CN1239882C - Tricoordinate precision moving platform - Google Patents

Tricoordinate precision moving platform Download PDF

Info

Publication number
CN1239882C
CN1239882C CNB2004100138198A CN200410013819A CN1239882C CN 1239882 C CN1239882 C CN 1239882C CN B2004100138198 A CNB2004100138198 A CN B2004100138198A CN 200410013819 A CN200410013819 A CN 200410013819A CN 1239882 C CN1239882 C CN 1239882C
Authority
CN
China
Prior art keywords
moving
fixed
planker
base plate
sliding screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100138198A
Other languages
Chinese (zh)
Other versions
CN1556369A (en
Inventor
吉爱红
汪炜
黄国平
梁德旺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing University of Aeronautics and Astronautics
Original Assignee
Nanjing University of Aeronautics and Astronautics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing University of Aeronautics and Astronautics filed Critical Nanjing University of Aeronautics and Astronautics
Priority to CNB2004100138198A priority Critical patent/CN1239882C/en
Publication of CN1556369A publication Critical patent/CN1556369A/en
Application granted granted Critical
Publication of CN1239882C publication Critical patent/CN1239882C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention relates to a tri-coordinate precise movable platform which is used for the precise movement of a mechanism and is composed of an X-directional movable component, a Y-directional movable component and a Z-directional movable component, wherein a base board of the X-directional movable component (3) is fixed on a base (2), the Y-directional movable component (4) is fixed to a pulling board of the X-directional movable component (3), and a base board of the Z-directional movable component (6) is fixed to the pulling board of the Y-directional movable component (4) through a connection angle iron (5). Each of the three-directional movable components is composed of the same transmission mechanisms, namely a transmission mechanism, a guiding mechanism, a driving mechanism and a movable displacement-display mechanism, wherein the transmission mechanism is composed of a slide screw rod (9), the left and the right slide screw rod support (8), (22), a base board (10), a slide screw rod nut (23) and a pulling board (14), the guiding mechanism is composed of a rolling guide rail (7) and a slide block (13), and the driving mechanism is composed of a static electrode (16) of a grid containing sensor, a rotary electrode (17), a handwheel (18) and a handle (20). The present invention can achieve the precise movement of an X direction, a Y direction and a Z direction, and can be used as a precise movable platform meeting the requirements of the fluid measurement experiment.

