KR20040049011A - Leak control valve - Google Patents

Abstract

PURPOSE: A leak control valve is provided to control the opening/closing of a liquid passage by using a spring between an inlet and outlet of a vacuum tube. CONSTITUTION: A leak control valve controls the pressure in a container. The leak control valve is composed of a valve chamber(350) having an inlet(340) and outlet(330), a valve plate(300) reciprocating within the chamber according to a suction pressure of a pump in the inlet or the outer, a first spring(310) formed between the outlet and a first side(305) of the valve plate, and a second spring(320) formed between the inlet and a second side(306) of the valve plate. The leak control valve shuts off pressure flow by using resilient constants of the first and second springs to maintain the container in a vacuum state.

Description

Leak shutoff valve unit {LEAK CONTROL VALVE}

TECHNICAL FIELD The present invention relates to a vacuum valve, and more particularly, to a valve device capable of quickly and completely shutting off a leak in a vacuum chamber.

A check valve is used as a vacuum valve commonly used for semiconductor manufacturing lines or plasma display (PDP) manufacturing. The check valve according to the prior art is a one-way valve, and since it blocks leakage in only one direction with respect to both pressures acting on the valve, it is difficult to use it between the vacuum pump and the vacuum tube. There is this.

That is, the check valve according to the related art shown in FIG. 1 has a holding force against the pressure from the inlet 110 during the normal operation, and closes the inlet. At this time, when abnormally high pressure is generated on the inlet 110 side and a force greater than the holding force of the spring 100 is exerted, the valve is opened so that the flow rate from the inlet side 110 is bypassed through the side passage 130. It works.

Another prior art is an automatic shut-off valve device by pressure differential. However, the automatic shut-off valve device has a problem that the valve actuation response speed is slow compared to the pressure movement time between the inlet and the outlet of the valve both ends.

That is, according to the prior art, a method of using an electric signal should have an instrument that detects a leak and transmits a signal to the valve separately from the valve. The instrument may be a vacuum sensor or a leak detector. Since the response speed is generally not fast, there is a problem that is significantly slower than the pressure diffusion speed due to pressure movement.

Therefore, the vacuum valve device according to the prior art cannot cope with sudden leaks quickly, and there is a problem that the system becomes complicated and expensive even if a method is found and applied.

2 shows a vacuum valve shutoff system according to the prior art. Referring to FIG. 2, when a leak occurs due to breakage of a vacuum tube for the vacuum tube 200 under vacuum, the pressure sensors 210 and 220 detect the leak and report it to the controller 230. Subsequently, the controller 230 closes the vacuum valve 240 to cut off between the vacuum tube 200 and the vacuum pump 250.

By the way, although the transmission speed of the electrical signals of the pressure sensors 210 and 220 and the controller 230 is faster than the hydraulic movement speed from the vacuum tube, the sensing speed of the measuring instrument including the pressure sensors 210 and 220 is the pressure. Since it is slower than the moving speed, there is a technical limitation to the vacuum valve 240 according to the prior art to prevent the pressure diffusion movement.

Furthermore, when any one of the vacuum tubes 260 is broken while a plurality of high vacuum glass tubes such as the semiconductor equipment CRT or the plasma display apparatus (PDP) shown in FIG. Due to the leakage in the vacuum tube (leak) is a common problem in the manufacturing line is damaged all the surrounding vacuum tubes (270, 280, 290, 300).

Accordingly, a first object of the present invention is to provide a valve device capable of quickly and completely blocking hydraulic fluctuations when a leak occurs between a vacuum tube and a vacuum pump.

In addition to the first object, the second object of the present invention is to provide a quick and complete protection for the connected vacuum tube or various sensor instruments in the event of a leak between the vacuum tube and the vacuum pump. To provide a valve device that can block the hydraulic fluctuations.

In addition to the first object, the third object of the present invention is to provide a backflow shutoff valve device which prevents breakage in the vacuum tube by preventing reverse flow of the pressure flow even when the vacuum pump used to create the vacuum state malfunctions. have.

1 is a view showing the configuration of a check valve according to the prior art.

2 shows a vacuum valve shutoff system according to the prior art.

