CN1281376C - Abrasive sheet for super precision polishing - Google Patents

Abrasive sheet for super precision polishing Download PDF

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Publication number
CN1281376C
CN1281376C CN 200310107606 CN200310107606A CN1281376C CN 1281376 C CN1281376 C CN 1281376C CN 200310107606 CN200310107606 CN 200310107606 CN 200310107606 A CN200310107606 A CN 200310107606A CN 1281376 C CN1281376 C CN 1281376C
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China
Prior art keywords
grinding
abrasive material
abrasive
bottom membrane
ultraprecision
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Expired - Fee Related
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CN 200310107606
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Chinese (zh)
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CN1528564A (en
Inventor
赵彦玲
许小村
董丽华
朱秀杰
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Harbin University of Science and Technology
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Harbin University of Science and Technology
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Priority to CN 200310107606 priority Critical patent/CN1281376C/en
Publication of CN1528564A publication Critical patent/CN1528564A/en
Application granted granted Critical
Publication of CN1281376C publication Critical patent/CN1281376C/en
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Expired - Fee Related legal-status Critical Current

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Abstract

The present invention discloses a super precision grinding membrane, which relates to a novel grinding tool. The present invention is in a sheet-shaped structure, and a bottom membrane layer (1) of a soft foundation body and a grinding material layer (2) are orderly arranged along the thickness direction of the membrane; grinding materials (3) are uniformly fixed in the grinding material layer (2), the bottom membrane layer (1) and the grinding material layer (2) are made of resin materials, and the grinding materials (3) in the grinding material layer (2) are made of artificial diamond, cubic boron nitride, oxide or carbide. The present invention develops grinding tools of the grinding materials in a fixed state, which changes traditional grinding technology, and the grinding technology has the advantages of good grinding effect, high efficiency, capability of processing complex elements, capability of realizing automated processing processes and no environmental pollution.

Description

The ultraprecision grinding diaphragm
Technical field
The present invention relates to a kind of novel grinding apparatus.
Background technology
Existing tradition is ground, glossing is to adopt abrasive pastes, grounds travel, or grounds travel sneaks in the liquid such as kerosene as grinding agent, and grinding rod, the abrasive disk made with cast iron materials are milling tool, carry out open type and grind.Its shortcoming and defect is: abrasive material contacts with the grinding work-piece rigidity, because the contour of the abrasive particle course of work is poor, and the cutting of different abrasive particles, cultivated plough, swiping effect difference, grinding effect is poor; In addition owing to adopt open type to grind, abrasive material runs off, be not suitable for adopting super hard abrasives such as grinding effect is good, efficient is high high price diamond, cubic boron nitride, therefore, usually can only adopt conventional abrasive materials such as oxide, carbide, when high rigidity material supplier's parts such as abrading glass, jade, carbide alloy, its efficient is low; Traditional open type lapping mode range of work is limited, as: magnetic recording elements such as magnetic drum, disk, magnetic head, semiconductor element, the grinding of engine crankshaft class complex parts all is difficult to adopt the method.In addition, adopt the processing technology of traditional abrasive pastes, grounds travel to be difficult to realize the process automation that environmental pollution is bigger.
Summary of the invention
Poor for the processing technology grinding effect that solves present employing abrasive pastes, grounds travel, efficient is low, can not the processed complex element, be difficult to realize process automation and the big problem of environmental pollution, the invention provides a kind of ultraprecision grinding diaphragm.Ultraprecision grinding diaphragm of the present invention is a flaky texture, be followed successively by the bottom membrane 1 and the abrasive material 2 of soft matrix along the thickness direction of diaphragm, set uniformly has abrasive material 3 in abrasive material 2, bottom membrane 1 and abrasive material 2 are made by resin material, and the abrasive material 3 in the abrasive material 2 is artificial diamond abrasive, cubic boron nitride abrasive materials, oxide abrasive or carbide abrasive material; The grain size number of abrasive material 3 is 18000~400, and it is 50~200 that grinding layer contains abrasive concentration.Ultraprecision grinding of the present invention is made with the bottom membrane 1 of diaphragm resin material good by temperature tolerance, that tensile strength is high, and abrasive material 2 can be the resin material identical with bottom membrane 1, and abrasive material 2 also can be the modified resin different with bottom membrane.Ultraprecision grinding of the present invention mainly is to adopt biofilm method or The tape casting film-forming process to make with diaphragm.Ultraprecision grinding is the film that the abrasive material that grinds and polish being used for anchors at soft matrix uniformly with the main feature of diaphragm, realizes soft contact grinding.This ultraprecision grinding with the advantage of diaphragm is: the abrasive material contour was good when the contour of abrasive material contacted grinding more firmly in the grinding process, and the abrasive particle number that participates in grinding increases, thereby the grinding efficiency height, easier acquisition surface of good roughness; Abrasive material does not run off, can in some complicated procedures of forming, adopt super hard abrasive to grind, not only improve grinding efficiency and Grinding Quality when particularly grinding high hardness material (as: glass, carbide alloy etc.), also can improve and reduce process cost because of the durability of super hard abrasive; For the automation of grinding technics process provides feasible milling tool; Reduced of the pollution of grinding technics process to environment; For adopting cooling and lubricating, process of lapping created condition, and not only can adopt neutral cooling-lubricant to the process cooling and lubricating, improving crudy, and can adopt and have faintly acid or the alkalescent cooling-lubricant carries out cooling and lubricating to process.Ultraprecision grinding of the present invention will change traditional grinding technics method with the development of diaphragm in a big way, to improve Grinding Quality and efficient, enlarge the range of work of grinding technics, make it process complicated parts such as magnetic recording element, electronic component, automobile crane by fine abrasive, and improved the processing technology level and the product quality of above-mentioned part.The present invention develops the instrument of abrasive material grinding under the set state, thereby has changed traditional grinding technics, make grinding process have that grinding effect is good, efficient is high, can the processed complex element, can realize process automation, advantage free from environmental pollution.Hard brittle materials such as ultraprecision grinding of the present invention contains the diaphragm of different types of abrasive with diaphragm can processed glass, jade; High rigidity materials such as processing hard alloy, pottery, high rigidity oxide and high rigidity carbide; Processing hardening steel material; Process some plastic products that need grinding and polishing, top-grade furniture etc.Ultraprecision grinding of the present invention is with the main performance index of diaphragm: counterdie tensile strength is 2500~4000N/dm 2Temperature tolerance is 450 ℃; Have anti-weak acid, alkalescent; Grinding ratio when super hard abrasive grinds hard brittle material and high hardness material is 1: 20000; The grinding and polishing roughness is: different roughness requires to select the different grain size abrasive material for use, reaches as high as Ra0.0025 μ m.
Description of drawings
Fig. 1 is the structural representation of the specific embodiment one, and Fig. 2 is the structural representation of the specific embodiment two, and Fig. 3 is the structural representation of the specific embodiment three.
The specific embodiment
The specific embodiment one: the ultraprecision grinding diaphragm of present embodiment is a flaky texture, be followed successively by the bottom membrane 1 and the abrasive material 2 of soft matrix along the thickness direction of diaphragm, set uniformly has abrasive material 3 in abrasive material 2, bottom membrane 1 and abrasive material 2 are made by resin material, and described resin is polyimides or polyamide-6 (PA-6).Abrasive material 3 in the abrasive material 2 is diamond (JR) abrasive material, cubic boron nitride (CBN) abrasive material, oxide (WA) abrasive material or carbide (GC) abrasive material.The grain size number of abrasive material 3 is 18000-400, and it is 50~200 that grinding layer contains abrasive concentration.Ultraprecision grinding of the present invention is made with the bottom membrane 1 of diaphragm resin material good by temperature tolerance, that tensile strength is high, and abrasive material 2 is resin materials identical with bottom membrane 1, and makes integrative-structure.The thickness of abrasive material 2 is 0.005~0.1mm, and the gross thickness of bottom membrane 1 and abrasive material 2 is 0.02~0.2mm.This ultraprecision grinding mainly is to adopt biofilm method or The tape casting film-forming process to make with diaphragm, and its technological process is: batching-stirring-biofilm (curtain coating)-heat-demoulding.
The specific embodiment two: what present embodiment and the specific embodiment one were different is, protective film 4 is arranged below bottom membrane 1, and protective film 4 bonds together by non-drying glue layer 5 with bottom membrane 1.Its objective is for the ease of diaphragm and paste.
The specific embodiment three: what present embodiment and the specific embodiment one were different is that bottom membrane 1 and abrasive material 2 are processed into two body structures respectively, and bottom membrane 1 and another non-drying glue layer 6 of abrasive material 2 usefulness are bonded together.Above-mentioned bottom membrane 1 and abrasive material 2 can process with The tape casting or biofilm method respectively.

