CN1355376A - Micro system energy driver doing work by expansion of low-temp medium - Google Patents

Micro system energy driver doing work by expansion of low-temp medium Download PDF

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CN1355376A
CN1355376A CN 00132293 CN00132293A CN1355376A CN 1355376 A CN1355376 A CN 1355376A CN 00132293 CN00132293 CN 00132293 CN 00132293 A CN00132293 A CN 00132293A CN 1355376 A CN1355376 A CN 1355376A
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rustless steel
steel container
wall
thin
microturbines
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CN 00132293
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CN1247880C (en
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刘静
周一欣
周远
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Key Laboratory of Cryogenics of CAS
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Cryogenic Laboratory of CAS
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Abstract

A driver with microsystem energy using the expansion of low-temp. working medium to do work is composed of a miniature stainless steel container full of high-pressure low-temp. working medium, its coaxial microturbine, a microtube installed to the front end cover of the said container and communicated with internal cavity of the said container, a fine thin-wall tube wound around the external surface of the said container and communicated with the said microtube, and a thermal insulating plate between the container and the microturbine. Its advantages include simple structure, easily pouring the working medium and low cost. It can drive the flight of microelectronic-mechanical system.

Description

Utilize the micro-system energy driver of cryogenic fluid expansion working
The present invention relates to the cryogenic technique field, particularly a kind of simple in structure, cheap can be used for drives microelectromechanical systems and especially breaks away from little aircraft of working in the base, the micro-system energy driver that utilizes the cryogenic fluid expansion working of micromotion device.
Physical science and engineering development important trend was to stride forward towards microminiaturization in recent years, people's attention turns to (Liu Jing on those phenomenons that occur in small scale and the corresponding device thereof from macro object gradually, micrometer/nanometer yardstick thermal conduction study, Beijing: Science Press, 2000), wherein, microelectromechanical systems (microelectromechanical systems---MEMS) has especially obtained immense success and just has been applied to fields such as industry, civilian, military affairs by expansion, its current collection and mechanical component adopt batch processing method to make.Because the modern times are made the lasting progress with application technology, the size of " micromechanics " just reduces with unusual speed, and its performance has obtained maintenance even better simultaneously.By means of micromachining technology, people have made many atomic little mechanical devices, as pressure transducer, flow-sensint unit and the accelerometer of size less than 1mm, heat exchanger, air turbine, miniature firing chamber and electric motor with similar size, and being produced on a whole set of gas chromograph on the silicon chip, little aircraft, miniature power system etc., these micro-systems have been showed wide application prospect in a plurality of fields.
In all microelectromechanical systems, to use its basic energy driver bar none.Yet in development MEMS system, the progress of efficient MEMS base energy development aspect is very slow regrettably.Efficient basic energy driver occupies vital status in some micro-system applications, for the minute vehicle of executing the task, miniature power system for the disengaging base, the energy supplying device that it adopted should possess the characteristics that output power is high as far as possible, service time is long as far as possible, and simultaneously for reducing energy consumption and resistance to motion, its volume and weight then should be as far as possible little.Can think that efficient basic energy driver is that MEMS fully realizes its function, enter one of key technology of practical and expansion application area.At present, several more promising basic energy drivers have (1) little engine fuel; (2) micro fuel cell; (3) micro solar battery; And (4) film lithium cell etc. (separate sparkling and crystal-clear, Liu Lu, the research and the present situation of MEMS base energy technology, microsystems technology seminar data in 2000, Shanghai).
