Summary of the invention
But, in above-mentioned solution be with main carrier be basically smooth be prerequisite, utilize main carrier method for making etc. to be difficult to guarantee that it is enough smooth, exist the situation that on such main carrier, can not eliminate tight loose contact fully and can't obtain enough tight contact performancies.Especially, when main carrier being close to carry out from carrier both sides ground when while, two-sided magnetic duplicated, the flatness difference of the main carrier of both sides makes tight contact be difficult to realization.
In addition, as above-mentioned example, though in the crimping stage, make the main carrier shifting ground obtain flatness, from the friction corresponding to distortion has taken place between carrier surface and the main carrier, the micro concavo-convex figure on the main carrier surface of carrying Copy Info or probably can be impaired from the carrier recording face.Particularly, in that floppy disk is used as under the occasion of carrier, probably to cause from vector form deforming.
In view of the above problems, the objective of the invention is to provide a kind of like this magnetic copy device, it guaranteed the flatness of the main carrier that magnetic duplicates and improved main carrier with from the tight contact performance of carrier and improved the quality of reproducing signals.
The characteristics of the magnetic copy device of the present invention that addresses the above problem are, the main carrier that makes carry information signals with apply reproducing magnetic field from carrier in intimate contact and carry out the magnetic copy device that magnetic duplicates, the back side of described main carrier is attracted on the plane of correcting parts, under the state of the flatness that improves main carrier, make main carrier and closely contact from carrier.
In addition, under the occasion of simplex copying, the back side is attracted to correct improved flatness on the plane of parts main carrier closely contact make elastic body be close to opposing face from a surface of carrier from carrier.
In other words, when making main carrier be close to or simultaneously carrying out magnetic when duplicating from the two sides of carrier, main carrier contact is attracted to the surface to be had predetermined flatness and has on the rectification parts of suction hole from the opposite back side of the information-bearing face of carrier, thereby under the flatness of main carrier is corrected to the state of being scheduled to flatness, make it and closely contact from carrier, in this case, even it is soft from carrier, can not cause damage yet, guarantee good tight contact and carry out the high magnetic of reproducing signals quality and duplicate.
For example, above-mentioned rectification parts center line average surface roughness Ra be 0.01 micron-0.1 micron planar degree be flattened and offered 25-100 the about suction hole below 2 millimeters of bore on the accurately machined adsorption plane.Vacuum pump conjointly aspirates by air intake passage and suction hole, and main carrier is subjected to vacuum suction, and the flatness of main carrier obtains correcting along adsorption plane.By crimping do not have the main carrier surface of distortion with from carrier, in gamut, obtained good tight contact condition, thereby can utilize electromagnet apparatus etc. to apply reproducing magnetic field, duplicate down magnetic chart shape more accurately corresponding to the convex-concave pattern of main carrier.
In addition, especially make main carrier closely contact pursue face from a face ground of carrier and carry out magnetic when duplicating, the back side is attracted on the plane of correcting parts, main carrier that has improved flatness and a tight contact in surface from carrier, simultaneously, make elastic body be close to opposing face from carrier, and the crimping main carrier with from carrier, thus one, further improved tight contact performance.
As above-mentioned magnetic duplicating method, preferably being performed such magnetic duplicates, promptly at first on track direction dc magnetization from carrier, make from carrier with formed magnetospheric main carrier for magnetic copying at micro concavo-convex figure and closely contacted corresponding to Copy Info, carry out magnetic and duplicate roughly applying reproducing magnetic field ground in the opposite direction with initial stage dc magnetization side from carrier.As for described information, preferably servosignal.
According to aforesaid the present invention, since the main carrier that makes carry information signals with apply reproducing magnetic field from carrier in intimate contact and carry out magnetic and duplicate, and the back side of described main carrier is attracted on the plane of correcting parts, under the state of the flatness that improves main carrier, make main carrier and closely contact from carrier, so, can guarantee the flatness of main carrier and guarantee that in whole main carrier closely contacts from carrier, can prevent that the signal that caused by tight loose contact from omitting, improve reproduction quality signal and also improve reliability.
In addition, from carrier and main carrier crimping the time, main carrier distortion does not take place, main carrier does not take place with from the friction between the carrier, in the durability of raising main carrier, can prevent by the damage that causes from vector form deforming.
