CN1437015A - Fluorophor detecting method and fluorophor detecting apparatus - Google Patents
Fluorophor detecting method and fluorophor detecting apparatus Download PDFInfo
- Publication number
- CN1437015A CN1437015A CN03103374A CN03103374A CN1437015A CN 1437015 A CN1437015 A CN 1437015A CN 03103374 A CN03103374 A CN 03103374A CN 03103374 A CN03103374 A CN 03103374A CN 1437015 A CN1437015 A CN 1437015A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- fluorophor
- signal level
- band
- interval
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/42—Measurement or testing during manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
In a defect detection of a striped fluorescent material stripe coated on a glass substrate of, e.g. a plasma display, there occurs a problem that a defective coating of the striped fluorescent material cannot be properly detected due to a moire phenomenon incurred by a non-radiating portion of the striped fluorescent material and also by nonuniformity of an ultraviolet illumination being used for exciting the fluorescent material to radiate. A fluorescent detecting method includes the steps of applying an ultraviolet light to a plurality of a striped fluorescent material formed on a substrate; photographing a light radiated from the striped fluorescent material; detecting signal levels of the photographed picture; averaging signal levels of portions, the signal levels of the portions being equal to or greater than a predetermined value; and detecting a defective coating of the striped fluorescent material based on the averaged result.
Description
Technical field
The present invention relates to a kind of fluorophor detection method and fluorophor pick-up unit, and particularly a kind of detection is coated in the fluorophor detection method and the fluorophor pick-up unit of the coating defective of the fluorophor on the glass substrates such as plasma display.
Background technology
According to Fig. 3 one prior art example is described.Fig. 3 is the block diagram that roughly constitutes that the fluorophor pick-up unit of the coating defective that detects the fluorophor on the glass substrate be coated in plasma display etc. is shown.
Among Fig. 3,31 expressions scribble the glass substrate of fluorophor, the image pickup part that 32 expressions are made up of CCD camera etc., the optical system of 33 expression image pickup parts 32,34 expressions make the ultraviolet lighting portion of light-emitting phosphor, 35 expressions detect the image processing part of the irregular defective of coating, and 36 expressions show the display part of testing result.In addition, can replace display part with printer.The operating portion of 37 expression fluorophor pick-up units.
Fig. 5 is the key diagram of the fluorophor applicator surface of explanation plasma display.Among Fig. 5, the substrate that scribbles fluorophor of 21 expression plasma displays, for example glass substrate.The banded red-emitting phosphors overlay (being designated hereinafter simply as R fluorophor band) that is coated on the substrate 21 of 22 expressions (or long and narrow shape); 23 expressions are coated in the green-emitting phosphor overlay (being designated hereinafter simply as G fluorophor band) on the substrate 21 bandedly; 24 expressions are coated in the blue emitting phophor overlay (being designated hereinafter simply as B fluorophor band) on the substrate 21 bandedly.In addition, the 25th, the part (being designated hereinafter simply as the next door) between R, G, the B fluorophor.As mentioned above, the structure of the fluorophor applicator surface of plasma display is, clips next door 25 between R, G, the B fluorophor band 22,23,24, periodically is configured on the substrate 21.To call this plasma display light-emitting area that is configured in the following text.
And, existing fluorophor pick-up unit, irradiation electromagnetic radiation light makes the fluorophor band that is coated on the substrate luminous on the full display surface of plasma display light-emitting area.For example, shown in Figure 5, on the full display surface of plasma display light-emitting area, irradiation makes the fluorophor band that is coated on the substrate 21 luminous by the ultraviolet ray of ultraviolet lighting portion 34 outputs.That is, R fluorophor band 22 sends red light, and G fluorophor band 23 sends green light, and B fluorophor band 24 sends blue light.
The light-emitting area that image pickup part 32 is taken the plasma display that is in luminance by optical system 33, and thus obtained picture signal outputed to image processing part 35.At this moment, according to kind (red (R), green (G), blue (B)) as the fluorescent paint of the fluorophor band of detected object, colorized optical filtering mirror corresponding to various fluorophor bands is installed on the optical system 33 in image pickup part 32, is obtained the output signal of each color.
