 361c separately below on the side, configuration opens and closes opening portion 361b by the window component or the breaker that can slide, the cut-off H of 361b, H, and, this above body 361 mounting make because these two cut-off H the vacuum plant 1 of the space S formation vacuum atmosphere that is used for lamination when H is not communicated with extraneous gas with exhaust apparatus.

Above-mentioned basal disc 362 has the servo motor by being connected with the support on the lower position that is arranged on it, stepper motor etc. can electric control motor as the ball screw mechanism of drive source, the platform controlling organization 370 that guiding device etc. constitute, can control mobile formation up and down, above-mentioned again the 2nd compression bonding apparatus R2 have by by in this embodiment similarly the motor of electric control pressing plate as the ball screw mechanism of drive source, the pressing plate controlling organization 380 that guiding device etc. constitute can be controlled the formation on the upper plate 361c that is supported in body movably up and down.

Insulating barrier forms device C, conductor layer forms device E, laser drilling device P, each device of the 1st press device R1 has horizontal direction ground and is located at the front end of supporting arm 391, and by by servo motor, the motor that stepper motor etc. can electric control is as the ball screw mechanism of drive source, the control mobile device 390 that guiding device etc. constitute, make this supporting arm 391 from the side a direction body 361 move (near leave) the above-mentioned interior such formation of space S that is used for lamination of coming in and going out.

Yet insulating trip laminated device K is by constituting from peeled off and cut the absorption connecting gear 320 that the output mechanism 310 of insulating trip ZS output and insulating trip ZS that absorption strips down from ribbon T be sent on the basal disc 362 by the ribbon T with the output of the insulating trip laminated device K identical construction of above-mentioned manufacturing installation.

Above-mentioned absorption connecting gear 320 has the fore-end that the absorbed portion 321 by vacuum mechanism absorption or relieving insulating trip ZS can be provided in along the vertical direction up and down supporting arm 400, and can move horizontally the formation of the rear end part of this supporting arm 400 along the guide rail 323 on the fixing unillustrated in the drawings supporting wall, and a side sets downward cut-out blade 322 in the side of absorbed portion 321, absorption transmits from the insulating trip ZS that strips down and cut into cut-out blade 322 from ribbon T by above-mentioned output mechanism 310 outputs, and insulating trip ZS is overlapped with assigned position on the basal disc 362.

And, if according to above-mentioned manufacturing installation, then make insulating trip laminated device K, insulating barrier forms device C, conductor layer forms device E, laser drilling device P, the 1st press device R1 comes in and goes out and is used for the space of lamination, on insulating trip ZS, forming the thin layer that has set the regulation conductive pattern on the basal disc 362, after the discrepancy formation laminated body that repeats these each devices, each device is being retreated, with about two cut-off H, H closes two opening portion 361b, and 361b gets rid of the air of the space S that is used for lamination with vacuum plant 1, and with the 2nd press device R2 to laminated body pressurization (true crimping), eliminating remains between insulating trip ZS and the thin layer and the air of thin layer inside, improves the tight then property of insulating trip ZS and thin layer, makes each layer homogeneous integrated.

We do not state above-mentioned each device and job order of mechanism in detail, but for example, are used for the situation of the laminated body of inductance in manufacturing, preferably with the laminated layer sequence shown in above-mentioned Figure 52, make above-mentioned each device discrepancy be used for the space S of lamination.

In addition, above-mentioned manufacturing installation has shown the good sample attitude that is provided with the 1st press device R1 and the 2nd press device R2 as press device, but as the formation of saving the 1st press device R1, during each laminated insulation sheet ZS, or lamination behind the last insulating trip ZS, also can be with the 2nd press device R2 to carrying out false crimping and true crimping above the insulating trip.

Again, same manufacturing installation also can have the formation of saving cut-off and vacuum plant, in atmospheric atmosphere, push insulating trip above.

