CN1311227C - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN1311227C CN1311227C CNB2004100885656A CN200410088565A CN1311227C CN 1311227 C CN1311227 C CN 1311227C CN B2004100885656 A CNB2004100885656 A CN B2004100885656A CN 200410088565 A CN200410088565 A CN 200410088565A CN 1311227 C CN1311227 C CN 1311227C
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- pressure transducer
- web member
- keeper
- pressure
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Abstract
The objective of the invention is to enhance the hermetic property of a connecting part between a pressure sensor body and a connector. The pressure sensor body comprises a housing 10 having a pressure introducing hole 12, a pressure detection element 22 consisting of a semiconductor element having a piezo-resistance effect, a holder 30 adhering the pressure detection element 22, a connector case 70, and an inner space 72 which is formed by connecting hermetically the pressure detection element 22 and the holder 30. The connector 80 mounted on the connector case 70 and an electrode pad are connected by an elastic body 50 which has an elasticity and an electrical conductivity, with installing a circuit substrate 40 having the electrode pad on the holder 30. The holder 30 is supported by the housing 10 through a guide frame 90 and an O-ring 95.
Description
Technical field
The present invention relates to pressure transducer, in particular, the present invention relates to have the shell of admittance pressure detecting element and the pressure transducer of web member housing, is the structure that improves bubble-tight pressure transducer.
Background technology
As the pressure transducer in past, people propose to have all kinds, such as, include the such pressure transducer shown in the patent documentation 1.When this pressure transducer being described by cut-open view shown in Figure 9, this pressure transducer 101 is made of shell 110, sensing element 120, keeper 130, circuitry substrate 140, spring-like body 150, web member housing 170 and web member 180, in this pressure transducer 101, at the internal tank that is formed by above-mentioned shell 110 and web member housing 170, admitting has the pressure transducer main body that is formed by sensing element 120, keeper 130.
In the bottom of above-mentioned shell 110, have the fluid of sending into fluid and send into hole 112, send into the top in hole 112 at this fluid, be formed with circular outer casing bottom 113, this shell 110 comprises the groove 114 of ring-type; Perisporium 116, this perisporium 116 is upright from the periphery of this groove 114; Clamping part 117, this clamping part 117 is arranged at the top ends of perisporium 116 with less thickness; Enclosure space 118, this enclosure space 118 are formed by outer casing bottom 113 and perisporium 116 in the inboard of main body, and the fluid of shell 110 sends into hole 112 and enclosure space 118 is communicated with.
In addition, above-mentioned sensing element 120 has the function of detected pressures, its by 121, pressure detecting element 122 and pedestal 123 constitute, this pressure detecting element 122 is formed by semiconductor element, in this semiconductor element, according to end face in Semiconductor substrate, the mode that forms bridge is provided with a plurality of resistance with piezoresistance effect, this pedestal 123 is fixed in airtight mode on 121 the end face, 121 and the pars intermedia of pedestal 123 be provided with the sensing element opening 124 of the bottom that arrives pressure detecting element 122.
In above-mentioned pressure detecting element 122, the rectangular shape of the flat shape of Semiconductor substrate, pars intermedia forms with less thickness, formation is followed pressure and the diaphragm portion that is out of shape, at the end face of above-mentioned diaphragm portion, is the bridge shape and forms a plurality of piezoresistance elements, thus, formation is as the pressure detecting portion of strainmeter, and in the big portion of thickness of periphery, is provided with the circuit of the amplifying circuit that adopts ic manufacturing technology and make, arithmetic processing circuit etc.At the central part of keeper 130, be provided with keeper opening 132, on the end face 134 of keeper 130, circuitry substrate 140 is fixed by bonding agent etc.In addition, circuitry substrate 140 has circuitry substrate opening 141, and this circuitry substrate opening 141 is in the form of annular discs, and the pressure detecting element 122 of sensing element 120 is positioned at the middle place of this circuitry substrate opening 141.
