CN1243362C - Method for producing AC plasma display panel - Google Patents
Method for producing AC plasma display panel Download PDFInfo
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- CN1243362C CN1243362C CN 03100333 CN03100333A CN1243362C CN 1243362 C CN1243362 C CN 1243362C CN 03100333 CN03100333 CN 03100333 CN 03100333 A CN03100333 A CN 03100333A CN 1243362 C CN1243362 C CN 1243362C
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Abstract
The present invention relates to a corresponding manufacturing method based on a metal grid mesh plate type plasma display panel structure. An independent metal grid mesh plate replaces a baffle wall and is independently processed, phosphor powder is manufactured on the metal grid mesh plate, and finally, a front base plate, the grid mesh plate and a back base plate are assembled and sealed in a sandwich way to manufacture a whole screen. The manufacturing risk is dispersed, the production efficiency is improved, and thereby, the manufacturing cost is effectively reduced.
Description
(1) technical field
The invention belongs to a kind of ac plasma Display Technique, relate in particular to the manufacture method of metal grid mesh diploe wall type plasma display panel of alternating current.
(2) background technology
Figure 1 shows that three conventional electrode AC creeping discharge type plasma display panel structural representations, this structure mainly comprises prebasal plate 1 and metacoxal plate 2.Prebasal plate 1 comprises to be waited to install to the preceding substrate glass substrate 3 on the metacoxal plate and alternately form transparent scan electrode 4x and public electrode 4y on the lower surface of preceding substrate glass substrate 3; bus electrode 5 on scan electrode 4x and public electrode 4y; and the dielectric layer 6 that on the lower surface of the preceding substrate glass substrate 3 that is provided with scan electrode 4x and public electrode 4y and bus electrode 5, forms, the protective layer of making on the dielectric layer surface 7.Metacoxal plate 2 comprises back substrate glass substrate 8, that on back substrate glass substrate 8, form and addressing electrodes 9 scanning and public electrode 4 spatial vertical, be provided with the dielectric layer 10 that forms on the back substrate glass substrate of addressing electrode 9, being used to of forming on dielectric layer 10 keeps discharge space and prevents the barrier 11 that cross (talk) is made by dielectric material between the pixel, red 12r, green 12g, the blue 12b three fluorescence bisque made at barrier 11 inwalls and dielectric layer 11 upper surfaces.Charge into predetermined discharge working gas in the discharge space between metacoxal plate 2 and prebasal plate 1, for example various inert gas.The conventional manufacturing process of three electrode AC creeping discharge type structure plasma display panels shown in Figure 1 is as follows:
At first, the manufacturing process of prebasal plate 1 comprises following three steps:
1, on front glass substrate 3, makes transparent scan electrode 4x and public electrode 4y with the method for thin film photolithography or the method for thick film pad pasting or the photoetching of silk-screen photosensitive material, in order to improve electrode conductivuty, the method with silk-screen or photoetching on transparency electrode is made the superior bus electrode 5 of electric conductivity;
2, make formation dielectric material film on above-mentioned scan electrode 4x, public electrode 4y, bus electrode 5 and front glass substrate 3 surfaces with silk screen printing or other thick-film techniques, be low melting point glass material, through forming dielectric layer 6 behind the high temperature sintering;
3, steam method, plasma sputtering method, sol-gel process on dielectric layer 6 surfaces with electron beam or chemical gaseous phase depositing process is made protective layer 7, for MgO or comprise the composite material of MgO;
The manufacturing process of metacoxal plate comprises following four steps:
4, on the glass substrate 8 of back, make addressing electrode 9 with the method for thin film photolithography or the method for thick film photosensitive material photoetching pad pasting or silk-screen;
5, make formation dielectric material film at above-mentioned addressing electrode 9 and glass substrate 8 surfaces, back with silk screen printing or other thick-film techniques, be low melting point glass material, through forming dielectric layer 10 behind the high temperature sintering;
6, on dielectric layer 10 by thick film screen printing, sandblast, photoetching, mould pressing process are with low-melting glass or add other composite materials that are similar to ceramic material and make barrier 11 with the corresponding given shape of addressing electrode, form basic discharge space unit;
7, the slurry of red, green and blue three-color phosphor furnishing is formed thick films on barrier 11 inwalls and dielectric layer 10 surfaces of above-mentioned basic discharge cell respectively with the method for silk-screen or photoetching, solvent and binding agent in the high temperature burn off slurry form red 12r, green 12g, blue 12b three fluorescence bisque;
Above-mentioned forward and backward substrate is joined sealing-in by following 8 to 11 stepping luggages:
8, one of them sheet outer continued to use glass powder with low melting point or low-melting glass slurry and made sealing-in frame 14 and be used for forward and backward base plate bonding in preceding 1, metacoxal plate 2, opens at the metacoxal plate non-display area that hole 16 is used to fill, exhaust;
9, assembling is aimed on above-mentioned forward and backward real estate opposite;
10, utilize sealing-in frame 14 fusings on the forward and backward substrate that high temperature assembles above-mentioned aligning, simultaneously with blast pipe 13 by low melting point glass material 15 in the 16 places sealing-in of metacoxal plate through hole, after the annealing cooling with front-back baseboard sealing-in Cheng Ping;
11, blast pipe 13 is linked to each other in the external vacuum system, screen is carried out the heated baking degasification, when reaching enough vacuum degree, the working gas for preparing in advance, the mist that is He-Ne-Xe or other gas charges in the screen by blast pipe, and final vacuum pipe and vacuum system sealed-off are finished in qi of chong channel ascending adversely.
