CN1383176A - Detection method for substandard panel in continuous exhaust car type treatment - Google Patents
Detection method for substandard panel in continuous exhaust car type treatment Download PDFInfo
- Publication number
- CN1383176A CN1383176A CN02118665A CN02118665A CN1383176A CN 1383176 A CN1383176 A CN 1383176A CN 02118665 A CN02118665 A CN 02118665A CN 02118665 A CN02118665 A CN 02118665A CN 1383176 A CN1383176 A CN 1383176A
- Authority
- CN
- China
- Prior art keywords
- exhaust
- screen board
- evacuation
- mentioned
- glass panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/42—Measurement or testing during manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
Abstract
The present invention provides a method for detecting defective panel in which the defective panel is identified and remaining panels are evacuated as a plurality of hollow panels are mounted on a evacuation cart to conduct a continuous evacuation process, preventing decrease of production efficiency. A plurality of panels P2 are held on an evacuating cart 10 on which at least an evacuating means is mounted. A tip pipe Pa of each panels and an evacuation head 18 of the evacuation cart are connected with each other. The evacuation head and the evacuation means are connected via an evacuation header 17 and evacuation pipes 19 having valves 20. Thus, the evacuation process of the panels is conducted as the evacuation cart is moved through a furnace. When an evacuation defective of the plurality of panels is detected, all of the valves of the panels are closed. Then, the valves of the panels are sequentially opened to measure the vacuum degree of each panel. If the measured vacuum degree does not fall within an acceptable range, then the panel is regarded as defective.
Description
Technical field
The present invention relates to for example detection method of the defective screen board when carrying out continuous exhaust pneumatic wallop with the hollow screen board inside of exhaust dolly article on plasma display panel (PDP) etc.
Background technology
In the past, the method for vacuum exhaust had the batch process formula and the method for processing formula vacuum exhaust continuously in the screen board of PDP etc.In the method for the vacuum exhaust of above-mentioned arbitrary mode, the vacuum exhaust processing is carried out as follows: make many screen boards roughly keep plumbness or level to be positioned at stove, simultaneously, the push pipe that is assemblied on each screen board is joined with exhaust head respectively, and each exhaust head joins by exhaust header and vacuum pumping hardware (vacuum pump).In addition, in PDP, after carrying out vacuum exhaust in the screen board, need enclose discharge gas, therefore, understanding on the described exhaust header has the discharge gas supply pipe.
Like this, because the exhaust head of each screen board joins by exhaust header and vacuum pumping hardware (vacuum pump), so partly screen board exists push pipe and exhaust head bad connection, the poor sealing of screen board or push pipe breakage etc. become the defective of the bad reason of exhaust, in addition, when in pump-down process, above-mentioned defective taking place, then can cause all screen board exhausts bad.
On the other hand, the detection that above-mentioned exhaust is bad is that vacuum gauge is contained on the above-mentioned exhaust header, monitors what the vacuum degree state of exhaust header carried out with this vacuum gauge.For example, breakage takes place in push pipe in pump-down process, and then the vacuum degree of exhaust header sharply reduces.At this moment, in delayed time system, the exhaust switch valve of each screen board of operator's manual operation is determined defective screen board, and the exhaust switch valve of specific screen board is transferred in off position corresponding thus above-mentioned situation.In continuous processing mode, the limit makes that the exhaust dolly that loads many screen boards moves, pump-down process is carried out on the limit in stove, and therefore, from the job safety aspect, same corresponding with delayed time system (artificial affirmation) is difficult.Thereby, finish back (taking out of the back) in pump-down process from continuous oven, it is corresponding to confirm that with above-mentioned vacuum gauge the vacuum degree state of exhaust header comes.
Yet, even lift-launch has only 1 screen board defective in many screen boards of exhaust dolly, because the whole screen boards that carry at the exhaust dolly are pump-down process of implementing regulation under the bad state of exhaust, so the described countermeasure in above-mentioned continuous processing mode can produce the problem that production efficiency reduces.
The objective of the invention is to: a kind of detection method of being carried out pump-down process, defective screen board by the exhaust dolly is provided, described detection method detects the screen board that becomes the exhaust poor prognostic cause in the pump-down process, all the other screen boards are proceeded pump-down process, prevent that thus production efficiency from reducing.
