CN1341041A - 化学反应用微型件 - Google Patents

化学反应用微型件 Download PDF

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CN1341041A
CN1341041A CN00803966A CN00803966A CN1341041A CN 1341041 A CN1341041 A CN 1341041A CN 00803966 A CN00803966 A CN 00803966A CN 00803966 A CN00803966 A CN 00803966A CN 1341041 A CN1341041 A CN 1341041A
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丹花通文
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Abstract

本发明提供一种不管供实验的化学物质种类如何在所有实验条件下都可迅速地进行实验的化学反应用微型片。本发明化学反应用微型片在形成基板的微小尺寸的金刚石基板10的表面上形成多个化学反应储存部11、12和由连通连结这些化学反应储存部11、12彼此间的槽13构成的水平连通路13。另外,本发明的化学反应用微型片在其金刚石基板10上设有与化学反应储存部11、12垂直连通连结的贯通孔构成的垂直连通路20,在其连通连结部分上安装开关阀21。还在与化学反应储存部11、12对应的部位上安装着珀尔帖元件等的加热、冷却机构23、24。因此,在不由化学物质的种类制约的情况下可以改变实验条件并在微小空间中进行多样的实验。

Description

化学反应用微型片
技术领域
本发明涉及可以在微小空间进行各种化学反应的化学反应用微型片。
背景技术
近年来，为了各种研究开发的迅速化、省力化、省资源化、省能源化、省空间化、以及为了减少实验废液和废弃物和为了反复实验的合理化等，提倡可以在微米单位的微小空间内进行化学实验的所谓的集成化的化学实验室。
这样的集成化的化学实验室，是通过在数cm见方的玻璃基板上形成从亚μm到100μm的工艺沟槽来构成的，其目的在于，连续地进行微米的化学反应、反应生成物的分离到进一步的检测。
但是，上述集成化的化学实验室具有以下必须解决的问题。
(1)由于用玻璃基板做基板，不能充分地确保对于化学物质的耐蚀刻性，存在着不能对这些化学物质进行实验的危险。
(2)由于玻璃基板耐热性低，存在着不能进行高温实验的危险。
(3)考虑到了例如把加热·冷却机构安装在玻璃基板的反应部的下面进行高低温实验，但是，由于玻璃基板的热传导率低，存在着不能确保足够快的反应速度的危险。
发明目的
本发明的目的在于，提供一种可以解决上述问题的，不管供实验用的化学物质的种类如何，在所有的实验条件下都能迅速进行实验的化学反应用的微型片。
发明的公开
为了达到上述目的，本发明的化学反应用微型片做成为：在微小尺寸的金刚石基板的表面上形成由多个化学反应储存部和连通连结这些化学反应储存部的沟构成的水平连通路。
本发明的化学反应用微型片在构成上具有以下的特征。
(1)在金刚石基板上设置由垂直地连通连结化学反应储存部的贯通路构成的垂直连通路，在连通连结部分上安装开关阀。
(2)沿化学反应储存部的周围或者底面安装用于加热、冷却化学反应储存部的加热·冷却机构。
附图的简单说明
图1是本发明的实施例的化学反应用微型片的透视图。
图2是本发明的实施例的化学反应用微型片的俯视图。
图3是图2的I-I线的剖面图。
图4是安装了加热·冷却机构的本发明的一实施例的化学反应用微型片的剖视图。
图5是本发明的实施例的化学反应用微型片的金刚石基板的制造工序说明图。
实施例
下面参照附图所示的一个实施例具体地说明本发明。
首先参照图1～图3，对本发明的一个实施例的化学反应用微型片A的全体构成进行说明。
如图所示，形成化学反应用微型片A的本体的金刚石基板10由宽度和长分别是数cm、厚度为亚μ～数百μm的矩形板构成。而且，在金刚石基板10的一侧表面上形成由多个化学反应储存部11、12和连通连结这些化学反应储存部11、12的沟构成的水平连通路13。另外，在金刚石基板10的一侧的表面上还设置水平连通路18、19，该水平连通路18、19由把在水平方向上相邻的其他的化学反应用微型片A1、A2的金刚石基板14、15上同样设置的化学反应储存部16、17连通连结到化学反应用微型片A的化学反应储存部11、12的沟构成。
另外，如图1～图3所示，在本实施例中，在金刚石基板10上形成由垂直地连通连结化学反应储存部11的贯通孔构成的垂直连通路20，在化学反应储存部11与垂直连通路20的连通连结部分上安装开关阀21。从而，如图3所示，可以把化学反应储存部11与设置在化学反应用微型片A3的金刚石基板22a上的化学反应储存部22连通连结，该化学反应用微型片A3配置在化学反应用微型片A的下面，同时通过关闭开关阀21可以切断两者的连通。
再有，开关阀21可以由例如形状记忆性合金的阀板形成。
再有，如图4所示，在化学反应用微型片A的金刚石基板10的下面，在与化学反应储存部11、12对应的场所也考虑安装珀耳帖元件等加热·冷却机构23、24。在这种情况下，可以促进化学反应储存部11、12内的化学物质的反应。
下面，对使用具有上述构成的化学反应用微型片A的化学实验进行说明。
首先，把属于被实验对象的多量的液态、气态或者固态的化学物质流入或导入化学反应储存部11内并使其起规定的化学反应，把反应后生成物质通过水平连通路13或者垂直连通路20送到化学反应储存部12或化学反应储存部22，进行下一个化学反应或进行成分分析。
这时，因为化学反应用微型片A，A3(A1，A2也相同)的基板由金刚石基板10、22a(14，15)构成，对所有化学物质具有高耐蚀刻性，所以可以不受化学物质种类制约的情况下在微小空间内进行多种化学实验。
另外，由于金刚石基板10、14、15、22a的热传导性良好，所以可以通过在与化学反应储存部11、12对应的位置上安装珀耳帖元件等的加热·冷却机构23、24来提高反应速度，可以进行有效的实验。
在上述化学反应用微型片A～A3的金刚石基板10、14、15、22a中，化学反应储存部11、12、16、17、22可以使用金刚石激光器进行熔融去除来加工形成，也可以参照图5如下面说明的那样，通过在硅30上转写的方法形成具有漂亮断面的化学反应储存部11、12、16、17、20。
即，如图5(a)所示，在硅30的表面上成长氧化硅膜31。
如图5(b)所示，使用光致抗蚀刻剂30a形成图案。
之后，用氟酸(HF)进行各向同性蚀刻，去除氧化硅膜31。
如图5(C)所示，使用氢氧化四甲基铵[(CH3)4NOH]溶液，各向异性蚀刻硅30。
如图5(d)所示，把得到的台形的硅基板32作为铸型，用热丝CVD法成长金刚石33，金刚石33生长后，在成长面上涂布导电性环氧物33a，烧固固定在白金34的板上。
如5(e)所示，在氟硝酸(HF+HNO3)中，去除硅基板32，形成化学反应用储存部11、12、16、17、22。
再有，在形成成为铸型的台状的硅基板32的方法中，也有代替上述图5(a)的说明中在硅30的表面上成长氧化硅膜31，而使用致抗蚀剂形成图案的方法。再有，也有代替上述图5(b)的说明中的使用氟酸(HF)的蚀刻，用把六氟化硫磺做成蚀刻气体的RIE法(活性离子蚀刻法Reactive Ion Etching)蚀刻硅表面的方法。但是，其后，如上述图5(d)所示，要继续用热丝CVD法成长金刚石33。
产业上的可利用性
如上所述，在本发明中，由于用金刚石基板做化学反应用微型片的基板，所以对所有化学物质具有高耐蚀刻性，与玻璃基板不同，可以在不受化学物质种类制约的情况下在微小空间内进行多种实验。
另外，在金刚石基板上，由于设置与化学反应储存部垂直连通连结的垂直连通路，在连通连结部分上安装开关阀，所以，可以形成立体的实验设备，在紧凑的空间内可以进行更多样的实验。
再有，由于金刚石基板有良好的热传导性，所以可以通过在与化学反应储存部对应的位置上安装珀耳帖元件等的加热·冷却机构，提高反应速度，可以有效地进行实验。

Claims (3)

1.一种化学反应用微型片，其特征在于，在微小尺寸的金刚石基板的表面上，形成由多个化学反应储存部和连通连结该化学反应储存部的沟构成的水平连通路。
2.如权利要求1所述的化学反应用微型片，其特征在于，在上述金刚石基板上设置与上述化学反应储存部垂直连通连结的贯通孔构成的垂直连通路，在连通连结部上安装开关阀。
3.如权利要求1或2所示的化学反应用微型片，其特征在于，沿上述化学反应储存部的周围或者底面上安装加热·冷却机构。
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JP4316877B2 (ja) 2000-11-29 2009-08-19 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング 超小型構成要素の温度制御装置
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WO2000048724A1 (fr) 2000-08-24
US6525343B1 (en) 2003-02-25
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