CN1270896C - Filling method of liquid, filling device of liquid and spray device - Google Patents

Abstract

Provided is a filling method of liquid, and a filling device for liquid, as well as a discharge device. The filling device for liquid is provided with a cavity for storing a liquid L, a nozzle communicating with the cavity, and a discharge head 2 with a discharge means for discharging the liquid L stored in the cavity through the nozzle. Furthermore, the filling device 1 of the liquid is provided with a feeding part 3 of the liquid for feeding the liquid L to the nozzle of the discharge head 2 so as to bring the liquid into contact with the nozzle, and a suction means 4, connected to the cavity side of the discharge head 2, for aspirating the liquid fed from the feeding part 3 of the liquid into the cavity by aspirating the liquid through the nozzle via the cavity.

Description

The placement method of liquid object, the device for filling of liquid object and blowoff

Technical field

The present invention relates to method and device,, possess the blowoff of this device for filling in addition particularly for the placement method of the liquid object of the reagent of filling high price, rare inspection body etc. and the device for filling of liquid object in the position of hope filling liquid object.

Background technology

Analytical method about genetic structure obtains marked improvement in recent years, and headed by people's gene, a lot of genetic structures are revealed comes out.In so genetic structure is analyzed, on the substrate of microscope slide etc., from thousands of to the different types of DNA part more than 10,000 kinds as point of observation, arrange and have a medical check-up as tested after fixing, adopt microscope etc. to it method of observing etc.

But when in order to make so tested having a medical check-up, it is thousands of when above that its production quantity reaches, and carries out because all operations are all manual, and therefore its efficient extreme difference requires to realize automation.

As a method of carrying out automation, consider to adopt device for filling with the liquid object ejection of reagent etc. and be filled on tested the having a medical check-up.As the device for filling of ejection liquid object, such such as opening the spy shown in the flat 2001-324505 communique, the droplet ejection apparatus that is called as ink discharge device that uses in printer is arranged.

This droplet ejection apparatus generally is provided with fluid reservoir at the rear of its ejecting head, provides liquid object from fluid reservoir to ejecting head, from the nozzle ejection drop (liquid object) of ejecting head.

But, under a lot of situations, in the tested making of having a medical check-up etc. of using described DNA part, the inspection body of employed DNA etc. is very rare, and the price of the reagent of use is also very high, so, be difficult to accomplish in fluid reservoir, store a large amount of liquid object, provide it to ejecting head, again from nozzle ejection drop (liquid object) as reagent.This is because when from ejecting head ejection liquid object, be full of liquid object certainly in ejecting head, but in order to carry out suitable ejection, air (bubble) enters in the path that is used to spray, and prevent that it from remaining in this position, in other words must be residual bubble removal.

But, as previously mentioned, be provided with under the situation of fluid reservoir, necessary filling liquid object in the path from the fluid reservoir to the ejecting head, and, in order to remove the air (bubble) of sneaking into, must tentative liquid object ejection.So, just must also cause very big waste possessing a large amount of liquid object (reagent) simultaneously, this is unfavorable for reducing cost, and can not be suitable for basically for the liquid object of rareness.

Summary of the invention

The present invention is the invention in view of above situation, its objective is provide a kind of can be easily and the liquid object placement method and the liquid object device for filling of the reagent of the high price of filling positively, rare inspection body etc., possess the blowoff of this device for filling in addition.

First form of the present invention is to adopt to have booth, the nozzle that is communicated with this booth of storing liquid object, be used for from the ejecting head of nozzle with the blowoff of stored liquid thing ejection in the described booth, liquid object is filled to the liquid object placement method at desirable position, possess: the nozzle of described ejecting head is contacted with pre-prepd liquid object, attract liquid object from this nozzle, the liquid object that attracts is stored to operation in the described booth; To be stored in the operation of the liquid object ejection in the booth by described blowoff.

According to this liquid object placement method, attract liquid object to be stored in the booth from nozzle, by blowoff the stored liquid thing is sprayed from nozzle then, therefore, can be attracted on the ejecting head from the minimum liquid object that booth only can spray by nozzle by blowoff.Even, also can not waste liquid object ground and carry out a spot of ejection so be under high price, the rare situation in liquid object.

