CN1291441C - Displaying panel, electrode baseplate and panel thereof - Google Patents
Displaying panel, electrode baseplate and panel thereof Download PDFInfo
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- CN1291441C CN1291441C CN 03154564 CN03154564A CN1291441C CN 1291441 C CN1291441 C CN 1291441C CN 03154564 CN03154564 CN 03154564 CN 03154564 A CN03154564 A CN 03154564A CN 1291441 C CN1291441 C CN 1291441C
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Abstract
The present invention relates to an electrode baseplate of a plane display, which at least comprises a baseplate, an electrode layer, a first protective layer, a second protective layer and a conducting wire layer, wherein the electrode layer is formed on the baseplate; the first protective layer is formed on the electrode layer; the second protective layer is formed on the first protective layer; the conducting wire layer is positioned between the first protective layer and the second protective layer.
Description
Technical field
The present invention relates to a kind of display floater and electrode base board thereof and electrode panel, be meant a kind of display floater of flat-panel screens, the electrode base board of flat-panel screens and the electrode panel of flat-panel screens especially.
Background technology
As shown in Figure 1, the electrode base board 4 of present employed flat-panel screens has a substrate 41, an electrode layer 42 and a conductor layer 43, and electrode layer 42 is formed on the substrate 41, and conductor layer 43 is formed on the electrode layer 42.Wherein, the material of conductor layer 43 is selected from metal or its alloy of low-resistivity, and is general commonly used as silver alloy etc.
In the processing procedure of flat-panel screens, it utilizes etching solution that the conductor layer in the electrode base board 4 43 is etched into the pattern of actual required conductor wire or the pattern of additional conductive line, then on electrode base board 4, form luminous zone and comparative electrode again, engage with driving element (as chip for driving) more at last to form display floater.
Wherein, on electrode base board 4, form in the conductor wire pattern or the processing procedure of additional conductive line chart sample, one photoresist layer 5 is formed on the conductor layer 43 (silver alloy), then a light shield 6 with pattern is arranged on the photoresist layer 5, the while is also shone a ultraviolet light (UV light), as shown in Figure 2 again, next carry out development step again, at last, utilize etching solution to carry out etching again, so that conductor layer 43 is etched into the pattern of required conductor wire; Yet, the situation of oxidation (blackening) takes place in conductor layer 43 (silver alloy) easily because of irradiating ultraviolet light, cause the resistance value of conductor layer 43 to raise and and photoresist layer 5 between the decline of tack, and in follow-up processing procedure, driving element (chip for driving) pressurizing attaching is on conductor wire, already oxidised conductor wire will be difficult for fitting with driving element, may cause the phenomenon of the driving element that comes off, and further influence the stability of display floater.In addition, when display floater uses, conductor wire also easily with extraneous oxygen or reaction of Salmon-Saxl, add simultaneously electric current by the time heat that produced, and cause the conductor wire oxidation even burn.
In view of this, general its employed metal conductive wire of active drive flat-panel screens (as AMLCD) of using mostly is the alloy of some transition metal such as manganese (Mo), chromium (Cr) or tantalum (Ta) greatly.Its thin film deposition thickness can not too thickly just can obtain pasting property of film (step-coverage) preferably when making these metal conductive wire.Yet thin metal conductive wire will cause the resistance of conductor wire to raise, and cause the RC-delay of signal to become big.Therefore, the big young pathbreaker of the two-d display panel of these transition metal mades is limited.So,, must develop the metal conductive wire processing procedure or the material that to have ultralow resistance in order to make the large scale two-d display panel.
And,, must adopt the metallic film of thicker and broad in order to obtain lower resistance from the angle of metal conductive wire processing procedure.But its shortcoming of thick metallic film forms (pinhole formation) for producing relatively poor pasting property and hole.Though, so will cause the increase of processing procedure cost again at present to use special oblique angle etching (taper etching) processing procedure to be improved.What is more, and the metallic film of broad then not only reduces aperture ratio of pixels but also increases the parasitic capacitance (parasitic capacitance) of conductor wire again.Therefore, metallic film processing procedure thicker and broad is also infeasible.