But, as previously described, detect with the fluorophor pick-up unit under the situation of light-emitting area of plasma display, for example, when detecting R fluorophor band 22, owing on optical system 33, red filter is installed, can only detect the luminous signal that sends by R fluorophor band 22 at image pickup part 32, so the photographic images deepening of next door 25 parts and G and B fluorophor band portion.Though G and B fluorophor band portion be originally luminous, because red filter is installed, can not detect in camera head 6 therefore that it is luminous.So, next door 25 parts and G and B fluorophor band portion are called non-luminous component.
In existing known technology, have a kind of in order to estimate the irregular situation of comprehensive coating of plasma display light-emitting area, utilizing spatial filtering mirror etc. that the luminance signal of captured image is implemented homogenising (for example handles, with the luminance level accumulation between regularly) method, but simple homogenising can produce the interference stripes phenomenon, thereby exists the interference stripes that will be produced and be mistakened as that to do coating irregular and problem such as detect.
Fig. 4 is the image pickup part 32 that expression utilization is used the CCD camera, the image when taking R fluorophor band 22 by red filter.Image can produce the interference stripes phenomenon as can be known on 42 whole of the light-emitting areas of plasma display 41 thus.
In addition, ultraviolet lighting portion 34 is arranged at the both sides of the glass substrate 31 that scribbles fluorophor, and irradiation ultraviolet radiation, and therefore, ultraviolet ray can not be radiated on the glass substrate 31 equably.Thus, it is irregular that illumination takes place, and also becomes the reason that the irregular flase drop of coating is surveyed.
In addition, have a kind ofly in the detection method of known plasma display panel (for example, please refer to Patent Document 1), use colour camera or monochrome camera, detect the irregular method of coating of R, G, B fluorophor, but do not mention above-mentioned interference stripes phenomenon in the described method.
Summary of the invention
In above-mentioned prior art, exist owing to the interference stripes phenomenon takes place on the photographic images, perhaps because the shortcoming of the inhomogeneous generation flase drop survey of electromagnetic wave or particle line (for example ultraviolet ray) irradiation.
The purpose of this invention is to provide a kind of fluorophor detection method and fluorophor pick-up unit, it can alleviate owing to the interference stripes phenomenon that produced by the banded influence that applies the non-luminous component of fluorophor, and can apply irregular detection of coating of fluorophor accurately to band shape.
Another object of the present invention provides a kind of fluorophor detection method and fluorophor pick-up unit, and its illumination that can alleviate illumination such as ultraviolet ray is irregular, can also carry out the irregular detection of coating to band shape coating fluorophor accurately.
Fluorophor detection method of the present invention is reached by following manner, to the electromagnetic radiation light (electromagnetic wave or particle line) such as several banded fluorophor irradiation ultraviolet radiations that are formed at substrate; The light that shooting is sent from above-mentioned banded fluorophor; Detect the signal level of above-mentioned captured image; Calculate the above that part of mean value of signal level of institute's definite value that is equivalent to above-mentioned signal level; Irregular according to the coating that above-mentioned mean value of calculating detects above-mentioned banded fluorophor.
In fluorophor detection method of the present invention, calculate the calculating of that part of mean value of the above signal level of institute's definite value of being equivalent to above-mentioned signal level, be to decide the interval at each to carry out.
In fluorophor detection method of the present invention, above-mentioned several banded fluorophor are at least a fluorophor bands in R, G, the B fluorophor band, and above-mentioned to decide the interval be to equate with the roughly repetition period of above-mentioned fluorophor band.
In fluorophor detection method of the present invention, detect the maximal value of the above signal level of institute's definite value of above-mentioned signal level, and will decide the interval as above-mentioned between above-mentioned maximal value.
In fluorophor detection method of the present invention, calculate maximum signal level, minimum signal level, mean value and deviation by above-mentioned shot image signals level, the coating that detects the fluorophor band according to the aforementioned calculation result is irregular.
And, fluorophor pick-up unit of the present invention be by, form to the irradiation portion that is formed at banded fluorophor irradiation electromagnetic waves of on the substrate several or particle line, the image processing part taking the image pickup part of the light that sends by above-mentioned banded fluorophor and handle above-mentioned shot image signals; Above-mentioned image pickup part is made up of the line sensor that moves on the direction of above-mentioned band; Above-mentioned image processing part has the signal level of the image that detects above-mentioned shooting, and calculate the above that part of mean value of signal level of institute's definite value that is equivalent to above-mentioned signal level, again according to the irregular function of coating of the above-mentioned above-mentioned banded fluorophor of average detection of calculating.