Wherein, the making of little engine fuel is to be rich in one of challenging trial in the micro-fabrication technology.In this respect, (Waitz I.A., G.Gauba such as the Waitz of Massachusetts Institute Technology, and Y.S.Tzeng, Combustors for micro-gas turbineengines, ASME J.of Fluid Engineering, vol.120, pp.109-117,1998; Little combustion gas turbine is used the firing chamber, American Society of Mechanical Engineers's proceedings: fluid mechanics journal, the 120th volume, 109-117 page or leaf, 1998) developed a kind of firing chamber recently at little combustion gas turbine.Its original intention is: a kind ofly can produce the 10-100W electric energy if can successfully design, and volume is only at 1cm 3Below and the jet fuel that per hour consumes little combustion gas turbine generator of about 7g only, then 10 times of energy densities that can provide to existing best battery will be provided for it.But there are a lot of deficiencys in the development of such device, little processing as baroque motor is very difficult, supply of fuel is very complicated in it, and its bigger specific surface area can cause producing higher additional-energy loss, Kun Nan place is that also selected material must have machinery, calorifics and the chemical property of the excellence that adapts to rugged environment especially, main at present structural ceramics such as the silicon nitride (Si that adopts infusibility 3N 4) and silicon carbide (SiC) etc., avoiding causing high temperature melt because of burning, and little processing of this class refractory structure pottery is very difficult.These deficiencies have limited further developing of little engine fuel just.So, researchers again then seek the micro power systems of other modes, as micro fuel cell, micro solar battery, film lithium cell etc.But the defective that exists is: or output power is less than normal, otherwise the operating time fall short of, so still be in developing stage.
The thought of utilizing high pressure nitrogen to be used as power is suggested in fact very early, but this idea is put into practice recently.Two seminar of the U.S. have successfully realized the experimental pollution-free Motor Vehicle [C.Knowlen that utilizes liquid nitrogen to be used as power recently, A.T.Mattick, A.P.Bruckner, A.Hertzberg, High efficiency energy systems for liquid nitrogenautomobiles, SAE Technical Paper Series 981898, Future Transportation Technology Conferenceand Exposition, Costa Mesa, CA, Aug.11-13,1998 (the high efficiency energy systems of liquid nitrogen automobile, No. 981898, automobile association series technique paper, following transportation technology and displaying meeting, California, Costa Mesa, August 11-13,1998); C.A.Ordonez, Liquid nitrogen fueled, closed Brayton cycle cryogenic heat engine, EnergyConversion ﹠amp; Management, vol.41, pp.331-341,2000 (utilize liquid nitrogen to make the low warm machine of enclosed Brayton circulation of fuel, energy conversion and management, the 41st volume, the page number: 331-341,2000)], its power comes from the process that liquid nitrogen changes gas into, ice-cold liquid nitrogen boiling point is-196 ℃, is heated to be transformed into steam behind ambient air, and the pressure that this process discharged just can powered vehicle.Its core texture comprises that mainly liquid nitrogen container is Dewar vessel, is used for nitrogen and air and carries out the composite heat-exchanger of heat exchange and power take-off etc., but mechanism is quite huge, complicated.
Should be noted that, although utilizing the application of cryogenic fluid expansion working on some macroscopic views succeeds, as above-mentioned used as automobile power etc., but can bring the series of challenges problem when being imposed in MEMS, whether can cause damage such as cryogenic fluid to other parts of MEMS, and because working medium is erupted the service behaviour whether formed environment can reduce MEMS, and obtain maximum output power as how minimum working medium, and even how to extend working time etc.
The purpose of this invention is to provide a kind of simple in structure, cheap can be used for and drive little aircraft that microelectromechanical systems particularly breaks away from base work, the micro-system energy driver that utilizes the cryogenic fluid expansion working of micromotion mechanism.
