CN1332151C - One-piece complaisant precision positioning platform in three degrees of freedom and parallel redundancy degree in single layer - Google Patents
One-piece complaisant precision positioning platform in three degrees of freedom and parallel redundancy degree in single layer Download PDFInfo
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- CN1332151C CN1332151C CNB2004100518271A CN200410051827A CN1332151C CN 1332151 C CN1332151 C CN 1332151C CN B2004100518271 A CNB2004100518271 A CN B2004100518271A CN 200410051827 A CN200410051827 A CN 200410051827A CN 1332151 C CN1332151 C CN 1332151C
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- flexible hinge
- connecting rod
- pedestal
- moving platform
- dirivig member
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Abstract
The present invention discloses a single layer parallel connected three-degree-of-freedom one-piece compliant and precise positioning platform with a degree of redundancy, which comprises a base and a motion platform, wherein the motion platform is connected with the base through four groups of compliant displacement amplifying mechanisms; the four groups of amplifying mechanisms are distributed at the four sides of the motion platform in 90 DEG rotational symmetry. The present invention can achieve positioning accuracy at a nanometer stage; the positioning platform has good operability, which can avoid approaching singular configuration, can effectively solve the problems of input and output couplings, and can improve working flexibility of the positioning platform. The present invention can enlarge a moving range of a worktable by adopting a compliant amplifying mechanism at a secondary or a higher level.
Description
Technical field
The present invention relates to a kind of meek precisively positioning platform, specifically is a kind of the realization along the precision positioning of X, Y direction and around the meek precisively positioning platform with redundancy of the meticulous adjustment of angle of Z axle.
Background technique
At present, precisely locating platform does not have the redundant performance of driving.If moving platform is in unusual position shape, will loses one or several degrees of freedom and reduce the ability of finishing the work.Therefore, can drive the ability to work that input improves worktable, satisfy and avoid near requirements such as unusual position shapes by increasing by one or several.This redundancy precisely locating platform can be optimized operability, improve kinology and dynamics.In addition, existing three-freedom degree precision locating platform generally all exists input, output coupled problem, thereby has influenced operating accuracy, has increased the control difficulty.
Summary of the invention
The objective of the invention is to provides a kind of Redundant Single-Layer Parallel Three Mobility Degree Compliant All-In-One Precision Positioning Platform of novelty at the existing shortcoming of prior art.But this locating platform can be avoided near unusual position shape, optimization operational readiness simultaneously, improve kinology and dynamics, and whole locating platform body is the individual layer integral type, can be processed by a block of material.
For achieving the above object, the present invention has taked following technical proposals:
Redundant Single-Layer Parallel Three Mobility Degree Compliant All-In-One Precision Positioning Platform comprises moving platform 2 and pedestal 1, it is characterized in that adopting between moving platform 2 and the pedestal 1 four groups of displacement amplifying mechanism 9 flexible hinges to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform.
Described displacement amplifying mechanism 9 is by dirivig member 3, and flexible hinge 4,5,6,7 and connecting rod 8 constitute; Be connected by flexible hinge 4 between the dirivig member 3 of displacement amplifying mechanism 9 and the pedestal 1, join by flexible hinge 5 between the connecting rod 8 of dirivig member 3 and enlarger, be connected by flexible hinge 7 between dirivig member 3 and the flexible break 10, connecting rod 8 is connected by another flexible hinge 6 with moving platform 2.
Above-mentioned displacement amplifying mechanism 9 also can be the secondary displacement amplifying mechanism, by dirivig member 3, and flexible hinge 4,5,6,7,11,12, connecting rod 8,13 constitutes; Be connected by flexible hinge 4 between the dirivig member 3 of displacement amplifying mechanism and the pedestal 1, join by flexible hinge 12 between dirivig member 3 and the connecting rod 13, join by flexible hinge 7 between dirivig member 3 and the flexible break 10; Connecting rod 13 joins by flexible hinge 11 with pedestal 1, and connecting rod 13 is connected by flexible hinge 5 with connecting rod 8, and connecting rod 8 is connected by flexible hinge 6 with moving platform 2.
Above-mentioned displacement amplifying mechanism 9 also can be three grades of displacement enlargers, by dirivig member 3, and flexible hinge 4,5,6,7,11,12,14,15, connecting rod 8,13,16 constitutes; Be connected by flexible hinge 4 between the dirivig member 3 of displacement amplifying mechanism and the pedestal 1, join by flexible hinge 12 between dirivig member 3 and the connecting rod 13, join by flexible hinge 7 between dirivig member 3 and the flexible break 10; Connecting rod 13 joins by flexible hinge 11 with pedestal 1, connecting rod 13 is connected by flexible hinge 14 with connecting rod 16, connecting rod 16 is connected by flexible hinge 15 with pedestal 1, and connecting rod 16 is connected by flexible hinge 5 with connecting rod 8, and connecting rod 8 is connected by flexible hinge 6 with moving platform 2.