Description

The three-dimensional precise mobile platform
Technical field
Three-dimensional precise mobile platform of the present invention belongs to accurate mobile technology, and the precision that is used for mechanism moves.
Background technology
Micro turbine engine in centimeter size (Micro Turbo Engine based on advanced manufacturing technology, MTE), be to satisfy in the future that minute vehicle also can be used as field operations portable energy source in the future to the scheme very likely of the propulsion system demand of high-energy storage density, high power/weight ratio.After the size of MTE is dwindled, all faced new problem from many aspects such as aerothermodynamic circulation, burning, rotor, turbine, pneumatic plant, bearings.Therefore must carry out a series of experiment, thereby the experimental data of abundance is provided for the development of Micro Turbine Jet Engine.As the pressure of the fluid in the engine various piece and the experiments of measuring of flow velocity etc.For data such as the pressure that can be convenient for measuring out fluid, flow velocitys, must make measuring probe realize accurately moving, and can make probe arrive the space specified position in X, Y, three directions of Z.So probe is installed in by support can realizes on the platform that X, Y, Z three-dimensional move.When requiring probe support to have enough rigidity, require this mobile platform to have enough movement resolutions and higher mobile accuracy.
Present mobile platform product both domestic and external mostly be greatly have only X, workbench that the Y both direction moves.Different products has different organization plans.Numerically-controlled precision working table as Nanjing Technical Equipment Manufacturing Factory's development mainly adopts the rolling screw transmission, rolling guide guiding, step motor drive and liquid crystal display systems.This product mobile accuracy is higher, but costs an arm and a leg, and has only X, Y both direction, and structure is huge.The microscope of Shanghai Optical Instruments Factory moves with the plane that mobile platform is similarly X, Y both direction, and this product adopts slip screw transmission, linear motion guide guiding, handwheel to drive and liquid crystal display systems, and price is comparatively cheap, but mobile accuracy is lower.External mobile platform has two kinds of forms, and a kind of employing modular design method can be used in combination, and precision is higher but price is extremely expensive; Another kind is a standardized product, though the three-dimensional locomotive function is arranged, can not satisfy request for utilization.
From the requirement of fluid data experiments of measuring, product both domestic and external all is difficult to meet the demands on structure, on mobile accuracy and the cost performance.Therefore must develop one and can realize that X, Y, three directions of Z move, possess enough mobile accuracies, have fluid measurement self-locking property and compact conformation and test precise mobile platform.
Summary of the invention
The present invention seeks to develop the three-dimensional precise mobile platform that can satisfy the fluid measurement requirement of experiment.Mobile platform can realize that the precision on X, Y, three directions of Z moves, and the stroke of worktable is not less than 30mm * 30mm * 30mm.Unidirectional mobile accuracy is 0.01mm, and the displacement display resolution is 0.001mm.Z designs mounting hole on moving-member, to install and fix the support of measuring probe, make probe can arrive the space specified position.Moving of X, Y, three direction mechanisms of Z all must have self-locking property.Experimental environment requirement, mobile platform project organization compactness, unidirectional largest contours size is no more than 250mm.Lighter weight is less than 10kg.
Three-dimensional precise mobile platform of the present invention is made up of the moving-member of X, Y, three directions of Z.Wherein the base plate of directions X moving-member is fixed on the mobile platform pedestal with higher level degree that four set screw are housed; Y is fixed on X on the planker of moving-member to moving-member; Z is fixed on Y to the base plate of moving-member on the planker of moving-member by connecting angle bar.Like this Z to the planker of moving-member by Z to transmission can realize about (be Z to) move, whole Z is installed in Y on the planker of moving-member to moving-member, thus by Y to the transmission of moving-member can realize Z to the planker Y spatially of moving-member to moving.Equally, Z also can be at the X of X implementation space under the gearing of moving-member to moving to the planker of moving-member.Thereby moving of X, the Y of realization mobile platform, three directions of Z.
The moving-member of X, Y, three directions of Z has identical structure.All each free gear train, guiding mechanism, driving mechanism, moving displacement indication mechanism constitute.Is example with X to moving-member, and X is made of with the feed screw nut who is sleeved on the sliding screw sliding screw to the gear train of moving-member.Sliding screw by about it two be supported and fixed on the base plate, the feed screw nut is connected with planker with the planker gusset by the feed screw nut.Guiding mechanism is made of with four slide blocks that link to each other with planker the rolling guide that is fixed on the base plate.The composition of driving mechanism is that the stationary electrode sky of capacitor grid transducer is enclosed within the sliding screw right-hand member and is fixed on and is installed on the stationary electrode set collar that sliding screw is right to be supported, and the rotating electrode of capacitor grid transducer and the handwheel that handle is housed are fixed on the stepped appearance optical axis of the right external part of sliding screw.The composition of moving displacement indication mechanism is to be fixed on the base plate by display/panel bracket by the LCDs that lead-in wire links to each other with the stationary electrode of capacitor grid transducer.
Mobile platform must be able to be realized X, Y, three directions of Z particularly Z is to the self-locking of transmission when considering fluid measurement, and mobile platform is not to use very continually and cost factor, adopts finally that sliding screw is secondary realizes transmission.The sliding screw auxiliary structure is simple, and cost is low, need not lubricating system and has self-locking property.In the worm drive of X, Y, three directions of Z, with the required power maximum of the worm drive of directions X, the calculating of transmitting power during transmission by platform, directions X adopts that the sliding screw of M10 is secondary realizes transmission, when satisfying worm drive axially and radial rigidity.Though the conductance of Y direction and Z direction is less than the directions X conductance, the diameter of this both direction screw mandrel can be less than the diameter of directions X, but consider convenience and the cost of making processing, the worm drive size of X, Y, three directions of Z all adopts the sliding screw pair of M10.Regular match grinding and pretension by screw mandrel and nut can guarantee that its transmission accuracy reaches 10 μ m.
The guiding mechanism of three-dimensional precise mobile platform is that the effect of line slideway auxiliary is when playing accurate guide effect, have enough strength and stiffness and bear the action of gravity of the parts on the planker of mobile platform on this direction, thereby make the sliding screw collateral demonstrate,prove its transmission accuracy.Take all factors into consideration various factors, measuring table has adopted a pair of linear rolling guide as guiding parts.The advantage of linear rolling guide is that frictional resistance is little, and servo-actuated is good; Can realize high position precision and repetitive positioning accuracy; Can realize not having the gap motion, improve the motion rigidity of platform.Linear rolling guide is arranged symmetrically in the both sides of sliding screw pair.Because when using guideway in pairs, have " error leveling effect ", the processing request of guide rail installed surface (being base plate) be can reduce, thereby the processing cost and the difficulty of base plate reduced.In addition, linear rolling guide has been realized standardization, has simplified the structural design and the processing and manufacturing of platform.
The drive unit of three-dimensional precise mobile platform adopts the handwheel method of driving.Handwheel and sliding screw are connected, and when shaking handwheel, slip screw adjutant rotation becomes straight line moves, and moves thereby make the planker that is fixed on the feed screw nut make accurate straight line.It is the digital display system of displacement sensitive element that the capacitance coupling type capacitor grid transducer has then been adopted in the measurement of amount of movement and demonstration.Capacitor grid transducer be shaped as circle, rotating electrode is relative with stationary electrode to be installed.Rotating electrode need not switched on, and directly is fixed on the handwheel, and stationary electrode then is fixed on the base plate of platform.When handwheel drives the screw mandrel rotation, rotating electrode and stationary electrode have just produced the relative motion of circumferencial direction, this relative motion is converted into the variation of electric weight, by counting circuit the relative motion of the circumferencial direction of rotating electrode and stationary electrode is converted into the rectilinear motion of feed screw nut and planker again, shows by LCDs.The display digit of display screen is 5, and preceding 2 is integral part, and back 3 is fraction part, and unit is a millimeter, and indication range is 00.000~99.999.This digital display device can be done absolute measurement and show that also can do relative measurement shows.After planker moved to certain reference position,, just can make probe (being planker) move to certain precalculated position relative with the reference position with the display screen zero clearing.
Description of drawings
Fig. 1. three-dimensional precise mobile platform general assembly drawing
The label title of Fig. 1: 1-set screw, 2-mobile platform pedestal, 3-X are to moving-member, and 4-Y is to moving-member, and 5-connects angle bar, and 6-Z is to moving-member.
Fig. 2 .X is to the moving-member wiring layout
The label title of Fig. 2: the 7-rolling guide, the 9-sliding screw is supported on a 8-sliding screw left side, the 10-base plate, 11-display/panel bracket, 12-LCDs, the 13-slide block, 14-planker, 15-stationary electrode set collar, the 16-stationary electrode, 17-rotating electrode, 18-handwheel, the 19-slotted countersunk flat head screw, 20-handle, 21-stationary electrode extension line, the 22-sliding screw is right to support 23-feed screw nut, 24-feed screw nut and planker gusset.
Fig. 3. the capacitor grid transducer structure
The label title of Fig. 3: 17-rotating electrode, the pickoff electrode of 25-stationary electrode, the drive electrode of 26-stationary electrode.
Fig. 4. capacitor grid transducer is measured the display circuit block diagram
Embodiment
