CN1785673A - Liquid droplet ejection device, liquid droplet ejection method, electro-optical device and manufacturing method of electro-optical device - Google Patents
Liquid droplet ejection device, liquid droplet ejection method, electro-optical device and manufacturing method of electro-optical device Download PDFInfo
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- CN1785673A CN1785673A CN 200510128979 CN200510128979A CN1785673A CN 1785673 A CN1785673 A CN 1785673A CN 200510128979 CN200510128979 CN 200510128979 CN 200510128979 A CN200510128979 A CN 200510128979A CN 1785673 A CN1785673 A CN 1785673A
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Abstract
The invention provides a liquid droplet ejection device which can easily eject a liquid droplet to even a very large-sized workpiece, thereby improving the productivity of a workpiece, a liquid droplet ejection method, a manufacturing method of an electro-optical device, an electro-optical device and electronic equipment. This liquid droplet ejection device 10 for ejecting a liquid from a nozzle of a head 120 to a workpiece W includes: a table 20 for loading the workpiece W; a first shifting section 41 capable of shifting the table 20 in a first direction X and in a second direction Y approximately intersecting the first direction X at a right angle; a plurality of carriages 50 having the head 120; and a second shifting section 42 capable of positioning each of the carriages 50 by mutually shifting each of the carriages along the second direction Y.
Description
Technical field
The present invention relates to a kind of with liquid from the nozzle of shower nozzle manufacture method, electro-optical device and electronic instrument to the droplet ejection apparatus of workpiece ejection, droplet discharge method, electro-optical device.
Background technology
Droplet ejection apparatus can be used as trace system and uses, and this trace system is with ink jet type drop is made to the mode of workpiece ejection.This trace system is used in for example in the manufacturing of the such photoelectric cell of flat-panel monitor.
Droplet ejection apparatus with ink jet type ejection liquid has the shower nozzle that is used to spray drop.Proposed to utilize such shower nozzle, the device (patent documentation 1) of the ink of using for glass substrate ejection colour filter.
Patent documentation 1: No. 3159919 communique of Japan Patent (the 4th page～the 6th page, Fig. 1)
This droplet ejection apparatus has the carrier (carriage) that keeps shower nozzle, and when its structure was describing of a certain zone of finishing glass substrate of the shower nozzle when carrier, this carrier moved to the different zone of the next one.
On the other hand, for example the display unit of plane is to large scale development, and the glass substrate of use in such flat display is thereupon to large scale development.Therefore, through whole of large-size glass substrate and ejection liquid and when describing, it is elongated and can not improve problem by the production efficiency of the workpiece of liquid ejection the displacement of carrier of shower nozzle to occur having.
Summary of the invention
Even the object of the present invention is to provide the above-mentioned problem large-scale workpiece of a kind of solution, also drop easily can be sprayed, can improve droplet ejection apparatus, the droplet discharge method of the production efficiency of workpiece, manufacture method, electro-optical device and the electronic instrument of electro-optical device to workpiece.
Above-mentioned purpose realizes that by droplet ejection apparatus in the 1st invention, droplet ejection apparatus sprays liquid from the nozzle of shower nozzle to workpiece, it is characterized in that, possesses: workbench, and it is used to carry above-mentioned workpiece; The 1st moving part, it can move above-mentioned workbench to the 1st direction with the 2nd direction of the about quadrature of above-mentioned the 1st direction; A plurality of carriers, it has above-mentioned shower nozzle; The 2nd moving part, it can move above-mentioned each carrier mutually and locate along above-mentioned the 2nd direction.
According to the formation of the 1st invention, workbench is the equipment that carries workpiece.The 1st moving part can with movable workbench to the 1 direction and with the 1st direction the 2nd direction of quadrature roughly.A plurality of carriers have shower nozzle.The 2nd moving part can move each carrier mutually and locatees along the 2nd direction.
Thus, possess shower nozzle a plurality of carriers can by the 2nd moving part mobile and pre-aligned mutually along the 2nd direction.Can be with the mutual correct position location of each shower nozzle of a plurality of carriers.And carry at workbench under the state of workpiece, when the 1st direction and the 2nd direction moved, the shower nozzle of a plurality of carriers sprayed liquid by the nozzle from shower nozzle to workpiece, can spray drop and carry out correct describing workpiece.Because the shower nozzle of a plurality of carriers can spray liquid to workpiece, therefore,, also can carry out the drop of workpiece is sprayed operation with high production efficiency even describe the big large-scale workpiece of area.
The 2nd invention is characterized in that in the formation of the 1st invention, above-mentioned shower nozzle has a plurality of said nozzles, and a plurality of said nozzles are being arranged along above-mentioned the 2nd direction.
According to the formation of the 2nd invention, shower nozzle has a plurality of nozzles, and a plurality of nozzles are being arranged along the 2nd direction.
Thus, for example a plurality of nozzles of shower nozzle also can spray each different types of liquid, and certain a plurality of nozzles also can spray the liquid of identical type.Thus, can carry out describing quickly to workpiece.
The 3rd invention according to the 1st invention or the 2nd invention, is characterized in that above-mentioned the 2nd moving part has: retaining element, and it keeps each above-mentioned carrier; Moving element, it is located on each above-mentioned carrier and above-mentioned carrier is moved and the location along above-mentioned the 2nd direction mutually to the said fixing element.
According to the formation of the 3rd invention, the retaining element of the 2nd moving part is the element that is used to keep each carrier.The moving element of the 2nd moving part is arranged on each carrier.This moving element is that carrier is moved and the element of location along the 2nd direction mutually to retaining element.
Thus, each carrier can move mutually along the 2nd direction by the 2nd moving part and locate, and can correctly adjust the relative position of the shower nozzle on each carrier in advance.
The 4th invention, the formation according to the 1st invention is characterized in that, is used in the maintenance department of the ejection ability of the said nozzle that recovers above-mentioned shower nozzle, is configured at least one side's the position of above-mentioned the 2nd direction.
In the formation of the 4th invention, be used to recover the maintenance department of ejection ability of the nozzle of shower nozzle, be configured at least one side's the position of the 2nd direction.
Thus, the shower nozzle of carrier just can carry out the recovery of the ejection ability of nozzle by maintenance department as long as move to the 2nd direction by the 2nd moving part.
