CN1357748A - Optoelectronic detector of angular displacement sensor - Google Patents

Optoelectronic detector of angular displacement sensor Download PDF

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Publication number
CN1357748A
CN1357748A CN 01138860 CN01138860A CN1357748A CN 1357748 A CN1357748 A CN 1357748A CN 01138860 CN01138860 CN 01138860 CN 01138860 A CN01138860 A CN 01138860A CN 1357748 A CN1357748 A CN 1357748A
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China
Prior art keywords
angular displacement
displacement sensor
measured
receiver
polygon mirror
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CN 01138860
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Chinese (zh)
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CN1185465C (en
Inventor
艾华
韩旭东
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Publication of CN1357748A publication Critical patent/CN1357748A/en
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Abstract

The photoelectric detector of angular displacement sensor is one dynamic angular displacement accuracy and speed detecting device in photoelectric detection technology. The present invention solves the technological problems of dynamic accuracy and speed detection of angular displacement sensor. The techonlogical scheme includes using optical polyhedron as angle reference, laser for collimation and position detection, high speed optoelectronic converter device as receiver, and computer for data collection and processing and real-time display. The detector consists of measured angular displacement sensor, optical polyhedron, laser source, photoelectric receiver and computer system and display system. The present invention may be used widely in real-time data extraction of high speed moving target.

Description

A kind of optoelectronic detector of angular displacement sensor
Technical field
The invention belongs to a kind of diagonal displacement sensor in the photoelectric detection technology field and carry out the pick-up unit of sensing accuracy.
Background technology
Angular displacement sensor is a senser element of measuring physical parameters such as rotary body angular displacement, angular velocity, be widely used in the fields such as photoelectric tracking, Aero-Space, automatic technology, in order to know clearly the measuring accuracy of angular displacement sensor, before angular displacement sensor is used, must carry out actual detected to self dynamic accuracy and the static accuracy of corresponding angular sensor.
It is reported before the present invention, the checkout equipment of domestic and international diagonal displacement sensor, existing some kinds, with the most approaching prior art of the present invention be the dwell angle displacement transducer checkout equipment of Changchun Inst. of Optics and Fine Mechanics, Chinese Academy of Sciences's development, as shown in Figure 1: by angular displacement sensor 1 to be measured, polygon mirror 2, parallel light tube 3, retouch accurate indicating gauge 4, angular displacement sensor output lead 5, angular displacement sensor signal Processing electronic box 6 and form.
This checkout equipment is static aiming, and hand detects, and the precision of inefficiency, detection is low, the cost height.
In order to overcome above-mentioned shortcoming, a kind of new photoelectric detection system of ad hoc meter.
Summary of the invention
The technical problem to be solved in the present invention is: the diagonal displacement sensor carries out high-precision static state and dynamic accuracy detects.
The technical scheme of technical solution problem is: adopt polygon mirror as angle reference, laser aiming position sensing, high-speed photoelectric commutator are as receiver, and computer data acquisition is also implemented to show.
Detailed content of the present invention such as Fig. 2, Fig. 3, shown in Figure 4: by angular displacement sensor 7 to be measured, polygon mirror 8, have two photelectric receiver 9, receiver front end circuit 10, computing machine 11, display 12, typewriter 13, laser instrument 14, angular displacement sensor output cable 15 to be measured, angular displacement sensor signal output apparatus 16 to be measured that receive light pipes (D1, D2) and form.
The plane of polygon mirror 8 is perpendicular to the rotating shaft of angular displacement sensor 7 to be measured, and be installed in the rotating shaft of angular displacement sensor 7 to be measured, rotate with rotating shaft, polygon mirror 8, have two and receive light pipe (D1, D2) photelectric receiver 9, laser instrument 14 threes' position arrangement will satisfy the laser beam that laser instrument 14 is launched, beat the laser beam after the reflecting surface reflection of polygon mirror 8, receive light pipe (D1 to have two, D2) photelectric receiver 9 can receive and be as the criterion, two of photelectric receiver 9 receive light pipe (D1, D2) position, reflecting surface with respect to polygon mirror 8, it is horizontal installation, have two and receive light pipe (D1, the output terminal of photelectric receiver 9 D2) is connected with the input end of receiver front end circuit 10, the output terminal of receiver front end circuit 10 is connected with computing machine 11, the output circuit 16 of angular displacement sensor 7 to be measured is connected with computing machine 11 by output cable 15, and the output terminal of computing machine 11 is connected with typewriter 13 with display 12 respectively.
Principle of work explanation: the laser beam that laser instrument 14 is launched, after the reflecting surface reflection by polygon mirror 8, had two and received light pipe (D1, D2) photelectric receiver 9 receives, two signals that send after the reception as shown in Figure 5, transverse axis is an offset axis, Z-axis receives light pipe (D1 for having two, the amplitude of photelectric receiver 9 output signals D2), two signals intersect at the A point, homing position for tested object plane, differential comparison process is made in two signal outputs to photelectric receiver 9, export to computing machine 11 as the reference signal pulse of computing machine 11, the output signal of angular displacement sensor 7 to be measured is given computing machine 11 through signal processing circuit 16, when computing machine 11 detected the pulse signal that its intersection point of output signal A of photelectric receiver 9 sends, computing machine 11 was just gathered the angle position signal of angular position pick up 7 to be measured.Reference zero is set by computer software, and computing machine 11 calculates the angular error of angular displacement sensor 7 to be measured in real time, and the line data of going forward side by side is handled, and send display 12 real-time video data information, and by printer 13 outputs.
Good effect: because two reception light pipes of photelectric receiver can be caught target fast, make full use of the laser energy of LASER Light Source, the measuring accuracy height, realized the dynamically quick precision of diagonal displacement sensor, the measurement of rotating speed can be widely used in high-speed moving object and extract from punctual high speed information.
Description of drawings
Fig. 1 is the structural representation of prior art, Fig. 2 is a structural representation of the present invention, Fig. 3 is circuit theory diagrams of the present invention, Fig. 4 is two structural representations that receive light pipe of photelectric receiver among the present invention, Fig. 5 is that two signal amplitudes of photelectric receiver output of the present invention concern synoptic diagram, and Figure of abstract also adopts Fig. 2.
Embodiment
Adopt structure shown in Figure 2 to implement, polygon mirror 8 adopts 17 bodies, photelectric receiver 9 adopts two horizontal reception light pipes, receive light pipe and adopt the PIN photoelectric diode, laser instrument 14 adopts semiconductor laser, wavelength is 630nm, polygon mirror 8, photoelectric receiving tube 9, laser instrument 14 threes put the position on the height of same horizontal operation face, receiver front end circuit 10 adopts mould amplification and digital processing circuit, computing machine 11 to adopt PC, display 12 adopts general CRT monitor, and printer 13 adopts general laser printer.