And best described liquid object is that described ejecting head is immersed in the described liquid object with the contacting of nozzle of described ejecting head.

Thus, the amount of configuration liquid object can be the amount of necessary irreducible minimum, can prevent the waste of liquid object really.

And contacting of the nozzle of described liquid object and described ejecting head also can be to form the facing up of nozzle of described ejecting head, to dispose described liquid object and make its whole nozzle that is covered with.

This situation, the amount of the liquid object of configuration also can be the amounts of necessary irreducible minimum, can prevent the waste of liquid object really.

And then, the nozzle of described liquid object and described ejecting head contact also can be will form described ejecting head the face of nozzle towards downside, with distributor liquid object is offered nozzle from the below of this face.

Like this, the formation of the nozzle of ejecting head can be faced downwards and fixedly handle, liquid object can directly spray after attracting.

Second form of the present invention is the liquid object device for filling, possesses: have booth, the nozzle that is communicated with this booth of storing liquid object, be used for from the ejecting head of nozzle with the blowoff of stored liquid thing ejection in the described booth; Supply with described liquid object to the nozzle of described ejecting head, the liquid object supply unit that this liquid object is contacted with described nozzle; Be connected in the booth side of described ejecting head, attract from described nozzle, will be attracted to the suction device of booth from the liquid object that described liquid object supply unit is supplied with by this booth.

According to this liquid object device for filling, owing to possess liquid object supply unit and suction device, to attract with nozzle by the liquid object that aforesaid suction device is supplied with from the liquid object supply unit, be stored in the booth, then, by blowoff the stored liquid thing is sprayed from nozzle, therefore, can be attracted on the ejecting head from the minimum liquid object that booth only can spray by nozzle by blowoff.Even, also can not waste liquid object ground and carry out a spot of ejection so be under high price, the rare situation in liquid object.

The opposition side that described ejecting head is preferably in the described nozzle of described booth possesses the container of storing liquid object, between described booth and described container, possesses the open and close valve that is used to open and close the stream between them.

Thus, in a single day be attracted in the booth and the stored liquid thing by suction device, be ejected device when the nozzle ejection, by open and close valve stream between booth and the container is in and closes, therefore liquid object can adverse current not arrive vessel side, and positively sprays from nozzle side.

And described ejecting head also can possess the container of storing liquid object at the opposition side of the described nozzle of described booth, and described container possesses the pressue device of the described booth that is used to pressurize.

Thus, in a single day be attracted in the booth and the stored liquid thing, be ejected device when the nozzle ejection, make booth be in pressurized state by pressue device by suction device, thus liquid object can adverse current to vessel side, and positively spray from nozzle side.

Third Way of the present invention is a blowoff, the travel mechanism that possesses described liquid object device for filling and move the ejecting head of described liquid object device for filling.

According to this blowoff, owing to can the ejecting head of described device for filling be moved by travel mechanism, therefore, the liquid object from ejecting head can be ejected into desirable position, and, can realize high-speed, the high efficiency that liquid object sprays by described device for filling.

Description of drawings

Figure 1A and figure B are the summary pie graphs of device for filling of the present invention.

Fig. 2 A and Fig. 2 B are the summary pie graphs of ejecting head.

Fig. 3 A～Fig. 3 C is the key diagram of other contact methods.

Fig. 4 A～Fig. 4 C is the key diagram of other contact methods.

Fig. 5 is a vertical view of watching liquid crystal indicator from the subtend substrate-side.

Fig. 6 is the profile along the H-H ' line of Fig. 5.

Fig. 7 is the equivalent circuit diagram of liquid crystal indicator.

Fig. 8 is the part amplification profile of liquid crystal indicator.

Fig. 9 A～Fig. 9 C is the schematic diagram of expression field emission escope.

Figure 10 is the sectional side view of organic El device.

Among the figure: 1-device for filling, 2-ejecting head, 3-container (liquid object supply unit), 4-pressure controller (suction device), 20-piezoelectric element (blowoff), 23-magnetic valve (open and close valve), 27-pressure generator, L-liquid object.

The specific embodiment

Below the present invention is described in detail.

Figure 1A and figure B are the summary pie graphs of an example of device for filling of the present invention, and the symbol 1 among Figure 1A is the device for filling (hereinafter referred to as device for filling) of liquid object.

