CN1284753A - Method for polarized treatment of piezoelectrics - Google Patents
Method for polarized treatment of piezoelectrics Download PDFInfo
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- CN1284753A CN1284753A CN00124189A CN00124189A CN1284753A CN 1284753 A CN1284753 A CN 1284753A CN 00124189 A CN00124189 A CN 00124189A CN 00124189 A CN00124189 A CN 00124189A CN 1284753 A CN1284753 A CN 1284753A
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- 238000000034 method Methods 0.000 title claims abstract description 62
- 230000010287 polarization Effects 0.000 claims abstract description 114
- 230000008569 process Effects 0.000 claims description 22
- 230000032683 aging Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 2
- 239000006185 dispersion Substances 0.000 abstract description 11
- 230000008859 change Effects 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 239000000919 ceramic Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000002102 hyperpolarization Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
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Abstract
A method of polarization-treating a piezoelectric body, which is constructed such that current flows through the piezoelectric body in response to application of a DC voltage to the piezoelectric body, includes the steps of measuring current flowing through the piezoelectric body, and stopping the application of the DC voltage at the time when the measured current value reaches a set level. The polarization degree is controlled based on the current value by utilization of a correlation between the current and the polarization degree during polarization. With this method, a desired polarization degree is obtained, and dispersion of the polarization is reduced.
Description
The present invention relates to a kind of method that the piezoelectrics that are used for ceramic filter, ceramic resonator and other suitable element are polarized and handle.
For PZT and PT type piezoelectric ceramic substrate (piece, unit or other suitable form) are done the polarization processing, traditionally, after having fired the piezoelectric ceramic substrate, electrode is arranged on the relative two sides of piezoelectric ceramic substrate.Under 60 to 100 degrees centigrade temperature, a plurality of piezoelectric ceramic substrates are immersed in the polarization liquid simultaneously, and apply 2 to about 10 to 30 minutes of the voltage of 8kV/mm, to obtain desirable degree of polarization.
The polarization of piezoelectrics is handled and can be finished by (in-air) polarization (carrying out in atmosphere or a kind of atmosphere) in (in-liquid) polarization (carrying out in having the polarization liquid of above-mentioned insulating property (properties)) and the atmosphere in the liquid.In in air, polarizing, because discharge, so can't obtain desirable electric field strength at about voltage of 1kV/mm at least.For this reason, carry out usually polarizing to obtain high degree of polarization in the liquid.
But under the situation about polarizing in liquid, the degree of polarization of piezoelectrics can't be measured in polarization process.This be because the vibration that is placed on the piezoelectrics in the liquid owing to liquid is obstructed, and can't the measuring frequency characteristic.For this reason, traditionally, polarization is regularly polarization in the liquid, wherein polarizes with predetermined period of time.As a result, produce a problem, promptly degree of polarization can't correctly be controlled, and this causes firing of piezoelectrics and synthetic dispersion, and this causes the dispersion of degree of polarization.
In No. 2656041 Japan Patent, a kind of polarization method has been proposed, wherein, (for example in polarization process, measure piezoelectric constant, electromechanical coupling factor K), and when constant reaches the predetermined value that the correlation between value K that obtains immediately after stopping by polarization and the stationary value K that obtains determines after after a while, stop to apply voltage.As a result, reduced because the material and the dispersion of firing the degree of polarization that the dispersion of condition causes.Correspondingly, produce piezoelectrics with constant-quality.
But, in said method, must determine the piezoelectric constant value according to the frequency in the polarization process, the Measuring Time that this need grow.Correspondingly, when many piezoelectrics are simultaneously polarized, may hyperpolarization take place owing to the hysteresis of measuring.
In addition, produce a problem, promptly need to provide electric impedance analyzer, AC signal source, AC/DC split circuit, change-over circuit, or the like, with the piezoelectric constant in the measurement polarization process, thereby make measurement mechanism become complicated and expensive.
In order to address the above problem, preferred embodiment of the present invention provides a kind of method that piezoelectrics are polarized and handle, and has wherein reduced the dispersion of the degree of polarization of each piezoelectrics greatly, and has very accurately obtained the degree of polarization as target.
In addition, preferred embodiment of the present invention provides a kind of method for polarized treatment of piezoelectrics, has wherein prevented owing to measure the hyperpolarization that lags behind and cause.