Summary of the invention
For achieving the above object, the invention provides a kind of by exhaust car type continuous exhaust pneumatic wallop processing method, the method that defective screen board is detected, described method is being carried a plurality of screen boards of maintenance on the exhaust dolly of holding exhaust apparatus at least, the push pipe of each screen board and the exhaust head of exhaust dolly are joined, simultaneously, by exhaust header above-mentioned exhaust head and exhaust apparatus are joined with the blast pipe that switch valve is housed separately, the limit makes this exhaust dolly mobile limit in stove carry out pump-down process.At this moment, detect and learn when above-mentioned many screen board exhausts are bad, with the above-mentioned switch valve Close All of each screen board.Then, the switch valve of each screen board of switch is measured the vacuum degree of each screen board successively, with its measured vacuum degree beyond the permissible range screen board as defective screen board.
The simple declaration of accompanying drawing
Fig. 1 is the plane sketch of the trolley type treatment facility of glass panel of the present invention.
Fig. 2 is the amplification view in Fig. 1 encapsulation process (exhaust) district.
Fig. 3 is the profile that clips the exhaust dolly of glass panel assembly.
Fig. 4 is a partly oblique view of the explanation of glass panel assembly.
Fig. 5 is the exhaust curve figure that lists the detected state of defective screen board in the deairing step.
Fig. 6 is the cutaway view of another execution mode of exhaust dolly.
Fig. 7 is the plane graph of screen board superposed state among Fig. 6.
Fig. 8 is the stagger front elevation of maintenance form one example of glass panel assembly plumbness.
Fig. 9 is glass panel assembly tilt the to stagger side view of maintenance form one example.
Among the figure, T is the exhaust car type continuous furnace, and A is the encapsulation process district, and B is an exhaust area, C is the cooling zone, and Pa is a push pipe, and P1 is the screen board assembly, and P2 is a screen board, W1 is the watch crystal substrate, and W2 is a back side glass substrate, and 7 is peristome, 10 are the exhaust dolly, and 14 are the vacuum exhaust pump, and 15 is the discharge gas pump, 16a, 16b, 20 are electromagnetic switch valve, and 17 is exhaust header, and 18 is exhaust head, 19 is blast pipe, and 21 is that vacuum gauge 21,22 is a controller.
Embodiment
Below, according to Fig. 1~Fig. 5 embodiment of the present invention is described.
The exhaust car type continuous furnace T that the present invention is suitable for ties up to the equipment of proceeding pump-down process after the encapsulation process.As depicted in figs. 1 and 2, the siege total length is provided with peristome 7, and encapsulation process district A, the exhaust area B and the cooling zone C that are made up of many furnace chambers respectively constitute.
As shown in Figure 2, encapsulation process district A and exhaust area B are provided with in stove in the circulation plate washer 1, thermals source 3 such as configuration radiant heater burner or electric heater on the peripheral passage 2.Furnace atmosphere is to suck from suction inlet 5 with circulating fan 4, is heated by above-mentioned thermal source 3, discharges from delivery outlet 6, by this, circulates in stove, and following glass panel assembly P1 is heated.
Again, cooling zone C is, the thermal source 3 in above-mentioned encapsulation process district A (exhaust area B), also has the cooling source (not shown) of extraneous air introducing port or cooling water pipe etc., and other structures and above-mentioned encapsulation process district A (exhaust area B) are same.
Above-mentioned glass panel assembly P1 is made of watch crystal substrate W1 and the back side glass substrate W2 of band push pipe Pa as shown in Figure 4.Above-mentioned glass panel will fuse the sealant S that forms with glass cementation cream and be coated in the opposed outer peripheral portion of any substrate, make it superimposed, be fixed into one with anchor clamps K such as clamps.
Anchor clamps K shown in Figure 4 is applicable to push pipe Pa anchor clamps partly, offers its wide cut elongated slot b big slightly than push pipe Pa diameter at a slice a of push pipe Pa side.Above-mentioned anchor clamps are positioned under the state of this elongated slot b push pipe Pa, make the retaining member d of through hole c chimeric, support push pipe Pa by this.Again, the bearing method of push pipe Pa is not limited to above-mentioned retaining member d, also can be other structures.
