CN1332219A - Fine abrasive and its prepn process - Google Patents

Fine abrasive and its prepn process Download PDF

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Publication number
CN1332219A
CN1332219A CN 01130804 CN01130804A CN1332219A CN 1332219 A CN1332219 A CN 1332219A CN 01130804 CN01130804 CN 01130804 CN 01130804 A CN01130804 A CN 01130804A CN 1332219 A CN1332219 A CN 1332219A
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agent
fine abrasive
nano
diamond powder
abrasive agent
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CN 01130804
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刘麒荣
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Abstract

The fine abrasive for polishing malgnetic head of computer consists of: nanometer level diamond powder 0.05-0.5 %, non-ionic suspension dispersant 0.05-15%, mildewproofing germicide 0.02-0.20 %, and light mineral oil 79.8-99.88 %. It is prepared through the processes including grinding diamond into homogeneous fine powder of 5-6 nm size mechanically; drying the nanometer level diamond powder; adding non-ionic suspension dispersant to diamond powder, heating, mixing, mixing with mineral oil and adding pH regulator, adding mildewproofing germicide and antioxidant. The product of the present invention may be used in polishing magentic head of computer to roughness of 0.4-4 A without scratch.

Description

Fine abrasive agent and preparation technology thereof
Technical field
The present invention relates to a kind of ultraprecise processing and surfacing technical field, specifically is agent of a kind of nano level fine abrasive and preparation technology thereof.
Background technology
Along with the appearance of micro-nano electric mechanical (MEMS and NEMS), the microfabrication of device develops towards the direction of extraordinary ultraprecise processing, and the degree that grinding technique has developed into the superfinish processing of nanometer scale could satisfy the needs of mechanotronic.This technology is specially adapted to the surface finishing processing of optics, precision equipment and computer read-write head.Mill section at present commonly used makes abrasive and can not satisfy the superlinishing needs, and as on the computer magnetic head polishing technology, because the raising of hard disc of computer density is very surprising, disk/head gap has been approached 10nm, to 100Gb/in 2Compact disk head surface roughness must reduce to the flying height that the 1-2 dust just can support 5nm.Therefore, the surface finish of magnetic head is made its roughness reduce to nano level even dust level be the development computer industry must development method.Nowadays, domestic and international existing computer magnetic head polishing fluid mostly adopt particle size at the solid powder of micron dimension as abrasive material, it be scattered in be used as the magnetic head polishing fluid in the petroleum fractions.But the polishing effect of this magnetic head polishing fluid is not satisfactory, surfaceness after the polishing is greater than 5 dusts, there are cut and particle after the magnetic head polishing, influence head surface coating diamond-like film (DLC), sometimes the computer magnetic head that height is contained the cobalt amount uses these polishing fluids that computer magnetic head is corroded, and product store can not be too of a specified duration, planktonic organism can appear, influence the quality and the outward appearance of polishing fluid, and limited the development of computer industry.
Summary of the invention
Purpose of the present invention overcomes the deficiency of above technology existence and a kind of industrial fine abrasive agent that needs of superfinishing that the product surface roughness can be reduced to below 4 dusts is provided, can be used for the finishing polish of computer magnetic head, head surface no marking and particle after the polishing, surfaceness are 0.4~4 dust.
Another object of the present invention provides a kind of preparation technology of fine abrasive agent.
The object of the present invention is achieved like this: a kind of fine abrasive agent and preparation technology thereof, its fine abrasive agent
