CN1309289A - Optical probe of optical dust particle counter - Google Patents
Optical probe of optical dust particle counter Download PDFInfo
- Publication number
- CN1309289A CN1309289A CN 01105812 CN01105812A CN1309289A CN 1309289 A CN1309289 A CN 1309289A CN 01105812 CN01105812 CN 01105812 CN 01105812 A CN01105812 A CN 01105812A CN 1309289 A CN1309289 A CN 1309289A
- Authority
- CN
- China
- Prior art keywords
- light
- sensitive area
- path
- lens
- aplantic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
An optical probe of optical dust particle counter has the mutually perpendicular lighting light path and scattered light collecting light path. In said lighting light path, there are two aplanatic lenses and in another light path there is one aplanatic lens. Its advantages are high sensitivity, counting efficiency, granularity concentration, correctness, S/N ratio, and speed.
Description
The present invention is the detecting instrument of clean environment cleanliness factor---a kind of optic probe of optics airborne particle counter.
Formerly in the technology, the patent No. that Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences provides is " the efficient optic probe of white light airborne particle counter " of ZL99225686.0, as shown in Figure 1.This optic probe is mainly collected light path by orthogonal illumination path and scattered light and is formed.Illumination path wherein is made up of light source 1, illuminating lens group 2, light sensitive area 3, first spherical reflector 4 and light trapping 5, and light source 1 is an incandescent lamp bulb, and the centre of sphere of first spherical reflector 4 overlaps with the central point O of light sensitive area 3; Scattered light is collected optical routing second spherical reflector 6, focus lamp 7, field stop 8 and photodetector 9 compositions, and the centre of sphere of second spherical reflector 6 overlaps with the central point O of light sensitive area 3, and photodetector 9 is photomultipliers; The central point O of light sensitive area 3 is illumination path optical axis O
1O
1Collect light path light axis O with scattered light
2O
2Intersection point.
There is following shortcoming in this optic probe:
1. the efficiency of light energy utilization is lower, and light sensitive area illumination is also lower.In whole energy that light source 1 on this optic probe illumination path sends, have only very little a part of luminous energy can enter illuminating lens group 2 and illuminate light sensitive area 3.The aperture half-angle of its illuminating lens group 2 only is 20 °, solid angle Gongwei's 0.121 π sterad that light source 1 is opened.This has influenced the sensitivity of this optic probe, its minimum normally 0.30 μ m of particle diameter that surveys.
2. the collection efficiency of scattered light collection light path is lower.This optic probe can only be collected the scattered light of dust particles on perpendicular to a direction of illumination path optical axis by second spherical reflector 6, its receiving aperture half-angle has only 38.7 °, and the solid angle that light sensitive area 3 is opened is 0.439 π sterad.Thereby signal a little less than, signal to noise ratio (S/N ratio) is low, this optic probe is usually less than 3: 1 for the signal to noise ratio (S/N ratio) of 0.30 μ m particle.
First, second spherical reflector 4 and 6 use do not make this optic probe obtain enough good performance as yet.
3. the particle diameter investigative range is less, has only 1: 33.Because the numerical aperture of the illumination path of this optic probe is little, and the solid angle that scattered light collection light path is opened light sensitive area 3 is little, make scattered light intensity poor with respect to the monotonicity of the resonse characteristic of dust particle diameter, particularly have ambiguity in big particle size region, this has just limited its particle diameter investigative range.
4. in order to guarantee that this optic probe has certain performance, must adopt powerful light source bulb (its power is generally 20W) and highly sensitive photomultiplier.Thereby cause this optic probe heating serious, need cooling, volume is big, and serious heating has also influenced the detection stability of this optic probe.
5. light sensitive area 3 is little, causes the air-flow cross-sectional area little, has only φ 1.8mm, can't realize big flow measurement, and its air sampling flow is 2.83L/min (branch), so Measuring Time is long, efficient is low.The point that this optic probe is measured 10 grades of toilets needs 20min, and a point measuring 1 grade of toilet needs 200min.