Fig. 1 is the general assembly drawing of three-dimensional precise mobile platform.Pedestal 2 with higher flatness is by four set screw 1 adjustment levels.X is fixed on the upper right corner of pedestal 2 installed surfaces by socket head cap screw to the base plate of moving-member 3.Experimental provision can be placed in other spaces of pedestal 2 installed surfaces.Design can make mobile platform and experimental provision keep same horizontal reference like this.Y is fixed on X on the planker of moving-member 3 to the base plate of moving-member 4 by socket head cap screw, Z fixes to the planker of moving-member 4 with Y by connecting angle bar 5 to the base plate of moving-member 6.Like this Z to the planker of moving-member 6 by Z to transmission can realize about (be Z to) move, whole Z is installed in Y on the planker of moving-member 4 to moving-member 6, thus by Y to the transmission of moving-member 4 can realize Z to the planker Y spatially of moving-member 6 to moving.Equally, Z also can be at the X of X implementation space under the gearing of moving-member 3 to moving to the planker of moving-member 6.
The moving-member of the X of three-dimensional precise mobile platform, Y, three directions of Z has same structure, all comprises separately gear train, guiding mechanism, driving mechanism, moving displacement indication mechanism.Be the mechanism design of example explanation three-dimensional precise mobile platform on all directions with X to moving-member below.
Fig. 2 is that X is to the moving-member wiring layout.The datum clamp face that sliding screw 9 and rolling guide 7 are arranged on the base plate 10.Sliding screw 9 is fixed on the base plate 10 by support 8 of a sliding screw left side and the right support 22 of sliding screw.Sliding screw 9 and feed screw nut 23 form the drving sprial pair.Feed screw nut 23 is connected with planker 14 with planker gusset 24 by the feed screw nut.Rolling guide 7 directly is fixed on the base plate 10 by socket head cap screw.Rolling guide 7 and slide block 13 constitute straight line moving guide rail pair.Slide block 13 has 4, links to each other with planker 14 by socket head cap screw.The right external part of sliding screw 9 is the stepped appearance optical axis.Be fixed with capacitor grid transducer on it and drive handwheel.Stationary electrode 16 skies of capacitor grid transducer are enclosed within the right-hand member of sliding screw 9 and are fixed on the stationary electrode set collar 15.Stationary electrode set collar 15 is fixed on right 22 the right side of supporting of sliding screw by screw.The rotating electrode 17 of capacitor grid transducer and handwheel 18 are implemented in the axial restraint on the optical axis part of sliding screw 9 by slotted countersunk flat head screw 19, realize circumferentially fixing by interference fit.There is screw thread the end of handle 20, is directly installed on the handwheel 18.The rotating electrode 17 of capacitor grid transducer need not extension line, and the extension line 21 of stationary electrode 16 passes from the bottom of base plate 10, links to each other with LCDs 12.LCDs 12 is fixed on the left end of base plate 10 by display/panel bracket 11.
X to mobilely be the realization of moving of planker 14 and measure and realize by following processes.Cause the rotation of the rotating electrode 17 of handwheel 18 and capacitor grid transducer with crank handle 20.Handwheel 18 and sliding screw 9 are connected, so sliding screw 9 rotates synchronously when handwheel rotates.Under the effect of sliding screw pair, the planker that is connected with feed screw nut 23 14 moves along rectilinear direction.Planker 14 is connected with slide block 13, by rolling guide-rail pairs guiding and support.Fig. 3 is the electrode part structural map of capacitor grid transducer.Stationary electrode 16 is divided into pickoff electrode 25 and drive electrode 26, and drive electrode 26 has four, 360 ° of circumferencial directions are uniform, and has added the sinusoidal voltage of 90 ° of constant amplitude, equifrequency and phase differential respectively.By the capacitive coupling effect of rotating electrode 17, rotational angle is depended in the variation of pickoff electrode output voltage on the stationary electrode 16.If handwheel 18 rotates continuously, the measurement range of capacitor grid transducer can infinitely strengthen.Fig. 4 is that capacitor grid transducer is measured the display circuit block diagram.The drive electrode 26 of capacitor grid transducer is obtained by output signal and its inversion signal of two oscillator phases.Counting circuit is the rectilinear motion that the relative motion of the circumferencial direction of rotating electrode and stationary electrode is converted into feed screw nut and planker.The output voltage of pickoff electrode 25 is received by buffer amplifier and amplifies, and is added in then on the wave filter, filters the backdrop that output electrode is picked up.After the A/D analog to digital conversion, show the displacement digital value by LCDs again by display circuit.Measuring counting circuit, display circuit etc. all is installed in the LCDs.Display system adopts the liquid crystal display of large size word, 5 of display digits, and preceding 2 is integral part, and back 3 is fraction part, and unit is a millimeter, and indication range is 00.000~99.999.The liquid crystal display screen system not only can be arranged to do absolute measurement or relative measurement as required and show, can also make metric and English and show conversion.The measurement display system of a whole set of capacitor grid transducer saves No. 7 dry cells as power supply with one, and is convenient economical.

Claims (2)

1, a kind of three-dimensional precise mobile platform is characterized in that being made up of the moving-member of X, Y, three directions of Z.Wherein X is fixed on the mobile platform pedestal (2) that four set screw (1) are housed to the base plate of moving-member (3); Y is fixed on X on the planker of moving-member (3) to moving-member (4); Z is fixed on Y on the planker of moving-member (4) to the base plate utilization connection angle bar (5) of moving-member (6).
2, three-dimensional precise mobile platform according to claim 1, it is characterized in that all each free gear train, guiding mechanism, moving displacement indication mechanism constitute for the moving-member of X, Y, three directions of Z, described gear train is fixed on the base plate (10) by two supports (8,22) about it by sliding screw (9), and the sliding screw nut (23) that is sleeved on the sliding screw (9) is connected with planker (14) with planker gusset (24) by the feed screw nut; Guiding mechanism is made of with four slide blocks (13) that link to each other with planker (14) the rolling guide (7) that is fixed on the base plate (10); The composition of driving mechanism is, static electroplax (16) sky of capacitor grid transducer is enclosed within sliding screw (9) right-hand member and is fixed on and is installed on the right stationary electrode set collar (15) that supports (22) of sliding screw, and rotating electrode of capacitor grid transducer (17) and the handwheel (18) that handle (20) are housed are fixed on the stepped appearance optical axis of sliding screw right side external part; The composition of moving displacement indication mechanism is, the LCDs (12) that links to each other with the stationary electrode (16) of capacitor grid transducer through lead-in wire (21) is fixed on the base plate on (10) by display/panel bracket (11).
CNB2004100138198A 2004-01-06 2004-01-06 Tricoordinate precision moving platform Expired - Fee Related CN1239882C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2004100138198A CN1239882C (en) 2004-01-06 2004-01-06 Tricoordinate precision moving platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2004100138198A CN1239882C (en) 2004-01-06 2004-01-06 Tricoordinate precision moving platform

Publications (2)

Publication Number Publication Date
CN1556369A CN1556369A (en) 2004-12-22
CN1239882C true CN1239882C (en) 2006-02-01

Family

ID=34351098

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100138198A Expired - Fee Related CN1239882C (en) 2004-01-06 2004-01-06 Tricoordinate precision moving platform

Country Status (1)

Country Link
CN (1) CN1239882C (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101586938B (en) * 2009-04-17 2010-09-08 北京航空航天大学 Position adjusting and positioning device of capacitive displacement and vibration sensor
EP2505956A1 (en) * 2011-03-29 2012-10-03 Hexagon Technology Center GmbH Coordinate measuring machine
DE102016202334A1 (en) * 2016-02-16 2017-08-17 Zf Friedrichshafen Ag Subassembly for a drive unit, drive unit, powertrain test bench and modular system
CN106199759B (en) * 2016-03-29 2018-10-12 中国地震局地震研究所 Electrostatic feedback dipmeter assembling and setting platform and its method

Also Published As

Publication number Publication date
CN1556369A (en) 2004-12-22

Similar Documents

Publication Publication Date Title
CN102969030B (en) Plane type precise two-dimensional micrometric displacement platform
CN203045153U (en) Micron order four-axis motion platform
CN107703719A (en) A kind of coplanar vacuum preloading platform of air supporting
CN203965952U (en) Based on the precision stage of piezoelectric ceramics
CN108731617B (en) Measuring device for polygonal ball seat slender assembly
CN2741032Y (en) Presure distribution testing table of air static pressure bearing
CN1239882C (en) Tricoordinate precision moving platform
CN102353539A (en) Photoelectric measuring machine for precision transmission chain
CN108646374A (en) High-precision compact focusing mechanism for aerial optical remote sensor and assembling method
CN216558983U (en) Multi-degree-of-freedom moving and rotating inertia measurement unit test platform
CN204359598U (en) A kind of force push rod device and Multi-axis high-precision load add carrier aircraft
CN112683209A (en) Line gear machining precision detection table
CN112033318A (en) Gear detection equipment
CN201828245U (en) Numerical control machine tool form and position error precision measuring device based on LabVIEW (laboratory virtual instrument engineering workbench) software
CN1193859C (en) Redundant driving parallel device for machine tool
CN116413027A (en) Comprehensive performance test platform for planetary roller screw and planetary reducer
CN113405821B (en) Six-freedom-degree motion platform device for pose measurement and calibration
CN101382739B (en) Mini platform device
CN214843077U (en) Line gear machining precision detection table
CN106438972B (en) A kind of joint of adjustable gear clearance
CN104236485B (en) Straightness measuring device
CN2267451Y (en) Arrangement for measuring gear wheel
CN110450112A (en) The mechanical micromotion platform of five degree of freedom
CN212903896U (en) Speed reducer performance testing device
CN215373924U (en) Back clearance detection device of speed reducer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee