CN1332405C - Negative temperature coefficient thermosensitive resistance material and its producing method - Google Patents
Negative temperature coefficient thermosensitive resistance material and its producing method Download PDFInfo
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- CN1332405C CN1332405C CNB2004100553720A CN200410055372A CN1332405C CN 1332405 C CN1332405 C CN 1332405C CN B2004100553720 A CNB2004100553720 A CN B2004100553720A CN 200410055372 A CN200410055372 A CN 200410055372A CN 1332405 C CN1332405 C CN 1332405C
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Abstract
The present invention relates to a negative temperature coefficient thermosensitive resistance material and a preparation method thereof. Essential components of the present invention take nitrates of manganese, nickel, magnesium and aluminum as raw materials and adopt an improved liquid phase coprecipitation method, so the present invention can repeatedly produce negative temperature coefficient thermosensitive resistance materials via industrialization batches. The present invention improves agglomeration phenomenon of deposit particles via strictly controlling a pH value, the concentration and the temperature of a coprecipitation reaction and moulded surfactant. With the dewatering deposit of anhydrous alcohol and the decomposition time control, dispersed uniform nano powder is prepared, and the powder is manufactured into the negative temperature coefficient thermosensitive resistance ceramic material after prepressing formed and sintered. The thermosensitive resistance material prepared by the present invention has the characteristics of high stability, good consistency and good repeatability. Negative temperature coefficient thermosensitive resistance elements manufactured via glass seal or epoxy resin seal have the characteristics of high stability, good interchange ability, high reliability and small volume, and the elements are suitable for the temperature measurement and control and the line compensation of small electric appliances, air conditioners, etc.
Description
Technical field
The present invention relates to a kind of negative temperature coefficient heat-sensitive resistance material and manufacture method thereof.
Background technology
Negative temperature coefficient (NTC) heat-sensitive semiconductive ceramic is a kind of as meticulous functional ceramic, its microstructure and macro properties such as mechanics, electricity, the characteristic that is decided by powder material to a great extent is as size, the shape of granularity, the uniformity and chemical composition etc.In recent years, the IT industry high speed development, automobile and household appliances are had higher requirement to the consistency and the reliability of NTC thermistor, and in order to produce high-quality NTC thermosensitive products, one of its key will realize ultrapure, the ultra-fine and homogenizing of powder material exactly.
The present invention is with Chinese patent CN96122178X, CN961221801, CN961221771, CN961221798, CN961221763, CN971223637, CN001313681 etc. are the major technique background, compare with the past similar inventions, and difference of the present invention is the following aspects, at first the present invention has adopted different material prescriptions and manufacture method, especially the material that adopts prescription of the same race to make, because of its stable performance, material constant B value is subjected to the influence of package temperature hardly, different component structure designs be can adopt, two kinds of different resistances and application obtained.Secondly, the present invention has accurately controlled the pH value condition of coprecipitation reaction, makes each metal ion species loss concentration minimum after the precipitation reaction to have reached the purpose that each component chemical of accurate control is measured ratio.The present invention has also adopted different surfactants in improved coprecipitation, suppressed the formation of reuniting in the precipitation process effectively.In addition, the present invention selects alcohol solvent washing coprecipitate to remove adsorbed water and chemistry and physics water of coordination, has effectively suppressed the generation of hard agglomeration in the dry run.
The present invention has prepared homodisperse nano-powder by pH value, temperature, reactant concentration and the interpolation proper amount of surfactant of Comprehensive Control coprecipitation reaction, has improved repeatability, consistency and the stability of thermistor material greatly.In the batch process of NTC thermistor element, adopt the present invention, improved rate of finished products, interchangeability, stability and the reliability of thermistor element greatly, wherein the element rate of finished products of resistance 1% precision is brought up to 35%-50% from traditional handicraft less than 20%.