Recently once there was proposal to improve pasting property and reduce hole formation with the metal conductive wire processing procedure of planarization.But the processing procedure of planarization needs the extra fabrication steps and the result of material and planarization will increase parasitic capacitance value again.So comprehensive above result is more feasible from the essence of improving material.
For adapting to above requirement, therefore aluminium at first be developed because have the low resistance and the simplification of processing procedure.But because aluminium is easy to generate protrusion (hillock) under the situation that higher temperatures and big electric current flow, the situation that causes conductor wire to produce short circuit or open circuit causes display floater to produce the problem of reliability.And copper has lower resistance, is another better Material Used.But copper is relatively poor for the tackness of glass substrate, easily oxidation and be not easy etching of surface.Therefore, modulation on the processing procedure or the change on the composition are inevasible.So, processing procedure cost and complexity increase significantly, so and do not meet the requirement of a large amount of manufacturing production Organic Light-Emitting Device.
In addition, in the processing procedure of TFT-LCD (Thin Film Transistor-LCD), utilize the three-layer metal structure of chromium/aluminium/chromium or molybdenum/aluminium/molybdenum to be used as the material of conductor wire, to avoid producing above-mentioned problem.But, in the making of this kind conductor wire, must use two kinds of different etching solutions.At the beginning, utilize first etching solution etching upper strata chromium (molybdenum) metal earlier, then utilize the second etching solution etching aluminum interlayer metal again, utilize first etching solution etching lower floor chromium (molybdenum) metal at last again, that is must carry out three times etching step, fabrication steps complexity not only, and also increase whole cost, and be not suitable for the application on the actual industrial.
Summary of the invention
Because above-mentioned problem; the purpose of this invention is to provide a kind of the have display floater of two-layer protective layer and electrode base board and electrode panel that display floater is used; these protective layers can guardwire layer (conductor wire) and make conductor layer be difficult for oxidation to burn, simultaneously the shape of the conductor wire that also may command etched.
In the present invention, display floater and electrode base board thereof and electrode panel are to be used for flat-panel screens.
For reaching above-mentioned purpose, the electrode base board according to a kind of flat-panel screens of the present invention comprises a substrate, an electrode layer, one first protective layer, one second protective layer and a conductor layer at least.Wherein, electrode layer is formed on the substrate; First protective layer is formed on the electrode layer; Second protective layer is formed on first protective layer; Conductor layer is between first protective layer and second protective layer.
For reaching above-mentioned purpose, the electrode panel according to a kind of flat-panel screens of the present invention comprises a substrate, an electrode layer pattern, one first protective layer pattern, one second protective layer pattern and a conductor wire pattern at least.Wherein, the electrode layer pattern is formed on the substrate, and the electrode layer pattern has several electrode wires; The first protective layer pattern is formed on the electrode layer pattern; The second protective layer pattern is formed on the first protective layer pattern; The conductor wire pattern is between the first protective layer pattern and the second protective layer pattern, and the conductor wire pattern has at least one conductor wire.
For reaching above-mentioned purpose, the display floater according to a kind of flat-panel screens of the present invention comprises a substrate, a luminous zone, a driving element, one first protective layer, one second protective layer and a conductor wire pattern at least.Wherein, the luminous zone has several picture elements, and these picture elements have one first electrode, one second electrode and a luminescent layer respectively, and first electrode is formed on the substrate, and second electrode is formed on first electrode, and luminescent layer is between first electrode and second electrode; Driving element is in order to drive these picture elements; First protective layer is positioned on the substrate; Second protective layer is positioned on first protective layer; The conductor wire pattern is between first protective layer and second protective layer, and the conductor wire pattern has several conductor wires, and these conductor wires connect first electrode and driving element and second electrode and driving element respectively.In the present invention, flat-panel screens comprises but is not defined as an organic electric-excitation luminescent (Organic Electroluminescence, OEL) display, inorganic electroluminescence (Electroluminescence, EL) display, light-emitting diode (Light EmittingDiode, LED) display, LCD (Liquid Crystal Display, LCD), plasma display panel (Plasma Display Panel, PDP), vacuum fluorescent display (VacuumFluorescent Display, VFD), (Field Emission Display is FED) with electrochromic display device (ECD) (Electro-chromic Display) etc. for field-emitter display.
From the above, a kind of display floater of the present invention and electrode base board thereof and electrode panel have two-layer protective layer, and these are protective layer used with guardwire layer (conductor wire).Compared with prior art; the present invention has following several advantages: the first, protective layer of the present invention can avoid conductor layer to produce the situation of oxidation because of irradiating ultraviolet light; and then the rising of minimizing conductor layer resistance value, more can increase the tack between conductor layer and the photoresist layer.Simultaneously, when display floater when using, protective layer also can avoid conductor wire influenced by extraneous oxygen or sulphur and the situation that oxidation takes place even burn; The second, protective layer of the present invention also can increase the degree of sticking together between conductor wire and driving element and conductor wire and the electrode layer, more can guarantee the stability of display floater; Three, the present invention's shape of conductor wire after the may command etching more, as the shape of cross section of conductor wire respectively by near the position of first protective layer and second protective layer towards central limit (similar hourglass shape), so the bonding area of the bonding area of conductor wire and electrode layer and conductor wire and driving element is bigger, make between conductor wire and the electrode layer and the conjugation grade between conductor wire and the driving element more tight, also can guarantee the reliability of display floater; Four, the present invention can use single etching solution, so only need carry out the etching step of single, gets final product the three-decker of while etch protection layer and electrode layer; Five, not only processing procedure is simple in the present invention, and the increase of whole cost is also not high, and is very suitable for the application on the actual industrial.
Description of drawings
Fig. 1 is one of the electrode base board of an existing flat-panel screens schematic diagram;
Fig. 2 is an enforcement schematic diagram that forms conductor wire or additional conductive line chart sample in the electrode base board of flat-panel screens;
Fig. 3 is a schematic diagram of the electrode base board of first embodiment of the invention midplane display;
Fig. 4 is a generalized section that forms conductor wire or additional conductive line chart sample among first embodiment in the electrode base board of flat-panel screens;
Fig. 5 is a schematic diagram of the electrode base board of second embodiment of the invention midplane display;
Fig. 6 A is a schematic diagram of the display floater of third embodiment of the invention midplane display;
Fig. 6 B is the generalized section of D-D along the line among Fig. 6 A.
Symbol description among the figure
1 electrode base board
11 substrates
12 electrode layers
13 first protective layers
14 second protective layers
15 conductor layers
151 conductor wires
2 electrode panels
21 substrates
22 electrode layer patterns
221 electrode wires
23 first protective layer patterns
24 second protective layer patterns
25 conductor wire patterns
251 conductor wires
3 display floaters
31 substrates
32 luminous zones
321 first electrodes
322 luminescent layers
323 second electrodes
33 driving elements
34 first protective layers
35 second protective layers
36 conductor wire patterns
361 conductor wires
4 electrode base boards
41 substrates
42 electrode layers
43 conductor layers
431 conductor wires
5 photoresist layers
6 light shields
Embodiment
Hereinafter with reference to relevant drawings, display floater and electrode base board and electrode panel according to preferred embodiment of the present invention are described.
Below the electrode base board of Lun Shuing is the electrode base board of flat-panel screens.
As shown in Figure 3, the electrode base board 1 according to a kind of flat-panel screens of first embodiment of the invention comprises a substrate 11, an electrode layer 12, one first protective layer 13, one second protective layer 14 and a conductor layer 15 at least.Wherein, electrode layer 12 is formed on the substrate 11; First protective layer 13 is formed on the electrode layer 12; Second protective layer 14 is formed on first protective layer 13; Conductor layer 15 is between first protective layer 13 and second protective layer 14.
In present embodiment, substrate 11 can be a flexibility (flexible) substrate or a rigidity (rigid) substrate.Simultaneously, substrate 11 can also be plastics (plastic) substrate or a glass substrate.Wherein, flexible base, board and plastic base can be a Merlon (polycarbonate, PC) substrate, a polyester (polyester, PET) substrate, a cyclenes copolymer (cyclic olefin copolymer, COC) substrate or crome metal compound base material-cyclenes copolymer (metallocene-based cyclicolefin copolymer, a mCOC) substrate.
As shown in Figure 3, electrode layer 12 is formed on the substrate 11.In present embodiment, electrode layer 12 utilizes sputter (sputtering) mode or ion plating (ion plating) mode is formed on the substrate 11.At this, electrode layer 12 is generally a transparent conductive metal oxide as anode and its material usually, for example tin indium oxide (ITO), aluminum zinc oxide (AZO) or indium zinc oxide (IZO) or the like.
Please refer to Fig. 3 again, first protective layer 13 of present embodiment is formed on the electrode layer 12, and wherein, first protective layer 13 is in order to guardwire layer 15.At this, the material of first protective layer 13 is a titanium, because titanium is a reactive metal, so when first protective layer 13 engaged with electrode layer 12, engaging portion can form a compound, this compound can improve the conjugation grade of first protective layer 13 and electrode layer 12.That is the conjugation grade between first protective layer 13 and the electrode layer 12 can come goodly than the conjugation grade between conductor layer 15 itself and the electrode layer 12.So, first protective layer 13 can increase and electrode layer 12 between tack.In addition, can form the thin and oxide layer (titanium oxide) closely of one deck on the surface of titanium, this compact oxide is the passivation material with good corrosion stability.Certainly, first protective layer 13 can also be platinum, gold, molybdenum, chromium, platiniferous alloy, contain alloy, the titaniferous of gold alloy, contain the alloy of molybdenum or contain the alloy of chromium.In this, the thickness of first protective layer 13 is about 10 to 1000 .
In addition, as shown in Figure 3, second protective layer 14 is formed on first protective layer 13, and second protective layer 14 is not subjected to the influence of ultraviolet light in order to guardwire layer 15, avoids conductor layer 15 to produce the situation of oxidations simultaneously.In the same manner, the material of second protective layer 14 is a titanium, so the conjugation grade between second protective layer 14 and the driving element (not being shown among the figure) can come goodly than the conjugation grade between conductor layer 15 itself and the driving element.Certainly, second protective layer 14 can also be platinum, gold, molybdenum, chromium, platiniferous alloy, contain alloy, the titaniferous of gold alloy, contain the alloy of molybdenum or contain the alloy of chromium.In addition, the thickness of second protective layer 14 is about 10 to 1000 .At this, second protective layer 14 is all identical with the feature and the function of first protective layer 13, does not repeat them here.
Please refer to Fig. 3 again, the conductor layer 15 in the present embodiment is between first protective layer 13 and second protective layer 14, and wherein the material of conductor layer 15 can be the alloy of aluminium, silver, copper, the alloy that contains aluminium, argentiferous or the alloy of cupric.Because the resistance value of these metals or its alloy is low, conductivity is high, has higher mechanical strength simultaneously, so be suitable as very much the usefulness of lead.In this, the thickness of conductor layer 15 is about 100 to 10000 .
In present embodiment, the thickness of first protective layer 13, second protective layer 14 and conductor layer 15 can adjust according to actual conditions.
In addition, in present embodiment, the material of first protective layer, 13/ conductor layer, 15/ second protective layer 14 does not comprise the combination of chromium/aluminium/chromium and molybdenum/aluminium/molybdenum.
When on electrode base board 1, forming conductor wire pattern or additional conductive line chart sample; at first on second protective layer 14, form a photoresist layer (not being shown among the figure); then on photoresist layer, be provided with one and have the light shield (not being shown among the figure) of pattern, and shine a ultraviolet light simultaneously.Next, the photoresist layer that has pattern through development step with formation.At last, utilize etching solution to carry out etching, to form required pattern.
In addition; in present embodiment, these protective layers 13,14 and conductor layer 155 can use single etching solution, that is; only need carry out etching step three-decker of these protective layers 13,14 of etching and conductor layer 15 simultaneously, to form required conductor wire pattern.