(1) component and weight percent are as follows:
A, nano-diamond powder 0.05%-5%
B, non-ionic type suspension dispersive agent 0.05%-15%
C, antimildew disinfectant 0.02%-0.20%
D, light mineral oil 79.8%-99.88%
In above-mentioned, described its nano-diamond powder be shaped as sphere or the rhombus that detonation forms, through strict screening, size distribution is very even, mean sizes is that 5-6nm accounts for more than 90%; Described non-ionic type suspension dispersive agent can be long chain aliphatic alcohol polyoxyethylene groups ether and their boric acid ester and the phosphoric acid ester of 8-12 with alkylphenol-polyethenoxy base ether (alkylphenol is phenol, cresylol, naphthols and dodecane phenol) and carbon number; Viscosity was 2~10mm when described light mineral oil can adopt 40 ℃ 2C such as the superfine white oil of/s, spindle oil, kerosene, raw gasline, sherwood oil, petroleum naphtha 12Following mineral oil; Described antimildew disinfectant can adopt organic boron such as boronation triethanolamine oleate, boronation oleic acid diethanolamine, boronation lauric acid trolamine etc., and sterilization prevents microorganism growth, keeps the balance of nanometer burnishing liquid, obtains the good suspension of dispersion stabilization.
Can add the oxidation inhibitor of component gross weight 0.02%-0.5% in the above-mentioned abrasive, prevent oil oxidation, prolong the oil product shelf-time, oxidation inhibitor can adopt 2, the 6-di-tertiary butyl methyl phenol.
(2) preparation technology is as follows:
1) diamond mechanical mill is become uniformed powder, ultrasonic dispersing makes its weight percent concentration in deionized water
<1%, add the pH value conditioning agent, the pH value that makes the Nano diamond amidin is 6.0-8.5, classification is purified and is obtained then
Narrow distribution pure diamond powder, particle diameter distribution 5-6nm;
2) when relative air humidity>85%, add the non-ionic type suspended dispersed again after the oven dry of purifying nano diamond powder
Agent, heat drying can prevent the gathering of nanoparticle;
3) the non-ionic type suspension dispersive agent is joined in the pure Nano diamond powder, add lightweight again after the heating hybrid reaction
Mineral oil, ultrasonic dispersing mixes, and adds the pH value conditioning agent, is prepared into the suspension of pH value at 6.0-8.5,
Promptly make the fine abrasive agent;
4) in the fine abrasive agent that makes pH value 6.0-8.5, add antimildew disinfectant and oxidation inhibitor.
Among the above-mentioned preparation technology, the pH value conditioning agent adopts acetic acid, trolamine or ammoniacal liquor.
The gordian technique of nano-milled dose of preparation is the Nano diamond suspended dispersed.Nano-diamond powder is obtained by the detonation method,
Its surface contain a large amount of hydrophilic radical-OH, COOH and-NH 2, the Nano diamond particle surface has one deck hydrogen bond knot
The water layer that closes, the polyoxyethylene chain in polyoxyethylene groups ether and the modifier thereof are huge hydrophilic radicals, can highly roll up
Song is shape in the shape of a spiral, and absorption or hydrogen bond action are in the surface of Nano diamond, and oil-soluble group alkyl R adsorbs towards lightweight oil,
The carbon number of R gene and the carbon number of lightweight oil are complementary and can produce maximum dispersion effect, dispersion medium lightweight oil of the present invention
Carbon number be mixture below 12, the C number of the alkyl R of suspension dispersive agent is selected 8-12, both carbon numbers are complementary,
Produce good dispersion effect, simultaneously, the huge hydrophilic radical of polyoxyethylene groups ether forms good three-dimensional energy barrier, makes
The Van der Waals force of intergranular reduces, and has stoped the close again and merging of disperse particles, so polyoxyethylene groups ether and modification thereof
Thing is the suspension dispersive agent of a class excellent property.