In fluorophor pick-up unit of the present invention, above-mentioned image processing part is, is made of the member of being decided in each of above-mentioned picture signal to calculate that part of mean value of the signal level of institute more than the definite value that be equivalent to above-mentioned signal level in the interval.
In fluorophor pick-up unit of the present invention, above-mentioned several banded fluorophor are at least a in R, G, the B fluorophor band, and above-mentioned image processing part comprises and detects the above-mentioned member of deciding the interval that equates with the roughly repetition period of above-mentioned fluorophor band.
In fluorophor pick-up unit of the present invention, above-mentioned image processing part has the maximal value of the signal level more than the institute's definite value that detects above-mentioned signal level, and will be set at the above-mentioned interval level detection portion that decides between the above-mentioned maximal value at interval.
In addition, in fluorophor pick-up unit of the present invention, above-mentioned image processing part has level detection portion and the irregular test section of coating, maximum signal level, minimum signal level, mean value and deviation are calculated by above-mentioned shot image signals level by above-mentioned level detection portion, and the irregular test section of above-mentioned coating is irregular according to the coating that the aforementioned calculation result detects the fluorophor band.
Brief Description Of Drawings
Fig. 1 is the block diagram of one embodiment of the present invention.
Fig. 2 is the luminance signal oscillogram of the explanation principle of the invention.
Fig. 3 is that the example summary of existing fluorophor pick-up unit constitutes block diagram.
Fig. 4 is the existing interference stripes phenomenon generation illustration of using the video of fluorophor pick-up unit shooting.
Fig. 5 is the key diagram of plasma display fluorophor applicator surface.
Fig. 6 is action specification figure of the present invention.
Fig. 7 is the partial enlarged drawing of embodiment of the present invention.
Fig. 8 is the key diagram of the principle of the invention.
Embodiment
Fig. 1 illustrates fluorophor pick-up unit one embodiment of the present invention.Among Fig. 1, the mounting table of glass substrates such as 1 expression plasma display, glass substrates such as 2 expression plasma displays, 3 expression R, G, B fluorophor band, 4 expressions make the luminous ultraviolet lighting light source of fluorophor band 3,5 expressions are equipped with lens and R successively, G, the optical system of B colorized optical filtering mirror, 6 expression shooting image pickup parts such as line sensor video camera, 7 expressions are used to make light source 4 and image pickup part 6 together along the portion of travel mechanism on substrate 2 scanning glass substrates 2 tops, 8 expressions detect the irregular image processing part of coating, 9 expressions show the display parts such as colour picture monitor of testing result, also can constitute by the Printing Department of printer etc., 10 expressions drive the drive division of portion of travel mechanism 7, the control part of 11 expression control image processing parts and drive division, 15 expression operating portions.Also have, image processing part 8 is, by level detection portion 12, the equalization handling part 13 of the luminance level of detection maximal value described later, minimum value etc. and apply irregular test section 14 and constitute.In addition, though in the present embodiment, the device that drives image pickup parts 6 with drive division 7 is illustrated, also fixing image pickup part 6 drives the mounting table 1 of glass substrate 2.
Fig. 7 is the enlarged drawing of mounting table, glass substrate and the image pickup part of fluorophor pick-up unit shown in Figure 1, with Fig. 1 in marked identical symbol on the identical position.Mounting table 1 is an estrade of placing glass substrate 2 when detecting, but on the glass substrate of plasma display panel, for example if red (R) fluorophor band of coating, then in order to detect its coating state, transport the glass substrate that is coated with redness (R) fluorophor band from direction shown in the arrow, and be fixed on institute's allocation shown in Figure 7, irregular to detect coating.Also carry out identical detection in the circuit of the circuit of green (G) fluorophor band of coating and blue (B) fluorophor band of coating.In addition, the size of glass substrate is 1460mm * 1030mm in the present embodiment, but its size is not limited to this.
The 71st, the part of portion of travel mechanism 7 is support image pickup part 6 and ultraviolet lighting supporting members with light source 4.Image pickup part 6, for detecting a glass substrate, its structure as shown in FIG., 4 line sensor video cameras are formed a line, and are covered with the glass substrate of wide 1030mm.The photography wide cut of a line sensor video camera is about 260mm, and the field range between the line sensor video camera constitutes overlaps.Ultraviolet lighting is reflected at glass substrate 2 with the ultraviolet ray 72 of light source 4 emissions, and image pickup part 6 is taken the image of red (R) fluorophor band 3 by optical system 5.This supporting member 71 for example moves on the Y-axis of glass substrate 2 from right to left side with constant speed on the longitudinally of red (R) fluorophor band 3, carries out the scanning of whole of glass substrate.
The following describes above-mentioned action.To glass substrates such as plasma display 2 irradiation ultraviolet radiations 72, make the banded fluorophor 3 of coating or printing luminous by ultraviolet lighting light source 4.Take this luminescent image with image pickup part 6.At this moment, the kind (R, G, B) of the fluorophor that detects according to need is installed the colorized optical filtering mirror of corresponding each color fluorophor on image pickup part 6, and this operation is same as described above.The image of being taken by image pickup part 6 is transferred to image processing part 8.
Below, with reference to Fig. 2, Fig. 6 and Fig. 8, the action of fluorophor pick-up unit among Fig. 1 is elaborated.Fig. 6 is illustrated on the glass substrate 21 of the present invention, scribbles the plasma display light-emitting area of shades of colour fluorophor band, and the state that the online A of line sensor video camera moves along arrow 61 directions is shown.In addition, Fig. 6 illustrates all coated states of R, G, B fluorophor band, but according to the coating engineering, not necessarily all fluorophor bands are all coated.
In addition, Fig. 8 illustrates the part of the section of the plasma display light-emitting area on the online A, at the position mark identical symbol identical with Fig. 6.And the spacing of R, G, each fluorophor band of B for example is respectively 900 μ m.Fig. 8 (a) is illustrated on the optical system 5 red filter is installed, and the luminance level when taking R fluorophor bands with line sensor video camera 6.Therefore, the part of R fluorophor band emits a brilliant light, with (bright) expression.But,, therefore represent with (secretly) because the light that G and B fluorophor band portion send is covered and deepening by red filter.
The action of image processing part 8 is described below in conjunction with Fig. 2.Fig. 2 (a) is identical with Fig. 8 (a), and expression is by the luminance level of for example R fluorophor band of the shooting of the line sensor video camera on the online A.The interval Ta that Fig. 2 (b) expression is set arbitrarily.This interval Ta is irregular for detecting coating, with the luminance signal equalization of the R fluorophor band shown in Fig. 2 (a), is easy to carry out so that apply irregular judgement.Therefore, interval Ta can be provided with arbitrarily, but be in the present embodiment, at the interval of detecting each color fluorophor band with level detection portion 12, promptly detect the peak value of the luminance level of R fluorophor band, and with (corresponding about 900 μ m) between the peak value of this luminance level and peak value Ta between the setting district at interval.In addition, in interval Ta, the luminance signal of the sensor of 18 pixels of line sensor video camera is output.Also have, 1 pixel size of line sensor video camera is about 50 μ m.
Then, in equalization handling part 13 with the luminance level equalization of interval Ta.That is, the signal shown in Fig. 2 (a) is as shown in Fig. 2 (c), in the signal level (the integrating value of the interval Ta of luminance signal) of the process equalization of each interval Ta.By among Fig. 2 (c) as can be known, even luminance level is roughly certain as shown in Fig. 2 (a) (state that expression R fluorophor band roughly applies equably), with the signal level of averaging of luminance level, can carry out also that for example L1, L2, L3 so significantly change.This is (next door part and in fact luminous because light-emitting zone and non-luminous region, but because the color difference of optical filtering, can be in the circuit sensor camera as the detected fluorophor band portion of signal) accumulated, therefore its signal level can change significantly in the area of light-emitting zone.
