CN1287471C - 硅薄膜太阳电池集成组件的制备技术 - Google Patents
硅薄膜太阳电池集成组件的制备技术 Download PDFInfo
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- CN1287471C CN1287471C CNB2005100143078A CN200510014307A CN1287471C CN 1287471 C CN1287471 C CN 1287471C CN B2005100143078 A CNB2005100143078 A CN B2005100143078A CN 200510014307 A CN200510014307 A CN 200510014307A CN 1287471 C CN1287471 C CN 1287471C
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- 238000005516 engineering process Methods 0.000 title claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 22
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 81
- 239000010408 film Substances 0.000 claims description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 40
- 239000010703 silicon Substances 0.000 claims description 40
- 239000011787 zinc oxide Substances 0.000 claims description 40
- 239000010409 thin film Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 23
- 238000002360 preparation method Methods 0.000 claims description 19
- 238000003698 laser cutting Methods 0.000 claims description 16
- 238000005520 cutting process Methods 0.000 claims description 12
- 238000005260 corrosion Methods 0.000 claims description 11
- 230000007797 corrosion Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 5
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 abstract description 3
- 238000013461 design Methods 0.000 abstract description 2
- 230000002349 favourable effect Effects 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 16
- 239000011521 glass Substances 0.000 description 9
- 239000013081 microcrystal Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 4
- 230000004936 stimulating effect Effects 0.000 description 4
- 229910000085 borane Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 239000005038 ethylene vinyl acetate Substances 0.000 description 3
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 3
- UORVGPXVDQYIDP-UHFFFAOYSA-N trihydridoboron Substances B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 1
- 238000000637 aluminium metallisation Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100143078A CN1287471C (zh) | 2005-07-01 | 2005-07-01 | 硅薄膜太阳电池集成组件的制备技术 |
Applications Claiming Priority (1)
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CNB2005100143078A CN1287471C (zh) | 2005-07-01 | 2005-07-01 | 硅薄膜太阳电池集成组件的制备技术 |
Publications (2)
Publication Number | Publication Date |
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CN1710723A CN1710723A (zh) | 2005-12-21 |
CN1287471C true CN1287471C (zh) | 2006-11-29 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2005100143078A Active CN1287471C (zh) | 2005-07-01 | 2005-07-01 | 硅薄膜太阳电池集成组件的制备技术 |
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CN (1) | CN1287471C (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100423293C (zh) * | 2006-04-30 | 2008-10-01 | 南京大学 | 太阳能电池的制备方法 |
US8900674B2 (en) * | 2009-10-06 | 2014-12-02 | Tel Solar Ag | Method of coating a substrate |
CN101794828B (zh) * | 2010-03-12 | 2012-05-16 | 河南阿格斯新能源有限公司 | 薄膜太阳电池的膜系、薄膜太阳电池及其制造方法 |
CN101807613B (zh) * | 2010-03-29 | 2011-05-25 | 哈尔滨工业大学 | 三维光子晶体为背反射层的非晶硅太阳电池及其制备方法 |
CN102082212A (zh) * | 2010-12-14 | 2011-06-01 | 天津市津能电池科技有限公司 | 一种非晶硅太阳电池的生产工艺 |
CN102931256A (zh) * | 2011-08-11 | 2013-02-13 | 吉富新能源科技(上海)有限公司 | 可透光式薄膜太阳能电池的雷射划线方式 |
CN102637780B (zh) * | 2012-04-27 | 2014-04-02 | 保定天威薄膜光伏有限公司 | 一种提高产业化硅薄膜电池组件性能的制备方法 |
CN104282807A (zh) * | 2013-07-10 | 2015-01-14 | 国电光伏有限公司 | 一种透光型硅薄膜太阳能电池的制造方法 |
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2005
- 2005-07-01 CN CNB2005100143078A patent/CN1287471C/zh active Active
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Effective date of registration: 20090206 Address after: Jiangnan hi tech Zone, South Ring Road, Licheng District, Quanzhou, Fujian Patentee after: Fujian Golden Sun Solar Technic Co., Ltd. Address before: Tianjin City, Wei Jin Road No. 94 Patentee before: Nankai University |
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Owner name: BEIJING JINGCHENG BOYANG OPTOELECTRONIC DEVICE CO. Free format text: FORMER OWNER: FUJIAN JUNSHI ENERGY CO., LTD. Effective date: 20090925 |
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Effective date of registration: 20090925 Address after: Building 11, No. 11, Kangding street, Yizhuang economic and Technological Development Zone, Beijing Patentee after: Beijing Jingcheng Boyang Optoelectronic Equipment Co.,Ltd. Address before: Jiangnan hi tech Zone, South Ring Road, Licheng District, Quanzhou, Fujian Patentee before: Fujian Golden Sun Solar Technic Co., Ltd. |
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Effective date of registration: 20110811 Address after: 100176 building, No. 11, Kangding street, Yizhuang economic and Technological Development Zone, Beijing, 11 Co-patentee after: Apollo Precision (Fujian) Limited Patentee after: Beijing Jingcheng Boyang Optoelectronic Equipment Co.,Ltd. Address before: 100176 building, No. 11, Kangding street, Yizhuang economic and Technological Development Zone, Beijing, 11 Patentee before: Beijing Jingcheng Boyang Optoelectronic Equipment Co.,Ltd. |
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Effective date of registration: 20210207 Address after: 101400 No.31 Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing (cluster registration) Patentee after: Beijing Huihong Technology Co., Ltd Address before: 100176 building 11, yard 11, Kangding street, Yizhuang Economic and Technological Development Zone, Beijing Patentee before: HANERGY HOLDING Group Ltd. Patentee before: APOLLO PRECISION (FUJIAN) Ltd. |
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