The objective of the invention is provides a kind of high efficiency optics airborne particle counter optic probe in order to overcome the deficiency of above-mentioned optic probe for cleanliness factor detects.Its minimum particle diameter of surveying is better than 0.20 μ m, and counting efficiency and particle diameter concentration degree are higher than 80%; And will have that signal to noise ratio (S/N ratio) is higher, sensitivity is higher, measuring speed is fast, the particle diameter investigative range is big, good stability, volume is little, heating is few characteristics.
Contain two orthogonal illumination paths and scattered light in the structure of optic probe of the present invention and collect light path.On illumination path, on the direction of advancing along light source 1 emission light beam G, be equipped with first aplantic lens 10, illuminating lens group 2, second aplantic lens 8, first spherical reflector 4 and light trapping 5 successively, first spherical reflector 4 places in the light trapping 5, and its centre of sphere overlaps with the central point O of light sensitive area 3.Scattered light is collected the optical axis O of light path
2O
2Optical axis O with illumination path
1O
1The intersection point O that intersects vertically between the illuminating lens group 2 on the illumination path and first spherical reflector 4 is the central point O of light sensitive area 3.On scattered light is collected light path, second spherical reflector 6 is arranged at a side of light sensitive area 3; Scattered light at light sensitive area 3 opposite side relative with second spherical reflector 6 is collected on the light path, is equipped with the 3rd aplantic lens 12, receiver lens group 13, field stop 8 and photodetector 9 successively from light sensitive area 3 beginnings.That is to say that the 3rd aplantic lens 12 places the scattered light between light sensitive area 3 and the receiver lens group 13 to collect on the light path.The centre of sphere of second spherical reflector 6 overlaps with the central point O of light sensitive area 3; Field stop 8 between receiver lens group 13 and photodetector 9, and with the central point O conjugation of light sensitive area 3.As shown in Figure 2.
From structure of the present invention such as Fig. 2 and structure such as Fig. 1 comparison of technology formerly, characteristics of the present invention are exactly to be equipped with first aplantic lens 10 on the illumination path between light source 1 and the illuminating lens group 2, are equipped with second aplantic lens 11 on the illumination path between illuminating lens group 2 and the light sensitive area 3.On the collection of the scattered light between light sensitive area 3 and the receiver lens group 13 light path, be equipped with the 3rd aplantic lens 12.
Said first, second, third aplantic lens 10,11 and 12 is simple lenses among the present invention, as shown in Figure 3, it simultaneously is a concave spherical surface, another side is protruding sphere, there is a pair of conjugate points in its concave spherical surface one side, the i.e. first conjugate points A and the second conjugate points A ', wherein the first conjugate points A is positioned on the concave sphere's center, and the second conjugate points A ' is positioned at outside the concave sphere's center.A branch of from the first conjugate points A, numerical aperture be sinU disperse the sphere light beam, behind first aplantic lens, to become another bundle numerical aperture sinU '=(sinU)/n and be the divergent beams of the centre of sphere with the second conjugate points A ', n is the refractive index of aplantic lens.In the transmission course of light beam, do not introduce spherical aberration and paraxial coma, but can change its numerical aperture.Otherwise, can the numerical aperture that incides aplantic lens be sinU ' convergence sphere light beam aberrationless be transformed to another the bundle numerical aperture be the convergence sphere light beam of sinU=nsinU '; Picture point A moves to aplantic lens simultaneously, makes image distance shorten to original l/n.Utilize this characteristic of aplantic lens, under the situation of not introducing aberration, can bring up to original n to the numerical aperture of optical system doubly, thereby improve the utilization factor of optical system greatly luminous energy.After using three aplantic lenses 10,11,12, the performance of optic probe of the present invention is significantly improved.
Light source 1 among the present invention can be an incandescent lamp, also can be the semiconductor laser of low-power consumption.