Again, in the laminated body shown in Figure 52 was made operation, also it doesn't matter for reversed in order even if make the operation that forms conductor layer and the operation that forms insulating barrier (Figure 52 (b) and (c), with (f) of figure and (g)).

And the laminated body as the present invention makes is not limited to described inductance, electric capacity, and comprises electronic unit laminated body such as laminated base plate, resistance, magnetic.

If according to the present invention, because on the interval path of the linearity that basal disc moves back and forth and establish insulating barrier and form device, conductor layer forms device and drying device, when basal disc is mobile forward and reply the operation of stipulating effectively in each operation when mobile, so can make each thin layer of laminated body expeditiously, and can shorten the manufacturing time raising productivity of these laminated body.

And, because preferably and the above-mentioned insulating barrier of establishing essential minimum number form device, conductor layer forms device and drying device, so can set the necessary length in short above-mentioned interval path, become can practicability midget plant, thereby and can provide inexpensive manufacturing installation because the above-mentioned number that respectively forms device is minimum.

And, because at least one in the drying device can be configured in the substantial middle part in above-mentioned interval path, form operation so can carry out insulating barrier effectively continuously, the flow chart of conductor layer (resistance, magnetic etc.) formation operation etc., can promote equipment miniaturization by making the moving section path minimum of above-mentioned basal disc.

Again, if adopt ink-jetting style at least 1 in above-mentioned insulating barrier formation device, then can be formed on the insulating barrier that cancave embedded part between the electrode layer divides filling pottery slurry or insulating resin cream etc. accurately, the flatness that the reason that the space takes place is guaranteed above-mentioned insulating barrier can be removed, the high-quality of produced electronic unit can be guaranteed.

Again, because it is to spray conductor paste with ink-jetting style that above-mentioned conductor layer forms device, thus can form device with this conductor layer, by direct injection conductor paste on conductive pattern, through hole need not be got, just through hole electrode can be also promptly formed accurately really.

On the other hand,, also can form device filling conductor paste by enough conductor layers, positively form through hole electrode accurately even if getting with the laser drilling mode in the situation of through hole.

Because can on the thin layer that forms, carry out false crimping, so can be to forming device by insulating barrier, conductor layer forms insulating barrier that device forms and concavo-convex above the conductive pattern evenly realized complanation, improve the lamination precision of next thin layer and the property of closely following of raising and lower film layer and make each layer homogeneous integrated, thereby high-quality laminated body can be provided.

And, because except above-mentioned false crimping function, can they can not sneaked into mutually, so can make more high-quality laminated body.

Because when basal disc is mobile forward and reply in each operation when mobile and can carry out the regulation operation effectively, thus each thin layer of laminated body can be made expeditiously, and the manufacturing time that can shorten these laminated body improves productivity.

And, because make above-mentioned insulating barrier form the unit, conductor layer formation unit and drying unit can be contained in respectively on the casing and from casing implements blocking with unloading, so can easily assemble these each unit, and can set the manufacturing installation of laminate type electronic components such as electric capacity, inductance, resistance, magnetic and laminated base plate by the configuration of changing each unit, thereby can provide inexpensive midget plant with extensive use.

Again, because above-mentioned insulating barrier forms the unit and conductor layer formation unit can adopt ink-jetting style, so can form the layer of fine densification, and can be formed on accurately cancave embedded part between the electrode layer divide in the insulating barrier of filling pottery slurry etc., even if getting with the laser drilling mode in the situation of through hole, also can positively form through hole electrode accurately by forming unit filling conductor paste with conductor layer.

Further, because on the thin layer that forms, can carry out false crimping, so can be to forming the unit by insulating barrier, conductor layer forms insulating barrier that the unit forms and concavo-convex above the conductive pattern evenly realized complanation, improve closely then property of the lamination precision of next thin layer and raising and lower film layer, make each layer homogeneous integrated, thereby high-quality laminated body can be provided.