Above-mentioned purpose, in the 5th invention, realize by droplet discharge method, this droplet discharge method is ejected into the nozzle of liquid from shower nozzle on the workpiece, it is characterized in that, have: the workpiece mobile process, its will carry above-mentioned workpiece movable workbench to the 1 direction and with above-mentioned the 1st direction roughly on the 2nd direction of quadrature; With liquid ejection operation, its from the said nozzle that is configured in the above-mentioned shower nozzle on the mobile and pre-aligned mutually a plurality of carriers of above-mentioned the 2nd direction to above-mentioned workpiece ejection aforesaid liquid.
Thus, have the carrier of shower nozzle, can be mobile and pre-aligned mutually along the 2nd direction by the 2nd moving part.Can correctly locate the mutual position of each shower nozzle of a plurality of carriers.And carry at workbench under the state of workpiece, when the 1st direction and the 2nd direction moved, the shower nozzle of a plurality of carriers sprayed liquid by the nozzle from shower nozzle to workpiece, can spray drop to workpiece and carry out correct describing.Because the shower nozzle of a plurality of carriers can spray liquid to workpiece, therefore,, also can carry out the drop of workpiece is sprayed operation with high production efficiency even describe the big large-scale workpiece of area.
The 6th invention, the formation according to the 5th invention is characterized in that, above-mentioned the 1st direction is that above-mentioned workbench is moved and liquid drawing direction that above-mentioned workpiece is described thus relative to above-mentioned shower nozzle.Above-mentioned the 2nd direction is to move a certain amount of relative to above-mentioned shower nozzle above-mentioned workbench and carry out the direction of travel of dividing a word with a hyphen at the end of a line of the ejection position of the aforesaid liquid in the above-mentioned workpiece.
According to the formation of the 6th invention, the 1st direction is the drawing direction that workbench is moved and workpiece described by liquid relative to shower nozzle.The 2nd direction is to move a certain amount of relative to shower nozzle workbench and carry out the direction of travel of dividing a word with a hyphen at the end of a line of the ejection position of the liquid in the workpiece.
Thus, workpiece can be divided a word with a hyphen at the end of a line and describes along the 1st direction along the 2nd direction, describes apace easily through about whole of workpiece.
The 7th invention, formation according to the 5th invention or the 6th invention, it is characterized in that the above-mentioned carrier that uses does not move to maintenance department along above-mentioned the 2nd direction in the ejection of above-mentioned drop, and in above-mentioned maintenance department, carry out the ejection ability recovery of the said nozzle of above-mentioned shower nozzle.
According to the formation of the 7th invention, the carrier that uses in the ejection of drop does not move to maintenance department along the 2nd direction, and carries out the ejection ability recovery of the nozzle of shower nozzle in maintenance department.
Thus, the carrier that in the ejection of drop, uses not, as long as along the 2nd direction to maintenance department's side shifting, maintenance department just can carry out the recovery of ejection ability of the nozzle of shower nozzle.
Above-mentioned purpose, realize that by droplet discharge method this droplet discharge method is ejected into liquid on the workpiece from the nozzle of shower nozzle, it is characterized in that possessing in the 8th invention: the scanning operation, its workbench that will carry above-mentioned workpiece is along the 1st scanning direction; With the ejection operation, its from be provided in along with above-mentioned the 1st direction roughly the 2nd direction of quadrature move and the relative above-mentioned workpiece ejection aforesaid liquid of said nozzle of above-mentioned shower nozzle on pre-aligned a plurality of carriers, when wherein deciding the above-mentioned scanning operation of number of times, above-mentioned workbench is moved institute quantitatively to above-mentioned the 2nd direction whenever carrying out.
Thus, to the 1st scanning direction, the nozzle of the shower nozzle of a plurality of carriers can spray liquid to workpiece to workbench in the ejection operation in the scanning operation.At this moment, whenever carry out when deciding the scanning operation of number of times, move institute quantitatively by workbench to above-mentioned the 2nd direction, to workpiece ejection liquid and can correctly describe.Because the shower nozzle of a plurality of carriers can spray liquid to workpiece, so, also can come workpiece is carried out drop ejection operation with high production rate even describe the big workpiece of area.
Above-mentioned purpose, in the 9th invention, manufacture method by electro-optical device realizes, the manufacture method of this electro-optical device, make electro-optical device by nozzle to workpiece ejection liquid from shower nozzle, it is characterized in that, at the above-mentioned workbench that will carry above-mentioned workpiece to the 1st moving part and the 1st direction and above-mentioned the 1st direction when roughly the 2nd direction of quadrature moves, along the above-mentioned shower nozzle of the mobile and pre-aligned mutually a plurality of carriers of above-mentioned the 2nd direction, above-mentioned workpiece ejection aforesaid liquid is made above-mentioned electro-optical device by said nozzle from above-mentioned shower nozzle.
Thus, a plurality of carriers that possess shower nozzle can move also pre-aligned along the 2nd direction by the 2nd moving part mutually.Can correctly locate the mutual position of each shower nozzle of a plurality of carriers.And, workbench with the state that carries workpiece under, when the 1st direction and the 2nd direction moved, the shower nozzle of a plurality of carriers can spray liquid to workpiece by the nozzle from shower nozzle, to workpiece ejection liquid and correctly describe.Because the shower nozzle of a plurality of carriers can spray liquid to workpiece, therefore,, also can carry out drop ejection operation to workpiece with high productivity ratio even describe the big large-scale workpiece of area.
By using the shower nozzle of these a plurality of carriers,, therefore can improve the production efficiency of electro-optical device even large-scale workpiece also can be described with high productivity ratio.
Above-mentioned purpose, in the 10th invention, realize by electro-optical device, this electro-optical device is made to workpiece ejection liquid by the nozzle from shower nozzle, it is characterized in that, at the above-mentioned workbench that will carry above-mentioned workpiece to the 1st moving part and the 1st direction and above-mentioned the 1st direction when roughly the 2nd direction of quadrature moves, along the above-mentioned shower nozzle of the mobile and pre-aligned mutually a plurality of carriers of above-mentioned the 2nd direction, above-mentioned workpiece ejection aforesaid liquid is made above-mentioned electro-optical device by said nozzle from above-mentioned shower nozzle.
