CN1319048C - Magnetic head sliding block and its producing method and magnetic disc - Google Patents
Magnetic head sliding block and its producing method and magnetic disc Download PDFInfo
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- CN1319048C CN1319048C CNB00104334XA CN00104334A CN1319048C CN 1319048 C CN1319048 C CN 1319048C CN B00104334X A CNB00104334X A CN B00104334XA CN 00104334 A CN00104334 A CN 00104334A CN 1319048 C CN1319048 C CN 1319048C
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- head
- slider
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- core part
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Abstract
To provide a magnetic head slider in which the distance between a recording medium and a head core part facing each other in an operation is made short and which can achieve a high face recording density and to provide its manufacturing method as well as to provide a magnetic disk apparatus which uses the magnetic head slider. A mask is formed in a region in which a head core part 20 at the air bearing face 10a of a magnetic-head-slider body part 10 is formed. Then, a protective film 42 which is composed of DLC(diamondlike carbon) is formed so as to cover the air bearing face 10a. After that, the mask and the protective film 42 on the mask are removed. In this magnetic head slider 1 which is manufactured, the distance between the head core part 20 and a magnetic disk is made short as compared with a conventional magnetic head slider in which a protective film is formed on the whole face of an air bearing face. Consequently, in this magnetic disk apparatus to which the magnetic head slider 1 is applied, the head core part 20 can be brought close to the magnetic disk, a large reproduction output is obtained, and information can be recorded in the magnetic disk by using a fine magnetic field. As a result, the face recording density of the magnetic disk apparatus can be enhanced.
Description
Technical field
The present invention relates to a kind of head-slider, this head-slider has magnetic head element that is used to write or the magnetic head element that is used to read at least, the invention still further relates to a kind of method and a kind of disk set of making this head-slider.
Background technology
In recent years, in the field of the magnetic recording system such as disk set, very active for improving the research and development that surface recording density carries out.As a kind of record and/or the playback method of disk set, CSS (contacting-begin-stop) method is main flow at present.According to this method, when disk set is not worked, a head-slider (following also abbreviate as " magnetic head " or " head ") contacts with disk (following also abbreviate as " dish ") as recording medium, when disk set is worked, magnetic head is lifted away from the surface of disk and relatively moves above disk, with record and playback information.
In order to adopt this method to improve the surface recording density of disk set, importantly make the surface in contact of magnetic head and disk level and smooth and reduce head-slider that flying height that magnetic head leaves disk promptly suspends and the gap between the disk.
As an example of correlation technique, Figure 10 shows a kind of structure of head-slider.This head-slider comprises a head-slider main body 100, wherein, form a head core (head core) part 102 in a substrate 101, head core part 102 has an induced magnetism sensor that is used to write and a magnetoresistance element that is used to read.Head-slider main body 100 in the face of the whole surface of disk (below be also referred to as ABS (air bearing surface) (Air Bearing Surface)) 100a on; be formed with layer protecting film 110, this diaphragm is by make and the thickness that have about 30nm of diamond-like-carbon (below abbreviate DLC as).Diaphragm 110 has bossing 111.Bossing 111 is used to prevent to have respectively between the head-slider of a level and smooth phase opposed face and the disk and produces absorption.
In order further to improve the surface recording density of disk set, need make the distance between head core part 102 and the disk compare shorter with the situation in the correlation technique.The head core that is arranged on air bearing surface 100a when diaphragm 110 partly forms the zone when going up; have such problem: the head core part 102 and the distance between the disk of unsteady head-slider are longer, and its amount of elongation is only corresponding to the thickness of diaphragm 110.
Summary of the invention
The present invention is based on the problems referred to above realization, its objective is method that a kind of head-slider will be provided, make this head-slider and the disk set that uses this head-slider, recording medium that this head-slider can face with each other when shortening work and the distance between the head core part obtain higher surface recording density.
A kind of head-slider according to the present invention comprises: a head-slider main body, wherein be formed with a head core part, and this head core part comprises a magnetic head element that is used to write or a magnetic head element that is used to read at least; And layer protecting film, it optionally only be formed on the head-slider main body facing to partly forming in the Zone Full the zone except head core on the surface of recording medium.