And, because can detect the surface state of the thin layer that forms with the ccd video camera unit, can find the pin hole of insulating barrier and the broken string of conductor layer etc., so can improve the rate of finished products that laminated body is made, improve productivity, and can find that the spray orifice of inkjet nozzle etc. stops up the inspection of guarding easily.

Because the going barrel by polygon rotates off and on, can be in the fixed operation of the enterprising professional etiquette of each scope of operation, so can make each layer film of laminated body expeditiously, and, can shorten manufacturing time and improve productivity by make these laminated body simultaneously a plurality ofly.

And, because be the mode of rotating each scope of operation with going barrel,, can provide the manufacturing installation of miniaturization so it is little that floor area is set.

Again, because use the carrier film that twists on the going barrel, thus can on each scope of operation, positively keep the layer-by-layer state of thin layer, and reclaim laminated body easily.And, above-mentioned carrier film is closely followed with tense situation and each scope of operation.Further, can be by shortening the once required time of going barrel rotation, the manufacturing speed that improves thin layer improves productivity.

And, if form use inkjet nozzle mode on the device at insulating barrier, then can improve the insulation precision by forming insulating barrier densely, form device by the insulating barrier of positively controlling ink-jetting style, conductor layer forms the position of device, can form correct conductive pattern.

Again, can be to carrying out planarization ground evenly above the insulating barrier that forms with ink-jetting style, realization homogenizes, can be easily and positively make the laminated body of inductance with through hole electrode etc., by the fine uneven homogenizing of carrying out that produces on the ceramic slurry of thin layer and conductor paste is guaranteed flatness, make the lamination uniformity, can improve the lamination precision.

And, the laminated body that forms on each scope of operation of going barrel can be positively be recovered in easily, and the structure that being provided with of laminated body recovering mechanism is configured in the space easily can be implemented in.

Because make insulating barrier form device, conductor layer forms device and drying device can be provided with these devices respectively with coming in and going out above operation post, after having determined the operation post position, form device by insulating barrier, the operation that the discrepancy of conductor layer formation device and drying device is stipulated forms thin layer, so can make each thin layer of laminated body expeditiously, and shorten manufacturing time by the manufacturing speed that increases these laminated body, can improve productivity.

And, form device as insulating barrier, when adopting ink-jetting style, can be accurately and height form conductor layer, insulating barrier densely.And, divide the formation insulating barrier by the cancave embedded part that ceramic slurry filling is advanced to remain between the electrode layer, can remove the reason that the space takes place and guarantee the flatness of insulating barrier, thereby can keep the high-quality of produced electronic unit effectively.

And, form device as insulating barrier and adopt ink-jetting style to form through hole, by forming device through hole electrode between the filling connection electrode layer in this through hole, can positively form through hole electrode accurately by conductor layer with ink-jetting style.

Again, with false compression bonding apparatus thin layer is carried out false crimping, by to forming device by insulating barrier, conductor layer forms insulating barrier that device forms and concavo-convex above the conductive pattern evenly realized complanation, improve the lamination precision of next thin layer and raising and lower film layer closely then property make each layer homogeneous integrated, can form high-quality laminated body, can prevent in advance because the shape collapse when taking seriously crimping etc. makes the problem of decrease in yield.

And, relatively dispose false compression bonding apparatus by space and the operation post that is used for lamination, unique residual superjacent air space is provided with false compression bonding apparatus around effectively utilizing operation post, can not damage the function of each device, reaches the purpose that further miniaturization becomes compacter.

And, further it can be provided with when making each device (insulating barrier formation device, drying device and conductor layer form device etc.) when retreating, the space that is used for lamination by inaccessible operation post top, make in this space that is used for lamination not cut-off with air communication, manufacturing installation with making the vacuum plant of formation vacuum atmosphere in this space that is used for lamination can provide the new little space of occupying, and lamination laminated body and enforcement are crimped onto the small-sized manufacturing installation easily of true crimping from vacation.