Thus, have a plurality of carriers of shower nozzle, can move also pre-aligned mutually along the 2nd direction by the 2nd moving part.Can correctly locate the mutual position of each shower nozzle of a plurality of carriers.And, workbench with the state that carries workpiece under, when the 1st direction and the 2nd direction moved, the shower nozzle of a plurality of carriers can spray liquid to workpiece by the nozzle from shower nozzle, to workpiece ejection liquid and correctly describe.Because the shower nozzle of a plurality of carriers can spray liquid to workpiece, therefore,, also can carry out drop ejection operation to workpiece with high production efficiency even describe the big large-scale workpiece of area.
By using the shower nozzle of these a plurality of carriers,, therefore can improve the production efficiency of electro-optical device even large-scale workpiece also can be described with high production efficiency.
The 11st invention is characterized in that, it carries as the above-mentioned electro-optical device in the 10th invention.
Thus, realize the raising of the production efficiency of electronic instrument.
Description of drawings
Fig. 1 represents to comprise the vertical view of structure example of the trace system of droplet ejection apparatus of the present invention.
Fig. 2 is illustrated in the stereogram of the structure example of the droplet ejection apparatus shown in Fig. 1.
Fig. 3 is illustrated in the vertical view of the droplet ejection apparatus among Fig. 2.
Fig. 4 represents the figure of the structure example of linear motor.
Fig. 5 represents the figure of the configuration example of carrier and shower nozzle.
Fig. 6 represents the figure of the structure example of maintenance department.
Fig. 7 represents the 1st time to the 3rd time the figure that describes done state.
Fig. 8 represents the further detailed figure that describes done state for the 1st time.
Fig. 9 represents the further detailed figure that describes done state for the 2nd time.
Figure 10 represents the further detailed figure that describes done state for the 3rd time.
Figure 11 represents the cutaway view by the shape example of the organic El device of droplet ejection apparatus manufacturing of the present invention.
Figure 12 represents the cutaway view by the structure example of the liquid crystal indicator of droplet ejection apparatus manufacturing of the present invention.
Figure 13 represents to possess the stereogram of the mobile phone in the example of electronic instrument of the display unit of making by embodiments of the present invention.
Figure 14 represents the stereogram of the computer in the other example of electronic instrument.
Among the figure: 1-trace system, 10-droplet ejection apparatus, 20-workbench, 41-the 1st moving part, 42-the 2nd moving part, 50-carrier, 120-shower nozzle, X-the 1st direction (drawing direction), Y-the 2nd direction (direction of travel), W-workpiece.
The specific embodiment
Below, with reference to the description of drawings embodiments of the present invention.
Fig. 1 is the vertical view of example of trace system that comprises the preferred implementation of droplet ejection apparatus of the present invention.
This trace system is in the manufacturing line that a kind of for example organic EL (electroluminescent) that enrolls at so-called flat-panel monitor as the one example installs.This droplet ejection apparatus 10 can form the light-emitting component of each pixel that for example becomes organic El device.
Each unit 2 shown in Figure 1 all is identical.Unit 2 has: droplet ejection apparatus 10, chamber device 12, workpiece are taken out of into device 14, dry place 16, control part 100.Droplet ejection apparatus 10 is the devices that are used for workpiece W ejection liquid.
Chamber device 12 has chamber body 12A and conditioner 12B.Chamber body 12A contains droplet ejection apparatus 10.Conditioner 12B will carry out temperature treatment in the chamber body 12A under the uniform temperature condition, chamber body 12A is so-called hot chamber.Thus, the droplet ejection apparatus 10 in the chamber body 12A under the uniform temperature environment to carry out the mode of describing to move of drop ejection (liquid ejection) operation of workpiece W is made.
It is to be used to move into from the outside of unit 2 at workpiece W that workbench 20 is described or to take out of the device of the workpiece W after describing on the workbench 20 to the outside of unit 2 that the workpiece of Fig. 1 is taken out of device 14.Dry place 16 is to be used for the dry device that sprays the solvent of liquid according to situation to workpiece W.The liquid of droplet ejection apparatus 10 ejections can be called functional liquid.
Droplet ejection apparatus 10 can be used as the ink jet type drawing apparatus and uses.Droplet ejection apparatus 10 is to be used for forming for example device of the light-emitting component of organic El device with drop ejection method (ink-jet method).The shower nozzle of droplet ejection apparatus 10 (be also referred to as function liquid droplet ejection shower nozzle) can form the light-emitting component of organic EL.Particularly, in the manufacturing process of organic EL, come forming the substrate (example of workpiece) of cofferdam by form operation and plasma treatment operation through cofferdam, scanning relatively imports the shower nozzle of lighting function material, the droplet ejection apparatus 10 and one-tenth membranous part of formation hole injection/transport layer and luminescent layer corresponding with the position of the pixel electrode of substrate.
Prepare 2 by for example droplet ejection apparatus 10, the 1st droplet ejection apparatus 10 forms hole injection/transport layer, and adjacent other 1 droplet ejection apparatus 10 can form the luminescent layer of 3 looks of R (red), G (green), B (indigo plant).
Then, with reference to the structure example of Fig. 2 and Fig. 3 explanation droplet ejection apparatus 10 as shown in Figure 1.
Droplet ejection apparatus 10 has: drop ejection portion 30, a side and an other side's maintenance department 31,32, workbench the 20, the 1st moving part the 41, the 2nd moving part 42, a plurality of carrier 50, pallet 45.In Fig. 2 and Fig. 3, illustrate directions X, Y direction and Z direction.Directions X is the 1st direction, and the Y direction is the 2nd direction, and the Z direction is equivalent to the 3rd direction.Directions X and Y direction are on the surperficial 45A of pallet 45, and the Z direction is to directions X and the orthogonal direction of Y direction.Though the Y direction roughly becomes right angle or right angle to directions X, preferred and directions X quadrature.
Fig. 2 and workbench 20 shown in Figure 3 are the flat parts that releasably keep workpiece W.Workbench 20 has the lift-launch face 20A of workpiece W.Lift-launch face 20A has adsorption section 20B.This adsorption section 20B is connected on the suction pump 20C.When control part 100 action suction pump 20C, suction pump 20C releasably attracts workpiece W to remain on the lift-launch face 20A by adsorption section 20B.Thus, workpiece W can not move and can be releasably fixing reliably relative to the face 20A of lift-launch.