Embodiment of the present invention are as follows:
The micro-system energy driver that utilizes the cryogenic fluid expansion working provided by the invention, it is characterized in that, comprise: the microturbines (6) of the miniature rustless steel container (1) of splendid attire high pressure low temperature working medium and placement coaxial with it, rustless steel container (1) is combined by circular Thin-wall Barrel (16) and conical Thin-wall Barrel (17), its front end is provided with end cap (2), end cap (2) is gone up the microtubule (21) that communicates with miniature rustless steel container (1) inner chamber is installed, microtubule (21) is connected with thin-wall metal tubule (3) on being wrapped in miniature rustless steel container (1) outer wall, be provided with heat filter 4 between miniature rustless steel container (1) and the microturbines that is positioned at the coaxial placement in its rear end (6), the angle of attack that is wrapped in the turbine wheel of the radially outlet of the thin-wall metal tubule (3) on miniature rustless steel container (1) outer wall and microturbines (6) is 2-85 degree angle;
The thin-wall metal tubule (3) that is wrapped on miniature rustless steel container (1) outer wall is the 1-5 root, and its spacing is 1-2mm, and diameter is 1-2mm, and the radially outlet of every thin-wall metal tubule (3) all is 2-85 degree angle with the angle of attack of the turbine wheel of microturbines (6);
The material of described microturbines (6) is corrosion-resistant, impact-resistant light metal, such as titanium alloy;
Described microtubule (21) can be the integrative-structure that is connected with thin wall tubule (3);
The material of described thermoinsulation material 4 is teflon or foamed plastics;
Thermoinsulation material (4) end is connected and is used to protect microturbines (6) and nitrogen vapor is limited in metal thin-wall annulus (5) in the little space, have aperture (15) on the annulus, it is terminal by passing in the aperture (15) to be wrapped in thin-wall metal tubule (3) on miniature rustless steel container (1) outer wall, and its angle of attack that radially exports with the turbine wheel of microturbines (6) is 2-85 degree angle;
Described microturbines (6) is by a pair of little bearing (8) fixed support, and by in order to the bearing bracket (9) of the little bearing of support fixation (8) and in order to substrate frame (13) welding of the miniature rustless steel container of support fixation (1) or screw on substrate truss 10, adopt foot screw (11) to fix between substrate frame (13) and the substrate truss (10).
The length of described miniature rustless steel container (1) is 1-10cm, and the diameter of forming the circular Thin-wall Barrel (16) of miniature rustless steel container (1) is 1-5cm, and wall thickness is 0.1-1mm.
The liquid nitrogen container that in the past was used for powered vehicle adopts Dewar vessel, different therewith is, the used container of the present invention directly adopts the stainless steel cylinder of no vacuum heat-insulation, this is because minute vehicle requirement weight is the smaller the better, and because stainless steel cylinder directly contacts with atmosphere, it is better to conduct heat, and the nitrogen vapor of generation is pressed higher, and has simplified its design and processing greatly.Because little aircraft of disengaging base work, miniature power system etc. are instant to the demand of power, so the liquid nitrogen container that the present invention adopts need not insulation, it exactly needs ambient atmosphere that it is carried out rapidly and sufficient heating.General characteristic of the present invention is miniature, light-duty.
In general, nitrogen is inertia, be difficult to and other substance reactions, and avirulent, thereby easy to use.In order to obtain power, a large amount of liquid nitrogen pressurizations is filled in the rustless steel container, the liquid nitrogen pressure of general can reach 5,6 barometric pressure even higher, and in case the container taking-up is put in the environment, then much higher than liquid nitrogen temperature (196 ℃) owing to outside air temperature, thereby, impel its inner liquid nitrogen vaporization to the liquid nitrogen container heating, further improve its inner pressure, thereby increased output work.So our ratio juris is to obtain to utilize the heating of ambient atmosphere to come output work again behind the liquid nitrogen by work done in advance, thereby has utilized all utilizable energy sources.The can of liquid nitrogen is carried out at low temperatures, pressurization and with can start working after MEMS is connected, heated by the extraneous big temperature difference, part liquid nitrogen transfers steam in the rustless steel container, has quite high pressure, so this part high pressure steam will impact the turbine blade of microturbines (6) by the radially outlet ejection that is wrapped in the thin-wall metal tubule (3) on miniature rustless steel container (1) outer wall, drive microturbines and even whole micro-system; Liquid nitrogen steam in the miniature rustless steel container (1) carries out violent expansion working, realizes the power output that continues thus.
