CN1304677C - Ordinary pressure glow discharge modifying application system and method of silpron and chemical fibre fabric - Google Patents
Ordinary pressure glow discharge modifying application system and method of silpron and chemical fibre fabric Download PDFInfo
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- CN1304677C CN1304677C CNB2004100211916A CN200410021191A CN1304677C CN 1304677 C CN1304677 C CN 1304677C CN B2004100211916 A CNB2004100211916 A CN B2004100211916A CN 200410021191 A CN200410021191 A CN 200410021191A CN 1304677 C CN1304677 C CN 1304677C
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Abstract
The present invention relates to a normal pressure glow discharge modification application system and a method thereof for polypropylene and chemical fibers, particularly to a surface modification system and a technology thereof capable of generating large area uniform undamaged glow discharge plasma under normal pressure, which belongs to the technical field of chemical fiber modification, glow discharge and plasma. The surface modification system and the technology thereof are suitable for the industrial application of the modification of chemical fiber fabrics and polypropylene fabrics; the system can also meet the requirements for the relevant basic research of the characteristics of discharge plasma, the interaction mechanism of the plasma with the surface, etc., not only overcomes the difficulty that atmospheric corona discharge and the electric discharge of high energy density filaments existing in silent discharge plasma can damage fabrics, but also solves the problems of large device investment, complicated operation, large energy consumption, etc. of low pressure glow discharge plasma modification devices; the system adopts the scheme of glow discharge under the pressure which is slightly higher than atmospheric pressure and multiple channel dynamic seal to buffer the gas exchange between modification chambers and the atmosphere for jointing the modification technology of fabrics into the production line of the dyeing and finishing operation of the fabrics.
Description
Technical field the invention belongs to synthetic fiber modification, glow discharge, technical field of plasma.Relate to discharge plasma surface modification system and technology, the large tracts of land of particularly a kind of spulon Silpron and chemical ﹠ blended fabric, even, undamaged atmospheric pressure glow discharge plasma APGDP surface modification system and the technology that is suitable for industrial applications to chemical ﹠ blended fabric.
Background technology is because the raw material polypropylene source of thin dawn, superfine denier polypropylene fibers spulon is abundant, cheap, light weight is warming, stable performance, and wicking is good, the perspire of energy one-way wet-guide, become at present the preferred lining of senior underwear and sweater, be called as " human clothing's air-conditioner ", be a kind of perfect textile fabric that is close to, in five big chemical fibres, have huge competitiveness and vast potential for future development.But polypropylene fibre is because its macromolecular chain structure is regular, and the degree of crystallinity height lacks functional group and polar group, so hygroscopicity is poor, can not dye, and this has limited its further popularization.For making it become the garment material that more share, must implement modification to it.The method of modifying of chemical ﹠ blended fabric is a lot, chemical method is arranged, as adding the blend of property-modifying additive in the copolymerization of in macromolecular chain, introducing the 3rd component, the polymer manufacture process, surface modification, the change fiber process condition of soaking and being coated with etc. of chemical reaction take place on the surface, by metamorphosis and compound, blending, mix physical modification that means such as knit realize etc.Traditional method of modifying will consume a large amount of precious water resource and chemicals, not only complicated operation, and contaminated environment.Plasma modification is a kind of dry gas, solid phase dry process mode, fast, efficient, pollution-free, simple to operate, save the energy, reaction only relates to the shallow top layer of fiber 100nm, gives fiber new characteristic under the situation of the premium properties that does not change fibrous matrix.The plasma that in the past was used for the chemical ﹠ blended fabric surface modification can be by low pressure glow discharge, and atmospheric pressure corona discharge and silent discharge produce.All there is insurmountable separately problem in these three kinds of discharge plasma chemical ﹠ blended fabric process for modifying surface, influence its development and use.The low pressure glow discharge plasma can provide large tracts of land, uniform plasma, chemical ﹠ blended fabric is realized the modification of not damaged uniform outer surface, but it must move under low pressure, owing to need vacuumize, equipment investment is big, and complicated operation is difficult to realize suitability for industrialized production; And used electric energy 85% is used to keep dynamic vacuum, and power consumption is big, the cost height, thereby low pressure glow discharge plasma chemical ﹠ blended fabric process for modifying surface is unsuitable for industrialized extensive use.Though atmospheric pressure corona discharge and silent discharge plasma are worked under normal pressure, the filament that exists a large amount of high-energy-densities in its discharge plasma discharges, and they will cause damage to fabric, be unsuitable for the chemical ﹠ blended fabric surface modification and use.