In the manufacture process of above-mentioned display screen, because multiple working procedure such as electrode preparation, dielectric layer, barrier, fluorescent material technology are all made on the glass substrate of back, back glass substrate is through multiple high temp technology, therefore exist serious glass deformation, contraction problem, adopt the high special glass substrate of softening point in order to address these problems, this has just improved device cost; Simultaneously each the road technology on metacoxal plate all can have influence on the rate of finished products of whole metacoxal plate, and the own more complicated difficulty of barrier and fluorescent material technology, has therefore influenced the production efficiency and the rate of finished products of whole screen.
(3) summary of the invention
In order to address the above problem, the present invention proposes corresponding method of manufacture on metal grid mesh template plasma display panel architecture basics, adopting independently, the metal gate web plate replaces barrier, independent processing metal aperture plate plate, and make fluorescent material thereon, and at last prebasal plate, aperture plate plate and metacoxal plate are assembled sealing-in in the sandwich mode and make whole screen, disperseed the making risk, improve production efficiency, thereby effectively reduced cost of manufacture.
Figure 2 shows that the structure of aperture plate template plasma display panel.
The structure of aperture plate template plasma display panel mainly is made of prebasal plate 17, aperture plate plate 28 and metacoxal plate 18.Metacoxal plate 18 comprises back substrate glass substrate 24, and first electrode 25 that forms on back substrate glass substrate 24 is at the dielectric layer 26 that the upper surface of first electrode 25 and back substrate glass substrate 24 forms, the diaphragm 27 that forms on dielectric layer 26; Prebasal plate 17 comprises preceding substrate glass substrate 19, form on preceding substrate glass substrate 19 lower surfaces with metacoxal plate 18 on 25 one-tenth spatial vertical quadratures of first electrode by film formed second electrode 20 of electrically conducting transparent, make bus electrode 21 on second electrode, 20 surfaces, the dielectric layer 22 that on the lower surface of second electrode 20, bus electrode 21 and preceding underlay substrate 19, forms, the diaphragm 23 that on dielectric layer 22, forms; The aperture plate plate 28 that is clipped between the front- back baseboard 17,18 is conductive plates that comprise the grid hole array; The mesh inwall of aperture plate plate 28 covers red 29r, green 29g, blue 29b three primary colors fluorescent powder.To carry out hermetic seal with low-melting glass around prebasal plate 17, aperture plate plate 28, the metacoxal plate 18, fill required working gas after vacuumizing with certain air pressure, be the mist of He-Ne-Xe or other gas, this has just formed aperture plate sheet type plasma display panel.
Aperture plate template plasma display panel manufacturing process of the present invention is as follows:
At first, the manufacturing process of prebasal plate 17 comprises following three steps:
1, on front glass substrate 19, makes transparent second electrode 20,, on transparency electrode 20, make conductivity bus electrode 21 in order to improve electrode conductivuty;
2, make dielectric layer 22 on above-mentioned second electrode 20, bus electrode 21 and front glass substrate 19 surfaces;
3, make protective layers 23 on dielectric layer 22 surface, for MgO or comprise the composite material of MgO;
The manufacturing process of metacoxal plate 18 comprises following three steps:
4, on the glass substrate 24 of back, make first electrode 25;
5, make dielectric layer 26 at above-mentioned first electrode 25 and back glass substrate 24 surfaces;
6, make protective layers 27 on dielectric layer 26 surface, for MgO or comprise the composite material of MgO;
The manufacturing process of metal gate web plate 28 comprises following five steps:
7, apply the corrosion stability photoresists at the sheet metal single or double;
8, make the resist layer of required form of exposure method;
9, on above-mentioned sheet metal, make the mesh of required pattern of etch;
10, remove resist layer;
11, inner local or all make red 29r, green 29g, blue 29b three-color phosphor respectively successively at mesh;
Above-mentioned prebasal plate 17, aperture plate plate 28 and metacoxal plate 18 are assembled sealing-in by following step:
12, the outer glass powder with low melting point or the low-melting glass slurry making sealing-in frame 33 continued to use of one of them sheet in prebasal plate 17, metacoxal plate 18,
13, non-display area opens that hole 31 is used to fill, exhaust in metacoxal plate;
14, above-mentioned prebasal plate 17, aperture plate plate 28 and metacoxal plate 18 are aimed at assembling and fixing in the sandwich mode;
15, utilize sealing-in frame 33 fusings on the forward and backward substrate that high temperature assembles above-mentioned aligning, simultaneously with blast pipe 30 by low melting point glass material 32 in the 31 places sealing-in of metacoxal plate through hole, after the annealing cooling with front-back baseboard sealing-in Cheng Ping;
16, blast pipe 30 is linked to each other blast pipe and vacuum system sealed-off in the external vacuum system.
The present invention has the following advantages: 1. aperture plate plate 3 adopts metal material, because the process technology of metal is simple much more ripe than the barrier manufacturing technology that used insulating material in the existing plasma display panel constitutes, therefore, the present invention is suitable for producing in enormous quantities, improve rate of finished products, reduce production costs.2. the metal gate web plate replaces barrier owing to adopt independently, independent processing metal aperture plate plate, and make fluorescent material thereon, prebasal plate, aperture plate plate and metacoxal plate are independently made, and have disperseed the manufacturing risk, have improved production efficiency, thereby have effectively reduced cost of manufacture.
(4) description of drawings
Accompanying drawing 3 is made flow chart for the surface discharge plasma display panel of alternating current
Accompanying drawing 4 is the structural representation of aperture plate plate structure plasma display panel of alternating current
Accompanying drawing 5 is an aperture plate plate structure plasma display panel of alternating current encapsulation schematic diagram
Accompanying drawing 6 is that aperture plate plate structure plasma display panel of alternating current is made flow chart
(5) embodiment
On the basis of foregoing invention, further consider concrete structure, propose following various embodiment, and, further specify the distinctive advantage of each embodiment by specific embodiment.First kind of embodiment of the present invention, comprise prebasal plate 17, metacoxal plate 18 and aperture plate plate 28 manufacturing process and the assembling sealing-in, vacuumize, inflate, concrete steps are as follows:
At first, the manufacturing process of prebasal plate 17 comprises following three steps:
1, on front glass substrate 19, makes transparent second electrode 20 with the method for thin film photolithography or the method for thick film pad pasting or the photoetching of silk-screen photosensitive material, in order to improve electrode conductivuty, the method with silk-screen or photoetching on transparency electrode 20 is made the superior bus electrode 21 of electric conductivity;
2, make formation dielectric material film on above-mentioned second electrode 20, bus electrode 21 and front glass substrate 19 surfaces with silk screen printing or other thick-film techniques, be low melting point glass material, through forming dielectric layer 22 behind the high temperature sintering;
3, steam method, plasma sputtering method, sol-gel process on dielectric layer 22 surfaces with electron beam or chemical gaseous phase depositing process is made protective layer 23, for MgO or comprise the composite material of MgO;
The manufacturing process of metacoxal plate 18 comprises following three steps:
4, on the glass substrate 24 of back, make first electrode 25 with the method for thin film photolithography or the method for photosensitive material photoetching of thick film pad pasting or silk-screen;
5, make formation dielectric material film at above-mentioned first electrode 25 and glass substrate 24 surfaces, back with silk screen printing or other thick-film techniques, be low melting point glass material, through forming dielectric layer 26 behind the high temperature sintering;
6, steam method, plasma sputtering method, sol-gel process on dielectric layer 26 surfaces with electron beam or chemical gaseous phase depositing process is made protective layer 27, for MgO or comprise the composite material of MgO;
The manufacturing process of metal gate web plate 28 comprises following five steps:
7, at sheet metal, for applying the corrosion stability photoresists with obedient film, coating technique at single or double on the iron of 0.05-1mm or iron-nickel alloy or other metal or alloy material;
8, make the resist layer of required form of exposure method;
9, on above-mentioned sheet metal, make the mesh of required pattern of etch;
10, remove resist layer;
11, inner local or all make red 29r, green 29g, blue 29b three-color phosphor respectively successively with silk screen printing or other thick-film technique at mesh;
Above-mentioned prebasal plate 17, aperture plate plate 28 and metacoxal plate 18 are assembled sealing-in by following step:
12, non-display area opens that hole 31 is used to fill, exhaust in metacoxal plate 18;
13, in prebasal plate 17, metacoxal plate 18 one of them sheet outer continue to use glass powder with low melting point or low-melting glass slurry make sealing-in frame 33 be used for preceding 17, metacoxal plate 18 is bonding;
14, above-mentioned prebasal plate 17, aperture plate plate 28 and metacoxal plate 18 are aimed at assembling in the sandwich mode;
15, utilize prebasal plate 17,33 fusings of the sealing-in frame on the metacoxal plate 18 that high temperature assembles above-mentioned aligning, simultaneously with blast pipe 30 by low melting point glass material 32 in metacoxal plate 18 through hole 31 places sealing-ins, after the annealing cooling with front-back baseboard sealing-in Cheng Ping;
16, blast pipe 30 is linked to each other in the external vacuum system, screen is carried out the heated baking degasification, when reaching enough vacuum degree, the working gas for preparing in advance, the mist that is He-Ne-Xe or other gas charges in the screen by blast pipe, and final vacuum pipe and vacuum system sealed-off are finished in qi of chong channel ascending adversely.
Second kind of embodiment of the present invention makes the process of sealing-in frame 33 and the process meeting pollution protection layer 23 or 27 that the 12nd step glass substrate is opened hole 31 at the 13rd step among first embodiment, cause operating voltage to raise, the job insecurity problem, with this two step in advance, if sealing-in frame 33 or glass substrate through hole 31 are on metacoxal plate 18, any step before then the 12nd step being advanceed to for the 6th step was the 5th step and go on foot the 13rd in advance; If sealing-in frame 33 or glass substrate through hole 31 on prebasal plate, then advanceed to for the 3rd arbitrary step before in step with the 12nd step or the 13rd step.
Claims (3)
1. the manufacture method of a metal grid mesh template plasma display panel of alternating current comprises the making of prebasal plate (17), metacoxal plate (18) and aperture plate plate (28), it is characterized in that by following step:
At first, the manufacturing process of prebasal plate (17) comprises following three steps:
(1) goes up making transparent second electrode (20) at front glass substrate (19),, go up making conductivity bus electrode (21) in transparency electrode (20) in order to improve electrode conductivuty;
(2) make dielectric layer (22) on above-mentioned second electrode (20), bus electrode (21) and front glass substrate (19) surface;
(3) make protective layer (23) on dielectric layer (22) surface, for MgO or comprise the composite material of MgO;
The manufacturing process of metacoxal plate (18) comprises following three steps:
(4) go up making first electrode (25) at back glass substrate (24);
(5) make dielectric layer (26) at above-mentioned first electrode (25) and back glass substrate (24) surface;
(6) make protective layer (27) on dielectric layer (26) surface, for MgO or comprise the composite material of MgO;
The manufacturing process of metal gate web plate (28) comprises following five steps:
(7) apply the corrosion stability photoresists at the sheet metal single or double;
(8) make the resist layer of required form of exposure method;
(9) use etch on above-mentioned sheet metal, to make the mesh of required pattern;
(10) remove resist layer;
(11) inner local or all make red 29r, green 29g, blue 29b three-color phosphor respectively successively at mesh;
Above-mentioned prebasal plate (17), aperture plate plate (28) and metacoxal plate (18) are assembled sealing-in by following step:
(12) the outer glass powder with low melting point or the low-melting glass slurry making sealing-in frame (33) continued to use of one of them sheet in prebasal plate (17), metacoxal plate (18),
(13) non-display area opens that hole (31) is used to fill, exhaust in metacoxal plate;
(14) above-mentioned prebasal plate (17), aperture plate plate (28) and metacoxal plate (18) are aimed at assembling and fixing in the sandwich mode;
(15) utilize sealing-in frame (33) fusing on the forward and backward substrate that high temperature assembles above-mentioned aligning, simultaneously blast pipe (30) located sealing-in by low melting point glass material (32) in metacoxal plate through hole (31), after annealing is lowered the temperature with front-back baseboard sealing-in Cheng Ping;
(16) blast pipe (30) is linked to each other blast pipe and vacuum system sealed-off in the external vacuum system.
2. the manufacture method of metal grid mesh template plasma display panel of alternating current according to claim 1 comprises the steps:
At first, the manufacturing process of prebasal plate (17) comprises following three steps:
(1) upward makes transparent second electrode (20) at front glass substrate (19) with the method for thin film photolithography or the method for thick film pad pasting or the photoetching of silk-screen photosensitive material, in order to improve electrode conductivuty, upward make the superior bus electrode (21) of electric conductivity with the method for silk-screen or photoetching in transparency electrode (20);
(2) make formation dielectric material film on above-mentioned second electrode (20), bus electrode (21) and front glass substrate (19) surface with silk screen printing or other thick-film techniques, be low melting point glass material, form dielectric layer (22) through behind the high temperature sintering;
(3) steam method, plasma sputtering method, sol-gel process or chemical gaseous phase depositing process on dielectric layer (22) surface with electron beam and make protective layer (23), for MgO or comprise the composite material of MgO;
The manufacturing process of metacoxal plate (18) comprises following three steps:
(4) upward make first electrode (25) at back glass substrate (24) with the method for thin film photolithography or the method for photosensitive material photoetching of thick film pad pasting or silk-screen;
(5) make formation dielectric material film at above-mentioned first electrode (25) and back glass substrate (24) surface with silk screen printing or other thick-film techniques, be low melting point glass material, form dielectric layer (26) through behind the high temperature sintering;
(6) steam method, plasma sputtering method, sol-gel process or chemical gaseous phase depositing process on dielectric layer (26) surface with electron beam and make protective layer (27), for MgO or comprise the composite material of MgO;
The manufacturing process of metal gate web plate (28) comprises following five steps:
(7) at sheet metal, for applying the corrosion stability photoresists with obedient film, coating technique at single or double on the iron of 0.05-1mm or iron-nickel alloy or other metal or alloy material;
(8) make the resist layer of required form of exposure method;
(9) use etch on above-mentioned sheet metal, to make the mesh of required pattern;
(10) remove resist layer;
(11) inner local or all make red 29r, green 29g, blue 29b three-color phosphor respectively successively with silk screen printing or other thick-film technique at mesh;
Above-mentioned prebasal plate (17), aperture plate plate (28) and metacoxal plate (18) are assembled sealing-in by following step:
(12) non-display area opens that hole 31 is used to fill, exhaust in metacoxal plate (18);
(13) one of them sheet outer continued to use glass powder with low melting point or low-melting glass slurry and made sealing-in frame (33) and be used for preceding (17), metacoxal plate (18) bonding in prebasal plate (17), metacoxal plate (18);
(14) above-mentioned prebasal plate (17), aperture plate plate (28) and metacoxal plate (18) are aimed at assembling in the sandwich mode;
(15) prebasal plate (17), the fusing of the sealing-in frame (33) on the metacoxal plate (18) that utilizes high temperature that above-mentioned aligning is assembled, simultaneously blast pipe (30) is located sealing-in by low melting point glass material (32) in metacoxal plate (18) through hole (31), after the annealing cooling with front-back baseboard sealing-in Cheng Ping;
(16) blast pipe (30) is linked to each other in the external vacuum system, screen is carried out the heated baking degasification, when reaching enough vacuum degree, the working gas for preparing in advance, the mist that is He-Ne-Xe or other gas charges in the screen by blast pipe, and final vacuum pipe and vacuum system sealed-off are finished in qi of chong channel ascending adversely.
3, the manufacture method of metal grid mesh template plasma display panel of alternating current according to claim 1, the 13rd step was made pollution protection layer (23) or (27) in the process of sealing-in frame (33) and the process that the 12nd step glass substrate is opened hole (31) in the claim 2, cause operating voltage to raise, the job insecurity problem, with this two step in advance, if sealing-in frame (33) or glass substrate through hole (31) are on metacoxal plate (18), any step before then the 12nd step being advanceed to for the 6th step was the 5th step and go on foot the 13rd in advance; If sealing-in frame (33) or glass substrate through hole (31) on prebasal plate, then advanceed to for the 3rd arbitrary step before in step with the 12nd step or the 13rd step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03100333 CN1243362C (en) | 2003-01-14 | 2003-01-14 | Method for producing AC plasma display panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03100333 CN1243362C (en) | 2003-01-14 | 2003-01-14 | Method for producing AC plasma display panel |
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| CN1463019A CN1463019A (en) | 2003-12-24 |
| CN1243362C true CN1243362C (en) | 2006-02-22 |
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| CN 03100333 Expired - Fee Related CN1243362C (en) | 2003-01-14 | 2003-01-14 | Method for producing AC plasma display panel |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101615547B (en) * | 2008-06-23 | 2012-05-23 | 四川虹欧显示器件有限公司 | Method for repairing non-panel cracking deficient PDP panel |
| CN103987114B (en) * | 2014-06-11 | 2017-03-29 | 清华大学 | The power optimization control of mobile site and distribution method under high mobile environment |
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