By selecting different cryogenic fluid fluids and this working medium being pressurizeed etc. after the pretreatment, can realize different output powers.The present invention is simple in structure, can with the supporting use of nearly all microelectromechanical systems, power range is wide, and is easy to use, and price is very cheap, can satisfy the requirement of different microelectromechanical systems preferably.The most significant characteristics of the present invention are to utilize compression to be encapsulated in cryogenic fluid liquid in the short space to be subjected to the atmosphere heating that vaporization takes place and can to obtain very high expansion work after discharging and realize.
Whole apparatus structure of the present invention is simple, the working medium can is convenient, no labyrinth, less-restrictive to material, and making is relatively easy thereby price is tending towards cheap, and performance can meet the demands, the function that is realized with complex structure, expensive micro-combustion motor in the past quite even better, and can directly use with existing MEMS especially minute vehicle, miniature power system support, its output power and operating time length can be designed as required, thereby are suitable for different microelectromechanical systems.
Further describe the present invention below in conjunction with the drawings and specific embodiments:
Fig. 1 a is a structural representation of the present invention;
Fig. 1 b is the cross sectional representation of the miniature rustless steel container (1) of splendid attire high pressure low temperature working medium;
Fig. 1 c is turbine shaft (7) and little bearing (8) cross sectional representation of microturbines (6);
Fig. 2 is a decomposing schematic representation of the present invention;
Fig. 3 is the structural representation of substrate truss (10);
Fig. 4 is the structural representation of microturbines (6).
Wherein: miniature rustless steel container 1 end cap 2 thin-wall metal tubules 3
Heat filter 4 thin-wall metal circular rings 5 microturbines 6
Turbine shaft 7 little bearing 8 bearing bracket 9
Substrate truss 10 foot screws 11 high pressure low temperature working medium 12
Substrate frame 13 soldering points 14 apertures 15
Circular Thin-wall Barrel 16 conical Thin-wall Barrel 17 microtubules 21
As seen from the figure, the micro-system energy driver that utilizes the cryogenic fluid expansion working provided by the invention, it is characterized in that, comprise: the microturbines (6) of the miniature rustless steel container (1) of splendid attire high pressure low temperature working medium (12) and placement coaxial with it, miniature rustless steel container (1) is combined by circular Thin-wall Barrel (16) and conical Thin-wall Barrel (17), its front end is provided with end cap (2), the microtubule (21) that communicates with miniature rustless steel container (1) inner chamber is installed on the end cap (2), microtubule (21) is connected with thin-wall metal tubule (3) on being wrapped in miniature rustless steel container (1) outer wall, be provided with heat filter 4 between miniature rustless steel container (1) and the microturbines that is positioned at the coaxial placement in its rear end (6), the radially outlet that is wrapped in the thin-wall metal tubule (3) on miniature rustless steel container (1) outer wall is relative with the turbine wheel of microturbines (6);
The thin-wall metal tubule (3) that is wrapped on miniature rustless steel container (1) outer wall is the 1-5 root, and the outlet of every thin-wall metal tubule (3) all is 2-85 degree angle with the angle of attack of the turbine wheel of microturbines (6);
The material of described microturbines (6) is corrosion-resistant, impact-resistant light metal, such as titanium alloy;
Described microtubule (21) and the integrative-structure of thin wall tubule (3) for being connected;
The material of described thermoinsulation material 4 is teflon or foamed plastics;
Thermoinsulation material (4) end is connected and is used to protect microturbines (6) and nitrogen vapor is limited in thin-wall metal circular ring (5) in the little space, have aperture (15) on the annulus, the end that is wrapped in the thin-wall metal tubule (3) on miniature rustless steel container (1) outer wall is passed by (15), is 2-85 degree angle with the angle of attack of the turbine wheel of microturbines (6);
Described microturbines (6) is by a pair of little bearing (8) fixed support, and by in order to the little bearing of support fixation (8) bearing bracket (9) and in order to the welding of the substrate frame (13) of the miniature rustless steel container of support fixation (1) or screw on substrate truss 10, adopt foot screw (11) to fix between substrate frame (13) and the substrate truss (10).
