CN1401815A - Method and apparatus for vacuum film-coating of small size workpiece - Google Patents
Method and apparatus for vacuum film-coating of small size workpiece Download PDFInfo
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- CN1401815A CN1401815A CN 02129259 CN02129259A CN1401815A CN 1401815 A CN1401815 A CN 1401815A CN 02129259 CN02129259 CN 02129259 CN 02129259 A CN02129259 A CN 02129259A CN 1401815 A CN1401815 A CN 1401815A
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Abstract
A method and apparatus for vacuum coating of small workpieces are disclosed. Said method is characterized by that the cage containing small workpieces periodically rotates at a certain speed which is controlled to make the small workpieces uniformly close to the surface of cage, so eliminating the overlap between workpieces and increasing the efficiency and quality of vacuum coating. Said coating apparatus is composed of controlled power supply, motor, speed reducer, and vacuum coating chamber which consists of vacuum chamber, cage and multiple evaporating sources.
Description
Technical field
The present invention relates to a kind of method and device thereof that is used for vacuum film-coating of small size workpiece, belong to technical field of vacuum plating.
Background technology
When the centering large-size workpiece carried out vacuum plating, frock clamp that can design specialized guaranteed suitable locus and the density degree of workpiece in vacuum chamber, realized maximum batch under the prerequisite that guarantees coating quality, enhanced productivity.
For the small size workpiece of different shape, as disk, (length) square sheet, rectangle cubes, right cylinder, spheroid or spheroid etc.Usually the dimension of each workpiece should be within 15 millimeters, if there are two dimensions less, last dimension can suitably increase, as increases to 25 millimeters; The weight of each workpiece should not surpass 25 grams usually.The poor efficiency that single-piece is installed or turn-over brings is avoided in loading and unloading in large quantities simultaneously for convenience, adopts the loading method of the cylindrical cylinder mould that horizontally rotates usually.
The cylindrical cylinder mould that horizontally rotates is made of the end cap (plate) at skeleton, steel mesh and two ends usually.Skeleton, steel mesh and end cap are all used the stainless material manufacturing, are convenient to repeatedly plated film and use and the strip clean.Wire mesh cage structures will have enough rigidity and intensity, guarantees loading at full capacity and normally can not occur being out of shape and damaging under the transmission condition.Steel mesh also will have sufficient intensity, and mesh to reduce the block effect of cylinder mould to workpiece, improves film deposition speed guaranteeing increasing as far as possible under the prerequisite that workpiece can not spill.Central rotating shaft one end of cylinder mould is supported by a bracing frame; Also can support at the other end of central rotating shaft, perhaps directly be connected and support with transmission shaft by a bracing frame.
The transmission shaft of cylinder mould behind vacuum-sealing pass-out vacuum-chamber wall, usually through a step-down gear with a direct current or exchange single-phase or triphasic electric motor and be connected.The velocity of rotation of the rotating speed final decision workpiece cylinder mould of electric motor.This cylinder mould can rotate with a low constant speed usually.
When cylinder mould slowly ran, small workpiece is because the effect that is subjected to gravity all can rest on the bottom of cylinder mould, and was overlapped, reduced a loading capacity of coating speed or small workpiece; Secondly, in the cylinder mould rotating process, between the small workpiece and and the cylinder mould wall between constantly roll, slide and collide, cause the scuffing and the wearing and tearing of workpiece surface easily, have influence on the dimensional precision and the visual appearance of workpiece; At last,, drop to easily on the important devices such as coating evaporation source of vacuum chamber bottom, cause them to pollute or damage, have influence on the reliability of coating quality and coating system by chip and the dirt under the mill on workpiece and the cylinder mould.
Summary of the invention
The objective of the invention is to propose a kind of method and device thereof that is used for vacuum film-coating of small size workpiece, change the coating process and the device thereof of prior art, improving the plated film efficient of small workpiece, and reduce the scuffing and the wearing and tearing of workpiece surface effectively.
The method that is used for vacuum film-coating of small size workpiece that the present invention proposes is characterized in that the cylinder mould that loads small size workpiece periodically is controlled at coating speed Nd and reversal rate Nf rotation down,
Nd＝Nc+Δd，
Nf＝Nc-Δf，
Wherein Nc=(30/ π) (g/r)
Rev/min, g is a universal gravity constant, g=980cm/ second
2, r is the inwall radius of cylinder mould, and unit is cm, and Δ d, Δ f respectively are Nc (1～70) %,
The ratio of time T d that cylinder mould rotates with Nd and the time T f that rotates with Nf is Td: Tf=1～100: 1.
The device that is used for vacuum film-coating of small size workpiece that the present invention proposes, comprise motor, step-down gear and vacuum film coating chamber, vacuum film coating chamber wherein comprises vacuum chamber, cylinder mould and evaporation source, cylinder mould places vacuum chamber, motor via reducer is connected with the rotating shaft of cylinder mould, it is characterized in that also comprising a plurality of evaporation sources and control power supply, described a plurality of evaporation sources place on the circumference of vacuum chamber, and described motor is controlled its rotating speed by the control power supply.
Method that is used for vacuum film-coating of small size workpiece and device thereof that the present invention proposes, on the basis of the cylindrical cylinder mould loading method that horizontally rotates usually, reach Nd by the speed of adjusting and the control cylinder mould rotates, the centrifugal force that produces during small workpiece is rotated can overcome the downward gravity of small workpiece itself, makes small workpiece to be fitted in equably on the circumferential wall of cylinder mould.Its advantage is as follows:
1, because cylinder mould circumferential wall area greater than the area of bottom, under identical overlapping situation, has increased the quantity that small workpiece is loaded.Otherwise, under the condition of identical loading capacity, having reduced small workpiece overlapping on the cylinder mould wall, the effective coated surface that has increased small workpiece is long-pending;
2, because small workpiece can be evenly distributed on the circumferential wall of cylinder mould, and the coating evaporation source can be placed on the bottom of vacuum chamber, but up and down.Increase the handiness that evaporation source is put, also can increase the quantity of putting of evaporation source simultaneously, helped improving plated film production efficiency;
3, after the coating evaporation source gets out of the way position below the cylinder mould, avoided because chip and dirt fall down the danger of polluting evaporation source, thereby guaranteed the reliability of coating quality and coating system.
In process of plating, arrive Nf by the speed that periodically reduces the cylinder mould rotation, make the downward gravity of the centrifugal force of generation in the small workpiece rotation less than workpiece itself, at this moment the workpiece on cylinder mould top will break away from the cylinder mould circumferential wall, occurs rolling, slides and falls.Along with the cylinder mould rotating speed accelerates to original speed again, the workpiece of whereabouts can paste other position of cylinder mould wall again randomly, has realized the randomly changing of workpiece applying cylinder mould circumferential wall attitude simultaneously.This variable speed control process of quickening again of slowing down has earlier reached following purpose:
(1) realizes small workpiece controlled " stir-frying " in cylinder mould, thereby avoided small workpiece is carried out time-consuming, the effort of manual turn-over, inefficient work;
Guaranteeing under the uniform precondition of each surface coating of small workpiece (2), increasing ratio (Td/Tf) and can reduce " stir-frying " time length effectively that workpiece surface scratches and the possibility of wearing and tearing thereby effectively reduce;
(3) under the condition of reliable " stir-frying ", size, shape and quality according to workpiece, by reducing Δ d and Δ f, weaken between workpiece and the workpiece to greatest extent or workpiece and cylinder mould wall between roll, slide and the intensity of collision, workpiece surface scratches and the degree of wearing and tearing thereby reduced effectively.
Description of drawings
Fig. 1 is a small workpiece vacuum coater structural representation in the prior art.
Fig. 2 is the wire mesh cage structures synoptic diagram that loads small workpiece in the prior art.
Fig. 3 is the small workpiece cylinder mould rotation drive structure synoptic diagram that the present invention designs.
Fig. 4 is the vacuum coater structural representation that the present invention designs.
Fig. 5 is a cylinder mould velocity of rotation control synoptic diagram of the present invention.