A kind of method of making head-slider according to the present invention may further comprise the steps: partly prepare a head-slider main body by form a head core in a substrate, the head core part comprises a magnetic head element that is used to write or a magnetic head element that is used to read at least; Only on the surface facing to recording medium of head-slider main body, be formed with in the head core zone partly and form a mask; Form layer protecting film, in order to cover the surface facing to recording medium of head-slider main body; With the diaphragm of removing on mask and the mask, make and only remove diaphragm on the core segment of meeting and discussing that diaphragm is formed in the All Ranges outside the head core part.
Comprise head-slider and the recording medium that faces with each other and be provided with according to a kind of disk set provided by the invention, wherein, head-slider comprises: a head-slider main body, wherein be formed with a head core part, this head core part comprises a magnetic head element that is used to write or a magnetic head element that is used to read at least; And layer protecting film, it be formed on the head-slider main body facing to partly forming in the Zone Full the zone except head core on the surface of recording medium.
In each of head-slider of the present invention, the method for making head-slider and disk set, the surface facing to recording medium (air bearing surface) that diaphragm optionally is formed on the head-slider main body is gone up except head core and is partly formed in the zone the zone.That is to say that diaphragm is not formed on head core part and the neighboring area thereof.Diaphragm is to form like this: form a mask in the zone that is formed with the head core part on air bearing surface at least; Form diaphragm in the mode that covers this air bearing surface; And remove the diaphragm on mask and the mask.
In each of head-slider of the present invention, the method for making head-slider and disk set, diaphragm can be formed on except head core and partly form on whole air bearing surfaces the zone.
In each of head-slider according to the present invention, the method for making head-slider and disk set, diaphragm preferably comprises diamond-like-carbon.
In each of head-slider according to the present invention, the method for making head-slider and disk set, the magnetic head element that is used to read can be a magnetoresistance element.In this case, magnetoresistance element preferably has the magnetoresistance film that one deck comprises nickel and manganese at least.
In addition, in the method for manufacturing head-slider according to the present invention, mask is preferably made by organic material or metal material.
Of the present invention other and further purpose, feature and advantage will more fully be disclosed from the following description.
Description of drawings
Fig. 1 is a cut-open view, is used for illustrating the technology of the method for making head-slider according to an embodiment of the invention.
Fig. 2 is a cut-open view, is used for key diagram 1 technology afterwards.
Fig. 3 is a cut-open view, is used for key diagram 2 technology afterwards.
Fig. 4 is a stereographic map, is used for key diagram 3 technology afterwards.
Fig. 5 is a stereographic map, is used for key diagram 4 technology afterwards.
Fig. 6 is a stereographic map, is used for key diagram 5 technology afterwards.
Fig. 7 is a stereographic map, and it demonstrates the external structure according to the head-slider of the embodiment of the invention.
Fig. 8 is a stereographic map, and it demonstrates the structure of the disk set that uses the head-slider shown in Fig. 7.
The synoptic diagram that position when Fig. 9 A is the disk set work that shows when the embodiment of the invention shown in Fig. 8 between head core part and the disk concerns.
The synoptic diagram that the position between head core part and the disk concerned in the conventional disk set when Fig. 9 B was the disk set work that shows when correlation technique.
Figure 10 is a stereographic map, and it demonstrates the external structure of the head-slider of correlation technique.
Embodiment
A preferred embodiment of the present invention is described below with reference to accompanying drawings.A kind of method to a kind of head-slider and this head-slider of manufacturing is described now, as a example according to head-slider of the present invention, this head-slider comprises a laminated film magnetic head, and wherein head core partly has such structure: a write head and the overlapping setting of playback head that comprises magnetoresistance (following also be called for short " the MR ") element that is used to read with the induced magnetism sensor that is used to write.
At first describe with reference to Fig. 1-7 pair of a kind of method of making head-slider 1 according to an embodiment of the invention.By method,, therefore will describe together both below a kind of head-slider that embodies according to present embodiment according to the manufacturing head-slider of present embodiment.Fig. 1-3 all is perpendicular to the cut-open view of air bearing surface.Fig. 4-the 7th, the stereographic map of above the air bearing surface side, seeing.