This device for filling 1 by: ejecting head 2, store the liquid object that is used to spray container 3, in ejecting head 2, possess the pressure controller 4 of the suction device that is used to attract liquid object and constitute.

Ejecting head 2 such as nozzle plate 12 that possesses stainless steel and oscillating plate 13, is joined together both by cutting off parts (container partition) 14 shown in Fig. 2 A.Between nozzle plate 12 and oscillating plate 13, form by cutting off parts 14 and be divided into booth 15 ... with container 16, these boothes 15 and container 16 are communicated with by stream 17.

Each booth 15 is full of by liquid object with the inside of container 16, and the stream 17 between them plays a role as the supply port of supplying with liquid object to booth 15 from container 16.And, in nozzle plate 12, form a plurality of being used for from the poroid nozzle 18 of booth 15 injection liquid object with the state of arranging in length and breadth.On the other hand, in oscillating plate 13, be formed on the hole 19 of container 16 inner openings, in this hole 19, connect described pressure controller 4 by pipeline 24 (with reference to Figure 1A).

And, with oscillating plate 13 face opposite towards the face of booth 15 on, shown in Fig. 2 B, engage piezoelectric element 20.This piezoelectric element 20 is clamped between the pair of electrodes 21,21, and is outstanding laterally crooked after the energising, therefore brings into play the function of blowoff of the present invention.

Based on such formation, engage the oscillating plate 13 of piezoelectric element 20, become one crookedly laterally simultaneously with piezoelectric element, the volume of booth 15 is increased.Are communicated with in the booth 15 with in the container 16, when filling container 16 in during liquid object, be equivalent to increase volume liquid object partly and pass through stream 17 from container 16 inflow boothes 15.

Then, from such state, remove the energising to piezoelectric element 20, then piezoelectric element 20 reverts to original shape with oscillating plate 13.Because booth 15 also reverts to original volume, the pressure of the liquid object of booth 15 inside rises, so spray the drop 22 of liquid object from nozzle 18.

And, in described stream 17, be provided with the magnetic valve (open and close valve) 23 that makes it to open and close.So, after magnetic valve 23 is closed, then be closed between booth 15 and the container 16, therefore can prevent that liquid object in the booth 15 is to the adverse current of container 16 sides.Promptly as described later, in the time can only absorbing a spot of liquid object, though can not be full of liquid object fully in the container 16, but with such state, during from nozzle 18 ejection liquid object, because with stream 17 closures between booth 15 and the container 16, liquid object can adverse current not arrive container 16 sides, but makes it to spray from nozzle 18 sides by magnetic valve 22.

In addition, blowoff as ink gun, also can use the electricapparatus conversion body device in addition of described piezoelectric element (piezoelectric element) 20, such as also can adopt as the energy generating device use the mode of electrical heat conversion body, charged control type, pressurization and vibration type continuation mode, electrostatic attraction mode, also have electromagnetic wave to make it heating by irradiating laser etc., make the mode of liquid object ejection by the effect of this heating.

Container 3 is the devices as liquid object supply unit of the present invention, and shown in Figure 1A, portion stores liquid object L within it.As this container 3, can make ejecting head be immersed in the shape size of stored liquid thing as long as have when described ejecting head 2 is put into its inside, just not have special qualification, anything can use, such as beaker, ware, and the vial of the reagent of packing into can use.But, with regard to its material, the corresponding liquid object of using, must use to make this liquid object that the utensil that rotten material forms takes place.

Pressure controller 4 is connected with the hole 19 of described ejecting head 2 by pipeline 24, possesses: be connected in pipeline 24 dashpot 25, by pipeline 26 be connected in this dashpot 25 pressure generator 27, be connected in the pressure sensor 29 of dashpot 25 and the control part 30 of controlled pressure generator 27 by pipeline 28.

