CN1402234A - Optic disk mfg. method and device - Google Patents

Optic disk mfg. method and device Download PDF

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Publication number
CN1402234A
CN1402234A CN 02147209 CN02147209A CN1402234A CN 1402234 A CN1402234 A CN 1402234A CN 02147209 CN02147209 CN 02147209 CN 02147209 A CN02147209 A CN 02147209A CN 1402234 A CN1402234 A CN 1402234A
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China
Prior art keywords
mentioned
housing
resin
film substrate
light transmission
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Granted
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CN 02147209
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CN1241191C (en
Inventor
宇佐美守
小卷壮
丑田智树
山家研二
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TDK Corp
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TDK Corp
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Priority claimed from JP2001240913A external-priority patent/JP4084551B2/en
Priority claimed from JP2001280838A external-priority patent/JP2003085834A/en
Application filed by TDK Corp filed Critical TDK Corp
Publication of CN1402234A publication Critical patent/CN1402234A/en
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Publication of CN1241191C publication Critical patent/CN1241191C/en
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Abstract

The object of the invention is to provide a method of manufacturing an optical disk by which the contamination of an arm for handling a cap is prevented. SOLUTION: This apparatus has a placing-on process step of placing the cap 40 at approximately the central part of a deposition substrate 10' by handling a projection 43 for handling of the cap 40 having an umbrella section 41 one surface of which is the projecting surface and the projection 43 for handling disposed to project from the center of the projecting surface of the umbrella section 41, a dropping process step of dropping a liquid material on the projecting surface of the umbrella section 41 and a spin coating process step of applying the liquid material to the surface of the deposition substrate 10' by integrally rotating the deposition substrate 10' and the cap 40. As a result, the adhesion of the liquid material to be applied to the arm for handling the cap 40 does not occur.

Description

The manufacture method of CD and optical disk manufacturing device
Technical field
The present invention relates to the manufacture method and the optical disk manufacturing device of CD, in more detail, the present invention relates to comprise with whirl coating apply aqueous material operation optic disc producing mehtod and adopt the optical disk manufacturing device of this method.
Background technology
In recent years, as the recording medium that is used to write down the large capacity digital data, being extensive use of with CD and DVD is the CD of representative.In general, the regeneration special-purpose cd is to begin order by light transmission layer, reflection horizon, protective seam from reproduced light plane of incidence side, each layer of lamination and constituting; Can write CD and be from reproduced light plane of incidence side and begin order by light transmission layer, recording layer, reflection horizon, protective seam; each layer of lamination and constituting is no matter be the CD of which kind of type, when data are read; all be from light transmission layer side irradiating laser, detect this reflected light.
Figure 14 is the sectional view of expression as the layer formation of the CD-ROM of the most general regeneration special-purpose cd.
As shown in figure 14, CD-ROM is made of the light transmission layer 1 of the about 1.2mm of thickness, the reflective polycarbonate of the about 50nm of thickness, and reflection horizon 2 is made of aluminium, and protective seam 3 is made of uv-hardening resin.In the CD-ROM with this formation makes, at first, use the moulding of grand master pattern injection model to have the light transmission layer 1 of the pit corresponding with the numerical data that should write down, then, in light transmission layer 1, on the face that forms pit, make the aluminium film forming with sputtering method, form reflection horizon 2.Then, 2 surface forms uv-hardening resin with rotation coating method in the reflection horizon, makes protective seam 3.Like this, promptly made the CD-ROM that constitutes by light transmission layer 1, reflection horizon 2 and protective seam 3.
Form the whirl coating of protective seam 3, be not only the manufacture method of CD as the method for the aqueous material of coating, also be a kind of in semiconductor device is made widely used method.But; the thickness of the film that forms with whirl coating; at the Outboard Sections away from the uv-hardening resin part (dripping a little) of dripping roughly is uniform; near dripping a little; approaching more dripping a little then has the tendency of attenuation rapidly; for the zone (posting field) that forms pit on cd-rom recording surface is formed uniformly protective seam 3 as far as possible, ideal situation is that central part with CD is as dripping a little.Yet, at the central part of CD owing to generally be the hole that is formed for driving with chucking, therefore can not be at that with the central part of CD as dripping a little.For this reason, opening flat 10-249264 communique, spy Japanese kokai publication hei 10-320850 communique, spy opens flat 10-289489 communique, spy and opens flat 11-195250 communique, spy and open that flat 11-195251 communique, spy are opened flat 11-203724 communique, the spy opens in the flat 11-213459 communique, all proposed to clog the hole of portion of cd centre, in the drip scheme of uv-hardening resin of the core of housing with housing.
But, in the method for above-mentioned each communique record,, then in the operation of housing, will produce variety of issue owing to covered above the whole housing with uv-hardening resin.For example, in the method for this communique record, uv-hardening resin will be inevitably attached to the pole that is used to operate housing, not only pole is polluted by uv-hardening resin, and worry also will adhere to uv-hardening resin at other parts and other manufacturing installations of manufacturing installation, therefore the reliability of whole manufacturing process will be degenerated.Attached to the uv-hardening resin on the pole, can consider to remove, yet whole manufacturing process is complicated by the clean operation of pole is set.
The method of above-mentioned each communique record also exists in the problem that is involved in the bubble with the following diameter of this thickness in the film of formation easily.This problem also is not very big problem when forming the protective seam 3 of CD-ROM; but optical recording media for next generation type; when the light transmission layer of the optical recording media that forms record by carrying out data from reverse side irradiating laser and/or regeneration type, then be significant problem with substrate.
For example, for the recording track spacing is the optical recording media of the next generation type of 0.3 μ m, the about 100 μ m of light transmission layer thickness, in the light transmission layer, exist under the situation of bubble of 10 μ m * 10 μ m sizes, when setting the position long is that 0.130 μ m is when carrying out recording/reproducing, then when recording/reproducing, will produce continuous 76 extensive error, and, when being 1 magnetic track, will produce the extensive error of crossing over 33 magnetic tracks with 1 week of disk.Than the big bubble of 50 μ m, will produce harmful effect to the tracking servomechanism and the focusing servomechanism of optical pickup unit, be the reasons of error that can not correct, also be the main cause that causes miss tracking and focus on error.
Summary of the invention
The purpose of this invention is to provide improved optic disc producing mehtod and optical disk manufacturing device.
That another object of the present invention provides is improved, comprise the optic disc producing mehtod and the optical disk manufacturing device that apply the operation of aqueous material with whirl coating.
Further purpose of the present invention provides optic disc producing mehtod and the optical disk manufacturing device that prevents to pollute the pole that is used to operate housing.
Further purpose of the present invention provides the optic disc producing mehtod that can prevent to sneak into to the light transmission layer bubble.
Purpose of the present invention is reached by the optic disc producing mehtod with following operation, that is: operate with projection with the aforesaid operations of the housing of projection to circular parachute portion that to have a face be convex surface with from the outstanding operation that is provided with in center of the above-mentioned convex surface of above-mentioned umbrella portion, above-mentioned housing is positioned in into the mounting operation of the approximate centre portion of film substrate; In the drip operation of dripping of aqueous material of the above-mentioned convex surface of the above-mentioned umbrella portion of above-mentioned housing; By rotating above-mentioned one-tenth film substrate and above-mentioned housing integratedly, above-mentioned aqueous material is coated in the rotation coating operation on the surface of above-mentioned one-tenth film substrate.