At first, in manufacture method according to present embodiment, as shown in fig. 1, at one by AlTiC (Al
2O
3 Insulation course 21 of deposit in the substrate 11 of TiC) making, this insulation course is by aluminium oxide (Al
2O
3) or similar material make.On insulation course 21, form a bottom shield layer 22 that is used for playback head.On bottom shield layer 22, be about aluminium oxide or the similar material of 100-200nm (millimicron) by sputtering deposit thickness, form one deck shielding spacer film 23.On shielding spacer film 23, form the about tens millimicrons of thick MR films 24 of one deck, and be patterned into the shape that needs by the high precision photoetching process, this MR film 24 is made by for example Ni (nickel)-Mn (manganese) alloy, is used to constitute the MR element in order to reset.Form trace layer (lead layer) (not shown) in the both sides of MR film 24 as the lead-in wire electrode layer, this trace layer is electrically connected to MR film 24, and one deck shielding spacer film 25:MR film 24 that forms like this is embedded in the shielding spacer film 23 and 25 on trace layer.On shielding spacer film 25, form the top barrier bottom magnetic pole (below be called bottom magnetic pole) 26 of holding concurrently, it is to be made by the magnetic material that not only can be used for playback head but also can be used for write head such as resist permalloy (NiFe).Comprise the example of the MR element of MR film 24 corresponding to " magnetic head element that is used to read " among the present invention.
As a MR element, except the AMR element of the employing anisotropic magnetoresistance shown in the present embodiment (below be called AMR) effect, also can use and have superpower magnetoresistance the GMR element or the like of (below be called GMR) effect.
As shown in Figure 2, form a logging interval layer 27 on bottom magnetic pole 26, it is to be made by the insulating material such as aluminium oxide.On logging interval layer 27, form a photoresist layer 28 by predetermined figure by the high precision photoetching process.On photoresist layer 28, form a film coil 29 by for example shikishima plating process, this film coil is made by copper (Cu) or similar material, as the ground floor of the film coil that is used for the electro-induction write head.Subsequently, form a photoresist layer 30 by predetermined figure, to cover photoresist layer 28 and coil 29 by the high precision photoetching process.In order to make coil 29 smooth and make each turn-to-turn insulation of coil 29, under 250 ℃ of left and right sides temperature, heat-treat.On photoresist layer 30, form a film coil 31 by for example shikishima plating process, this film coil is made by copper or similar material, as the second layer of film coil.On photoresist layer 30 and coil 31, form a photoresist layer 32 by the high precision photoetching process by predetermined figure, and under the temperature about 250 ℃, heat-treat, so that coil 31 is smooth and make each turn-to-turn insulation of coil 31.
As shown in Figure 3, in a position of coil 29 and 31 back (right side among Fig. 3), form an opening 27a, form a magnetic circuit thus by partly etching logging interval layer 27.On logging interval layer 27 and photoresist layer 28,30 and 32, optionally form a top magnetic and grip (yoke) top pole (below be called top pole) 33 of holding concurrently, it is to be made by the magnetic material that is used for write head such as resist permalloy.Top pole 33 has a contact point, and it is by opening 27a and bottom magnetic pole 26 magnetic couplings each other.Adopt top pole 33 as mask, logging interval layer 27 and bottom magnetic pole 26 are etched to about 0.5 μ m by ion etching.After this, on top pole 33, form an overlayer 34 of making by the material of aluminium oxide and so on, and made thus head core part 20. comprise bottom magnetic pole 26, logging interval layer 27, coil 29 and 31 and this part of top pole 33 corresponding to the example of " magnetic head element that is used to write " among the present invention.
By cutting or similar technology, the wafer that is formed with the head core part on it is divided into a plurality of elements, formation head-slider main body 10. as shown in Figure 4 for example thus, head-slider main body 10 is carried out polishing, forming an air bearing surface 10a, it comprises an end face of substrate 11 and an end face of head core part 20.Air bearing surface 10a is polished level and smooth surface.
Optionally etching air bearing surface 10a becomes U-shaped, comprising a zone that is formed with head core part 20, and forms negative pressure generation groove 10b, and this groove is used to make magnetic head to remove from recording medium.Negative pressure produces groove 10b and is used for producing air-flow between head-slider and disk when recording medium is rotated.In this case, the pressure in the negative pressure generation groove is lower than external pressure.
As shown in Figure 5, on the zone that is formed with head core part 20 on the air bearing surface 10a and on the bottom section that is close to above-mentioned zone of negative pressure generation groove 10b, form a mask 41 of making by organic material.Especially, by the photoresist of spin coating proceeding coating, and carry out photoetching treatment as organic material.In another kind of mapping mode, the etchant resist of the mask shape that can bond.Though mask 41 can be made by metal material, erosion resistant is preferred.This is because adopt the easier formation mask 41 of erosion resistant.Mask forms technology forms the step of mask corresponding to " only in the zone that is formed with the head core part " among the present invention a example.
As shown in Figure 6, by CVD (chemical vapour deposition) or similar technology deposit layer protecting film 42, in order to the air bearing surface 10a of the exposure that covers head-slider main body 10, diaphragm 42 is made by DLC, and thickness is about 5-10nm, preferably 6-8nm.After this, by for example photoetching and CVD technology, form bossing 42a, bossing 42a is made by DLC, highly is about 5-15nm, preferred 8-12nm, preferably 10nm.DLC is a kind of synthesis of diamond film.
As shown in Figure 7, adopt a kind of potpourri of making by the organic solvent such as acetone that is used to peel off erosion resistant, thus the diaphragm on the mask 41 42 is peeled off mask 41 dissolvings and removal.So just made the head-slider 1. of present embodiment
The head-slider of making in such a way 1 can be applied to the disk set of loading stage loading (ramp load) type (or loading-unloading type) as shown in Figure 8.
As shown in Figure 8, this disk set has according to head-slider 1. head-sliders 1 of present embodiment and is arranged to facing to the surface as the disk 50 of recording medium.This disk set has a plurality of disks usually, and is provided with a head-slider for each surface of each disk.In Fig. 8, only demonstrate a head-slider and a disk, remaining has been omitted.Disk 50 is driven by 51 rotations of a spindle motor.Head-slider is supported by an end 62p of a suspension 62, and the other end 62q of suspension 62 is mounted to an actuating arm 61.At the end of the axis of actuating arm 61, this disk set also has a load bearing unit 70, is used for head-slider 1 is positioned at the magnetic track of disk 50.Load bearing unit 70 comprises that an axle 71, one can be around load bearing component 72 and actuators 73 such as voice coil motor of axle 71 swings.Actuator 73 drives load bearing component 72, makes it around axle 71 swings, and magnetic head 100 just can be gone up in radially (direction shown in the arrow magnetic head A among Fig. 8) of disk 50 and move like this.In addition, this disk set is provided with a suspension holding member 80, is used for when this disk set is not worked suspension 62 being positioned at outside the disk 50.
In having the disk set of this structure, information normally writes down in the following manner and resets.When this disk set was not worked, suspension 62 was kept by suspension holding member 80, and head-slider 1 is in the zone outside the disk 50.When this disk set work, disk 50 rotations, and actuator 73 driving head-sliders 1 move above disk 50.This driving method is called as the loading stage loading method.Between head-slider 1 and disk 50, produce air-flow from that end face side opposite towards the outer face side that is formed with head core part 20, so formed a lift with the end face side that is formed with head core part 20.As a result, head-slider 1 moves with respect to disk 50, keeps a very little spacing by the balance between the pressure of this lift and suspension 62 simultaneously.In this state, present electric current by the coil 29 and 31 to head core part 20, produced the magnetic flux that is used to write, information is recorded on the disk 50 thus.The magnetic flux that (when reading information) current sensor is fed to MR film 24 and comes from disk 50 is detected, thus the information of browing record on disk 50.
Fig. 9 A schematically demonstrates the relation between disk set when work head core part 20 that comprises head-slider 1 and disk 50.Fig. 9 B schematically demonstrates the relation between head core part 102 (with reference to Figure 10) and disk 50 when the work of the disk set of the head-slider that comprises correlation technique.As shown in Figure 9A and 9B, under the situation of the head-slider 1 of present embodiment, the distance L between head core part 20 and the disk 50
1Than short under the situation of the head-slider in correlation technique, the part of shortening is the thickness L of diaphragm
2This is because of not forming diaphragm 42 in the zone that is formed with head core part 20 on air bearing surface 10a.Therefore, 20 generations and the narrowed width that arrive the magnetic flux on disk 50 surfaces from the head core part, and the density of the magnetic flux on arrival disk 50 surfaces uprises.As a result, information can be recorded on the disk 50 by higher density.From the magnetic disk surface generation and narrowed width that arrive the magnetic flux of head core part 20, near the magnetic field intensitys the head core part 20 uprise.Therefore, the output of resetting becomes big, and the feeble signal of magnetic recording on disk can be read out.
According to the above embodiments, by adopting mask 41, diaphragm 42 only is formed in the zone except head core part 20 formation zones of air bearing surface 10a.Correspondingly, be formed on diaphragm wherein and comprise that the head-slider that head core part 20 forms on the whole air bearing surface in zone compares the distance L between head core part 20 and the disk 50
1Can be shorter.Therefore, in the disk set of the head-slider 1 with present embodiment, head core part 20 can be near disk 50, and like this, magnetic information can be recorded on the disk 50 with faint magnetic flux, and the faint magnetic signal that is recorded on the disk 50 can be reset.That is to say that the surface recording density of disk set has improved.
Because MR film 24 is to be made by the Ni-Mn alloy with extraordinary corrosion stability, does not partly form in the zone even diaphragm 42 is not formed on the head core of air bearing surface 10a, do not worry basically that MR film 24 can corrode yet.
Though below the invention has been described by aforesaid embodiment, the present invention is not limited to this embodiment, but can change by multiple mode.For example; in the foregoing embodiments; though diaphragm 42 is formed in the zone except head core partly forms zone and near zone thereof; make about 90% the zone of air bearing surface 10a obtain protection, as long as but the head core that prevents air bearing surface 10a partly forms the not protected film 42 in zone covers just enough.For example, diaphragm can only cover the zone from the side end of air bearing surface 10a to its center, and this side end is arranged in that the opposite side of side that is formed with head core part 20 with air bearing surface 10a.
In addition, in the present embodiment,,, can bossing be set for diaphragm 42 based on following reason though diaphragm 42 has bossing 42a yet.In loading stage loaded type disk set, when this device was not worked, head-slider 1 did not contact with disk 50.Therefore, there is no need to prevent absorption between head-slider 1 and the disk 50 by bossing 42a.
In the present embodiment, though head-slider 1 is used to adopt the disk set of loading stage loading method, head-slider 1 also can be used for a kind of disk set of the CSS of employing method.
Though head core part 20 is formed on one of end of U-shaped air bearing surface 10a, head core part 20 also can be formed on two ends.In addition, a pad can optionally be set and head core part 20 is formed on this pad, the height of this pad approximates the depth of groove in the central area that negative pressure produces groove 10b.
Though head-slider 1 has the laminated film magnetic head in the above-described embodiments, the present invention also can be applied to have and be exclusively used in the induced magnetism sensor that writes or be used to write down and the head-slider of the induced magnetism sensor of the two kinds of functions of resetting.In addition, the present invention can be applied to have the head-slider of this structure, that is: the stacked reversed order of element that is used to write under Fig. 3 situation and the element that is used to read wherein.
According to head-slider of the present invention, make the method or the disk set of head-slider, diaphragm optionally be formed on the head-slider main body facing to partly forming in the zone the zone except head core on the surface of recording medium.Therefore, the distance between head core part and the recording medium has shortened than the respective distance in the correlation technique head-slider, and in the head-slider of correlation technique, diaphragm is formed on the whole surface facing to recording medium of head-slider main body.Thus, can improve surface recording density in magnetic recording and the playback procedure.
According to head-slider of the present invention or disk set, magnetoresistance element has the magnetoresistance film that comprises nickel and manganese at least.Therefore, partly do not form in the zone, do not worry basically that the magnetoresistance film can corrode yet even diaphragm is formed on the lip-deep head core facing to recording medium of head-slider main body.
Obviously, according to above instruction, many changes of the present invention and conversion are possible.Therefore, should be appreciated that within the scope of the appended claims that the present invention can be according to the embodied in other outside the specifically described mode here.
Claims (14)
1. head-slider comprises:
A head-slider main body wherein is formed with a head core part, and this head core part comprises a magnetic head element that is used to write or a magnetic head element that is used to read at least; With
Layer protecting film, it be formed on except head core partly forms the zone, on all surfaces facing to recording medium of head-slider main body.
2. according to the head-slider of claim 1, it is characterized in that diaphragm comprises diamond-like-carbon.
3. according to the head-slider of claim 2, it is characterized in that the magnetic head element that is used to read is a magnetoresistance element.