The input of dirivig member is finished by expansion actuator.
Described displacement amplifying mechanism can be one or more levels enlarger.
Compared with the prior art, the present invention has following beneficial effect:
The present invention has adopted four groups to drive input, and locating platform has only three degree of freedom, this redundant drive has increased the locating platform operability, can satisfy the kinology requirement, can also enlarge the operating range of locating platform by the progression of further increase enlarger; Owing to adopted four groups of flexible hinges, guaranteed transmission of movement no gap, do not have friction, exempt to lubricate, highi degree of accuracy and high stability; Owing to adopted symplex structure, can effectively avoid the coupling effect importing, export, avoid accumulated error, effectively improve the precision of platform; Owing to adopted displacement amplifying mechanism, the extending amount of expansion actuator can be amplified according to multiplying power, can realize that moving platform is in motion in a big way; Because moving platform and pedestal all are integrated on the individual layer integral type, can process by a block of material, realize exempting from assembling.
The present invention can not only reach nano grade positioning precision, but and the operational readiness of whole locating platform body, kinology and dynamics can both obtain very big improvement.The redundancy precisely locating platform can also enlarge the operating range of locating platform when satisfying the kinology requirement, increase its operation flexibility, effectively overcomes input, output coupled problem.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is an another kind of structural representation of the present invention;
Fig. 3 is an another kind of structural representation of the present invention.
Embodiment
The invention will be further described below in conjunction with Figure of description.
As shown in Figure 1, the present invention includes moving platform 2 and pedestal 1, it is characterized in that adopting between moving platform 2 and the pedestal 1 four groups of displacement amplifying mechanism 9 flexible hinges to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform.
Described displacement amplifying mechanism 9 is by dirivig member 3, and flexible hinge 4,5,6,7 and connecting rod 8 constitute; Be connected by flexible hinge 4 between the dirivig member 3 of displacement amplifying mechanism 9 and the pedestal 1, join by flexible hinge 5 between the connecting rod 8 of dirivig member 3 and enlarger, be connected by flexible hinge 7 between dirivig member 3 and the flexible break 10, connecting rod 8 is connected by another flexible hinge 6 with moving platform 2.
The present invention has adopted four groups to drive input, and locating platform has only three degree of freedom, this redundant drive has increased the locating platform operability, can satisfy the kinology requirement, can also enlarge the operating range of locating platform by the progression of further increase enlarger; Owing to adopted four groups of flexible hinges, guaranteed transmission of movement no gap, do not have friction, exempt to lubricate, highi degree of accuracy and high stability; Owing to adopted symplex structure, can effectively avoid the coupling effect importing, export, avoid accumulated error, effectively improve the precision of platform; Owing to adopted displacement amplifying mechanism, the extending amount of expansion actuator can be amplified according to multiplying power, can realize that moving platform is in motion in a big way; Because moving platform and pedestal all are integrated on the individual layer integral type, can process by a block of material, realize exempting from assembling.
The present invention can not only reach nano grade positioning precision, but and the operational readiness of whole locating platform body, kinology and dynamics can both obtain very big improvement.The redundancy precisely locating platform can also enlarge the operating range of locating platform when satisfying the kinology requirement, increase its operation flexibility, effectively overcomes input, output coupled problem.
It is the one-level enlarger that Fig. 1 provides, and in order to increase the range of movement of platform 2, the one-level enlarger among Fig. 1 can be replaced by Fig. 2 and secondary enlarger and three grades of enlargers shown in Figure 3.
As shown in Figure 2, the present invention includes moving platform 2 and pedestal 1, it is characterized in that adopting between moving platform 2 and the pedestal 1 four groups of displacement amplifying mechanism 9 flexible hinges to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform.
Described displacement amplifying mechanism 9 also can be the secondary displacement amplifying mechanism, by dirivig member 3, and flexible hinge 4,5,6,7,11,12, connecting rod 8,13 constitutes; Be connected by flexible hinge 4 between the dirivig member 3 of displacement amplifying mechanism and the pedestal 1, join by flexible hinge 12 between dirivig member 3 and the connecting rod 13, join by flexible hinge 7 between dirivig member 3 and the flexible break 10; Connecting rod 13 joins by flexible hinge 11 with pedestal 1, and connecting rod 13 is connected by flexible hinge 5 with connecting rod 8, and connecting rod 8 is connected by flexible hinge 6 with moving platform 2.
