CN1331794C - Rutile phase based TiO2 low radiation filming glass capable of toughening and its technics - Google Patents

Abstract

The present invention provides low emission filming glass. A toughening treatment process can be carried out after filming, and the present invention does not influence the appearance, optical performance and thermal performance. TiO2 of a rutile phase, which is produced by using a double pole pulse power source sputtering technique, is used as a substrate dielectric layer, wherein the substrate dielectric layer is composed of two layers, one layer is provided with titanium dioxide TiO2 which is in a rutile structure and is formed by the deposition of a double pole medium frequency pulse power source, and the other layer is provided with ZnQ. The thickness and the film ingredients of other layers are reasonably selected, and the low emission filming glass which can be thermally processed by high temperature can be produced.

Description

Based on rutile phase TiO 2Radiation coated glass capable of being toughened and technology thereof

Technical field

The present invention relates to adopt the titanium dioxide TiO of bipolar medium-frequency pulse power supply sputter rutile phase ₂, being basic unit's dielectric layer, production can be carried out low radiation coated glass and the production technique thereof that tempering is handled.

Background technology

Low radiation coated glass (claiming LOW-E glass again) is that to be coated with the film that the multiple layer metal that comprises silver layer or other compounds form at glass surface be product.Because silver layer has the characteristic of low-E, low emissivity glass has high transmittance to visible light, and infrared rays is had very high reflectivity, has excellent heat insulation property.

The film layer structure that adopts the vacuum magnetic-control sputtering method to produce common low emissivity glass is generally: glass/basic unit's dielectric layer/silver layer/barrier layer/upper strata dielectric layer.

The material of basic unit's dielectric layer is generally metal or nonmetallic oxide compound or nitride, as SnO ₂, ZnO, Nb ₂O ₅, TiO ₂, Si ₃N ₄Deng;

Barrier layer is generally NiCr or NiCrOx;

The material of upper strata dielectric layer is generally metal or nonmetallic oxide compound or nitride, as SnO ₂, ZnO, Nb ₂O ₅, TiO ₂, Si ₃N ₄Deng;

But, in the processing of traditional low emissivity glass, can only adopt the first tempering processing mode of plated film again to glass, this be because:

1. tempering behind the first plated film, material increased activity such as the sodium ion that contains in the glass in the heat-processed can be penetrated in the film system, destroy dielectric layer and silver layer;

2. tempering behind the first plated film, the silver particles in the silver layer can be subjected to thermophoresis, and cohesion produces atomizating phenomenon;

3. tempering behind the first plated film, the easy infiltrate compound of oxygen protective layer makes the some or all of oxidation of silver layer under the thermal environment.

The infiltration of sodium ion, silver particles cohesion and silver layer oxidation can make coated glass produce spot, and atomizing reduces low radiance.

Along with the development of modern architecture,, more and more require low emissivity glass behind plated film, can carry out the tempering treatment process for the energy-conservation consideration that waits attractive in appearance.

Summary of the invention

The objective of the invention is to, the low emissivity glass of producing can carry out the tempering treatment process behind plated film, and does not influence the quality of product; Utilize the TiO of the rutile phase of bipolar pulse power supply sputtering technology production ₂As basic unit's dielectric layer, thickness of other each layers of choose reasonable and membranous layer ingredient are produced the low radiation coated glass that can carry out high-temperature heat treatment.

The film layer structure of this glass is: basic unit's dielectric layer/silver layer/barrier layer/upper strata dielectric layer; Basic unit's dielectric layer is made of two-layer, and one deck is the titanium oxide TiO that adopts the sedimentary rutile structure of bipolar medium-frequency pulse power supply ₂, another layer is zinc oxide ZnO;

Titanium oxide TiO ₂Thicknesses of layers be 25nm～30nm;

The thicknesses of layers of zinc oxide ZnO is 4nm～6nm;

Silver layer: thicknesses of layers is 12nm;

Barrier layer: main raw is a nichrome, and thicknesses of layers is 2～3nm;

The upper strata dielectric layer:, thicknesses of layers is 25～30nm.