Pressure generator 27 is suction device in the present embodiment, also has the function of pressue device in addition, by to reducing pressure or pressurize in the dashpot 25 that connects between pipeline 26, can reduce pressure or pressurize in the container 16 to ejecting head 2.As this pressure generator 27, possess drawdown pump (vavuum pump), force (forcing) pump (air delivery pump), by three-dimensional valve the reduce pressure mechanism that pressurization switches, the device beyond the pump, utilize the mechanism etc. of the negative pressure source positive pressure source of water-head such as employing.In addition, in the present embodiment, be the device that adopts the pressurization of to reduce pressure, two aspects are all right but this pressure generator 27 might not reduce pressure pressurization, as long as at least as described later, possess and can pass through ejecting head 2, the decompression that attracts is just fully feasible.

Pressure sensor 29 is made of the known in the past pressure sensor of selling on the market, detects by the pressure in the dashpot 25 of pressure generator 27 transformations, and the magnitude of voltage that obtains is delivered to control part 30 as signal.

Control part 30 by controlled pressure generator 27, makes the pressure that reaches setting in the dashpot 25,25 pressure change decompression degree in the dashpot that detects according to described pressure sensor 29, and perhaps controlled pressure generator 27 makes it change pressurization degree.And this control part 30 can also preestablish the interior pressure of the dashpot 25 that is formed by pressure generator 27, can also control the switching of the magnetic valve 23 on the stream 17 that is arranged on described ejecting head 2.

In addition, for the device for filling 1 of such formation, the travel mechanism that described ejecting head 2 is moved by it is possessed can be used as by ejecting head 2 blowoff that liquid object automatically is ejected into the position of hope is played a role.Here, travel mechanism has: the Y direction that the directions X that the ejecting head 2 that makes device for filling 1 moves to directions X transfers body, move to the Y direction is transferred body, Z direction (short transverse) is transferred body, drive unit by linear electric machine etc., these transfer bodies such as moving with 1 μ m unit, make on the Z direction of XY direction that ejecting head 2 can be in the horizontal direction and short transverse (vertical direction) accurately to move.

And ejecting head 2 can dismounting for described travel mechanism, and thus, the ejection of manually carrying out liquid object when hope divides when dripping also can carry out such operation.

Secondly, according to the using method of the device for filling 1 of described formation, an example of the placement method of liquid object of the present invention is described.

At first, be ready to liquid object L, it is injected container as the filling target.Here, the present invention is specially adapted to reagent of those high prices of filling or rare check bodies, so also can only be the charging quantity of irreducible minimum as liquid object L.In addition, the processing that preferably outgases in advance for such liquid object.

Secondly, ejecting head 2 is packed into container 3 is immersed in the liquid object.Then, make the mechanism action of depressurised side of the pressure generator 27 of pressure controller 5, till the predefined authorized pressure that reduces pressure in the dashpot 25.In addition, when carrying out this when decompression, in advance the magnetic valve 23 of the stream 17 of ejecting head 2 cuts out, when magnetic valve 23 cuts out like this, containers 16 in the ejecting head 2 are connected with dashpot 25 by pipeline 24, so also be depressurized to the pressure same with dashpot 25 in this container 16.

Like this, dashpot 25 reduce pressure the regulation pressure after, control part 30 is opened described magnetic valve 23.Thus, stream 17 is opened booth 15 and is communicated with container 16, and booth 15 is communicated with dashpot 25 by container 16, pipeline 24.So be depressurized in the booth 15, so booth 15 will be attracted the liquid object in the container 3 and will be stored in its inside by nozzle.

Like this, in the booth 15 also filling liquid object L, and then after liquid object L flow to container 16 always, control part 30 was closed described magnetic valve 23.Perhaps, make pressure side mechanism (pressue device) action of pressure generator 27, be pressurized in the dashpot 25 atmospheric pressure or than this also will higher a little pressure till.Stop attraction action thus from nozzle 18.

Then, propose ejecting head 2, will wipe attached to the liquid object L on the nozzle 18 formation faces of ejecting head 2 according to necessity from container 3.

Then, by piezoelectric element 20 actions that make ejecting head 2, from the drop of nozzle 18, to desirable position filling liquid object L to the position of hope ejection liquid object L.

In addition, when ejecting head 2 is provided with the travel mechanism that makes it to move, when device for filling 1 is played a role as blowoff, by making the suitable action of travel mechanism, ejecting head 2 is moved to desirable position, carry out the ejection of drop (liquid object L) there.

In the placement method of such liquid object, by nozzle 18 liquid object L is attracted, be stored to 15 li of boothes, then stored liquid thing L sprayed from nozzle 18 by piezoelectric element 20, therefore arrive ejecting head so that ejection such as the amount that can only suck irreducible minimum.So even the very high or very rare situation of liquid object L price, also can not having lavishly, liquid towards thing L carries out a spot of ejection.

And, because the stream 17 between booth 15 and the container 16 is provided with magnetic valve 23, when spraying liquid object L from nozzle 18, close closed channels 17 by magnetic valve 23 by piezoelectric element 20, can make liquid object L can adverse current not arrive container 16 sides, and positively spray from nozzle 18 sides.So L is considerably less for liquid object, fully the situation of cartridge 16 is particularly advantageous.

On the other hand, when liquid object L is many, in container 16 also filling liquid object L, and then in pipeline 24 sides also filling liquid object L, they as previously mentioned, make the mechanism action of the pressure side of pressure generator 27 after storing the function of liquid object in performance, make and be pressurized to atmospheric pressure in the dashpot 25 or, make it to become counter-pressure than this higher a little pressure.Then, make piezoelectric element 20 actions,, liquid object L can not sprayed upstream and positively from nozzle 18 to container 16 sides by liquid object L is sprayed from nozzle 18 with this state.

In addition, in described example, liquid object L is to be undertaken by ejecting head 2 being immersed among the liquid object L in the container 3 with the contacting of nozzle 18 of ejecting head 2, but the present invention is not limited to this, can adopt various contact methods.

Such as, as shown in Figure 3A, the nozzle 18 of ejecting head 2 formed face up like that with its turned upside down.Then, shown in Fig. 3 B, Fig. 3 C, under this state, on the formation face of this nozzle 18, it is configured to the state of complete covering nozzles 18 such as supplying with liquid object L by distributor 31.Then, identical with described example, the liquid object L that is configured on the nozzle 18 formation faces is attracted in the booth 15, and then ejecting head 2 reverted to former state up and down, nozzle 18 sprays the liquid object L that attracts with described example after the below the samely from nozzle 18.

Like this, the liquid object L as the minimum of necessity is configured on the nozzle 18 formation faces of ejecting head 2 owing to the amount that will dispose, and can accomplish not have the waste of liquid object really.

In addition, when the liquid object L on will being configured in nozzle 18 formation faces is attracted in the booth 15, in order to prevent also to suck air, such as can be by distributor 31 suitably supply liquid object L on nozzle 18 formation faces with liquid object.

And, shown in Fig. 4 A～Fig. 4 C that the face 2a of nozzle 18 that forms ejecting head 2 is motionless towards downside, supply with liquid object with distributor 31 to nozzle 18 from the below of this face 2a and also can.That is, shown in Fig. 4 B, keep surface tension to extrude liquid object L as far as possible, make this distributor approaching to nozzle 18 formation faces with this state at the front end of distributor 31.Then, shown in Fig. 4 C, form maintenance liquid object L between the face 2a at distributor 31 and nozzle 18.Then, identical liquid object L with maintenance with described example is attracted in the booth 15, and identical with the described example then liquid object L with attraction sprays from nozzle 18.In addition, in this situation, make from the supply of the liquid object L of distributor 31 to average out with the liquid object L that attracts to booth 15 in, common nozzle 18 is covered by liquid object L in the attraction, so must accomplish not pass air in the booth 15.

Like this,, can fixedly handle towards downside, after liquid object is attracted, can spray immediately because the nozzle of ejecting head 2 forms face 2a with situation comparison shown in Figure 3.

In addition, in described example, ejection liquid object as the filling target, be the reagent or the rare inspection body of high price, but be not limited to this, also can adopt organic EL (Electroluminescent: electroluminescent) element form material, as the metallic colloid of metal line material, and then also can be various materials such as microlens material, colour film material, liquid crystal material.

Below explanation by the electro-optical device that forms of the such material of ejection, with and inscape.

At first, the example as electro-optical device describes liquid crystal indicator.

Fig. 5 is for liquid crystal indicator, the vertical view of watching from the subtend substrate-side of representing each inscape.Fig. 6 is the profile along the H-H ' line of Fig. 5.Fig. 7 is in the image display area of liquid crystal indicator, forms the equivalent circuit diagram of the various elements, wiring etc. of rectangular a plurality of pixels, and Fig. 8 is the part amplification profile of liquid crystal indicator.