In addition, an end 151 of spring-like body 150 is fixed on the bottom 181 of keeper 180, and other end side direction below warpage forms bend 153.Web member housing 170 is the resin system housing with inserted mode fixed connecting piece 180, forms receptacle portion 171 at its top.In addition, sealing ring 195 inserts as sealing ring and admits with in the groove 114 of groove, prevents that the water, moisture etc. from the outside from invading in the inner space 172 of web member housing 170.Sealing ring 196 is embedded in the top of the threaded portion 119 of shell, keeps impermeability between itself and the pipe.
According to above-mentioned known technology, connect part simple in structure of pressure transducer main body and web member, reduce during the millwright, manufacturing cost reduces, and still, for the permanance and the sensitivity of the sensor that keep-ups pressure, requires bubble-tight further raising.
Patent documentation 1:JP spy opens the 2002-333377 document
Summary of the invention
So, The present invention be directed to such problem and propose, the objective of the invention is to further improve the impermeability of the part that connects pressure transducer main body and web member.
To achieve these goals, the present invention adopts following technical scheme.That is,
Pressure transducer comprises having the shell that pressure is sent into the hole; Pressure detecting element, this pressure detecting element is formed by the semiconductor element with piezoresistance effect; Keeper, this keeper is fixed above-mentioned pressure detecting element; The web member housing, this pressure transducer forms the inner space by above-mentioned pressure detecting element and above-mentioned keeper are engaged with air tight manner pressure transducer main body constitutes, the keeper of above-mentioned pressure transducer main body is provided with the circuitry substrate with electrode pad, the web member and the above-mentioned electrode pad that are arranged on the above-mentioned web member housing are connected by rubber-like, the spring-like body that is rich in electric conductivity, it is characterized in that above-mentioned keeper by guide frame and seal support on above-mentioned shell.
Pressure transducer of the present invention, its feature are that also the side of above-mentioned keeper by sealing ring, is arranged at the inside of above-mentioned web member housing.
Pressure transducer of the present invention, its feature are that also above-mentioned guide frame is formed by erection part and horizontal part, and its cross sectional shape is the L shape, and above-mentioned erection part is between pressure transducer main body and web member housing, and above-mentioned horizontal part is supported on the keeper with the way of contact.
Pressure transducer of the present invention, its feature are that also the cross sectional shape of above-mentioned guide frame is square-shaped, and its end face is supported on the above-mentioned keeper with the way of contact.
Pressure transducer of the present invention, its feature also are in the above-mentioned keeper to extend at outer circumferential side with contact site guide frame, form lower support portion.
Pressure transducer of the present invention, its feature also are make above-mentioned web member from above-mentioned web member shell when outstanding, and this teat is provided with the waterproof filling member.
Pressure transducer of the present invention is characterized in that according to comparing with the occasion that the gap of inner face by above-mentioned web member housing arrives above-mentioned inner space, and fluid constitutes in the mode in the outside that flows out to above-mentioned web member housing.
Pressure transducer of the present invention, its feature are that also the letdown tank of prescribed depth is formed at according to the mode in inside and outside perforation on the part of bottom surface of above-mentioned guide frame.
Pressure transducer of the present invention, its feature are that also above-mentioned web member housing has the outer pneumatic transmission hand-hole that is formed at inside, and the end of pneumatic transmission hand-hole is equipped with chip part outside above-mentioned, in this chip part, has the emptying aperture of continuous poriferous structure along thickness direction.
Pressure transducer of the present invention, its feature are that also above-mentioned chip part is for circular, in the form of sheets.
Pressure transducer of the present invention, its feature are that also above-mentioned chip part is arranged at the entrance side of above-mentioned outer pneumatic transmission hand-hole.
Pressure transducer of the present invention, its feature are that also above-mentioned chip part is arranged at the outlet side of above-mentioned outer pneumatic transmission hand-hole.
Pressure transducer of the present invention, its feature are that also the material of above-mentioned chip part is a polyflon.