Among Fig. 1 to Fig. 5, the 1st, electric motor, the 2nd, step-down gear, the 3rd, vacuum chamber, the 4th, cylinder mould back head, the 5th, evaporation source, the 6th, small workpiece cylinder mould, the 7th, cylinder mould front end end cover, the 8th, cylinder mould rotates and back shaft, and the 9th, cylinder mould bracing frame, the 10th, cylinder mould transmission shaft, the 11st, motor speed control power supply.
Embodiment
The device that is used for vacuum film-coating of small size workpiece that the present invention proposes, its structure as shown in Figure 3 and Figure 4, comprise motor 1, step-down gear 2 and vacuum film coating chamber, vacuum film coating chamber wherein comprises vacuum chamber 3, cylinder mould and evaporation source 5, cylinder mould places vacuum chamber 3, motor 1 is connected with the rotating shaft of cylinder mould by step-down gear 2, and it is a plurality of to it is characterized in that evaporation source 5 has, and also comprises control power supply 11.A plurality of evaporation sources 5 place on the circumference of vacuum chamber.Motor 1 is by control power supply 11 its rotating speeds of control.
The present invention proposes is used for the small size workpiece cylinder mould, periodically is controlled at rotation two different rotating speeds (Nd and Nf) under.Nd=Nc+ Δ d wherein, Nf=Nc-Δ f, Δ d and Δ f can be selected in Nc 1 to 70% between.Δ d is decided by the loading capacity of workpiece in the cylinder mould, and workpiece is many more, and is overlapping thick more on the cylinder mould wall, and Δ d needs bigger, and the assurance workpiece is stable to be fitted on the cylinder mould circumferential wall.The intensity that the big more decision workpiece of Δ f stir-fries is just big, and it is thorough more to stir-fry.Td is cylinder mould workpiece coating single side time length when rotating with Nd, Tf be cylinder mould when rotating with Nf workpiece stir-fry the time length.Tt=Td+Tf is that cylinder mould rotates adjustment cycle, and the ratio of Td and Tf should be between 1 to 100, and ratio is big more to show that the workpiece lasting relative time that stir-fries is few more.The ratio of the time T c of plated film and Tt also should be between 1 to 100, corresponding to the number of times that stir-fries of the workpiece in the coating process.
Cylinder mould is when halted state, and all small size workpieces of packing into all can rest on the bottom of cylinder mould.After cylinder mould starts rotation, one side workpiece can be partial to constantly rolling of turning direction in the bottom of cylinder mould.Along with rotating speed progressively quickens, the workpiece coverage rate can be more and more longer on the periphery of turning direction one side.When rotating speed reaches a threshold value (Nc),
Nc=(30/ π) (g/r)
Rev/min
G (980cm/sec
2) be universal gravity constant, r (cm) is the inwall radius of cylinder mould.Nc and workpiece weight and size are irrelevant, and be only relevant with the internal diameter of cylinder mould.The big more quick passage critical speed of internal diameter is low more.
Be attached to the workpiece that rotates along with cylinder mould on the cylinder mould wall and will be subjected to the centrifugal force equal with self gravitation.The phenomenon of rolling will no longer appear in workpiece, but be fitted in all the time on the cylinder mould wall, with cylinder mould rotation together.But, directly be not attached to the workpiece on the cylinder mould wall, because their radius of gyration is less, quick passage critical speed is had relatively high expectations, and therefore still can roll and slide.Should move and all workpiece progressively can be evenly distributed on the circumferential surface of cylinder mould.Along with the cylinder mould velocity of rotation is many more above threshold value Nc, all workpiece will be got on the circumferential surface that sticks on cylinder mould securely.According to the difference of workpiece loading capacity in the cylinder mould, can paste one deck, two-layer or multilayer workpiece on the circumferential surface of cylinder mould.
In the time of under the cylinder mould rotating speed is reduced to threshold value Nc once more, the workpiece that is in the cylinder mould top begins to break away from circumferential surface, occurs rolling, slides and falls.After this process continued for some time, all workpiece will experience once completely " stir-frying " in the cylinder mould.Get back to threshold value Nc once more when above when the cylinder mould rotating speed, all workpiece can stick on the circumferential surface of cylinder mould again securely.But the every workpiece and the binding face of cylinder mould periphery, position (the first layer, the second layer or n layer) of applying etc. all can thoroughly change randomly.Through enough " stir-frying " repeatedly, the probability principle can guarantee that all outer surfaces of all workpiece all has identical chance to be fitted on the circumferential surface of cylinder mould.