Among the present invention, owing on housing, have the projection that is used to operate, and the dripping a little of the aqueous material that should apply, then can not adhere to the aqueous material that should apply being used to operate on the pole of housing as the umbrella portion of housing.Therefore, reduced widely on manufacturing installation etc. and adhered to the aqueous material that should apply and the danger that pollutes, can improve the reliability of whole manufacturing process, the clean operation of pole needn't be set again.
In the desirable embodiment of the present invention, above-mentioned housing also has the determining positions portion that the reverse side at the above-mentioned convex surface of above-mentioned umbrella portion is provided with, and determines according to the position of above-mentioned determining positions portion, carries out the mounting of the above-mentioned housing of above-mentioned mounting operation.
According to desirable embodiment of the present invention,, then can easily carry out the mounting operation owing to be provided with determining positions portion at housing.
In another desirable embodiment of the present invention, the above-mentioned umbrella portion of above-mentioned housing has more to the thin more shape of peripheral part thickness, and the above-mentioned determining positions portion of above-mentioned housing is made of with projection the outstanding determining positions that is provided with in center from the above-mentioned reverse side of above-mentioned umbrella portion.
In another desirable embodiment of the present invention, also have after above-mentioned mounting operation,, push the attraction operation of outermost perimembranous of the above-mentioned umbrella portion of above-mentioned housing on the surface of above-mentioned one-tenth film substrate by attracting the above-mentioned determining positions projection of above-mentioned housing.
According to this desirable embodiment of the present invention, can improve the flatness of umbrella portion surface and film forming substrate surface, thereby can make the thickness of the aqueous material that in the spin coated operation, applies more even.
In another desirable embodiment of the present invention, above-mentioned aqueous material is a uv-hardening resin.
In another desirable embodiment of the present invention, also have: cover on one side the central portion of above-mentioned one-tenth film substrate with the first ultraviolet mask, on one side on the above-mentioned uv-hardening resin of above-mentioned film forming substrate surface formation irradiation ultraviolet radiation, make the first ultraviolet irradiation process of its sclerosis; The diameter of the above-mentioned first ultraviolet mask is greater than the diameter of the above-mentioned umbrella portion of above-mentioned housing.
In another desirable embodiment of the present invention, also have: operate the aforesaid operations projection of above-mentioned housing, remove the operation of removing of above-mentioned housing from the surface of above-mentioned one-tenth film substrate; Above-mentioned removing after the operation, on the above-mentioned uv-hardening resin that above-mentioned film forming substrate surface forms irradiation ultraviolet radiation, make the second ultraviolet irradiation process of its sclerosis.
In another desirable embodiment of the present invention, above-mentioned housing is made of plastics.
In another desirable embodiment of the present invention, above-mentioned housing is made of polyolefin.
According to desirable embodiment of the present invention,, then carry out as the polyolefin of housing material and separating of uv-hardening resin than being easier to because the compatibility of housing and uv-hardening resin is lower.
Optical disk manufacturing device of the present invention has: to circular parachute portion that to have a face be convex surface and the parts operated with projection with the aforesaid operations of the housing of projection from the outstanding operation that is provided with in center of the above-mentioned convex surface of above-mentioned umbrella portion; The parts of aqueous material drip on the above-mentioned convex surface of the above-mentioned umbrella portion of the above-mentioned housing that becomes film substrate approximate centre portion mounting; Rotate the parts of above-mentioned one-tenth film substrate and above-mentioned housing integratedly.
Optical disk manufacturing device of the present invention is to adopt whirl coating to apply the optical disk manufacturing device of aqueous material at the film forming substrate surface, it is characterized in that having: the rotary table of the above-mentioned one-tenth film substrate of mounting; Above-mentioned one-tenth film substrate is fixed on first of above-mentioned worktable attracts parts; The conveyance housing also is positioned in the pole of the above-mentioned film forming substrate center part on the above-mentioned worktable with it; Above-mentioned housing is fixed on second of above-mentioned one-tenth film substrate attracts parts.Above-mentioned second attracts parts preferably to comprise carries out the attraction mouth that the position is determined to above-mentioned housing.
Above-mentioned purpose of the present invention is finished by the optical data media manufacture method, its optical data media is to have on the plate-like support matrices of center pit, have information recording layer in turn and contain the light transmission layer of resin, be used to write down or the laser beam of regenerating incides above-mentioned information recording layer by above-mentioned light transmission layer; This manufacture method has:
After on the above-mentioned support matrices above-mentioned information recording layer being set, cover the center pit of above-mentioned support matrices with the above-mentioned plectane portion of inaccessible parts with plectane portion, then, the coating liquid that will contain the radioactive ray hardening resin is supplied with above-mentioned plectane portion, then, by rotating above-mentioned inaccessible parts and above-mentioned support matrices integratedly, make above-mentioned coating liquid on above-mentioned support matrices, extend, form the resin extension operation of cyclic resin layer
With the hardening process that makes the above-mentioned light transmission layer of above-mentioned resin bed sclerosis formation by radiation exposure,
At least a portion on the above-mentioned plectane portion surface of above-mentioned coating liquid contact is used the inaccessible parts that satisfy one of following at least condition, that is:
(1) center line average roughness Ra is below the 100nm
(2) ten mean roughness Rz are below the 1 μ m
(3) the average slope angle θ a of roughness is below 1 °.
In the desirable embodiment of the present invention, above-mentioned inaccessible parts utilize the injection molding forming of resin to make.
In the desirable embodiment of the present invention, above-mentioned inaccessible parts have the outstanding operation projection of core from above-mentioned plectane portion surface.
What inventors of the present invention studied repeatedly found that: at inaccessible parts surface, supply with the surfaceness that applies the territory, liquid zone by control, reduced the number of bubbles that is blended in the light transmission layer significantly.
Among the present invention, utilize the whirl coating that reduces material cost, and use can be after the medium radial direction suppresses the inaccessible parts in uneven thickness of light transmission layer, the bubble that can suppress in the light transmission layer is sneaked into, and provides high performance optical data media with low cost.
If the surfaceness according to the present invention controls inaccessible parts then can not rely on the constituent material of occlusive part spare to realize above-mentioned effect.
For example, use stainless steel and other metal materials, make inaccessible parts, again mirror ultrafinish is carried out on its surface, can reduce surfaceness through processing components such as cuttings.But, must because manufacturing expense is higher, be prerequisite through the inaccessible parts of metallic of cutting and surface grinding processing so use repeatedly.Yet, expendable inaccessible parts, because of its surface attachment coating liquid, be not easy to utilize again.Therefore, in order to use repeatedly, the once all essential clean inaccessible parts of every use have increased clean expense.And, clean the loss of time that brings in order to reduce, a plurality of inaccessible parts of essential preparation have further improved cost.
In addition, in order to lower the surfaceness of the inaccessible parts of metallic, also can utilize the method beyond grinding.For example, inaccessible parts surface is applied, also can obtain the surfaceness that the present invention limits with various resins such as uv-hardening resins.When using uv-hardening resin, after coating, can harden and also can not harden.But sometimes, carrying out resin when coating, in the coated film surface attachment dust, or because the resin that spreads to the inaccessible parts back side when coating makes inaccessible parts be attached to the support matrices side.Dust is during attached to the coated film of inaccessible parts surface, the reason that shortcoming produces when being spin coated, and worry can not obtain uniform light transmission layer.And when the resin that spreads to the inaccessible parts back side during by coating made inaccessible parts and support matrices form bond state, it was inharmonious to cause that sometimes rotary coating device moves.
Among the present invention, preferably adopt the resin injection mould-forming to make inaccessible parts.Use injection moulding method, can be with the little inaccessible parts of a large amount of production surfacenesses of low cost.Therefore, inaccessible parts can use up and throw away.Constitute the resin of inaccessible parts, because can identical with the support matrices constituent material (for example polycarbonate resin), then can reduce material cost by a large amount of supplies of same material.And, when utilizing injection molding forming to make support matrices,, make inaccessible parts owing to can the residual resin of discharging be utilized again, then can reduce discarded object.
The disc types that utilizes method of the present invention to make; have no particular limits; be not only diaphragms such as CD-ROM, CD-R, CD-RW, DVD-ROM, DVD-R, DVD-RW for example and become the CD of film type, also can make the light transmission layer becomes film type with whirl coating CD with whirl coating.
Description of drawings
Fig. 1 is the sectional view that the CD 10 made with the method for desirable embodiment of the present invention represented in summary.
Fig. 2 (a) is the stereographic map of manufacturing installation 20 major parts of the summary method of representing to be used to realize desirable embodiment of the present invention, and Fig. 2 (b) is its summary section.
Fig. 3 is the figure of an operation (moving into operation) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Fig. 4 is the figure of an operation (becoming the mounting operation of film substrate 10 ') of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Fig. 5 is the figure of an operation (the mounting operation of housing 40) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Fig. 6 is the approximate three-dimensional map of expression housing 40 shapes.
Fig. 7 is the figure of an operation (operation of dripping of uv-hardening resin 50) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Fig. 8 is the figure of an operation (spin coated operation) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Fig. 9 is the figure of an operation (the first ultraviolet irradiation process) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Figure 10 is the figure of an operation (housing 40 remove operation) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Figure 11 is the figure of an operation (the second ultraviolet irradiation process) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Figure 12 is the figure of an operation (taking out of operation) of the optic disc producing mehtod of expression desirable embodiment of the present invention.
Figure 13 (A)~(E) is a summary section of representing housing 70~110 structures respectively.
Figure 14 is the sectional view that expression CD-ROM layer constitutes.
Embodiment
Below, the desirable embodiment that present invention will be described in detail with reference to the accompanying.
Fig. 1 is the sectional view that the CD (optical recording media) 10 that the method for present embodiment makes represented to utilize in summary.
As shown in Figure 1, CD 10 is made of the light transmission layer 14 of the substrate 11 of the about 1.1mm of thickness, the reflection horizon 12 of the about 70~130nm of thickness, the recording layer 13 of the about 100~250nm of thickness, about 50~150 μ m of thickness.Middle body at CD 10 is provided with hole 15.Substrate 11 is made of polycarbonate, and reflection horizon 12 is made of the alloy that with silver is principal ingredient.In fact recording layer 13 has the phase change film multi-ply construction up and down of clamping record data with dielectric film.Light transmission layer 14 is made of uv-hardening resin.When the data of the CD 10 with above-mentioned structure are read, read with laser and to detect its reflection flux poor from light transmission layer 14 side irradiations.Write fashionablely when carry out data to CD 10, write from light transmission layer 14 side irradiations and use laser, make state (crystal structure of the phase change film) variation of recording layer 13.
The CD 10 that utilizes the method manufacturing of present embodiment is CDs that light transmission layer 14 usefulness whirl coating become film type.But, as mentioned above, utilize the kind of the CD that method of the present invention can make, be not limited to this, also comprise diaphragm becomes film type with rotation coating method CD (for example CD-ROM).
Fig. 2 (a) is the stereographic map of manufacturing installation 20 major parts of the summary method of representing to be used to realize present embodiment, and Fig. 2 (b) is its summary section.
As Fig. 2 (a) with (b), manufacturing installation 20 has: the diameter of diameter and CD 10 worktable 21 about equally; Be arranged on first teat 22 of the central portion of worktable 21; Be arranged on second teat 23 of the central portion of first teat 22.Worktable 21, first teat 22 and second teat 23 come down to one, when not shown rotating mechanism moves, and their whole rotations.
First teat 22 is the parts in the central part chucking zone nearby of the mounting presoma that should make CD 10 (being called " becoming film substrate 10 ' " in this instructions), is provided with a plurality of first air entries 24 on its surface.When the first not shown suction mechanism moved, the one-tenth film substrate 10 ' of first teat, 22 mountings was the sorption state, is fixed in fact on the manufacturing installation 20.
Second teat 23, its diameter be corresponding to the diameter in the hole 15 of CD 10, when first teat, 22 mountings become film substrate 10 ', becomes the state that second teat 23 is inserted in into the hole 15 of film substrate 10 '.Central portion at second teat 23 is provided with second air entry 25.Second air entry 25 is air-breathing by the second not shown suction mechanism.
Below, the optic disc producing mehtod of present embodiment is described.
At first, utilize packer and adopt injection moulding method to make to have formed and give the substrate 11 of putting groove.Then, form reflection horizon 12 with the splash method forming on the substrate 11 to give on whole that puts groove, then, on whole of reflection horizon 12, adopt the splash method to form recording layer 13.
Then, as shown in Figure 3, first pole 31 of utilizing front end to constitute by sorption liner with flexibility, what conveyance formed reflection horizon 12 and recording layer 13 on substrate 11 becomes film substrate 10 ', will become film substrate 10 ' to be positioned on first teat 22.Here, first pole 31 is parts of manufacturing installation 20.Fig. 4 is illustrated in first teat 22 and uploads the state that is set to film substrate 10 '.The mounting that becomes film substrate 10 ' is above being with a side that forms recording layer 13.When 31 conveyances of first pole became film substrate 10 ', sorption recording layer 13 surfaces are the zone of record data (being typically apart from becoming the film substrate about 21mm in 10 ' center with interior zone) not, promptly hole 15 near.In addition, on substrate 11,, often form circular ditch 16, when forming this circular ditch 16, can become film substrate 10 ' by its medial region conveyance of sorption in the inboard of not writing down above-mentioned data area by " the packer beater " in the metal mould for formation.Fig. 3 represents that with Fig. 4 first pole 31 becomes the state of film substrate 10 ' by the medial region conveyance of the circular ditch 16 of sorption.Ditch 16 is omitted in Fig. 1.
When becoming film substrate 10 ' in first teat, 22 mountings, not shown first suction mechanism action, at the one-tenth film substrate 10 ' of first teat, 22 mountings, by 24 sorptions of first air entry, the state that is entrenched in the hole 15 with second teat 23 is fixed in fact.
Then, with second pole, 32 conveyance housings (inaccessible parts) 40, housing 40 is positioned in the central part of fixing one-tenth film substrate 10 '.Second pole 32 is parts of manufacturing installation 20.Fig. 5 is illustrated in into the state of the central part mounting housing 40 of film substrate 10 '.
Fig. 6 is the approximate three-dimensional map of expression housing 40 shapes.
As shown in Figure 6, housing 40 has: have convex surface and concave surface also more to the thin more circular parachute portion of peripheral part thickness (plectane portion) 41; Outstanding first projection 42 that is provided with of mind-set one side from the concave surface of umbrella portion 41; Outstanding second projection 43 that is provided with of mind-set the opposing party from the convex surface of umbrella portion 41.The material of housing 40 can be metal, resin, pottery etc. any one, also can be to use its compound substance more than 2 kinds.Umbrella portion 41 can be made of different materials with first and second projection 42,43.But in order to realize cost degradation, ideal situation is to make housing 40 with the injection molding forming of resin.
When utilizing the injection molding forming making housing 40 of resin, there is no particular limitation for used resin, can be from various resins such as propenyl series, phenylethylene, olefine series, nylon series, rubber series, price as requested and characteristic (resistance to chemical reagents, flexibility etc.) are suitably selected, particularly any in polycarbonate resin, polyolefin resin, the fluororesin all is desirable, uses polyolefin resin desirable especially.There is no particular limitation for the injection molding forming condition, for example can set the various combinations of metal pattern temperature and resin melt temperature.Usually, wish that metal pattern temperature and resin melt temperature are lower.These temperature are if lower, and then because the replicability on metal pattern surface is lower, surfaceness diminishes.And because cooling rapidly, then the temperature when metal pattern takes out is lower, and not yielding when consequently taking out, flatness is good.
The diameter of umbrella portion 41 is set the diameter greater than the hole 15 of the CD 10 that should make, less than the diameter in interior week of the data recording area of the CD 10 that should make.But, since uv-hardening resin described later spread to umbrella portion 41 below, pollute the side face (inner peripheral surface of dish substrate) in hole 15, wish more than the big 4mm of diameter of diameter than hole 15 of umbrella portion 41, more than the preferably big 8mm.When taking out umbrella portion 41,, wish more than the little 3mm of internal diameter of diameter than information recording layer of umbrella portion 41, more than the preferably little 5mm owing to be easy to damage its nearby shape of light transmission layer 14.And, when having above-mentioned circular ditch 16, with the diameter of setting greater than circular ditch 16.
Concrete size also can be with the internal diameter of the diameter in hole 15 and information recording layer and different, and when the diameter of CD 10 was 60~130mm, the diameter of umbrella portion 41 was 20~40mm, was preferably in the scope of 25~38mm.When having above-mentioned circular ditch 16, the diameter in the hole 15 of the CD 10 that should make is 15mm, the diameter of circular ditch 16 is 36mm, and when the data recording area of the CD 10 that should the make when diameter in interior week is 42mm, the diameter of umbrella portion 41 preferably is set in 36.5mm~40mm.
The cone-shaped of umbrella portion 41, when when becoming the central part mounting housing 40 of film substrate 10 ', ideal situation is: the outermost perimembranous (front end) of umbrella portion 41 connects into the surface of film substrate 10 ', and interior perimembranous is not connected with second teat 23 of manufacturing installation 20.
The diameter of first projection 42 as shown in Figure 5, when when becoming the central part mounting housing 40 of film substrate 10 ', becomes the state that first projection 42 is inserted in second air entry 25 corresponding to the diameter of second air entry 25 of manufacturing installation 20.Just, first projection 42 has the effect of the determining positions member when mounting housing 40.The length of first projection 42, there is no particular limitation.
The diameter of second projection 43 and length, if can operate, also there is no particular limitation for second pole 32, but the minimum diameter of second projection 43 near umbrella portion 41 is wished not enough 4mm, preferably below the 2mm.When the diameter of umbrella portion 41 second projection 43 nearby is excessive, the central authorities of umbrella portion 41 will be left in the coating starting position, strengthen diametric in uneven thickness at the light transmission layer 14 that forms.When the diameter of umbrella portion 41 second projection 43 nearby is too small, the physical strength of second projection 43 will be abundant inadequately, and therefore, above-mentioned minimum diameter wishes it is more than the 0.5mm, preferably more than the 0.7mm.The length of second projection 43, there is no particular limitation, can consider to handle easily when its outer peripheral face is supplied with coating liquid easily and controlled to determine that suitably hope is 5~100mm, preferably 10~3mm.When second projection 43 is too short, worries to adhere to uv-hardening resin being used to operate on second pole 32 of housing 40, and also be difficult to control.When second projection 43 is long, handle loaded down with trivial details.
Housing 40, at least a portion of the convex surface of its umbrella portion 41 (one side of second projection 43 is set), hope is whole, center line average roughness Ra is below the 100nm, preferably below the 70nm, perhaps 10 mean roughness Rz are below the 1 μ m, preferably below the 0.5 μ m, perhaps the average slope angle θ a of roughness is below 1 °, preferably below 0.4 °.When any of above-mentioned Ra, Rz and θ a breaks away from above-mentioned scope, worry when spin coated, to sneak into a plurality of big bubbles at light transmission layer 14.Therefore, if above-mentioned Ra, Rz and θ a at least one of them, preferably all in above-mentioned scope, can prevent that then big bubble from sneaking into light transmission layer 14.Yet, when above-mentioned Ra, Rz and θ a are minimum, can not significantly improve inhibition and sneak into the effect of bubble to light transmission layer 14, and, when above-mentioned Ra, Rz and θ a are minimum, improved the manufacturing cost of housing 40, usually, above-mentioned Ra there is no need not enough 1nm, and above-mentioned Rz there is no need less than 0.001 μ m, and above-mentioned θ a there is no need 0.01 ° of less than.
Center line average roughness Ra and 10 mean roughness Rz are stipulated by JISB0601.The average slope angle θ a of roughness is identical with the roughness average slope angle θ a that the spy opens the record of 2001-1006 communique, is the value of following formula (1) expression. θa = Σ i = 1 N [ tan - 1 ( ΔYi / ΔX ) ] / N - - - ( 1 )
In the following formula (1), Δ X measures pitch, preferably Δ X=2 μ m.Δ Yi carries out N at the pitch Δ X with mensuration to cut apart in N the interval that obtains the vertical direction distance at the interval two ends in i interval to benchmark measured length L.
The way of the surfaceness on control housing 40 surfaces is not particularly limited, and can suitably select according to the constituent material and the method for making of housing 40.For example, when constituting housing 40 with metal, usable surface grinding control surfaceness.When utilizing injection molding forming to make lid made of resin cover 40, by the purity of metal pattern surfaceness, resin, the control of injection molding forming condition etc., control surface roughness.
When the housing 40 with above-mentioned formation is positioned in the central part of fixing one-tenth film substrate 10 ', not shown second suction mechanism action.Like this, housing 40 is by 25 sorptions of second air entry, first projection 42 with the state that cooperates second air entry 25 by actual fixed.At this moment, umbrella portion 41 some distortion a little of housing 40 owing to the sorption of second air entry 25, the outermost perimembranous (front end) of umbrella portion 41 connects into the surface of film substrate 10 ', and the concave surface portion of umbrella portion 41 connects second teat 23 of manufacturing installation 20, by the surface that is pressed in film forming substrate 10 '.
In this state, start not shown rotating mechanism, make worktable 21, first teat 22 and second teat 23 integratedly low speed rotation (hope is 20~100rpm), and as shown in Figure 7, uv-hardening resin 50 drips on the convex surface of the umbrella portion 41 of housing 40.At this moment, become film substrate 10 ' to be fixed on first teat 22 by 24 sorptions of first air entry, housing 40 is fixed on second teat 23 by 25 sorptions of second air entry, then becomes film substrate 10 ' and housing 40 also to rotate integratedly with worktable 21, first teat 22 and second teat 23.Near the convex surface central portion that a little is set in umbrella portion 41 as far as possible that drips of uv-hardening resin 50.Like this, at the convex surface of the umbrella portion 41 of housing 40, uv-hardening resin 50 is a dead state.
Then, utilize not shown rotating mechanism, make worktable 21, first teat 22 and second teat 23 high speed rotating integratedly, as shown in Figure 8, because centrifugal force, with make the umbrella portion 41 that is stuck in housing 40 convex surface uv-hardening resin 50 because of the centrifugal force spin coated on the surface (surface of recording layer 13) that becomes film substrate 10 '.Like this, on the surface (surface of recording layer 13) that becomes film substrate 10 ', form the film of the uv-hardening resin 50 of the about 100 μ m of thickness.At this moment, the dripping a little more of the operation of dripping of above-mentioned uv-hardening resin 50 near the central portion of the convex surface of umbrella portion 41, the flatness of the film of uv-hardening resin 50 is good more.
When the surface (above the recording layer 13) that becomes film substrate 10 ' forms the film of uv-hardening resin 50, utilize not shown rotating mechanism, make the middling speed rotation integratedly of worktable 21, first teat 22 and second teat 23.Under this state, as shown in Figure 9, cover into the central portion of film substrate 10 ' with the first ultraviolet mask 60, irradiation ultraviolet radiation on the film of the uv-hardening resin 50 that becomes film substrate 10 ' surface to form makes its sclerosis.The part that the first ultraviolet mask 60 is manufacturing installations 20.
The diameter of the first ultraviolet mask 60 is set the diameter greater than the umbrella portion 41 of housing 40, less than the data recording area of the CD 10 that should the make diameter in interior week.Therefore, in above-mentioned ultraviolet irradiation process, the uv-hardening resin 50 that is present in umbrella portion 41 surfaces of housing 40, and be formed at into housing 40 part nearby in the uv-hardening resin 50 on film substrate 10 ' surface, all be unhardened state, the uv-hardening resin 50 that forms in other parts is a hardening state.
Make not shown rotating mechanism stop the action and the rotation stop after, stop the action of the second not shown suction mechanism.At this moment, the first not shown suction mechanism is kept operating state.Under this state, as shown in figure 10, remove housing 40 with second pole 32.In this case, because the uv-hardening resin 50 that the interface on the umbrella portion 41 outermost perimembranous (front end) of housing 40 and the surface that becomes film substrate 10 ' forms then can not have and carries out removing of housing 40 for unhardened state difficultly.The housing 40 that is removed concentrates in the not shown used housing container, after this, is separated into polyolefin and uv-hardening resin as housing 40 materials, utilizes respectively again.
Remove after the housing 40, as shown in figure 11, cover the part of removing into film substrate 10 ' central portion with the second ultraviolet mask, 62 limits with circular port 63, the limit is irradiation ultraviolet radiation on the film of the unhardened uv-hardening resin 50 that becomes film substrate 10 ' surface to form, and makes its sclerosis.The part that the second ultraviolet mask 62 is manufacturing installations 20.
The diameter in the hole 63 of the second ultraviolet mask 62 is corresponding to the diameter of the first ultraviolet mask 60.Therefore, in above-mentioned ultraviolet irradiation process, irradiation ultraviolet radiation on the unhardened uv-hardening resin 50 that becomes film substrate 10 ' surface to form makes its sclerosis, and does not have illuminated on the uv-hardening resin 50 that has hardened in fact.Like this, prevented because excessive ultraviolet ray irradiation causes rotten, the variable color of uv-hardening resin 50.
As mentioned above, finished sclerosis, also finished the film forming of light transmission layer 14 at the uv-hardening resin 50 that becomes film substrate 10 ' surface to form.Then, stop the action of the first not shown suction mechanism, as shown in figure 12, the CD 10 of finishing light transmission layer 14 film forming is taken out of.
From above-mentioned explanation as seen, in the present embodiment, utilization has the umbrella portion 41 that uv-hardening resin 50 drips, first projection 42 that is entrenched in second air entry 25 and the housing 40 of second projection 43 of operating by second pole 32, spin coated uv-hardening resin 50, form light transmission layer 14, do not adhere to uv-hardening resin 50 being used to operate on second pole 32 of housing 40.Therefore, greatly reduce the worry of on other parts of manufacturing installation 20 and other manufacturing installations, adhering to uv-hardening resin 50 and being polluted, can improve the reliability of whole manufacturing process, the unnecessary clean operation that second pole 32 is set again.
If rubber-like materials such as employing polyolefin resin are as the material of housing 40, then make only some distortion a little of umbrella portion 41 by 25 sorptions of second air entry, owing to become the state by the surface that is pressed in film forming substrate 10 ', has improved with the flatness that becomes film substrate 10 ' surface on umbrella portion 41 surfaces.Like this, when spin coated, can guarantee the excellent homogeneity of uv-hardening resin 50 films.
If adopt the material of polyolefin resin as housing 40, then the compatibility for uv-hardening resin is lower, and, when utilizing again, can carry out with comparalive ease separating of polyolefin resin and uv-hardening resin owing to the patience that has improved solvent.
If the surfaceness of the umbrella portion 41 of housing 40 is set in the scope of present embodiment explanation, can prevent that then big bubble from sneaking into light transmission layer 14.
Open in the flat 11-195251 communique above-mentioned spy, put down in writing and made support and the incorporate inaccessible parts of being made up of hollow tube-shape support or a plurality of clava of housing, compare with it, the housing 40 that present embodiment adopts has the following advantages.
Open in the flat 11-195251 communique above-mentioned spy,, then be easy on filming, produce inhomogeneous owing to stop resin with the wall or the clava of support.Different therewith, use housing 40 in the present embodiment, the outer peripheral face of coating liquid being supplied with second projection 43 is rotated coating, then is difficult for producing on filming inhomogeneous.And owing to use housing 40 in the present embodiment, what resin adhered to is the outer peripheral face of second projection 43, then opens flat 11-195251 communique relatively with above-mentioned spy, and the clean of inaccessible parts is easier to.In addition, open in the flat 11-195251 communique above-mentioned spy, at the higher coating liquid of the internal feed viscosity ratio of hollow tube-shape support, the flowability in order to ensure coating liquid can not make the external diameter of support less.Therefore, the coating starting position is far away apart from rotation center.Different therewith, use housing 40 in the present embodiment, compare at this communique, can significantly reduce the external diameter of second projection 43, make the coating starting position near rotation center.Consequently the thickness offset at the light transmission layer 14 of radial direction is littler.
The present invention is not limited to above embodiment, in the invention scope of claim record various changes can be arranged, and self-evident, they also are included in the scope of the present invention.
For example, in the foregoing description, when utilizing ultraviolet irradiation process shown in Figure 11 to finish the film forming of light transmission layer 14, with CD 10 as finishing product, yet, after this also can be attached to the operations that light transmission layer 14 surface form hard overlay.The formation method of hard overlay has no particular limits, and preferably, after hard coating liquid is rotated coating, makes the solvent evaporation that comprises in the hard coating liquid with panel formula well heater, and irradiation ultraviolet radiation makes its sclerosis again.Like this, under the situation of additional hard overlay,, then wish to reduce the part ultraviolet irradiation amount in Fig. 9 and the operation shown in Figure 11 owing to appended the ultraviolet irradiation process that makes hard coating liquid sclerosis as far as possible.Just, in Fig. 9 and operation shown in Figure 11, make uv-hardening resin 50 be semi-harden state, by making the ultraviolet ray irradiation of hard coating liquid sclerosis, uv-hardening resin 50 fully hardens again.
In addition, in the above-described embodiments, by ultraviolet irradiation process shown in Figure 9, make not by uv-hardening resin 50 sclerosis of the first ultraviolet mask, 60 cover parts, by ultraviolet irradiation process shown in Figure 11, make not by uv-hardening resin 50 sclerosis of the second ultraviolet mask, 62 cover parts, yet, can be in ultraviolet irradiation process shown in Figure 9, do not make to be complete hardening state by the uv-hardening resin 50 of the first ultraviolet mask, 60 cover parts, and, in ultraviolet irradiation process shown in Figure 11, do not use the second ultraviolet mask 62 and on whole irradiation ultraviolet radiation, make uv-hardening resin 50 sclerosis.Like this, because 2 kinds of ultraviolet masks of unnecessary use then can reduce manufacturing cost.
Before irradiation ultraviolet radiation on the uv-hardening resin 50, can take out housing 40 from CD 10.Before taking out housing 40 from CD 10, also can make 50 sclerosis of entire ultraviolet line hardening resin, but when after sclerosis, taking out housing 40, the boundary vicinity of the resin bed on resin bed in the umbrella portion 41 and CD 10 will produce flash, and the resin-shaped after the sclerosis fragmentates and is easy to disperse to CD 10.Therefore, the order of the taking-up of ultraviolet ray irradiation and housing 40, the order that should adopt the foregoing description to illustrate.
The umbrella portion 41 of the housing 40 that present embodiment uses has more to the thin more shape of its thickness of peripheral part, but umbrella portion 41 more to the thin more shape of peripheral part not necessarily, and its part can have the zone that thickness is certain or increase at least.
The umbrella portion 41 of the housing 40 that present embodiment uses has convex surface and concave surface, but the present invention is not limited thereto, and umbrella portion shape can have different therewith shapes.The example of this housing of Figure 13 (A)~(E) expression.
Housing 70 shown in Figure 13 (A) has the umbrella portion 71 of circular cone shape and first and second projections 72,73 of giving prominence to opposite direction mutually from 71 central authorities of umbrella portion.The operable housing of the present invention, the back side also can be tabular surfaces.
Housing 80 shown in Figure 13 (B) has the umbrella portion 81 of circular cone shape and first and second projections 82,83 of giving prominence to opposite direction mutually from 81 central authorities of umbrella portion, with the housing 70 shown in Figure 13 (A) roughly the same shape is arranged, but second projection 83 has the thin more shape of forward end more.If make second projection 83 be this shape, then when utilizing injection molding to make, from metal pattern, extract housing 80 easily out.
It is the smooth umbrella portion 91 in the curve-like back side and mutual to the first and second outstanding in the other direction projections 92,93 from 91 central authorities of umbrella portion that housing 90 shown in Figure 13 (C) has convex surface.Like this, the operable housing of the present invention, its umbrella portion convex surface also can be a curve-like.
Housing 100 shown in Figure 13 (D) has umbrella portion 101 that periphery is a vertical plane and first and second projections 102,103 of giving prominence to opposite direction mutually from 101 central authorities of umbrella portion.Like this, the operable housing of the present invention, the periphery of its umbrella portion also can be a vertical plane.But the thickness t of the periphery of umbrella portion 101 should be set in below the 0.4mm.When thickness t is excessive, be difficult to apply equably light transmission layer 14.
First and second projections 112,113 that housing 110 shown in Figure 13 (E) has the certain umbrella portion 111 of thickness and gives prominence to opposite direction mutually from 111 central authorities of umbrella portion.Like this, the operable housing of the present invention, the thickness of its umbrella portion also can be certain.At this moment, the perimeter thicknesses t of umbrella portion 111 preferably is set in below the 0.4mm.
Be provided with first projection 42 on the housing 40 that present embodiment uses, by this first projection 42 and second air entry, 25 chimeric decision positions, but the determining positions that only limits to housing 40 then needn't have this first projection 42 when being possible.Can recess be set in 41 central authorities of umbrella portion and replace first projection 42, carry out the determining positions of housing 40 with this.
The layer of the CD made from method of the present invention constitutes, there is no particular limitation for the thickness of each layer and the material of each layer, utilizes to comprise the method that applies the operation of aqueous material according to spin coated layer method and make CD, can be suitable for for the manufacturing of any CD.With the film thickness that method of the present invention forms, proportional with the square root of coating liquid (uv-hardening resin 50 of the foregoing description) viscosity, and rotating speed is big more, rotational time is long more then thin more.Therefore, when forming film, can apply fluid viscosity, rotating speed (during high speed rotating) and rotational time by thickness setting as requested with method of the present invention.Specifically, when the thickness of the film of formation was 30 μ m~300 μ m, can set the coating fluid viscosity was that 100~100000cp, rotating speed are that 500~6000rpm, rotational time are 2~10 seconds.
As seen from the above description, among the present invention,, then reduced widely on other parts of manufacturing installation and other manufacturing installations and adhered to the worry that uv-hardening resin pollutes owing on the pole of operation housing, do not adhere to uv-hardening resin.Therefore, can improve the reliability of whole manufacturing process, and clean operation, then can avoid the complicated of operation because pole needn't be set.
[embodiment 1]
The plate-like support matrices that has formed the pit that keeps information polycarbonate resin, external diameter 120mm, internal diameter (center-hole diameter) 15mm, the surface of thickness 1.1mm} forms the reflection horizon that is made of Al with sputtering method, obtains into film substrate 10 '.
Then, utilize the method for the present invention of using housing 40, form light transmission layer 14 in the following order.The housing 40 that uses behind stainless steel cutting, carries out surface grinding and makes.This housing 40 has the shape shown in Figure 13 (A), and umbrella portion 41 is diameter 36mm, and second projection 43 is diameter 1mm, and length is 20mm
At first, housing 40 is positioned in on the film substrate 10 ', starts first and second suction mechanisms, housing 40 with become film substrate 10 ' sorption on worktable 21.Then, by making worktable 21 low speed rotation and with uv-hardening resin (Japanese chemical drug (strain) system, viscosity 500cp in the time of 25 ℃) outer peripheral face of supply second projection 43, in umbrella portion 41, expand resin, then, make worktable 21 rotations 8 seconds with 2000rpm, becoming film substrate 10 ' to go up extension resin-shaped resin layer.Make housing 40 after become film substrate 10 ' and separate, resin bed is being carried out UV cured, promptly obtaining the CD sample as light transmission layer 14.
[embodiment 2]
Housing 40 after utilization is used in embodiment 1.Just, when spin coated, utilize the housing 40 of umbrella portion 41 surfaces by the resin coating.In addition, all the same with embodiment 1, promptly can be made into the CD sample.
[embodiment 3]
Housing 40 shapes of using with embodiment 1 are identical, and except using the housing 40 that constitutes by polycarbonate resin, all the same with embodiment 1, promptly can be made into the CD sample.These housing 40 usefulness injection moulding methods are made.When injection molding forming, adopt the less CD polycarbonate of impurity that surfaceness is had bad influence, 30 ℃ of metal pattern temperature, 320 ℃ of resin melt temperatures, mold clamping force 490MPa, ejaculation time are 1 second.
[embodiment 4]
Except not carrying out surface grinding, use the stainless steel housing with embodiment 1 the same making, other promptly can be made into the CD sample similarly to Example 1.
[embodiment 5]
Adopt the stainless steel housing of making similarly to Example 4, it also promptly can be made into the CD sample similarly to Example 1.This housing is compared with the housing that embodiment 4 uses, and the surface roughness that cut produces is smaller a little.
[embodiment 6]
Housing 40 shapes of using with embodiment 1 are identical, and use the housing of making by POM (polyoxymethylenes resin) cutting 40, and other promptly can be made into the CD sample similarly to Example 1.
The housing 40 that uses in above-mentioned each sample making, measure the surfaceness above the umbrella portion 41 with surface roughness measurement device (Tokyo Precision Co., Ltd system サ one Off コ system SE-30H, pin: the system PU-DH-10/10 mR of this society, cutoff frequency 0.8mm), obtain the average slope angle θ a of center line average roughness Ra, 10 mean roughness Rz and roughness.Its result of table 1 expression.The benchmark measured length is 2.5mm.As shown in table 1, the surfaceness of the housing 40 that embodiment 1~3 uses is in the scope of the foregoing description regulation, and the surfaceness of the housing 40 that embodiment 4~6 uses is beyond the scope of the foregoing description regulation.
For above-mentioned each sample, with the defective in optical microscope and general optic disc open defect inspection machine (Dr.SCHENK corporate system) the inspection light transmission layer.Use optical microscope, visual quantification of carrying out bubble size and number is with general optic disc open defect inspection machine, by CCD gamma camera data image processing carrying out defect inspection.There is density in the bubble of each sample of table 1 expression.Below the detailed defect inspection result of each sample of expression.
The sample of embodiment 1 in the zone of the radius 18~30mm of light transmission layer, in the part of Zhou Fangxiang, is 0~one/mm with observation by light microscope to the bubble of diameter 20~40 μ m 2And, also observe suitable therewith defective with CD open defect inspection machine.
The sample of embodiment 2 in the zone of the radius 18~30mm of light transmission layer, in the part of Zhou Fangxiang, is 1~5/mm with observation by light microscope to the bubble of diameter 20~40 μ m 2And, also observe suitable therewith defective with CD open defect inspection machine.
The sample of embodiment 3 sees through layer in overall optical, also fails to confirm with bubble of optical microscope, does not detect defective equally with CD open defect inspection machine.
The sample of embodiment 4, in the zone of the radius 18~30mm of light transmission layer, at whole Zhou Fangxiang, the bubble of observing diameter 20~40 μ m is 10~20/mm 2And, also observe suitable therewith defective with CD open defect inspection machine.
The sample of embodiment 5, in the zone of the radius 18~30mm of light transmission layer, at whole Zhou Fangxiang roughly, the bubble of observing diameter 20~40 μ m is 5~10/mm 2And, also observe suitable therewith defective with CD open defect inspection machine.
The sample of embodiment 6, in the zone of the radius 18~30mm of light transmission layer, at whole Zhou Fangxiang, the bubble of observing diameter 20~40 μ m is 20/mm 2And, also observe suitable therewith defective with CD open defect inspection machine.
Table 1
There is density in inaccessible parts Ra Rz θ a bubble
(nm) (μ m) is (deg) (individual/mm 2) embodiment 1 metal (surface grinding) 59 0.418 0.31 0~1 embodiment, 2 metals (surface grinding) 27 0.303 0.22 1~5
+ resin coating embodiment 3 resins (injection-molded 42 0.060 0.09 0
Moulding) embodiment 4 metal 479* 2.592* 2.80* 10~20 embodiment 5 metal 264* 1.919* 3.15* 5~10 embodiment, 6 resins (cutting) 932* 4.412* 4.63* 20*: outside the specialized range
Obviously see effect of the present invention from the result of above embodiment.Just, the Roughness Surface on Control of housing within the scope of the foregoing description regulation, can significantly be reduced the defective of light transmission layer.
Pit at each sample shown in the table 1 forms zone (zone of radius 23~58mm), measures the thickness of light transmission layer with the laser focusing displacement meter.Consequently the thickness of light transmission layer all is 100 ± 2 μ m for any sample, in uneven thickness minimum at radial direction.

Claims (17)

1. optic disc producing mehtod, it is characterized in that having: operate with projection with the aforesaid operations of the housing of projection to circular parachute portion that to have a face be convex surface with from the outstanding operation that is provided with in center of the above-mentioned convex surface of above-mentioned umbrella portion, above-mentioned housing is positioned in into the mounting operation of the approximate centre portion of film substrate; In the drip operation of dripping of aqueous material of the above-mentioned convex surface of the above-mentioned umbrella portion of above-mentioned housing; By rotating above-mentioned one-tenth film substrate and above-mentioned housing integratedly, above-mentioned aqueous material is coated in the spin coated operation on the surface of above-mentioned one-tenth film substrate.
2. as the optic disc producing mehtod of claim 1 record, it is characterized in that, above-mentioned housing also has the determining positions portion that the reverse side at the above-mentioned convex surface of above-mentioned umbrella portion is provided with, and puts the position of determination section and determines according to using rheme, carries out the mounting of the above-mentioned housing of above-mentioned mounting operation.
3. as the optic disc producing mehtod of claim 2 record, it is characterized in that: the above-mentioned umbrella portion of above-mentioned housing has more to the thin more shape of peripheral part thickness, and the above-mentioned determining positions portion of above-mentioned housing is made of with projection the outstanding determining positions that is provided with in center from the above-mentioned reverse side of above-mentioned umbrella portion.