Rutile phase TiO ₂The production technique of radiation coated glass capable of being toughened, the rete plated film adopts vacuum magnetic-control sputtering plated film, titanium oxide TiO ₂Adopt the sedimentary rutile structure titanium oxide of bipolar medium-frequency pulse power supply, deposit in argon oxygen atmosphere, power is 40kw～50kw, and pulse power frequency is 15kHz～25kHz, and dutycycle is 4: 10～6: 10;

Zinc oxide ZnO coating: deposit in argon oxygen atmosphere, power is 15kw～20kw;

Silver layer Ag: deposit in argon atmosphere, power is 5kw;

Barrier layer: sputter nichrome in argon oxygen atmosphere, power are 5kw;

The upper strata dielectric layer: at nitrogen argon atmosphere sputtered silicon aluminium alloy, power is 70kw.

Nature TiO2 has anatase octahedrite (anatase), rutile (rutile) and three kinds of structure types of brookite (brookite), compares with anatase octahedrite, and the rutile structure titanium oxide has higher specific refractory power, more Zhi Mi microtexture.

But rutile structure can not obtain by common magnetically controlled sputter method.Generally, TiO ₂The sputter product be mainly symbiotic structure anatase structured or anatase octahedrite and rutile.Anatase octahedrite at high temperature is a undefined structure, in when heating, can produce phase transition process, promptly by the oxygen of anatase octahedrite phase the false close-packed face of 112} be converted into the rutile phase { titanium ion and oxonium ion are reset for 100} close-packed face, titanyl bond rupture.At simple anatase octahedrite in the phase transition process of rutile, the volumetric shrinkage of oxonium ion skeleton construction is about about 8%, can produce the oxygen vacancy, yet, for different TiO2 granular sizes, the ratio of different crystal phase structures and impure difference, transition temperature, the final crystal phase structure that forms and the defect level of generation all are very different, like this, if anatase octahedrite or contain a large amount of anatase structured TiO ₂As low-emission coated basic unit's dielectric layer when heat-treating, on the one hand, anatase structured TiO ₂Fine and close inadequately, on the other hand, rete can produce smaller volume and oxygen vacancy in the heat treatment process, like this, to such an extent as to the sodium ion in the glass can be penetrated in the rete silver layer of deep layer more, the oxygen in tempering or the hot bending process in the thermal environment also can infiltrate in the rete, such net effect is exactly the composition of rete and destructurized, the optical appearance of coated glass and calorifics effect can partly or entirely be destroyed, and outward appearance produces atomizating phenomenon, and low radiance weakens.

The present invention adopts the method for pulsed magnetron sputtering, and the frequency and the dutycycle of control shielding power supply make sedimentary TiO ₂Be rutile structure, by means of its physics stable in thermal treatment, chemical property, guarantee that low radiation coated glass is behind overheated tempering or hot bending, the color of coated glass, transmissivity, reflectivity and low-E can not produce bigger variation, still the good appearance effect and the light thermal property of Bao Chiing.

Description of drawings

Accompanying drawing 1 is that the present invention illustrates two magnetron input pulse power supply synoptic diagram.

Accompanying drawing 2 is process flow diagrams that the present invention is coated with each rete.

Embodiment

The coating film thickness and the coating process of each rete of the present invention are as follows:

Basic unit's dielectric layer:

Basic unit's dielectric layer is made of two-layer, and one deck is the TiO that adopts the sedimentary rutile structure of bipolar medium-frequency pulse power supply ₂, another layer is ZnO.

Titanium dioxide TiO ₂Coating: TiO ₂Deposit in argon oxygen atmosphere, power is 40kw～50kw, and thicknesses of layers is 25nm～30nm, and pulse power frequency is 15kHz～25kHz, and the dutycycle of voltage pulse is 4: 10～6: 10.