3 is a diagram illustrating a problem in which a plurality of surrounding vacuum tubes are all damaged when a leak occurs in one vacuum tube in a system in which a plurality of vacuum tubes are connected according to the related art.

Figure 4 shows a first embodiment of a fluid control valve according to the present invention.

5 shows an application embodiment of a fluid control valve according to the invention.

Figure 6 shows a second embodiment of a fluid control valve according to the present invention.

Figure 7 illustrates in detail the structure of a second embodiment of a fluid control valve according to the present invention.

Figure 8 illustrates a structure of a third embodiment of a fluid control valve according to the present invention.

<Explanation of symbols for the main parts of the drawings>

100: spring

110: entrance

130: side passage

200: vacuum tube

210, 220: Pressure sensor

230: Controller

240: vacuum valve

260: Vacuum tube

270, 280, 290, 300: surrounding vacuum tube

300: valve plate

305: first side portion of the valve plate

306: second side of the valve plate

310: first spring

320: second spring

330: exit section

340: entrance

350: valve chamber

360: Sub Pumping Unit

In order to achieve the above object, the present invention is a fluid control valve used in connection with the pump and connecting pipe to adjust the pressure in the container, the pump by passing the fluid through the inlet for sucking the fluid from the container A valve chamber having an outlet portion exiting the connecting pipe connected to the rear end; A valve plate configured to reciprocate between a first point and a second point within the valve chamber and to reciprocate in accordance with the pressure of the fluid from the inlet or the pump driven suction pressure from the outlet; In order to flow the fluid sucked by the pump pumped to lower the pressure of the container to the outlet through the inlet and the valve chamber, the valve plate is opened so that a passage of the outlet connected to the valve chamber is opened. The valve acts to push in the direction of the input portion, and when the leak occurs from the vessel and the pressure on the suction port side connected to the vessel reaches a predetermined pressure or more, the valve both plates are moved toward the outlet portion and the outlet portion The passage is closed by the side of the valve plate to prevent the high-pressure fluid from the container to diffuse in the direction of the pump pipe, and the outlet portion and the first side of the valve plate to exert an elastic restoring force 1 spring; In order for the fluid sucked by the pump pumping to lower the pressure of the container to flow out through the inlet and the valve chamber to the outlet, the valve plate is connected to open the passage of the valve chamber and the outlet. A force pushing in the direction of the outlet, and elastically connected to the second side of the valve plate and the inlet so that the valve plate can translate between a first point and a second point in the valve chamber. A fluid control valve device including a second spring that exerts restoring force is provided.

Hereinafter, a preferred embodiment of a fluid control valve according to the present invention will be described in detail with reference to the accompanying drawings.

Figure 4 shows an embodiment of a fluid control valve according to the present invention. 4, the fluid control valve according to the present invention is characterized in that the first spring 310 and the second spring 320 on both sides of the valve poppet (300).

The fluid control valve according to the present invention includes an outlet portion 340 connected to a connection pipe connected to a connection pipe connected to a vacuum pump for pumping a pressure of a vessel, and an inlet portion 340 connected to the vessel; It consists of a valve chamber 350 through which the fluid sucked from the container passes and houses the valve plate 300.

Meanwhile, in the valve chamber 350, the valve plate 300 may be disposed between the first point and the second point by the elastic restoring force of the first spring 310 and the second spring 320, the fluid suction force of the pump, and the pressure of the container. Therefore, the reciprocating translational movement can be performed. At this time, the elastic modulus of the first spring 310 normally closes the outlet passage 315 of the outlet portion 330 and closes the first side surface 305 of the valve plate 300 in a step of low-pressure vacuuming of the vessel pressure. Springs with sufficient modulus of elasticity can be used so as not to.

In a preferred embodiment according to the present invention, the elastic modulus of the first spring 310 can be set to exert a greater elastic restoring force than the suction force of the vacuum pump, the predetermined pressure difference between the inlet 340 and the outlet 330 The spring modulus of elasticity can be set such that the outlet passage 315 opens against the value.

The first side portion 305 of the valve plate 300 according to the present invention may be a rubber ring for lubricating action. In addition, a second spring 320 for floating the valve plate 300 is connected to a wall of the inlet 340 to the second side surface 306 of the valve plate 300 according to the present invention.