When simplex copying, make the back side by correcting the tight surface that contacts from carrier of main carrier that parts keep, make elastic body be close to opposing face from carrier, in this case, the tight contact performance that does not exist the flatness difference of the main carrier on the two sides when making main carrier be close to the two sides to cause reduces, and can further improve from the tight contact performance of carrier and main carrier.
Embodiment
Below, describe embodiments of the invention in detail.Fig. 1 is the local oblique view of replication status of the magnetic copy device of expression one embodiment of the invention.Fig. 2 is a branch view of being close to first embodiment of body.Fig. 3 is an exploded perspective view of being close to second embodiment of body.Fig. 4 a, 4b and 4c represent the basic process of magnetic duplicating method.Each figure is a synoptic diagram, and its thickness etc. is to represent according to the ratio different with physical size.
Magnetic copy device shown in Fig. 1,2 is the device that carries out double-sided replication simultaneously, main carrier 3,4 crimping are adjacent to from the body 10 of being close to of the top and bottom of carrier 2 rotates, be close to the electromagnet apparatus 5 (field generator for magnetic) of body about in the of 10 and apply reproducing magnetic field by being arranged on, 3,4 loaded information of main carrier by while magnetic duplicated record to from two faces of carrier 2.
Be close to body 10 the following main carrier 3 that duplicates information such as following servosignal at following record surface is equipped with from carrier 2, duplicate at record surface from carrier 2 information such as servosignal down on main carrier 4, have main carrier 3 ground under the absorption and correct the following welded part 8 of the following rectification parts 6 of flatness, have the last welded part 9 of correcting parts 7 (structure with correct parts 6 down the same) that flatness is corrected on main carrier 4 ground in the absorption, their are main carrier 4, following main carrier 3 tight two faces that contact from carrier 2 on the state of centering adjustment position is crimped and makes.
Among the figure is that dish hub 2b is fixed on the floppy disk on the central portion of disc-shaped record carrier 2a from carrier 2.Record carrier 2a has on the two sides of the disc substrate that is made of polyester sheet of softness etc. and has formed magnetospheric record surface.
Last main carrier 4 is made into the annular disc with following main carrier 3 by rigid body, they have the Copy Info loading end that is made of from the micro concavo-convex figure (following will the explanation referring to Fig. 4) of carrier 2 record surfaces tight contact on one face, that face in contrast by vacuum suction under correct parts 6 and on correct on the parts 7.If necessary, in order to improve down main carrier 3 and last main carrier 4 and tight contact performance from carrier 2, they so are set, i.e. position beyond the formation portion of micro concavo-convex figure and not correcting on the position that the suction hole of parts 6,7 is communicated with aftermentioned, connect and to have formed micropore inside and outsidely, thereby aspirate discharge from carrier 2 and be close to air between the face.
Correct parts 6 (with last rectification parts 7 the same ground) down and be configured to the disc of its size corresponding to main carrier 3 sizes, it is 0.01 micron-0.1 micron flatness that its surface is configured to center line average surface roughness Ra, through smooth accurately machined adsorption plane 6a.On adsorption plane 6a, offered about 25-100 bore less than 2 millimeters suction hole 6b about the samely.Do not come although draw, suction hole 6b is by linking to each other with vacuum pump from the rectification parts 6 inner air intake passages that are introduced to down outside the welded part 8 and aspirating, the back side of being close to the main carrier 3 of adsorption plane 6a is subjected to vacuum suction, and the flatness of main carrier 3 obtains correcting along adsorption plane 6a.
9 one-tenth discs of following welded part 8 and last welded part, one of them or two can move axially and can pass through that unillustrated open-and-close mechanism (pressing mechanism, fixed mechanism) carries out opening and closing movement and crimping mutually under predetermined pressure.On outer peripheral face, be provided with protruding 8a, 9a, when closing up, the mutual butt of protruding 8a, 9a of welded part 8,9 up and down, thus inside is remained under the air-tight state.On the central part of following welded part 8, the pin 8b that has formed and located ordinatedly from the center of carrier 2 dish hub 2b.And welded part 8 is conjointly driven rotation by one with last welded part 9 and unillustrated rotating mechanism down.