Miniature rustless steel container (1) adopts high pressure resistant, corrosion-resistant and low temperature resistant stainless steel material to manufacture, its shape and structure such as Fig. 1 a, shown in the 1b, major component is circular Thin-wall Barrel (16), guaranteeing to adopt thin-walled under the withstand voltage situation, alleviating the weight of package unit, the general 0.1-1mm of its wall thickness, circular Thin-wall Barrel (16) outside dimension can be in 1~5cm scope according to the requirement of driving MEMS; The external diameter and the thin-wall metal tubule (3) of the microtubule (21) that its end is provided with are roughly the same, be 1-5mm, smooth transition between circular Thin-wall Barrel (16) and conical Thin-wall Barrel (17) and the end, such structure is for the consideration that can tolerate high pressure on the one hand, and its streamline structure has guaranteed can reduce resistance of air quite effectively when being used to drive minute vehicle on the other hand; The length of miniature rustless steel container (1) can be definite according to the work requirements of driving MEMS, generally should be less than 1-10cm; The length of thin-wall metal tubule (3) and circular Thin-wall Barrel (16) can be regulated thus, obviously, circular Thin-wall Barrel (16) and conical Thin-wall Barrel (17) are long more, the amount of liquid nitrogen of institute's can is many more, output work is also many more, but the length of microtubule (21) can not be too short, should guarantee certain-length, be mainly nitrogen vapor but not the two-phase mixture of liquid nitrogen or liquid nitrogen-nitrogen vapor with what guarantee to gush out thus, thereby obtain output work as much as possible, because the momentum that liquid nitrogen spray produced obviously is far smaller than nitrogen vapor, and, the length of certain microtubule (21) makes that also this segment fluid flow of outer bound pair can carry out better heating, thereby makes that to greatest extent the liquid that accumulates in mouth of pipe place becomes steam but not liquid nitrogen.For the fluid of guaranteeing to impact at last microturbines (6) turbine blade is a nitrogen vapor; thin-wall metal tubule (3) is as the injection runner of nitrogen vapor; by being wrapped in miniature rustless steel container (1) outer surface shown in Fig. 1 a; its end openings is weldingly fixed on the inboard of the thin-wall metal circular ring (5) that is used to protect microturbines (6); the thin-wall metal tubule (3) that makes by this way is sufficiently long to and can guarantees that the fluid that arrives last spout is converted into steam fully; this is (even from the small-caliber thin-walled tube ejection still be liquid nitrogen) because external world's heating enough liquid nitrogen the being become steam in long-range like this; and also promoted the pressure of nitrogen vapor widely along the heating of journey; this nitrogen vapor that is discharged into the high pressure (even ultrahigh pressure) of ambient atmosphere will be with appreciable momentum impulse turbine blade; thus obtain bigger output work, to satisfy the energy requirement of minute vehicle or miniature power system.In addition, parallel winded should keep a determining deviation (being generally 1-2mm) between the thin-wall metal tubule (3) of stainless steel cylinder outer wall, so that also having fully with miniature rustless steel container (1), ambient atmosphere contacts, thereby heat high pressure low temperature working medium (12) evaporation in the miniature rustless steel container (1) preferably, and pressurization.So, device of the present invention utilizes the work done behavior of external environment fully, its projecting point is to obtain high pressure low temperature working medium (12) by work done in advance, the work done behavior that utilizes the huge temperature difference between this working medium and the external environment again and cause, obtain energy, this microelectromechanical systems that is difficult for makeup energy for breaking away from base work has crucial meaning.