As shown in Figure 3, the present invention includes moving platform 2 and pedestal 1, it is characterized in that adopting between moving platform 2 and the pedestal 1 four groups of displacement amplifying mechanism 9 flexible hinges to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform.
Above-mentioned displacement amplifying mechanism 9 also can be three grades of displacement enlargers, by dirivig member 3, and flexible hinge 4,5,6,7,11,12,14,15, connecting rod 8,13,16 constitutes; Be connected by flexible hinge 4 between the dirivig member 3 of displacement amplifying mechanism and the pedestal 1, join by flexible hinge 12 between dirivig member 3 and the connecting rod 13, join by flexible hinge 7 between dirivig member 3 and the flexible break 10; Connecting rod 13 joins by flexible hinge 11 with pedestal 1, connecting rod 13 is connected by flexible hinge 14 with connecting rod 16, connecting rod 16 is connected by flexible hinge 15 with pedestal 1, and connecting rod 16 is connected by flexible hinge 5 with connecting rod 8, and connecting rod 8 is connected by flexible hinge 6 with moving platform 2.
Claims (3)
1, a kind of Redundant Single-Layer Parallel Three Mobility Degree Compliant All-In-One Precision Positioning Platform comprises moving platform (2) and pedestal (1), it is characterized in that adopting between moving platform (2) and the pedestal (1) four groups of displacement amplifying mechanisms (9) to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform;
Described displacement amplifying mechanism (9) is by dirivig member (3), and flexible hinge (4,5,6,7) and connecting rod (8) constitute; Be connected by flexible hinge (4) between the dirivig member (3) of displacement amplifying mechanism (9) and the pedestal (1), join by flexible hinge (5) between the connecting rod (8) of dirivig member (3) and enlarger, be connected by flexible hinge (7) between dirivig member (3) and the flexible break (10), connecting rod (8) is connected by another flexible hinge (6) with moving platform (2).
2, a kind of Redundant Single-Layer Parallel Three Mobility Degree Compliant All-In-One Precision Positioning Platform comprises moving platform (2) and pedestal (1), it is characterized in that adopting between moving platform (2) and the pedestal (1) four groups of displacement amplifying mechanisms (9) to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform;
Described displacement amplifying mechanism (9) is the secondary displacement amplifying mechanism, by dirivig member (3), flexible hinge (4,5,6,7,11,12), connecting rod (8,13) constitutes: be connected by flexible hinge (4) between the dirivig member of displacement amplifying mechanism (3) and the pedestal (1), join by flexible hinge (12) between dirivig member (3) and the connecting rod (13), join by flexible hinge (7) between dirivig member (3) and the flexible break (10); Connecting rod (13) joins by flexible hinge (11) with pedestal (1), and connecting rod (13) is connected by flexible hinge (5) with connecting rod (8), and connecting rod (8) is connected by flexible hinge (6) with moving platform (2).
3, a kind of Redundant Single-Layer Parallel Three Mobility Degree Compliant All-In-One Precision Positioning Platform comprises moving platform (2) and pedestal (1), it is characterized in that adopting between moving platform (2) and the pedestal (1) four groups of displacement amplifying mechanisms (9) to connect; These four groups of enlargers are four sides that 90 ° of rotations are symmetrically distributed in moving platform;
Described displacement amplifying mechanism (9) is three grades of displacement enlargers, by dirivig member (3), and flexible hinge (4,5,6,7,11,12,14,15), connecting rod (8,13,16) constitutes; Be connected by flexible hinge (4) between the dirivig member of displacement amplifying mechanism (3) and the pedestal (1), join by flexible hinge (12) between dirivig member (3) and the connecting rod (13), join by flexible hinge (7) between dirivig member (3) and the flexible break (10); Connecting rod (13) joins by flexible hinge (11) with pedestal (1), connecting rod (13) is connected by flexible hinge (14) with connecting rod (16), connecting rod (16) is connected by flexible hinge (15) with pedestal (1), connecting rod (16) is connected by flexible hinge (5) with connecting rod (8), and connecting rod (8) is connected by flexible hinge (6) with moving platform (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100518271A CN1332151C (en) | 2004-10-14 | 2004-10-14 | One-piece complaisant precision positioning platform in three degrees of freedom and parallel redundancy degree in single layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100518271A CN1332151C (en) | 2004-10-14 | 2004-10-14 | One-piece complaisant precision positioning platform in three degrees of freedom and parallel redundancy degree in single layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1601171A CN1601171A (en) | 2005-03-30 |
| CN1332151C true CN1332151C (en) | 2007-08-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100518271A Expired - Fee Related CN1332151C (en) | 2004-10-14 | 2004-10-14 | One-piece complaisant precision positioning platform in three degrees of freedom and parallel redundancy degree in single layer |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221123A (en) * | 2011-04-22 | 2011-10-19 | 陕西豪曼机电科技工程有限公司 | Submicron-level positioning accuracy parallel regulating platform and regulating method thereof |
| CN102878394B (en) * | 2012-09-11 | 2014-09-10 | 华南理工大学 | Partially-decoupled plane three-freedom-degree parallel precision positioning platform |
| CN106251910B (en) * | 2016-08-24 | 2019-11-08 | 广东工业大学 | One kind receives mini positioning platform |
| CN107833594B (en) * | 2017-09-13 | 2020-02-21 | 南京航空航天大学 | Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement |
| CN108877872A (en) * | 2018-09-07 | 2018-11-23 | 南京科技职业学院 | A kind of micro- rotating platform |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000075927A (en) * | 1998-08-31 | 2000-03-14 | Olympus Optical Co Ltd | Table mechanism |
| US6346710B1 (en) * | 1998-08-31 | 2002-02-12 | Olympus Optical Co., Ltd. | Stage apparatus including displacement amplifying mechanism |
| CN1376631A (en) * | 2001-12-07 | 2002-10-30 | 清华大学 | Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
| CN2629926Y (en) * | 2003-07-08 | 2004-08-04 | 哈尔滨工业大学博实精密测控有限责任公司 | Three-free-degree precise positioning work bench |
| CN2639852Y (en) * | 2003-09-02 | 2004-09-08 | 辛洪兵 | Displacement enlarging mechanism |
-
2004
- 2004-10-14 CN CNB2004100518271A patent/CN1332151C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000075927A (en) * | 1998-08-31 | 2000-03-14 | Olympus Optical Co Ltd | Table mechanism |
| US6346710B1 (en) * | 1998-08-31 | 2002-02-12 | Olympus Optical Co., Ltd. | Stage apparatus including displacement amplifying mechanism |
| CN1376631A (en) * | 2001-12-07 | 2002-10-30 | 清华大学 | Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
| CN2629926Y (en) * | 2003-07-08 | 2004-08-04 | 哈尔滨工业大学博实精密测控有限责任公司 | Three-free-degree precise positioning work bench |
| CN2639852Y (en) * | 2003-09-02 | 2004-09-08 | 辛洪兵 | Displacement enlarging mechanism |
Non-Patent Citations (4)
| Title |
|---|
| 全柔性微位移放大机构的设计技术研究 于靖军 毕树生 宗光华，航空学报，第25卷第1期 2004 * |
| 基于柔性铰链的微位移工作台性能分析与优化设计 陈时锦 杨元华 孙西华 程凯，机械设计，第21卷第7期 2004 * |
| 超高精度定位系统及线性补偿研究 刘红忠 卢秉恒 丁玉成，李寒松 严乐，西安交通大学学报，第37卷第3期 2003 * |
| 超高精度定位系统及线性补偿研究 刘红忠 卢秉恒 丁玉成，李寒松 严乐，西安交通大学学报，第37卷第3期 2003;基于柔性铰链的微位移工作台性能分析与优化设计 陈时锦 杨元华 孙西华 程凯，机械设计，第21卷第7期 2004;全柔性微位移放大机构的设计技术研究 于靖军 毕树生 宗光华，航空学报，第25卷第1期 2004 * |
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| CN1601171A (en) | 2005-03-30 |
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Assignee: FOLUNGWIN AUTOMATIC EQUIPMENT Co.,Ltd. Assignor: South China University of Technology Contract fulfillment period: 2007.8.30 to 2012.8.31 Contract record no.: 2009440000103 Denomination of invention: One-piece complaisant precision positioning platform in three degrees of freedom and parallel redundancy degree in single layer Granted publication date: 20070815 License type: Exclusive license Record date: 20090108 |
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| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.8.30 TO 2012.8.31; CHANGE OF CONTRACT Name of requester: DONGGUAN CITY KELONGWEI AUTOMATION EQUIPMENT CO., Effective date: 20090108 |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070815 Termination date: 20211014 |