CN1276264A - Electronic beam irradiating device - Google Patents
Electronic beam irradiating device Download PDFInfo
- Publication number
- CN1276264A CN1276264A CN 00109026 CN00109026A CN1276264A CN 1276264 A CN1276264 A CN 1276264A CN 00109026 CN00109026 CN 00109026 CN 00109026 A CN00109026 A CN 00109026A CN 1276264 A CN1276264 A CN 1276264A
- Authority
- CN
- China
- Prior art keywords
- electron beam
- cooling medium
- mounting flange
- paper tinsel
- window paper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001678 irradiating effect Effects 0.000 title 1
- 238000010894 electron beam technology Methods 0.000 claims abstract description 41
- 239000002826 coolant Substances 0.000 claims abstract description 34
- 238000001816 cooling Methods 0.000 claims abstract description 15
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract 4
- 239000011888 foil Substances 0.000 abstract 3
- 239000002912 waste gas Substances 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 235000019628 coolness Nutrition 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Landscapes
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The present invention provides an electron beam irradiator that makes it possible to effectively cool a window foil for taking out electrons and window foil installation flanges with a higher cooling efficiency. A window foil for taking out electron beam to the atmosphere side via installation flanges 4 is installed at an end of an accelerating tube 2 or a scanning tube 3 for an electron beam. A passage 13 for a cooling medium is provided by an annular groove formed on the inner circumference of the installation flanges 4 and a lid 11 for closing open ends of an annular groove 10 in each of the installation flanges 4.
Description
The present invention relates to a kind of for example employed electron beam illuminating device in the cross-linking process of the processing of the waste gas that carries out discharging in the thermal power plant etc. and resin etc., particularly relate to a kind of more effectively cool electronic and take out electron beam irradiation device with the window paper tinsel.
Electron beam illuminating device has obtained to use widely in numerous industrial fields.Wherein, the electron beam illuminating device of in atmosphere the such irradiated body of boiler waste gas being handled must be fetched into the electron beam through at a high speed having quickened in a vacuum in the atmosphere.Therefore for reach when electron beam is taken out, technologic penetration of electrons rate value, the window paper tinsel of pure titanium film that general used thickness is tens μ m (for example 30 μ m) or titanium alloy film manufacturing.This window paper tinsel is installed in the lower end of the accelerating tube or the flying-spot tube of electron beam by mounting flange.
Loss part energy when making electron beam pass through the window paper tinsel, the results window paper tinsel is heated, and then mounting flange is heated.Therefore, require to cool off effectively window paper tinsel and mounting flange.For this reason, at the periphery of electron beam conveying end section being set is that the chute shape of コ word shape is strengthened flange, makes its sidewall of facing vacuum chamber, makes cooling medium be in the state of circulation in the inside of this flange.
In recent years, along with the energy of the electron beam of electron beam illuminating device increases, electric current increases, electronics takes out the energy that loses on window paper tinsel and the window paper tinsel mounting flange at electronics and also increases, and the caloric value of window paper tinsel and window paper tinsel mounting flange also has the tendency of increase.This be because, when the current value of electron beam increases, owing to the effect of the electric charge that had of electron beam itself, be subjected to power in the beam diameter direction of expansion, make the electron amount increase that conflict with the mounting flange surface, and the current value of the energy that loses of the electronics of energy and electron beam is proportional equally on the window paper tinsel.
And because aforementioned window paper tinsel is the next door between vacuum and the atmosphere, it bears the atmospheric pressure corresponding with its size, and the window paper tinsel is by mounting flange and vacuum seal, installs under the state that has added the tension force more than certain intensity.Therefore, always acting on heat and mechanical force (atmospheric pressure and tension force) on the window paper tinsel, comparing with other component portion branch of electron beam illuminating device, it is more violent that the window paper tinsel is in deterioration, and easier being concentrated by stress causes that breaking of window paper tinsel wait in the environment that bothers.For this reason, along with the energy of electron beam increases, electric current increases, urgently wish to develop a kind of electron beam illuminating device, it can cool off window paper tinsel and window paper tinsel mounting flange effectively with higher cooling effectiveness.。
The present invention makes in view of above-mentioned actual conditions, and its objective is provides a kind of electron beam illuminating device that can come cool electronic taking-up effectively to use window paper tinsel and window paper tinsel mounting flange with higher cooling effectiveness.
The electron beam illuminating device of the present invention of making for achieving the above object, on the end of the accelerating tube of electron beam or flying-spot tube, the window paper tinsel that is used for electron beam is fetched into atmospheric side is installed by mounting flange, it is characterized in that, on aforementioned mounting flange, be provided with the cooling medium path, it is the annular groove that forms on the inner peripheral surface by mounting flange and the lid of the openend of inaccessible this annular groove constitutes.
On aforementioned cooling medium path, be provided with the cooling fin that protrudes in path inside.
In addition, be provided with the focusing electromagnet of the beam diameter that can control the aforementioned electronic bundle.
Adopt the present invention, because cooling medium flows through cooling medium path set on the mounting flange, the heat exchange that cooling medium and mounting flange carry out is cooled mounting flange and near window paper tinsel thereof.At this moment, owing in the cooling medium path, be provided with the cooling fin, the heat transfer area of cooling medium is increased, though the fin section that in the cooling medium path, exists, the basal area of cooling medium path is reduced, but it makes the flow velocity of the cooling medium that flows through in the cooling medium path accelerate, and can improve cooling effectiveness.
Fig. 1 is the integrally-built figure of the electron beam illuminating device of expression one embodiment of the present of invention.
Fig. 2 is the sectional drawing of the major part of presentation graphs 1 enlargedly.
Fig. 3 is the amplification profile diagram of the major part of expression an alternative embodiment of the invention.
Below, an embodiment of electron beam illuminating device of the present invention is described with reference to Fig. 1 and Fig. 2.
Fig. 1 is the integrally-built figure of expression electron beam illuminating device of the present invention, and Fig. 2 is the sectional drawing of the major part of presentation graphs 1 enlargedly.
As shown in Figure 1, electron beam illuminating device has electron source 1, the accelerating tube 2 that will quicken in a vacuum from the electron beam that this electron source 1 is emitted, is provided with the flying-spot tube 3 that magnetic field is added on this electron beam and makes the electromagnet of this electron beam deflection ground scanning.The mounting flange 4 that is linking hollow form in the lower end of this flying-spot tube 3.In this embodiment, shine the waste gas that for example flows through in the flue gas leading 5, carry out exhaust-gas treatment with electron beam.
Below aforementioned mounting flange 4, as shown in Figure 2, thickness is that the window paper tinsel 6 of the pure titanium film of tens μ m (for example 30 μ m) or titanium alloy film manufacturing is to make its circumference be mounted pressing plate 7 clampings of flange 4 and frame shape, apply certain force of strain and tensioning be provided with.Between aforementioned mounting flange 4 and pressing plate 7, aluminum or metal O-ring seals 8 that vacuum seal is used are installed.
Form the annular groove 10 with rectangular-shaped cross section on the inner peripheral surface of aforementioned mounting flange 4, the openend of this annular groove 10 is by lid 11 obturations.And, constitute the cooling medium path 13 that cooling medium circulates by this annular groove 10 and lid 11.And, on aforementioned lid 11, cooling fin 12a central authorities, that give prominence to aforementioned annular groove 10 inside that are positioned at its width are being set.
On this electron beam illuminating device, because cooling medium flows through in the aforementioned cooling medium path 13, between this cooling medium and mounting flange 4, carry out heat exchange, thereby make mounting flange 4 and near window paper tinsel 6 coolings thereof.At this moment, owing in cooling medium path 13, be provided with cooling fin 12a, cooling medium and this fin 12a limit contact edge flow, therefore the heat transfer area that cools off has increased, though the existence of this fin 12a has diminished the basal area because of cooling medium path 13, it makes the flow velocity of the cooling medium that flows through in cooling medium path 13 accelerate.Thus, can improve the cooling effectiveness of window paper tinsel mounting flange 4, can effectively cool off window paper tinsel 6.
Also promptly, if heat exchange amount is taken as Q (kilocalorie/hour), then the formula below is set up.
Q∝KAΔt
In the formula, K: thermal break-through rate (kilocalorie/rice
2Hour ℃)
A: heat transfer area (rice
2)
Δ t: the temperature difference that the heat transfer object is mutual
Here, thermal break-through rate K is that Reynolds number multiply by 0.8 proportional numerical value, and Reynolds number is the value that is proportional to cooling medium velocity in pipes V.Therefore increase by the flow velocity that makes the cooling medium that flows through in heat transfer area, the cooling medium path, heat exchange amount is increased.
Fig. 3 is the figure of expression an alternative embodiment of the invention.In the example shown in Fig. 3 (a), in the annular groove 10 of mounting flange 4, be provided with fin 12b with being integral, 2 coolings fin 12c, 12d are set respectively on the aforementioned fin 12b of the clamping on the lid 11 position in the substantial middle of its width.Like this, in the cooling medium path 13 that constitutes by annular groove 10 and lid 11, just be provided with 3 fin 12b, 12c, 12d.In addition, in the example shown in Fig. 3 (b), it is the cooling fin 12e of triangle that the cross section is set in the annular groove 10 of mounting flange 4 with being integral, and fin 12e is positioned at the cooling medium path 13 that is made of annular groove 10 and lid 11.
Like this, by at random selecting the shape of fin, and the variation by fin shape, just can adjust heat transfer area and flow through the flow velocity of the cooling medium in the cooling medium path.
In the aforementioned embodiment, though expression is the example that flying-spot tube and mounting flange form respectively, they also can form.In addition, though expression is the example that the window paper tinsel is installed in the lower end of flying-spot tube, under situation about from accelerating tube electron beam direct being fetched into the atmosphere, the window paper tinsel also can be arranged on the lower end of accelerating tube.
As mentioned above, the present invention can be with flowing through cooling medium in the cooling medium path, cooling off mounting flange and window paper tinsel nearby thereof effectively with high cooling effectiveness, and the temperature that can suppress mounting flange and window paper tinsel rises.Like this, can suppress that energy along with electron beam increases, electric current increases and trouble that the window paper tinsel is broken, and, can suppress the thermal expansion of vacuum seal with O-ring seals, prevent reduction owing to the different sealing properties that produce of its linear expansion coefficient with mounting flange.
Claims (3)
1. electron beam illuminating device, on the end of the accelerating tube of electron beam or flying-spot tube, the window paper tinsel that is used for electron beam is fetched into atmospheric side is installed by mounting flange, it is characterized in that, on aforementioned mounting flange, be provided with the cooling medium path, it is the annular groove that forms on the inner peripheral surface by mounting flange and the lid of the openend of inaccessible this annular groove constitutes.
2. electron beam illuminating device as claimed in claim 1 is characterized in that, is provided with in aforementioned cooling medium path to the inner outstanding cooling fin of path.
3. electron beam illuminating device as claimed in claim 1 or 2 is characterized in that, is provided with the focusing electromagnet of the beam diameter that is used to control the aforementioned electronic bundle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP159266/1999 | 1999-06-07 | ||
| JP11159266A JP2000346998A (en) | 1999-06-07 | 1999-06-07 | Electron beam irradiator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1276264A true CN1276264A (en) | 2000-12-13 |
| CN1184001C CN1184001C (en) | 2005-01-12 |
Family
ID=15690026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00109026 Expired - Fee Related CN1184001C (en) | 1999-06-07 | 2000-06-01 | Electronic beam irradiating device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2000346998A (en) |
| CN (1) | CN1184001C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109891520A (en) * | 2016-10-26 | 2019-06-14 | 浜松光子学株式会社 | Electron beam illuminating device |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7616736B2 (en) * | 2007-09-28 | 2009-11-10 | Varian Medical Systems, Inc. | Liquid cooled window assembly in an x-ray tube |
| CN103338614B (en) * | 2013-06-13 | 2015-08-19 | 无锡爱邦辐射技术有限公司 | The cooling mechanism of high-power electron irradiation accelerator |
| CA2941516C (en) | 2014-03-24 | 2019-04-16 | Tetra Laval Holdings & Finance S.A. | Electron beam emitter |
-
1999
- 1999-06-07 JP JP11159266A patent/JP2000346998A/en active Pending
-
2000
- 2000-06-01 CN CN 00109026 patent/CN1184001C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109891520A (en) * | 2016-10-26 | 2019-06-14 | 浜松光子学株式会社 | Electron beam illuminating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1184001C (en) | 2005-01-12 |
| JP2000346998A (en) | 2000-12-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5659223A (en) | System for extracting a high power beam comprising air dynamic and foil windows | |
| US6153044A (en) | Protection of lithographic components from particle contamination | |
| CN1184001C (en) | Electronic beam irradiating device | |
| US5317618A (en) | Light transmission type vacuum separating window and soft X-ray transmitting window | |
| AU2009310941B2 (en) | Laser refining apparatus and laser refining method | |
| KR101014776B1 (en) | Gate valve for vacuum apparatus | |
| WO2010084857A1 (en) | Target structure and method for manufacturing target structure | |
| US7878386B2 (en) | Method and device for heat treatment, especially connection by soldering | |
| US7852988B2 (en) | High flux X-ray target and assembly | |
| KR20070091206A (en) | Magnetic fluid sealing unit for semiconductor wafer vertical heat treating apparatus | |
| JPS62274625A (en) | Sealing for cooling wafer in vacuum by utilizing gas | |
| ES2038523T3 (en) | INFRARED SURFACE RADIATOR. | |
| GB2213316A (en) | Sample treatment apparatus | |
| JP6460696B2 (en) | Cooler used in the plasma generation chamber of a radiation source for extreme ultraviolet wavelengths | |
| US20220130636A1 (en) | Ion implanter, ion implantation method, and semiconductor device manufacturing method | |
| JP2002014200A (en) | Taking-out window structure for particle beam and the like | |
| RU183113U1 (en) | Magnetron Atomizer Cathode Assembly | |
| CN113663988B (en) | Method and device for cleaning fluorinated surface in ion implanter | |
| US10867769B2 (en) | Vacuum apparatus and charged particle beam writing apparatus | |
| JPH10340695A (en) | X-ray generator | |
| JP2014149932A (en) | Radiation generator and radiographic system | |
| CA2089643A1 (en) | Particle accelerator transmission window configurations, cooling and materials processing | |
| US4146567A (en) | Zone melting apparatus having resiliently biased cooling means | |
| JP2003178991A (en) | Apparatus and method for insulating seal in process chamber | |
| KR20100014716A (en) | Floating slit valve for transfer chamber interface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050112 Termination date: 20110601 |