ZnO layer: ZnO deposits in argon oxygen atmosphere, and power is 15kw～20kw, and thicknesses of layers is 4nm～6nm.

Silver layer: Ag deposits in argon atmosphere, and power is 5kw, and thicknesses of layers is about 12nm.

Barrier layer: sputter nichrome in argon oxygen atmosphere, power are 5kw, and thicknesses of layers is 2～3nm.

The upper strata dielectric layer: at nitrogen argon atmosphere sputtered silicon aluminium alloy, power is 70kw, and thicknesses of layers is 25～30nm.

See also accompanying drawing 1, the bipolar pulse power supply as shown in the figure, 1 ^#In the magnetron, among each cycle t1, the positive square-wave voltage of pulse of t2 time is arranged, and 2 ^#In the magnetron, in each cycle t2, corresponding to 1 ^#In the identical time of t2, a pulse negative sense square-wave voltage is arranged in the magnetron.Like this, when a negative electrode was positive phase, another negative electrode then was a minus phase.

The ratio of t2 and t1 is called dutycycle.Can two dutycycles between voltage-phase be set by pulse mode,, film performance be had very big influence for different dutycycles.Among the present invention, be the rutile phase in order to satisfy the sputter product, dutycycle is between 4: 10～6: 10.The range of frequency of the pulse power is between 15kHz～25kHz.

The glass optical property made from above-mentioned processing parameter is as follows:

Glass visible light transmissivity T=80.0%

Visible light glass surface reflectivity=8.0%

Visible light glass surface chromaticity coordinates a ^*Value=-1.8

Chromaticity coordinates b ^*Value=-7.0

The radiant ratio ε of glass=0.1.

Thermal treatment is to the influence of optical property:

Glass visible light transmissivity changing value: Δ T＜1.5%

Visible light glass surface reflectance varies value: Δ R＜1.5%

Visible light glass surface chromaticity coordinates a ^*Changing value: Δ a ^*＜1.0

Chromaticity coordinates b ^*Value changing value: Δ b ^*＜1.0

The emissivity change value of glass: Δ ε＜0.02.

Subsequent handling is to the outward appearance Effect on Performance:

Edging: can stand the edging art breading, limit portion does not have unacceptable scuffing and demoulding.

Washing: do not have unacceptable scuffing and demoulding after the washing before and after the coated glass tempering.

Claims (2)

1. one kind based on rutile phase TiO ₂Radiation coated glass capable of being toughened, it is characterized in that the film layer structure of this glass is: basic unit's dielectric layer/silver layer/barrier layer/upper strata dielectric layer; Basic unit's dielectric layer is made of two-layer, and one deck is the titanium oxide TiO that adopts the sedimentary rutile structure of bipolar medium-frequency pulse power supply ₂, another layer is zinc oxide ZnO;

Titanium oxide TiO ₂Thicknesses of layers be 25nm～30nm;

The thicknesses of layers of zinc oxide ZnO is 4nm～6nm;

Silver layer: thicknesses of layers is 12nm;

Barrier layer: main raw is a nichrome, and thicknesses of layers is 2～3nm;

The upper strata dielectric layer: thicknesses of layers is 25～30nm.

2. one kind based on rutile phase TiO ₂The production technique of radiation coated glass capable of being toughened, it is characterized in that the rete plated film adopts vacuum magnetic-control sputtering plated film, titanium oxide TiO ₂Adopt the sedimentary rutile structure titanium oxide of bipolar medium-frequency pulse power supply, deposit in argon oxygen atmosphere, power is 40kw～50kw, and pulse power frequency is 15kHz～25kHz, and dutycycle is 4: 10～6: 10;

Zinc oxide ZnO coating: deposit in argon oxygen atmosphere, power is 15kw～20kw;

Silver layer Ag: deposit in argon atmosphere, power is 5kw;

Barrier layer: sputter nichrome in argon oxygen atmosphere, power are 5kw;

The upper strata dielectric layer: at nitrogen argon atmosphere sputtered silicon aluminium alloy, power is 70kw.