Claims (1)

1, a kind of optoelectronic detector of angular displacement sensor, form by angular displacement sensor to be measured, polygon mirror, it is characterized in that the present invention by angular displacement sensor to be measured (7), polygon mirror (8), have two photelectric receiver (9), receiver front end circuit (10), computing machine (11), display (12), printer (13), laser instrument (14), angular displacement sensor output cable to be measured (15), angular displacement sensor signal output apparatus to be measured (16) that receive light pipes (D1, D2) and form; The plane of polygon mirror (8) is vertically mounted in the rotating shaft of angular displacement sensor to be measured (7), polygon mirror (8), have two and receive light pipe (D1, D2) photelectric receiver (9), laser instrument (14) three's position arrangement will satisfy the laser beam that laser instrument (14) is launched, after the reflecting surface reflection of polygon mirror (8), receive light pipe (D1 to have two, D2) photelectric receiver (9) can receive and be as the criterion, two of photelectric receiver (9) receive light pipe (D1, D2) position, reflecting surface with respect to polygon mirror (8) is horizontal arrangement, have two and receive light pipe (D1, the output terminal of photelectric receiver D2) (9) is connected with the input end of receiver front end circuit (10), the output terminal of receiver preamplifier (10) is connected with computing machine (11), the output circuit (16) of angular displacement sensor to be measured (7) is connected with computing machine (11) by output cable (15), and the output terminal of computing machine (11) is connected with printer (13) with display (12) respectively.
CNB011388609A 2001-12-18 2001-12-18 Optoelectronic detector of angular displacement sensor Expired - Fee Related CN1185465C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB011388609A CN1185465C (en) 2001-12-18 2001-12-18 Optoelectronic detector of angular displacement sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB011388609A CN1185465C (en) 2001-12-18 2001-12-18 Optoelectronic detector of angular displacement sensor