Again, employing make laser drilling device come in and go out on the operation post formation and form device as insulating barrier and adopt ink-jetting style, also form through hole in the situation of formation insulating barriers such as cylinder coating method, can in this through hole, form through hole electrode accurately.

In addition, because insulating barrier is formed device, drying device, conductor layer form device and laser drilling device be integrated into above-mentioned operation post around, so form through hole and through hole electrode when providing with perforation processing, and the lamination laminated body when implementing the manufacturing installation of false crimping or true crimping, can be expected to realize miniaturization and save the space.

In order between each insulating trip of multilayer insulation sheet, to form the thin layer that has set the regulation conductive pattern, clamp the flatness that improves each thin layer with insulating trip.

In addition, on thin layer, overlap,, can shorten the activity duration with the occasion comparison of the insulating barrier that forms flat condition by the ceramic slurry of injection (thin layer insulating barrier up and down) with conductor layer in order to make insulating trip.

So, except the thin layer with conductive pattern that can form high flatness accurately, can in the short time, form this thin layer insulating barrier up and down by insulating trip, and then, can produce the high high-quality laminated body of internal accuracy expeditiously.

And, because when basal disc is mobile forward and reply the operation of stipulating effectively in operation when mobile, thus each thin layer of laminated body can be made expeditiously, and the manufacturing time that can shorten these laminated body improves productivity.

And, form device because can and establish the above-mentioned insulating barrier of essential minimum number, conductor layer forms device, so can set the necessary length in short above-mentioned interval path become can practicability midget plant, so and can provide inexpensive manufacturing installation because the above-mentioned number that respectively forms device is minimum.

Further, because make above-mentioned insulating barrier form device respectively, conductor layer formation device unitization can be loaded onto casing and unload from casing, so carry out the configuration of these each unit easily, and can be corresponding with diversified laminated body manufacturing by each configuration of cells of change, the inexpensive midget plant with extensive use is provided.

Further, because the going barrel by polygon rotates off and on, can be in its fixed operation of the enterprising professional etiquette of each scope of operation, thus each layer film of laminated body can be made expeditiously, and can shorten manufacturing time and improve productivity by make simultaneously these laminated body a plurality ofly.

And, because be the mode of rotating each scope of operation with going barrel,, can provide the manufacturing installation of littler miniaturization so it is little that floor area is set.

Further, because by making above-mentioned insulating trip laminated device, insulating barrier forms device and conductor layer formation device is provided with these devices with coming in and going out above basal disc, behind definite operation post position, by the insulating trip laminated device, insulating barrier forms device and conductor layer formation device is come in and gone out above basal disc, implement the regulation operation and form thin layer, so can form device and conductor layer formation device by configuration each insulating barrier in less amount ground, obtain low-cost apparatus, can make each layer film of laminated body expeditiously, and shorten manufacturing time, can improve productivity by the manufacturing speed that increases these laminated body.

Further, for can be in the space that cut-off and vacuum plant are used in lamination vacuum state by press device to pushing above the insulating trip and true crimping, can improve the lamination precision of next thin layer by making planarization above the insulating trip, and remain between insulating trip and the thin layer and the air of thin layer inside by eliminating, the property of closely following that improves insulating trip and thin layer makes each layer homogeneous integrated, thereby can form high-quality laminated body.

Key diagram 23.1 the 1st embodiment Figure 24 .1 the 2nd embodiment Figure 25 .1 the 3rd embodiment Figure 26 .1 the 4th embodiment Figure 27 .1 the 5th embodiment Figure 28 .1 the 6th embodiment of figure

Claims (39)

1. laminated body manufacturing apparatus, it makes basal disc move back and forth and to be provided with up or down basal disc on the interval path of the regulation of linearity, and on this interval path, respectively and the insulating barrier of establishing one or more spue ceramic slurry or insulating resin cream form device, the conductor layer that sprays conductor paste with ink-jetting style forms device, with make above-mentioned slurry, the drying device of conductor paste drying, above-mentioned basal disc on the above-mentioned interval path 1 time or repeatedly move back and forth during, on insulating barrier, form the thin layer that has set the regulation conductive pattern, carry out these processes repeatedly and form laminated body.