In present embodiment, when suitably regulating and control the factors such as thickness, material and etching parameter of these protective layers 13,14, can 15 etching of pilot layer after the shape of formed conductor wire 151.As shown in Figure 4; the lateral cross section integration of conductor wire 151 not by near the position of first protective layer 13 and second protective layer 14 towards central limit (similar hourglass shape); in this; conductor wire 151 is bigger with the bonding area of driving element (not being shown among the figure) with the bonding area and the conductor wire 151 of electrode layer 12; make between conductor wire 151 (and first protective layer 13) and the electrode layer 12 and the more tight and difficult drop-off of conjugation grade between conductor wire 151 (and second protective layer 14) and the driving element, also can guarantee the reliability of display floater.
Certainly, on electrode base board 1, also can utilize same way as to form other required pattern.
Below the electrode panel of Lun Shuing is the electrode panel of a flat-panel screens.
As shown in Figure 5, the electrode panel 2 of a kind of flat-panel screens of second embodiment of the invention comprises a substrate 21, an electrode layer pattern 22, one first protective layer pattern 23, one second protective layer pattern 24 and a conductor wire pattern 25 at least.Wherein, electrode layer pattern 22 is formed on the substrate 21, and electrode layer pattern 22 has several electrode wires 221; The first protective layer pattern 23 is formed on the electrode layer pattern 22; The second protective layer pattern 24 is formed on the first protective layer pattern 23; Conductor wire pattern 25 is between the first protective layer pattern 23 and the second protective layer pattern 24, and conductor wire pattern 25 has at least one conductor wire 251.
In present embodiment, several electrode wires 221 of electrode layer pattern 22 are parallel each other.
In addition, the feature of the substrate 21 in the present embodiment, electrode layer pattern 22 and these protective layer patterns 23,24 is identical with substrate 11, electrode layer 12, these protective layers 13,14 among the function and first embodiment, does not repeat them here.
As shown in Figure 5, in present embodiment, the shape of cross section of conductor wire 251 respectively by near the position of the first protective layer pattern 23 (A point) and the second protective layer pattern 24 (B point) towards central authorities' (C point) limit.In this; conductor wire 251 is bigger with the bonding area of driving element (not being shown among the figure) with the bonding area and the conductor wire 251 of electrode wires 221; make between conductor wire 251 (and first protective layer pattern 23) and the electrode wires 221 and the more tight and difficult drop-off of conjugation grade between conductor wire 251 (and second protective layer pattern 24) and the driving element, also can guarantee the reliability of display floater.
In addition, all the other features of the conductor wire pattern 25 in the present embodiment are identical with the conductor layer 15 of the function and first embodiment, also repeat no more at this.
Below the display floater of Lun Shuing is the display floater of flat-panel screens.
Shown in Fig. 6 A and Fig. 6 B, the display floater 3 of a kind of flat-panel screens of third embodiment of the invention comprises a substrate 31, a luminous zone 32, a driving element 33, one first protective layer 34, one second protective layer 35 and a conductor wire pattern 36 at least.Wherein, luminous zone 32 has several picture elements, these picture elements have one first electrode 321, a luminescent layer 322 and one second electrode 323 respectively, first electrode 321 is formed on the substrate 31, second electrode 323 is formed on first electrode 321, and luminescent layer 322 is positioned at asking of first electrode 321 and second electrode 323; Driving element 33 is in order to drive these picture elements; First protective layer 34 is positioned on the substrate 31; Second protective layer 35 is positioned on first protective layer 34; Conductor wire pattern 36 is between first protective layer 34 and second protective layer 35, and conductor wire pattern 36 has several conductor wires 361, and these conductor wires 361 connect first electrode 321 and the driving element 33 and second electrode 323 and driving element 33 respectively.
Below will be that example describes with the display floater of organic electro-luminescent display.
Shown in Fig. 6 B, these picture elements have first electrode 321, luminescent layer 322 and second electrode 323 respectively, first electrode 321 is formed on the substrate 31, and second electrode 323 is formed on first electrode 321, and luminescent layer 322 is between first electrode 321 and second electrode 323.
Wherein, the feature of first electrode 321 and function are identical with the feature and the function of the electrode layer 12 of first embodiment, also repeat no more at this.
In addition, luminescent layer 322 is the organic functional layer, and wherein, the organic functional layer comprises an electric hole implanted layer, an electric hole transfer layer, an organic luminous layer, an electron transfer layer and an electron injecting layer (not shown) usually.The main material of electricity hole implanted layer is copperphthalocyanine (CuPc), the material of electricity hole transport layer is mainly 4,4 '-bis[N-(1-naphthyl)-N-phenylamino] biphenyl (NPB), the material of electron injecting layer is mainly lithium fluoride (LiF), the material of electron transfer layer is mainly tris (8-quinolinato-N1,08)-and aluminum (Alq), and the organic functional layer utilizes evaporation (evaporation), rotary coating (spin coating), ink jet printing (ink jet printing) or the printing modes such as (printing) be formed on first electrode 321.At this, the light that the organic functional layer is launched can be blue light, green glow, ruddiness, white light, other monochromatic light or the colourama that is combined into of monochromatic light, wherein white light can be to utilize the blue complementary luminescent material of the collocation of orange for example to mix, and also can utilize other complementary luminescent material to mix certainly.
Moreover second electrode 323 is formed on the luminescent layer 322.In this, second electrode 323 uses evaporation or sputter methods such as (sputtering) is formed on the luminescent layer 322.In addition, in present embodiment, the material of second electrode 323 is selected from but is not defined as aluminium (Al), calcium (Ca), magnesium (Mg), indium (In), tin (Sn), manganese (Mn), silver (Ag), gold (Au) and contains the alloy (for example magnesium silver (Mg:Ag) alloy, magnesium indium (Mg:In) alloy, magnesium tin (Mg:Sn) alloy, magnesium antimony (Mg:Sb) alloy and magnesium tellurium (Mg:Te) alloy) etc. of magnesium.
In addition, please refer to Fig. 6 A again, the driving element 33 of present embodiment is in order to drive these picture elements, and in this, driving element 33 comprises a chip for driving.
Then, please refer to Fig. 6 B again, first protective layer 34 is positioned on the substrate 31; Second protective layer 35 is positioned on first protective layer 34.In present embodiment; when display floater 3 uses; these protective layers 34,35 can avoid conductor wire 361 influenced by extraneous oxygen or sulphur and the situation that oxidation takes place even burn; and when conductor wire 361 engages with driving element 33; also be not easy to produce the situation that comes off, more can guarantee the stability of display floater 3.In present embodiment, the feature of these protective layers 34,35 and substrate 31 is identical with the similar elements among first embodiment, also repeats no more at this.
In addition, please refer to Fig. 6 A and Fig. 6 B again, the conductor wire pattern 36 of present embodiment is formed on the substrate 31, and this conductor wire pattern 36 has several conductor wires 361, and these conductor wires 361 connect first electrode 321 and the driving element 33 and second electrode 323 and driving element 33 respectively.In present embodiment, the feature of conductor wire 361 is identical with the conductor wire 151 of the function and first embodiment, also repeats no more at this.
In the present invention, flat-panel screens comprises but is not defined as an organic electric-excitation luminescent (OrganicElectroluminescence, OEL) display, inorganic electroluminescence (Electroluminescence, EL) display, light-emitting diode (Light Emitting Diode, LED) display, LCD (Liquid Crystal Display, LCD), plasma display panel (Plasma Display Panel, PDP), vacuum fluorescent display (Vacuum Fluorescent Display, VFD), (Field Emission Display is FED) with electrochromic display device (ECD) (Electro-chromicDisplay) etc. for field-emitter display.
A kind of display floater of the present invention and electrode base board thereof and electrode panel have two-layer protective layer, and these are protective layer used with guardwire layer (conductor wire).Compared with prior art; the present invention has following several advantages: the first, protective layer of the present invention can avoid conductor layer to produce the situation of oxidation because of irradiating ultraviolet light; and then the rising of minimizing conductor layer resistance value, more can increase the tack between conductor layer and the photoresist layer.Simultaneously, when display floater when using, protective layer also can avoid conductor wire influenced by extraneous oxygen or sulphur and the situation that oxidation takes place even burn; The second, protective layer of the present invention also can increase the degree of sticking together between conductor wire and driving element and conductor wire and the electrode layer, more can guarantee the stability of display floater; Three, the present invention's shape of conductor wire after the may command etching more, as the shape of cross section of conductor wire respectively by near the position of first protective layer and second protective layer towards central limit (similar hourglass shape), so the bonding area of the bonding area of conductor wire and electrode layer and conductor wire and driving element is bigger, make between conductor wire and the electrode layer and the conjugation grade between conductor wire and the driving element more tight, also can guarantee the reliability of display floater; Four, the present invention can use single etching solution, so only need carry out the etching step of single, gets final product the three-decker of while etch protection layer and electrode layer; Five, not only processing procedure is simple in the present invention, and the increase of whole cost is also not high, and is very suitable for the application on the actual industrial.
The above only is an illustrative, but not is restricted person.Anyly do not break away from spirit of the present invention and category, and, all should be contained in the accompanying claim its equivalent modifications of carrying out or change.
Claims (21)
1. the electrode base board of a flat-panel screens is characterized in that, comprises at least:
One substrate;
One electrode layer, it is formed on this substrate;
One first protective layer, it is formed on this electrode layer;
One second protective layer, it is formed on this first protective layer; And
One conductor layer, it is between this first protective layer and this second protective layer;
Wherein the thickness of this conductor layer be 100 to 10000 , and the thickness of this first protective layer and this second protective layer is that 10 are to 1000 ;
Wherein, the shape of cross section of this conductive layer is respectively by near the central limit towards this conductive layer of the position of this first protective layer and this second protective layer.
2. the electrode base board of flat-panel screens as claimed in claim 1, wherein the material of this conductor layer be selected from least the alloy of aluminium, silver, copper, the alloy that contains aluminium, argentiferous and cupric alloy one of them.
3. the electrode base board of flat-panel screens as claimed in claim 1, wherein the material of this first protective layer and this second protective layer be selected from least the alloy of platinum, gold, titanium, molybdenum, chromium, platiniferous, the alloy that contains gold, titaniferous alloy, contain the alloy of molybdenum and contain chromium alloy one of them.
4. the electrode base board of flat-panel screens as claimed in claim 1, wherein this electrode layer is the metal oxide electrode layer of conduction.
5. the electrode base board of flat-panel screens as claimed in claim 4, wherein the metal oxide electrode layer of this conduction is selected from the formed electrode layer of one of tin indium oxide, aluminum zinc oxide and indium zinc oxide at least.
6. the electrode panel of a flat-panel screens is characterized in that, comprises at least:
One substrate;
One electrode layer pattern, it is formed on this substrate, and this electrode layer pattern has several
Polar curve;
One first protective layer pattern, it is formed on this electrode layer pattern;
One second protective layer pattern, it is formed on this first protective layer pattern; And
One conductor wire pattern, it is between this first protective layer pattern and this second protective layer pattern, and this conductor wire pattern has at least one conductor wire; Wherein the thickness of this conductor wire pattern be 100 to 10000 , and the thickness of this first protective layer and this second protective layer is that 10 are to 1000 ;
Wherein, the shape of cross section of this conductor wire is respectively by near the central limit towards this conductor wire of the position of this first protective layer pattern and this second protective layer pattern.
7. the electrode panel of flat-panel screens as claimed in claim 6, wherein the material of these conductor wires be selected from least the alloy of aluminium, silver, copper, the alloy that contains aluminium, argentiferous and cupric alloy one of them.
8. the electrode panel of flat-panel screens as claimed in claim 6, wherein the material of this first protective layer pattern and this second protective layer pattern be selected from least the alloy of platinum, gold, titanium, molybdenum, chromium, platiniferous, the alloy that contains gold, titaniferous alloy, contain the alloy of molybdenum and contain chromium alloy one of them.
9. the electrode panel of flat-panel screens as claimed in claim 6, wherein several electrode wires of this electrode layer pattern are parallel each other.
10. the electrode panel of flat-panel screens as claimed in claim 6, wherein the material of this electrode layer pattern is the metal oxide of conduction.
11. the electrode panel of flat-panel screens as claimed in claim 10, wherein the material of the metal oxide of this conduction be selected from least tin indium oxide, aluminum zinc oxide and indium zinc oxide one of them.
12. the display floater of a flat-panel screens is characterized in that, comprises at least:
One substrate;
One luminous zone, have several picture elements, these picture elements have one first electrode, one second electrode and a luminescent layer respectively, and this first electrode is formed on this substrate, this second electrode is formed on this first electrode, and this luminescent layer is between this first electrode and this second electrode;
One driving element, it is in order to drive these picture elements;
One first protective layer, it is positioned on this substrate;
One second protective layer, it is positioned on this first protective layer; And
One conductor wire pattern, it is between this first protective layer and this second protective layer, and this conductor wire pattern has several conductor wires, and these conductor wires connect this first electrode and this driving element and this second electrode and this driving element respectively;
Wherein, the shape of cross section of this conductor wire is respectively by near the central limit towards this conductor wire of the position of this first protective layer and this second protective layer.
13. the display floater of flat-panel screens as claimed in claim 12, wherein the material of this conductor wire be selected from least the alloy of aluminium, silver, copper, the alloy that contains aluminium, argentiferous and cupric alloy one of them.
14. the display floater of flat-panel screens as claimed in claim 12, wherein the material of this first protective layer and this second protective layer be selected from least the alloy of platinum, gold, titanium, molybdenum, chromium, platiniferous, the alloy that contains alloy, the titaniferous of gold, the alloy that contains the alloy of molybdenum and contain chromium wherein it.
15. the display floater of flat-panel screens as claimed in claim 12, wherein the material of this first electrode is the metal oxide of conduction.
16. the display floater of flat-panel screens as claimed in claim 15, wherein the material of the metal oxide of this conduction be selected from least tin indium oxide, aluminum zinc oxide and indium zinc oxide one of them.
17. the display floater of flat-panel screens as claimed in claim 12, the wherein formed electrode layer of one of this second electrode alloy of being selected from aluminium, calcium, magnesium, indium, tin, manganese, silver, gold at least and containing magnesium.
18. the display floater of flat-panel screens as claimed in claim 17, wherein this alloy that contains magnesium is to be selected from magnesium silver alloy, magnesium indium alloy, magnesium ashbury metal, magnesium antimony alloy, magnesium tellurium alloy and to make up one of them.
19. the display floater of flat-panel screens as claimed in claim 12, wherein this driving element has a chip for driving.
20. the display floater of flat-panel screens as claimed in claim 12, wherein the thickness of this conductor wire pattern be 100 to 10000 , and the thickness of this first protective layer and this second protective layer is that 10 are to 1000 .
21. the display floater of flat-panel screens as claimed in claim 12, wherein this flat-panel screens is organic electro-luminescent display or inorganic electroluminescence display or light emitting diode indicator or LCD or plasma display panel or vacuum fluorescent display or field-emitter display or electrochromic display device (ECD).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03154564 CN1291441C (en) | 2003-08-18 | 2003-08-18 | Displaying panel, electrode baseplate and panel thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03154564 CN1291441C (en) | 2003-08-18 | 2003-08-18 | Displaying panel, electrode baseplate and panel thereof |
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| Publication Number | Publication Date |
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| CN1585078A CN1585078A (en) | 2005-02-23 |
| CN1291441C true CN1291441C (en) | 2006-12-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 03154564 Expired - Fee Related CN1291441C (en) | 2003-08-18 | 2003-08-18 | Displaying panel, electrode baseplate and panel thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104538560A (en) * | 2015-01-06 | 2015-04-22 | 信利半导体有限公司 | Electrode substrate and processing method thereof |
| CN111472000B (en) * | 2020-04-15 | 2021-07-27 | 苏州华星光电技术有限公司 | Etching method of copper-molybdenum film layer and array substrate |
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| CN1585078A (en) | 2005-02-23 |
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