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CN1357748A true CN1357748A (en) 2002-07-10
CN1185465C CN1185465C (en) 2005-01-19

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100399003C (en) * 2005-05-24 2008-07-02 浙江大学 Laser method for measuring vibration displacement of rolling bearing
CN101571375B (en) * 2009-04-27 2011-01-05 东莞康视达自动化科技有限公司 On-line data measuring method for regular polygon measured object based on machine vision and system
CN101666638B (en) * 2009-06-05 2011-05-04 中国航空工业集团公司西安飞机设计研究所 Calibrating device for angular displacement sensor
CN102519429A (en) * 2011-12-19 2012-06-27 罗江临 Method for drawing measured object engineering drawing in real time in engineering measurement
CN104061895A (en) * 2014-07-02 2014-09-24 中国科学院长春光学精密机械与物理研究所 Precision detection method of high-precision angle measurement instrument
CN106627759A (en) * 2016-10-16 2017-05-10 厦门精图信息技术有限公司 Vehicle frequent lane changing monitoring system and method based on Beidou positioning technology
CN108037703A (en) * 2017-12-15 2018-05-15 中国航发沈阳黎明航空发动机有限责任公司 The portable calibrating installation and calibration method of angular displacement sensor installation site
CN108827190A (en) * 2018-09-03 2018-11-16 中国科学院长春光学精密机械与物理研究所 High precision angle-measuring error detecting apparatus and its detection method based on double autocollimators
CN110520690A (en) * 2017-02-17 2019-11-29 苏州科爱佳自动化科技有限公司 Space flight grade ball bar detection system
CN111121618A (en) * 2018-10-31 2020-05-08 中国科学院长春光学精密机械与物理研究所 Zero position detection system of rotary motion turntable

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100277748A1 (en) * 2009-04-30 2010-11-04 Sergey Potapenko Method and System for Measuring Relative Positions Of A Specular Reflection Surface

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100399003C (en) * 2005-05-24 2008-07-02 浙江大学 Laser method for measuring vibration displacement of rolling bearing
CN101571375B (en) * 2009-04-27 2011-01-05 东莞康视达自动化科技有限公司 On-line data measuring method for regular polygon measured object based on machine vision and system
CN101666638B (en) * 2009-06-05 2011-05-04 中国航空工业集团公司西安飞机设计研究所 Calibrating device for angular displacement sensor
CN102519429A (en) * 2011-12-19 2012-06-27 罗江临 Method for drawing measured object engineering drawing in real time in engineering measurement
CN104061895A (en) * 2014-07-02 2014-09-24 中国科学院长春光学精密机械与物理研究所 Precision detection method of high-precision angle measurement instrument
CN104061895B (en) * 2014-07-02 2017-01-18 中国科学院长春光学精密机械与物理研究所 Precision detection method of high-precision angle measurement instrument
CN106627759A (en) * 2016-10-16 2017-05-10 厦门精图信息技术有限公司 Vehicle frequent lane changing monitoring system and method based on Beidou positioning technology
CN110520690A (en) * 2017-02-17 2019-11-29 苏州科爱佳自动化科技有限公司 Space flight grade ball bar detection system
CN110520690B (en) * 2017-02-17 2021-05-25 苏州科爱佳自动化科技有限公司 Space-level ball grid detection system
CN108037703A (en) * 2017-12-15 2018-05-15 中国航发沈阳黎明航空发动机有限责任公司 The portable calibrating installation and calibration method of angular displacement sensor installation site
CN108037703B (en) * 2017-12-15 2021-01-01 中国航发沈阳黎明航空发动机有限责任公司 Portable calibration device and calibration method for mounting position of angular displacement sensor
CN108827190A (en) * 2018-09-03 2018-11-16 中国科学院长春光学精密机械与物理研究所 High precision angle-measuring error detecting apparatus and its detection method based on double autocollimators
CN108827190B (en) * 2018-09-03 2020-07-24 中国科学院长春光学精密机械与物理研究所 High-precision angle measurement error detection device based on double autocollimators and detection method thereof
CN111121618A (en) * 2018-10-31 2020-05-08 中国科学院长春光学精密机械与物理研究所 Zero position detection system of rotary motion turntable

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