According to a preferred embodiment of the present invention, (its feature is to piezoelectrics, increased owing to direct current (DC) voltage being offered the electric current that flows through piezoelectrics that piezoelectrics cause) method for polarized treatment comprise step: dc voltage is offered piezoelectrics, measurement flow through piezoelectrics by applying the electric current that dc voltage produces, and when the current value of measurement reaches set point, stop to apply dc voltage.
When the piezoelectrics of being made by the material such as piezoelectric ceramic were polarized, when electric current flow through piezoelectrics in polarization process, electric current can be pressed the index increase along with the time, for example as shown in Figure 1.
The reason that as shown in Figure 1 electric current increases is, along with the progress of polarization, carries out the inner orientation of crystal along direction of an electric field, and this insulation resistance that has caused piezoelectrics is along with the time reduces, and insulation resistance reduce cause that current value increases.When temperature was higher, the electric current that increases in polarization process showed more obviously.
As shown in Figure 1, under the situation that applies the piezoelectrics that the electric current that flows through piezoelectrics that dc voltage causes increases, can predict the degree of polarization of piezoelectrics according to current value.Specifically, have high correlation, can make degree of polarization near desired value by when current value reaches set point, stopping polarization, and can reduce the dispersion of degree of polarization owing to flow through the electric current and the degree of polarization of piezoelectrics.
In addition, do not need as the conventional method needs, in polarization process, to measure degree of polarization (frequency characteristic).Only need to measure electric current.Thus, can shorten Measuring Time greatly, and prevent when many piezoelectrics are polarized, owing to measure the hyperpolarization that lags behind and cause.
In addition, owing to the frequency that needn't measure in the polarization process, so simplified greatly according to the polarizer apparatus of preferred embodiment of the present invention.
According to preferred embodiment of the present invention,, can use polarization or the interior method that polarizes of air in the liquid owing to needn't measure the frequency characteristic of piezoelectrics.
Fig. 2 shows piezoelectrics from being polarised to the variation that is aged to the degree of polarization in the normal temperature recovering step.
As shown in Figure 2, in polarization process, degree of polarization is increased to maximum, and reduces by aging, and part is recovered in normal temperature recovers, so that stable.Maximum degree of polarization △ f in polarization process
1With maximum degree of polarization △ f
1Lowest high-current value (current limit value) i at place
LHas high correlation.In addition, maximum degree of polarization △ f
1Has high correlation with the stable degree of polarization △ f2 that after the normal temperature recovery, obtains.Correspondingly, current limit value i
LHas high correlation with the stable degree of polarization △ f2 that after the normal temperature recovery, obtains.In above-mentioned example, determine the degree of polarization of piezoelectrics according to the difference on the frequency △ f between resonance frequency fr and the anti-resonance frequency fa.Piezoelectric constant such as electromechanical coupling factor K, centre frequency can be used for determining degree of polarization.
Fig. 3 shows the current limit value i in polarization
LAnd after reaching current limit value, current value applies the correlation that is aged between the degree of polarization △ f2 that obtains after normal temperature recovers.Under following condition, determine correlation:
Piezoelectrics: PZT piece (thickness is 8mm)
Polarizing voltage (inter-electrode voltage): 8.7kV
Polarization temperature: 200 degrees centigrade
Aging temperature: 200 degrees centigrade
When current value was expressed as shown in Figure 3 logarithm value, visible current value (logarithm value) and degree of polarization were that about 2mA arrives in the scope of about 10mA at current limit value, are in ratio basically.
Preferably, according to the degree of polarization that just stops to apply the piezoelectrics that obtain before the dc voltage with after stopping to apply voltage, the piezoelectrics that worn out, the correlation that returns between the stable degree of polarization of the piezoelectrics that obtain behind the normal temperature of the temperature of piezoelectrics is determined set point then.Thus, last degree of polarization very accurately can be controlled at desired value.
For example, if the final degree of polarization of desirable target is △ f=3.0kHz, then when current value becomes about 3.5mA, stop polarization, and after wearing out, temperature returns to normal temperature.
When the current value that flows through piezoelectrics increases, for prevent that overcurrent is provided with and with current-limiting resistor that each piezoelectrics are connected in produce voltage drop, thereby reduced to offer the voltage of piezoelectrics.The problem that reduces to cause of voltage is: the polarization speed of piezoelectrics reduces, thereby can't obtain desirable degree of polarization.
Correspondingly, preferably calculate the voltage drop of current-limiting resistor, and this voltage drop is added on the voltage that initially applies according to the current value that flows through piezoelectrics.
