CN1406322A

CN1406322A - Leak control valve

Info

Publication number: CN1406322A
Application number: CN01805805A
Authority: CN
Inventors: 池昌炫
Original assignee: Individual
Current assignee: Individual
Priority date: 2000-12-29
Filing date: 2001-12-13
Publication date: 2003-03-26
Anticipated expiration: 2021-12-13
Also published as: WO2002053957A1; US6830064B2; US20030037821A1; CN1207503C

Abstract

A leak control valve preventing the damage of the vacuum pump and/or the neighboring instruments even in the case of fluid leak at the vessel. The side wall of the valve poppet closes the channel to the outlet through restoring forces of the springs installed at both sides of the poppet in case when the abrupt pressure change happens by accident.

Description

Leak control valve

Technical field

The present invention relates to a kind of leak control valve, particularly a kind of safety check of under the situation of accidental generation vacuum leak, protecting the instrument of vacuum chamber and vicinity.

Background technique

Recently, safety check has been applied to protect vacuum chamber, for example: on the production line of semiconductor and plasma demonstration dish.

Because traditional safety check is interrupt to leak with one way system, therefore be difficult to technically to be applied in the vacuum-control(led) system between vacuum pump and vacuum tube.

Fig. 1 is the cross sectional view of conventional check valves.With reference to Fig. 1, contained spring 100 applies the restoring force opposite with suction port 110 airflow directions and makes suction port 110 closures.

So, because fault may form undesired high pressure at suction port 110 places.If the air pressure at suction port 110 places is higher than the resistance of spring 100, control valve is opened, and high-pressure spray flows out from passage 130.

For example, according to the another kind of method of prior art, can use a kind of autocontrol valve.Yet autocontrol valve has an intrinsic problem in some sense, and promptly the response time of autocontrol valve is slower from the propagation time that suction port flow to relief opening than barometric pressure.

In other words, prior art needs a kind of instrument sensing flow leakage and sends control signal to control valve.Yet, the defective that prior art exists be since the reaction time of vacuum transducer or leak detector slow usually, so autocontrol valve can not respond velocity of propagation with pressure flow.

Therefore, vacuum control valve of the prior art can not be made reaction rapidly to the unexpected leakage that causes owing to fault.

Fig. 2 is the schematic diagram according to the vacuum control valve of prior art.With reference to Fig. 2, if leak, pressure transducer 210 and 220 detects any leakage and reports to controller 231, for example because the situation that the accident that vacuum tube 200 damages takes place.

Then, controller 230 is by closed vacuum valve 240 blocking-up vacuum tube 200 and vacuum pumps 250.It is in this case, actual that to be exactly pressure transducer 210 relative faster than atmospheric velocity of propagation in the vacuum tube together with the velocity of propagation of controller with the velocity of propagation of 220 electrical signal.

Yet the vacuum valve 240 under the prior art still exists not enough, because the induction speed of the instrument as pressure transducer 210 and 220 is slower than atmospheric velocity of propagation.

In addition, if one of vacuum tube on semiconductor production production line or the plasma demonstration dish production line 260 breaks, adjacent vacuum tube 270, vacuum tube 280, vacuum tube 290 and vacuum tube 300 also are damaged simultaneously owing to breaking of vacuum tube 260.

Summary of the invention

Consider these problems, need vacuum control valve to block effectively, rapidly technically owing to the air-flow propagation that formation pressure reduction causes takes place suddenly between vacuum tube and the vacuum pump to leak.

Therefore, one object of the present invention is, a kind of vacuum control valve is provided, when because fault occluding pressure propagation of flowing rapidly when causing that leakage between vacuum tube and vacuum pump takes place.

Further purpose of the present invention is, a kind of vacuum control valve is provided, and meets accident to leak when causing sudden changes in pressure between vacuum tube and vacuum pump, protects adjacent instrument, as other vacuum tube or sensor.

Another object of the present invention is to, a kind of vacuum control valve is provided, prevent vacuum tube because accidental the breaking down of vacuum pump causes and flow backwards and destroyed.

Description of drawings

More features of the present invention will show in the description to vacuum control valve with preferred embodiment in conjunction with the accompanying drawings, but they are not to be used for limiting the present invention, but only are used for explaining and understanding the present invention.

Fig. 4 is the schematic cross-sectional view of the leak control valve of the embodiment of the invention 1.

Fig. 5 is the schematic diagram that comprises leak control valve of the present invention.

Fig. 6 is the schematic cross-sectional view of the leak control valve of the embodiment of the invention 2.

Fig. 7 is the leak control valve concrete structure schematic representation of the embodiment of the invention 2.

Fig. 8 is the leak control valve schematic cross-sectional view of the embodiment of the invention 3.

Embodiment

It is following that the present invention is described in detail with reference to accompanying drawing.

Fig. 4 is the schematic cross-sectional view of the leak control valve of the embodiment of the invention 1.With reference to Fig. 4, leak control valve comprises spring 310 and spring 320, and they are at the two ends of spool 300.

Leak control valve among the present invention is made up of the relief opening 330 that is connected in vacuum pump, the import 340 that is connected in vacuum tube and spool 300 and valve chamber 350, and valve chamber 350 covers spool 300, and the air-flow that extrudes from vacuum tube therefrom passes through.

In this case, spool 300 in valve chamber 350, in the to-and-fro motion between position one and the position two that acts on of the reverse restoring force of spring 310 and spring 320,

In proper functioning, the rigidity of spring 310 is enough big to guarantee not close at the first side wall 305 of vacuum tube air exhaust stage spool 300 current path of relief opening 330.

As the preferred embodiments of the present invention, the rigidity of spring 310 can determine that promptly restoring force should be greater than the suction of vacuum pump by such method.

The spring rate of spring 310 is preferably to be determined by such method, and relief opening 315 is opened under the differential pressure action of 330 of suction port 340 and relief openings entirely.As the preferred embodiment of the first side wall 305 of spool 300, it is better than using lubricant oil to use rubber seal.

In addition, on spring 320 another sidewall 306 towards suction port 340 directive effects in spool 300 so that spool 300 is floated.

Now, for example cause that leakage takes place because vacuum tube breaks, the pressure at suction port 340 places rises.So, moving rapidly of the spool 300 that the pressure reduction of the first side wall 305 of spool 300 by suction port 340 and relief opening 330 causes and close relief opening 315 rapidly.

Therefore, it still is possible taking timely measure protection vacuum pump, Other Instruments and other vacuum tube, leaks at relief opening 330 1 ends, even when suction port one distal process so leaks.

Fig. 5 the present invention includes the structural representation of leak control valve in interior vacuum-control(led) system.With reference to Fig. 5, illustration on semiconductor production line, leak control valve 400 and 401 is installed in vacuum pump 410 and instrument 420 fronts respectively, prevents that under the situation that vacuum pump breaks down barometric pressure refluxes.

Fig. 6 is the schematic cross-sectional view of leak control valve in the embodiment of the invention 2.

Embodiment 2 has following feature, contacts with the valve chamber inwall when the first side wall of spool 300 305 is closed.

In other words, embodiment 1 as shown in Figure 4 provides a kind of leak control valve, and spool has a plurality of air chambers at top and bottom.And do not have air chamber at embodiment 2 spool at all, contact with the valve chamber sidewall when closed.And air communication is crossed the outflow of side preparation passage in embodiment 2.

Fig. 7 A and Fig. 7 B are the operation mode schematic representation of leak control valve in the embodiment of the invention 2.

With reference to Fig. 7 A and Fig. 7 B, embodiment 2 comprises spring 310, baffle plate 305, " O " RunddichtringO 330, spring 320, sub-pump-unit 360.

Preferably, the quantity of sub-pump-unit 360 can be selected according to the flow of pump.In addition, the size in hole also can be different according to the difference of application target." O " RunddichtringO 330 plays a supportive role to baffle plate 305 when pump work, prevents the leakage of air-flow.

Among the embodiment 2, shown in Fig. 7 A and Fig. 7 B, have following feature: the velocity of propagation of the air-flow by primary path 390 is than fast by the speed of sub-pump-unit 360.Therefore, primary path is closed before bypass gas flow flows through sub-pump-unit 360.

Fig. 8 is the schematic representation of the embodiment of the invention 3.With reference to Fig. 8, embodiment's 3 neutron pump-units 360 have the feature of bypass for " U " type.

Generally speaking, the barometric pressure that enters valve rises slow relatively.Therefore, atmospheric pressure is raised to enough the high baffle plate 305 that promotes and returns and need very short time.

Therefore, reach the acceleration barometric pressure purpose of memory time by the bypass that prolongs sub-pump-unit 360.As first-selected embodiment of the present invention, sub-pump-unit 360 can be realized by a plurality of compound conducting tubes, and the length of alternate path is according to the difference of the air-flow that enters and difference.

Though describe the present invention with describe at its exemplary embodiment, it will be understood by those skilled in the art that under the situation that does not break away from main idea of the present invention and scope, can carry out various changes, delete and increase the present invention.

Therefore, this law is bright should not to be considered to be confined to described particular, but should comprise all possible embodiment, these embodiments can be implemented in the scope included with respect to feature affiliated in appended claims and its equivalence.

Claims

1. leak control valve is characterized in that comprising:

Valve chamber flows to the relief opening that links to each other with vacuum pump by this valve chamber fluid from the suction port that links to each other with container;

Spool moves with quick condition between the primary importance and the second place, and with moving back and forth from the fluid stream of suction port and the pressure reduction between the vacuum pump air feed power;

First spring, one end links to each other with described spool the first side wall, the other end links to each other with relief opening, during the vacuum pump proper functioning, on spool, apply restoring force towards the relief opening direction so that the relief opening path is opened, and when leaking, when the suction port end pressure is increased to when being enough to overcome this restoring force, this relief opening path is by described spool sidewall closure;

Second spring, one end links to each other with second sidewall of described spool, and the other end links to each other with suction port, during the vacuum pump proper functioning, apply restoring force towards the suction port direction so that the relief opening path is opened at spool, described spool between the primary importance and the second place with the quick condition to-and-fro motion.

2. leak control valve as claimed in claim 1 is characterized in that: when suction port pressure surpassed predetermined value, described spool moved towards the relief opening direction, and the relief opening path is by described spool sidewall closure.

3. leak control valve as claimed in claim 1 is characterized in that: when exhaust port pressure surpassed predetermined value, described spool was towards the motion of suction port direction, and the suction port path is by the side plate closure of this spool.

4. a leak control valve is characterized in that, comprising:

Spool moves with quick condition between the primary importance and the second place, and moves back and forth with the pressure reduction between suction port eluting gas and the vacuum pump air feed power;

" O " RunddichtringO plays the eyelid retractor effect to the baffle plate that is installed on the described spool sidewall, also plays the seal action that blocking-up is leaked simultaneously;

Sub-pump-unit is positioned on the inwall of described valve chamber, is used for the described air-flow of bypass from the suction port to the relief opening;

First spring, one end links to each other with described spool the first side wall, the other end links to each other with relief opening, during the vacuum pump proper functioning, on spool, apply restoring force towards the relief opening direction so that the relief opening path is opened, and when leaking, when the suction port end pressure is increased to when being enough to overcome its restoring force, this relief opening path is by described spool sidewall closure;

5. leak control valve as claimed in claim 4, described sub-pump-unit comprises a plurality of compound conducting tubes and is " U " type, so that promote the pressure storage, quickens the action of baffle plate.