The Nano diamond suspension particle distribution that the present invention prepares is even, and dispersion stabilization is good, and the scene is used for meter
The super finishing polish of calculation machine magnetic head, the surfaceness of surveying after polishing with atomic force microscope (AFM) bolt is the 0.1-4 dust,
The surface is polishing very, and 100,000 times of electron microscopes are observed the particle that head surface does not observe cut yet and inlays down.Nanometer
Diamond is a class superhard material, and kernel is solid, and is spherical and diamond structure and deposit, and plays short in the surface grinding process
Mill and honing effect; Non-ionic type suspension dispersive agent and light mineral oil play sufficient cooling and lubricating work in the polishing process
With, computer magnetic head shows no sign of scorching hot vestige in polishing process; Simultaneously, suspension dispersive agent has been brought into play sufficient cleaning
Effect, when polishing, little bits are constantly taken away with the polishing campaign, and the computer magnetic head surface is at the short mill of Nano diamond like this
Under honing, the grinding agent of importing and abrasive dust make the computer magnetic head surface reach the processing essence of nanometer and dust level at short notice
Degree.
By the product of the present invention's preparation, its quality examination data see Table 1.
The specific embodiment
Below in conjunction with embodiment, be described in further detail the present invention.
Embodiment 1
Fine abrasive agent component and weight are as follows:
Nano-diamond powder 0.1g
Nonyl pheno base ether-10 1.0g
Boronation triethanolamine oleate 0.1g
Naphtha 98.8g
Its preparation technology is as follows:
(1) diamond machinery is pulverized body, ultrasonic wave is scattered in the water, makes its weight percent concentration<0.5%, adds Enter acetic acid pH value conditioning agent, making the pH value of Nano diamond amidin is 6.5-8.5, and processing obtains nanometer then The diamond powder;
(2) at relative air humidity>85%, with pure nano-diamond powder oven dry, take by weighing pure nano-diamond powder 0.1g, Add nonionic surface active agent---Nonyl pheno base ether-10 1.0g, heating is fully reacted it, adds closely boiling Naphtha 98.8g, add 0.1g boronation triethanolamine oleate ultrasonic wave and disperse to add after 20 minutes an amount of pH value conditioning agent vinegar It is 6.0-8.5 suspension that acid or triethanolamine make the pH value that finally makes product, i.e. fine abrasive agent. With present embodiment 1 The grinding agent that makes is used for grinding computer magnetic head, and the computer magnetic head surface roughness Ra of grinding out is 0.30nm.
Embodiment 2
Fine gtinding agent component and weight are as follows:
Nano-diamond powder 0.4g
Polyoxyethylene groups octylphenol ether-10 1.2g
Boronation oleic acid diethanol amine 0.1g
Benzinum 98.3g
Its preparation technology is as follows:
(1) makes pure nano-diamond powder with embodiment 1 (1);
(2) when relative air humidity<85 ℃, get pure nano-diamond powder 0.4g, add the polyoxyethylene groups octylphenol ether-10 1.2g fully react the two, add the benzinum 98.3g of nearly boiling, and adding 0.1g boronation oleic acid diethanol amine is continuous Stir, ultrasonic wave disperseed 30 minutes, added acetic acid pH value conditioning agent, made pH value and was neutral fine gtinding agent.
Quartz glass is ground in the fine gtinding agent that present embodiment 2 makes, and its rough surface Ra is 1.0 dusts.
Embodiment 3
Fine gtinding agent component and weight are as follows:
Nano-diamond powder 5g
Nonyl paracresol polyoxyethylene ether-10 15g
Boronation triethanolamine oleate 0.1g
7 #Bobbin oil 79.9g
Its preparation technology is as follows:
(1) method with embodiment 1 (1) gets pure nano-diamond powder;
(2) when relative air humidity<85%, get pure nano-diamond powder 5g, add nonyl paracresol polyoxyethylene ether-10 15g, heating is fully reacted the two, adding closely rises rise 7#Bobbin oil 79.9g adds 0.1g boronation oleic acid three ethanol Amine, ultrasonic wave disperseed 30 minutes, added triethanolamine pH value conditioning agent, and ultrasonic wave disperseed 15 minutes again, made pH value It is 8 suspension---fine abrasive agent. This is implemented 3 fine gtinding agent be used for the grinding of X ray reflection mirror, grinding is come out Surface roughness Ra is 0.4 dust.