Summary of the invention the purpose of this invention is to provide a kind of can under normal pressure, produce large tracts of land, even, undamaged glow discharge plasma, can be to multiple chemical ﹠ blended fabric and polymer film or polymeric membrane, particularly the spulon fabric is realized the atmospheric pressure glow discharge plasma reforming system and the method for surface modification commercial Application.
Technical solution of the present invention is:
The normal pressure glow discharge modification application system of spulon and chemical ﹠ blended fabric is made up of reforming apparatus, electric power system, distribution air supply system, gas heating circulation system, gas componant and plasma activity analysis system, computer data acquiring and control system,
A. reforming apparatus by the modification chamber 2 at atmospheric pressure glow discharge plasma source 1 and place thereof, Sample Room 3, finished room 4, movable sealing mechanism 5, fabric wrapping roller 6,7, partially around correcting mechanism 8, support 9, forward flange 10, two side flanges 12, import and export seal cover 13 and buncher 15 is formed, the partition 14 that is connected on the forward flange 10 is separated into Sample Room 3, modification chamber 2 and finished room 4 with device, cut off 14 with reforming apparatus between contact-making surface adopt vacuum seal to be connected;
B. electric power system is made up of intermediate frequency power supply 16 and impedance matching network 17 and digital storage oscilloscope 18, intermediate frequency power supply 16 is the power supply of 1～20kHz frequency modulation, 0～20kV transformation, it links to each other with the upper/lower electrode 19 of plasma source by impedance matching network 17, digital storage oscilloscope 18 links to each other with the upper/lower electrode 19 of plasma source with current probe by high-voltage probe, and oscillograph links to each other with control system 34 with computer data acquiring;
C. distribution, air supply system are made up of source of the gas 20, mass flow controller 21, mixing chamber 22, pressure rule 23, pressure gauge 24 and exhaust pump 25, and mass flow controller 21 links to each other with control system 34 with computer data acquiring;
D. gas heating circulation system 26 is made up of the membrane pump that links to each other with modification chamber 2 by valve and heater and thermocouple thermometer 27, and thermocouple thermometer 27 links to each other with control system 34 with computer data acquiring;
E. gas componant and plasma activity analysis system are made up of QMS 28 and spectrometer 29, QMS 28 links to each other with device by needle-valve 30, spectrometer 29 links to each other with device by fibre bundle 33, see through quartzy observation window 32 and gather the light emission of plasma, QMS 28 and spectrometer 29 link to each other with control system 34 with computer data acquiring.
The normal pressure glow discharge modification application system of described spulon and chemical ﹠ blended fabric, its plasma source 1 is by surface smoothness 6～11 roads, formed at a distance of two pairs of levels of 1～30mm adjustable gaps, the rectangle stainless steel electrode 19 of parallel placement, electrode 19 is the curved surface of 10～30mm for radius of curvature all around, be fixed with thin aluminium oxide or the quartz glass dieelctric sheet 36 that thickness is 0.1～2mm at electrode surface, electrode is connected with the electrode handle 37 of water flowing cooling, and high voltage bearing dielectric separation layer 38 is arranged between electrode handle 37 and the modification chamber 2.
The normal pressure glow discharge modification application system of described spulon and chemical ﹠ blended fabric carries out spulon and the chemical ﹠ blended fabric method of modifying is, on the fabric wrapping roller, load onto and treat the modified fabric volume, open forward flange and both sides sealing lid, draw back the spacing of two electrodes, the traction fabric passes the gap of four movable sealings seam, two pairs of electrodes and partially around correcting roller; Close forward flange and both sides sealing lid, system is evacuated to＜low vacuum of 100Pa, charge into working gas, find time, be inflated to again gas component again and reach and give the air pressure that fixed component and atmospheric pressure add 80～800Pa with exhaust pump; Open the right side seal cover, with fabric wrapping roller tensioning fabric, regulate electrode spacing to giving fixed distance, start intermediate frequency power supply, the parameter of regulating the matching network element makes the imaginary part of entire circuit impedance approaching as far as possible zero, and boosted voltage produces atmospheric pressure glow discharge plasma; Starting gas gauge and computer control system regulates and control to pressure balance, heating circulation system heating work gas to 40～120 degree that start gas are Celsius, start QMS and regulate and control mass flow controller and keep gas component and stable discharging with gas flow, the composition that starts the spectrometer monitoring of plasma can make whole system regulate and control to giving fixed duty with active by computer data acquiring and control system control; Start the fabric wrapping roller and,, implement modification fabric by the road speed V coiling fabric of buncher according to following formula partially around correcting mechanism.As the required exposure time of static fabric-modifying is t, and the width of every cube electrode is B, and the linear velocity V of the fabric of then reeling is:
V＝2B/t 1
Requirement improves the winding speed of fabric as streamline, can reach by the number that increases electrode pair.If adopt N to electrode, the linear velocity of the fabric of then reeling should be:
V＝NB/t， 1≤N≤20 2
The normal pressure glow discharge method of modifying of described spulon and chemical ﹠ blended fabric, the working gas that can improve the spulon fabric property is: the mixed air of carbon dioxide, oxygen and helium, intrinsic standoff ratio is:
Carbon dioxide 0～100%,
Oxygen 0～100%,
Helium 0～100%,
The summation of each composition percentage composition is 100%.
The normal pressure glow discharge method of modifying of described spulon and chemical ﹠ blended fabric, the working gas that can improve the spulon fabric property is: the mixed air of ammonia and helium, intrinsic standoff ratio is:
Ammonia 0～100%,
Helium 0～100%,
The summation of each composition percentage composition is 100%.
Briefly say, the partition that is connected on the reforming apparatus forward flange is separated into Sample Room, modification chamber and finished room with reforming apparatus, four movable sealings seam by the fabric that can pass through links to each other the modification chamber respectively and reaches Sample Room and finished room communicates with atmosphere respectively with finished room with Sample Room, for further reducing the leakage of working gas, can adopt the structure of double buffering chamber, so, there are triple movable sealings to come the exchange of buffer gas between modification chamber and the atmosphere; Center, modification chamber have two pairs on same level height, horizontal positioned, water flowing cooling, have the rectangle stainless steel discharge electrode of minute surface smooth finish surface, every pair electrode is parallel up and down, die opening is adjustable between 1～30mm, make the curved surface that radius of curvature is 10～30mm around the electrode, two electrode interior surface opposing respectively are fixed with thin aluminium oxide or the quartz glass dieelctric sheet that thickness is 0.1～2mm, and the normal pressure glow discharge of interpolar provides the required large tracts of land of fabric-modifying, homogeneous plasma; The modified gas that Sample Room and finished room are indoor to modification, air pressure be than the high 80～800Pa of atmospheric pressure, and play the atmosphere cushioning effect between the atmosphere, to reduce the modified gas leakage; The idler roller mutual extrusion that movable sealing is stitched by the sealing of a pair of termination, clamping force is adjustable, rotate forms, and the roll surface minute surface is bright and clean; Fabric wrapping with form by a series of rotating gardens column type roller around correcting mechanism partially, the finished product take up roll is driven by buncher, make fabric with certain speed the electrode gap by the modification chamber at the uniform velocity; Fabric wrapping with partially on correcting mechanism is contained in the support of device both sides, be used for producing.
Electric power system is made up of intermediate frequency power supply and impedance matching network and digital storage oscilloscope.Intermediate frequency power supply is the frequency modulation of 1～20kHz, the voltage controller power source of 0～20kV, it links to each other with the upper/lower electrode of plasma source by the impedance matching network be made up of high voltage induction, electric capacity, monitors the waveform of discharge voltage and discharge current in real time by the high-voltage probe that links to each other with sparking electrode and current probe and digital storage oscilloscope.
The distribution air supply system is by source of the gas, mass flow controller, and mixing chamber is formed, and links to each other with the modification chamber by air valve.The gas heating circulation system is sent the modification chamber by membrane pump back to again by the inspiration working gas after heating circulation comes heating work gas and modified fabric.The QMS analysis of being furnished with ultrahigh vacuum pump by pin cut down adopt the composition of modified gas.Modification chamber, Sample Room, finished room all are equipped with the pressure rule that can survey the normal pressure scope, by pressure gauge monitoring air pressure, monitor signal is sent into computer data acquiring and control system and FEEDBACK CONTROL mass flow controller and then control air inflow keeping the operating air pressure of modification chamber, and the heating power that computer data acquiring and control system are also gathered the temperature of the modified gas that recorded by thermocouple thermometer and fabric and controlled the gas heating circulation system is to keep the temperature of working gas and fabric.In addition, the QMS that working gas is sent in the ultra-high vacuum system via the needle-valve sampling carries out the gas composition analysis, and the plasma spectrometry diagnostic system of the silica fibre Shu Zucheng that links to each other with grating monochromator and computer data acquisition system can be measured in real time by quartz window, the activity of analytical reactions plasma.
Technical process of the present invention is as follows:
Load onto on take up roll and treat modified fabric volume, open forward flange and both sides sealing lid, draw back the spacing of two electrodes, the traction fabric passes the gap of four movable sealings seams, two pairs of electrodes and partially around correcting roller; Close forward flange and both sides sealing lid, system is evacuated to＜low vacuum of 100Pa, charge into working gas, find time, be inflated to again gas component again and reach and give fixed component and pressure with exhaust pump; Open the right side seal cover, use the take up roll tensioning fabric, regulate electrode spacing to giving fixed distance, start intermediate frequency power supply, the parameter of regulating the matching network element is tried one's best near zero the imaginary part of entire circuit impedance, and boosted voltage produces atmospheric pressure glow discharge plasma; Starting gas gauge and computer control system regulates and control to pressure balance, the heating circulation system heating work gas that starts gas is to giving fixed operating temperature, start QMS and regulate and control mass flow controller and keep gas component and stable discharging with gas flow, the composition that starts the spectrometer monitoring of plasma can make whole system regulate and control to giving fixed duty with active by computer data acquiring and control system control; Start fabric wrapping and,, implement modification fabric by the road speed V coiling fabric of buncher according to following formula partially around correcting mechanism.As the required exposure time of static fabric-modifying is t, and the width of every cube electrode is B, and the linear velocity V of the fabric of then reeling is:
V＝2B/t 1
Requirement improves the winding speed of fabric as streamline, can reach by the number that increases electrode pair.The prostatitis formula is to have only the situation of two pairs of electrodes to derive to the present invention.If adopt N to electrode, the linear velocity of the fabric of then reeling should be:
V＝NB/t， 1≤N≤20 2
For the fixing chemical ﹠ blended fabric of kind, reforming apparatus can also further be simplified, for example power supply can be a fixed frequency, and original position real-time watch devices such as gas component analysis, plasma diagnostics can save, thereby significantly reduces the cost of reforming apparatus and simplify production operation.
The beneficial effect that the present invention reached is,
One, be different from the low pressure glow discharge plasma, atmospheric pressure glow discharge plasma moves under atmospheric pressure or a little higher than atmospheric atmosphere, and employing can keep between modification chamber and atmosphere～and 10
2The movable sealing system of Pa pressure reduction, the into streamline of fabric finishing operation that fabric-modifying technology can be integrated with is easy to commercial Application.
Two, be different from atmospheric pressure corona discharge, silent discharge plasma surface modification technology, what the atmospheric pressure glow discharge plasma surface modification system adopted is large tracts of land, uniform glow discharge plasma, can not produce the filament discharge and cause fabric damage, the energy density of plasma is moderate, be suitable for loomage surface modification, and its modification degree of depth is about the superficial layer of 100nm, can not influence the overall performance of fabric.
Three, adopt intermediate frequency power supply and impedance matching network can be converted into electric energy the energy of plasma expeditiously, reduce the threshold voltage that discharges, suppress thread discharge.Native system does not re-use vavuum pump except that giving with vavuum pump taking out before filling into working gas, thereby has saved a large amount of energy consumptions that expend for the multiple tracks movable sealing of keeping between low pressure and the atmospheric pressure.
But four, the heating circulation system heating work gas of gas and working gas is flowed at a slow speed, improved the uniformity of reactivity and plasma, can improve the effect of modification, also can enlarge the spulon polypropylene fibre of the kind of the fabric of wanting modification until extremely difficult modification.
Five, the composition that adopts gas analysis and plasma spectrometry diagnostic system gas of monitoring in real time and plasma can improve yield rate with active when using, and then can be used for research at the research operation stage and improves technology and reaction mechanism.
Six, be provided with the Sample Room and the finished room of the atmosphere cushioning effect between modification chamber gas and the ambient atmosphere, in application, material retractable mechanism carries out the retractable material in atmosphere, can significantly reduce the leakage of modified gas.If will further reduce the leakage of modified gas, can adopt dual Sample Room, dual finished room structure, so exchange that has triple movable sealings to come buffer gas between modification chamber and the atmosphere, this " Sample Room " that plays the atmosphere cushioning effect can design very narrowly with " finished room " certainly.
Seven, the control of computer data acquiring and control system can make the whole system operation intellectuality.
The present invention is further illustrated below in conjunction with accompanying drawing and example for description of drawings.
Fig. 1 is an atmospheric pressure glow discharge plasma loomage surface modification overall system block diagram of the present invention.
Fig. 2 is an atmospheric pressure glow discharge plasma loomage surface modification apparatus structure schematic diagram of the present invention.
Among the figure: 1, atmospheric pressure glow discharge plasma source 2, modification chamber 3, Sample Room 4, finished room 5, movable sealing 6,7, fabric wrapping mechanism 8 is partially around correcting mechanism 9, support 10, forward flange 11, guide rail 12, side flange 13, seal cover 14 cuts off 15, buncher 16, intermediate frequency power supply 17, impedance matching network 18, digital storage oscilloscope 19, electrode 20, source of the gas 21, mass flow controller 22, mixing chamber 23, pressure rule 24, pressure gauge 25, exhaust pump 26, gas heating circulation system 27, thermocouple thermometer 28, QMS 29, spectrometer 30, needle-valve 31, ultra-high vacuum system 32, quartzy observation window 33, fibre bundle 34, computer data acquiring and control system 35, modified fabric 36, insulating medium layer 37, electrode handle 38, dielectric is isolated.
A kind of atmospheric pressure glow discharge plasma spulon of the specific embodiment and chemical ﹠ blended fabric carry out the system of surface modification under normal pressure, it is by the reforming apparatus at atmospheric pressure glow discharge plasma source and place thereof, electric power system, the distribution air supply system, the gas heating circulation system, gas componant and plasma activity analysis system and computer data acquiring and control system are formed.
The partition that is connected on the reforming apparatus forward flange is separated into Sample Room, modification chamber and finished room with reforming apparatus, four movable sealings seam by the fabric that can pass through links to each other the modification chamber respectively and reaches Sample Room and finished room communicates with atmosphere respectively with finished room with Sample Room, for further reducing the leakage of working gas, can adopt the structure of double buffering chamber, so, there are triple movable sealings to come the exchange of buffer gas between modification chamber and the atmosphere; Center, modification chamber have two pairs on same level height, horizontal positioned, water flowing cooling, have the rectangle stainless steel discharge electrode of minute surface smooth finish surface, every pair electrode is parallel up and down, die opening is adjustable between 5mm, make the curved surface that radius of curvature is 20mm around the electrode, two electrode interior surface opposing respectively are fixed with thin aluminium oxide or the quartz glass dieelctric sheet that thickness is 1mm, and the normal pressure glow discharge of interpolar provides the required large tracts of land of fabric-modifying, homogeneous plasma; The modified gas that Sample Room and finished room are indoor to modification, air pressure be than the high 80～800Pa of atmospheric pressure, and play the atmosphere cushioning effect between the atmosphere, to reduce the modified gas leakage; The idler roller mutual extrusion that movable sealing is stitched by the sealing of a pair of termination, clamping force is adjustable, rotate forms, and the roll surface minute surface is bright and clean; Fabric wrapping with form by a series of rotating gardens column type roller around correcting mechanism partially, the finished product take up roll is driven by buncher, make fabric with certain speed the electrode gap by the modification chamber at the uniform velocity; Fabric wrapping with partially on correcting mechanism is contained in the support of device both sides, be used for producing.
Electric power system is made up of intermediate frequency power supply and impedance matching network and digital storage oscilloscope.Intermediate frequency power supply is the frequency modulation of 1～20kHz, the voltage controller power source of 0～20kV, it links to each other with the upper/lower electrode of plasma source by the impedance matching network be made up of high voltage induction, electric capacity, monitors the waveform of discharge voltage and discharge current in real time by the high-voltage probe that links to each other with sparking electrode and current probe and digital storage oscilloscope.
The distribution air supply system is by source of the gas, mass flow controller, and mixing chamber is formed, and links to each other with the modification chamber by air valve.The gas heating circulation system is sent the modification chamber by membrane pump back to again by the inspiration working gas after heating circulation comes heating work gas and modified fabric.The QMS analysis of being furnished with ultrahigh vacuum pump by pin cut down adopt the composition of modified gas.Modification chamber, Sample Room, finished room all are equipped with the pressure rule that can survey the normal pressure scope, by pressure gauge monitoring air pressure, monitor signal is sent into computer data acquiring and control system and FEEDBACK CONTROL mass flow controller and then control air inflow keeping the operating air pressure of modification chamber, and the heating power that computer data acquiring and control system are also gathered the temperature of the modified gas that recorded by thermocouple thermometer and fabric and controlled the gas heating circulation system is to keep the temperature of working gas and fabric.In addition, the QMS that working gas is sent in the ultra-high vacuum system via the needle-valve sampling carries out the gas composition analysis, and the plasma spectrometry diagnostic system of the silica fibre Shu Zucheng that links to each other with grating monochromator and computer data acquisition system can be measured in real time by quartz window, the activity of analytical reactions plasma.
The forward flange 10 that will install along guide rail 11 is removed forward, open both sides and import and export seal cover 13, with fabric wrapping roller 6,7 with the correction idler roller 8 be contained on the support of both sides, the traction fabric is by the gap of movable sealing mouth 5 and atmospheric pressure glow discharge plasma source electrode 19, shut forward flange 10 and both sides sealing lid 13, with exhaust pump 25 system is evacuated to low vacuum 100Pa, open source of the gas 20, charge into working gas by mass flow controller 21 and mixing chamber 22 by the determined flow value of the requirement of gas composition, behind an atmospheric pressure, take out again, being charged to gas component again reaches and gives fixed component and pressure, an atmospheric pressure adds 100Pa, open both sides sealing lid 13, tensioning fabric 35, start the heating circulation system 26 heating work gases of gas, measure temperature with thermocouple thermometer 27, fixed operating temperature 80 degree are Celsius until giving, utilize computer data acquiring and control system 34 to measure air pressure by pressure rule 23 and pressure gauge 24, and pass through mass flow controller 21 regulation and control modification chamber air pressure to setting value, and make air pressure reach dynamic equilibrium with stable, start intermediate frequency power supply 16, electric parameter according to plasma source is set operating frequency 1～20kHz, regulate the parameter of matching network 17 relevant elements, progressively improve voltage 1～20kV and produce atmospheric pressure glow discharge plasma, measure the plasma resonance of collecting with spectrometer 29 by fibre bundle 33, analyze plasma emission spectroscopy with computer data acquiring 34, start the ultra-high vacuum system 31 of gas analysis system, open needle-valve 30, measure the mass spectrum of modification chamber working gas with QMS 28, component and activity with computer data acquiring and control system 34 analytical work gases, and the flow-rate ratio by each source of the gas 20 of mass flow controller 21 regulation and control, after the component of working gas and plasma emission spectroscopy all reach requirement, start the buncher 15 that connects take up roll 7 by the prostatitis formula fixed speed coiling fabric carry out modification.
Claims (5)
1. the normal pressure glow discharge modification application system of spulon and chemical ﹠ blended fabric, form by reforming apparatus, electric power system, distribution air supply system, gas heating circulation system, gas componant and plasma activity analysis system, computer data acquiring and control system, it is characterized in that
A. reforming apparatus by the modification chamber (2) at atmospheric pressure glow discharge plasma source (1) and place thereof, Sample Room (3), finished room (4), movable sealing mechanism (5), fabric wrapping roller (6,7), partially around correcting mechanism (8), support (9), forward flange (10), two side flanges (12), import and export seal cover (13) and buncher (15) is formed, the partition (14) that is connected on the forward flange (10) is separated into Sample Room (3), modification chamber (2) and finished room (4) with device, cuts off (14) and adopts vacuum seal to be connected with contact-making surface between the reforming apparatus;
B. electric power system is made up of intermediate frequency power supply (16) and impedance matching network (17) and digital storage oscilloscope (18), intermediate frequency power supply (16) is the power supply of 1～20kHz frequency modulation, 0～20kV transformation, it links to each other with the upper/lower electrode (19) of plasma source by impedance matching network (17), digital storage oscilloscope (18) links to each other with the upper/lower electrode (19) of plasma source with current probe by high-voltage probe, and oscillograph links to each other with control system (34) with computer data acquiring;
C. distribution, air supply system are made up of source of the gas (20), mass flow controller (21), mixing chamber (22), pressure rule (23), pressure gauge (24) and exhaust pump (25), and mass flow controller (21) links to each other with control system (34) with computer data acquiring;
D. gas heating circulation system (26) is made up of the membrane pump that links to each other with modification chamber (2) by valve and heater and thermocouple thermometer (27), and thermocouple thermometer (27) links to each other with control system (34) with computer data acquiring;
E. gas componant and plasma activity analysis system are made up of QMS (28) and spectrometer (29), QMS (28) links to each other with device by needle-valve (30), spectrometer (29) links to each other with device by fibre bundle (33), see through quartzy observation window (32) and gather the light emission of plasma, QMS (28) and spectrometer (29) link to each other with control system (34) with computer data acquiring.
2. the normal pressure glow discharge modification application system of spulon according to claim 1 and chemical ﹠ blended fabric, it is characterized in that, plasma source (1) is by surface smoothness 6～11 roads, two pairs of levels at a distance of 1～30mm adjustable gaps, the rectangle stainless steel electrode (19) of parallel placement is formed, electrode (19) is the curved surface of 10～30mm all around for radius of curvature, be fixed with thin aluminium oxide or the quartz glass dieelctric sheet (36) that thickness is 0.1～2mm at electrode surface, electrode is connected with the electrode handle (37) of water flowing cooling, between electrode handle (37) and modification chamber (2) high voltage bearing dielectric separation layer (38) is arranged.
3. use the normal pressure glow discharge modification application system of described spulon of claim 1 and chemical ﹠ blended fabric to carry out spulon and chemical ﹠ blended fabric method of modifying, it is characterized in that, on the fabric wrapping roller, load onto and treat the modified fabric volume, open forward flange and both sides sealing lid, draw back the spacing of two electrodes, the traction fabric passes the gap of four movable sealings seam, two pairs of electrodes and partially around correcting roller; Close forward flange and both sides sealing lid, system is evacuated to＜low vacuum of 100Pa, charge into working gas, find time, be inflated to again gas component again and reach and give the air pressure that fixed component and atmospheric pressure add 80～800Pa with exhaust pump; Open the right side seal cover, with fabric wrapping roller tensioning fabric, regulate electrode spacing to giving fixed distance, start intermediate frequency power supply, the parameter of regulating the matching network element makes the imaginary part of entire circuit impedance approaching as far as possible zero, and boosted voltage produces atmospheric pressure glow discharge plasma; Starting gas gauge and computer control system regulates and control to pressure balance, heating circulation system heating work gas to 40～120 degree that start gas are taken the photograph the third constellations, start QMS and regulate and control mass flow controller and keep gas component and stable discharging with gas flow, the composition that starts the spectrometer monitoring of plasma can make whole system regulate and control to giving fixed duty with active by computer data acquiring and control system control; Start the fabric wrapping roller and,, implement modification fabric by the road speed V coiling fabric of buncher according to following formula partially around correcting mechanism.As the required exposure time of static fabric-modifying is t, and the width of every cube electrode is B, and the linear velocity V of the fabric of then reeling is:
V=2B/t 1 can reach by the number that increases electrode pair as the winding speed of streamline requirement raising fabric.If adopt N to electrode, the linear velocity of the fabric of then reeling should be:
V＝NB/t，1≤N≤20 2
4. the normal pressure glow discharge method of modifying of spulon according to claim 3 and chemical ﹠ blended fabric is characterized in that, the working gas that can improve the spulon fabric property is: the mixed air of carbon dioxide, oxygen and helium, and intrinsic standoff ratio is:
Carbon dioxide 0～100%,
Oxygen 0～100%,
Helium 0～100%,
The summation of each composition percentage composition is 100%.
5. the normal pressure glow discharge method of modifying of spulon according to claim 3 and chemical ﹠ blended fabric is characterized in that, the working gas that can improve the spulon fabric property is: the mixed air of ammonia and helium, and intrinsic standoff ratio is:
Ammonia 0～100%,
Helium 0～100%,
The summation of each composition percentage composition is 100%.
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| CN110761067A (en) * | 2019-10-30 | 2020-02-07 | 中国人民解放军空军工程大学 | Carbon fiber surface continuous treatment method and device based on normal-pressure DBD discharge |
| CN116736817B (en) * | 2023-08-11 | 2023-11-03 | 西安启银致远企业管理有限公司 | Intelligent control method for hydrophilic silver fiber dressing production and processing |
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| JP2000309657A (en) * | 1999-04-26 | 2000-11-07 | Agency Of Ind Science & Technol | Continuous plasma graft treating apparatus |
| CN2473857Y (en) * | 2001-03-13 | 2002-01-23 | 上海市纺织科学研究院 | Constant pressure low temperature plasma producing device |
| US6497826B2 (en) * | 1996-04-15 | 2002-12-24 | The Boeing Company | Surface modification using an atmospheric pressure glow discharge plasma source |
-
2004
- 2004-02-23 CN CNB2004100211916A patent/CN1304677C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1033283C (en) * | 1989-10-10 | 1996-11-13 | 福州大学 | Cold plasma body surface treating equipment and technology |
| US5403453A (en) * | 1993-05-28 | 1995-04-04 | The University Of Tennessee Research Corporation | Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
| CN2238836Y (en) * | 1995-09-21 | 1996-10-30 | 中央民族大学 | Device for polymer material plasma surface modified |
| US6497826B2 (en) * | 1996-04-15 | 2002-12-24 | The Boeing Company | Surface modification using an atmospheric pressure glow discharge plasma source |
| JP2000309657A (en) * | 1999-04-26 | 2000-11-07 | Agency Of Ind Science & Technol | Continuous plasma graft treating apparatus |
| CN2473857Y (en) * | 2001-03-13 | 2002-01-23 | 上海市纺织科学研究院 | Constant pressure low temperature plasma producing device |
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| CN1560351A (en) | 2005-01-05 |
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