2. the laminated body manufacturing apparatus of claim item 1 record, its feature is the substantial middle part that is configured in above-mentioned interval path with at least 1 in the above-mentioned drying device.

3. the laminated body manufacturing apparatus of claim item 1 or 2 records, its feature are above-mentioned insulating barrier to be formed in the device at least 1 sprays ceramic slurry by ink-jetting style or insulating resin cream forms insulating barrier.

4. the laminated body manufacturing apparatus of each record in the claim item 1～3, wherein above-mentioned insulating barrier form device and are included in by conductor layer and form the cancave embedded part branch between the electrode layer that device forms or remove ceramic slurry of filling or insulating resin cream in the extra-regional regulation zone that forms conductor layer.

5. the laminated body manufacturing apparatus of each record in the claim item 1～4, its feature are that above-mentioned conductor layer forms device and sprays conductor paste formation through hole electrode with ink-jetting style on above-mentioned conductive pattern.

6. the laminated body manufacturing apparatus of claim item 1 record, its feature be and be located at the laser drilling device of getting through hole on the above-mentioned insulating barrier, forms in the through hole that device got the conductor paste filling by this perforating device by above-mentioned conductor layer, forms through hole electrode.

7. laminated body manufacturing apparatus, its feature is that it is to make basal disc move back and forth and to be provided with up or down basal disc on the interval path of the regulation of linearity, and on this interval path, respectively and the insulating barrier of establishing one or more spue ceramic slurry or insulating resin cream form device, the conductor layer that sprays conductor paste with ink-jetting style forms device, with make above-mentioned slurry, the drying device of conductor paste drying, above-mentioned basal disc on the above-mentioned interval path 1 time or repeatedly move back and forth during, on insulating barrier, form the thin layer that has set the regulation conductive pattern, carry out these processes repeatedly and form laminated body, and established the false compression bonding apparatus on push the proper time of the above-mentioned thin layer of lamination.

8. the laminated body manufacturing apparatus of claim item 7 record, its feature is that above-mentioned false compression bonding apparatus is that contact is by the dried ceramic slurry of drying device or insulating resin cream, conductor paste, and have atomic little adhesively from the teeth outwards, make to have adhesive Dust-proof rotary drum and contact with this cylinder by pressure roller.

9. laminated body manufacturing apparatus, wherein make basal disc can move back and forth in the regulation interval and be arranged on the operation post up or down, above above-mentioned operation post and establish a plurality of holding componentss, and the insulating barrier of respectively one or more are spued ceramic slurry or insulating resin cream forms device, the conductor layer formation device and the drying device that spray conductor paste releasably are installed on these holding componentss, above-mentioned basal disc on the above-mentioned interval path 1 time or repeatedly move back and forth during, on insulating barrier, form the thin layer that has set the regulation conductive pattern, carry out these processes repeatedly and form laminated body.

10. the laminated body manufacturing apparatus of claim item 9 record, wherein above-mentioned conductor layer forms device to have by spraying the ink-jetting style that conductor paste forms conductor layer, and at least 1 in the above-mentioned insulating barrier formation device has by spraying the ink-jetting style that ceramic slurry or insulating resin cream form insulating barrier.

11. the laminated body manufacturing apparatus of claim item 9 records, its feature is further releasably to be arranged on the laser drilling device of getting through hole on the insulating barrier on above-mentioned holding components.

12. the laminated body manufacturing apparatus of claim item 9～11 each records, its feature are the false compression bonding apparatus above pushing proper time of further releasably being arranged on the laminate film layer on above-mentioned holding components.

13. the laminated body manufacturing apparatus of claim item 9～12 each records, its feature are further releasably to be provided with on above-mentioned holding components in order to detect the ccd video camera device that the thin layer state is made a video recording.