Embodiment 4
Fine gtinding agent component and weight are as follows:
Nano-diamond powder 0.4g
Lauryl alcohol polyoxyethylene ether-10 1.2g
10 #White oil 40g
Benzinum 58.35g
Boronation laurate triethanolamine 0.05g
Its preparation technology is as follows:
(1) method with embodiment 1 (1) makes pure nano-diamond powder;
(2) when relative air humidity>85%, get the nano-diamond powder 0.4g that oven dry is purified, add lauryl alcohol polyoxyethylene groups-10 1.2g and add thermal response, add 10 of nearly boiling#White oil 40g stirs ultrasonic wave and disperses, and adds benzinum 58.35g, Ultrasonic wave disperses again, adds boronation laurate triethanolamine, and ultrasonic wave disperses, and makes suspension---the fine abrasive agent. With superfinishing Grinding agent is used for ceramic grinding, and grinding the surface roughness Ra of coming out is 0.3nm.
Embodiment 5
Fine abrasive agent component and weight are as follows:
Nano-diamond powder 2g
Nonyl cresols APEO-10 6g
5 #White oil 91.9g
Boronation oleic acid diethanol amine 0.08g
2,6-DBMP 0.02g
Its preparation technology is as follows:
(1) method with embodiment 1 (1) makes pure nano-diamond powder;
(2) when relative air humidity>85%, claim the nano-diamond powder 2g that oven dry is purified, add nonyl cresols APEO-106g, add thermal response, add 5#White oil 91.9g stirs ultrasonic wave and disperseed 30 minutes, adds then boronation oleic acid Diethanol amine 0.08g, antioxidant 2,6-DBMP 0.02g, the ultrasonic wave decentralized system gets suspension---the fine abrasive agent. Be used for the finishing polish of computer magnetic head, the lapping magnetic heads surface, its surface roughness Ra is 0.08nm.
Embodiment 6
Fine abrasive agent component and weight are as follows:
Nano-diamond powder 0.8g
Nonyl pheno base ether-10 4g
10 #White oil 95.0g
Boronation diethyl alcohol ester 0.18g
Triethanolamine 0.02g
Preparation technology is as follows for base:
(1) makes pure nano-diamond powder with embodiment 1 (1) method;
(2) when relative air humidity>85%, claim oven dry pure nano-diamond powder 0.8g, add the Nonyl pheno base Ether-10 4g adds thermal response, adds 10 white oil 95.0g, and ultrasonic wave disperses under the stirring condition, adds the antimildew disinfectant boronation Diethyl alcohol ester 0.2g adds an amount of triethanolamine again, and ultrasonic wave disperses, and the pH value that makes reaches the superfinishing between 6.0-8.5 Grinding agent. Be used for the smooth grinding of high cobalt computer magnetic head, magnetic head does not corrode, and the head surface roughness Ra that grinds out is 0.25 Nm.
Embodiment 7
Fine abrasive agent component and weight are as follows:
Nano-diamond powder 0.4g
Nonyl pheno base ether-10 borate 1.2g
5 white oil 98.4g
Be used for computer magnetic head and grind, grinding the head surface roughness Ra that comes out is 0.15nm.
Embodiment 8
Fine abrasive agent component and weight are as follows:
Nano-diamond powder 0.4g
Nonyl pheno base ether-10 phosphate 1.2g
Boronation triethanolamine oleate 0.05g
2 white oil 98.35g
Grinding the ceramic surface roughness Ra that comes out is 0.35nm.
Table 1:
Viscosity (40 ℃) mm2/s Proportion Boiling point Water-soluble Outward appearance Flash-point (remaining silent) ℃ Volatile matter The HP value   C 1-   ppb   <  SO 4 2-   ppb   <
 2.0—10.0   0.65~0.89   174℃ Disperse Versicolor light liquids    8℃   85  %  6.0~8.5  1000  1000
In above-described embodiment, the places of origin of raw materials that it adopts:
Nano-diamond powder Shengli Oil Field ring Tonghua geosynthetics factory
Nonionic suspension dispersive agent Shengli Oil Field ring Tonghua geosynthetics factory, auxiliary reagent factory, Shanghai
Antimildew disinfectant Shengli Oil Field ring Tonghua geosynthetics factory
Factory of light mineral oil shanghai refinery
Antioxidant Jinzhou oil six factories