4. according to the head-slider of claim 3, it is characterized in that magnetoresistance element has the magnetoresistance film that one deck comprises nickel and manganese at least.
5. method of making head-slider may further comprise the steps:
Partly prepare a head-slider main body by form a head core in a substrate, this head core part comprises a magnetic head element that is used to write or a magnetic head element that is used to read at least;
Form a surface of head-slider main body, the surface of this head-slider main body comprises an end face of substrate and an end face of head core part, and the surface of this head-slider main body is facing to recording medium;
On the surface that faces recording medium of head-slider main body, only be formed with in the zone of head core part and forming a mask;
Form layer protecting film, in order to cover the surface facing to recording medium of head-slider main body; With
Remove the diaphragm on mask and the mask, make and only remove diaphragm on the core segment of meeting and discussing, diaphragm is formed in the All Ranges outside the head core part.
6. according to the method for the manufacturing head-slider of claim 5, it is characterized in that diaphragm comprises diamond-like-carbon.
7. according to the method for the manufacturing head-slider of claim 6, it is characterized in that the magnetic head element that is used to read is a magnetoresistance element.
8. according to the method for the manufacturing head-slider of claim 7, it is characterized in that magnetoresistance element has the magnetoresistance film that one deck comprises nickel and manganese at least.
9. according to the method for the manufacturing head-slider of claim 5, it is characterized in that mask is made by organic material.
10. according to the method for the manufacturing head-slider of claim 5, it is characterized in that mask is made by metal material.
11. a disk set comprises the head-slider and the recording medium that face with each other and be provided with, wherein head-slider comprises:
A head-slider main body wherein is formed with a head core part, and this head core part comprises a magnetic head element that is used to write or a magnetic head element that is used to read at least; With
Layer protecting film, it is formed on except head core partly forms the zone, magnetic head is slided on all surfaces facing to recording medium of the main body of determining.
12. the disk set according to claim 11 is characterized in that diaphragm comprises diamond-like-carbon.
13. the disk set according to claim 11 is characterized in that, the magnetic head element that is used to read is a magnetoresistance element.
14. the disk set according to claim 13 is characterized in that, magnetoresistance element has the magnetoresistance film that one deck comprises nickel and manganese at least.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP71278/1999 | 1999-03-17 | ||
| JP71278/99 | 1999-03-17 | ||
| JP11071278A JP2000268335A (en) | 1999-03-17 | 1999-03-17 | Magnetic head slider and its manufacture, as well as magnetic disk apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1267880A CN1267880A (en) | 2000-09-27 |
| CN1319048C true CN1319048C (en) | 2007-05-30 |
Family
ID=13456098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB00104334XA Expired - Fee Related CN1319048C (en) | 1999-03-17 | 2000-03-17 | Magnetic head sliding block and its producing method and magnetic disc |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2000268335A (en) |
| CN (1) | CN1319048C (en) |
| SG (1) | SG108222A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4236156B2 (en) * | 2003-01-31 | 2009-03-11 | 日立マクセル株式会社 | Fuel cell |
| CN100573671C (en) * | 2003-02-19 | 2009-12-23 | 富士通株式会社 | Head slider |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1175317A (en) * | 1994-12-19 | 1998-03-04 | 海门科技公司 | Partially etched protective overcoat for a disk drive slider |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1040524A (en) * | 1996-07-26 | 1998-02-13 | Nec Corp | Magnetic head and magnetic disc apparatus |
| JP2853689B2 (en) * | 1996-12-26 | 1999-02-03 | 日本電気株式会社 | Magnetic head |
| JPH10241116A (en) * | 1997-02-24 | 1998-09-11 | Hitachi Ltd | Planar silicon head and its manufacture |
-
1999
- 1999-03-17 JP JP11071278A patent/JP2000268335A/en active Pending
-
2000
- 2000-03-07 SG SG200001260A patent/SG108222A1/en unknown
- 2000-03-17 CN CNB00104334XA patent/CN1319048C/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1175317A (en) * | 1994-12-19 | 1998-03-04 | 海门科技公司 | Partially etched protective overcoat for a disk drive slider |
Also Published As
| Publication number | Publication date |
|---|---|
| SG108222A1 (en) | 2005-01-28 |
| JP2000268335A (en) | 2000-09-29 |
| CN1267880A (en) | 2000-09-27 |
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