On the other hand, when the vacuum tube or the CRT breaks, and the leak occurs and as a result, the pressure of the inlet 340 is formed at a high pressure in an instant, the valve due to the pressure difference between the inlet 340 and the outlet 330 The positive plate 300 moves in the direction of the outlet part 330 so that the outlet passage 315 closes the side wall 305 of the valve positive plate 300 immediately.

Thus, even when a leak occurs in the inlet 340, the vacuum pump or other measuring equipment including the outlet 330 and other vacuum tube immediately prevents the action.

5 is a view showing an embodiment of the application of the fluid control valve according to the present invention. Referring to FIG. 5, in the semiconductor line, the fluid control valves 400 and 401 according to the present invention are mounted in front of the vacuum pump 410 and the measuring device 420, respectively, so that the back flow of pressure is prevented even when the vacuum pump fails. It can be prevented to maintain the vacuum of the container 200.

Figure 6 shows a second embodiment of a fluid control valve according to the present invention. Referring to FIG. 6, unlike the embodiment described with reference to FIG. 4, the first side portion 305 of the valve plate may be in close contact with the valve chamber wall.

That is, in the embodiment shown in FIG. 4, a small clearance is provided above and below the first side portion 305 of the valve plate to allow gas to flow during pumping, whereas the embodiment shown in FIG. It is characterized by blocking the clearance gap and instead creating a gas passageway to the side to allow gas to flow.

7a and 7b show the operating principle of a second embodiment of a fluid valve according to the invention. 7A and 7B, a first spring 310, a blocking panel 305, a seal o-ring 330, a second spring 320, and a sub pumping unit 360 are shown. It is. The second embodiment structure according to the invention is characterized in that it is pumped to the sub pumping unit 360 through the spaced apart by the first spring at the time of pumping.

At this time, the quantity of the sub-pumping unit 360 may vary according to the amount of fluid to be pumped, and the hole size may also vary according to the use. In addition, the sealing o-ring 330 serves as a support so that the blocking panel 305 is not pushed back in the pumping step, and serves as a sealing to prevent a small amount of gas inflow.

In the structure of the second embodiment according to the present invention, since the main pipe 390 has a faster gas flow than the surf pumping unit at the time of shutoff, the main pipe 390 before the gas is introduced into the sub pumping unit 360. It can shut off and block the gas flow.

Fig. 8 shows the operating principle of the third embodiment of the fluid valve according to the present invention. Referring to FIG. 8, the sub-pumping unit 360 takes the form of bypassing the U-shape unlike the second embodiment shown in FIG. 7. This intentionally bypasses the passage of the sub-pumping unit 360 through which the gas is discharged, since it takes time to obtain enough pressure to push the shut-off panel 305 backwards as the pressure of the gas entering the valve slowly increases. The purpose is to speed up the time to accumulate gas hydraulic pressure.

The sub-pumping unit 360 according to the third embodiment of the present invention can be implemented using a plurality of flow conductance tubes, and the length of the bypass passage can be changed according to the amount of hydraulic pressure of the gas flowing in.

The foregoing has outlined rather broadly the features and technical advantages of the present invention to better understand the claims of the invention which will be described later. Additional features and advantages that make up the claims of the present invention will be described below. It should be appreciated by those skilled in the art that the conception and specific embodiments of the invention disclosed may be readily used as a basis for designing or modifying other structures for carrying out similar purposes to the invention.

In addition, the inventive concepts and embodiments disclosed herein may be used by those skilled in the art as a basis for modifying or designing other structures for carrying out the same purposes of the present invention. In addition, such modifications or altered equivalent structures by those skilled in the art may be variously changed, substituted, and changed without departing from the spirit or scope of the invention described in the claims.

As described above, the present invention is provided with two springs at both ends for controlling the opening and closing of the fluid outlet passage by the spring restoring force between the inlet portion on the vacuum tube side and the outlet portion on the vacuum pump side even when a leak occurs in the vacuum tube. The use of a single valve plate prevents damage to vacuum pumps, other metering equipment and other vacuum tubes.

The fluid control valve device according to the present invention is applicable to the production of a container requiring a vacuum such as a cathode ray tube, a light bulb, a fluorescent lamp, a plasma display device, and the like.

Claims (5)

In the fluid control valve used to connect through the pump and connecting pipe to maintain the high vacuum state by adjusting the pressure in the container, A valve chamber having a rear end portion configured to pass the fluid through an inlet portion for sucking fluid from the container and exit the connection pipe connected to the pump; A valve plate configured to reciprocate between a first point and a second point within the valve chamber and to reciprocate in accordance with the pressure of the fluid from the inlet or the pump driven suction pressure from the outlet; In order to flow the fluid sucked by the pump pumped to lower the pressure of the container to the outlet through the inlet and the valve chamber, the valve plate is opened so that a passage of the outlet connected to the valve chamber is opened. The valve acts to push in the direction of the input portion, and when the leak occurs from the vessel and the pressure on the suction port side connected to the vessel reaches a predetermined pressure or more, the valve both plates are moved toward the outlet portion and the outlet portion The passage is closed by the side of the valve plate to prevent diffusion of high pressure fluid from the container in the direction of the pump connection pipe, and is connected to the outlet and the first side of the valve plate to exert an elastic restoring force. 1 spring; In order for the fluid sucked by the pump pumping to lower the pressure of the container to flow out through the inlet and the valve chamber to the outlet, the valve plate is connected to open the passage of the valve chamber and the outlet. A force pushing in the direction of the outlet, and elastically connected to the second side of the valve plate and the inlet so that the valve plate can translate between a first point and a second point in the valve chamber. Second spring to exercise resilience And a fluid control valve device for blocking the flow of pressure by using elastic modulus of the first spring and the second spring to maintain the vacuum state of the container. According to claim 1, wherein the elastic modulus of the first spring and the second spring when the pressure of the inlet portion is greater than a predetermined value than the pressure of the outlet portion the valve both plates are translated in the direction of the outlet And a passage of the outlet portion is closed by the first side of the valve plate. According to claim 1, wherein the elastic modulus of the first spring and the second spring is the valve both plates are translated in the direction of the inlet portion when the pressure of the outlet portion is greater than the selected value than the pressure of the inlet portion The passageway of the inlet is closed by the second side of the valve plate. In the fluid control valve used to connect through the pump and connecting pipe to maintain the high vacuum state by adjusting the pressure in the container, A valve chamber having a rear end portion configured to pass the fluid through an inlet portion for sucking fluid from the container and exit the connection pipe connected to the pump; A valve plate configured to reciprocate between a first point and a second point within the valve chamber and to reciprocate in accordance with the pressure of the fluid from the inlet or the pump driven suction pressure from the outlet; An o-ring for sealing which serves as a support to prevent the blocking panel attached to the valve plate from being pushed back and blocks a small amount of gas inflow; It is formed in the valve chamber inner wall as a passage for bypassing the suction fluid from the inlet side to the outlet in the pumping step for reducing the pressure of the container, and connects the inner wall of the inlet side and the outlet side of the valve chamber. A sub pumping unit; The valve plate may be opened such that a passage of the sub pumping unit formed in the inner wall of the valve chamber is opened so that the fluid sucked by the pump pumping to lower the pressure of the container flows out through the sub pumping unit to the outlet portion. When the leakage occurs from the container and the pressure on the inlet side connected to the container reaches a predetermined pressure or more, the valve plate and the attachment blocking panel close the passage to close the high pressure fluid from the container. A first spring which blocks the diffusion of the pump in the direction of the pump pipe and connects the outlet and the first side surfaces of the valve plate to exert an elastic restoring force; Acts to push the valve plate to open the valve chamber connection and the passage of the outlet in order for the fluid suctioned by the pump pumping to lower the pressure of the vessel to flow out of the outlet, and actuate the valve A second spring that connects the second side of the valve plate and the inlet to exert an elastic restoring force such that both plates can translate between a first point and a second point in the valve chamber. And a fluid control valve device for blocking the flow of pressure by using elastic modulus of the first spring and the second spring to maintain the vacuum state of the container. 5. The fluid control valve device according to claim 4, wherein the sub pumping unit is composed of a plurality of conductance pipes, and the hydraulic pressure is accumulated by forming a U-shaped bypass passage in order for the blocking panel to operate quickly.