CN1299956A - Laser auto-collimation collimator - Google Patents
Laser auto-collimation collimator Download PDFInfo
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- CN1299956A CN1299956A CN 99122617 CN99122617A CN1299956A CN 1299956 A CN1299956 A CN 1299956A CN 99122617 CN99122617 CN 99122617 CN 99122617 A CN99122617 A CN 99122617A CN 1299956 A CN1299956 A CN 1299956A
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Abstract
The present utility model belongs to the field of automatic detection technology, relates to the improvement on position detection equipment in the field of optical instruments, can be extensively used for high-speed extracting auto-punctural information of high-speed moving target, for example transit, rotating table and airplane engine blade for making balance detection of flying test, dynamic characteristic detection of angular displacement sensor, accuracy detection and small-angle detection of optical plane cold-worked piece.
Description
The invention belongs to the test technique automatic field, relate to a kind of improvement the position detecting device in the optical instrument field.
Optics is called for short parallel light tube from quasi-parallel autocollimatic instrument, is light orientation (direction) detecting instrument.Thereby traditional detection method is to utilize directional light that the autocollimatic instrument sends to measure angle position value between tested optical surface through the sight offset between tested optical parallel, principle is seen Fig. 1, include light source 1, graticule 2, spectroscope 3, telephotolens 4, measured object 5, graticule 6, eyepiece 7, normally divide measuring eyepiece human eye aiming form and photoelectronic collimating form, because this kind structure adopts crosshair and photoelectric vibration narrow slit structure, need certain stabilization time, belong to the static measurement mode, measuring accuracy 0.2 ", it is big that light source sends optical energy loss.
The object of the present invention is to provide a kind of dynamic and static weighing that is applicable to, measuring accuracy height, the parallel light tube that the efficiency of light energy utilization is high.
The principle of the invention as shown in Figure 2, include: LASER Light Source 1, condenser 2, slit 3, polarization spectroscope 4, collimator objective 5, quarter wave plate 6, measured object 7, spectroscope 8, micro actuator 9, vibrating slot 10, photelectric receiver 11 (D1, D2), the long chi 12 of micrometer, eyepiece 13, the position of slit 3 is on the focus of parallel light tube, send the horizontal vibration linearly polarized laser from LASER Light Source 1, focus on the slit 3 through lens 2, again through polarization spectroscope 4, all be transmitted on the object lens 5, behind 1/4 wavelength sheet 6, be mapped on the tested plane 7, reflected back 1/4 wavelength sheet 6, origin is returned and is come and gone twice through 1/4 wavelength sheet 6, and the polarization direction of laser beam changes vertical vibration into by horizontal vibration, when polarization spectroscope 4 light all is mapped on the depolarization spectroscope 8 again, be divided into two-way, wherein a Reuter is mapped on the slit 10, and (D1 D2) receives by photelectric receiver 11, be used for the aiming of high speed dynamic object, or static high-acruracy survey; Another road reflexes on the eyepiece 9, be used for the mark aiming of static person eyes and measure, slit 10 and slit 3 conjugation, and all on the focal plane of object lens, wherein slit 10 be black chromium, middle logical light around the slit 3; When tested object plane autocollimatic, (D1, the signal that D2) sends as shown in Figure 3, transverse axis is an offset axis, and Z-axis is that (their intersection point A is the aiming point position of tested object plane to photelectric receiver 11 for D1, D2) output signal amplitude from photelectric receiver 11.
Because what invention was used is two photodiodes, its dynamic response time extracts the A dot information time in tens nanoseconds in 0.1 μ S through electric treatment, so when tested object plane passed through light pipe at a high speed, light pipe can be caught target fast.Make full use of the energy of the laser that light source sends. owing to adopt polarization spectroscope, quarter wave plate, laser.Eliminated every in the traditional approach and lost 50% energy through a prismatic decomposition.Improved capacity usage ratio more than 4 times.Measurement pointing accuracy height.As can be seen from Figure 3 because D1 and D2 are the misphase signals.The signal slope that extracts the A dot information doubles.With connect signal maximum in single channel relatively, its aiming resolution improves nearly 10 times.
The present invention can be widely used in high-speed moving object and extract from punctual high speed information, as the tachometric survey to the high speed rotating target of: transit, turntable, noncontact.The detection of angular displacement sensor dynamic perfromance, and the detection of precision.The low-angle detection of optical flat cold working part.
Description of drawings:
Fig. 1 prior art schematic diagram
Fig. 2 principle of the invention figure
Fig. 3 photelectric receiver signal of the present invention output map
Most preferred embodiment: LASER Light Source 1 adopts semiconductor laser, condenser 2, slit 3, polarization spectroscope 4, collimator objective 5,1/4 wavelength sheet 6, measured object 7, spectroscope 8, micro actuator 9, vibrating slot 10, photelectric receiver (D1, D2) 11, the long chi 12 of micrometer, eyepiece 13.
Claims (3)
1. laser auto-collimation collimator, include: condenser 2, collimator objective 5, measured object 7, spectroscope 8, micro actuator 9, vibrating slot 10, eyepiece 13, it is characterized in that: the position of slit 3 is on the focus of parallel light tube, send the horizontal vibration linearly polarized laser from LASER Light Source 1, focus on the slit 3 through lens 2, again through polarization spectroscope 4, all be transmitted on the object lens 5, behind 1/4 wavelength sheet 6, be mapped on the tested plane 7, reflected back 1/4 wavelength sheet 6, origin is returned and is come and gone twice through 1/4 wavelength sheet 6, the polarization direction of laser beam changes vertical vibration into by horizontal vibration, when polarization spectroscope 4, light all is mapped on the depolarization spectroscope 8 again, wherein 50% is transmitted on the slit 10, by photelectric receiver 11 (D1, D2) receive, 50% reflexes on the eyepiece 9.
2. a kind of laser auto-collimation collimator as claimed in claim 1, its feature also is: slit 10 and slit 3 conjugation, and all on the focal plane of object lens, wherein slit 10 be black chromium, middle logical light around the slit 3.
3. a kind of laser auto-collimation collimator as claimed in claim 1, its feature also is: when tested object plane autocollimatic, from photelectric receiver 11 (D1, D2) send signal, transverse axis is an offset axis, Z-axis be photelectric receiver 11 (D1, D2) output signal amplitude, the intersection point A of signal be tested object plane from position on schedule.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 99122617 CN1118680C (en) | 1999-12-10 | 1999-12-10 | Laser auto-collimation collimator |
Applications Claiming Priority (1)
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CN 99122617 CN1118680C (en) | 1999-12-10 | 1999-12-10 | Laser auto-collimation collimator |
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CN1299956A true CN1299956A (en) | 2001-06-20 |
CN1118680C CN1118680C (en) | 2003-08-20 |
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CN 99122617 Expired - Fee Related CN1118680C (en) | 1999-12-10 | 1999-12-10 | Laser auto-collimation collimator |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100412567C (en) * | 2006-05-11 | 2008-08-20 | 哈尔滨工业大学(威海) | Automobile collision-proof one-dimensional scanning lidar system |
CN103217066A (en) * | 2013-03-27 | 2013-07-24 | 中国人民解放军63908部队 | Double-auto-collimation optical system checking and regulating tube |
CN104567735A (en) * | 2013-10-16 | 2015-04-29 | 北京航天计量测试技术研究所 | Dynamic small-angle resolution testing method |
CN104776983A (en) * | 2015-04-14 | 2015-07-15 | 成都太科光电技术有限责任公司 | Polarized laser auto-collimation tester |
CN106394883A (en) * | 2015-07-08 | 2017-02-15 | 霍尼韦尔国际公司 | Accurate object detection in free space using controlled light source techniques |
CN106767679A (en) * | 2017-02-27 | 2017-05-31 | 中国科学院光电研究院 | A kind of photoelectric auto-collimation theodolite |
CN106767428A (en) * | 2016-11-24 | 2017-05-31 | 李达成 | Laser alignment, displacement measurement system based on the disturbance of holographic conjugate light make-up air |
CN108151762A (en) * | 2017-12-06 | 2018-06-12 | 北京航天计量测试技术研究所 | A kind of Portable direct angle prism installation parameter marking apparatus |
CN110375708A (en) * | 2019-08-15 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of three-dimensional perspective measuring system |
CN111121618A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Zero position detection system of rotary motion turntable |
CN111121617A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and pointing device and method based on phase shift differential motion |
CN111121665A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and orienting device and method based on phase shift differential motion |
CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100373213C (en) * | 2006-03-08 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Bifocus parallel collimator |
-
1999
- 1999-12-10 CN CN 99122617 patent/CN1118680C/en not_active Expired - Fee Related
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100412567C (en) * | 2006-05-11 | 2008-08-20 | 哈尔滨工业大学(威海) | Automobile collision-proof one-dimensional scanning lidar system |
CN103217066A (en) * | 2013-03-27 | 2013-07-24 | 中国人民解放军63908部队 | Double-auto-collimation optical system checking and regulating tube |
CN103217066B (en) * | 2013-03-27 | 2015-04-29 | 中国人民解放军63908部队 | Double-auto-collimation optical system checking and regulating tube |
CN104567735A (en) * | 2013-10-16 | 2015-04-29 | 北京航天计量测试技术研究所 | Dynamic small-angle resolution testing method |
CN104776983A (en) * | 2015-04-14 | 2015-07-15 | 成都太科光电技术有限责任公司 | Polarized laser auto-collimation tester |
CN106394883A (en) * | 2015-07-08 | 2017-02-15 | 霍尼韦尔国际公司 | Accurate object detection in free space using controlled light source techniques |
CN106767428A (en) * | 2016-11-24 | 2017-05-31 | 李达成 | Laser alignment, displacement measurement system based on the disturbance of holographic conjugate light make-up air |
CN106767679A (en) * | 2017-02-27 | 2017-05-31 | 中国科学院光电研究院 | A kind of photoelectric auto-collimation theodolite |
CN108151762A (en) * | 2017-12-06 | 2018-06-12 | 北京航天计量测试技术研究所 | A kind of Portable direct angle prism installation parameter marking apparatus |
CN111121618A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Zero position detection system of rotary motion turntable |
CN111121617A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and pointing device and method based on phase shift differential motion |
CN111121665A (en) * | 2018-10-31 | 2020-05-08 | 中国科学院长春光学精密机械与物理研究所 | Optical aiming and orienting device and method based on phase shift differential motion |
CN110375708A (en) * | 2019-08-15 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of three-dimensional perspective measuring system |
CN110375708B (en) * | 2019-08-15 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | Three-dimensional angle measurement system |
CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
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CN1118680C (en) | 2003-08-20 |
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