The workpiece W of Fig. 2 is for example than relatively large glass substrate.Workbench 20 can move respectively along directions X and Y direction by the 1st moving part 41 and locate.Therefore, the 1st moving part 41 has the linear motor 62 of 61,1 group of base 60, slider part and 1 group linear motor 63 in addition.
The base 60 of Fig. 2 is fixed on the surperficial 45A of pallet 45.On base 60 along directions X fixed linear motor 62,62 abreast.Slider part 61 can be by linear motor 62,62 action move and locate along directions X.
On slider part 61, fixing linear motor 63,63. Linear motor 63,63 can be located along Y direction travelling table 20.
According to above-mentioned, the workbench 20 that has carried workpiece W can move respectively and locatees along directions X and Y direction.Each linear motor 62,63 is respectively by moving from the instruction of control part 100.As shown in Figure 3, though linear motor 62,62 is configured along directions X, bottom 60 as shown in Figure 3 and linear motor 62,62 bottom by the 2nd moving part 42 is configured.
Then, the 2nd moving part 42 is described.
The 2nd moving part 42 as shown in Figures 2 and 3, is configured on the vertical direction of relative the 1st moving part 41.And the 2nd moving part 42 relative the 1st moving parts 41 leave and are configured to Z (+) direction.The 2nd moving part 42 can move each carrier 50 mutually and locatees along directions X.
The 2nd moving part 42 has linear motor 70,70 and many pillars 79 of 1 group.The linear motor 70,70 of the 2nd moving part 42 along the Y direction separate decide at interval and configuration abreast, and flatly be supported on the top of pallet 45 respectively by pillar 79.
A plurality of carriers 50 can freely move mutually and locate by this linear motor 70,70 along the Y direction.In the example of Fig. 2 and Fig. 3,7 carriers 50 can be located to separate the moving of Y direction.Aforesaid many carriers 50 that utilize are for can be to spraying drop in the large-scale workpiece W short time, and enhance productivity in the manufacturing process of the workpiece W that describes according to workpiece W.
The structure example of the linear motor 70 that Fig. 4 (A) expression is shown in Figure 2.Linear motor 70 possesses retaining element 71 and moving element 72.Retaining element 71 remains on pillar 79 sides as shown in Figure 2.To this, moving element 72 is located at respectively on each carrier 50.By coil 73 energisings to moving element 72, by magnetic and the S utmost point of magnet 71A and the interaction in the magnetic field that the N utmost point produces that coil 73 produces, moving element 72 can be located along separate the moving of Y direction (the 2nd direction).
The structure example of the linear motor 62,63 that Fig. 4 (B) expression is shown in Figure 2.Linear motor 62 possesses retaining element 89 and moving element 82.Retaining element 89 possesses magnet 81A.This retaining element 89 is fixed on base 60.Moving element 82 is arranged on slider part 61 sides.By coil 83 energising to moving element 82, by magnetic field and the N utmost point of magnet 81A and the interaction in the magnetic field that the S utmost point produces that coil 83 produces, slider part 61 can move and locatees in Fig. 2 along directions X (the 1st direction).
In addition, under the situation of the linear motor 63 shown in Fig. 4 (B), retaining element 89 be fixed on slider part 61 above.Moving element 82 is fixed on workbench 20 sides.Take this, by to coil 83 energising, workbench 20 can move and locatees along Y direction (the 2nd direction) slider part 61.
The structure of linear motor 70,62,63 shown in Figure 4 is not limited to an above-mentioned example, can certainly adopt other structures.
Then, with reference to the structure example of the carrier 50 shown in Fig. 5 key diagram 2 and Fig. 3.
Each carrier has identical structure.Each carrier 50 has fluid storage portion 80 and electrical equipment (dress) unit 81.Fluid storage portion 80 stores functional liquid that the shower nozzle of carrier 50 is supplied with.Electric appliance unit 81 drives piezoelectric element by the instruction by control part 100 to the piezoelectric element service voltage.Take this, can spray this liquid from the nozzle corresponding with piezoelectric element.
Fig. 5 represents to be positioned at for example structure chart of 4 carriers 50 of position P1 shown in Figure 2.In Fig. 2, except ejection position P1, also has maintenance position P2, P3.The structure of carrier 50 that is positioned at each position is all identical.
Here as shown in Figure 5, to being positioned at 4 each carrier 50 its structure example of explanation of position P1.Upper face side at carrier 50 carries above-mentioned fluid storage portion 80 and electric appliance unit 81.At the middle body of carrier 50, side is carried shower nozzle 120 below it.This shower nozzle 120 is also referred to as the ejection shower nozzle or the ink jet type shower nozzle of functional liquid.
Each shower nozzle 120 is provided with a plurality of nozzles, for example has nozzle sets PN, GN, BN.Each nozzle sets is made of a plurality of nozzles, but also comprises the situation of a nozzle.Nozzle sets PN is made of the nozzle of the liquid that is used for for example spraying redness (R).Nozzle sets GN is made of the nozzle of the liquid that is used for for example spraying green (G).Nozzle sets BN is made of the nozzle of the liquid that is used for for example spraying blueness (B).
Nozzle sets RN is represented by mesh in Fig. 5, and the bottom right among the nozzle sets GN represented by hatching, and upper right among the nozzle sets BN represented by hatching.
Nozzle sets RN in each shower nozzle 120, GN, the orientation of BN for roughly along the Y direction, but each nozzle sets RN in this embodiment, GN, BN is arranging along the tilted direction 125 of synthetic directions X and Y direction.Each shower nozzle 120 is located at the following side of carrier 50, promptly with the side on workpiece W opposite.Thus, shower nozzle 120 can be positioned at the top with the workpiece W on workpiece W opposite.
Then, the left and right sides maintenance department 31,32 shown in key diagram 2 and Fig. 3.
Maintenance department 31,32 is configured in the right side of the 1st moving part 41 and the left side of the 1st moving part 41.About maintenance department 31,32 disposing along Y direction devices spaced apart.Be configured in pillar 79 inboards of the 2nd moving part 42 by such maintenance department 31,32, maintenance department 31,32 does not expose in the outside of the outside of pillar 79 and pallet 45, therefore realizes the miniaturization of droplet ejection apparatus 10.
Do not use under the situation of carrier 50 in the process to workpiece W ejection drop, for obsolete carrier 50, for example maintenance department 31 or maintenance department 32 can carry out the recovery of the ejection ability of the functional liquid in each nozzle of shower nozzle 120.When the safeguarding of the nozzle that carries out shower nozzle 120 as mentioned above like that, carrier 50 preferably from drop ejection portion 30 or ejection position P1 along maintenance position P2 or maintenance position P3 to the running fix of Y direction.
The structure example of maintenance department 31,32 is described with reference to Fig. 6.
As described in Figure 3, maintenance department 31,32 possesses attraction portion 160 and wiping portion 161 respectively.Attraction portion 160 has housing 199, absorption piece 162, pump 163, waste fluid container 64 as described in Fig. 6 (A).Housing 199 is by connecting airtight the nozzle 120A of shower nozzle 120, each nozzle that can sealed-in nozzles plate 120A.Absorption piece 162 is housed in carrier 199 inside, has to absorb the function want the liquid that attracts.
Housing 199 is by for example being risen to the Z1 direction by elevating mechanism 165, nozzle plate 120A that can seal carrier device 199.Carrier 199 has peristome 166 on top.
When control part 100 action pumps 163, pump 163 makes housing 199 be in negative pressure state by pipe 167,168.Be attracted in absorption piece 162 sides and by pump 163 according to the liquid of the nozzle interior of above-mentioned shower nozzle 120 or bubble and can be recovered in waste fluid container 164 sides.Thus, realize the recovery of ejection ability of the nozzle of shower nozzle in the nozzle of shower nozzle 120 by dry state that attracts stifled eye or bubble etc.
For wiping paying at the liquid 200 of nozzle plate 120A and utilizing wiping portion 161 thereafter.Wiping portion 161 is mobile by for example 201 couples of nozzle plate 120A of scraper plate relatively being contacted, and can wiping paying the liquid 200 at nozzle plate 120A.
As above carry out, shower nozzle 120 attracts the back by the scraper plate wiping, can realize the recovery of function of the ejection ability of shower nozzle 120.
Maintenance department 31,32 also can have splash guard unit or ejection verification unit or weight measurement unit etc. in addition.
The splash guard unit is used to accept the ejection liquid that sprays in advance from shower nozzle 120.The check of ejection verification unit is from the ejection state of the liquid of shower nozzle 120 ejections.The weight measurement unit is measured from the weight of the liquid of shower nozzle 120 ejections.
The preferred implementation of droplet discharge method of the present invention then, is described with reference to Fig. 7 to Figure 10.
Fig. 7 represents to be used for workpiece W is described 3 kinds of liquid (R, G, the summary of droplet discharge method B).Fig. 7 (A) expression is moved workpiece W and describe to spray the state that is through with the 1st time to the drawing direction of X (+).Fig. 7 (B) expression is moved workpiece W and describe to spray the state that is through with the 2nd time to the drawing direction of X (-) after the direction of travel of Y (+) is divided a word with a hyphen at the end of a line.
Fig. 7 (C) expression is further moved workpiece W and describe to spray the state that is through with the 3rd time to the drawing direction of X (+) again after the direction of travel of Y (+) moves.
Finish Fig. 7 (A) the 1st describe after, together workpiece W is only moved a certain amount of D to the direction of travel of Y (+) with workbench, in Fig. 7 (B), after describing to finish for the 2nd time also with workbench together with workpiece W to the direction of travel of Y (+) a certain amount of D that only divides a word with a hyphen at the end of a line.
In Fig. 7, reduced representation shower nozzle 120 as shown in Figure 5.For example 4 carriers 50 are as Fig. 5 be positioned at as shown in Figure 2 and spray position P1 in advance.And the space of each carrier 50 by making each carrier 50 mobile a little to the Y direction, can be adjusted in advance in the mode that each shower nozzle 120 becomes suitable space.Thus, the interval between the nozzle of each shower nozzle 120 can be located along Y in advance in the right directionly, can guarantee from the ejection accuracy of each shower nozzle to workpiece W ejection.
In the embodiment of droplet discharge method of the present invention, the workbench that carries workpiece is called the workpiece mobile process to directions X (the 1st direction) and the mobile operation of Y direction (the 2nd direction).The workbench that carries workpiece is called the scanning operation to the operation of directions X scanning.The Y direction is to directions X quadrature vertically or roughly.
In addition, from being provided in the nozzle of the shower nozzle on the pre-aligned a plurality of carriers of Y direction, the operation of workpiece ejection liquid is called liquid ejection operation or ejection operation.
Fig. 8 further represents the state after the 1st time shown in Fig. 7 (A) described to finish particularly.
The nozzle sets RN of each shower nozzle 120 represents by mesh, and the bottom right among the nozzle sets GN represented by hatching, and upper right among the nozzle sets BN represented by hatching.And in order to distinguish the part of describing of the liquid that is depicted in workpiece W, represent by 200R from the part of describing of the liquid of nozzle sets PN ejection, represent by 200G from the part of describing of the liquid of nozzle sets GN ejection, represent by 200B from the part of describing of the liquid of nozzle sets BN ejection.
As described in Fig. 8 and Fig. 7 (A), for example roughly the width E2 with workpiece W is corresponding for the assortment width E1 of the total of 4 shower nozzles 120.4 shower nozzles 120 are positioned at the position corresponding with workpiece W.In Fig. 3,4 carriers 50 are pre-aligned at ejection position P1, do not move and the fixed position on the Y direction.
By the 1st moving part 41 shown in Figure 2 and slider part 61 together with workbench 20 as Fig. 7 (A) shown in like that the drawing direction to X (+) move, workpiece W is below 4 shower nozzles 120 are passed through in the position of representing with 1 dot dot dash in Fig. 7 (A).According to above-mentioned, each nozzle sets PN of each shower nozzle 120, GN, BN on the position of correspondence with 200R, 200G, 200B be depicted in respectively fixed position.The state that Fig. 8 and Fig. 7 (A) expression is described to be through with for the 1st time.
Then, in Fig. 8 and Fig. 7 (A), with workbench together with workpiece W to the direction of travel of Y (+) the D part of only dividing a word with a hyphen at the end of a line.And shown in Fig. 7 (B), by together workpiece W being moved from the position of 1 dot dot dash to the drawing direction of X (-) with workbench 20, workpiece W is below 4 shower nozzles again.Thus, on the position of a certain amount of D that only divides a word with a hyphen at the end of a line, the nozzle RN of each shower nozzle 120 ejection liquid describe part, nozzle sets GN ejection liquid describe part 200G, and nozzle sets BN ejection liquid describe part 200B.
As described in Figure 9, describe for the 2nd time to finish.
Thereafter, further workpiece W to carry out the 2nd time divide a word with a hyphen at the end of a line with workbench 20 mobile.The workpiece W of Fig. 7 (C) has divided a word with a hyphen at the end of a line to the direction of travel of Y (+) and has moved once a certain amount of D part.
, as described in Fig. 7 (C) and Figure 10, again workpiece W is moved to the drawing direction of X (+) thereafter, workpiece W from the position of 1 dot dot dash move to 4 shower nozzles 120 below.Its result carries out the 3rd time as that works as described in Fig. 7 (C) and Figure 10 and describes.According to above-mentioned, liquid 200R can be described in the whole zone of process, 200G, and 200B can form R, G, the luminescent layer of 3 kinds of colors of B.In the state of Figure 10 and Fig. 7 (C), total metering of dividing a word with a hyphen at the end of a line reaches 2D.
In the example of Fig. 2 and Fig. 3, for example 4 carriers 50 are stem for stem in ejection position P1.And do not use and be divided into 1 and 2 maintenance department 31,32 about passing through respectively at remaining 3 carriers 50 of ejection in the operation and can safeguard.
Several sizes according to workpiece W (area) of the carrier 50 in the use are not limited to 4, can certainly be more than 1 below 3 or more than 5 below 7.In addition, the carrier 50 that can certainly carry more than 7 uses.
Be located at the shower nozzle 120 in each carrier 50, as described in Figure 5, be not limited to nozzle sets RN, GN, BN can certainly be more than 2 or 4.And the direction that forms along the Y direction is also considered in the orientation of each nozzle, also considers the direction that forms along directions X.Can certainly arrange along directions X and the synthetic direction of Y direction in addition.
In embodiments of the present invention, for workbench 20 is moved to directions X and Y direction, use linear motor 62,63.For a plurality of carriers 50 can be moved to the Y direction on change ground, space, still use linear motor 70 in addition.
But also can adopt the common feed mechanism that utilizes motor and feed screw and nut to constitute to replace adopting linear motor.
In embodiments of the present invention, a plurality of carriers 50 with shower nozzle 120 can move and the location along the 2nd direction (Y) mutually by the 2nd moving part 42.
Thus, can correctly locate the mutual position of each shower nozzle of a plurality of carriers in advance.And carry at workbench 20 under the state of workpiece W, when the 1st direction (X) and the 2nd direction (Y) were mobile, the shower nozzle of a plurality of carriers sprayed liquid by the nozzle from shower nozzle to workpiece, can spray liquid to workpiece and describe.Because the shower nozzle of a plurality of carriers can spray liquid to workpiece, therefore can select the number of carrier according to the size of workpiece, even describe the big large-scale workpiece of area, also can carry out drop ejection operation to workpiece with high production efficiency.
In addition, in the present embodiment,, therefore when workpiece is described, also carrier can be moved and replaces workbench 20 is moved to the 2nd direction (Y) to the 2nd direction (Y) because a plurality of carriers also can move to the 2nd direction (Y).In this case, be a plurality of as the carrier number that moves, then the location when mobile needs the time, even only travelling table 20 also needs the time.Therefore, by the carrier number that uses, also can select whether arbitrary workbench 20 and carrier to be moved to the 2nd direction.
In addition, under the situation of mobile carrier, vibrations by being applied to the liquid that exists on the stream that comprises in the shower nozzle, the fluid storage portion equivalent-load device or pressure oscillation etc. or be applied to carrier vibrations on the whole etc. can be produced when ejection sometimes by the crooked bullet of flight the fall deviation of position or the bad reflections such as change of spray volume.To this, in that workbench 20 is moved and under the situation about describing, do not have aforesaid bad reflection to the 1st direction (X) and the 2nd direction (Y), when describing the position, change moves under the situation of carrier, also can carry out high stable the describing of accuracy, so preferred.
In embodiments of the present invention, for example a plurality of nozzles of shower nozzle also can spray various different types of liquid, and certain a plurality of nozzles also can spray the liquid of identical type, thus, can further carry out describing workpiece apace.In addition, also can change the kind of the liquid that is ejected in each shower nozzle, to this, owing to carry out the management of liquid with shower nozzle unit, the management of the maintenance of the therefore easier supply of carrying out relevant liquid or shower nozzle.
In embodiments of the present invention, the shower nozzle 120 of carrier 50 just can carry out the ejection ability of nozzle by maintenance department as long as move to the 2nd direction (Y) by the 2nd moving part 42.
In embodiments of the present invention, workpiece is divided a word with a hyphen at the end of a line along the 2nd direction (Y), can describe along the 1st direction (X) simultaneously.
In the example of Fig. 2 and Fig. 3, maintenance department 31,32 is configured in the both sides of ejection position P1.But be not limited thereto, maintenance department also can be located at least one side along the Y direction.For example maintenance department also can be located at the left side of ejection position P1 or the either party on right side.
The embodiment of droplet ejection apparatus of the present invention can use in the process of making electro-optical device (device).Consider liquid crystal indicator, organic EL (Electro-Luminescence) device, electron emitting device, PDP (Plasma DisplayPanel) device and electrophoretic display apparatus etc. as this electro-optical device (device).In addition, electron emitting device is the notion that comprises so-called FED (Field Emission Display) device.And, consider the various devices that comprise metal wiring formation, lens formation, resist formation and light diffusion body formation etc. as electro-optical device.
Figure 11 represents droplet ejection apparatus of the present invention is used as drawing apparatus, and the structure example of the organic El device of use when the manufacturing of a kind of organic El device of flat-panel monitor.Organic El device 701, with the distribution of flexible substrate (diagram omit) and drive IC (diagram is omitted) be connected by substrate 711, component portion 721, pixel electrode 731, cofferdam 741, light-emitting component 751, negative electrode 761 (counter electrode), and the organic EL 702 that constitutes with substrate 771 of sealing on.
The manufacture process of organic EL 702 possesses: cofferdam forms operation, and it forms cofferdam 741; The plasma treatment operation, it is used for suitably forming light-emitting component 751; Light-emitting component forms operation, and it forms light-emitting component 751; Counter electrode forms operation, and it forms negative electrode 761; Sealing process, it will seal with substrate 771 and be layered on the negative electrode 761 and seal.
Promptly, organic EL 702, after forming cofferdam 741 on institute's allocation of the substrate 711 that is pre-formed component portion 721 and pixel electrode 731 (workpiece W), carry out the formation of plasma treatment, light-emitting component 751 and negative electrode 761 (counter electrode) successively, further be layered on the negative electrode 761 sealing with substrate 771 and make by sealing.In addition, organic EL 702 is deterioration easily owing to be subjected to influence such as airborne moisture, and therefore, preferred: the manufacturing of organic EL 702 is by carrying out in dry air pump or inert gas (nitrogen, argon gas, the helium etc.) atmosphere.
In addition, each light-emitting component 751 constitutes with the one-tenth membranous part that the luminescent layer 752 by painted arbitrary look at hole injection/transport layer 752 and R (red) G (green) B (basket) forms, and forms in the operation at light-emitting component comprising: the hole injection/transport layer formation operation that forms hole injections/transport layer 752; Form operation with the luminescent layer of the luminescent layer 753 that forms 3 kinds of colors.
Then, droplet ejection apparatus 10 for the embodiments of the present invention under the situation of the manufacturing that is applicable to liquid crystal indicator is described.
Figure 12 represents the cross-section structure of liquid crystal indicator 801.Liquid crystal indicator 801 by colour filter 802, subtend substrate 803, be filled in that liquid-crystal composition 804 between colour filter 802 and the subtend substrate 803 and (diagram omit) backlight constitute.At the medial surface of subtend substrate 803, pixel electrode 805 and TFT (thin film transistor (TFT)) element (diagram is omitted) forms rectangular.With the position of pixel electrode 805 subtends on, be arranged in the dyed layer 813 of red, green, the basket of colour filter 802.On each medial surface of colour filter 802 and subtend substrate 803, be formed with the alignment films 806 that liquid crystal molecule is arranged with certain orientation, bonding Polarizer 807 on each lateral surface of colour filter 802 and subtend substrate 803.
Colour filter 802 possess light transmission transparency carrier 811, on the transparency carrier 811 with a plurality of pixels (filter element) 812 of rectangular arrangement, be formed on the dyed layer 813 on the pixel 812 and separate the partition 814 of the light-proofness of each pixel 812.Dyed layer 813 and be formed with covering (overcoat) layer 815 and electrode layer 816 above the partition 814.
As illustrate and the manufacture method of liquid crystal indicator 801 then at first, after making partition 814 on the transparency carrier 811, on pixel 812 parts, form the dyed layer 813 of R (red)/G (green)/B (basket).And spin coating transparent third rare cold coating forms cover layer 815, and, form the electrode layer 816 that constitutes by ITO (Indium Tin Oxide), make colour filter 802.
In subtend substrate 803, make pixel electrode 805 and TFT element.Then, after carrying out the coating of alignment films 806 on the subtend substrate 803 that is formed with the colour filter 802 made and pixel electrode 805, paste these.And, behind filling liquid crystal composition 804 between colour filter 802 and the subtend substrate 803, layered polarization plate 807 and backlight.
The embodiment of droplet ejection apparatus of the present invention can be used for the formation of the filter element (R (red)/G (green)/B (basket) dyed layer 813) of above-mentioned colour filter.In addition, by using the fluent material corresponding, also can be used for the formation of pixel electrode 805 with pixel electrode 805.
In addition, as other electro-optical device, except metal wiring formation, lens formation, resist formation and light diffusion body formation etc., also to consider to comprise the device that microscope forms with sample.By above-mentioned droplet ejection apparatus is used in the manufacturing of various electro-optical devices (device), can make various electro-optical devices effectively.
Electronic instrument of the present invention is equipped with above-mentioned electro-optical device.In this case, as electronic instrument, the mobile phone of so-called lift-launch flat-panel monitor, microcomputer and other various electric products are equivalent to this.
Figure 13 represents the shape example of the mobile phone 1000 of one of electronic instrument example.Mobile phone 1000 has main part 1001 and display part 1002.Display part 1002 uses for example organic El device 701 or the liquid crystal indicator 801 of aforesaid electro-optical device.
Figure 14 represents the microcomputer 1100 of other examples of electronic instrument.Microcomputer 1100 has main part 1101 and display part 1102.Display part 1102 can use the organic El device 701 or the liquid crystal indicator 801 of one of aforesaid electro-optical device example.
The embodiment of drop device of the present invention also can use in black and white or colored printing (lettering).In this case, fluid storage portion is an ink tube, and this ink tube stores a kind or a plurality of ink (for example black, yellow, redness, dark green, shallow dark green, light red etc.) respectively.Ink is an example of liquid.
The present invention is not limited to above-mentioned embodiment, does not break away from the scope of aim of the present invention to carry out various changes.And the respective embodiments described above also can make up mutually and constitute.
Claims (11)
1, a kind of droplet ejection apparatus, its nozzle from shower nozzle sprays liquid to workpiece, it is characterized in that possessing:
Workbench, it is used to carry above-mentioned workpiece;
The 1st moving part, it can move above-mentioned workbench to the 1st direction with the 2nd direction of the about quadrature of above-mentioned the 1st direction;
A plurality of carriers, it has above-mentioned shower nozzle; With
The 2nd moving part, it can move each above-mentioned carrier mutually and locate along above-mentioned the 2nd direction.
2, droplet ejection apparatus according to claim 1 is characterized in that,
Above-mentioned shower nozzle has a plurality of said nozzles, and a plurality of said nozzles are being arranged along above-mentioned the 2nd direction.
3, according to the droplet ejection apparatus described in claim 1 and the claim 2, it is characterized in that,
Above-mentioned the 2nd moving part has: retaining element, and it keeps each above-mentioned carrier; And moving element, it is located on each above-mentioned carrier and above-mentioned carrier is moved and the location along above-mentioned the 2nd direction mutually to the said fixing element.