14. the laminated body manufacturing apparatus, wherein

The going barrel of the polygon that on periphery, has the smooth scope of operation of continuous division and can intermittently rotate,

Be provided with on this going barrel periphery with the carrier film twisting cohesion the film feed mechanism on above-mentioned each scope of operation that is laid in,

Halted state at above-mentioned going barrel is facing toward on the operation post of the above-mentioned scope of operation, the insulating barrier that sets one or more spue ceramic slurry or insulating resin cream respectively forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and the drying device that makes above-mentioned slurry, conductor paste drying

When each rotation of above-mentioned going barrel, on the carrier film of the above-mentioned scope of operation, on insulating barrier, form the 1 layer film layer that has set the regulation conductive pattern at least, and form laminated body by carrying out this spinning movement repeatedly.

15. the laminated body manufacturing apparatus of claim item 14 records, its feature are that the adsorption hole that carries out vacuum attraction internally is set on the scope of operation of above-mentioned going barrel, by this adsorption hole carrier film are remained on the scope of operation with adsorbing.

16. the laminated body manufacturing apparatus of claim item 14 or 15 records, its feature are directly to dispose above-mentioned drying device respectively on the operation post of above-mentioned insulating barrier formation device or conductor layer formation device back.

17. the laminated body manufacturing apparatus of claim item 14～16 each records, its feature are above-mentioned insulating barriers to be formed in the device at least 1 and sprays ceramic slurry or insulating resin cream by ink-jetting style, forms insulating barrier.

18. the laminated body manufacturing apparatus of claim item 17 records, its feature is when above-mentioned conductor layer formation device begins to carry out work on each scope of operation, on carrier film, set up reference mark by this device, the operation post that forms device facing to the insulating barrier that has disposed above-mentioned conductor layer formation device and ink-jetting style sets ccd video camera, determines above-mentioned conductor layer formation device and above-mentioned insulating barrier to form the position of device by the said reference mark with this video camera picked-up being carried out image processing.

Form insulating barrier 19. the laminated body manufacturing apparatus of claim item 14 records, its feature are above-mentioned insulating barrier formation devices with ink-jetting style, on the operation post of this back, set the false compression bonding apparatus of pushing above-mentioned insulating barrier.

20. the laminated body manufacturing apparatus of claim item 14 records, its feature is that the configuration conductor layer forms device and insulating barrier formation device on 1 operation post of above-mentioned going barrel, form device with this conductor layer, conductor paste is injected on the formed conductive pattern forms through hole electrode, form device with insulating barrier, form insulating barrier forming between the electrode layer that device forms filling pottery slurry or insulating resin cream by conductor layer.

21. the laminated body manufacturing apparatus of claim item 14 record, its feature are the false compression bonding apparatus above pushing proper time of being provided in the above-mentioned thin layer of lamination on 1 operation post of above-mentioned going barrel.

22. the laminated body manufacturing apparatus, its feature is

The going barrel of the polygon that on periphery, has the smooth scope of operation of continuous division and can intermittently rotate,

Be provided with on this going barrel periphery with the carrier film twisting cohesion the film feed mechanism on above-mentioned each scope of operation that is laid in,

Halted state at above-mentioned going barrel is facing toward on the operation post of the above-mentioned scope of operation, the insulating barrier that sets one or more spue ceramic slurry or insulating resin cream respectively forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and the drying device that makes above-mentioned slurry, conductor paste drying

When each rotation of above-mentioned going barrel, on the carrier film of the above-mentioned scope of operation, on insulating barrier, form the 1 layer film layer that has set the regulation conductive pattern at least, and form laminated body by carrying out this spinning movement repeatedly, be provided in and cut off the shearing device that above-mentioned carrier film makes the laminated body disjunction on each scope of operation, and on following 1 operation post, set recovery by disjunction the laminated body recovering mechanism of above-mentioned laminated body.

