CN1251911A - Laser telescope for laser diode array - Google Patents

Laser telescope for laser diode array Download PDF

Info

Publication number
CN1251911A
CN1251911A CN 99116934 CN99116934A CN1251911A CN 1251911 A CN1251911 A CN 1251911A CN 99116934 CN99116934 CN 99116934 CN 99116934 A CN99116934 A CN 99116934A CN 1251911 A CN1251911 A CN 1251911A
Authority
CN
China
Prior art keywords
lens
laser diode
optics
array
diode array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 99116934
Other languages
Chinese (zh)
Other versions
CN1109911C (en
Inventor
胡衍芝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN 99116934 priority Critical patent/CN1109911C/en
Publication of CN1251911A publication Critical patent/CN1251911A/en
Application granted granted Critical
Publication of CN1109911C publication Critical patent/CN1109911C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

A laser telescope especially suitable for laser diode array is sequentially composed of laser diode array on the head of lens barrel put on regulator, collimating optical element consisting of collimating optical modules containing linear array of micro-cylindrical lenses, front beam-diffusing optical element, shaping optical element and back optical element diffusing beam. Its advantages are high coupling efficiency greater than or equal to 85% and low beam diffusion (0.5 mrad X 1.3 mrad).

Description

The laserscope that is used for laser diode array
The present invention is a kind of laserscope, and particularly a kind of being applicable to (20 watts) laser diodes (linearity) arrays (being designated hereinafter simply as LDBAR) are as the laserscope of light source.
A typical LDBAR, its near field light-emitting area W * H are 1cm * 1 μ m, the corresponding slow-axis direction width 1cm of difference, the angle of divergence θ on the parallel beam direction ~10 ° and quick shaft direction height 1 μ m, 40 ° of beam divergence angles (FWHM).Comprising 25 width in this LDBAR1cm width is 100 μ m, and pitch is the discontinuous luminous sub-array unit of 400 μ m.Common image optical element can not be collimated into the LBDAR emitted light beams parallel beam of symmetry or focus on.For efficient Coupling LD BAR emitted laser power, what at first will solve is efficiently to collimate this difficult problem.For this reason, international optics circle of the nineties has proposed multiple collimation scheme: 1. with the angular-spread beam of array unit in cylindrical microlenses or the little excellent collimated slow axis plane, angular-spread beam (prior art [1] OPTICS LETTERS Vol.16 with array unit in the fast axial plane of big cylinder collimated, No.51991 P318-P320), but the collimation efficient only be 80-84%; 2. with the angular-spread beam in the big cylindrical mirror collimation slow axis plane, use the angular-spread beam in the fast axial plane of big cylinder collimated again, though collimation efficient is up to 89% (prior art [2] OPTICS LETTERS Vol.17, No.14,1992.P1000-P1002), but, only be applicable to the optical system that the pumping source requirement focuses on because beam divergence angle is too big; 3. with the angular-spread beam in the cylindrical microlenses array collimation slow axis plane, use angular-spread beam in the fast axial plane of big cylinder collimated again, obtain nearly elongated rectangular shape collimated beam, collimation efficient reaches 90% (prior art [3] OPTICS LETTERS Vol.20, No.2,1995, P154), but fast axial plane inner light beam divergence is also bigger than normal, is not suitable for using in the telescope, and not so telescopical volume will be very huge.
Purpose of the present invention is the deficiency that overcomes in the above-mentioned prior art, and the laserscope of a kind of LDBAR of being used for is provided, and it can be the angle of divergence of launching on the mu m luminous source, the 1cm of near infrared CW20 watt LDBAR * 1 on the vertical direction θ ~40 ° (FWHM), the angle of divergence on the parallel direction is θ The height of~10 ° (FWHM) is dispersed asymmetric laser beam through after the laserscope of the present invention, and obtaining beam divergence only is the nearly symmetrical parallel light beam of 0.5mrad * 1.3mrad, and a whole set of telescopical transmitance reaches T 〉=85%.Can eliminate the artificial optical loss that blocks substantially.
Laserscope of the present invention is structure as shown in Figure 1.Contain: place the lens barrel 17 interior ends storings on the adjustment rack 15 to have (semiconductor) laser diode array head (to be provided with semiconductor microactuator refrigerator, temperature sensing thermistor in the array head, and heating radiator air cooling) the headstock 1, being placed successively with optical axis ground in lens barrel 17 by the headstock 1 has a collimation optics 12 in the lens barrel 17, preceding expanded beam optics element 13, shaping optical element 14 and back expanded beam optics element 16.
Said collimation optics 12 is to be made of the collimating optics module that contains microtrabeculae face lens array 3.Except that containing microtrabeculae face lens array 3, also contain microtrabeculae face lens 2 in the collimating optics module, perhaps also contain the big lens of aspheric surface cylinder.Specifically, the collimating optics module of formation collimation optics 12 is to contain microtrabeculae face lens array 3 and place before the microtrabeculae face lens array 3 and microtrabeculae face lens 2 (see figure 2)s between the laser diode array headstock 1; Or contain microtrabeculae face lens array 3 and place after the microtrabeculae face lens array 3 and preceding expanded beam optics element 13 expands bundle and pays big lens of aspheric surface cylinder between the lens 4.Above-mentioned all the gummed in twos forms.
Said preceding expanded beam optics element 13 contains to expand to restraint pays lens 4 and expansion bundle main lens 5.
Said shaping optical element 14 is made of first cylindrical lens 6 and second cylindrical lens 7, or by anamorphic prism to constituting.
Said back expanded beam optics element 16 contains first and expands bundle and pay lens 8 and second and expand bundle and pay lens 9, the first and expand bundle main lenss 10 and second and expand bundle main lens 11.
Said lens barrel 17 places on the adjustment rack 15, and about adjustment rack 15 has, the minute adjustment of all around and pitching, so lens barrel 17 can be done the adjusting of multidimensional.
As shown in Figure 1, behind collimation optics 12 collimations that the collimating optics module constitutes, send out a nearly parallel rectangular rectangular light beam by LDBAR emitted laser bundle.The beam divergence that is parallel to LDBAR linear array direction is P ~40mrad is the long limit corresponding to light beam; Beam divergence perpendicular to LDBAR linear array direction is P ~3mrad is the minor face corresponding to light beam.The laser power transmitance of collimation optics 12 is η Max~95%.Improve the beam directionality behind 2 times of expansion bundles of preceding expanded beam optics element 13, beam divergence becomes P ~20mrad and P ~1.5mrad.Send out nearly square beam of light after 5 times of shapings of shaping optical element 14, beam divergence is P ~4mrad and P ~1.5mrad.Through expanded beam optics element 16 3 times expand bundle again, further improve directivity, and sending out divergence at last is P ~1.3mrad and P The near square parallel beam of~0.5mrad.2km beam size at a distance is 2.6 meters * 1 meter.
In order to improve telescopical transmitance, the light transmitting surface of the lens of all optical elements 12,13,14,16 of (1) composition light path all is coated with the antireflective coating to laser beam transmitance T>99.5 of laser diode (LD); (2) the reception clear aperature of back level optical element is slightly larger than the transmission clear aperature of previous stage optical element, and the front and back inter-stage get close to as far as possible avoid each element the people for blocking optical loss.
In order to improve the collimation effect of collimation optics 12, when the collimating optics module contained microtrabeculae face lens 2, microtrabeculae face lens 2 adopted very big digital aperture (N A=0.85) and the diffraction of very short focal length (f=0.91mm) limit, microtrabeculae face lens array 3 the parameter of getting must with the structural parameters strict conformance of LDBAR1, the number N as the microtrabeculae face lens of array unit that is comprised in the microtrabeculae face lens array 3 is equal to or greater than in the laser diode array comprise as the number M of the laser diode of array unit, i.e. N 〉=M.And both array units are that the arrangement of microtrabeculae face lens and laser diode is one to one, and orientation and layout structure are identical.And in order to obtain the optimum coupling characteristic, the open joint thickness d of microtrabeculae face lens 2 and microtrabeculae face lens array 3 is best d=50 μ m.Optimum coupling distance L between the receiving plane of the collimating optics module of formation collimation optics 12 and the light-emitting area of LDBAR is L=88 ± 5 μ m (at this moment coupling efficiency is the highest), and the most important thing is, microtrabeculae face lens array and LDBAR high precision alignment, it has determined whether the optical axis of collimation output beam is in full accord with telescopical optical axis, also just determined the efficient of the coupling output laser power of telescope complete machine, also determining the divergence of collimated beam, the collimation error of property array side direction 1 μ m along the line will cause collimated beam to strengthen the divergence of 1mrad.Thus, position deviation axially visible and laterally micron (μ m) magnitude all can cause the depth of parallelism of laser output power and light beam to reduce, and divergence increases.For solving this high-leveled and difficult technical matters, the present invention's design has fine tuning structure in the collimation optics 12.
When containing the big lens of aspheric surface cylinder in the collimating optics module of formation collimation optics 12 of the present invention, wherein microtrabeculae face lens array 3 is finished the collimation to the slow-axis direction of LDBAR separately, big lens of aspheric surface cylinder of its heel are made the collimation of quick shaft direction, other expands bundle, shaping optics is constant, finally be still realize catalogue of the present invention the possible technique structure.
Total losses≤6% of preceding expanded beam optics element 13, shaping optical element 14, back expanded beam optics element 16, the transmitance T=95% of the telescopical laser power of the present invention * 92%=87% like this.
Advantage of the present invention.
Collimation optics 12 of the present invention is the collimating optics modules that contain microtrabeculae face lens array 3, has guaranteed the high coupling efficiency and the low beam spreading of collimated light beam.This collimating structure is than other collimating structure, and laser-transmitting efficient is brought up to T=95%, thereby makes the coupling efficiency of complete machine also can reach T 〉=85%.For the LDBAR laserscope, the beam divergence that sends out only is 0.5mrad * 1.3mrad, and this is also than prior art advanced person.The laser diode array of particularly suitable of the present invention more than 20 watts.Basically eliminated the artificial optical loss that blocks.
The present invention can also be applied to the field of laserscope field operations and airborne Military Application easily.
Description of drawings:
Fig. 1 is the light path synoptic diagram that is parallel to LDBAR laser emitting surface direction.Fig. 2 is the synoptic diagram of the collimating optics module of microtrabeculae face lens 2 and microtrabeculae lens array 3 formations.
Embodiment:
For light-emitting area is 1cm * 1 μ m, and the angle of divergence is θ ~40 ° (FWHM), θ ~10 ° (FWHM), 1cm length includes the array unit laser diode that M=25 width is 100 μ m, the pitch between the two array units is 400 μ m, the embodiment of the typical CW20W LDBAR of emission wavelength lambda=806nm: as the long 12mm of collimating optics module of collimation optics 12, wide 2mm, high 3.26mm, the microtrabeculae face lens that contain the N=25 of array unit, every corresponding with it microtrabeculae face lens of laser diode as shown in Figure 2.Light hole is 10.8mm * 2mm, collimating optics module and LDBAR coupling distance L=85 μ m.Expand bundle pair lens 4 and restraint the parameter such as the following table of each element in the light path of main lens 11 to expansion:
??R??????d??????n?????φ Light???φ Outward?????f c
2 * expanded beam optics 13 Expand Shu Fujing 4 ??-70????2??????ZF 2???12??????15???????f 1′=-45.39 ?52.72 ?????????42.75 ?400 ?-70?????4.2????ZF 2???24??????28???????f 2′=90.82
Expand Shu Fujing 5
5 * shaping optics 14 Mirror 6 is paid in shaping ?∞??????2??????ZF 6??25×44??30×50????f Pay′=-46.24 ?34.06 ?????????181.9 ?∞ ?-???????6??????ZF 6??56×46???60×50???f Just′= 170.61??????????????????????????????????231.60
Mirror 7 is paid in shaping
3 * expanded beam optics 16 Expand Shu Fujing 8 -240.8??4.5?????ZF 6???φ72????φ76 ?∞ ????????????????4???????????????????????????????f Pay′=- -182.1??????????????????????????????????162.88 -731.1??4.5?????ZF 6???φ72????φ76 ????????137.8 -530 -240????15??????ZF 6???φ144???φ150 ????????2 -1500???????????????????????????????????f Main′=325.63 -384.5??15??????ZF 6???φ144???φ150
Expand Shu Fujing 9
Expand bundle primary mirror 10
Expand bundle primary mirror 11
This embodiment, the last nearly parallel beam angle of divergence that sends of telescope only is 0.75mrad * 1.5mrad, laser power complete machine coupling efficiency T 〉=85%.This result, more much better than prior art.

Claims (6)

1. laserscope that is used for laser diode array, contain: place the interior end of lens barrel (17) on the adjustment rack (15) to put laser diode array head frame (1), being placed successively with optical axis ground in lens barrel (17) by the headstock (1) has collimation optics (12), shaping optical element (14) and back expanded beam optics element (16) in the lens barrel (17); It is characterized in that: said collimation optics (12) is to be made of the collimating optics module that contains microtrabeculae face lens array (3); In lens barrel (17), expanded beam optics element (13) before between collimation optics (12) and shaping optical element (14), having.
2. the laserscope that is used for laser diode array according to claim 1, it is characterized in that in the collimating optics module of said formation collimation optics (12) except that containing microtrabeculae face lens array (3), also contain microtrabeculae face lens (2), perhaps also contain the big lens of aspheric surface cylinder.
3. the laserscope that is used for laser diode array according to claim 1 is characterized in that said preceding expanded beam optics element (13) contains expansion bundle pair lens (4) and main lens (5) is restrainted in expansion.
4. the laserscope that is used for laser diode array according to claim 1, it is characterized in that said back expanded beam optics element (16) contains the first expansion bundle and pays the lens (8) and the second expansion bundle pair lens (9), first expands the bundle main lens and the second expansion bundle main lens.
5. the laserscope that is used for laser diode array according to claim 1 and 2 is characterized in that the optimum coupling distance L between the light-emitting area of the receiving plane of collimating optics module of said formation collimation optics (12) and laser diode array is L=88 ± 5 μ m.
6. the laserscope that is used for laser diode array according to claim 1 and 2, it is characterized in that contain in the microtrabeculae face lens array in the collimating optics module of said formation collimation optics (12) is equal to or greater than in the laser diode array number M as the laser diode of array unit, i.e. N 〉=M as the number N of the microtrabeculae face lens of array unit; And the arrangement of the unit of the array in two arrays-microtrabeculae face lens and laser diode is corresponding one by one, and orientation and layout structure are identical.
CN 99116934 1999-09-30 1999-09-30 Laser telescope for laser diode array Expired - Fee Related CN1109911C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 99116934 CN1109911C (en) 1999-09-30 1999-09-30 Laser telescope for laser diode array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 99116934 CN1109911C (en) 1999-09-30 1999-09-30 Laser telescope for laser diode array

Publications (2)

Publication Number Publication Date
CN1251911A true CN1251911A (en) 2000-05-03
CN1109911C CN1109911C (en) 2003-05-28

Family

ID=5279598

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 99116934 Expired - Fee Related CN1109911C (en) 1999-09-30 1999-09-30 Laser telescope for laser diode array

Country Status (1)

Country Link
CN (1) CN1109911C (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100356637C (en) * 2006-01-17 2007-12-19 北京礴德恒激光科技有限公司 Changing and shaping method for plate strip wave guide laser output laser beam
CN100384032C (en) * 2000-11-30 2008-04-23 中国科学院上海光学精密机械研究所 Laser device containing collimation module and linear array of laser diodes
CN100417931C (en) * 2005-04-06 2008-09-10 博奥生物有限公司 Microarray chip detection system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100384032C (en) * 2000-11-30 2008-04-23 中国科学院上海光学精密机械研究所 Laser device containing collimation module and linear array of laser diodes
CN100417931C (en) * 2005-04-06 2008-09-10 博奥生物有限公司 Microarray chip detection system
CN100356637C (en) * 2006-01-17 2007-12-19 北京礴德恒激光科技有限公司 Changing and shaping method for plate strip wave guide laser output laser beam

Also Published As

Publication number Publication date
CN1109911C (en) 2003-05-28

Similar Documents

Publication Publication Date Title
US6778732B1 (en) Generation of high-power, high brightness optical beams by optical cutting and beam-shaping of diode lasers
US5436990A (en) Apparatus for coupling a multiple emitter laser diode to a multimode optical fiber
US5185758A (en) Multiple-laser pump optical system
US6044096A (en) Packaged laser diode array system and method with reduced asymmetry
US6377599B1 (en) Focusability enhancing optic for a laser diode
EP0774129B1 (en) Apparatus for coupling a multiple emitter laser diode to a multimode optical fiber
US7653115B2 (en) Semiconductor laser device and solid-state laser device using the same
US7010194B2 (en) Method and apparatus for coupling radiation from a stack of diode-laser bars into a single-core optical fiber
US5081637A (en) Multiple-laser pump optical system
US5168401A (en) Brightness conserving optical system for modifying beam symmetry
CN102089943A (en) High brightness diode output methods and devices
US20070019912A1 (en) Illuminateur laser
US20160131334A1 (en) Laser-pumped high-radiance incoherent light source
CN109193342B (en) A kind of semiconductor laser
CN101404385A (en) Semiconductor array laser light beam reshaping structure
CN108241193A (en) A kind of more single tube coupled laser devices of high power semi-conductor
CN1109911C (en) Laser telescope for laser diode array
CN203012245U (en) Beam coupling and focusing device for laser diode array
CN201199269Y (en) Even light lens and system thereof
CN112531462A (en) Bragg grating external cavity semiconductor laser module beam combining device
US6462891B1 (en) Shaping optic for diode light sheets
CN112310800A (en) Compact optical fiber coupling output semiconductor laser
CN101303453A (en) Method for inclined square prism stack to implement strip array semiconductor laser device beam shaping
CN205539734U (en) Device of joining long -pending adjustment is restrainted to high power semiconductor lasers ware linear array
CN111880312B (en) Optical device, beam shaping method and application module

Legal Events

Date Code Title Description
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee