CN1277162A

CN1277162A - Electrically heating glass preparing method and product

Info

Publication number: CN1277162A
Application number: CN 00109636
Authority: CN
Inventors: 田红
Original assignee: Individual
Current assignee: Individual
Priority date: 2000-06-16
Filing date: 2000-06-16
Publication date: 2000-12-20

Abstract

In a normal pressure environment with argon and oxygen, after the glass plate laid parallelly with an indium oxide-tin target is heated, the target is applied with a 250-400V sputtering voltage for 25-45 min to coat the glass plate. After the glass is cooled, two electrodes are made in two ends and two lead wires are attached. The process has the advantages of great kinetic energy of sputtered atom and thus great adhesion to glass substrate, relatively low operation temperature to obtain compact and homogeneous film, easy control, etc. The conductive glass product has stable film, high transmissivity up to 85% and other advantages.

Description

Preparation method of a kind of electrically heated glass and products thereof

The present invention relates to the preparation of conductive glass, particularly a kind of electrically heated glass and preparation method thereof.

At present, two kinds of processing modes of the general employing of the production of conductive glass both at home and abroad: membrane process and nichrome wire method.Described membrane process is promptly sticked conductive film at glass surface, adds top electrode in the film both sides, draws lead, sees Fig. 1; Its shortcoming is that heating back conductive film is easily aging; Glass surface can be seen electrode, and is not attractive in appearance; When electrode needs glass tempering, process by silk screen printing with the silver slurry, but silk screen printing easily produces leak source, outage in the time of promptly can causing the product energising, and silk screen processing trouble, consumptive material is big, the cost height.Described conductive filament method promptly adds nichrome wire at glass surface, adds top electrode in the nichrome wire both sides, and the electrode both sides are drawn lead and formed, and see Fig. 2; It also exists glass surface can see electrode, not attractive in appearance; When electrode needs glass tempering, process by silk screen printing with the silver slurry, but silk screen printing easily produces leak source, outage in the time of promptly can causing the product energising, and silk screen processing trouble, consumptive material is big, shortcomings such as cost height.

The purpose of this invention is to provide that a kind of glass rete is stable, heating back glass transmitance can raise 5%, glass surface be can't see electrode, the preparation method of easy to make, electrically heated glass that cost is low.

Another object of the present invention provides the product that a kind of above-mentioned preparation method makes.

The preparation method of electrically heated glass of the present invention comprises glass heats to 200-400 ℃, make it to be under the atmospheric pressure environment of argon gas and oxygen, with glass and Indium sesquioxide-parallel placement of Xi target, impose the 250-400 sputtering voltage to target, after 25-45 minute, cut off the voltage of target, will be lowered the temperature by coated glass, add electrode strip on both sides, again two strip electrode bars are respectively drawn a lead and get final product.

Wherein, the atmospheric pressure environment of described argon gas and oxygen be decompressed to earlier 0.4-0.7Pa more simultaneously applying argon gas and oxygen to normal pressure; The inflation ratio of described argon gas and oxygen is 1: 1.

Electroconductibility and the good ITO target of density (In that described Indium sesquioxide-Xi target selects for use German Lai Bao company to produce ₂O ₃+ 10%SnO ₂).Indium sesquioxide-Xi is a kind of semiconductor material, and resistivity is lower, can reach 10 ⁴Ω cm.

Described glass adopts high-quality toughened glass.

Described ITO target coating film treatment process adopts direct current magnetron sputtering process, it is the method for teaching advanced and suitable large-scale industrial production at present, its main working process is: at first vacuum system is evacuated to certain vacuum tightness, in system, fill the argon gas of certain air pressure and an amount of oxygen again, and apply negative high voltage for the ITO target, when the positive argon ion that produces in orthogonal electromagnetic field constantly bombards target surface, the atom of target material surface, molecule and its exchange energy, splash out the atom of the target that sputters out by target material surface, molecule deposition forms ito thin film on glass baseplate.

