CN1414612A - Treatment method of antireflection film SiON surface hydrogenplasma body - Google Patents
Treatment method of antireflection film SiON surface hydrogenplasma body Download PDFInfo
- Publication number
- CN1414612A CN1414612A CN 02136122 CN02136122A CN1414612A CN 1414612 A CN1414612 A CN 1414612A CN 02136122 CN02136122 CN 02136122 CN 02136122 A CN02136122 A CN 02136122A CN 1414612 A CN1414612 A CN 1414612A
- Authority
- CN
- China
- Prior art keywords
- sion
- photoresist
- film
- treatment method
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB021361223A CN1309029C (en) | 2002-07-19 | 2002-07-19 | Treatment method of antireflection film SiON surface hydrogenplasma body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB021361223A CN1309029C (en) | 2002-07-19 | 2002-07-19 | Treatment method of antireflection film SiON surface hydrogenplasma body |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1414612A true CN1414612A (en) | 2003-04-30 |
CN1309029C CN1309029C (en) | 2007-04-04 |
Family
ID=4748510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021361223A Expired - Fee Related CN1309029C (en) | 2002-07-19 | 2002-07-19 | Treatment method of antireflection film SiON surface hydrogenplasma body |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1309029C (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101956180A (en) * | 2010-07-14 | 2011-01-26 | 中国科学院电工研究所 | Antireflective film SiNx:H surface in-situ NH3 plasma treatment method |
CN106435503A (en) * | 2016-11-02 | 2017-02-22 | 清华大学 | Silicon oxide film with large positive temperature coefficient and deposition method thereof |
CN109065447A (en) * | 2018-08-03 | 2018-12-21 | 深圳市诚朗科技有限公司 | A kind of power device chip and its manufacturing method |
CN109256330A (en) * | 2018-09-06 | 2019-01-22 | 德淮半导体有限公司 | A kind of photolithography method |
CN110634963A (en) * | 2018-05-30 | 2019-12-31 | Imec 非营利协会 | Method for in-situ surface re-passivation in back-contact solar cell |
WO2020138092A1 (en) * | 2018-12-28 | 2020-07-02 | 日産化学株式会社 | Method for improving etching resistance of resist underlayer film by pretreatment using hydrogen gas |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6228760B1 (en) * | 1999-03-08 | 2001-05-08 | Taiwan Semiconductor Manufacturing Company | Use of PE-SiON or PE-OXIDE for contact or via photo and for defect reduction with oxide and W chemical-mechanical polish |
-
2002
- 2002-07-19 CN CNB021361223A patent/CN1309029C/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101956180A (en) * | 2010-07-14 | 2011-01-26 | 中国科学院电工研究所 | Antireflective film SiNx:H surface in-situ NH3 plasma treatment method |
CN106435503A (en) * | 2016-11-02 | 2017-02-22 | 清华大学 | Silicon oxide film with large positive temperature coefficient and deposition method thereof |
CN106435503B (en) * | 2016-11-02 | 2019-02-05 | 清华大学 | A kind of silicon oxide film and its deposition method of big positive temperature coefficient |
CN110634963A (en) * | 2018-05-30 | 2019-12-31 | Imec 非营利协会 | Method for in-situ surface re-passivation in back-contact solar cell |
CN109065447A (en) * | 2018-08-03 | 2018-12-21 | 深圳市诚朗科技有限公司 | A kind of power device chip and its manufacturing method |
CN109065447B (en) * | 2018-08-03 | 2021-02-26 | 北京中兆龙芯软件科技有限公司 | Power device chip and manufacturing method thereof |
CN109256330A (en) * | 2018-09-06 | 2019-01-22 | 德淮半导体有限公司 | A kind of photolithography method |
WO2020138092A1 (en) * | 2018-12-28 | 2020-07-02 | 日産化学株式会社 | Method for improving etching resistance of resist underlayer film by pretreatment using hydrogen gas |
Also Published As
Publication number | Publication date |
---|---|
CN1309029C (en) | 2007-04-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6461776B1 (en) | Resist pattern forming method using anti-reflective layer, with variable extinction coefficient | |
US5879853A (en) | Top antireflective coating material and its process for DUV and VUV lithography systems | |
JP4420592B2 (en) | Method for forming fine pattern of semiconductor element | |
EP0588087B1 (en) | Method of forming a resist pattern using an optimized anti-reflective layer | |
CN1309029C (en) | Treatment method of antireflection film SiON surface hydrogenplasma body | |
CN1211840C (en) | Antireflection film SiON surface CH4 plasma body treatment method | |
CN1251309C (en) | Inorganic anti-reflection film SiON surface trating method for photoetching | |
Babich et al. | Hardmask technology for sub-100-nm lithographic imaging | |
JP3414107B2 (en) | Method for manufacturing semiconductor device | |
JP2002198283A (en) | Resist pattern formation method | |
KR100919564B1 (en) | Method for Forming Fine Pattern of Semiconductor Device | |
KR20100042959A (en) | Method for forming pattern of semiconductor device | |
KR20000006152A (en) | Method for fabricating semiconductor devices | |
KR100555622B1 (en) | Method for forming antireflective layer of semiconductor devices | |
JPH0855791A (en) | Resist pattern formation method and reflection preventive film formation method | |
JPH1131650A (en) | Antireflection coating, substrate to be treated, manufacture of the substrate to be treated, manufacture of fine pattern and manufacture of semiconductor device | |
JP3988873B2 (en) | Manufacturing method of semiconductor device | |
Mimura et al. | A silicon oxide antireflective layer for optical lithography using electron cyclotron resonance plasma deposition | |
KR100215875B1 (en) | Patterning method of photoresist | |
KR100720500B1 (en) | Method for forming fine metallization layer without anti-reflective coating | |
KR100367492B1 (en) | Method for manufacturing conductive line in semiconductor device | |
KR100798247B1 (en) | Method for fabricating semiconductor device | |
KR20050059475A (en) | Method of forming contact hole in semiconductor device | |
KR100842737B1 (en) | Pattern Forming Method of Semiconductor Device | |
KR20020056016A (en) | Method for fabricating minute pattern |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG (GROUP) CO., LTD.; APPLICANT Free format text: FORMER OWNER: SHANGHAI HUAHONG (GROUP) CO., LTD. Effective date: 20060908 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20060908 Address after: 201203 No. 177 blue wave road, Zhangjiang hi tech park, Shanghai, Pudong New Area Applicant after: Shanghai Huahong (Group) Co., Ltd. Co-applicant after: Shanghai integrated circuit research and Development Center Co., Ltd. Address before: 18, Huaihai Road, Shanghai, No. 200020, building 918 Applicant before: Shanghai Huahong (Group) Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070404 Termination date: 20140719 |
|
EXPY | Termination of patent right or utility model |