Claims (7)

1, a kind of ultraprecision grinding diaphragm, it is a flaky texture, be followed successively by the bottom membrane (1) and the abrasive material (2) of soft matrix along the thickness direction of diaphragm, set uniformly has abrasive material (3) in abrasive material (2), bottom membrane (1) and abrasive material (2) are made by resin material, and the abrasive material (3) in the abrasive material (2) is artificial diamond abrasive, cubic boron nitride abrasive materials, oxide abrasive or carbide abrasive material; The grain size number that it is characterized in that abrasive material (3) is 18000~400.
2, ultraprecision grinding diaphragm according to claim 1 is characterized in that it is 50~200 that grinding layer contains abrasive concentration.
3, ultraprecision grinding diaphragm according to claim 1 is characterized in that abrasive material (2) is and the identical resin material of bottom membrane (1).
4, ultraprecision grinding diaphragm according to claim 1 is characterized in that abrasive material (2) is the modified resin different with bottom membrane.
5, ultraprecision grinding diaphragm according to claim 1 is characterized in that described resin is polyimides or polyamide-6.
6, ultraprecision grinding diaphragm according to claim 1 is characterized in that protective film (4) is arranged below bottom membrane (1), protective film (4) bonds together by non-drying glue layer (5) with bottom membrane (1).
7, ultraprecision grinding diaphragm according to claim 1 is characterized in that bottom membrane (1) and abrasive material (2) are processed into two body structures respectively, and bottom membrane (1) and abrasive material (2) is bonded together with another non-drying glue layer (6).
CN 200310107606 2003-10-01 2003-10-01 Abrasive sheet for super precision polishing Expired - Fee Related CN1281376C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200310107606 CN1281376C (en) 2003-10-01 2003-10-01 Abrasive sheet for super precision polishing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200310107606 CN1281376C (en) 2003-10-01 2003-10-01 Abrasive sheet for super precision polishing

Publications (2)

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CN1528564A CN1528564A (en) 2004-09-15
CN1281376C true CN1281376C (en) 2006-10-25

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100391694C (en) * 2004-12-10 2008-06-04 广东奔朗超硬材料制品有限公司 Mosaic resin diamond composite grinding block and its producing method
CN102009391B (en) * 2009-09-04 2012-08-22 沈阳中科超硬磨具磨削研究所 Process for manufacturing high precise electroplating CBN (Cubic Boron Nitride) grinding wheel
CN103273432B (en) * 2013-04-27 2015-07-15 衢州飞瑞特种陶瓷有限公司 Formulation of zirconium oxide and aluminum oxide ceramic mirror polishing pellet tablet fixation grinding material

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Granted publication date: 20061025

Termination date: 20091102