In Fig. 5 and Fig. 6, the liquid crystal indicator of present embodiment (electro-optical device) 100, (Thin Film Transistor: thin film transistor (TFT)) array base palte 35 and subtend substrate 40 are had encapsulant 52 applyings of the encapsulant of photo-curable to its paired TFT, wrap into liquid crystal 50 and maintenance by sealing material 52 in the zone of dividing.The zone of encapsulant 52 in real estate forms closed square frame.

Area inside in the formation zone of encapsulant 52, form by the light-proofness material constitute around somatotype 53.One side in the zone in the outside of encapsulant 52 along tft array substrate 35 forms data drive circuit 101 and mounting terminal 102, along forming scan drive circuit 104 in the both sides of adjacency on one side with this.On the remaining one side of tft array substrate 35, be provided for connecting many wirings 105 between the scan drive circuit 104 of the both sides that are arranged on image display area.And at least one place in the bight of subtend substrate 40, configuration is used to obtain conductive material 106 between the substrate that conducts between tft array substrate 35 and the subtend substrate 40.

In addition, replacement is formed on data line drive circuit 101 and scan line drive circuit 104 on the TFT substrate 10, such as also driving that (Large Scale Integrated circuit: TAB large scale integrated circuit) (TapeAutomated Bonding) substrate is electrically connected and mechanical connection with the terminal group of peripheral part of tft array substrate 35 with LSI with being formed on to have installed by anisotropic conductive film.In addition, in liquid crystal indicator 100, the kind of the liquid crystal 50 that uses, be the manner of execution of corresponding TN (Twisted Nematic) mode, STN (Super Twisted Nematic) mode etc., the difference of standard white mode/standard black mode, at prescribed direction configuration phase difference plate, Polarizer, omitted diagram here.And; when liquid crystal indicator 100 is constituted as using of colored demonstration; in subtend substrate 40, in 2 zones of each pixel electrode subtend described later of tft array substrate 35, such as the color filter that forms red (R), green (G), blue (B) with this diaphragm.

In the pixel display area territory of liquid crystal indicator 100 with such structure, as shown in Figure 7, a plurality of pixel 100a constitute rectangular, and everywhere at these pixels 100a, form the TFT (switch element) 37 that pixel switch is used, supply picture element signal S1, S2 ..., Sn data wire 6a be electrically connected with the source electrode of TFT37.Write data wire 6a picture element signal S1, S2 ..., Sn can by this order line supply with in proper order, also can supply with by each group between many adjacent data wire 6a.And scan line 3a is electrically connected at the grid of TFT37, with the sequential of regulation to scan line 3a with the form of pulse by this apply in proper order scanning new signal G1, G2 ... Gm.

Pixel electrode 39 is electrically connected with the drain electrode of TFT37, by only during certain, will being set to conducting state as the TFT37 of switch element, picture element signal S1, the S2 that will supply with from data wire 6a with the sequential of regulation ..., Sn writes each pixel.Like this, by pixel electrode 39 be written into the prescribed level of liquid crystal picture element signal S1, S2 ..., Sn keep between the counter electrode 121 of subtend substrate 40 shown in Figure 6 certain during.In addition, for the picture element signal S1, the S2 that prevent to keep ..., Sn electric leakage, and the liquid crystal capacitance of formation between pixel electrode 39 and counter electrode 121 additional storage electric capacity 60 side by side.Such as, the voltage of pixel electrode 39 can be than long three orders of magnitude of the time of additional source voltage by the voltage that memory capacitance 60 keeps.Thus, the retention performance of electric charge improves, and can realize the very high liquid crystal indicator of contrast 100.

Fig. 8 is the part amplification profile with liquid crystal indicator 100 of grid type TFT 37, on the glass substrate P that constitutes tft array substrate 35, employing is with the placement method of described device for filling 1, and the grid wiring 61 of formation is formed between puncture B on the glass substrate P.

On grid wiring 61, by the gate insulating film 62 that constitutes by SiNx, the stacked semiconductor layer 63 that constitutes by amorphous silicon (a-Si) layer.With the part of the semiconductor layer 63 of this grid wiring part subtend as channel region.On semiconductor layer 63; stacked for obtain that ohm engages such as the knitting layer 64a and the 64b that constitute by n+ type a-Si layer; on the semiconductor layer 63 of the central portion of channel region, be formed for protecting the etching restriction film 65 of the insulating properties that constitutes by SiNx of raceway groove.And these gate insulating films 62, semiconductor layer 63 and etching limiting layer 65 after the plated film (CVD), carry out that protective layer is smeared, sensitization, video picture, photoetching, carry out pattern-forming as shown in the figure.

And then the pixel electrode 39 that is made of knitting layer 64a, 64b and ITO also carries out photoetching in film forming, as shown in the figure, carry out pattern-forming.Then, the outstanding respectively dyke 66 that is provided with on pixel electrode 39, gate insulating film 62 and etching restriction film 65 ..., at these dykes 66 ... between adopt described droplet ejection apparatus IJ, the drop of ejection silver compound can form source electrode line, drain line.

In such liquid crystal indicator 100, such as when the various wirings that form described colour filter, grid wiring 61 etc., adopting the placement method that uses described device for filling 1.

In addition, in this example, be the formation that TFT37 is used as the switch driven element that is used for liquid crystal indicator 100, but beyond liquid crystal indicator, install such as using organic EL described later (electroluminescent).

Below, as other example of electro-optical device, the electric field transmitted display (Field Emission Display is to call FED in the following text) that possesses the field emission element is described.

Fig. 9 is the key diagram of FED, and Fig. 9 A constitutes the cathode base of FED and the summary pie graph of the configuration of expression anode substrate, and Fig. 9 B is the ideograph of the drive circuit that possesses of the cathode base among the FED, and Fig. 9 C is the stereogram at the main position of expression cathode base.

Shown in Fig. 9 A, FED (electro-optical device) 200 is made of the cathode base 200a and the anode substrate 200b of subtend configuration.Cathode base 200a possesses shown in Fig. 9 B: gate line 201, emission polar curve 202 and the electric field transmitted element 203 that connects these gate lines 201 and emission polar curve 202 promptly, become so-called simpler array drive circuit.To gate line 201, provide signal V1, V2 ..., Vm, to the emission polar curve, provide emitter signal W1, W2 ..., Wn.And cathode base possesses the fluorophor that is made of RGB, and this fluorophor has and runs into electronics with regard to luminous character.

Shown in Fig. 9 C, electric field transmitted element 203 possesses: be connected in the emission electrode 203a that launches polar curve 202, the gate electrode 203b that is connected in gate line 201.And then, emission electrode 203a possesses from the emission electrode 203a side direction gate electrode 203b jut that is called as emitting head 205 of diameter reduction gradually, form hole portion 204 on the position corresponding with this emitting head 205 on gate electrode 203a, the front-end configuration of emitting head 205 is in hole portion 204.

In such FED200, signal V1, V2 by control gate polar curve 202 ..., Vm and the emission polar curve 202 emitter signal W1, W2 ..., Wm, service voltage between emission electrode 203a and gate electrode 203b, effect by electrolysis, from emitting head 205 to hole portion 204 mobile electrons 210, from the front end emission electronics 210 of emitting head 205.Here, the fluorophor of this electronics 210 and anode substrate 200b meets then luminous, just can drive FED200 as desired.

In the FED that constitutes like this, when forming emission electrode 203a emission polar curve 202, also having gate electrode 203b, gate line 201 etc., can adopt the placement method that uses described device for filling 1.

Below, other the example as electro-optical device describes Organnic electroluminescent device (to call organic El device in the following text).

Figure 10 is the sectional side view of organic El device, and the symbol 301 among Figure 10 is organic El devices.This organic El device 301 connects the wiring and the drive IC (scheming not shown) of plasticity substrate (scheming not shown) on the organic EL 302 that is made of substrate 311, component portion 321, pixel electrode 331, dyke 341, light-emitting component 351, negative electrode 361 (counter electrode) and base plate for packaging 371.Component portion 321 is formed on the substrate 311, a plurality of pixel electrodes 331 are arranged in the component portion 321, then, between each pixel electrode 331, form cancellate dyke 341, open on 344 at the recess that produces by dyke 341, forming light-emitting component 351 negative electrodes 361, to be formed on the top of dyke 341 and light-emitting component 351 comprehensive, and 1 laminate packaging is with substrate 371 on negative electrode 361.

Component portion 321 possesses the TFT321a of bottom gate polar form structure, and the main composition of this TFT321a is the same with device shown in Figure 8.And light-emitting component 351 is the positions that formed by drop ejection method.

Such organic El device 301 is the so-called polymer electrolyte organic El devices that possess the light-emitting component 351 that forms with drop ejection method.

The manufacturing process that comprises the organic El device 301 of organic EL comprises: the counter electrode that the light-emitting component that the dyke that forms dyke 341 forms operation, be used for suitably forming the plasma treatment operation of light-emitting component 351, form light-emitting component 351 forms operation, form negative electrode 361 forms operation, stacked base plate for packaging 371 and the packaging process that encapsulates on negative electrode 361.

Light-emitting component forms operation by being to form hole injection layer 352 on the pixel electrode 331 and luminescent layer 353 forms light-emitting component 351 at recess opening 344, possesses hole injection layer and forms operation and luminescent layer formation operation.And hole injection layer formation operation has: dry first drying process that forms hole injection layer 352 of first constituent that first constituent (liquid object) that will be used to form hole injection layer 352 is ejected into the ejection of first on each pixel electrode 331 operation, will sprays, and luminescent layer formation operation has: second constituent (liquid object) that will be used to form luminescent layer 353 is ejected into dry second drying process that forms luminescent layer 353 of second constituent that second on the hole injection layer 352 sprays operation, will spray.

In the organic El device that constitutes like this, forming hole injection layer, the luminescent layer that constitutes light-emitting component 351, and then when the gate line of the TFT321 that forms bottom gate polar form structure etc., can adopt the placement method that uses described device for filling 1.

Claims (8)

1. liquid object placement method, be to adopt to have booth, the nozzle that is communicated with this booth of storing liquid object, be used for from the ejecting head of nozzle with the blowoff of stored liquid thing ejection in the described booth, liquid object is filled to the liquid object placement method at desirable position, it is characterized in that: possess:

The nozzle of described ejecting head is contacted with pre-prepd liquid object, attract liquid object, the liquid object that attracts is stored to operation in the described booth from this nozzle;

To be stored in the operation of the liquid object ejection in the booth by described blowoff.

2. liquid object placement method as claimed in claim 1 is characterized in that: described liquid object is that described ejecting head is immersed in the described liquid object with the contacting of nozzle of described ejecting head.

3. liquid object placement method as claimed in claim 1 is characterized in that: contacting of the nozzle of described liquid object and described ejecting head is to form the facing up of nozzle of described ejecting head, to cover its whole nozzle ground and carry out the configuration of described liquid object.

4. liquid object placement method as claimed in claim 1 is characterized in that: the nozzle of described liquid object and described ejecting head contact be will form described ejecting head the face of nozzle towards downside, with distributor liquid object is offered nozzle from the below of this face.

5. liquid object device for filling is characterized in that: possess:

Have booth, the nozzle that is communicated with this booth of storing liquid object, be used for from the ejecting head of nozzle with the blowoff of stored liquid thing ejection in the described booth;

By supplying with described liquid object to the nozzle of described ejecting head, the liquid object supply unit that this liquid object is contacted with described nozzle;

Be connected in the booth side of described ejecting head, attract from described nozzle, will be attracted to the suction device in the booth from the liquid object that described liquid object supply unit is supplied with by this booth.

6. liquid object device for filling as claimed in claim 5 is characterized in that:

Described ejecting head possesses the container of storing liquid object at the opposition side of the described nozzle of described booth,

Between described booth and described container, possesses the open and close valve that is used to open and close the stream between them.

7. liquid object device for filling as claimed in claim 5 is characterized in that:

Described ejecting head possesses the container of storing liquid object at the opposition side of the described nozzle of described booth,

Described container possesses the pressue device of the described booth that is used to pressurize.

8. blowoff is characterized in that: possess:

Described liquid object device for filling of claim 5 and the travel mechanism that the ejecting head of described liquid object device for filling is moved.

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