By the above-mentioned body 10 of being close to, utilize down main carrier 3 and 4 pairs of a plurality of magnetic of last main carrier to duplicate from carrier 2, making down to the centering adjustment position main carrier 3 be remained on down rectification parts 6 by vacuum suction respectively with last main carrier 4 at first, respectively reaches on the adsorption plane 6a that goes up rectification parts 7.Subsequently, under the state that last welded part 9 and following welded part 8 separate, after being installed into the centering adjustment position from carrier 2, last welded part 9 closes up with following welded part 8, thereby makes main carrier 3,4 be close to two faces from carrier 2.Subsequently, the moving or be close to moving of body 10 of electromagnet apparatus 5 by up and down, make electromagnet apparatus up and down 5 near the top and bottom of being close to body 10, one side makes is close to body 10 rotations, one side applies reproducing magnetic field by electromagnet, following main carrier 3 and the Copy Info of going up main carrier 4 by the magnetic duplicated record from the record surface of carrier 2.
According to present embodiment, make main carrier 3,4 closely contact under the situation of two faces of carrier 2, by correct parts 6,7 with each main carrier 3,4 vacuum suction on the high adsorption plane of flatness, thereby can correct and improve its flatness.By smooth main carrier up and down 3,4 crampings and be close to from carrier 2, thereby can seamlessly be implemented in evenly being close in whole at main carrier 3,4 and between the carrier 2, can duplicate correct down at record surface from carrier 2 corresponding to the information that takes shape in the convex-concave pattern on the main carrier 3,4.In addition and since main carrier 3,4 tight contact before the carrier 2 through smooth rectification, so, when tight contact, main carrier 3,4 indeformable and its with from producing friction between the carrier 2, thereby do not improved its durability and quality with damaging.
Fig. 3 is the decomposition diagram of being close to body 10 of another embodiment of expression, and it is the example that carries out simplex copying.Be close to elastic body 11 (padded coaming) that body 10 is equipped with the following main carrier 3 that duplicates information such as servosignal at the following record surface from carrier 2, contact record surface from the carrier 2, have the last welded part 9 that absorption downside main carrier 3 ground are corrected the following welded part 8 of the following rectification parts 6 of flatness, kept elastic body 11, they are crimped under the situation of centering adjustment position, make the face of main carrier 3 tight contacts, make closely contact opposing faces of elastic body 11 from carrier 2.In other words, the last main carrier 4 of the foregoing description becomes elastic body 11, is not provided with to correct parts 7, and in addition, structure is the same.
From carrier 2 is that dish hub 2b is fixed on floppy disk on the central part with above-mentioned the same disc-shaped record carrier 2a.Following main carrier 3 reaches corrects parts 6 down also with above-mentioned the same, they are made into annular by elastic body, be attracted on the adsorption plane 6a that corrects parts 6 down at the opposite back side that has on the one side by the main carrier 3 of being close to the Copy Info loading end that constitutes from the micro concavo-convex figure of carrier 2 record surfaces, thereby correct the flatness of main carrier 3 along adsorption plane 6a with suction hole 6b.
Elastic body 11 is made into discoid by the material with elastic property and is kept by last welded part 9.The material of elastic body 11 has such characteristic, and promptly it is close to pressure along with being out of shape from the surface configuration of carrier 2 applying, and when peeling from carrier 2 from main carrier 3, the surface property before it returns to and exerts pressure.As the concrete material of elastic body 11, can adopt Foamexes such as General Purpose Rubbers such as silica gel, polyurethane rubber, fluorine-containing glue, butadiene rubber, teflon rubber, Viton and gelatin sponge etc.Elastic body 11 contact is formed the flat shape parallel with main carrier 3 or is becoming convex from carrier 2 sides from the shape on the surface of carrier 2.
Be close to body 10 by present embodiment, utilize down 3 pairs of a plurality of magnetic of main carrier to duplicate from carrier 2, at first, to descend to the centering adjustment position main carrier 3 absorption to remain on down on the adsorption plane 6a that corrects parts 6, subsequently, under the state that last welded part 9 and following welded part 8 separate, make loaded onto from carrier 2 centering adjustment positions ground after, last welded part 9 closes up with following welded part 8, make main carrier 3 be close to a face by pushing of elastic body 11 from carrier 2, subsequently, with above-mentioned the same ground, make electromagnet apparatus up and down 5 near being close to body 10, be close to body 10 rotations Yi Bian make, on one side apply reproducing magnetic field by electromagnet apparatus 5, the Copy Info of following main carrier 3 by the magnetic duplicated record from a face of carrier 2.Subsequently, in other operation, make the opposing face of main carrier 4 tight contacts, duplicate thereby carry out magnetic equally from carrier 2.