Miniature rustless steel container (1) bottom is consolidated with the heat filter (4) that adiabatic lightweight material is manufactured, as material is the heat filter (4) of teflon (or foamed plastics), to avoid miniature rustless steel container (1) inner high voltage cryogenic fluid the working state of microturbines (6) is impacted; Heat filter (4) is gone up by being connected with light thin wall metal cirque (5) (can adopt aluminium or teflon) shown in Fig. 1 a; radially have the aperture of getting through (15) on the thin-wall metal circular ring (5); the thin-wall metal tubule (3) that is wrapped on miniature rustless steel container (1) outer wall closely contacts (passing through welded seal) along this mouthful insertion and with thin-wall metal circular ring (5), thus the nitrogen vapor blade work done of impulse turbine (6) thus.Such aperture (15) can be a plurality of as required also, so that multichannel nitrogen vapor thin-wall metal tubule (3) is set.Should be noted that between thin-wall metal tubule (3) and thin-wall metal circular ring (5) and should avoid the slit.Thin-wall metal tubule (3) starting point is fixed on the end cap 2 of miniature rustless steel container (1).Nitrogen vapor by miniature rustless steel container (1) output can flow along thin-wall metal tubule (3) along this, until the blade work done of impulse turbine (6).During the can liquid nitrogen, whole miniature rustless steel container (1) can be placed in the liquid nitrogen container, then end cap (2) is opened, liquid nitrogen promptly is added into miniature rustless steel container (1), behind to be filled the finishing, end cap (2) is covered, owing to be connected with thin-wall metal tubule (3) on the end cap (2), thereby steam can be overflowed thus.After this, the miniature rustless steel container (1) that will fill high pressure low temperature working medium (12) takes out, and is connected to substrate rapidly and spreads out on the frame (10), so miniature rustless steel container (1) and microturbines (6) are promptly joined together by the substrate frame (10) that spreads out.At this moment, because the heating of ambient atmosphere has made that the nitrogen vapor pressure in the miniature rustless steel container (1) is increasing, thereby has begun normal work done.Here, the needs of can liquid nitrogen for convenience, miniature rustless steel container (1) and the substrate frame (10) that spreads out is dismountable, is connected by foot screw 11 between the two.Thereby the process of miniature rustless steel container (1) can liquid nitrogen does not influence the proper functioning of microturbines (6).According to the size of miniature rustless steel container (1), the bolt position that substrate is spread out on the frame (10) accurately determines, to guarantee cooperating between miniature rustless steel container (1) and the microturbines (6).Whole system is stable, and the external world needs device driven can be directly connected on the turbine shaft 7 of microturbines (6), to obtain output work.
Thin-wall metal tubule (3) is welded on the end cap (2) of miniature rustless steel container (1), and is opening in end cap (2) inboard, exports from here to guarantee nitrogen vapor.End cap (2) should be designed to the tight buckle closure of energy on miniature rustless steel container (1) port, and can fully seal, in order to avoid nitrogen vapor is overflowed from here.
Be the welding part of the bearing bracket (9) of little bearing (8) at spread out four square frame places, top (14) of frame (10) of substrate shown in Figure 3, welding and substrate the spread out frame (10) of microturbines (6) by herein fuses, and it is non-dismountable, and four square frame places, below are the foot screw 11 (adopting light-duty alloy such as titanium alloy etc. to make) of fixing miniature rustless steel container (1), it is detachable, spreads out on the frame (10) so that miniature rustless steel container (1) is connected to substrate separately after the can high pressure low temperature working medium (12) more rapidly.Spread out position that frame (10) goes up soldering point and foot screw 11 of substrate can and cooperatively interact according to the size of miniature rustless steel container (1) and microturbines (6) and determines, length, thickness and even the width etc. of substrate truss (10) can be definite according to needs, but to guarantee that light weight and robustness are prerequisite.