That is, determine to apply voltage according to following computing formula:
Apply voltage=initial voltage+current value * current-limiting resistance
By making the voltage that offers each piezoelectrics keep constant at any time, can solve by applying the dispersion that voltage disperses the piezoelectrics degree of polarization cause.In this method, except the control degree of polarization, polarization condition (voltage) can keep constant.Thus, further reduced the dispersion of degree of polarization.
From the detailed description of reference as the preferred embodiment of the present invention of figure, other characteristics of the present invention, key element, feature and advantage are obvious.
Fig. 1 is the curve chart that the electric current variation of flowing through piezoelectrics in the polarization process is shown;
Fig. 2 illustrates the curve chart that degree of polarization changes in the polarization processing procedure;
Fig. 3 illustrates current limit value in the polarization process and at the curve chart that recovers the correlation between the degree of polarization that obtains after the room temperature;
Fig. 4 is the circuit diagram of the one example polarization treatment facility of preferred embodiment according to the present invention; With
Fig. 5 illustrates the curve chart that electric current changes in the polarization process.
Fig. 4 illustrates an example polarization treatment facility of the method for polarized treatment of piezeelectrics use that realizes preferred embodiment of the present invention.
In Fig. 4, label W
1To W
nRepresent a plurality of piezoelectrics that will polarize and handle respectively.The polarization treatment facility preferably comprises: temperature-adjusting device 1 is used to regulate a plurality of piezoelectrics W
1To W
n, and atmosphere is controlled at predetermined temperature; High voltage DC source 2 is used for polarization; High pressure change over switch 3
1To 3
N, be used for voltage is offered a plurality of piezoelectrics W
1To W
nCurrent limiting switch 4
1To 4
N, be used to prevent overcurrent; Discharge change over switch 5
1To 5
N, be used for electric charge from piezoelectrics W
1To W
nDischarge; Discharge resistance 6
1To 6
NCurrent detection circuit 7 is used to detect the electric current by piezoelectrics, and control device 8 is used to control the voltage and the degree of polarization that apply.
In temperature-adjusting device 1, carry out each processing, i.e. piezoelectrics W
1To W
nPolarization to aging.By control device 8, control the temperature of temperature-adjusting device 1 to such an extent that be suitable for each processing.The polarization temperature preferably is higher than aging temperature (for example, 150 degrees centigrade or higher), and be can obtain can with the temperature of the degree of polarization that compare by the degree of polarization that obtains of polarization in traditional liquid.In this example, be polarised to aging condition with shown in Figure 3 identical.
Current detection circuit 7 preferably comprises detection resistor 7a and the amplifier 7b such as the OP amplifier, is used to detect the potential difference between the resistor 11a out of the ordinary two ends, and according to the potential difference between each resistor 11a two ends, detects and flow through each piezoelectrics W
1To W
nElectric current.To detect resistor 11a respectively and amplifier 11b is connected to piezoelectrics W
1To W
n
To be input to control device 8 from the current detection signal of amplifier 7b.Control device 8 is according to flowing through piezoelectrics W
1To W
nCurrent value, control high voltage DC source 2, high voltage change over switch 3
1To 3
n, the discharge change over switch 5
1To 5
NOr the like.With high voltage change over switch 3
1To 3
NWith discharge change over switch 5
1To 5
nAlternately connect.In the polarization process, high voltage change over switch 3
1To 3
nConnect, and after polarization, discharge change over switch 5
1To 5
nConnect.
The polarization method that uses the polarization treatment facility with above-mentioned configuration will be described below.
At first, piezoelectrics W
1To W
nBe placed in the temperature-adjusting device 1.The temperature of control temperature-adjusting device 1, thus all piezoelectrics have predetermined temperature (for example, about 200 degrees centigrade).Then, with high voltage change over switch 3
1To 3
nConnect, thereby the dc voltage that will be used to polarize offers piezoelectrics W respectively simultaneously
1To W
NAfter beginning to apply voltage, in current detection circuit 7, measure and flow through each piezoelectrics W
1To W
NCurrent value.The electric current and the degree of polarization that flow through each piezoelectrics increased along with the time, as shown in Figure 5.