23. the laminated body manufacturing apparatus of claim item 22 records, its feature is that above-mentioned shearing device is configured on the next operation post of the operation post that has disposed above-mentioned false compression bonding apparatus, and the scope of operation that above-mentioned laminated body recovering mechanism is configured in above-mentioned going barrel stops on bottom the operation post.

24. the laminated body manufacturing apparatus, its feature is

Above operation post, the insulating barrier that spue ceramic slurry or insulating resin cream can be set respectively with coming in and going out forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and makes above-mentioned slurry, the drying device of conductor paste drying, by making above-mentioned insulating barrier form device, drying device and conductor layer formation device are come in and gone out above the operation post repeatedly, on insulating barrier, forming the thin layer that has set the regulation conductive pattern on the operation post, by making this insulating barrier form device repeatedly, drying device and conductor layer form device and come in and go out, and form the laminated body that is made of the regulation thin layer.

25. the laminated body manufacturing apparatus of claim item 24 records, its feature are to be provided with the false compression bonding apparatus of pushing these thin layers when forming 1～a plurality of thin layer.

26. the laminated body manufacturing apparatus of claim item 25 record, its feature be by above the operation post and this operation post between guarantee to be used for the space of the above-mentioned thin layer of lamination, above-mentioned false compression bonding apparatus is set.

27. the laminated body manufacturing apparatus, its feature is

Compression bonding apparatus is set above operation post, and the insulating barrier that spue ceramic slurry or insulating resin cream can be set between each this operation post and compression bonding apparatus with coming in and going out forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and the drying device that makes above-mentioned slurry or conductor paste drying

When making this insulating barrier form device, drying device, when conductor layer forms device and retreats, be provided with at least cut-off that the space that is used for lamination that makes the operation post top is not communicated with extraneous gas and at least setting be used in the vacuum plant of formation vacuum atmosphere in the space of lamination

Whenever by making above-mentioned insulating barrier form device repeatedly, drying device, when coming in and going out the thin layer that forms the number of wanting, pushes in conductor layer formation device with compression bonding apparatus, push laminated body and with the inaccessible above-mentioned space that is used for lamination of cut-off in the regulation film number of plies, one side makes vacuum plant work, simultaneously with this laminated body of the true crimping of compression bonding apparatus.

28. the laminated body manufacturing apparatus of claim item 24～27 each records, its feature are that above-mentioned insulating barrier formation device sprays ceramic slurry with ink-jetting style or insulating resin cream forms insulating barrier.

29. the laminated body manufacturing apparatus of claim item 24～27 each records, its feature are that above-mentioned insulating barrier formation device is an ink-jetting style, filling pottery slurry forms insulating barrier between the electrode layer by being injected in.

30. the laminated body manufacturing apparatus, its feature is

The insulating barrier that spue ceramic slurry or insulating resin cream can be set respectively above operation post with coming in and going out forms device, the conductor layer that sprays conductor paste with ink-jetting style forms device and makes above-mentioned slurry, the drying device of conductor paste drying, by making above-mentioned insulating barrier form device, drying device and conductor layer form device discrepancy operation post top, on insulating barrier, forming the thin layer that has set the regulation conductive pattern on the operation post, by making this insulating barrier form device repeatedly, drying device and conductor layer formation device are come in and gone out and are formed the laminated body that is made of the regulation thin layer, above-mentioned insulating barrier forms device and has ink-jetting style, forms the insulating barrier with through hole by spraying.

31. being above-mentioned conductor layers, the laminated body manufacturing apparatus of claim item 30 records, its feature form device by in above-mentioned through hole, forming through hole electrode with ink-jetting style injection conductor paste.

32. the laminated body manufacturing apparatus of claim item 27 records, its feature be provided with above the above-mentioned operation post by and compression bonding apparatus between come in and go out, on insulating barrier, get the laser drilling device of through hole, form device is got the conductor paste filling by this laser drilling device through hole by above-mentioned conductor layer, form through hole electrode.