If install various evaporantion sources at the perisporium of vacuum film coating chamber, above-mentioned cylinder mould is placed in the centre of coating chamber, and through enough " stir-frying " repeatedly, all workpiece in the cylinder mould all will be bombarded equably to be cleaned and plated film in whole coating process.Here it is is used for loading in a large number the invention meaning of the device that horizontally rotates cylinder mould and the control of cylinder mould rotary state of small size workpiece.For the intensity of each workpiece surface icon bombardment cleaning and the thickness of plated film rete, then proportional with the vaporator rate and the quantity of perisporium evaporantion source, also with loading capacity relation of being inversely proportional to of cylinder mould workpiece.Concrete Design of device will be determined according to the technical requirements that reality is used.
The present invention with and the difference of general small workpiece cylinder mould vacuum plating be:
1, the rotation of general small workpiece cylinder mould is in a speed that is starkly lower than Nc.And the present invention require the cylinder mould normal rotation be operated in Nc speed up and down near.(verify the reduction ratio of motor specified speed and step-down gear, just can judge the normal rotation speed of cylinder mould)
2, the rotating speed of general small workpiece cylinder mould does not change in coating process, thereby does not need the speed governing power supply.The present invention requires the rotating speed of cylinder mould is controlled and the speed change adjustment, therefore needs one and rotates the speed regulating control power supply, as frequency transformer etc.
3, since in the general cylinder mould small workpiece be in during continuous rolling stir-fries, can be in all the time near the bottom of cylinder mould.Therefore, the evaporation source that plated film is used is also all concentrated or is approaching in the bottom of vacuum chamber, the below of cylinder mould.The present invention has then exempted the restriction to the evaporation source position, can be placed in the wall of coating chamber, the cylinder mould periphery around on.Be convenient to install a plurality of or multiple different evaporation source, realize being coated with of MULTILAYER COMPOSITE rete easily.Guarantee homogeneity, the raising plated film efficient of plated film.
Below be one embodiment of the present of invention:
Netpen designs is 260 millimeters of radiuses, 630 millimeters of length, and then quick passage critical speed (Nc) is about 57 rev/mins.Δ d is taken as 10 rev/mins and Δ f and is taken as 5 rev/mins, and then Nd is that 67 rev/mins and Nf are 52 rev/mins.Basic velocity of rotation for cylinder mould is chosen to be 67 rev/mins, corresponding to the normal rotation of 3 phase electric motor under the 50Hz frequency.At this moment, and the FVR-0.75E11S type driving inverter that selected motor control power supply is a Japanese fuji electromechanics (1.9kVA, 200-240vAC, the single-phase input of 50-60Hz, 0.75kW, 200-230vAC3 exports mutually, frequency is adjustable at 0.2-400Hz).Electric motor is elected homemade YS8024 type 3 phase electric motor (750W, 1400 rev/mins) as.Step-down gear is slowed down (speed ratio i2 is 135/180) by belt deceleration (speed ratio i1 is 100/157), toothed disc and worm speed reducer (speed ratio i3 is 1/10) is formed.To be that three speed ratio values are long-pending be about 4.78/100 to overall ratio.When the motor control variable-frequency power sources was exported with the 50Hz frequency, the rotating speed of workpiece cylinder mould was 67 rev/mins like this.When the motor control variable-frequency power sources was exported with the 39Hz frequency, the rotating speed of workpiece cylinder mould can become 52 rev/mins.For above-mentioned two output frequencies, can easily preset in the frequency transformer by the control panel of power supply.And then carry out the periodically-varied of two kinds of frequency output states by the time relay or programmable logic controller.Td and Tf are chosen to be 5 minutes respectively and 0.15 minute.Td/Tf then is 33, and Tt then is 5.15 minutes.Because effective rotation of workpiece cylinder mould, make and 4 magnetron sputtering targets have been installed on the vacuum-chamber wall of the outer concentric cylindrical of cylinder mould, the plated film time T c that reaches processing requirement is 120 minutes, workpiece is always met stir-fry 23 times (Tc/Tt) together.
Claims (2)
1, a kind of control method that is used for the rotation of small size workpiece cylinder mould is characterized in that the cylinder mould that loads small size workpiece periodically is controlled at coating speed Nd and reversal rate Nf rotation down,
Nd＝Nc+Δd，
Nf＝Nc-Δf，
Wherein Nc=(30/ π) (g/r)
Rev/min, g is a universal gravity constant, g=980cm/ second
2, r is the inwall radius of cylinder mould, and unit is cm, and Δ d, Δ f respectively are Nc (1～70) %,
The ratio of time T d that cylinder mould rotates with Nd and the time T f that rotates with Nf is Td: Tf=1～100: 1.
2, a kind of device that is used for vacuum film-coating of small size workpiece, comprise motor, step-down gear and vacuum film coating chamber, vacuum film coating chamber wherein comprises vacuum chamber, cylinder mould and evaporation source, cylinder mould places vacuum chamber, motor via reducer is connected with the rotating shaft of cylinder mould, it is characterized in that also comprising a plurality of evaporation sources and control power supply, described a plurality of evaporation sources place on the circumference of vacuum chamber, and described motor is controlled its rotating speed by the control power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02129259 CN1234905C (en) | 2002-09-29 | 2002-09-29 | Method and apparatus for vacuum film-coating of small size workpiece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02129259 CN1234905C (en) | 2002-09-29 | 2002-09-29 | Method and apparatus for vacuum film-coating of small size workpiece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1401815A true CN1401815A (en) | 2003-03-12 |
| CN1234905C CN1234905C (en) | 2006-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02129259 Expired - Lifetime CN1234905C (en) | 2002-09-29 | 2002-09-29 | Method and apparatus for vacuum film-coating of small size workpiece |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101240411B (en) * | 2007-02-08 | 2010-06-02 | 鸿富锦精密工业（深圳）有限公司 | Sputtering type coating device and method |
| CN101295033B (en) * | 2007-04-27 | 2010-06-09 | 鸿富锦精密工业（深圳）有限公司 | Turning tools and method |
| CN101597749B (en) * | 2008-06-03 | 2011-12-21 | 鸿富锦精密工业（深圳）有限公司 | Automatic film coating device |
| CN101713063B (en) * | 2008-10-08 | 2012-10-10 | 鸿富锦精密工业（深圳）有限公司 | Film plating device |
| CN107400861A (en) * | 2017-09-21 | 2017-11-28 | 深圳市华格纳米科技有限公司 | One kind automation continous way thermal resistance evaporation coating apparatus |
-
2002
- 2002-09-29 CN CN 02129259 patent/CN1234905C/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101240411B (en) * | 2007-02-08 | 2010-06-02 | 鸿富锦精密工业（深圳）有限公司 | Sputtering type coating device and method |
| CN101295033B (en) * | 2007-04-27 | 2010-06-09 | 鸿富锦精密工业（深圳）有限公司 | Turning tools and method |
| CN101597749B (en) * | 2008-06-03 | 2011-12-21 | 鸿富锦精密工业（深圳）有限公司 | Automatic film coating device |
| CN101713063B (en) * | 2008-10-08 | 2012-10-10 | 鸿富锦精密工业（深圳）有限公司 | Film plating device |
| CN107400861A (en) * | 2017-09-21 | 2017-11-28 | 深圳市华格纳米科技有限公司 | One kind automation continous way thermal resistance evaporation coating apparatus |
| CN107400861B (en) * | 2017-09-21 | 2020-05-08 | 深圳市华格纳米科技有限公司 | Automatic change continuous type resistance evaporation coating device |
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| Publication number | Publication date |
|---|---|
| CN1234905C (en) | 2006-01-04 |
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Effective date of registration: 20220817 Address after: 102200 b807, building 8, No. 97, Changping Road, Shahe Town, Changping District, Beijing (Changping Demonstration Park) Patentee after: Beijing Danpu Surface Technology Co.,Ltd. Address before: 100096 Xisanqi Beijing East Building Coating Factory Patentee before: BEIJING DNP SURFACE TECHNOLOGY INSTITUTE |
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Granted publication date: 20060104 |
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