4. as the optic disc producing mehtod of claim 3 record, it is characterized in that: also have after above-mentioned mounting operation, by attracting the above-mentioned determining positions projection of above-mentioned housing, the outermost perimembranous of the above-mentioned umbrella portion of above-mentioned housing is pushed attraction operation on the surface of above-mentioned one-tenth film substrate.
5. as the optic disc producing mehtod of each record of claim 1 to 4, it is characterized in that: above-mentioned aqueous material is a uv-hardening resin.
6. as the optic disc producing mehtod of claim 5 record, it is characterized in that: also have the central portion that covers on one side above-mentioned one-tenth film substrate with the first ultraviolet mask, on one side on the above-mentioned uv-hardening resin of above-mentioned film forming substrate surface formation irradiation ultraviolet radiation, make the first ultraviolet irradiation process of its sclerosis; The diameter of the above-mentioned first ultraviolet mask is greater than the diameter of the above-mentioned umbrella portion of above-mentioned housing.
7. as the optic disc producing mehtod of claim 6 record, it is characterized in that also having: operate the aforesaid operations projection of above-mentioned housing, remove the operation of removing of above-mentioned housing from the surface of above-mentioned one-tenth film substrate; Above-mentioned remove operation after, on the above-mentioned uv-hardening resin that above-mentioned film forming substrate surface forms irradiation ultraviolet radiation, make the second ultraviolet irradiation process of its sclerosis.
8. as the optic disc producing mehtod of each record of claim 1 to 7, it is characterized in that: above-mentioned housing is made of plastics.
9. as the optic disc producing mehtod of claim 8 record, it is characterized in that: above-mentioned housing is made of polyolefin.
10. optical disk manufacturing device is characterized in that having: to circular parachute portion that to have a face be convex surface and the parts operated with projection with the aforesaid operations of the housing of projection from the outstanding operation that is provided with in center of the above-mentioned convex surface of above-mentioned umbrella portion; At the drip parts of aqueous material of the above-mentioned convex surface of the above-mentioned umbrella portion of the above-mentioned housing that becomes film substrate approximate centre portion mounting; Rotate the parts of above-mentioned one-tenth film substrate and above-mentioned housing integratedly.
11. an optical disk manufacturing device applies aqueous material by whirl coating at the film forming substrate surface, it is characterized in that having: the rotary table of the above-mentioned one-tenth film substrate of mounting; Above-mentioned one-tenth film substrate is fixed on first of above-mentioned worktable attracts parts; The conveyance housing also is positioned in the pole of the above-mentioned film forming substrate center part on the above-mentioned worktable with it; Above-mentioned housing is fixed on second of above-mentioned one-tenth film substrate attracts parts.
12. the optical disk manufacturing device as claim 11 record is characterized in that: above-mentioned second attracts parts to comprise carries out the attraction mouth that the position is determined to above-mentioned housing.
13. the manufacture method of an optical data media, this optical data media is having on the plate-like support matrices of center pit, have information recording layer in turn and contain the light transmission layer of resin, be used to write down or the laser beam of regenerating incides above-mentioned information recording layer by above-mentioned light transmission layer;
It is characterized in that this manufacture method has:
After on the above-mentioned support matrices above-mentioned information recording layer being set, cover the center pit of above-mentioned support matrices with the above-mentioned plectane portion of inaccessible parts with plectane portion, then, the coating liquid that will contain the radioactive ray hardening resin is supplied with above-mentioned plectane portion, then, by rotating above-mentioned inaccessible parts and above-mentioned support matrices integratedly, make above-mentioned coating liquid on above-mentioned support matrices, extend, form the resin extension operation of cyclic resin layer;
With the hardening process that makes the above-mentioned light transmission layer of above-mentioned resin bed sclerosis formation by radiation exposure;
In at least a portion on the above-mentioned plectane portion surface of coating liquid contact, using center line average roughness Ra is the following inaccessible parts of 100nm.
14. the manufacture method of an optical data media, this optical data media is having on the plate-like support matrices of center pit, have information recording layer in turn and contain the light transmission layer of resin, be used to write down or the laser beam of regenerating incides above-mentioned information recording layer by above-mentioned light transmission layer;
It is characterized in that this manufacture method has:
After on the above-mentioned support matrices above-mentioned information recording layer being set, cover the center pit of above-mentioned support matrices with the above-mentioned plectane portion of inaccessible parts with plectane portion, then, the coating liquid that will contain the radioactive ray hardening resin is supplied with above-mentioned plectane portion, then, by rotating above-mentioned inaccessible parts and above-mentioned support matrices integratedly, make above-mentioned coating liquid on above-mentioned support matrices, extend, form the resin extension operation of cyclic resin layer;
With the hardening process that makes the above-mentioned light transmission layer of above-mentioned resin bed sclerosis formation by radiation exposure;
At least a portion on the above-mentioned plectane portion surface of above-mentioned coating liquid contact, using 10 mean roughness Rz is inaccessible parts below the 1 μ m.
15. the manufacture method of an optical data media, this optical data media is having on the plate-like support matrices of center pit, have information recording layer in turn and contain the light transmission layer of resin, be used to write down or the laser beam of regenerating incides above-mentioned information recording layer by above-mentioned light transmission layer;
It is characterized in that this manufacture method has:
After on the above-mentioned support matrices above-mentioned information recording layer being set, cover the center pit of above-mentioned support matrices with the above-mentioned plectane portion of inaccessible parts with plectane portion, then, the coating liquid that will contain the radioactive ray hardening resin is supplied with above-mentioned plectane portion, then, by rotating above-mentioned inaccessible parts and above-mentioned support matrices integratedly, make above-mentioned coating liquid on above-mentioned support matrices, extend, form the resin extension operation of cyclic resin layer;
With the hardening process that makes the above-mentioned light transmission layer of above-mentioned resin bed sclerosis formation by radiation exposure;
In at least a portion on the above-mentioned plectane portion surface of above-mentioned coating liquid contact, the average slope angle θ a that uses roughness is the inaccessible parts below 1 °.
16. as the optical data media manufacture method of each record of claim 13~15, above-mentioned inaccessible parts utilize the injection molding of resin to make.
17. the optical data media manufacture method as each record of claim 13~16 is characterized in that: above-mentioned inaccessible parts have from the outstanding operation projection of core on above-mentioned plectane portion surface.
CN 02147209 2001-08-08 2002-08-08 Optic disk mfg. method and device Expired - Fee Related CN1241191C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP240913/2001 2001-08-08
JP2001240913A JP4084551B2 (en) 2001-08-08 2001-08-08 Manufacturing method of optical disk
JP2001280838A JP2003085834A (en) 2001-09-14 2001-09-14 Method of manufacturing optical information medium
JP280838/2001 2001-09-14

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1331137C (en) * 2003-06-05 2007-08-08 株式会社东芝 Optical disk and method for manufacturing the same
CN100437790C (en) * 2001-08-21 2008-11-26 三星电子株式会社 Disk mfg. device and method for mfg. transparent layer of disc

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100437790C (en) * 2001-08-21 2008-11-26 三星电子株式会社 Disk mfg. device and method for mfg. transparent layer of disc
CN1331137C (en) * 2003-06-05 2007-08-08 株式会社东芝 Optical disk and method for manufacturing the same

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