According to present embodiment, be close under the situation of a face of carrier 2 making main carrier 3, main carrier 4 by correct parts 6 by vacuum suction on the high adsorption plane 6a of flatness, thereby rectification has also improved its flatness, by elastic body 11 crampings opposite and be close to from carrier with smooth following main carrier 3, thereby can duplicate from carrier 2 record surfaces at main carrier 3 and from not being implemented in evenly being close in whole with a gap between the carrier 2 down correctly corresponding to the information that takes shape in the convex-concave pattern on the main carrier 3.
According to Fig. 4 a, 4b and 4c the object lesson that described magnetic duplicates is described.At first, shown in Fig. 4 (a), apply initial stage magnetic field H in a direction from carrier 2 in advance in track direction, thus the initial stage of carrying out magnetization (dc erasing).Subsequently, shown in Fig. 4 (b), make from carrier 2 record surfaces and be close to the information-bearing face that the micro concavo-convex figure that stays in main carrier 3 substrates 31 is covered with magnetosphere 32,, apply reproducing magnetic field Hdu ground on the contrary with above-mentioned initial stage magnetic field H in and carry out magnetic and duplicate on the track direction of carrier 2.As a result, shown in Fig. 4 (c), from the magnetic recording face (magnetic track) of carrier 2, the magnetic duplicated record has descended corresponding to the information of being close to the figure that projection forms with the recess space by main carrier 3 information-bearing face magnetospheres 32.Come although draw, the tight simultaneously contact of last main carrier 4 that makes same making at the same time also can be carried out magnetic and duplicate under the occasion of the last record surface of carrier 2.
At the convex-concave pattern of above-mentioned main carrier 3 substrates 31 is when being different from the negative patterning of concaveconvex shape of positive figure of Fig. 4, opposite with above-mentioned situation by the direction that makes initial stage magnetic field H in and reproducing magnetic field Hdu, thus same information under can the magnetic duplicated record.
At substrate 31 is under the occasion of kicker magnet such as nickel, can only carry out magnetic with substrate 31 and duplicate, and does not need to cover magnetosphere 32 (soft magnetosphere), and under the situation that the good magnetosphere of duplication characteristic 32 is set, can carry out better magnetic and duplicate.If substrate 31 is nonmagnetic materials, then magnetosphere 32 must be set.
Under the occasion that the substrate 31 that is made of strong magnetic metal is covered by magnetosphere 32,, be preferably between substrate 21 and the magnetosphere 32 and add nonmagnetic layer in order to stop the effect of magnetic influence of substrate 31.In addition, in the superiors, apply the diaphragm of diamond-like-carbon (DLC) etc.By this diaphragm, further improved contact resistance and can carry out repeatedly magnetic and duplicate.On the bottom of DLC diaphragm, also can form silicon fiml by modes such as sputters.
The making of aforementioned main carrier then, is described.As the main carrier substrate, nickel, silicon, quartz plate, glass, aluminium, alloy, pottery, synthetic resin etc. have been used.The formation of convex-concave pattern waits by die pressing, photo-fabrication to be carried out.
In die pressing, on ganoid glass plate (or quartz plate), form photoresist by modes such as spin coatings, glass plate is rotated, irradiation is corresponding to the laser (or electron beam) of servosignal ground warp ovennodulation on one side, on whole photoresist, the predetermined pattern that exposes on the part corresponding to each frame of circumference for example is equivalent to begin along the figure of the linearly extended servosignal of radial direction from center of rotation in each magnetic track.Subsequently, photoresist is carried out development treatment, exposed portion is removed, and has obtained to have the former dish of the concaveconvex shape that is made of photoresist.Then, under the convex-concave pattern of former panel surface, (electroforming) electroplated on this surface, produce ni substrate and peel next from disk with positive convex-concave pattern.Substrate is like this as main carrier, or necessary words apply nonmagnetic layer, soft magnetosphere, are made into main carrier diaphragm on convex-concave pattern.
Make the second former dish on the enterprising electroplating of aforementioned former dish ground, electroplate, also can produce substrate with negative convex-concave pattern with the second former dish.In addition, at the enterprising electroplating of the second former dish or press attached resin liquid ground to harden, thereby produce the 3rd former dish,, thereby produce substrate with positive convex-concave pattern at the enterprising electroplating of the 3rd former dish.