The luminance level equalization signal level afterwards that Fig. 2 (d) expression is above with the threshold value TH shown in Fig. 2 (a).As known in the figure, signal level L4, L5, L6 also become roughly the same level.That is, in interval Ta, luminous component divided into the time and do not produce level difference when dividing to go into to 1 band to 2 bands of fluorophor.Therefore, in the present invention, in the luminance level of the fluorophor band 3 that current use line sensor camera 6 is captured, with the luminance level more than the threshold value TH in each interval averaging of Ta, make the level of being calculated can not be subjected to the not influence of light-emitting zone thus, thereby reduce above-mentioned interference stripes.In addition, threshold value TH is that to be set at luminance signal peaked about 70%, but because luminance level also can change according to the width of fluorophor band, the thickness of coated film, therefore, threshold value TH is that sample plot is set at.Also have, as in each interval Ta with the method for the averaging of luminance signal more than the threshold value TH, also can be from the luminance level shown in Fig. 2 (a), the luminance level below the threshold value TH is carried out subtraction, calculate its average value in interval again.
Though the integral body of the line A on the ultraviolet lighting light source 4 irradiations glass substrate 1 as shown in Figure 6, ultraviolet lighting light source 4 also changes at central portion and its exposure of end.Therefore, also can obtain correction factor etc. by measuring the distribution of illumination light in advance, and revise when calculating the mean value of brightness value with equalization handling part 13, the illumination of revising ultraviolet lighting light source 4 is irregular.
Apply irregular test section 14 and detect by equalization handling part 13 and carried out signal level equalization, shown in Fig. 2 (d), if the level that is detected be in decide scope, be judged as then that the coating that does not have the fluorophor band is irregular maybe can allow; If the level that is detected surpass decide scope, then be judged as and exist the coating of fluorophor band irregular.For example, in the time of on being applied to actual product, with roughly equably the mean value level of luminance signal under the situation of coating be made as 100% o'clock, then than the high level more than 20% of this level, when perhaps low level more than 20% has one or more, just be judged as existence and apply irregular.And this decision level is the poorest level, can suitably change according to the kind of the product of manufacturing or yield rate etc.Exist coating irregular if be judged as, then Zhi Hou treatment process is ended, and the fluorophor band is removed, and turns back to the initial stage operation of the new fluorophor band of coating.Thus for example, the defective products of particle display board such as can reduce, and can effectively enhance productivity.
And, though above-mentioned embodiment relates to the level of the luminance signal of interval Ta through equalization, can grasp the irregular situation of its coating quantitatively, and can effectively be applied in the improvement of coating engineering of fluorophor band each fluorophor band.Below be explained.Image processing part 8, from the image brightness signal of having imported, calculate high-high brightness, minimum brightness, mean value, deviation etc. in level detection portion 12, and sensed luminance is irregular quantitatively to calculate the result according to these, and the uneven luminance information transmission that detects is arrived display part 9.Promptly, shown in Fig. 8 (b), the luminosity level of setting suitable fluorophor band (for example mean value) is 100%, will be than the high level more than 20% of this level, perhaps low level more than 20% is as bad level, calculate the luminous level of each pixel, and be benchmark, calculate the deviation of the luminous level of each pixel with mean value.Whole pixels to glass substrate 2 are carried out aforementioned calculation, according to result of determination such as its high-high brightness, minimum brightness, mean value and deviations, write down the whether good position and the number of whole pixels, and manage.Thus, for example, the coating that particle display board fluorophor band such as can estimate quantitatively is irregular, and can effectively be applied to apply in the improvement of engineering.
More than the present invention is had been described in detail, but the present invention is not limited to the above-mentioned fluorophor detection method and the embodiment of fluorophor pick-up unit, can be widely used in the detection method and pick-up unit that are coated with application of the coating fluorophor etc. beyond above-mentioned.That is, fluorophor is not only can be trichromatic, also can be its complementary colors.And, if these 3 kinds of light that fluorophor sent can keep good white balance, and in these 3 kinds of fluorophor, also can than short by the twilight sunset after the electromagnetic radiation rayed separately.
In addition, in the above-described embodiment, be that example has illustrated electromagnetic radiation light with the ultraviolet ray, if but when illumination is mapped on the fluorophor luminous electromagnetic radiation light, also can be particle lines such as electromagnetic wave, gamma (γ) line or X line.
According to the present invention, owing to can remove the interference stripes phenomenon that causes owing to non-luminous components such as next doors, the coating that therefore can detect fluorophor band etc. exactly is irregular, is easy to carry out the defective products detection.In addition, can also carry out quantitative detection, and be effective to the improvement of coating engineerings such as fluorophor band.And the irradiation that can also alleviate ultraviolet lighting is irregular, and can obtain fabulous effect in the irregular detection of the coating that is used for fluorophor bands such as plasma display panel.
Claims (10)
1. the fluorophor detection method is characterized in that may further comprise the steps: to several banded fluorophor irradiation electromagnetic wave or particle lines of being formed on the substrate; Shooting is by the light of above-mentioned banded fluorophor emission; Detect the signal level of above-mentioned captured image; Calculate the above that part of mean value of signal level of institute's definite value that is equivalent to above-mentioned signal level; Coating according to the above-mentioned above-mentioned banded fluorophor of average detection of calculating is irregular.
2. fluorophor detection method according to claim 1 is characterized in that: aforementioned calculation is equivalent to the calculating of that part of mean value of the above signal level of institute's definite value of above-mentioned signal level, be each fixed interval carry out.
3. fluorophor detection method according to claim 2 is characterized in that: above-mentioned several banded fluorophor are at least a in R, G, the B fluorophor band, and above-mentioned to decide the interval be to equate with the roughly repetition period of above-mentioned fluorophor band.
4. fluorophor detection method according to claim 2 is characterized in that: detect the maximal value of the above signal level of above-mentioned signal level institute definite value, and will decide the interval as above-mentioned at interval between the above-mentioned maximal value.
5. fluorophor detection method according to claim 1, it is characterized in that: calculate maximum signal level, minimum signal level, mean value and deviation by the signal level of above-mentioned captured image, the coating that detects the fluorophor band according to the above-mentioned result who calculates is irregular again.
6. fluorophor pick-up unit, by forming to the image processing part that is formed at several the banded fluorophor irradiation electromagnetic waves of substrate or the irradiation portion of particle line, the image pickup part of taking the light that is sent by above-mentioned banded fluorophor, the above-mentioned shot image signals of processing, it is characterized in that: wherein above-mentioned image pickup part is made up of the line sensor that moves on the direction of above-mentioned band; Above-mentioned image processing part can detect the signal level of above-mentioned captured image, and calculates and be equivalent to the above that part of mean value of signal level of above-mentioned signal level institute's definite value, and is irregular according to the coating of the above-mentioned above-mentioned banded fluorophor of average detection of calculating again.
7. fluorophor pick-up unit according to claim 6, it is characterized in that: above-mentioned image processing part is interval by being decided in each of above-mentioned picture signal, and the member of calculating that part of mean value of the above signal level of institute's definite value of being equivalent to above-mentioned signal level constitutes.
8. fluorophor pick-up unit according to claim 7, it is characterized in that: above-mentioned several banded fluorophor are at least a in R, G, the B fluorophor band, and above-mentioned image processing part comprises and detects the above-mentioned member of deciding the interval that equates with the roughly repetition period of above-mentioned fluorophor band.
9. fluorophor pick-up unit according to claim 7, it is characterized in that: above-mentioned image processing part has level detection portion, it can detect the maximal value of the above signal level of institute's definite value of above-mentioned signal level, and will be set at the above-mentioned interval of deciding between the above-mentioned maximal value at interval.
