CN1308998C - 用于离子注入的方法和装置 - Google Patents

用于离子注入的方法和装置 Download PDF

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Publication number
CN1308998C
CN1308998C CNB028144961A CN02814496A CN1308998C CN 1308998 C CN1308998 C CN 1308998C CN B028144961 A CNB028144961 A CN B028144961A CN 02814496 A CN02814496 A CN 02814496A CN 1308998 C CN1308998 C CN 1308998C
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CN
China
Prior art keywords
dose
spatial frequency
scan lines
dose correction
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB028144961A
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English (en)
Chinese (zh)
Other versions
CN1575503A (zh
Inventor
杰伊·T·舒尤尔
格雷戈里·R·杰比拉热
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Semiconductor Equipment Associates Inc
Original Assignee
Varian Semiconductor Equipment Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Semiconductor Equipment Associates Inc filed Critical Varian Semiconductor Equipment Associates Inc
Publication of CN1575503A publication Critical patent/CN1575503A/zh
Application granted granted Critical
Publication of CN1308998C publication Critical patent/CN1308998C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30455—Correction during exposure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation
    • H01J2237/31706—Ion implantation characterised by the area treated
    • H01J2237/3171—Ion implantation characterised by the area treated patterned
    • H01J2237/31713—Focused ion beam

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CNB028144961A 2001-05-25 2002-05-23 用于离子注入的方法和装置 Expired - Lifetime CN1308998C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US29375401P 2001-05-25 2001-05-25
US60/293,754 2001-05-25
US10/152,887 US20020175297A1 (en) 2001-05-25 2002-05-21 Methods and apparatus for ion implantation with variable spatial frequency scan lines
US10/152,887 2002-05-21

Publications (2)

Publication Number Publication Date
CN1575503A CN1575503A (zh) 2005-02-02
CN1308998C true CN1308998C (zh) 2007-04-04

Family

ID=26849958

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028144961A Expired - Lifetime CN1308998C (zh) 2001-05-25 2002-05-23 用于离子注入的方法和装置

Country Status (6)

Country Link
US (1) US20020175297A1 (enExample)
EP (1) EP1402559A1 (enExample)
JP (1) JP4101746B2 (enExample)
KR (1) KR20040005988A (enExample)
CN (1) CN1308998C (enExample)
WO (1) WO2002097853A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050061997A1 (en) * 2003-09-24 2005-03-24 Benveniste Victor M. Ion beam slit extraction with mass separation
US6903350B1 (en) * 2004-06-10 2005-06-07 Axcelis Technologies, Inc. Ion beam scanning systems and methods for improved ion implantation uniformity
US7566886B2 (en) * 2006-08-14 2009-07-28 Axcelis Technologies, Inc. Throughput enhancement for scanned beam ion implanters
US8472089B2 (en) * 2009-03-06 2013-06-25 Micronic Laser Systems Rotor imaging system and method with variable-rate pixel clock
US8227773B2 (en) 2010-07-29 2012-07-24 Axcelis Technologies, Inc. Versatile beam glitch detection system
JP5638995B2 (ja) * 2011-03-28 2014-12-10 株式会社Ｓｅｎ イオン注入方法及びイオン注入装置
JP2013089409A (ja) * 2011-10-17 2013-05-13 Sen Corp イオン注入装置及びイオン注入方法
CN103972011B (zh) * 2014-05-20 2016-06-15 上海华力微电子有限公司 离子注入设备及离子注入方法
JP5970583B2 (ja) * 2015-04-23 2016-08-17 住友重機械イオンテクノロジー株式会社 イオン注入装置及びイオン注入方法
WO2018129379A1 (en) * 2017-01-09 2018-07-12 Tel Epion Inc. Compensated location specific processing apparatus and method
JP7242469B2 (ja) * 2019-08-07 2023-03-20 住友重機械イオンテクノロジー株式会社 イオン注入装置およびイオン注入方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5003183A (en) * 1989-05-15 1991-03-26 Nissin Electric Company, Limited Ion implantation apparatus and method of controlling the same
US5046148A (en) * 1989-05-15 1991-09-03 Nissin Electric Company, Limited Ion implantation apparatus
US5068539A (en) * 1989-05-15 1991-11-26 Nissin Electric Company, Limited Ion implantation apparatus
US5319212A (en) * 1992-10-07 1994-06-07 Genus, Inc. Method of monitoring ion beam current in ion implantation apparatus for use in manufacturing semiconductors
CN1125896A (zh) * 1994-07-01 1996-07-03 易通公司 离子束电子中和器
CN1208245A (zh) * 1997-01-17 1999-02-17 易通公司 离子注入机的剂量控制

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283631A (en) * 1980-02-22 1981-08-11 Varian Associates, Inc. Bean scanning and method of use for ion implantation
US6323497B1 (en) * 2000-06-02 2001-11-27 Varian Semiconductor Equipment Assoc. Method and apparatus for controlling ion implantation during vacuum fluctuation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5003183A (en) * 1989-05-15 1991-03-26 Nissin Electric Company, Limited Ion implantation apparatus and method of controlling the same
US5046148A (en) * 1989-05-15 1991-09-03 Nissin Electric Company, Limited Ion implantation apparatus
US5068539A (en) * 1989-05-15 1991-11-26 Nissin Electric Company, Limited Ion implantation apparatus
US5319212A (en) * 1992-10-07 1994-06-07 Genus, Inc. Method of monitoring ion beam current in ion implantation apparatus for use in manufacturing semiconductors
CN1125896A (zh) * 1994-07-01 1996-07-03 易通公司 离子束电子中和器
CN1208245A (zh) * 1997-01-17 1999-02-17 易通公司 离子注入机的剂量控制

Also Published As

Publication number Publication date
EP1402559A1 (en) 2004-03-31
WO2002097853A1 (en) 2002-12-05
JP4101746B2 (ja) 2008-06-18
JP2004531066A (ja) 2004-10-07
US20020175297A1 (en) 2002-11-28
CN1575503A (zh) 2005-02-02
KR20040005988A (ko) 2004-01-16

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Granted publication date: 20070404