The present invention realizes following effect by above-mentioned scheme.Promptly
According to the present invention, keeper is supported on the shell by guide frame and sealing ring, and thus, the impermeability in the pressure transducer main body of pressure transducer improves, and the Stability Analysis of Structures of pressure transducer integral body.
In addition,, not only have above-mentioned effect, and the side of keeper is arranged at the web member enclosure interior by sealing ring, can expect further airtight effect according to the present invention.
In addition, according to the present invention, not only has above-mentioned effect, and guide frame is formed by erection part and horizontal part, and cross sectional shape is L-shaped, and erection part is between pressure transducer main body and web member housing, above-mentioned horizontal part is supported on the keeper in the mode of contact, thus, can expect further airtight effect, and the engagement state between shell and the web member housing is stable.
Also have, according to the present invention, not only have the effect of above-mentioned pressure transducer, the cross sectional shape of guide frame is square-shaped, and its end face is supported on the above-mentioned keeper in the mode of contact, thus, can realize the simplification of guide frame, and global shape is simple.
Have again,, not only have the effect of above-mentioned pressure transducer, and in keeper and contact site guide frame,, form support, thus, realize posture stable of the keeper supporting of guide frame according to the mode of extending at outer circumferential side according to the present invention.
In addition, according to the present invention, not only have the effect of above-mentioned pressure transducer, and make web member when outstanding, the waterproof filling member is set on this teat from the web member housing, thus, the sealing of this part (water proofing property) improves.
In addition, according to the present invention, not only have the effect of above-mentioned pressure transducer, and the possibility of fluid arrival inner space is extremely low, the inner space can further be stablized, and high airtight conditions keeps serially.
Also have, according to the present invention, not only have the effect of above-mentioned pressure transducer, and can realize following pressure transducer, wherein, when atmosphere can be sent into the inner space, water proofing property is good.
Description of drawings
Fig. 1 is the longitudinal sectional view of the pressure transducer of the 1st embodiment of the present invention;
Fig. 2 is the longitudinal sectional view of the pressure transducer of the 2nd embodiment of the present invention;
Fig. 3 is the longitudinal sectional view of the pressure transducer of the 3rd embodiment of the present invention;
Fig. 4 is the longitudinal sectional view of the pressure transducer of the 4th embodiment of the present invention;
Fig. 5 (A) is the backplan of the major part of the 4th embodiment, and Fig. 5 (B) is the part side view;
Fig. 6 is the longitudinal sectional view of the pressure transducer of the 5th embodiment of the present invention;
Fig. 7 is the part enlarged drawing of Fig. 6;
Fig. 8 is the longitudinal sectional view of the pressure transducer of the 6th embodiment of the present invention;
Fig. 9 is the longitudinal sectional view of the pressure transducer of prior art.
Embodiment
Below by accompanying drawing, the 1st embodiment of the present invention～the 3rd embodiment is described, in instructions, adopt upper and lower, left and right and represent, and in the embodiment of reality, be not necessarily limited to this position relation.
The 1st embodiment
Fig. 1 is the longitudinal sectional view of the 1st embodiment of the present invention, below with reference to the accompanying drawings, is described.
The pressure transducer 1 of the 1st embodiment of the present invention is made of shell 10, sensing element 20, keeper 30, circuitry substrate 40, spring-like body 50, web member housing 70 and web member 80.In this pressure transducer 1, at the internal tank that is formed by shell 10 and web member housing 70, admitting has the pressure transducer main body that is formed by sensing element 20, keeper 30.
In addition, be used as the seat portion (insertion section) of sealing ring 95 described later and guide frame 90 at the groove 14 of above-mentioned ring-type.In addition, the fluid of shell 10 is sent into hole 12 and enclosure space 18 is interconnected.In addition, send into the periphery in hole 12 at the fluid of shell 10, be formed with threaded portion 19, in this threaded portion 19, embed the pipe (not shown) of measuring on the pressure side, shell 10 is fixed on the pipe with air tight manner.
Sensing element 20 has the function of detected pressures, it is by metal 21, pressure detecting element 22 constitutes with the pedestal 23 of silicone system, this pressure detecting element 22 is formed by semiconductor element, in this semiconductor element, the mode that forms bridge according to the end face in Semiconductor substrate is provided with a plurality of resistance with piezoresistance effect, this pedestal 23 is fixed in airtight mode on 21 the end face, 21 and the pars intermedia of pedestal 23, be provided with the sensing element opening 24 of the bottom that arrives pressure detecting element 22.On above-mentioned 21 end face 21a, place and fixing above-mentioned pedestal 23 with air tight manner, according to the mode of the face formation end face that is provided with resistance, pressure detecting element 22 is placed and is fixed on the end face of pedestal 23.At above-mentioned 21 bottom periphery, be provided with flange part 21b.
In above-mentioned pressure detecting element 22, seeing from the plane on the Semiconductor substrate of rectangular shape, pars intermedia forms with less thickness, formation is followed pressure and the diaphragm portion that is out of shape, at the end face of above-mentioned diaphragm portion, is the bridge shape and forms a plurality of piezoresistance elements, thus, formation is as the pressure detecting portion of strainmeter, and in the big portion of thickness of periphery, is provided with the circuit of the amplifying circuit that adopts ic manufacturing technology and make, arithmetic processing circuit etc.In addition, the welding disk (unlabelled) that is arranged on the end face of pressure detecting element 22 is connected by bonding wire 25 with welding disk on the end face that is arranged at circuitry substrate 40.Such as, the flat shape of pedestal 23 is a rectangle, in the center, is provided with sensing element opening 24.In addition, in the pedestal 23 of silicone system and the composition surfaces 21, be provided with Gold plated Layer (unlabelled) by modes such as sputter gold.
Adopt for above-mentioned 21 such as, the iron of 42 alloys etc.-nickel system alloy constitutes, its flat shape be a circle, is provided with sensing element opening 24 in the center.On in 21 and composition surface pedestal 23, be provided with Gold plated Layer.This pedestal 23 and 21 sensing element opening 24 are arranged at respectively on the same axle, send into hole 12 with the fluid of shell 10 and are communicated with, and constitute in the mode that pressure fluid is sent in the inner space 72.In addition, the bottom surface of pressure detecting element 22 is with air tight manner welding and be fixed on the end face of pedestal 23, the end face in the bottom surface of pedestal 23 and 21, be provided with the raw material of gold-silicon, add thermo-compressed (scrub), thus, form gold-silicon alloy, fix with the air tight manner welding.
At the end face 34 of above-mentioned keeper 30, be fixed with circuitry substrate 40 by bonding agent etc.This circuitry substrate 40 such as, printed circuit substrate by the insulativity that constitutes by the aluminium substrate forms, be provided with the circuitry substrate opening 41 at pressure detecting element 22 places of sensing element 20 at the place, centre, this circuitry substrate opening 41 is in the form of annular discs substantially, in its surface, be provided with signal is outputed to the outside electrode pad (unlabelled) that is formed by the gold solder dish, the welding zone portion (unlabelled) that forms by the gold solder dish that is connected with from the bonding wire 25 of pressure detecting element 22, the electric signal that constitutes from pressure detecting signal 22 is amplified, carry out calculation process and with the printed wiring and the circuit component of the circuit of its output.
Be connected with web member 80 as the electrode pad that is arranged at the input and output terminal on the circuitry substrate 40, web member 80 is connected with spring-like body 50, and electrode pad is provided with corresponding to signal wire, power supply supply line, ground wire.Above-mentioned spring-like body 50 such as, form by the electrical conductivity elastic body of phosphor bronze etc., one end 51 is fixed in by modes such as spot welding on the bottom 81 of keeper 80, other end side direction below warpage forms joggling part 52, forms bend 53 at its leading section.On in this bend 53 and the face that electrode pad contacts, carry out gold-plated processing partly.52 the part from end 51 to joggling part in the spring-like body 50 is supported on the bottom surface 74 of web member shell 70, and this spring-like body 50 is pressed against the effect of electrode pad upper type according to when being anchored on web member housing 70 on the shell 10 with bend 53.