First aplantic lens 10 among the present invention can increase the numerical aperture of illumination path, and the luminous energy that enters illuminating lens group 2 that sends from light source 1 is increased considerably, and has promptly improved the efficiency of light energy utilization of light source 1.If the refractive index of first aplantic lens 10 is n, the numerical aperture of illuminating lens group 2 is sinU ', then adopt the numerical aperture of aplantic lens 10 later illumination paths to bring up to nsinU ', and the efficiency of light energy utilization is brought up to original sin
2{ [sin
-1(nsinU ')]/2}/sin
2(U '/2) doubly.First aplantic lens 10 and second aplantic lens 11 are placed on two ends with respect to illuminating lens group 2 symmetries, and first, second aplantic lens 10 uses with 11, are consistent in the time of can making the illumination path enlargement ratio and only use illuminating lens group 2.Use after two aplantic lenses 10 and 11, also make the object distance of illumination path and image distance foreshorten to original l/n, thereby the illumination path total length shortens.As can be seen, the refractive index n of three aplantic lenses 10,11,12 is big more, helps the raising of optic probe performance more.
The reflecting surface of first spherical reflector 4 among the present invention is coated with the high reflectance dielectric optical thin film, or enhancement mode aluminium total reflection film, and its reflectivity is greater than 96%.Its effect is the illuminating bundle reflected light sensitizing range 3 that enters light trapping 5, makes tested dust particle be subjected to the irradiation of the luminous energy of both direction, and the illumination light intensity doubles; Simultaneously, can make the light source 1 filament picture at light sensitive area 3 places after 4 reflections of first spherical reflector, image in light sensitive area 3 again, adjust first spherical reflector 4 two filament pictures are suitably staggered, thus the illumination light intensity unevenness of light sensitive area 3 when having overcome the single direction illumination.
The reflecting surface of second spherical reflector 6 among the present invention is coated with the high reflectance dielectric optical thin film, or enhancement mode aluminium total reflection film, and its reflectivity is greater than 96%.Its effect is that the scattered light of a side relative with the 3rd aplantic lens 12 that the tested dust particle by light sensitive area 3 is sent converges to light sensitive area 3, and then enters receiver lens group 13, is twice thereby scattered light signal intensity is increased.
Placing the effect of the 3rd aplantic lens 12 on the scattered light collection light path between light sensitive area 3 and the receiver lens group 13 among the present invention is to increase the numerical aperture that scattered light is collected light path, and then improves the intensity of scattered light signal.It is identical with first aplantic lens 10 in the illumination path to the increase rate of scattered light signal.
The clear aperture of the field stop 8 among the present invention is a rectangle, and its effect has two: the one, and stop particle scattering light veiling glare in addition to enter photodetector 9; The 2nd, make all pulse signals of photodetector 9 outputs have identical width, guarantee that pulse signal obtains identical enlargement ratio by follow-up processing of circuit the time, can improve the accuracy of testing result like this.
The course of work of the present invention is: the luminous energy that light source 1 sends enters light trapping 5 after illuminating light sensitive area 3 by first aplantic lens 10, illuminating lens group 2 and second aplantic lens 11, is reflected back into light sensitive area 3 by wherein first spherical reflector 4 again; Dust particle to be measured is with certain speed and perpendicular to two optical axis O
1O
1With optical axis O
2O
2Produce when flowing through light sensitive area 3 and the proportional scattered light of its diameter, with illumination path optical axis O
1O
1Scattered light on the vertical both direction in certain solid angle scope is collected and is assembled by second spherical reflector 6, the 3rd aplantic lens 12 and receiver lens group 13, project on the photodetector 9 by field stop 8, one of photodetector 9 output and the big or small proportional electric signal of dust particle, this electric signal obtain corresponding particle diameter value after by follow-up processing of circuit.
