Background technology
Molybdenum sheet such as molybdenum disk production method have rolling and powder metallurgic method usually, however slim molybdenum sheet, commonly used is to adopt rolling production, be about to molybdenum plate that the powder metallurgy method produces and prolong to roll by heating and be machined near desired thickness, punch forming then is again through grinding be ground to desired thickness.This employing is rolling to be added method for grinding and produces molybdenum sheet, and yield rate is generally lower, yield rate only about 40-45% usually, and also molybdenum sheet thickness is thin more, and yield rate is low more, and is difficult to reach the high-flatness requirement.Therefore by prolong roll and ground finish produce ultra-thin as thickness less than the following molybdenum sheet of 0.3mm, and planeness requires high (as the ultra-thin molybdenum sheet of 30 * 60 * 0.24mmCT machine, 9 detections of laser levelling instrument, the surface finish error is less than 10 μ m) ultrathin molybdenum sheet, not only be difficult to reach requirement, and yield rate is extremely low, and production cost is very big.Adopt to prolong merely and roll processing (hot rolling+cold rolling), though can process ultra-thin molybdenum sheet such as molybdenum band, because the physicals of Mo, rolling ultra-thin molybdenum sheet still is difficult to reach the high-flatness requirement.Therefore above-mentioned two kinds of working methods all are difficult to the ultra-thin high-flatness molybdenum sheet that obtains producing in batches, and the molybdenum sheet yield rate is extremely low, and waste of material is bigger, and tooling cost is high.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned prior art, provide a kind of thickness less than 0.3mm, planeness requires high, can produce in batches, and yield rate is higher the ultra-thin high-flatness molybdenum sheet working method that production cost is low.
The object of the invention realization, main improvement are to adopt to prolong rolls processing and compresses the technology that combines of annealing, and both can obtain ultra-thin molybdenum sheet, and can guarantee the high-flatness requirement again.Specifically, the ultra-thin high-flatness molybdenum sheet of the present invention working method comprises earlier molybdenum plate hot rolling attenuate, again through the further attenuate of warm-rolling, after the annealing, again through repeatedly cold rolling, annealing, until desired thickness, it is characterized in that being cold-rolled to punch forming behind the desired thickness, lamination compresses annealing.
Hot rolling attenuate of the present invention and the further attenuate of warm-rolling, similar with common rolling molybdenum band technology, by hot rolling (heating 1200-1400 ℃), one can enhance productivity, two can effectively prevent rolling cracking, for making the ultra-thin preferably molybdenum sheet of physicals, hot rolling of the present invention better is that molybdenum plate is thinned to 1.5-2.5mm.Attenuate end of a period thickness is blocked up, has not only increased follow-up warm-rolling workload, and cause easily molybdenum sheet follow-up rolling in the cracking; Attenuate end of a period thickness is thin excessively, then can bring disadvantageous effect to molybdenum sheet physicals (surface texture and material plasticity).Therefore hot rolling end of a period thickness of the present invention is comparatively suitable with 1.5-2.5mm.Warm-rolling (heating 200-400 ℃), main effect is to prevent to ftracture when rolled sheet metal, and the warm-rolling final thickness is comparatively suitable with 0.5-1.2mm, and warm-rolling end of a period thickness is blocked up, not only follow-up cold rolling workload is big, and easily causes producing layering, cracking defect in cold-rolled process; Warm-rolling end of a period thickness is thin excessively, then cannot say for sure to demonstrate,prove the final desired thickness of follow-up finish rolling.Described lamination compresses annealing, this be process distinction of the present invention in prior art most critical part, its effect is one can make it softening by annealing, two reducible Mo performances eliminate stress and elasticity, guarantee that ultra-thin molybdenum sheet has high equality degree.Said lamination compresses annealing can carry out once, also can be repeatedly, the present invention especially with repeatedly for well, attenuate compresses annealing especially one by one.Said annealing temperature is advisable with 800-1200 ℃, and annealing temperature is too high, not only easily causes molybdenum sheet surface crystalline phase to degenerate, and makes the surface become coarse, and causes the molybdenum sheet embrittlement easily; Secondly, annealing temperature is too high, also easily causes molybdenum sheet Yin Gaowen to stick together, and causes to produce distortion when separating, so that loses the leveling effect; Opposite low excessively as annealing temperature, then do not have the leveling effect.Annealing temperature increases with the annealing number of times and reduces.
The present invention is owing to adopt hot rolling attenuate, the further attenuate of warm-rolling, annealing, cold rolling, punch forming, lamination to compress the annealing combination process, for the ultra-thin high-flatness molybdenum sheet of industrialized mass production provides one simply effectively, the brand-new technological method for processing that production efficiency is high.The ultra-thin molybdenum sheet of producing of 30 * 60 * 0.24mm, thickness error is less than 0.01mm, and plane 9 somes unfairness error is less than 10 μ m; And yield rate is higher, and yield rate reaches about 70-80%, and materials consumption is few, greatly reduces the production cost of ultra-thin high-flatness molybdenum sheet.
Below in conjunction with a specific embodiment, further specify the inventive method, but concrete parameter does not should be understood to limitation of the invention among the embodiment.
Specific implementation method
Embodiment: with the thick powder metallurgy system molybdenum plate of 16mm; under protection against oxidation through 4-5 time repeatedly heating rolling be thinned to thin slice about 1.8mm; after the cleaning, to the 0.8-1mm thin slice, annealing is reduced through 2-5 warm-rolling; again through cold rolling repeatedly-annealing; be rolled into the 0.24mm ultrathin section, punching out becomes 30 * 60mm substrate, cleans; lamination compresses through 900-1200 ℃ of annealing, and the attenuate lamination compresses through 800-1000 ℃ of annealing.