Be used for fixing beyond the push pipe Pa on the anchor clamps partly and do not need above-mentioned elongated slot b.
Again, long for carrying the discharge gas feed system that is provided with the vacuum pumping system of vacuum exhaust pump 14 and has discharge gas bottle 15 on the exhaust dolly 10.Described vacuum pumping system and discharge gas feed system are connected to exhaust header 17 by electromagnetic switch valve 16a, 16b.Exhaust header 17 tops are connected with the many blast pipes 19 with exhaust head 18 by electromagnetic switch valve 20.Simultaneously, and vacuum gauge 21 is installed.In addition, exhaust dolly 10 possesses the sealing electric heater 23 of the push pipe Pa fusing that is used for following screen board P2.
Have, controller 22 is connected on the above-mentioned vacuum gauge 21 again.As described below, above-mentioned glass panel P2 enters deairing step, when vacuum gauge does not represent that specified vacuum is spent, above-mentioned controller 22 detects this situation, after above-mentioned electromagnetic switch valve 20 was once all opened, switch was in turn again read the vacuum degree of each glass panel P2 by vacuum gauge 21, the off-grade glass screen board P that the store predetermined permissible range is outer reports to the police simultaneously.With it simultaneously, close the electromagnetic switch valve 20 of this defective screen board glass panel, the electromagnetic switch valve 20 of other glass panel of switch P1 in turn detects its vacuum degree again.It is to carry out according to the program that is built in the above-mentioned controller 22 that the vacuum degree of above-mentioned each glass panel P2 detects operation, and its data are printable when exhaust dolly 10 is sent outside the stove.
Above-mentioned guide rail R connects exhaust car type continuous oven T as shown in Figure 1, and is arranged on the side (return line portion) of stove, and car Tf1, Tf2 connection is passed at its two ends with packing into, extracting out, and above-mentioned exhaust dolly 10 just can be recycled.Pass in above-mentioned cooling zone C and extraction and to be provided with between the car Tf2 that discharge gas charges into, seal area Zg.
Below, illustrate exhaust car type continuous exhaust pneumatic wallop of the present invention handle in the detection method of defective screen board.
At first above-mentioned glass panel assembly P1 is enclosed in exhaust dolly 10 at loading place Z.
At this moment, as shown in Figures 2 and 3, the push pipe Pa of above-mentioned glass panel assembly P1 inserts the through hole 13 that is located at heat insulating component 12, with for example not shown suitable means such as clamp, P1 is fixed in installation component 11 with the glass panel assembly, described glass panel assembly P1 is fixed on the exhaust dolly 10 along vehicle-width direction mounting under the approximate vertical state.Above-mentioned push pipe Pa links to each other with above-mentioned exhaust head 18.In addition, closed feed water heater 23 is contained in push pipe Pa portion.
As mentioned above, loading means conveyance that exhaust dolly 10 usefulness of many glass panel assembly P1 are fit to passes on to packing on the car Tf1, and here, be moved to the side of packing into of exhaust car type continuous furnace T, pack into successively in the exhaust car type continuous furnace T with connection status with puopulsion equipment etc., simultaneously, in stove, do intermittently carrying.Thereby above-mentioned peristome almost forms closed state by the heat insulating component 12 of each exhaust dolly 10.
During above-mentioned exhaust dolly 10 moved in exhaust car type continuous furnace T, heating curves figure according to the rules heated, cools off glass panel assembly P1.At first at encapsulation process district A, sealant S fusion seals two glass substrate W1, W2, forms glass panel P2, and sealing push pipe Pa.When moving to exhaust area B, then close above-mentioned electromagnetic switch valve 16a, open above-mentioned each electromagnetic switch valve 20, make in each glass panel P2 to be communicated with vacuum exhaust pump 14.Exhaust reaches 10 in each glass panel P2
-4~10
-7Torr is outside the cooling zone passes out to stove.When moving to discharge gas inflation, seal area Zg, just stop the operation of vacuum exhaust pump 14, and close above-mentioned electromagnetic switch valve 16a, open electromagnetic switch valve 16b.By this, for example neon (Ne), argon (Ar), xenon discharge gass such as (Xe) charge in glass panel P2 from discharge gas bottle 15, to reach authorized pressure (3400~760 torr).
Above-mentioned discharge gas inflation one finishes, closed feed water heater 23 energisings, and sealing is cut off to push pipe Pa, makes the PDP of regulation.
Afterwards, exhaust dolly 10 passes on car Tf2 by extraction and moves to loading place Z.Unload the PDP of above-mentioned processing here, refill new glass panel assembly P1, repeat above-mentioned operation.
; in said method; in exhaust car type continuous oven T; each glass panel assembly P1 is sealed to and is glass panel P2; simultaneously carry out pump-down process at many glass panel P2 of 1 exhaust dolly 10 with 1 exhaust apparatus (vacuum pump 14) and carry; therefore;, exhaust head 18 and push pipe Pa loose contact bad as part glass panel P2 sealing; or push pipe Pa breakage etc. is when becoming the defective of the bad reason of exhaust, and it is bad then to carry all glass panel P2 on this exhaust dolly 10 exhaust that becomes.
Thereby, in above-mentioned pump-down process process, for example, when the vacuum degree that is contained in the vacuum gauge 21 of exhaust header 17 sharply reduces (seeing Fig. 5 .a point), controller 22 detects this situation, close above-mentioned each electromagnetic switch valve 20, report to the police simultaneously, have defective item among the glass panel P2 of notice lift-launch on this exhaust dolly 10.Afterwards, according to the above-mentioned electromagnetic switch valve 20 of program switch successively, determine that glass panel is defective.
That is, when glass panel P2 to be confirmed is qualified product, then be contained in the vacuum degree of the vacuum gauge 21 indication regulations of exhaust header 17.If glass panel P2 to be confirmed is a defective item, then above-mentioned vacuum gauge 21 is not indicated the vacuum degree of regulation.Therefore, repeat aforesaid operations, determine the defective of glass panel P2, and write down its data.In addition, when transfer was carried out the vacuum degree inspection to next glass panel P2, the electromagnetically operated valve 20 of confirmed glass panel P2 cut out.
As mentioned above, each glass panel vacuum degree inspection finishes, electromagnetic switch valve 20 place's closed conditions of underproof glass panel, and other glass panel electromagnetic switch valves 20 are opened, and proceed pump-down process.In addition, when the vacuum gauge 21 of exhaust header 17 is not indicated the vacuum degree of regulation at the appointed time, handle too.
When this exhaust dolly 10 discharges out of the furnace through cooling zone C, then determine that from above-mentioned data glass panel P2 is defective, after carrying out the material object affirmation, whether final decision is used as finished product, to qualified glass panel charge into discharge gas, Z unloads in the loading place, come with other difference.
In the above-described embodiment, each glass panel assembly P1 is the form that keeps the approximate vertical state on exhaust dolly 10.But as Figure 6 and Figure 7, can level keep, and stacked with predetermined distance, and stagger a little.At this moment, the structure of push pipe Pa can be made and many places to be set, for example to be arranged at symmetric position 2 places.On the other hand, 2 groups of exhaust apparatus shown in above-mentioned the 1st execution mode are set on the exhaust dolly 10, by electromagnetic switch valve 25, the blast pipe 19 of each exhaust header 18 of each exhaust apparatus received switch on the gas collectors 24 that connects purge gas supply pipe and discharge gas supply pipe.Simultaneously, the vacuum gauge 21,21 of each exhaust header 17 is connected to shared control unit 22.In addition, push pipe Pa1, Pa2 are not limited to shown in Figure 6 making progress, also can be downward.
Each push pipe Pa1, Pa2 of each glass panel assembly P1 is connected to the exhaust head 18 of each exhaust apparatus, in glass panel P2, carries out the initial stage of deairing step, from two push pipe Pa1, Pa2 to glass panel P2 exhaust.Supply with purge gas from side's push pipe Pa1, and discharge from another push pipe Pa2.To after the glass panel P2 exhaust, supply with purge gas once more, discharge, repeatedly repeat this operation from push pipe Pa1 from another push pipe Pa2.
Again, the form that glass panel assembly P1 staggers a little and keeps as shown in Figure 8, can keep the form of glass panel assembly P1 in order to the approximate vertical state, also applicable to shown in Fig. 9 (a) and (b), glass panel assembly P1 is inclined form that the oblique state in south keeps down.Adopt the form that makes glass panel assembly P1 stagger a little and keep like this, then can make the interval of glass panel assembly P1 little to being not more than the outstanding size of push pipe.And the form that glass panel assembly P1 staggers a little and keeps at the exhaust initial stage in glass panel P2, also can use 1 push pipe repeatedly to repeat the air feed of clean air and the pump-down process that exhaust is formed.
In the respective embodiments described above, introduced to glass panel assembly P1 seal, the processing of exhaust, but above-mentioned execution mode is also applicable to the sealed in advance glass panel P2 of push pipe Pa.At this moment, can carry out continuous exhaust pneumatic wallop without sealing process handles.
Again, in the above-mentioned explanation, be to have listed glass panel as the object of vacuum exhaust, but the object as vacuum exhaust among the present invention is not limited to this, also synthetic resin screen board, metal screen board.
The situation of inflating after the exhaust in the screen board P2 has been introduced in above-mentioned explanation, but the present invention is not limited to this, also applicable to not inflating, push pipe Pa being sealed make heat insulation screen board.
The invention effect
Clear and definite as above explanation, if adopt the present invention, keep many in the exhaust trolley of lift-launch exhaust apparatus Screen board, the exhaust head of each screen board push pipe and exhaust trolley joins, and above-mentioned exhaust head and exhaust apparatus are with separately The blast pipe that switch valve arranged joins through exhaust header, makes that this exhaust trolley moves at the stove inner edge, the limit is carried out exhaust and processed The time, bad when the exhaust that detects many screen boards, then driving under the exhaust apparatus state, make each screen board switch valve complete once After closing, utilize switch switch valve successively to detect the exhaust condition of each screen board.
Thereby, by being confirmed to be opening of defective screen board switch valve in addition, can proceed the pump-down process of qualified screen board, the reduction of production efficiency can be controlled at Min..
Claims (1)
1. one kind is used for the detection method that the exhaust car type continuous exhaust pneumatic wallop is handled defective screen board, and its spy is:
At least on the exhaust dolly that carries exhaust apparatus, keep many screen boards, the exhaust head of the push pipe of each screen board and exhaust dolly joins, and, pass through exhaust header, above-mentioned exhaust head and exhaust apparatus are joined by the blast pipe that has switch valve respectively, make that this exhaust dolly moves, pump-down process is carried out on the limit in stove; It is characterized in that,
Detecting above-mentioned many occasions that the screen board exhaust is bad, with the described switch valve contract fully of each screen board, then, the switch valve of each screen board of switch in turn, measure the vacuum degree of each screen board, its vacuum degree that records is decided to be defective screen board at the screen board beyond the permissible range.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001129239A JP5005133B2 (en) | 2001-04-26 | 2001-04-26 | Defective panel detection method in exhaust cart type continuous exhaust processing |
JP2001129239 | 2001-04-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1383176A true CN1383176A (en) | 2002-12-04 |
CN1305095C CN1305095C (en) | 2007-03-14 |
Family
ID=18977795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021186650A Expired - Fee Related CN1305095C (en) | 2001-04-26 | 2002-04-25 | Detection method for substandard panel in continuous exhaust car type treatment |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5005133B2 (en) |
KR (1) | KR100837493B1 (en) |
CN (1) | CN1305095C (en) |
TW (1) | TW554381B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1310272C (en) * | 2003-04-01 | 2007-04-11 | 上海永新彩色显像管股份有限公司 | Intelligent sealing off control device |
CN102030464A (en) * | 2010-03-26 | 2011-04-27 | 青岛亨达玻璃科技有限公司 | Continuous production equipment of vacuum glass |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4596805B2 (en) * | 2004-03-31 | 2010-12-15 | 財団法人国際科学振興財団 | Vacuum tube manufacturing equipment |
KR101074620B1 (en) * | 2005-10-07 | 2011-10-17 | 쥬가이로 고교 가부시키가이샤 | Panel-manufacturing system for plasma display panel or the like |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05283002A (en) * | 1992-03-30 | 1993-10-29 | Nec Corp | Color display tube and automatic judgement method of manufacturing device therefor |
JP3533821B2 (en) * | 1996-05-13 | 2004-05-31 | 富士通株式会社 | Plasma display panel manufacturing equipment |
JP3946319B2 (en) * | 1997-08-29 | 2007-07-18 | 中外炉工業株式会社 | Plasma display panel processing method |
KR100269893B1 (en) * | 1998-09-09 | 2000-10-16 | 이인우 | Exhaust cart improved cooling system |
JP2000243279A (en) * | 1999-02-17 | 2000-09-08 | Canon Inc | Manufacture of image display panel, and evacuation method and apparatus |
JPH11317169A (en) * | 1999-04-08 | 1999-11-16 | Chugai Ro Co Ltd | Exhaust cart for exhausting and sealing of plasma display panel |
-
2001
- 2001-04-26 JP JP2001129239A patent/JP5005133B2/en not_active Expired - Fee Related
-
2002
- 2002-04-23 TW TW091108329A patent/TW554381B/en not_active IP Right Cessation
- 2002-04-24 KR KR1020020022404A patent/KR100837493B1/en not_active IP Right Cessation
- 2002-04-25 CN CNB021186650A patent/CN1305095C/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1310272C (en) * | 2003-04-01 | 2007-04-11 | 上海永新彩色显像管股份有限公司 | Intelligent sealing off control device |
CN102030464A (en) * | 2010-03-26 | 2011-04-27 | 青岛亨达玻璃科技有限公司 | Continuous production equipment of vacuum glass |
CN102030464B (en) * | 2010-03-26 | 2012-08-08 | 青岛亨达玻璃科技有限公司 | Continuous production equipment of vacuum glass |
Also Published As
Publication number | Publication date |
---|---|
JP5005133B2 (en) | 2012-08-22 |
KR100837493B1 (en) | 2008-06-12 |
JP2002324486A (en) | 2002-11-08 |
TW554381B (en) | 2003-09-21 |
CN1305095C (en) | 2007-03-14 |
KR20020083135A (en) | 2002-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8574366B2 (en) | Vacuum processing apparatus | |
US20100243163A1 (en) | Substrate processing apparatus | |
KR100459277B1 (en) | Method and apparatus for processing glass panel | |
US3086882A (en) | Method and apparatus for filming articles by vacuum deposition | |
KR20010071892A (en) | Gas flow control in a substrate processing system | |
WO2014089948A1 (en) | Multi-functional continuous magneto-controlled sputter coating device | |
CN110735123B (en) | Control method of coating production line | |
CN1305095C (en) | Detection method for substandard panel in continuous exhaust car type treatment | |
CN216687922U (en) | Cooling device of coated glass production usefulness | |
CN1386889A (en) | Heat treatment method and heat treating furnace thereby | |
TWM599322U (en) | Water-level vertical magnetron sputtering coating equipment | |
JP4787402B2 (en) | Glass panel cart processing equipment | |
US6998578B2 (en) | Baking system for plasma display panel and layout method for said system | |
JPH1021832A (en) | Gas evacuating and sealing method for plasma display panel and facility therefor | |
JP3722284B2 (en) | Plasma display panel exhaust system | |
WO2019052669A1 (en) | A vacuum processing system and method | |
CN1675736A (en) | Production method for a gas discharge device | |
JP2004504495A (en) | Vacuum module (and its variants) and module system for coating substrates | |
JP2772699B2 (en) | Vacuum heat treatment equipment | |
KR100354665B1 (en) | Continuous type plasma cleaning method | |
JP2003331725A (en) | Manufacturing method of plasma display panel | |
CN116445880A (en) | Independent continuous process system | |
JPH11317169A (en) | Exhaust cart for exhausting and sealing of plasma display panel | |
KR20050053851A (en) | Treatment system for liquid crystal display | |
CN1267645A (en) | Method for sealing glass panel |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070314 Termination date: 20130425 |