Claims (9)

1, a kind of fine abrasive agent, it is characterized in that: fine abrasive agent component and weight percent are as follows:
A) the nano-diamond powder 0.05%-5%
B) the non-ionic type suspension dispersive agent 0.05%-15%
C) antimildew disinfectant 0.02%-0.2%
D) light mineral oil 79.8%-99.88%
2, fine abrasive agent according to claim 1 is characterized in that: described nano-diamond powder be shaped as sphere or rhombus, even particle distribution, diameter Distribution are 5-6nm.
3, fine abrasive agent according to claim 1 is characterized in that: described non-ionic type suspension dispersive agent employing alkylphenol polyvingl ether, carbon number are 8-12 long chain aliphatic alcohol polyoxyethylene groups ether and boric acid ester or phosphoric acid ester.
4, fine abrasive agent according to claim 1 is characterized in that: viscosity was 2-10mm when described light mineral adopted 40 ℃ 3The mineral oil that 12 carbon such as/s white oil, spindle oil, kerosene, raw gasline, sherwood oil, petroleum naphtha are following.
5, fine abrasive agent according to claim 1 is characterized in that: described antimildew disinfectant adopts organic boron such as boronation triethanolamine oleate, boronation oleic acid diethanolamine, boronation lauric acid trolamine.
6, according to the described fine abrasive agent of one of claim 1 to 5, it is characterized in that: add also in described abrasive that oxidation inhibitor, its add-on are arranged is 0.02%-0.5% of whole component gross weights.
7, fine abrasive agent according to claim 6 is characterized in that: described oxidation inhibitor adopts 2,6 di-tertiary butyl methyl phenol.
8, the preparation technology of a kind of fine abrasive according to claim 1 agent is characterized in that:
1) diamond mechanical mill is become uniformed powder, ultrasonic dispersing is in deionized water, make its weight percent concentration<1%, add the pH value conditioning agent, the pH value that makes the Nano diamond amidin is 6.0-8.5, classification is purified and is obtained narrow distribution pure diamond powder then, material diameter Distribution 5-6nm;
2) when relative air humidity>85%, the preliminary election of purifying nano diamond powder is dried;
3) the non-ionic type suspension dispersive agent is joined in the pure Nano diamond powder, add light mineral oil again after the heating hybrid reaction, ultrasonic dispersing mixes, and adds the pH value conditioning agent, is prepared into the suspension of pH value 6.0-8.5, promptly gets the fine abrasive agent;
4) in the fine abrasive agent that makes pH value 6.0-8.5, add mould inhibitor and oxidation inhibitor.
9, fine abrasive agent preparation technology according to claim 8 is characterized in that: described pH value conditioning agent adopts acetic acid, trolamine or ammoniacal liquor.
CN 01130804 2001-08-23 2001-08-23 Fine abrasive and its prepn process Pending CN1332219A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101831243A (en) * 2010-04-30 2010-09-15 中国计量学院 High-precision non-water-based nano-diamond grinding fluid and preparation method and application thereof
WO2016045536A3 (en) * 2014-09-26 2016-05-19 河南省联合磨料磨具有限公司 Method for preparation of diamond polishing film
CN111518514A (en) * 2020-06-04 2020-08-11 宁波容大光电科技有限公司 Grinding fluid for processing ceramic ferrule and preparation method thereof
CN111690472A (en) * 2020-07-15 2020-09-22 华东理工大学 Anacardol polyoxyethylene ether borate-containing detergent based on waste liquid of amino acid surfactant production and preparation method thereof
CN114806501A (en) * 2022-04-28 2022-07-29 浙江奥首材料科技有限公司 Modified diamond powder, preparation method and application thereof, and polishing solution containing modified diamond powder

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101831243A (en) * 2010-04-30 2010-09-15 中国计量学院 High-precision non-water-based nano-diamond grinding fluid and preparation method and application thereof
WO2016045536A3 (en) * 2014-09-26 2016-05-19 河南省联合磨料磨具有限公司 Method for preparation of diamond polishing film
CN111518514A (en) * 2020-06-04 2020-08-11 宁波容大光电科技有限公司 Grinding fluid for processing ceramic ferrule and preparation method thereof
CN111690472A (en) * 2020-07-15 2020-09-22 华东理工大学 Anacardol polyoxyethylene ether borate-containing detergent based on waste liquid of amino acid surfactant production and preparation method thereof
CN111690472B (en) * 2020-07-15 2021-09-10 华东理工大学 Anacardol polyoxyethylene ether borate-containing detergent based on waste liquid of amino acid surfactant production and preparation method thereof
CN114806501A (en) * 2022-04-28 2022-07-29 浙江奥首材料科技有限公司 Modified diamond powder, preparation method and application thereof, and polishing solution containing modified diamond powder
CN114806501B (en) * 2022-04-28 2023-04-28 浙江奥首材料科技有限公司 Modified diamond powder, preparation method, application and polishing solution containing modified diamond powder

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