The blade of microturbines (6) should adopt radial structure, and substrate as shown in Figure 4, as far as possible all impacts on the turbine disk with the nitrogen vapor of assurance from thin-wall metal tubule (3) ejection, thereby obtains big as far as possible output work for sealing wheel disc.The selection principle of blade shape should guarantee as far as possible that also its runner can obtain maximum energy conversion efficiency, as embodiment, and the structure that can adopt Fig. 4 to provide.Certainly, also can adopt other blade structure.The wheel disk of turbine diameter can be in the 0.5-5cm scope according to the requirement of driving MEMS, and the wheel disc thickness is guaranteeing should to get over Bao Yuehao under the impact-resistant prerequisite, and with weight reduction, its thickness size should be in≤0.5cm scope.Each piece blade dimensions should be at 0.1cm * 0.05cm * 0.05cm to 1cm * 0.5cm * 0.5cm scope.Generally speaking, contain water vapor in the air, thereby because the cooling of nitrogen vapor can cause moisture content to be separated out, and because little weight principle, blade material should be selected light-duty corrosion-resistant, impact-resistant material for use, such as titanium alloy etc.
The turbine shaft at the turbine disk back side (7), its output work is used to drive relevant power plant (as little aircraft fan or propeller cavitation, minicar rotating shaft etc.), turbine shaft (7) diameter can be in the 0.1-1cm scope according to the requirement of MEMS system, and the axial length of turbine shaft (7) can be set as required.Turbine shaft (7) is fixing by two little bearings (8), as shown in Figure 1a.Two little bearings (8) outer wall respectively with bearing bracket (9) welding, this metal bearing support (9) is fixedly welded on the substrate frame (10) that spreads out again, microturbines (6) is to fuse and non-removable with the substrate frame (10) that spreads out in fact thus.
The substrate frame (10) that spreads out is guaranteeing should to adopt the minimum weight structure as far as possible under the firm condition, as is hollow type truss shown in Figure 3.
During use, high pressure low temperature working medium (12) is filled in the miniature rustless steel container (1), after treating that miniature rustless steel container (1) is lowered the temperature and reached evenly, the interior cryogenic fluid of miniature rustless steel container (1) (12) is done suitably pressurization, cover end cap (2) then, take out miniature rustless steel container (1) and with coaxial the setting of miniature turbine (6), fit together with microelectromechanical systems again, because the interior cryogenic fluid fluid of miniature rustless steel container (1) (12) is subjected to the heating of ambient air, its pressure is higher in addition, liquid will evaporate rapidly and the radially outlet of the thin-wall metal tubule (3) that goes out along aperture 15 spouting, promote microturbines (6) and rotate, drive the motion of microelectromechanical systems thus.If need to change driving power, the cryogenic fluid (12) of different pressures can be filled to miniature rustless steel container (1) and realize, also can realize by the thin-wall metal tubule (3) of design different-diameter.Thus, promptly realize the requirement of different driving power.Generally, also can select the different miniature rustless steel container (1) of design size according to the size of microelectromechanical systems and the length of operating time.

Claims (9)

1. micro-system energy driver that utilizes the cryogenic fluid expansion working, it is characterized in that, comprise: the microturbines (6) of the miniature rustless steel container (1) of splendid attire high pressure low temperature working medium and placement coaxial with it, rustless steel container (1) is combined by circular Thin-wall Barrel (16) and conical Thin-wall Barrel (17), its front end is provided with end cap (2), the microtubule (21) that communicates with miniature rustless steel container (1) inner chamber is installed on the end cap, microtubule (21) is connected with thin wall tubule (3) on being wrapped in miniature rustless steel container (1) outer wall, be provided with heat filter (4) between miniature rustless steel container (1) and the microvovtex that is positioned at the coaxial placement in its rear end (6), the angle of attack that is wrapped in the turbine wheel of the radially outlet of the thin wall tubule (3) on miniature rustless steel container (1) outer wall and microturbines (6) is 2-85 degree angle.
2. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 1, it is characterized in that: the thin wall tubule (3) of wound in parallel on miniature rustless steel container (1) outer wall is the 1-5 root, its spacing is 1-2mm, diameter is 1-2mm, and the outlet of every thin wall tubule (3) all is 2-85 degree angle with the angle of attack of the turbine wheel of microturbines (6).
3. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 1, it is characterized in that: the material of microturbines (6) is corrosion-resistant, impact-resistant light metal.
4. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 1, it is characterized in that: described microtubule (21) and the structure of thin wall tubule (3) for the one that is connected.
5. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 1, it is characterized in that: the material of described thermoinsulation material 4 is teflon or foamed plastics.
6. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 5; it is characterized in that: described thermoinsulation material (4) end is connected and is used to protect microturbines (6) and nitrogen vapor is limited in metal thin-wall annulus (5) in the little space; have aperture (15) on the annulus; be wrapped in that thin wall tubule (3) on miniature rustless steel container (1) outer wall is terminal to be passed by (15), its angle of attack that radially exports with the turbine wheel of microturbines (6) is 2-85 degree angle.
7. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 5, it is characterized in that: microturbines (6) is by a pair of little bearing (8) fixed support, and by in order to the little bearing of support fixation (8) bearing bracket (9) and in order to the welding of the substrate frame (13) of the miniature rustless steel container of support fixation (1) or screw on frame (10) is spread out in substrate, substrate frame (13) adopts foot screw (11) to fix with spreading out between the frame substrate (10).
8. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 3, it is characterized in that: the material of microturbines (6) is a titanium alloy.
9. by the described micro-system energy driver that utilizes the cryogenic fluid expansion working of claim 1, it is characterized in that: the length of miniature rustless steel container (1) is 1-10cm, the diameter of forming the circular Thin-wall Barrel (16) of miniature rustless steel container (1) is 1-5cm, and wall thickness is 0.1-1mm
CN 00132293 2000-11-28 2000-11-28 Micro system energy driver doing work by expansion of low-temp medium Expired - Fee Related CN1247880C (en)

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CN 00132293 CN1247880C (en) 2000-11-28 2000-11-28 Micro system energy driver doing work by expansion of low-temp medium

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102383969A (en) * 2010-08-30 2012-03-21 张柏海 Kinetic energy pressure type jet engine
CN103930654A (en) * 2011-05-17 2014-07-16 瑟斯特克斯有限公司 Systems and methods for efficient two-phase heat transfer in compressed-air energy storage systems
CN109655165A (en) * 2019-01-10 2019-04-19 中国科学院上海技术物理研究所 Integrated encapsulation structure for inhibiting refrigeration working medium to influence infrared detector noise
CN110951097A (en) * 2019-11-29 2020-04-03 扬州大学 Cu @ CuO/CG-aeroo Janus film material for solar photothermal steam conversion and preparation method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102383969A (en) * 2010-08-30 2012-03-21 张柏海 Kinetic energy pressure type jet engine
CN103930654A (en) * 2011-05-17 2014-07-16 瑟斯特克斯有限公司 Systems and methods for efficient two-phase heat transfer in compressed-air energy storage systems
CN109655165A (en) * 2019-01-10 2019-04-19 中国科学院上海技术物理研究所 Integrated encapsulation structure for inhibiting refrigeration working medium to influence infrared detector noise
CN110951097A (en) * 2019-11-29 2020-04-03 扬州大学 Cu @ CuO/CG-aeroo Janus film material for solar photothermal steam conversion and preparation method thereof
CN110951097B (en) * 2019-11-29 2022-07-22 扬州大学 Cu @ CuO/CG-aero Janus film material for solar photothermal steam conversion and preparation method thereof

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