33. the laminated body manufacturing apparatus of claim item 32 record, its feature is that insulating barrier is formed device, drying device, conductor layer form device and laser drilling device be integrated into above-mentioned operation post around.

34. the laminated body manufacturing apparatus, it has

Make the overlapping insulating trip laminated device of insulating trip, the conductor layer that sprays conductor paste on insulating trip forms device, and the insulating barrier that ceramic slurry or insulating resin cream are spued on same insulating trip forms device,

Has the laminated body of the thin layer that has set the regulation conductive pattern by using above-mentioned each device repeatedly, between each insulating trip of multilayer insulation sheet, forming.

35. the laminated body manufacturing apparatus of claim item 34 records, its feature is

Basal disc can be moved back and forth on the interval path of the regulation of linearity and basal disc is set up or down, and on this interval path, respectively and establish that one or more above-mentioned conductor layers form devices and above-mentioned insulating barrier forms device,

Above-mentioned basal disc on the above-mentioned interval path 1 time or repeatedly move back and forth during, supply with insulating trip by above-mentioned insulating trip laminated device, on this insulating trip, form device and above-mentioned insulating barrier and form device and form the thin layer that has set the regulation conductive pattern, carry out these processes repeatedly and form laminated body by above-mentioned conductor layer.

36. the laminated body manufacturing apparatus of claim item 35 records, its feature is

It is that the conductor layer that sprays conductor paste forms the unit that above-mentioned conductor layer forms device, and above-mentioned insulating barrier to form device be that the spue insulating barrier of ceramic slurry or insulating resin cream forms the unit,

Basal disc can be moved back and forth in the regulation interval and up or down basal disc is set, above above-mentioned operation post and establish a plurality of holding componentss, and one or more above-mentioned insulating barriers are formed unit and above-mentioned conductor layer form the unit and releasably be installed on these holding componentss.

37. the laminated body manufacturing apparatus of claim item 34 records, its feature is

The going barrel of the polygon that on periphery, has the smooth scope of operation of continuous division and can intermittently rotate,

One or more above-mentioned insulating trip laminated devices are set respectively on to the operation post of the above-mentioned scope of operation below this going barrel halted state, above-mentioned insulating barrier forms device and above-mentioned conductor layer forms device,

When each rotation of above-mentioned going barrel, on the insulating trip of the above-mentioned scope of operation of supplying with by above-mentioned insulating trip laminated device, form the 1 layer film layer that has set the regulation conductive pattern at least, and form laminated body by carrying out above-mentioned spinning movement repeatedly.

38. the laminated body manufacturing apparatus of claim item 34 records, its feature is

Above basal disc above-mentioned insulating trip laminated device can be set with coming in and going out respectively, above-mentioned insulating barrier forms device and above-mentioned conductor layer forms device,

By making these insulating trip laminated devices, insulating barrier forms device and conductor layer formation device is come in and gone out above basal disc, is forming the thin layer that has set the regulation conductive pattern on the basal disc on insulating trip, and each installs the formation laminated body of coming in and going out by making these repeatedly.

39. the laminated body manufacturing apparatus of claim item 38 records, its feature is

Be provided with above basal disc and ought make insulating trip push the press device of insulating trip overlapping proper time, and above same basal disc above-mentioned insulating trip laminated device can be set with coming in and going out respectively, above-mentioned conductor layer forms device and above-mentioned insulating barrier forms device,

When making these insulating trip laminated devices, conductor layer forms device, when forming device and retreat with insulating barrier, be provided with at least make the basal disc top the space that is used for lamination not with the cut-off of air communication with the vacuum plant of formation vacuum atmosphere in the space that is used in lamination is set at least

One side is by making vacuum plant work with the inaccessible above-mentioned space that is used for lamination of above-mentioned cut-off, one side is pushed by making above-mentioned insulating trip laminated device repeatedly with above-mentioned press device, insulating barrier forms device and conductor layer forms the laminated body that device is come in and gone out and formed.

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