CN1271763C - Adjustable laser ray source and its wavelength selection method - Google Patents
Adjustable laser ray source and its wavelength selection method Download PDFInfo
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- CN1271763C CN1271763C CN 03146308 CN03146308A CN1271763C CN 1271763 C CN1271763 C CN 1271763C CN 03146308 CN03146308 CN 03146308 CN 03146308 A CN03146308 A CN 03146308A CN 1271763 C CN1271763 C CN 1271763C
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- diffraction grating
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Abstract
The present invention relates to an adjustable laser source which comprises a laser optical amplifying chip, a collimation lens, a diffraction grating, a focal lens and a wavelength collecting device, wherein input light on one end of the laser optical amplifying chip irradiates the diffraction grating via the collimation lens. Because light rays with different wavelengths can generate different diffraction angles via the diffraction grating, the light rays with different diffraction angles converge and form a continuous band-shaped light spot via the focal lens. The wavelength collecting device comprises a shading plate on which a slit is formed, and a reflecting mirror, and is arranged in the position where the light spot exists. The slit just allows a corresponding light beam with a certain width to pass, and a laser leads the output of the adjustable laser source to correspond to a wavelength with a certain diffraction angle.
Description
Technical field
The invention provides a kind of adjustable laser light source, particularly a kind of adjustable laser light source that utilizes the required wavelength of wavelength capture device fast modulation.
Background technology
Fig. 1 is the schematic diagram of an existing adjustable laser light source 100.As shown in Figure 1, this adjustable laser light source 100 comprises laser optics amplification chip 102, collimating lens 104, diffraction grating 106 and a rotatable speculum 108.As shown in Figure 1, laser optics amplifies the incident light that chip 102 1 ends send, plunder angle (Grazing Angle) when being incident to diffraction grating 106 via collimating lens 104 collimation backs with certain, the single order diffraction light of generation (First-order Diffraction) 110 can be according to the different angle of diffraction of the different generations of wavelength.This moment is vertical as if the direct of travel that speculum 108 is rotated to the wavelength of exporting with desire, then the first order diffraction beam 110 of this wavelength can amplify chip 102 via returning laser optics after speculum 108 reflections, exciting with this wavelength is that the gain amplifier at center forms an exterior resonance chamber, and can locate this required wavelength of output in zero order reflection light 112 (Zeroth-order Reflection).Therefore, adjust the inclination angle of this speculum 108, can reach the adjustable purpose of laser source wavelength.
Yet, existing adjustable laser light source need accurately be adjusted the inclination angle of speculum with a numerous rotating mechanism of member, its pivot has relativeness with collimating lens 104 and speculum 108 in addition, its dimension precision requirement is quite high, temperature control relatively is very difficult, and the area of speculum need be enough to intercept the branch optical wavelength that each occurs in the different diffraction angle, when in case required output wavelength scope is wide, comprise speculum at interior whole rotating mechanism with bulky and be difficult to its miniaturization, and be difficult for improving its wavelength-modulated speed, so be difficult to meet the optical communication module demand of quick now modulation and miniaturization.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of adjustable laser light source, it can fast modulation go out required wavelength and be easy to miniaturization.
According to design of the present invention, a kind of adjustable laser light source comprises laser optics and amplifies chip, collimating lens, diffraction grating, condenser lens and a wavelength capture device.After collimating via collimating lens, the input light of laser optics amplification chip one end is incident to diffraction grating, because the light of different wave length can produce different angle of diffraction behind diffraction grating, the light of these different diffraction angles focuses on a plurality of focused light spot that form a zonal distribution via a condenser lens with the light beam that the different diffraction angle distributes again, the hot spot of this zonal distribution has then been represented the focal position of different wave length light beam, and the wavelength capture device comprises a shadow shield and a speculum, be formed with the slit of only allowing that together a predetermined convergent beam passes through on the shadow shield, the width of this slit also representative simultaneously has only the laser of specific wavelength can pass through this slit.
By this design, move along the hot spot direction of zonal distribution when slit and select the focused light spot of specific wavelength, when the convergent beam of the wavelength with desire output is entered, this convergent beam can arrive at speculum reflected back laser optics amplification chip again, amplify the output of the chip other end by laser optics, formation is the exterior resonance chamber at center with the wavelength of desire output, obtain the effect of fast modulation laser source wavelength, the speculum that this wavelength capture device also can a narrow width replaces above-mentioned shadow shield and speculum.
Moreover, one compensating plate can be set in the light path between collimating lens and diffraction grating, by the light path of the fine-tuning resonant cavity in inclination angle of correction-compensation plate, make adjustable laser light source of the present invention fast modulation go out to meet International Telecommunications Union's standard channel specification (InternationalTelecommunication Union grid; ITU grid) wavelength.
Description of drawings
Fig. 1 is the schematic diagram of an existing adjustable laser light source.
Fig. 2 is according to one embodiment of the invention, shows an adjustable laser light source 10 schematic diagrames.
Fig. 3 is a schematic diagram, shows the light-dividing principle of diffraction grating of the present invention and condenser lens collocation.
Fig. 4 is a schematic diagram, shows that of adjustable laser light source 10 of the present invention changes example.
Fig. 5 is the schematic diagram of another embodiment of the present invention, shows that one comprises the adjustable laser light source 30 of compensating plate design.
Fig. 6 is a schematic diagram, shows that of adjustable laser light source 30 of the present invention changes example.
Fig. 7 is according to another embodiment of the present invention, shows the schematic diagram of an adjustable laser light source 40.
The element numbers explanation
10,30,40 adjustable laser light sources
12 laser optics amplify chip
14 collimating lenses
16 penetration diffraction grating
18 condenser lenses
20 wavelength capture devices
22 shadow shields
The 22a slit
24 speculums
26 reflective diffraction gratings
32 compensating plates
34 substrates
36 reflection strips
100 adjustable laser light sources
102 laser optics amplify chip
104 collimating lenses
106 diffraction grating
108 speculums
110 first order diffraction beams
112 zero order reflection light
The output of O LASER Light Source
P
1, P
2Assemble luminous point
λ
1, λ
2Divide optical wavelength
Embodiment
Fig. 2 is according to one embodiment of the invention, shows an adjustable laser light source 10 schematic diagrames.As shown in Figure 2, adjustable laser light source 10 comprises laser optics amplification chip 12, collimating lens 14, penetration diffraction grating 16, condenser lens 18 and a wavelength capture device 20.Wavelength capture device 20 comprises a shadow shield 22 and a speculum 24, is formed with a slit 22a on the shadow shield 22.
Fig. 3 is a schematic diagram, shows the light-dividing principle that diffraction grating 16 of the present invention and condenser lens 18 are arranged in pairs or groups.As shown in Figure 3, behind incident light I process diffraction grating 16, because the optical diffraction effect is relevant with light wavelength, its angle of diffraction of light beams of different wavelengths is also different.When the angle of diffraction grating 16 and condenser lens 18 and position after suitable collocation, through the light beam of the individual wavelengths that is the distribution of different diffraction angle after diffraction grating 16 beam split, λ separated from one another as shown
1, λ
2Light beam can be converged to as P via condenser lens 18 again
1, P
2Independent convergent point.In other words, the branch optical wavelength of scattering according to the angle of diffraction in the space originally can be exchanged into linear space by the effect of condenser lens 18 and scatters (Linear Spatial Dispersion).
Refer again to Fig. 2, after the light that laser optics amplification chip 12 1 ends send is directional light via collimating lens 14 collimations earlier, be incident to diffraction grating 16 with certain angle θ, and each beam split wavelength light beam at formation different diffraction angle, line focus lens 18 enter the focused light spot that each beam split wavelength light beam is converged to a plurality of minutes focal point of a zonal distribution in the wavelength capture device 20 again.
The translational motion of wavelength capture device 20 for example can be used a little actuator priming, or any slit 22a that makes is along the mechanism that moves between each focus separated from one another of zonal distribution, for example use a piezoelectricity actuator (piezoelectric actuator), pneumatic actuator (pneumatic actuator) or all can by little shape actuator that micro electronmechanical (MEMS) technology is made, especially preferable with little shape actuator of micro electronmechanical (MEMS) technology manufacturing, it is reduced size not only, and translational speed more can reach millisecond (ms) grade.
Because of having determined speculum 24, the slit 22a width of shadow shield 22 is fed back to the power level (Power Level) that laser optics amplifies chip 12, and the spectral purity (Spectral Purity) of the wavelength that is captured, so width range of slit 22a, with can be, preferable with the spectral purity scope between the two of keeping the acquisition wavelength between keeping the oscillation energy that speculum 24 to laser optics amplifies the resonant cavity of 12 of chips.
Fig. 4 is a schematic diagram, shows that of adjustable laser light source 10 of the present invention changes example.Diffraction grating form of the present invention does not limit, and for example can adopt a reflective diffraction gratings 26 as shown in Figure 4, and the allocation position that only need adjust condenser lens 18 and wavelength capture device 20 gets final product.Moreover the present invention also can be designed to diffraction grating rotatable shadow shield 22 and then be maintained fixed except that mobile shade 22, can reach the effect of wavelength acquisition equally.As shown in Figure 4, when the inclination angle of diffraction grating 26 changes, the angle θ that directional light is incident to diffraction grating 26 promptly changes, so can make convergence to the wavelength of this fixed slit 22a position continue to change, therefore, can choose the required output wavelength that just falls into slit 22a by the corner of adjusting diffraction grating, can obtain the effect of fast modulation laser source wavelength equally.
Therefore, change example as can be known by above-mentioned difference, the present invention also can rotate diffraction grating and mobile shade simultaneously, so more can improve the wavelength-modulated speed and the elasticity of LASER Light Source 10.
Fig. 5 is the schematic diagram of another embodiment of the present invention, shows that the diffraction grating 16 and that uses penetration comprises the adjustable laser light source 30 of compensating plate 32 designs.
The adjustable optical assembly all must be followed identical optical fiber communication standard channel specification, to guarantee its wavelength compatibility.Therefore, the adjustable laser light source must be with (the International Telecommunication Union of International Telecommunications Union; ITU) defined wave spectrum specification transmission data.Therefore,, then can obviously increase the elasticity in the utilization, and the purpose that reaches high fast Tone system is to improve the transfer of data effect if the adjustable light source designed can directly be exported the wave spectrum that meets International Telecommunications Union's standard channel specification (ITU grid).Therefore, as shown in Figure 5, present embodiment is provided with a compensating plate 32 in the light path of 16 in collimating lens 14 and penetration diffraction grating, and compensating plate 32 for example can be a transparency glass plate.Change itself and the angle of directional light through collimation by rotation compensation plate 32, can the selected branch optical wavelength of trickle adjustment slit 22a, it reflexes to the light path that laser optics amplifies chip 12 by speculum 24, and reach the effect of finely tuning resonant cavity length, make adjustable laser light source 30 can directly export the wavelength that meets International Telecommunications Union's standard channel specification.In other words, adjustable laser light source 30 designs that add compensating plate 32, formed back coupling design at outputting standard channel specifications wavelength, and can compensate the wavelength spacing that diffraction grating splits and the difference of standard channel specification spacing, make the directly wavelength of the accurate conformance with standard channel specifications of output of adjustable laser light source 30, reach the purpose of fast modulation.
Fig. 6 is a schematic diagram, shows that of adjustable laser light source 30 of the present invention changes example.As shown in Figure 6, adjustable laser light source 30 can adopt a reflective diffraction gratings 26 equally, and the allocation position that only need change condenser lens 18 and wavelength capture device 20 gets final product.Moreover diffraction grating can be designed to rotatable shadow shield 22 and then be maintained fixed, and can reach the effect of wavelength acquisition equally.When the inclination angle of diffraction grating 26 changes, the angle θ that directional light is incident to diffraction grating 26 promptly changes, the specific wavelength of assembling to fixed slit 22a position is changed, and can be by the corner of adjusting diffraction grating, select the required output wavelength that just falls into slit 22a, this moment is not if the wavelength that captures falls into the scope of standard channel specification, again by the inclination angle of compensating for variations plate 32, can finely tune speculum 24 in real time to the resonant cavity length that laser optics amplifies chip 12, make the directly wavelength of the accurate conformance with standard channel specifications of output of adjustable laser light source 30.
Compensating plate 32 is not defined as a clear glass and constitutes, and can be the optics penetrating material of any high index of refraction, amplifies the light path of 12 of chips to laser optics with correction speculum 24 by the incidence angle between change and the light beam.
Fig. 7 is according to another embodiment of the present invention, shows the schematic diagram of an adjustable laser light source 40.As shown in Figure 7, wavelength capture device of the present invention can and plate the reflection plated film of a striated (Strip-like) in its surface and constitutes by a substrate 34, substrate 34 is in order to the formation surface of reflection plated film that this reflection strip 36 is provided, its shape and material do not limit, and for example can use a light absorbing material or light penetrable material all can.By the rotation of diffraction grating 26 or moving of substrate 34, the convergent beam scope that can make reflection strip 36 enter required wavelength is amplified chip 12 by this reflection strip with this convergent beam reflected back laser optics again.As shown in Figure 7, the same alternative compensating plate that adds of present embodiment, if the wavelength that captures does not fall into the scope of standard channel specification, can obtain to make the directly effect of the wavelength of the accurate conformance with standard channel specifications of output of adjustable laser light source 40 by the inclination angle of compensating for variations plate 32.
The above only is for example, and unrestricted the present invention.Anyly do not break away from spirit of the present invention and category, and, all should be contained in the scope of claim its equivalent modifications of carrying out or variation.
Claims (12)
1. adjustable laser light source is characterized in that:
One laser optics amplifies chip, in order to produce an output light of an input light and this adjustable laser light source;
One collimation lens, the light path of advancing that places this input light is being directional light with its collimation;
One diffraction grating places the light path of advancing of this directional light, and this directional light produces the light beam that distributes according to the different diffraction angle through making different wave length behind this diffraction grating;
One condenser lens will be in order to will be converted to a plurality of focused light spot of zonal distribution according to the different wave length light beam that the different diffraction angle distributes; And
One wavelength capture device, comprise a shadow shield and a speculum, this speculum is positioned on the focus of condenser lens, this shadow shield is formed with a slit of only allowing that a converging light spot passes through, and this focused light spot by this slit is returned this laser optics through this mirror reflects and is amplified chip, makes the centre wavelength of this focused light spot form the output wavelength of this adjustable laser light source.
2. adjustable laser light source as claimed in claim 1, it is characterized in that further comprising a compensating plate, be arranged at the light path between this collimating lens and this diffraction grating,, be fed back to this focused light spot wavelength that this laser optics amplifies chip with adjustment in order to revise the light path of this input light.
3. adjustable laser light source as claimed in claim 1 is characterized in that this shadow shield Facing material except that this slit comprises to be selected from a kind of in the group that a light absorbing material and a light-scattering material form.
4. adjustable laser light source as claimed in claim 1, this slit position that it is characterized by this shadow shield surface penetrates material by optics and is constituted.
5. adjustable laser light source is characterized in that:
One laser optics amplifies chip, in order to produce an output light of an input light and this adjustable laser light source;
One collimation lens, the light path of advancing that places this input light is being directional light with its collimation;
One diffraction grating places the light path of advancing of this directional light, and this directional light produces according to different diffraction angle distribution light beam through making different wave length behind this diffraction grating;
One condenser lens will be in order to will be converted to a plurality of focused light spot of zonal distribution according to the different wave length light beam that the different diffraction angle distributes; And
One wavelength capture device, the reflection plated film that comprises a substrate and be formed at this substrate constitutes, this substrate that is formed with the reflection plated film is positioned on the focus of condenser lens, this reflection plated film is the strip reflectance coating that width is only allowed converging light spot reflection, and this laser optics of this focused light spot reflected back via the reflection of this reflectance coating amplifies chip, makes the centre wavelength of this focused light spot form the output wavelength of this adjustable laser light source.
6. adjustable laser light source as claimed in claim 5 is characterized in that the material of this substrate comprises a light absorbing material or a smooth penetrable material.
7. adjustable laser light source as claimed in claim 5, it is characterized in that further comprising a compensating plate, be arranged at the light path between this collimating lens and this diffraction grating,, be fed back to this focused light spot wavelength that this laser optics amplifies chip with adjustment in order to revise the light path of this input light.
8. the wavelength choosing method of an adjustable laser light source comprises following steps:
Is directional light with collimation lens with the input optical alignment that a laser optics amplifies chip;
One diffraction grating is placed the light path of advancing of this directional light, and this directional light makes different wave length produce the light beam that the different diffraction angle distributes through behind this diffraction grating;
The different wave length light beam that utilizes a condenser lens that wavelength is distributed according to the different diffraction angle is converted to a plurality of focused light spot of zonal distribution;
One speculum is placed on the focus of condenser lens, these a plurality of focused light spot are incident to a slit of only allowing that one of them focused light spot enters, and unique this focused light spot that will enter this slit returns this laser optics through this mirror reflects and amplifies chip, makes the centre wavelength of this focused light spot form the output wavelength of this adjustable laser light source.
9. the wavelength choosing method of adjustable laser light source as claimed in claim 8, wherein this slit is to be formed at only to allow the strip opening that a converging light spot passes through on the shadow shield, move this shadow shield to capture in this focused light spot, and this laser optics of this focused light spot reflected back by this slit is amplified chip via a speculum, make the centre wavelength of this focused light spot form the output wavelength of this adjustable laser light source.
10. the wavelength choosing method of adjustable laser light source as claimed in claim 8, the light path that also is contained between this collimating lens and this diffraction grating is provided with a compensating plate, and form the wavelength that meets International Telecommunications Union's standard channel specification by the centre wavelength that changes the step that the mode of this compensating plate with the angle of this directional light changes the light path of this input light, make this focused light spot that is fed back to this laser optics amplification chip.
11. the wavelength choosing method of an adjustable laser light source comprises following steps:
Is directional light with collimation lens with the input optical alignment that a laser optics amplifies chip;
One diffraction grating is placed the light path of advancing of this directional light, and this directional light makes different wave length produce the light beam that the different diffraction angle distributes through behind this diffraction grating;
The different wave length light beam that utilizes a condenser lens that wavelength is distributed according to the different diffraction angle is converted to a plurality of focused light spot of zonal distribution;
One substrate is placed on the focus of condenser lens, these a plurality of focused light spot are incident to are formed at the strip reflection plated film of only allowing on this substrate that a converging light spot enters, move this substrate and make unique this laser optics of this focused light spot reflected back that enters this strip reflectance coating amplify chip, make the centre wavelength of this focused light spot form the output wavelength of this adjustable laser light source.
12. the wavelength choosing method of adjustable laser light source as claimed in claim 11, the light path that also is contained between this collimating lens and this diffraction grating is provided with a compensating plate, and form the wavelength that meets International Telecommunications Union's standard channel specification by the centre wavelength that changes the step that the mode of this compensating plate with the angle of this directional light changes the light path of this input light, make this focused light spot that is fed back to this laser optics amplification chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03146308 CN1271763C (en) | 2003-07-08 | 2003-07-08 | Adjustable laser ray source and its wavelength selection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03146308 CN1271763C (en) | 2003-07-08 | 2003-07-08 | Adjustable laser ray source and its wavelength selection method |
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| CN1567007A CN1567007A (en) | 2005-01-19 |
| CN1271763C true CN1271763C (en) | 2006-08-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011137590A1 (en) * | 2010-05-06 | 2011-11-10 | 山东远普光学股份有限公司 | Mode-hop-free continuous tuning semiconductor laser |
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| CN103364879A (en) * | 2012-03-30 | 2013-10-23 | 福州高意通讯有限公司 | A flat-top optical filter with adjustable bandwidth |
| CN104678675B (en) * | 2015-03-19 | 2017-05-31 | 上海理工大学 | A kind of optics Hilbert transform and the system of differentiating |
| CN107941736B (en) * | 2017-11-10 | 2020-09-11 | 吉林大学 | Gas detection device and method based on modulated absorption spectrum of broadband infrared light source |
| KR20200074316A (en) * | 2018-12-14 | 2020-06-25 | 삼성전자주식회사 | Spectral system, Optical inspection apparatus and Method for manufacturing the semiconductor device |
| CN112346172B (en) * | 2019-08-09 | 2022-12-20 | 北京意链科技有限公司 | Waveguide type optical module, near-to-eye display device, and image projection method |
| WO2022205082A1 (en) | 2021-03-31 | 2022-10-06 | Yangtze Memory Technologies Co., Ltd. | Laser system for dicing semiconductor structure and operation method thereof |
| CN113260480A (en) | 2021-03-31 | 2021-08-13 | 长江存储科技有限责任公司 | Laser cutting system and method for cutting semiconductor structure |
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2003
- 2003-07-08 CN CN 03146308 patent/CN1271763C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011137590A1 (en) * | 2010-05-06 | 2011-11-10 | 山东远普光学股份有限公司 | Mode-hop-free continuous tuning semiconductor laser |
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| CN1567007A (en) | 2005-01-19 |
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