4, droplet ejection apparatus according to claim 1 is characterized in that,
Be used to recover the maintenance department of ejection ability of the said nozzle of above-mentioned shower nozzle, be configured at least one side's the position of above-mentioned the 2nd direction.
5, a kind of droplet discharge method is that liquid is ejected into the method for workpiece from the nozzle of shower nozzle, it is characterized in that having:
The workpiece mobile process, its will carry above-mentioned workpiece movable workbench to the 1 direction and with above-mentioned the 1st direction roughly on the 2nd direction of quadrature; With
Liquid ejection operation, it is from being configured in the said nozzle of the above-mentioned shower nozzle on the mobile and pre-aligned mutually a plurality of carriers of above-mentioned the 2nd direction, to above-mentioned workpiece ejection aforesaid liquid.
6, droplet discharge method according to claim 5 is characterized in that,
Above-mentioned the 1st direction is above-mentioned workbench to be moved above-mentioned shower nozzle and liquid drawing direction that above-mentioned workpiece is described thus, and above-mentioned the 2nd direction is to move a certain amount of to above-mentioned shower nozzle above-mentioned workbench and carry out the direction of travel of dividing a word with a hyphen at the end of a line of the ejection position of the aforesaid liquid in the above-mentioned workpiece.
7, according to claim 5 or the described droplet discharge method of claim 6, it is characterized in that,
Obsolete above-mentioned carrier in the ejection of above-mentioned drop moves to maintenance department along above-mentioned the 2nd direction, and carries out the ejection ability recovery of the said nozzle of above-mentioned shower nozzle in above-mentioned maintenance department.
8, a kind of droplet discharge method, its nozzle from shower nozzle sprays liquid to workpiece, it is characterized in that having:
The scanning operation, its workbench that will carry above-mentioned workpiece is to the 1st scanning direction;
The ejection operation, its from be provided in along with above-mentioned the 1st direction roughly the 2nd direction of quadrature move and the said nozzle of above-mentioned shower nozzle on pre-aligned a plurality of carriers, to above-mentioned workpiece ejection aforesaid liquid.
When deciding the above-mentioned scanning operation of number of times whenever carrying out, above-mentioned workbench is moved institute quantitatively to above-mentioned the 2nd direction.
9, a kind of manufacture method of electro-optical device is to spray the manufacture method that liquid is made electro-optical device by the nozzle from shower nozzle to workpiece, it is characterized in that,
At the above-mentioned workbench that will carry above-mentioned workpiece to the 1st moving part and the 1st direction and above-mentioned the 1st direction when roughly the 2nd direction of quadrature moves, along the above-mentioned shower nozzle of the mobile and pre-aligned mutually a plurality of carriers of above-mentioned the 2nd direction, above-mentioned workpiece ejection aforesaid liquid is made above-mentioned electro-optical device by said nozzle from above-mentioned shower nozzle.
10, a kind of electro-optical device, it is made to workpiece ejection liquid by the nozzle from shower nozzle, it is characterized in that,
At the above-mentioned workbench that will carry above-mentioned workpiece to the 1st moving part and the 1st direction and above-mentioned the 1st direction when roughly the 2nd direction of quadrature moves, above-mentioned shower nozzle along the mobile and pre-aligned mutually a plurality of carriers of above-mentioned the 2nd direction, by said nozzle, above-mentioned workpiece ejection aforesaid liquid is made above-mentioned electro-optical device from above-mentioned shower nozzle.
11, a kind of electronic instrument is characterized in that,
It has carried the above-mentioned electro-optical device described in the claim 10.
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| JP2004354995 | 2004-12-08 | ||
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101770119B (en) * | 2008-12-29 | 2012-01-25 | Ap系统股份有限公司 | Device and method for dropping liquid crystal |
| CN101722724B (en) * | 2008-10-16 | 2014-08-20 | 精工爱普生株式会社 | Method for discharging liquid body, method for manufacturing color filter, and method for manufacturing organic el device |
| CN101835620B (en) * | 2007-10-23 | 2015-05-20 | 惠普开发有限公司 | Fluid ejection device |
| CN108215523A (en) * | 2018-01-17 | 2018-06-29 | 京东方科技集团股份有限公司 | Mark bogey and marking machine |
| CN113874126A (en) * | 2019-05-31 | 2021-12-31 | 迪技尚谱株式会社 | Droplet deposition apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3005136B2 (en) * | 1992-04-27 | 2000-01-31 | キヤノン株式会社 | Printing apparatus and printing method |
| JP2000111677A (en) * | 1998-10-07 | 2000-04-21 | Canon Inc | Positioning stage device, color filter manufacturing device and liquid crystal aligner |
| JP2004089868A (en) * | 2002-08-30 | 2004-03-25 | Seiko Epson Corp | Drawing method and drawing apparatus, method for forming metal wiring, metal wiring forming apparatus, electro-optic apparatus, its manufacturing method and electronic appliance |
| JP4337348B2 (en) * | 2003-01-15 | 2009-09-30 | セイコーエプソン株式会社 | Drawing accuracy inspection device for droplet discharge device, droplet discharge device and work, and method for manufacturing electro-optical device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101835620B (en) * | 2007-10-23 | 2015-05-20 | 惠普开发有限公司 | Fluid ejection device |
| CN101722724B (en) * | 2008-10-16 | 2014-08-20 | 精工爱普生株式会社 | Method for discharging liquid body, method for manufacturing color filter, and method for manufacturing organic el device |
| CN101770119B (en) * | 2008-12-29 | 2012-01-25 | Ap系统股份有限公司 | Device and method for dropping liquid crystal |
| CN108215523A (en) * | 2018-01-17 | 2018-06-29 | 京东方科技集团股份有限公司 | Mark bogey and marking machine |
| CN113874126A (en) * | 2019-05-31 | 2021-12-31 | 迪技尚谱株式会社 | Droplet deposition apparatus |
| US11478812B2 (en) | 2019-05-31 | 2022-10-25 | DGSHAPE Corporation | Droplet deposition apparatus |
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| CN100443301C (en) | 2008-12-17 |
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Denomination of invention: Droplet ejection device and ejection method, electro-optical device and manufacturing method thereof Effective date of registration: 20230625 Granted publication date: 20081217 Pledgee: Xinji Co.,Ltd. Pledgor: Kedihua display technology (Shaoxing) Co.,Ltd. Registration number: Y2023990000312 |