On the other hand, after having formed the figure that is made of photoresist on the previous glass sheet, etching forms the hole on glass plate, produces the former dish of removing photoresist, subsequently, can with the above-mentioned substrate that is made like.
As the material of metal substrate, can use nickel or nickel alloy, the plating of making substrate can adopt comprise that electroless plating covers, electroforming, sputter, the ion plating various metals in overlaying on become embrane method.The degree of depth of the convex-concave pattern of substrate (rising height) is preferably 80-800nm and is preferably 150-600nm.When convex-concave pattern is servosignal, formed long radial direction.For example, the length on the radial direction is the 0.3-20 micron, and in a circumferential direction, preferably the 0.2-5 micron.In this scope, preferably figure long on the radial direction is selected for use the figure of making carrying servosignal information.
Described magnetosphere (soft magnetosphere) becomes modes such as membrane means and plating to form by magnetic material vacuum plating method, sputtering method, ion plating method equal vacuum.As magnetospheric magnetic material, can adopt Co, Co alloy (CoNi, CoNiZr, CoNbTaZr etc.), Fe, Fe alloy (FeCo, FeCoNi, FeNiMo, FeAlSi, FeAl, FeTaN), Ni, Ni alloy (NiFe), wherein preferred FeCo, FeCoNi.Magnetic layer thickness is preferably 50-500nm and is preferably 150-400nm.The material that is arranged on the nonmagnetic layer in the magnetosphere lower floor as basic unit has adopted Cr, CrTi, CoCr, CrTa, CrMo, NiAl, Ru, C, Ti, Al, Mo, W, Ta, Nb etc.The signal quality that nonmagnetic layer can suppress to cause when substrate is kicker magnet reduces.
In addition, be preferably in diaphragms such as DLC is set on the magnetosphere, also lubricant layer can be set.As diaphragm, preferably be provided with DLC film and the lubricant layer of 5nm-30nm.In addition, in the magnetic lateral root and between the diaphragm, the strengthening layer that adheres to of silicon etc. can be set also.
Make resin substrate with described former dish, magnetosphere is set in its surface produce main carrier.As the resin material of resin substrate, can use ethylene chloride resin, epoxy resin, amorphous state Polyolefin and polyester of the allyl resin, Polyvinylchloride chloroethylene copolymer body etc. of polycarbonate polymethacrylate etc. etc.Consider optimization polycarbonate from aspects such as moisture-proof, dimensional stability and prices.When in finished product, having overlap, remove deflashing by calendering or polishing.The figure height of projection of resin substrate is preferably 50nm-1000nm and is preferably 200nm-500nm.
Obtained main carrier with on the Micropicture on the surface of described resin substrate, applying magnetosphere.Magnetosphere is to form by the method for vacuum evaporation magnetic material, sputtering method, ion plating equal vacuum thin film-forming method, plating method etc.
On the other hand, in photo-fabrication, for example on the smooth surface of flat-shaped substrate, be coated with photoresist, utilize photomask corresponding to servo signal pattern to expose and develops, thereby formation is corresponding to the figure of information.Then,, carry out the substrate etching, thereby formed the hole that is equivalent to magnetic layer thickness corresponding to figure ground by etching step.Then, by magnetic material vacuum vapour deposition, sputtering method, ion plating equal vacuum thin film-forming method or plating method, on substrate surface, form the magnetic film of its thickness corresponding to the hole.Subsequently, remove photoresist with (liftoff) method of blowing off, lapped face when overlap is arranged, removes deflashing, and makes smooth surface.
Then, describe from carrier.As used application type magnetic recording medium or metal foil membranous type magnetic recording medium from carrier.The application type magnetic recording medium for example is the carrier of market sales such as highly dense floppy disk.In metal foil membranous type magnetic recording medium, at first can be with Co, Co alloy (CoPtCr, CoCr, CoPtCrTa, CoPtCrNbTa, CoCrB, CoNi etc.), Fe, Fe alloy (FeCo, FePt, FeCoNi) as magnetic material.The density of line of magnetic force of these materials is big and have magnetic anomaly tropism with main carrier equidirectional (in-plane the during record of plane, the vertical direction during perpendicular recording), therefore is preferred for clearly duplicating.And, nonmagnetic bottom preferably is set, so that (supporting side) obtains necessary magnetic anisotropy below magnetic material.Crystalline texture and grating constant must be mated with magnetosphere.For this reason, Cr, CrTi, CoCr, CrTa, CrMo, NiAl, Ru etc. have been used.