In addition, by changing the shape of above-mentioned web member shell 70, the web member that can tackle various shape.In addition, web member 80 is used for powering to power lead and ground wire, adopts ground wire and signal wire, so that the output signal of sensing element 20 is outputed to the outside.
In addition,, be formed with guide frame contact site 78,, be formed with periphery smaller diameter portion 70a, on this periphery smaller diameter portion 70a, be embedded with the erection part 90a of guide frame 90 described later in its periphery in the bottom of bottom perisporium 75.In addition, the bottom of this guide frame contact site 78 contacts with the end face of the horizontal part 90b of above-mentioned guide frame 90, in addition, in the web member housing 70 of the top periphery that constitutes web member patchhole 79,, be formed with to fill and use recess 79a with the degree of depth of regulation, in that web member is set is after 80s, be filled with the waterproof filling member that the waterproof that formed by bonding agent uses (such as, silicone) 91, have the effect that prevents that rainwater etc. from invading.
Inside at above-mentioned endless groove 14, according to the inwall of above-mentioned perisporium 16 in the mode that connects, be embedded with guide frame 90 ring-type, that the cross section is L-shaped, the erection part 90a of this guide frame 90 is arranged at the outside of above-mentioned periphery smaller diameter portion 70a, in addition, end face at the horizontal part 90b of above-mentioned guide frame 90, in the inside of notch part 30a, be provided with sealing ring 97, in addition, interior perimembranous at horizontal part 90b is provided with sealing ring 95 in the inside of endless groove 14.Sealing ring 95 prevents that the water, moisture from the outside etc. from invading the situation of the inner space 72 of web member housing 70.In addition, sealing ring 96 is embedded in the top of the threaded portion 19 of shell 10, keeps impermeability between itself and the pipe.
To adopting these building blocks, the step of assembling pressure transducer 1 is described below.
(step 1)
At first, the laminated body of pressure detecting element 22 and pedestal 23 is fixed on 21 and the sensing element 20 of assembling, insert the keeper opening 32 of keeper 30 from the below, the end face of 21 flange part 21a is contacted with the projecting strip part 36 of keeper bottom surface 31, then, press the projected electrode of ring-type, 21 with the air tight manner welding and be fixed on the projecting strip part 36 of keeper bottom surface 31.In addition, sealing ring 97 is installed on the notch part 30a of the peripheral part bottom of keeper 30 in chimeric mode.
(step 2)
Then, adopting bonding agent, circuitry substrate 40 is fixed on the end face 34 of keeper 30 after, adopt the bonding wire 25 that forms by spun gold, the welding zone portion of pressure detecting element 22 is connected with the welding zone portion of circuitry substrate 40.Inside at the endless groove 14 in the enclosure space 18 of shell 10 is provided with guide frame 90 and sealing ring 95, then, places the pressure transducer assembly parts that formed by sensing element 20 and keeper 30 and circuitry substrate 40.
(step 3)
Then, in the web member patchhole 79 of web member housing 70, be inserted in the web member 80 that bottom 81 is fixed with spring-like body 50, then, filling on the top that is arranged at web member housing 70 is with among the recess 79a, and the waterproof filling member 91 of filling silicone etc. is realized sealing, then, assembling web member housing 70.
(step 4)
Afterwards, on the terminal that is fixed on the web member housing 70,, will be fixed in bend 53 location of the spring-like body 50 on the web member 80 according to the mode on the electrode pad that is positioned at circuitry substrate 40, then, above-mentioned web member housing 70 is inserted in the inner space 18 of shell 10.At this moment, guide frame contact site 78 is embedded between the erection part 90a in the ora terminalis of the inboard portion that is pressed 35 and the sealing ring 97 and the outside with inserted mode, this guide frame contact site 78 is inserted into horizontal part 90b contacts, inserting the stage that finishes, with the clamping part 17 on the top of the erection part (perisporium) 16 of shell 10 be snapped in web member housing 70 by on the clamping part 76, web member housing 70 is fixed on the shell 10.
By above step, assembling connecting piece 80 and electrode pad are realized the pressure transducer 1 of electrical connection.
According to the present invention, in the inside that the pressure transducer assembly parts is positioned shell 10, then, cover from the top with web member shell 70, with clamping part 17 buckles of shell, thus, can make the pressure transducer of sending into the gauge pressure in space with air tight manner formation fluid easily.Particularly, keeper 30 stably supports by horizontal part 90b and sealing ring 95 from the below and seals, stage portion by bottom perisporium 75, push the portion of being pressed 35 supports it from the top, in addition, inner peripheral surface from both sides by location division 77 and guide frame contact site 78 supports it, thus, skew (flooring) that not only can suppress keeper 30, and, double to wait it is sealed, thus by sealing ring 95, guide frame 90, sealing ring 97 etc., stably keep high airtight conditions, keep the high-air-tightness in the inner space 72 serially.
The 2nd embodiment
Below the 2nd embodiment of the present invention is described.Fig. 2 is the longitudinal sectional view of the 2nd embodiment.When the 2nd embodiment of the present invention was described, in Fig. 2, the ingredient identical with the 1st embodiment shown in Figure 1 adopted same label, omitted the description to it.
In the 2nd embodiment, the cross section of guide frame 90 ' be square (so,, have erection part 90a) not as the 1st embodiment.In addition, the peripheral part of above-mentioned guide frame 90 ' is supported on the way of contact on the inwall of bottom perisporium 75 of web member shell 70.In addition, the end face of this guide frame 90 ' is supported on the bottom surface 31 of keeper 30 with the way of contact.
The 2nd embodiment forms by above-mentioned scheme, not only has the effect of the 1st embodiment, but also has the effect simple in structure of guide frame 90 '.
The 3rd embodiment
Below the 3rd embodiment of the present invention is described.Fig. 3 is the longitudinal sectional view of the 3rd embodiment.Below when the 3rd embodiment of the present invention is described, in Fig. 3, ingredient identical with the 1st embodiment shown in Figure 1 or the ingredient identical with the 2nd embodiment shown in Figure 2 adopt same label, omit the description to it.
In the 3rd embodiment, the cross section of guide frame 90 ' is identical with the 2nd embodiment, is square, and is identical with the 2nd embodiment in addition, and the peripheral part of above-mentioned guide frame 90 ' is supported on the way of contact on the inwall of bottom perisporium 75 of web member shell 70.In addition, the end face of this guide frame 90 ' with the scope of broad and keeper 30 ' bottom surface 31 contact, support this keeper 30 '.
So, in the 3rd embodiment, by such scheme, not only have the effect of the 2nd embodiment, and the supporting of keeper 30 ' is more stable.
The 4th embodiment
Below the 4th embodiment of the present invention is described.Fig. 4 is the longitudinal sectional view of the 4th embodiment, and Fig. 5 (A) is the backplan of the major part of the 4th embodiment, and Fig. 5 (B) is the part side view.When the 4th embodiment of the present invention was described, in Fig. 4, ingredient identical with the 1st embodiment shown in Figure 1 or the ingredient identical with the 2nd embodiment shown in Figure 2 adopted same label, omitted the description to it.
The 4th embodiment is characterised in that at guide frame 90 " the part of annular floor, as shown in Fig. 5 (A) and Fig. 5 (B), the letdown tank 90 of prescribed depth " c is according to along the radioactive ray direction, form in the mode of inside and outside perforation.By this scheme, even the fluid of high pressure of sending into hole (pressure is sent into the hole) 12 sides at fluid is by guide frame 90 " perimembranous; arrive under the situation of bottom perisporium 75 of web member housing 70; occasion that arrives inner space 72 with the gap of fluid by the inner face of bottom perisporium 75 is compared; this fluid is by the little letdown tank 90 of above-mentioned resistance to flow " c, flow to the outside of web member housing 70, thus, do not have fluid to arrive the possibility of inner space 72.
