CN1222014C - Method of forming TiN barrier by chemical rapour phase deposition - Google Patents
Method of forming TiN barrier by chemical rapour phase deposition Download PDFInfo
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- CN1222014C CN1222014C CN 02137189 CN02137189A CN1222014C CN 1222014 C CN1222014 C CN 1222014C CN 02137189 CN02137189 CN 02137189 CN 02137189 A CN02137189 A CN 02137189A CN 1222014 C CN1222014 C CN 1222014C
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- tin
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 02137189 CN1222014C (en) | 2002-09-27 | 2002-09-27 | Method of forming TiN barrier by chemical rapour phase deposition |
Applications Claiming Priority (1)
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CN 02137189 CN1222014C (en) | 2002-09-27 | 2002-09-27 | Method of forming TiN barrier by chemical rapour phase deposition |
Publications (2)
Publication Number | Publication Date |
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CN1414603A CN1414603A (en) | 2003-04-30 |
CN1222014C true CN1222014C (en) | 2005-10-05 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 02137189 Expired - Fee Related CN1222014C (en) | 2002-09-27 | 2002-09-27 | Method of forming TiN barrier by chemical rapour phase deposition |
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CN (1) | CN1222014C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100432285C (en) * | 2003-10-30 | 2008-11-12 | 上海集成电路研发中心有限公司 | Technique for increasing A1 caverne in metal wire through sprttered film for metal wire |
CN101654774B (en) * | 2008-08-19 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Method for inhibiting corrosion of metal pad |
CN109778139B (en) * | 2017-11-13 | 2021-06-22 | 中芯国际集成电路制造(北京)有限公司 | Method and device for improving heating performance of heater in chemical vapor deposition chamber |
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2002
- 2002-09-27 CN CN 02137189 patent/CN1222014C/en not_active Expired - Fee Related
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Publication number | Publication date |
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CN1414603A (en) | 2003-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG (GROUP) CO., LTD.; SHANGHAI IC R Free format text: FORMER OWNER: SHANGHAI HUAHONG (GROUP) CO., LTD. Effective date: 20060922 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060922 Address after: 201203 No. 177 blue wave road, Zhangjiang hi tech park, Shanghai, Pudong New Area Co-patentee after: Shanghai integrated circuit research and Development Center Co., Ltd. Patentee after: Shanghai Huahong (Group) Co., Ltd. Address before: 18, Huaihai Road, Shanghai, No. 200020, building 918 Patentee before: Shanghai Huahong (Group) Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051005 Termination date: 20140927 |
|
EXPY | Termination of patent right or utility model |