Summary of the invention
The object of the invention is, develops a kind of material constant B of function admirable
25/50=4100 ± 1%, resistance R
25 ℃=(50-100) K Ω and material constant B
25/50=4100 ± 1%, resistance R
25 ℃=(15-25) K Ω, the resistance consistency is the coefficient heat-sensitive resistance material and the manufacture method thereof of ± 3% subzero temperature, its Main Ingredients and Appearance is that the nitrate with manganese, nickel, magnesium, aluminium is raw material, adopts improved liquid-phase coprecipitation, can industrialized batch duplication of production NTC thermistor material.PH value, reactant concentration, reaction temperature by strictness control coprecipitation reaction, and coupling adds the nonionic surface active agent polyethylene glycol (PEG) of sized molecules amount, improved the agglomeration of precipitate particles, by the temperature and time of absolute ethyl alcohol dehydration lees with control decomposition, pre-burning, made finely dispersed nano-powder, with the powder pre-molding, etc. make the NTC thermistor ceramic material behind static pressure and the sintering.Adopt the thermistor material of the present invention's preparation to have the characteristics of good stability, high conformity, good reproducibility, useable glass sealing or epoxy sealing are made the NTC thermistor element, product has good stability, interchangeability is good, reliability is high and volume is little characteristics, is applicable to temperature survey, control and the line build-out of small household appliances, air-conditioning etc.
A kind of negative temperature coefficient heat-sensitive resistance material of the present invention and manufacture method thereof, this thermistor material are to be that raw material is made with the nitrate of analyzing pure manganese, nickel, magnesium, aluminium, and wherein each component molar percentage is:
Manganese: nickel: magnesium: aluminium=35-75: 5-20: 15-30: 5-15;
Adopt and to analyze pure manganese earlier, nickel, magnesium, the nitrate of aluminium is that raw material is mixed with the ion mixed liquor, dispose precipitant solution with carbonic hydroammonium again, use the ammoniacal liquor adjust pH, add surfactant, in with ion mixed liquor adding precipitation reagent, make it to take place coprecipitation reaction, wash sediment with deionized water again, with the absolute ethyl alcohol suction filtration that dewaters, oven dry obtains the predecessor powder, again with the predecessor powder through grinding, thermal decomposition, pre-burning, after pre-molding is green compact, carry out isostatic cool pressing, high temperature sintering promptly gets the coefficient thermistor ceramic material of subzero temperature, again ceramic material is made chip through conventional technology, adopting the low temperature glass packaging technology to make the thermistor parameter chip is B
25/50=4100 ± 1%, R
25 ℃=50-100K Ω ± 3%; Adopting epoxy sealing technology to make the thermistor parameter chip is B
25/50=4100 ± 1%, R
25 ℃=15-25K Ω ± 3%.
The manufacture method of negative temperature coefficient heat-sensitive resistance material follows these steps to carry out:
A, be the ion mixed solution that raw material is made into 1.0-1.5M with the nitrate of analyzing pure manganese, nickel, magnesium, aluminium;
B, to analyze the precipitant solution of pure carbonic hydroammonium preparation 1.5-2.0M, with ammoniacal liquor regulator solution pH value is 7.0-8.0, and the surfactant that adds percentage by weight 1-5% molecular weight polyethylene glycol simultaneously and be 400-1500 and molecular weight polyethylene glycol and be 1500-5000 is in precipitation reagent;
C, when reaction temperature is 30-40 ℃, under vigorous stirring, the ion mixed liquor evenly added makes it to take place coprecipitation reaction in the precipitation reagent;
D, coprecipitation reaction fully after, wash sediment 3-5 time with deionized water, and, obtain the predecessor powder after the oven dry with the absolute ethyl alcohol suction filtration that dewaters;
After e, predecessor powder grind, through 400-500 ℃ of thermal decomposition 2-5h, 650-750 ℃ of pre-burning 2-5h;
The f powder carries out isostatic cool pressing after pre-molding is made a living badly, pressure is 2.0-4.0MPa/cm
2, at 1150-1200 ℃ of high temperature sintering 2h, make the negative tempperature coefficient thermistor ceramic material then;
G, ceramic material is cut into slices through conventional technology, two sides blackening Ag electrode, scribing promptly gets chip;
H, chip is adopted the low temperature glass packaging technology, temperature is controlled in the 580-600 ℃ of scope, and the glass packaging time is 15-25min, and the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=50-100K Ω ± 3%;
I, chip is adopted epoxy sealing technology, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=15-25K Ω ± 3%.
The present invention is by the suitable coprecipitation technology condition of control, can make the negative temperature coefficient that average particle size particle size is 30-50nm (NTC) nano-powder, powder granularity is even, and is better dispersed, through suitable calcining and high temperature sintering, prepared the NTC thermal sensitive ceramic material of function admirable.
Negative temperature coefficient heat-sensitive resistance material of the present invention and manufacture method thereof have original solution in the following areas:
(1) because during different pH value, after the precipitation reaction fully, the loss concentration of mother liquor of precipitation of ammonium intermediate ion has a great difference, the pH value of therefore necessary strict control coprecipitation reaction, the present invention is by being controlled at the pH value in the 7.0-8.0 scope, make each metal ion species loss concentration minimum to have reached the purpose that each component chemical of accurate control is measured ratio, improved repeatability, consistency and the stability of thermistor material greatly.
(2) to adopt the sized molecules amount be that polyethylene glycol (PEG) surfactants of 400 to 5000 couplings substitute conventional emulsifying agents in the present invention, significantly improved the surface state of aggregate.In precipitation process, polyethylene glycol (PEG) molecular weight that adds percentage by weight 1-5% simultaneously is that 400-1500 and polyethylene glycol (PEG) molecular weight make powder evenly disperse for the 1500-5000 surfactant, reduced sintering temperature, the powder sintering function admirable, the B value of material, the consistency of resistance also improve a lot.This is because an amount of introducing of small-molecular weight molecular weight polyethylene glycol 400-1500 can improve the viscosity of solution, hindered the vigorous reaction of metal ion and precipitation reagent, increase the coagulation time, make macromolecule molecular weight polyethylene glycol 1500-5000 have adequate time to be adsorbed on the surface of micelle, strengthen the uniformly dispersed and steric effect of solution system, reached the purpose that control is reunited.
(3) solution concentration is very little to the size influence of the B value of material and resistance, but their consistency is still had considerable influence.It is 1.0-1.5M that obtain solution of the present invention is selected concentration, and the powder granularity that obtains disperses, uniformity is better, and average particle size particle size is 30-50nm, and the sintering character of powder is better, and the B value of material and the consistency of resistance are better.
(4) the present invention selects alcohol solvent washing coprecipitate to remove adsorbed water and chemistry and physics water of coordination (or OH in order to prevent the formation of hard agglomeration in the dry run
-), to eliminate chemical bond OH
-The effect of hydrogen bond between the group.Because when decentralized medium is ethanol, because the coalescent performance that reduces to have improved particle of capillary force in the dry run, can form soft-agglomeratedly, and soft-agglomeratedly in waiting static pressure process, can eliminate, thereby effectively suppress the generation of hard agglomeration.
(5) unique distinction of material prescription is that also material constant B value is subjected to the influence of package temperature hardly among the present invention, and stability is high.Adopt the thermistor material of the present invention's preparation, when chip was adopted the low temperature glass packaging technology, its chip size should be at the volume=length of side * length of side * thickness, 0.4＜length of side＜0.55mm, and in 0.2＜thickness＜0.28mm scope, electrical parameter is B
25/50=4100 ± 1%, R
25 ℃=(50-100) K Ω ± 3%.When chip was adopted epoxy sealing technology, its chip size should be at the volume=length of side * length of side * thickness, 1.0＜length of side＜1.4mm, and in 0.3＜thickness＜0.4mm scope, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=15-25K Ω ± 3%.
(6) in the batch process of NTC thermistor element, adopt the present invention, can greatly improve rate of finished products, interchangeability, stability and the reliability of thermistor element, wherein the rate of finished products of resistance 1% precision element from traditional handicraft less than 20% 35-50% that brings up to technology of the present invention.