10. fluorophor pick-up unit according to claim 6 is characterized in that: above-mentioned image processing part has level detection portion and is coated with the irregular test section of symbol; Maximum signal level, minimum signal level, mean value and deviation are calculated by the signal level of above-mentioned captured image by above-mentioned level detection portion; The irregular test section of above-mentioned coating is irregular according to the coating that the above-mentioned result who calculates detects the fluorophor band.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP014181/2002 | 2002-01-23 | ||
JP2002014181 | 2002-01-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1437015A true CN1437015A (en) | 2003-08-20 |
CN1291226C CN1291226C (en) | 2006-12-20 |
Family
ID=27650937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031033741A Expired - Fee Related CN1291226C (en) | 2002-01-23 | 2003-01-23 | Fluorophor detecting method and fluorophor detecting apparatus |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR20030064298A (en) |
CN (1) | CN1291226C (en) |
TW (1) | TW591206B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102636469A (en) * | 2006-03-22 | 2012-08-15 | 阿米克公司 | Fluorescence reader |
CN101676232B (en) * | 2008-08-27 | 2014-04-23 | 康宁股份有限公司 | Systems and methods for determining the shape of glass sheets |
CN109596320A (en) * | 2018-11-29 | 2019-04-09 | 江西省晶瑞光电有限公司 | Fluorescent film piece performance test method and fluorescence diaphragm Central Plains material match the method for determination |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6041691B2 (en) * | 2013-01-31 | 2016-12-14 | 大塚電子株式会社 | Measuring apparatus and measuring method |
-
2003
- 2003-01-21 KR KR10-2003-0004000A patent/KR20030064298A/en active Search and Examination
- 2003-01-22 TW TW092101391A patent/TW591206B/en not_active IP Right Cessation
- 2003-01-23 CN CNB031033741A patent/CN1291226C/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102636469A (en) * | 2006-03-22 | 2012-08-15 | 阿米克公司 | Fluorescence reader |
CN102636469B (en) * | 2006-03-22 | 2016-07-06 | 阿米克公司 | fluorescence reader |
CN101676232B (en) * | 2008-08-27 | 2014-04-23 | 康宁股份有限公司 | Systems and methods for determining the shape of glass sheets |
CN103936265A (en) * | 2008-08-27 | 2014-07-23 | 康宁股份有限公司 | Method for determining the shape of material sheets and method for determining the shape of glass sheets |
CN103936265B (en) * | 2008-08-27 | 2016-06-15 | 康宁股份有限公司 | For determining the method for plate of material shape and the method for determining glass article shape |
CN109596320A (en) * | 2018-11-29 | 2019-04-09 | 江西省晶瑞光电有限公司 | Fluorescent film piece performance test method and fluorescence diaphragm Central Plains material match the method for determination |
CN109596320B (en) * | 2018-11-29 | 2021-06-29 | 江西省晶能半导体有限公司 | Fluorescent membrane performance testing method and method for determining raw material ratio in fluorescent membrane |
Also Published As
Publication number | Publication date |
---|---|
KR20030064298A (en) | 2003-07-31 |
CN1291226C (en) | 2006-12-20 |
TW200302340A (en) | 2003-08-01 |
TW591206B (en) | 2004-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI226793B (en) | Apparatus and method for inspecting pattern defect | |
US20090028419A1 (en) | Method for manufacturing plasma display panel, inspection method for inspecting phospor layer and inspection apparatus for inspecting phosphor layer | |
KR20020094004A (en) | Inspection method, inspection device, and manufacturing method for display panel | |
WO2009142299A1 (en) | Signal processing device and projection image display device | |
CN111028773B (en) | Method and device for acquiring compensation coefficient of brightness unevenness compensation technology | |
CN1291226C (en) | Fluorophor detecting method and fluorophor detecting apparatus | |
CN110672615A (en) | Light irradiation apparatus, optical evaluation apparatus, and article manufacturing method | |
US7874888B2 (en) | Inspection method and inspection device, repairing method and repairing device for organic electroluminescence panel | |
JP3771901B2 (en) | Phosphor inspection method and phosphor inspection apparatus | |
KR100880335B1 (en) | Manufacturing method for a plasma display panel and device for testing the same | |
JPH11352013A (en) | Fluorescent substance coating irregularities inspection method | |
JP4673151B2 (en) | Printing deviation inspection method of phosphor | |
JP2010205881A (en) | White adjusting device of led backlight | |
JP4531186B2 (en) | Plasma display panel back plate inspection apparatus and manufacturing method | |
KR101155213B1 (en) | Flat-field correction method for two-dimensional optical inspection | |
JP2005024572A (en) | Method and apparatus for inspecting phosphore | |
CN1288580A (en) | Electron beam profile measurment method and system | |
JP2004245829A (en) | Apparatus for inspecting pattern defect, and method of inspecting pattern defect | |
JP2003288843A5 (en) | ||
JP2000337998A (en) | Inspection apparatus for plasma display panel and manufacture thereof | |
JP4705417B2 (en) | Display panel inspection method and apparatus | |
JP2010014430A (en) | Phosphor inspection device | |
US20080145517A1 (en) | Method for manufacturing plasma display panel, and apparatus for inspecting plasma display panel | |
JP2007249039A (en) | Exposure equipment | |
US20200209682A1 (en) | Backlight unit, display device, manufacturing method for backlight unit, manufacturing apparatus of backlight unit |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20061220 Termination date: 20170123 |
|
CF01 | Termination of patent right due to non-payment of annual fee |