In the 4th embodiment, letdown tank 90 " c is a groove, importantly compares; can have the mechanism in the outside that flows out to web member housing 70 with the occasion that the gap of inner face by bottom perisporium 75 arrives inner space 72; so, obviously, also can replace groove and adopt other structure.
In addition, the 4th embodiment describes at the occasion of the guide frame 90 that is used for the 1st embodiment, still, also can be used for the guide frame 90 ' of the 2nd embodiment or the 3rd embodiment.
The 5th embodiment
In addition, for pressure transducer of the present invention, the various embodiments described above can constitute according to the mode of atmosphere being sent into inner space 72.Fig. 6 is the longitudinal sectional view of pressure transducer 1 of embodiment of sending into the structure of atmosphere, and it represents in the embodiment shown in fig. 1 to have the structure that the atmosphere of sending into atmosphere is sent into hole 200.In Fig. 6, be in web member housing 70 with the difference of Fig. 1, form the structure that atmosphere is sent into hole 200.In addition, in the structure of the 5th embodiment, or the part that be equal to identical with the 1st embodiment adopts the label identical with Fig. 6, omits the description to it.
In Fig. 6, atmosphere is sent into hole 200 in web member housing 70, and towards the inner space 72 and form, one end (in Fig. 6, being the top) is an entrance side 201 from the outside, and with external communications, the outlet side 202 of the other end is communicated with inner space 72.In addition, in the end of entrance side 201, along thickness direction, the chip part 203 of sheet with circle of continuous poriferous structure is installed on the atmosphere example, i.e. the outside.
This chip part 203 such as, adopt ジ ヤ パ Application go ア テ Star Network ス Co., Ltd. registrar entitling GORE-TEXR material and form, its material adopts polytetrafluoroethylene (PTFE).
Fig. 7 is the part enlarged drawing of its installment state of expression, forms recess 204 on the surface of web member housing 70, at this recess 204 chip part 203 is installed.By this installation, form outer gas loading part 203A with outer pneumatic transmission hand-hole 200 corresponding parts (diameter phi i) in the chip part 203, by this part outer pneumatic transmission is gone into inner space 72, the peripheral part 203B of above-mentioned outer gas loading part 203A (the length φ 2 of diameter) is fused on the web member housing 70 by heating, is fixed on the web member housing 70.In addition, obviously, the installation of chip part 203 is not limited to the outside, also can be in web member housing 70 inside, that is and, the inboard forms recess.In addition, above-mentioned chip part 203 is successfully ventilated, and it is stronger to refuse the character (water repellency) of water, and has water proofing property, though at moisture from atmosphere, be attached under the lip-deep situation, moisture is not still invaded the inner space 72 of sensor.
According to above-mentioned the 5th embodiment, can realize following pressure transducer, it can guarantee aeration, and atmosphere is sent into inner space 72, and has water proofing property.
The 6th embodiment
Below the 6th embodiment shown in Figure 8 is described.Fig. 8 forms the outlet side 202 that atmosphere is sent into the other end in hole 200 for the above-mentioned chip part 203 of expression is installed on, that is, and and the longitudinal sectional view of the 6th embodiment of the structure of the inside of inner space 72.In the 6th embodiment, or the one-tenth part that be equal to identical with structure shown in Figure 1 adopts the label identical with Fig. 8, omits the description to it.
In this embodiment, form recess 205, circular chip part 203 is installed in the inside of this recess 205 on the surface of the inner space of web member housing 70 72 sides.Above-mentioned installation and Fig. 6, embodiment shown in Figure 7 are identical, and the peripheral part 203B with outer gas loading part 203A fixes in the mode that adds thermo-compressed.
By the above embodiments, identical with Fig. 6, embodiment shown in Figure 7, can realize following pressure transducer, wherein, in chip part 203, can guarantee aeration, atmosphere is successfully sent into inner space 72, and realize waterproof.In addition, the thermo-compressed that adds of the chip part 203 of the 5th, the 6th embodiment is generated heat by Joule heat, carries out fusion pressure welding, realizes engaging.
Claims (11)
1. pressure transducer, this pressure transducer comprises having the shell that pressure is sent into the hole; Pressure detecting element, this pressure detecting element is formed by the semiconductor element with piezoresistance effect; Keeper, this keeper is fixed above-mentioned pressure detecting element; The web member housing, this pressure transducer forms the inner space by above-mentioned pressure detecting element and above-mentioned keeper are engaged with air tight manner pressure transducer main body constitutes, the above-mentioned keeper of above-mentioned pressure transducer main body is provided with the circuitry substrate with electrode pad, the web member that is arranged on the above-mentioned web member housing is connected by the spring-like body that rubber-like is rich in electric conductivity with above-mentioned electrode pad, it is characterized in that above-mentioned keeper by guide frame and seal support on above-mentioned shell, the side of above-mentioned keeper is arranged at the inside of above-mentioned web member housing by sealing ring.
2. pressure transducer according to claim 1, it is characterized in that above-mentioned guide frame is formed by erection part and horizontal part, its cross sectional shape is the L shape, and above-mentioned erection part is between pressure transducer main body and web member housing, and above-mentioned horizontal part is supported on the keeper with the way of contact.
3. pressure transducer according to claim 1 is characterized in that the cross sectional shape of above-mentioned guide frame is square-shaped, and its end face is supported on the above-mentioned keeper with the way of contact.
4. pressure transducer according to claim 3 is characterized in that in the above-mentioned keeper extending at outer circumferential side with contact site guide frame, forms lower support portion.
5. pressure transducer according to claim 1 is characterized in that making above-mentioned web member from above-mentioned web member shell when outstanding, and this teat is provided with the waterproof filling member.
6. pressure transducer according to claim 1, the letdown tank that it is characterized in that prescribed depth are formed at according to the mode in inside and outside perforation on the part of bottom surface of above-mentioned guide frame.
7. pressure transducer according to claim 1, it is characterized in that above-mentioned web member housing has the outer pneumatic transmission hand-hole that is formed at inside, the end of pneumatic transmission hand-hole is equipped with chip part outside above-mentioned, in this chip part, has the emptying aperture of continuous poriferous structure along thickness direction.
8. pressure transducer according to claim 1 is characterized in that above-mentioned chip part is for circular, in the form of sheets.
9. pressure transducer according to claim 7 is characterized in that above-mentioned chip part is arranged at the entrance side of above-mentioned outer pneumatic transmission hand-hole.
10. according to claim 7 or 8 described pressure transducers, it is characterized in that above-mentioned chip part is arranged at the outlet side of above-mentioned outer pneumatic transmission hand-hole.
11. pressure transducer according to claim 7, the material that it is characterized in that above-mentioned chip part is a polyflon.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003378446A JP2005106796A (en) | 2003-08-05 | 2003-11-07 | Pressure sensor |
| JP378446/2003 | 2003-11-07 | ||
| JP378446/03 | 2003-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1614374A CN1614374A (en) | 2005-05-11 |
| CN1311227C true CN1311227C (en) | 2007-04-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100885656A Expired - Fee Related CN1311227C (en) | 2003-11-07 | 2004-11-05 | Pressure sensor |
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| CN (1) | CN1311227C (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5142742B2 (en) * | 2007-02-16 | 2013-02-13 | 株式会社デンソー | Pressure sensor and manufacturing method thereof |
| JP5010395B2 (en) | 2007-08-24 | 2012-08-29 | パナソニック株式会社 | Pressure sensor |
| CN102374920A (en) * | 2010-08-13 | 2012-03-14 | 浙江三花股份有限公司 | Heat exchange device and pressure transducer thereof |
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