In control device 8, the current limit value i that the stable degree of polarization △ f2 that obtains after recovering with normal temperature is had high correlation
LPreset.In polarization process, each current value reaches this set point i
LThe time, control device 8 makes high pressure change over switch 3
1To 3
nDisconnect separately, thereby stopped dc voltage being applied to piezoelectrics W
1To W
NFor example, as shown in Figure 3, in order to obtain target degree of polarization △ f=3.0kHz, current value i in polarization process
LReach and stop to apply voltage when approaching 3.5mA.Current value at certain piezoelectrics does not reach set point i
LSituation under, continue voltage is imposed on this piezoelectrics, reach set point i up to the current value of these piezoelectrics
LSimultaneously, when stopping to apply voltage, control device 8 makes discharge change over switch 5
1To 5
nConnect, thereby be stored in piezoelectrics W
1To W
NIn charge discharge.If do not discharge, then can apply piezoelectrics W by storage
1To W
NIn the reversed electric field that causes of electric charge.Polarization may be returned.After discharge, finish polarization.
Then, aging piezoelectrics W in temperature-adjusting device 1
1To W
N, and the temperature of piezoelectrics remains on predetermined temperature (for example, 200 degrees centigrade) in temperature-adjusting device 1.Ageing time can approach 2 or 3 minutes.In ageing process, discharge change over switch 5
1To 5
nKeep on-state, thereby continue discharge.After this, with piezoelectrics W
1To W
NFrom temperature-adjusting device 1, take out, and with piezoelectrics W
1To W
NTemperature (for example, 24 hours) in the enough time return to normal temperature.Thus, finishing polarization handles.
Finish the piezoelectrics W that polarization is handled
1To W
NCan give target degree of polarization △ f2.
When the electric current that flows through piezoelectrics in polarization process increased along with the time, at current-limiting resistor 4
1To 4
nMiddle generation voltage drop.Correspondingly, stride across each piezoelectrics W
1To W
NThe voltage of electrode at two ends reduce.Voltage reduce to cause a problem, i.e. each piezoelectrics W
1To W
NPolarization speed reduce, and can't obtain desirable degree of polarization.
In control device 8, calculate current-limiting resistors 4 by current detection circuit 7 detected current values by basis
1To 4
nIn voltage drop, and this voltage drop is added to the initial voltage that applies, the inter-electrode voltage of control piezoelectrics is so that keep constant at any time.
Be that each voltage that applies is determined according to following equation:
Apply voltage=initial voltage+current value * current-limiting resistance
As mentioned above, keep constant at any time, eliminated the dispersion of piezoelectrics degree of polarizations by the voltage that will offer piezoelectrics.
As shown in Figure 4, providing under the situation that applies voltage source 2, for the voltage of control voltage source, the minimum value that flows through the electric current of each piezoelectrics can be used for control voltage source voltage.This is because will prevent that piezoelectrics from damaging owing to applying overvoltage.On the other hand, under the situation that a plurality of applied voltages source is set, for example, calculate applied voltage and to the voltage in each piezoelectrics control applied voltage source according to the current value of each piezoelectrics.Can carry out voltage control by the feedback processing of when current value increases, carrying out at any time.
In above-mentioned example, at high temperature do to polarize in the air.In preferred embodiment of the present invention, similarly, can carry out polarization in the liquid, because do not need to measure the frequency characteristic of piezoelectrics.Correspondingly, compare, in polarization process, can provide higher dc voltage with polarization in the air.
Thus,, have because during the polarization of the piezoelectrics of the electric current that flows through piezoelectrics that the dc voltage that applies causes handles according to preferred embodiment of the present invention, by utilize in the polarization process correlation between the electric current and degree of polarization with Current Control to set point.Thus, the dispersion of piezoelectrics polarization has reduced greatly.
In the current control method of preferred embodiment according to the present invention, to compare with the control method of the frequency of in polarization process, measuring piezoelectrics, Measuring Time significantly shortens, and has prevented when a plurality of piezoelectrics polarization the hyperpolarization that the hysteresis by measurement causes.Reached highly accurate polarization control like this.
Though disclosed preferred embodiment of the present invention,, in the scope of the various patterns claim below of the principle that realization is disclosed here.Therefore, should be understood that scope of the present invention only is defined by the claims.
Claims (20)
1. method for polarized treatment of piezeelectrics, wherein said piezoelectrics are configured current response in dc voltage is imposed on piezoelectrics and flows through piezoelectrics, it is characterized in that described method comprises following steps:
Piezoelectrics are provided;
Dc voltage is offered described piezoelectrics;
Measure owing to apply the electric current that flows through described piezoelectrics that described dc voltage causes; With
When the described current value that measures reaches set point, stop to apply dc voltage.
2. the method for claim 1 is characterized in that described set point is definite according to the correlation between the stable degree of polarization of the current value of the piezoelectrics that just stop to obtain apply dc voltage before and the piezoelectrics that obtain after stopping to apply dc voltage.
3. the method for claim 1 is characterized in that also comprising the step of aging piezoelectrics.
4. method as claimed in claim 3, the temperature in the step that it is characterized in that polarizing are higher than the temperature in the aging step.
5. method as claimed in claim 3 is characterized in that also comprising the step that the temperature of piezoelectrics is returned to normal temperature.
6. the method for claim 1 is characterized in that in applying the step of dc voltage, calculates voltage drop in the current-limiting resistor according to the current value that flows through piezoelectrics, and described voltage drop is added to initially applies in the voltage.
7. the method for claim 1 is characterized in that also comprising step: a plurality of piezoelectrics are provided, and simultaneously described a plurality of piezoelectrics are carried out each step in applying voltage, measure and stopping.
8. method as claimed in claim 7 is characterized in that also comprising step: the control temperature, thus the temperature of a plurality of piezoelectrics is identical basically before applying the step of voltage.
9. the method for claim 1 is characterized in that stopping to apply the step of voltage when the current value in the polarization process approaches 3.5mA.
10. the method for claim 1 is characterized in that so carrying out applying the step of voltage, adds the current value of measurement and the product of current-limiting resistance thereby the voltage that applies equals initial voltage.
11. the method for claim 1 wherein has electrode on the piezoelectrics, it is characterized in that described method also comprises control and applies voltage, thereby the voltage between the electrode keeps constant step.
12. a method for polarized treatment of piezeelectrics is characterized in that described method comprises following steps:
Piezoelectrics are set;
Described piezoelectrics polarization is handled; With
Stop described piezoelectrics polarization is handled according to the electric current that flows through described piezoelectrics.
13. method as claimed in claim 12, the step of handling that it is characterized in that polarizing comprises the step that dc voltage is offered piezoelectrics.
14. method as claimed in claim 13 is characterized in that also comprising measurement by the step that applies the electric current that flows through piezoelectrics that dc voltage causes.
15. method as claimed in claim 13 is characterized in that also comprising step: set current limit value, and when the current value that measures reaches described current limit value, stop the polarization processing.
16. method as claimed in claim 15 is characterized in that determining described current limit value according to the correlation between the stable degree of polarization of the piezoelectrics that just stop to apply the current value of the piezoelectrics that obtain before the dc voltage and obtain after stopping to apply dc voltage.
17. method as claimed in claim 12 is characterized in that also comprising the step of aging piezoelectrics.
18. method as claimed in claim 17 is characterized in that being higher than temperature in the aging step in the temperature of polarization in the step.
19. method as claimed in claim 17 is characterized in that also comprising the step that the temperature of piezoelectrics is returned to normal temperature.
20. method as claimed in claim 13 is characterized in that in applying the step of dc voltage, calculates voltage drop in the current-limiting resistor according to the current value that flows through in the piezoelectrics, and voltage drop is added on the voltage that initially applies.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP228955/1999 | 1999-08-13 | ||
| JP22895599A JP3419356B2 (en) | 1999-08-13 | 1999-08-13 | Polarization treatment method for piezoelectric body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1284753A true CN1284753A (en) | 2001-02-21 |
| CN1167144C CN1167144C (en) | 2004-09-15 |
Family
ID=16884490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB001241893A Expired - Fee Related CN1167144C (en) | 1999-08-13 | 2000-08-14 | Method for polarized treatment of piezoelectrics |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6464925B1 (en) |
| JP (1) | JP3419356B2 (en) |
| CN (1) | CN1167144C (en) |
| DE (1) | DE10038919A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100391023C (en) * | 2001-08-02 | 2008-05-28 | 松下电器产业株式会社 | Coaxial flexible piezoelectric cable polarizer, polarizing method, defect detector, and defect detecting method |
| CN101989642A (en) * | 2009-08-04 | 2011-03-23 | 希捷科技有限公司 | Commonly-poled piezoeletric device |
| CN104391185A (en) * | 2014-11-27 | 2015-03-04 | 上海电机学院 | Piezoelectric ceramic parameter consistency online monitoring device |
| CN105378956A (en) * | 2013-06-08 | 2016-03-02 | 费斯托股份有限两合公司 | Piezoelectric actuating device and valve equipped therewith |
| CN107240640A (en) * | 2017-06-06 | 2017-10-10 | 西南科技大学 | A kind of piezoelectric polarization device |
| CN107910437A (en) * | 2017-11-28 | 2018-04-13 | 天通控股股份有限公司 | A kind of method for realizing piezo-electric crystal poling automatically based on PLC controller |
| CN113696632A (en) * | 2020-05-21 | 2021-11-26 | 精工爱普生株式会社 | Piezoelectric element, liquid ejection head, and liquid ejection apparatus |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3846186B2 (en) * | 2000-12-05 | 2006-11-15 | 株式会社村田製作所 | Polarization apparatus and polarization method |
| JP2004230033A (en) * | 2003-01-31 | 2004-08-19 | Toshiba Corp | Ultrasonic search unit repolarizing apparatus, ultrasonic probe, and ultrasonograph |
| DE102004001696A1 (en) * | 2004-01-12 | 2005-10-27 | Siemens Ag | A method for establishing a correlation between a first state of a piezoelectric component and a second state of the component and use of the correlation |
| DE102004021955A1 (en) * | 2004-05-04 | 2005-12-01 | Siemens Ag | Method for polarizing piezo-ceramic e.g. for piezo-actuator, charging of piezo-ceramic results from voltage-controlled polarization |
| WO2012169006A1 (en) * | 2011-06-07 | 2012-12-13 | 株式会社ユーテック | Poling treatment method, plasma poling device, piezoelectric body and method for manufacturing same, film forming device and etching device, and lamp annealing device |
| JP6179804B2 (en) * | 2013-07-11 | 2017-08-16 | 株式会社リコー | Electromechanical transducer manufacturing method, electromechanical transducer, droplet ejection head, droplet ejection apparatus, and electromechanical transducer polarization processing apparatus |
| KR102209757B1 (en) * | 2013-12-27 | 2021-01-29 | 삼성메디슨 주식회사 | A Ultrasound Probe Caring system |
| JP7201603B2 (en) * | 2017-09-12 | 2023-01-10 | 日本碍子株式会社 | Piezoelectric element manufacturing method |
| TWI742850B (en) * | 2020-09-14 | 2021-10-11 | 馗鼎奈米科技股份有限公司 | Method for polarizing piezoelectric film |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2656041B2 (en) | 1987-07-06 | 1997-09-24 | ティーディーケイ株式会社 | Piezoelectric polarization method and apparatus |
| US4999819A (en) * | 1990-04-18 | 1991-03-12 | The Pennsylvania Research Corporation | Transformed stress direction acoustic transducer |
| JP2958840B2 (en) * | 1993-02-05 | 1999-10-06 | 株式会社村田製作所 | Piezoelectric polarization device |
-
1999
- 1999-08-13 JP JP22895599A patent/JP3419356B2/en not_active Expired - Fee Related
-
2000
- 2000-08-09 DE DE2000138919 patent/DE10038919A1/en not_active Withdrawn
- 2000-08-12 US US09/638,043 patent/US6464925B1/en not_active Expired - Lifetime
- 2000-08-14 CN CNB001241893A patent/CN1167144C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100391023C (en) * | 2001-08-02 | 2008-05-28 | 松下电器产业株式会社 | Coaxial flexible piezoelectric cable polarizer, polarizing method, defect detector, and defect detecting method |
| CN101989642A (en) * | 2009-08-04 | 2011-03-23 | 希捷科技有限公司 | Commonly-poled piezoeletric device |
| CN105378956A (en) * | 2013-06-08 | 2016-03-02 | 费斯托股份有限两合公司 | Piezoelectric actuating device and valve equipped therewith |
| CN105378956B (en) * | 2013-06-08 | 2018-01-02 | 费斯托股份有限两合公司 | Piezo actuator device and the valve equipped with the piezo actuator device |
| CN104391185A (en) * | 2014-11-27 | 2015-03-04 | 上海电机学院 | Piezoelectric ceramic parameter consistency online monitoring device |
| CN107240640A (en) * | 2017-06-06 | 2017-10-10 | 西南科技大学 | A kind of piezoelectric polarization device |
| CN107910437A (en) * | 2017-11-28 | 2018-04-13 | 天通控股股份有限公司 | A kind of method for realizing piezo-electric crystal poling automatically based on PLC controller |
| CN113696632A (en) * | 2020-05-21 | 2021-11-26 | 精工爱普生株式会社 | Piezoelectric element, liquid ejection head, and liquid ejection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001053351A (en) | 2001-02-23 |
| DE10038919A1 (en) | 2001-04-26 |
| JP3419356B2 (en) | 2003-06-23 |
| CN1167144C (en) | 2004-09-15 |
| US6464925B1 (en) | 2002-10-15 |
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