Advantage of the present invention, compare with technology formerly:
1. the efficiency of light energy utilization is higher, and light sensitive area 3 illumination are higher.Because first aplantic lens 10 makes the numerical aperture of illumination path bring up to nsinU ', thereby make the luminous energy that enters light sensitive area 3 bring up to original sin
2{ [sin
-1(nsinU ')]/2}/sin
2(U '/2) doubly.Therefore, the sensitivity of optic probe of the present invention, counting efficiency and particle diameter concentration degree all greatly improve;
2. the collection efficiency of scattered light collection light path is higher.Because second spherical reflector 6, the 3rd aplantic lens 12 and receiver lens group 13 two-way, wide-angle receiving scattered lights.Scattered light on another direction that second spherical reflector 6 sends the dust particle that flows through light sensitive area 3 reflexes to the 3rd aplantic lens 12, enters receiver lens group 13, and its scattered light collection efficiency to dust particle can improve 2sin
2{ [sin
-1(n sinU ')]/2}/sin
2(U '/2) doubly, this all is improved the signal intensity of optic probe of the present invention and signal to noise ratio (S/N ratio), thus the sensitivity that has improved optic probe;
3. scattered light intensity of the present invention is good with respect to the monotonicity of the resonse characteristic of dust particle diameter.Collect the range of receiving of light path to the dust particle scattered light because second spherical reflector 6 and the 3rd aplantic lens 12 have enlarged scattering, the light scattering resonse characteristic is level and smooth, fluctuating is little, the particle diameter investigative range is big thereby make;
4. because the efficiency of light energy utilization height of optic probe of the present invention, so can adopt low power incandescent lamp bulb or semiconductor laser as light source 1, can adopt simultaneously the side-on photomultiplier or the photodiode of low gain, or photoelectric cell is as photodetector 9.Thereby reduced thermal value and electrical loss, reduced the volume of optic probe simultaneously again;
5. owing in above-mentioned light path, be equipped with three aplantic lenses 10,11 and 12, make optic probe detection speed of the present invention improve more than 10 times than the detection speed of technology formerly.
Description of drawings:
Fig. 1 is the structural representation of the efficient optic probe of technology white light airborne particle counter formerly.
Fig. 2 is the structural representation of optics airborne particle counter optic probe of the present invention.
Fig. 3 is the structural representation of aplantic lens in the optics airborne particle counter optic probe of the present invention.
Embodiment:
Shown in the structure of Fig. 2.Light source 1 is special halogen tungsten lamp, and power is 10W; First, second and the 3rd aplantic lens 10,11 and structure of 12 are identical, two surperficial radius-of-curvature is respectively-16.8mm and-10.188mm, refractive index n=1.806; Illuminating lens group 2 by four lump cokes apart from be 30mm, the identical in structure cemented doublet is formed, total enlargement ratio of illumination path equals 1, the aperture half-angle U=42 of illumination path °, its to light source 1 to open solid angle be 0.514 π sterad, be 4.25 times of technical optics probe formerly.The light source 1 and first aplantic lens 10 are facing to the distance between the surface of light source 1, and second aplantic lens 11 is 10.188mm facing to the distance between the central point O of light sensitive area 3 surfaces and light sensitive area 3; Light sensitive area 3 is of a size of 2mm * 2mm * 0.8mm; First, second spherical reflector 4 and 6 spherical radius are 18mm, and clear aperture is φ 26mm, and its reflecting surface is coated with the enhancement mode aluminium film of high reflectance, and its centre of sphere overlaps with the central point O of light sensitive area 3.The 3rd aplantic lens 12 is 10.188mm with the distance of light sensitive area central point O.It is 1.027 π sterad to the total effective collection solid angle of scattered light that scattered light is collected light path, is 2.34 times of technical optics probe formerly.Field stop 8 is that clear aperture is the rectangle of 3mm * 1.2mm, and its long side direction is perpendicular to the track of dust particle by light sensitive area 3.Photodetector 9 is photodiodes, is positioned at field stop 8 about 3mm place afterwards.Bring up to 9.945 times of the probe of technical optics formerly owing to used three aplantic lenses 10,11,12, total signal strength of the present invention
It is 0.18 μ m that the minimum of embodiment is surveyed particle diameter, detectable particle size range is 0.18～20 μ m, just the particle diameter investigative range is 1: 110, the minimum signal to noise ratio (S/N ratio) of surveying the particle diameter place is 4.5: 1, counting efficiency and particle diameter concentration degree all can reach 85%, surpass the requirement of national metrological verification regulations JJG547-88; The air sampling flow is 5.66L/min, meets the requirement of u.s. federal standard 209E about the air sampling flow; The thermal value of optic probe of the present invention is few, and testing result is reliable and stable; Compact conformation, physical dimension are 153mm * 95mm * 70mm, less than half of technology formerly.
When the total enlargement ratio that makes illumination path equals n times, make the size of light sensitive area 3 increase to 3.6mm * 3.6mm * 1.6mm, correspondingly the air-flow xsect increases to φ 3.4mm, thereby make the air sampling flow of optic probe of the present invention reach 28.3L/min, can realize fast detecting clean environment.A point that adopts optic probe of the present invention to measure 10 grades of toilets only needs 2min, and a point measuring 1 grade of toilet only needs 20min.Detection speed all improves more than 10 times than technology formerly.
Claims (2)
1. the optic probe of an optics airborne particle counter, contain two orthogonal illumination paths and scattered light and collect light path, on illumination path, on the direction of advancing along light source (1) emission light beam (G), be equipped with illuminating lens group (2) successively and place interior first spherical reflector (4) of light trapping (5), scattered light is collected the optical axis (O of light path
2O
2) with the optical axis (O of illumination path
1O
1) a bit (O) of intersecting vertically between illuminating lens group (2) on the illumination path and first spherical reflector (4) be the central point (O) of light sensitive area (3); Collect on the light path at scattered light, side in light sensitive area (3) has second spherical reflector (6), collect on the light path at the scattered light of light sensitive area (3) opposite side relative with second spherical reflector (6), from light sensitive area (3), be equipped with receiver lens group (13) successively, field stop (8) and photodetector (9), it is characterized in that on the illumination path between light source (1) and the illuminating lens group (2), being equipped with first aplantic lens (10), on the illumination path between illuminating lens group (2) and the light sensitive area (3), be equipped with second aplantic lens (11), collect on the light path at the scattered light between light sensitive area (3) and the receiver lens group (13) and be equipped with the 3rd aplantic lens (12).
2. the optic probe of optics airborne particle counter according to claim 1, it is characterized in that said first aplantic lens (10), second aplantic lens (11) and the 3rd aplantic lens (12) all are that an one side is that concave spherical surface, another side are the simple lens of protruding sphere, exist one to be positioned at first conjugate points (A) on the concave sphere's center and to be positioned at second conjugate points (A ') outside the concave sphere's center in its concave spherical surface one side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01105812 CN1116601C (en) | 2001-03-30 | 2001-03-30 | Optical probe of optical dust particle counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01105812 CN1116601C (en) | 2001-03-30 | 2001-03-30 | Optical probe of optical dust particle counter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1309289A true CN1309289A (en) | 2001-08-22 |
| CN1116601C CN1116601C (en) | 2003-07-30 |
Family
ID=4654876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01105812 Expired - Fee Related CN1116601C (en) | 2001-03-30 | 2001-03-30 | Optical probe of optical dust particle counter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1116601C (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102096124A (en) * | 2011-01-27 | 2011-06-15 | 南京理工大学 | Infrared aspherical and aplanatic lens device |
| CN101162195B (en) * | 2007-11-16 | 2011-08-17 | 苏州华达仪器设备有限公司 | Dust particle counter |
| CN101900675B (en) * | 2009-06-01 | 2012-05-23 | 上海通微分析技术有限公司 | Enhanced light signal detection system |
| CN101718770B (en) * | 2009-11-24 | 2013-01-02 | 深圳市赛纳威环境仪器有限公司 | Automobile air quality monitoring and purifying system |
| CN103149136A (en) * | 2013-03-08 | 2013-06-12 | 苏州市尚科产品检测中心 | Sensor cavity |
| CN102066901B (en) * | 2008-01-15 | 2013-07-17 | 马尔文仪器有限公司 | Light scattering measurements using simultaneous detection |
| CN116990281A (en) * | 2023-09-27 | 2023-11-03 | 中国科学院合肥物质科学研究院 | Cavity-enhanced Raman detection device with high collection efficiency |
| CN116990281B (en) * | 2023-09-27 | 2024-04-26 | 中国科学院合肥物质科学研究院 | Cavity-enhanced Raman detection device with high collection efficiency |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101819128B (en) * | 2010-04-26 | 2011-11-16 | 浙江万里学院 | Laser dust detection device for resisting dust deposition disturbance |
-
2001
- 2001-03-30 CN CN 01105812 patent/CN1116601C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101162195B (en) * | 2007-11-16 | 2011-08-17 | 苏州华达仪器设备有限公司 | Dust particle counter |
| CN102066901B (en) * | 2008-01-15 | 2013-07-17 | 马尔文仪器有限公司 | Light scattering measurements using simultaneous detection |
| CN101900675B (en) * | 2009-06-01 | 2012-05-23 | 上海通微分析技术有限公司 | Enhanced light signal detection system |
| CN101718770B (en) * | 2009-11-24 | 2013-01-02 | 深圳市赛纳威环境仪器有限公司 | Automobile air quality monitoring and purifying system |
| CN102096124A (en) * | 2011-01-27 | 2011-06-15 | 南京理工大学 | Infrared aspherical and aplanatic lens device |
| CN103149136A (en) * | 2013-03-08 | 2013-06-12 | 苏州市尚科产品检测中心 | Sensor cavity |
| CN116990281A (en) * | 2023-09-27 | 2023-11-03 | 中国科学院合肥物质科学研究院 | Cavity-enhanced Raman detection device with high collection efficiency |
| CN116990281B (en) * | 2023-09-27 | 2024-04-26 | 中国科学院合肥物质科学研究院 | Cavity-enhanced Raman detection device with high collection efficiency |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1116601C (en) | 2003-07-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4523841A (en) | Radiant energy reradiating flow cell system and method | |
| US4341471A (en) | Apparatus and method for measuring the distribution of radiant energy produced in particle investigating systems | |
| AU2005100959A4 (en) | Laser Distance Measuring Device | |
| JP6691043B2 (en) | Particle characterization device | |
| US4273443A (en) | Method and apparatus for measurement of reradiation in particle flow cell systems | |
| CN101487786A (en) | Measurement sensor for inhalable dust concentration | |
| CN104614362B (en) | Free space gas Raman scattering collecting device | |
| CA1135971A (en) | Radiant energy reradiating flow cell system and method | |
| US20100165341A1 (en) | Compact Detector For Simultaneous Particle Size And Fluorescence Detection | |
| CN101470066A (en) | Optical sensor for high-flux dust particle counter | |
| CN2729694Y (en) | Optical apparatus of light scattering dust particle measuring gauge | |
| KR20080033847A (en) | Linear light concentrator | |
| JP2002502490A (en) | Concave angle irradiation system for particle measuring device | |
| US9323035B2 (en) | Annular optical device | |
| CN110146430A (en) | A kind of flow cytometer optical system | |
| CN1116601C (en) | Optical probe of optical dust particle counter | |
| CN2397489Y (en) | Laser dust measurer optical probe | |
| CN103196552B (en) | Measuring device for light intensity of narrow-light-beam light-emitting diode (LED) lamp | |
| Rönnow et al. | Design review of an instrument for spectroscopic total integrated light scattering measurements in the visible wavelength region | |
| CN102564929A (en) | High-flow dust particle counting sensor with novel photosensitive area structure | |
| CN2935133Y (en) | Optical sensor | |
| CN2480832Y (en) | Optical sensor for dust particle counter | |
| CN207571018U (en) | A kind of gas absorption cell light channel structure suitable for fume continuous monitoring system | |
| CN112763067A (en) | Illumination reflector arrangement for illuminating a sample, optical analysis device and method for producing an illumination reflector arrangement | |
| WO2001027590A2 (en) | Optical element for flow cytometry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |