CN1303848C - Loudspeaker vibrating diaphragm base material structure and manufacturing method thereof - Google Patents
Loudspeaker vibrating diaphragm base material structure and manufacturing method thereof Download PDFInfo
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- CN1303848C CN1303848C CNB03136666XA CN03136666A CN1303848C CN 1303848 C CN1303848 C CN 1303848C CN B03136666X A CNB03136666X A CN B03136666XA CN 03136666 A CN03136666 A CN 03136666A CN 1303848 C CN1303848 C CN 1303848C
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- vibrating diaphragm
- diaphragm base
- base material
- oxide
- metal
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Abstract
The present invention relates to a loudspeaker vibrating diaphragm base material structure and a manufacturing method thereof. The vibrating diaphragm base material comprises a vibrating diaphragm and an edge part, and the material is selected from one of cloth, paper or plastic materials, and is characterized in that the outer surfaces of the vibrating diaphragm and the edge part are coated with one layer of metal film or oxide film of which the thickness is the order of magnitude of nanometer (10#+[-9]) in a sputtering and plating mode. The method of the present invention has the following steps: firstly electrifying a magnetic flux tube to make work gas ionized to generate glow discharge; striking metal or oxide target materials to make atoms sputtered on the vibrating diaphragm base materials in a sputtering and plating mode; filling in the vibrating diaphragm base material fiber structure and the inner side of holes to make the surface of the vibrating diaphragm base materials from the metallic film or the oxide film. In this way, the ringing metal message transferring effect of the cloth is added to improve the ductility and the restorability of the cloth, and the important improvement of the integral vibrating diaphragm base materials to the resonance vibration effect of the message is obtained to realize the effect of high sound quality. Besides, the sputtered atoms are effectively filled on the surface of the vibrating diaphragm base materials to solve the problems of wetting and water vapor of the vibrating diaphragm base materials, and the ingression of dust particles of a loudspeaker.
Description
Technical field
The present invention relates to a kind of vibrating diaphragm matrix structure and manufacture method thereof of loudspeaker, exactly, relate to and a kind ofly on magnetic flux tube, switching on, so that the material sputter on the target is in the vibrating diaphragm base material, fill up vibrating diaphragm substrate fiber inside configuration and hole inside, nano level metal film of sputter plating one deck or oxidation film on vibrating diaphragm base material outer surface, and then reach high tone quality and effect such as moistureproof dustproof; The component structural and the production method technical field thereof that belong to loud speaker.
Background technology
How the loudspeaker of sound equipment reduce the noise of its output, and to reach presenting of complete message, the decision sound equipment is listened the final resulting message effect of hearer; Transmit in the process of message at general loudspeaker, can on loudspeaker, settle a vibrating membrane, so that sound can effectively transmit.
At present, the vibrating membrane of loudspeaker mainly adopts the spraying of materials such as paper, cloth, plastics or aluminium or the manufactured goods of electroplating technology, and its output message still can be the consumer and accepts.But because of it is the manufactured goods of spraying or electroplating technology, the coating of its spraying or plating or the thickness of plated film are micron (10
-6) order of magnitude, coating or plated film are thicker, and weight is bigger, so required power is often bigger when promoting the output of loudspeaker message.And.Waste water that produces in electroplating process and waste gas are also wanted contaminated environment.Wherein use the vibrating membrane of paper manufacturing mainly to apply in the output of middle bass signal, but, because the problem of this body structure of material, after long-term the use, the loudspeaker of vibrating membrane made of paper can be because of moist factors such as airborne moistures, vibrating membrane is made moist, and then make the output tone color of vibrating membrane made of paper be subjected to significant impact.Help the high pitch output of loudspeaker with the vibrating membrane of glass material manufacturing, but its maximum shortcoming is to be subjected to external force collision easily and to break, thereby influences the tonequality of loudspeaker.Use the material of cloth as vibrating membrane in addition, it has preferable ductility and advantages of cheap price, still, shortcoming is that the tonequality of its output is good inadequately, and have the problem of making moist, thereby make aqueous vapor enter loudspeaker inside, the electric elements of injury loudspeaker inside.
Summary of the invention
The vibrating diaphragm matrix structure that the purpose of this invention is to provide a kind of loudspeaker, this vibrating diaphragm matrix structure can address the above problem effectively, waterproof and dustproof, and light weight, tonequality is good, input power is low and the delivery efficiency height.
Another object of the present invention provides a kind of manufacture method of vibrating diaphragm matrix structure of above-mentioned loudspeaker, and this method can be produced the vibrating diaphragm base material of different color.
The object of the present invention is achieved like this: a kind of vibrating diaphragm matrix structure of loudspeaker, involving vibrations film and limit portion two parts, the material of this vibrating diaphragm base material is to select to it is characterized in that from wherein a kind of of cloth, paper, plastic material: one layer thickness is arranged is nanometer (10 to the sputter plating on the outer surface of described vibrating membrane and limit portion
-9) metal film or the oxidation film of the order of magnitude; Described metal is to select at least a in free titanium (Ti), aluminium (Al), chromium (Cr), nickel (Ni), copper (Cu), iron (Fe), indium (In), zirconium (Zr), silver (Ag), gold (Au), germanium (Ge), tantalum (Ta), tungsten (W) metal, and oxide is to select free oxidation titanium (TiO
2), tantalum oxide (Ta
2O
5), magnesium oxide (MgO), tin indium oxide (ITO), silicon dioxide (SiO
2), alundum (Al (Al
2O
3) at least a.
Another object of the present invention is achieved in that a kind of manufacture method of vibrating diaphragm matrix structure of loudspeaker, it is characterized in that: on a magnetic flux tube, switch on, with the working gas ionization, produce glow discharge, the bump metal targets, the atom that makes this metal targets on the vibrating diaphragm base material, is filled up vibrating diaphragm substrate fiber inside configuration and hole inside by sputter, make vibrating diaphragm base material outer surface form metal film, and then reach the effect of high tone quality; Described metal targets is to select at least a in free titanium (Ti), aluminium (Al), chromium (Cr), nickel (Ni), copper (Cu), iron (Fe), indium (In), zirconium (Zr), silver (Ag), gold (Au), germanium (Ge), tantalum (Ta), tungsten (W) metal; Described technological parameter of switching on magnetic flux tube is: 3～7 amperes in electric current, 2～6 minutes time; The pressure of working gas is: 4～8 * 10
-2Handkerchief.
Another object of the present invention also can be achieved in that a kind of manufacture method of vibrating diaphragm matrix structure of loudspeaker, it is characterized in that: on a magnetic flux tube, switch on, with the working gas ionization, produce glow discharge, the bump oxide target material, the atom that makes this oxide target material on the vibrating diaphragm base material, is filled up vibrating diaphragm substrate fiber inside configuration and hole inside by sputter, make vibrating diaphragm base material outer surface form metal film, and then reach the effect of high tone quality; Described oxide target material is to select free oxidation titanium (TiO
2), tantalum oxide (Ta
2O
5), magnesium oxide (MgO), tin indium oxide (ITO), silicon dioxide (SiO
2), alundum (Al (Al
2O
3) at least a; Described technological parameter of switching on magnetic flux tube is: 3～7 amperes in electric current, 2～6 minutes time; The pressure of working gas is: 4～8 * 10
-2Handkerchief.
The present invention is a kind of vibrating diaphragm matrix structure and manufacture method thereof of loudspeaker, and it is to be nanometer (10 selecting from one of them vibrating diaphragm base material sputter plating one layer thickness of cloth, paper, plastics
-9) metal film or the oxidation film of the order of magnitude, the thickness of this metal film or oxidation film has only the order of magnitude of the some thousandths of of metal film that traditional electrical depositing process mode makes or coating layer thickness, can solve effectively because original coating or plated film are thicker, weight is bigger, thereby make the bigger defective of power demand when promoting the output of loudspeaker message, in addition, because the very thin thickness of metal film or oxidation film, can increase the clear and melodious metal message transmission effect of vibrating diaphragm base material, and improve cloth ductility and restorative characteristic such as preferable, make whole vibrating diaphragm base material obtain major improvement to the resonance effect of message; And the atom of sputter material can effectively fill up the space of vibrating diaphragm substrate fiber inside configuration and hole inside, makes the surface of vibrating diaphragm base material form metal film or oxidation film, makes the making moist of vibrating diaphragm base material, aqueous vapor and problem such as dustproof can obtain to solve preferably.
Description of drawings
Fig. 1 is that the vibrating diaphragm matrix structure of first embodiment of the invention is formed and the surface local enlarged diagram;
Fig. 2 is the schematic diagram of the sputter production method of first embodiment of the invention;
Fig. 3 is that the vibrating diaphragm matrix structure of first embodiment of the invention is formed and the local enlarged diagram of metal film on surface;
Fig. 4 is that the vibrating diaphragm matrix structure of second embodiment of the invention is formed and the surface local enlarged diagram;
Fig. 5 is the schematic diagram of the sputter production method of second embodiment of the invention;
Fig. 6 is that the vibrating diaphragm matrix structure of second embodiment of the invention is formed and the local enlarged diagram of surface oxide film.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment characteristic on purpose of the present invention and structure and the function is described.
See also Fig. 1, Fig. 2, the first embodiment of the present invention shown in Figure 3, wherein the structure of vibrating diaphragm base material 11 composition includes vibrating membrane 111 and limit portion 112 two parts, the material of this vibrating diaphragm base material 11 is to select from cloth, paper, plastic material one kind ofly, and the microstructure of these materials is constituted (partial enlarged drawing of consulting Fig. 1) by fibre structure 113 and hole 113a.
Consult Fig. 2, wherein magnetic flux tube 121 can be switched on and be produced magnetic field, 122 of metal targets are to select at least a in the metal group that free titanium (Ti), aluminium (Al), chromium (Cr), nickel (Ni), copper (Cu), iron (Fe), indium (In), zirconium (Zr), silver (Ag), gold (Au), germanium (Ge), tantalum (Ta), tungsten (W) etc. are formed, with as the material of sputter plating in vibrating diaphragm base material 11.This vibrating diaphragm base material 11 is placed sputtering unit 12, magnetic flux tube 121 energisings produce magnetic field, make working gas 123 (for example Gas) ionization, produce glow discharge, bump metal targets 122, the atom sputter (magnetronsputtering) that makes this metal targets 122 is on vibrating diaphragm base material 11, because of the size of sputter atom very small, can fill up fibre structure 113 inside and the hole 113a inside of vibrating diaphragm base material 11 effectively, so that the jet-plating metallization film 114 (consulting Fig. 3) that forms on the surface of vibrating diaphragm base material 11 is very thin, has only nanometer (10
-9) order of magnitude, the waste gas that produces in this sputter process can be discharged by the below of sputtering unit 12.
The vibrating diaphragm base material of finishing via metal sputtering 11, because of its surperficial formed metal film 114, can promote resonance, the sympathetic response effect of vibrating diaphragm base material 11, thereby can do rapid reaction to output message, and have the good tonequality performance that metal material has concurrently, therefore the output message performance for vibrating diaphragm base material 11 integral body has great improvement.And cloth after sputter is finished or paper vibrating diaphragm base material 11 are filled up by metallic atom because of fibre structure 113 inside and the hole 113a inside of cloth or paper, and the shortcoming that makes cloth or paper make moist is easily effectively improved because of the processing and manufacturing program of sputter; And can avoid aqueous vapor to enter in the loudspeaker, cause the inner components and parts of loudspeaker to make moist and impaired, in addition, also have particulate dust in the protection air to enter effect in the loudspeaker via vibrating diaphragm base material 11.
This because can use the base material of different metal targets 122 as jet-plating metallization film 114, so can make vibrating membrane 111 present different color, increases the collocation of design of the present invention and horn integral and color through the vibrating diaphragm base material 11 of metal sputtering; And the conduction property of metal film 114, but diversion is attached to the small electric charge on vibrating membrane 111 surfaces, reduces the electrostatic interference of vibrating diaphragm base material 11; Moreover, materials such as the cloth that vibrating diaphragm base material 11 used in the present invention is lightweights, paper, plastics, so it is lower to reach promotion power, but the output of high efficiency message.
See also Fig. 4, Fig. 5, the second embodiment of the present invention shown in Figure 6, wherein the structure of vibrating diaphragm base material 21 composition includes vibrating membrane 211 and limit portion 212 two parts, the material of this vibrating diaphragm base material 21 is to select from wherein a kind of of cloth, paper, plastic material, and the microstructure of these materials is constituted (partial enlarged drawing of consulting Fig. 4) by fibre structure 213 and hole 213a.
Consult Fig. 5, wherein magnetic flux tube 221 can be switched on and be produced magnetic field, and oxide target material 222 is to select free oxidation titanium (TiO
2), tantalum oxide (Ta
2O
5), magnesium oxide (MgO), tin indium oxide (ITO), silicon dioxide (SiO
2), alundum (Al (Al
2O
3) at least a.With as the material of sputter in vibrating diaphragm base material 21.This vibrating diaphragm base material 21 is placed sputtering unit 22, magnetic flux tube 221 energisings produce magnetic field, make working gas 223 (for example Gas) ionization, produce glow discharge, bump oxide target material 222, so that the atom sputter of oxide target material 222 is on vibrating diaphragm base material 21, because the size of sputter atom is very small, can fill up fibre structure 213 inside and the hole 213a inside of vibrating diaphragm base material 21 effectively, so that it is very thin to form sputter oxidation film 214 (consulting Fig. 6) on the surface of vibrating diaphragm base material 21, has only nanometer (10
-9) order of magnitude.The waste gas that produces in this sputter process can be discharged by sputtering unit 22 belows.
The vibrating diaphragm base material of finishing via the oxide sputter 21, because of its surperficial formed oxidation film 214, can promote resonance, the sympathetic response effect of vibrating diaphragm base material 21, thereby can do rapid reaction to output message, and have the good tonequality performance that the oxide material is had concurrently, therefore the output message performance for vibrating diaphragm base material 21 integral body has great improvement.And, cloth after sputter is finished or paper vibrating diaphragm base material 21, because of fibre structure 213 inside of cloth or paper and hole 213a inside all the oxide atom fill up, the shortcoming that makes cloth or paper make moist is easily effectively improved because of the processing and manufacturing program of sputter; And can avoid aqueous vapor to enter in the loudspeaker, cause the inner components and parts of loudspeaker to make moist and impaired, in addition, also have particulate dust in the protection air to enter effect in the loudspeaker via vibrating diaphragm base material 21.
This because can use the base material of different oxide target material 222 as sputter oxidation film 214, so can make vibrating membrane 211 present different color, increases the collocation of design of the present invention and horn integral and color through the vibrating diaphragm base material 21 of oxide sputter.Moreover materials such as the cloth that vibrating diaphragm base material 21 used in the present invention is lightweights, paper, plastics promote low but the message output that efficient is high of power so can reach.
Claims (3)
1, a kind of vibrating diaphragm matrix structure of loudspeaker, involving vibrations film and limit portion two parts, the material of this vibrating diaphragm base material is to select to it is characterized in that from wherein a kind of of cloth, paper, plastic material: one layer thickness is arranged is nanometer (10 to the sputter plating on the outer surface of described vibrating membrane and limit portion
-9) metal film or the oxidation film of the order of magnitude; Described metal is to select at least a in free titanium (Ti), aluminium (Al), chromium (Cr), nickel (Ni), copper (Cu), iron (Fe), indium (In), zirconium (Zr), silver (Ag), gold (Au), germanium (Ge), tantalum (Ta), tungsten (W) metal, and described oxide is to select free oxidation titanium (TiO
2), tantalum oxide (Ta
2O
5), magnesium oxide (MgO), tin indium oxide (ITO), silicon dioxide (SiO
2), alundum (Al (Al
2O
3) at least a.
2, a kind of manufacture method of vibrating diaphragm matrix structure of loudspeaker, it is characterized in that: on a magnetic flux tube, switch on, with the working gas ionization, produce glow discharge, the bump metal targets, the atom that makes this metal targets on the vibrating diaphragm base material, is filled up vibrating diaphragm substrate fiber inside configuration and hole inside by sputter, make vibrating diaphragm base material outer surface form metal film, and then reach the effect of high tone quality; Described metal targets is to select at least a in free titanium (Ti), aluminium (Al), chromium (Cr), nickel (Ni), copper (Cu), iron (Fe), indium (In), zirconium (Zr), silver (Ag), gold (Au), germanium (Ge), tantalum (Ta), tungsten (W) metal; Described technological parameter of switching on magnetic flux tube is: 3～7 amperes in electric current, 2～6 minutes time; The pressure of working gas is: 4～8 * 10
-2Handkerchief.
3, a kind of manufacture method of vibrating diaphragm matrix structure of loudspeaker, it is characterized in that: on a magnetic flux tube, switch on, with the working gas ionization, produce glow discharge, the bump oxide target material, the atom that makes this oxide target material on the vibrating diaphragm base material, is filled up vibrating diaphragm substrate fiber inside configuration and hole inside by sputter, make vibrating diaphragm base material outer surface form metal film, and then reach the effect of high tone quality; Described oxide target material is to select free oxidation titanium (TiO
2), tantalum oxide (Ta
2O
5), magnesium oxide (MgO), tin indium oxide (ITO), silicon dioxide (SiO
2), alundum (Al (Al
2O
3) at least a; Described technological parameter of switching on magnetic flux tube is: 3～7 amperes in electric current, 2～6 minutes time; The pressure of working gas is: 4～8 * 10
-2Handkerchief.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB03136666XA CN1303848C (en) | 2003-05-23 | 2003-05-23 | Loudspeaker vibrating diaphragm base material structure and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB03136666XA CN1303848C (en) | 2003-05-23 | 2003-05-23 | Loudspeaker vibrating diaphragm base material structure and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1455618A CN1455618A (en) | 2003-11-12 |
| CN1303848C true CN1303848C (en) | 2007-03-07 |
Family
ID=29260524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB03136666XA Expired - Fee Related CN1303848C (en) | 2003-05-23 | 2003-05-23 | Loudspeaker vibrating diaphragm base material structure and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1303848C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10397717B2 (en) | 2017-05-24 | 2019-08-27 | Ming Chi University Of Technology | Acoustic diaphragm and speaker containing the same |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100377622C (en) * | 2004-02-11 | 2008-03-26 | 瑞声声学科技(深圳)有限公司 | Process for making backing electrode electret condenser type microphones |
| CN100455142C (en) * | 2005-06-03 | 2009-01-21 | 瑞声声学科技(深圳)有限公司 | Capacitance type sound sensor in micro mechanical and electrical structure |
| CN101203064B (en) * | 2007-12-24 | 2012-03-14 | 瑞声声学科技(常州)有限公司 | Composite diaphragm and its making method |
| CN103905967A (en) * | 2014-03-11 | 2014-07-02 | 美特科技(苏州)有限公司 | Vibrating diaphragm manufacturing method and manufactured vibrating diaphragm |
| CN104918201A (en) * | 2015-04-14 | 2015-09-16 | 歌尔声学股份有限公司 | Method for reprocessing vibrating diaphragm, vibrating diaphragm and telephone receiver |
| CN106982408A (en) * | 2016-01-19 | 2017-07-25 | 富港电子(昆山)有限公司 | Sound film of trumpet and preparation method thereof |
| CN107071659B (en) * | 2017-05-26 | 2020-03-27 | 明志科技大学 | Acoustic diaphragm and loudspeaker device comprising same |
| US11758318B1 (en) * | 2023-03-02 | 2023-09-12 | Flatvox Fzc Llc | Headphone and headset comprising the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139800A (en) * | 1984-07-31 | 1986-02-25 | Pioneer Electronic Corp | Diaphragm for speaker |
| CN2271227Y (en) * | 1996-11-25 | 1997-12-24 | 黄丈耘 | Diaphragm of loudspeaker |
-
2003
- 2003-05-23 CN CNB03136666XA patent/CN1303848C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139800A (en) * | 1984-07-31 | 1986-02-25 | Pioneer Electronic Corp | Diaphragm for speaker |
| CN2271227Y (en) * | 1996-11-25 | 1997-12-24 | 黄丈耘 | Diaphragm of loudspeaker |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10397717B2 (en) | 2017-05-24 | 2019-08-27 | Ming Chi University Of Technology | Acoustic diaphragm and speaker containing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1455618A (en) | 2003-11-12 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070307 Termination date: 20140523 |