Embodiment
Embodiment 1
A, to analyze pure manganese nitrate, nickel nitrate, magnesium nitrate, aluminum nitrates with 3 moles be the ion mixed solution that raw material is made into 1.0M, and wherein each component molar percentage is:
Manganese: nickel: magnesium: aluminium=35: 20: 30: 5-15
B, with 8 moles of precipitant solution of analyzing pure carbonic hydroammonium preparation 1.5M, with ammoniacal liquor regulator solution pH value is 7.0, adds percentage by weight 0.5% molecular weight polyethylene glycol simultaneously and be 400 and 0.5% molecular weight polyethylene glycol and be 1500 surfactant in precipitation reagent;
C, when reaction temperature is 30 ℃, under vigorous stirring, the ion mixed liquor evenly added makes it to take place coprecipitation reaction in the precipitation reagent;
D, coprecipitation reaction fully after, wash sediment 3 times with deionized water, and, obtain the predecessor powder after the oven dry with the absolute ethyl alcohol suction filtration that dewaters;
After e, predecessor powder grind, through 400 ℃ of thermal decomposition 2h, 650 ℃ of pre-burning 2h;
The f powder carries out isostatic cool pressing after pre-molding is made a living badly, pressure is 2.0MPa/cm
2, at 1150 ℃ of high temperature sintering 2h, make the negative tempperature coefficient thermistor ceramic material then;
G, ceramic material is cut into slices through conventional technology, two sides blackening Ag electrode, scribing promptly gets chip;
H, chip is adopted the low temperature glass packaging technology, temperature is controlled in 580 ℃ of scopes, and the glass packaging time is 15min, and the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=100K Ω ± 3%;
I, chip is adopted epoxy sealing technology, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=25K Ω ± 3%.
This element is applicable to temperature survey, control and the line build-out of small household appliances, air-conditioning etc.
Embodiment 2
A, to analyze pure manganese nitrate, nickel nitrate, magnesium nitrate, aluminum nitrates with 3 moles be the ion mixed solution that raw material is made into 1.4M, and wherein each component molar percentage is:
Manganese: nickel: magnesium: aluminium=75: 5: 15: 5
B, with 8 moles of precipitant solution of analyzing pure carbonic hydroammonium preparation 2.0M, be 7.5 with ammoniacal liquor regulator solution pH value, add percentage by weight 5% molecular weight polyethylene glycol simultaneously and be 1000 and molecular weight polyethylene glycol be that 3000 surfactant is in precipitation reagent;
C, when reaction temperature is 40 ℃, under vigorous stirring, the ion mixed liquor evenly added makes it to take place coprecipitation reaction in the precipitation reagent;
D, coprecipitation reaction fully after, wash sediment 5 times with deionized water, and, obtain the predecessor powder after the oven dry with the absolute ethyl alcohol suction filtration that dewaters;
After e, predecessor powder grind, through 500 ℃ of thermal decomposition 5h, 750 ℃ of pre-burning 5h;
The f powder carries out isostatic cool pressing after pre-molding is made a living badly, pressure is 4.0MPa/cm
2, at 1200 ℃ of high temperature sintering 2h, make the negative tempperature coefficient thermistor ceramic material then;
G, ceramic material is cut into slices through conventional technology, two sides blackening Ag electrode, scribing promptly gets chip;
H, chip is adopted the low temperature glass packaging technology, temperature is controlled in 600 ℃ of scopes, and the glass packaging time is 20min, and the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=50K Ω ± 3%;
I, chip is adopted epoxy sealing technology, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=15K Ω ± 3%.
This element is applicable to temperature survey, control and the line build-out of small household appliances, air-conditioning etc.
Embodiment 3
A, to analyze pure manganese nitrate, nickel nitrate, magnesium nitrate, aluminum nitrates with 3 moles be the ion mixed solution that raw material is made into 1.5M, and wherein each component molar percentage is:
Manganese: nickel: magnesium: aluminium=50: 15: 25: 10
B, with 8 moles of precipitant solution of analyzing pure carbonic hydroammonium preparation 1.7M, be 8.0 with ammoniacal liquor regulator solution pH value, add percentage by weight 5% molecular weight polyethylene glycol simultaneously and be 1500 and molecular weight polyethylene glycol be that 5000 surfactant is in precipitation reagent;
C, when reaction temperature is 35 ℃, under vigorous stirring, the ion mixed liquor evenly added makes it to take place coprecipitation reaction in the precipitation reagent;
D, coprecipitation reaction fully after, wash sediment 4 times with deionized water, and, obtain the predecessor powder after the oven dry with the absolute ethyl alcohol suction filtration that dewaters;
After e, predecessor powder grind, through 4,700 ℃ of pre-burning 4h of 450 ℃ of thermal decompositions;
The f powder carries out isostatic cool pressing after pre-molding is made a living badly, pressure is 3.0MPa/cm
2, at 1170 ℃ of high temperature sintering 2h, make the negative tempperature coefficient thermistor ceramic material then;
G, ceramic material is cut into slices through conventional technology, two sides blackening Ag electrode, scribing promptly gets chip;
H, chip is adopted the low temperature glass packaging technology, temperature is controlled in 590 ℃ of scopes, and the glass packaging time is 18min, and the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=80K Ω ± 3%;
I, chip is adopted epoxy sealing technology, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=23K Ω ± 3%.
This element is applicable to temperature survey, control and the line build-out of small household appliances, air-conditioning etc.
Embodiment 4
A, to analyze pure manganese nitrate, nickel nitrate, magnesium nitrate, aluminum nitrates with 3 moles be the ion mixed solution that raw material is made into 1.3M, and wherein each component molar percentage is:
Manganese: nickel: magnesium: aluminium=60: 10: 20: 10;
B, with 8 moles of precipitant solution of analyzing pure carbonic hydroammonium preparation 1.8M, be 7.8 with ammoniacal liquor regulator solution pH value, add percentage by weight 5% molecular weight polyethylene glycol simultaneously and be 800 and molecular weight polyethylene glycol be that 2500 surfactant is in precipitation reagent;
C, when reaction temperature is 40 ℃, under vigorous stirring, the ion mixed liquor evenly added makes it to take place coprecipitation reaction in the precipitation reagent;
D, coprecipitation reaction fully after, wash sediment 4 times with deionized water, and, obtain the predecessor powder after the oven dry with the absolute ethyl alcohol suction filtration that dewaters;
After e, predecessor powder grind, through 480 ℃ of thermal decomposition 3h, 740 ℃ of pre-burning 4h;
The f powder carries out isostatic cool pressing after pre-molding is made a living badly, pressure is 3.5MPa/cm
2, at 1200 ℃ of high temperature sintering 2h, make the negative tempperature coefficient thermistor ceramic material then;
G, ceramic material is cut into slices through conventional technology, two sides blackening Ag electrode, scribing promptly gets chip;
H, chip is adopted the low temperature glass packaging technology, temperature is controlled in 580 ℃ of scopes, and the glass packaging time is 20min, and the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=90K Ω ± 3%;
I, chip is adopted epoxy sealing technology, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=20K Ω ± 3%.
This element is applicable to temperature survey, control and the line build-out of small household appliances, air-conditioning etc.
Claims (2)
1, a kind of negative temperature coefficient heat-sensitive resistance material is characterized in that this thermistor material is is that raw material is made with the nitrate of analyzing pure manganese, nickel, magnesium, aluminium, and wherein each component molar percentage is:
Manganese: nickel: magnesium: aluminium=35-75: 5-20: 15-30: 5-15;
Adopt and to analyze pure manganese earlier, nickel, magnesium, the nitrate of aluminium is that raw material is mixed with the ion mixed liquor, dispose precipitant solution with carbonic hydroammonium again, use the ammoniacal liquor adjust pH, add surfactant, in with ion mixed liquor adding precipitation reagent, make it to take place coprecipitation reaction, wash sediment with deionized water again, with the absolute ethyl alcohol suction filtration that dewaters, oven dry obtains the predecessor powder, again with the predecessor powder through grinding, thermal decomposition, pre-burning, after pre-molding is green compact, carry out isostatic cool pressing, high temperature sintering promptly gets the negative tempperature coefficient thermistor ceramic material, again ceramic material is made chip through conventional technology, adopting the low temperature glass packaging technology to make the thermistor parameter chip is B
25/50=4100 ± 1%, R
25 ℃=50-100K Ω ± 3%; Adopting epoxy sealing technology to make the thermistor parameter chip is B
25/50=4100 ± 1%, R
25 ℃=15-25K Ω ± 3%.
2, the manufacture method of a kind of negative temperature coefficient heat-sensitive resistance material according to claim 1 is characterized in that following these steps to carrying out:
A, be the ion mixed solution that raw material is made into 1.0-1.5M with the nitrate of analyzing pure manganese, nickel, magnesium, aluminium;
B, to analyze the precipitant solution of pure carbonic hydroammonium preparation 1.5-2.0M, be 7.0-8.0 with ammoniacal liquor regulator solution pH value; The surfactant that adds percentage by weight 1-5% simultaneously is in precipitation reagent, and activating agent is that the polyethylene glycol of 400-1500 and polyethylene glycol that molecular weight is 1500-5000 are formed by molecular weight;
C, when reaction temperature is 30-40 ℃, under vigorous stirring, the ion mixed liquor evenly added makes it to take place coprecipitation reaction in the precipitation reagent;
D, coprecipitation reaction fully after, wash sediment 3-5 time with deionized water, and, obtain the predecessor powder after the oven dry with the absolute ethyl alcohol suction filtration that dewaters;
After e, predecessor powder grind, through 400-500 ℃ of thermal decomposition 2-5h, 650-750 ℃ of pre-burning 2-5h;
The f powder carries out isostatic cool pressing after pre-molding is made a living badly, pressure is 2.0-4.0MPa/cm
2, at 1150-1200 ℃ of high temperature sintering 2h, make the negative tempperature coefficient thermistor ceramic material then;
G, ceramic material is cut into slices through conventional technology, two sides blackening Ag electrode, scribing promptly gets chip;
H, chip is adopted the low temperature glass packaging technology, temperature is controlled in the 580-600 ℃ of scope, and the glass packaging time is 15-25min, and the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=50-100K Ω ± 3%;
I, chip is adopted epoxy sealing technology, the thermistor parameter that makes is B
25/50=4100 ± 1%, R
25 ℃=15-25K Ω ± 3%.
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Families Citing this family (5)
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| CN102924064B (en) * | 2012-11-23 | 2014-04-02 | 江苏聚盛电子科技有限公司 | Wide-temperature range NTC thermosensitive ceramic material and preparation method thereof |
| CN104609873B (en) * | 2015-02-01 | 2017-01-25 | 唐山市国亮特殊耐火材料有限公司 | Preparation method of magnesium oxide-nickel oxide-titanium dioxide composite material |
| CN108329015B (en) * | 2016-05-06 | 2021-02-05 | 中南大学 | Doped modified nickel oxide-based NTC (negative temperature coefficient) thermistor material and preparation method thereof |
| CN107473715B (en) * | 2017-09-27 | 2020-11-20 | 深圳市特普生传感有限公司 | Ternary system NTC thermistor material and manufacturing method thereof |
| JP7268393B2 (en) | 2019-02-22 | 2023-05-08 | 三菱マテリアル株式会社 | Thermistor manufacturing method |
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| US5036027A (en) * | 1989-03-22 | 1991-07-30 | Murata Manufacturing Co., Ltd. | Resistive paste and resistor material therefor |
| JPH05234705A (en) * | 1992-02-19 | 1993-09-10 | Murata Mfg Co Ltd | Thermistor element with positive temperature coefficient |
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| CN1185634A (en) * | 1996-12-14 | 1998-06-24 | 中国科学院新疆物理研究所 | Oxidate semi-conductor thermosensitive resistance and mfg. method thereof |
| CN1185632A (en) * | 1996-12-14 | 1998-06-24 | 中国科学院新疆物理研究所 | Oxidate semi-conductor thermosensitive resistance and mfg. method thereof |
| CN1299139A (en) * | 2000-11-01 | 2001-06-13 | 中国科学院新疆物理研究所 | Thermosensitive oxide resistor material |
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|---|---|---|---|---|
| US5036027A (en) * | 1989-03-22 | 1991-07-30 | Murata Manufacturing Co., Ltd. | Resistive paste and resistor material therefor |
| JPH05234705A (en) * | 1992-02-19 | 1993-09-10 | Murata Mfg Co Ltd | Thermistor element with positive temperature coefficient |
| CN1185638A (en) * | 1996-12-14 | 1998-06-24 | 中国科学院新疆物理研究所 | Oxidate semi-conductor thermosensitive resistance and mfg. method thereof |
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