The principle of magnetron sputtering is: on the sputter target surface, set up one perpendicular to electric field also perpendicular to the ring-like magnetic confining field of target surface, like this from the secondary electron of target surface emission under the combined action in electric field and magnetic field,, and be limited in this area with the spiral-line form along runway; Continuous and the gas molecule collision of secondary electron produces the positive ion that bombards target surface; Because probability of collision height.The gas ionization level increases greatly, so sputtering yield and sedimentation rate height.

The preparation method of electrically heated glass of the present invention has the following advantages: sputtered atom kinetic energy is big, and is good with the sticking power of glass baseplate; Can under lower temperature, produce fine and close film; Uniform film thickness, easy to control, can be coated with large-area glass substrate; In line with the principle of security, surperficial resistance generally is processed into 36-38 Ω; Film quality is stable, and good reproducibility is suitable for continuous production.

The products made thereby electropane can directly be processed by the customer requirement size, need not do screen printing process again, and this rete process tempering processing, and film performance is more stable, and is stronger with the matrix tack, after glass is heated, and product rete no change.Product through strict insulation processing, is reinforced electrode in the glass both sides in process of production.It is stable to have the glass rete, and heating back glass transmitance can raise 5%, reaches 85%; Glass surface be can't see electrode, and is elegant in appearance; Easy to make, cost is than advantages such as external product are low.

The main technical details of this product is:

1, line resistance can be accomplished 6 Ω≤R≤15 Ω;

2, glass film resistance 36 Ω≤R≤40 Ω;

3, heating back glass surface temperature≤40 ℃, the temperature difference ± 3 ℃;

4, the glass transmitance can raise 5%, reaches 85% (general glass transmitance is 80%).

The main application of this product is: as the visuable door of refrigerator, refrigerator-freezer, can play transparent, safe, heat insulation, energy-conservation, prevent effect such as surface sweating; As transparency electrode, be used for liquid crystal display or electroluminescent label etc., the prospect that has a very wide range of applications, and this purposes is lower to the film performance requirement, so technology is simple, and cost is low; During as electric heating film, can pass to direct current or alternating-current from the face extraction electrode of ito coated glass, but the heating glass surface, thus thoroughly stop surface sweating; As electromagnetic wave shielding, the electrically conducting transparent electrolemma of low resistance has stronger attenuation to hertzian wave, as the face glass of microwave oven the time, can reach more than the 30db microwave attenuation.

Further describe the present invention below in conjunction with embodiment

Embodiment

A kind of preparation method of electrically heated glass, it comprises glass heats to 300 ℃, make it to be in be decompressed to earlier 055Pa again applying argon gas and oxygen to non-pressurized environment, with glass and Indium sesquioxide-parallel placement of Xi target, impose 300 sputtering voltages to target, after 35 minutes, cut off the voltage of target, to be lowered the temperature by coated glass, add electrode strip, and again two strip electrode bars respectively be drawn a lead and get final product on both sides.

Wherein, the inflation ratio of described argon gas and oxygen is 1: 1; Electroconductibility and the good ITO target of density (In that described Indium sesquioxide-Xi target selects for use German Lai Bao company to produce ₂O ₃+ 10%SnO ₂); Described glass adopts high-quality toughened glass.

Claims

1, a kind of preparation method of electrically heated glass, it is characterized in that comprising with glass heats to 200-400 ℃, make it to be under the atmospheric pressure environment of argon gas and oxygen, with glass and Indium sesquioxide-parallel placement of Xi target, impose the 250-400 sputtering voltage to target, after 25-45 minute, cut off the voltage of target, to be lowered the temperature by coated glass, add electrode strip, and again two strip electrode bars respectively be drawn a lead and get final product on both sides.

2, preparation method as claimed in claim 1, the atmospheric pressure environment that it is characterized in that described argon gas and oxygen be decompressed to earlier 0.4-0.7Pa more simultaneously applying argon gas and oxygen to normal pressure form.

3, preparation method as claimed in claim 1, the inflation ratio that it is characterized in that described argon gas and oxygen is 1: 1.

4, preparation method as claimed in claim 1 is characterized in that described glass adopts toughened glass.

5, a kind of electrically heated glass is characterized in that the product that adopts the described preparation method of claim 1-3 to make.