CN1207433C - Vacuum electric arc automatic arc-striking method and apparatus - Google Patents
Vacuum electric arc automatic arc-striking method and apparatus Download PDFInfo
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- CN1207433C CN1207433C CN 02141205 CN02141205A CN1207433C CN 1207433 C CN1207433 C CN 1207433C CN 02141205 CN02141205 CN 02141205 CN 02141205 A CN02141205 A CN 02141205A CN 1207433 C CN1207433 C CN 1207433C
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- electric arc
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- 238000010891 electric arc Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000007733 ion plating Methods 0.000 claims abstract description 12
- 238000004146 energy storage Methods 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 11
- 230000001276 controlling effect Effects 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000007747 plating Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 abstract 2
- 230000004913 activation Effects 0.000 abstract 1
- 239000012495 reaction gas Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000000427 thin-film deposition Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 230000008033 biological extinction Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000010406 cathode material Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- -1 make structure Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The present invention relates to a multi-arc ion plating vacuum electric arc automatic arc-striking method and a device thereof, and the multi-arc ion plating vacuum electric arc automatic arc-striking method comprises the following step: when a film plating process is started, an automatic arc-striking process can be carried out; in the film plating process, when an electric arc is extinguished or is tended to extinguish, a feedback element detects the working voltage of the electric arc and feeds back a detecting result to an arc-striking signal control unit, the arc-striking signal control unit compares and in time transmits an automatic arc-striking signal so as to ensure the success of a thin-film deposition process, and the negative factors of the influences of the components, the structure and the color of a thin film caused by the pneumatic fluctuation of reaction gas because of the extinguishing process of the electric arc are removed. The device of the multi-arc ion plating vacuum electric arc automatic arc-striking method adopts a feedback unit to detect the working condition of the electric arc and uses the detecting result as an identification signal, and according to the identification signal, the control unit judges whether the arc-striking signal is transmitted. The device of the multi-arc ion plating vacuum electric arc automatic arc-striking method replaces a mechanical arc-striking process by an electric activation arc-striking process and avoids pollution caused by mechanical modes, such as the use of arc-striking bars (wires), etc., and the device of the multi-arc ion plating vacuum electric arc automatic arc-striking method can avoid a failure problem caused by the adhesion of the arc-striking wires and a cathode.
Description
Technical field
The present invention relates to a kind of electric arc striking method and device of multi-arc ion coating, refer to a kind of vacuum arc arc automatic starting method and device especially.
Background technology
Multi-arc ion coating is a kind of high efficiency film deposition techniques, and it is a kind of gas phase deposition technology by the vacuum plasma plated film of the high ionization level of high-density.For the electric arc that ignites, adopt mechanical means to carry out the triggering of electric arc usually, but bad phenomenon such as haircuts appear in traditional electro-magnet arc automatic starting device easily.And, adopt the starting rod striking, may cause the starting rod scaling loss, make film be subjected to the pollution of other elements.Therefore, in order to obtain high-quality film,, need improve the striking technology as at semicon industry.
In film deposition process, owing to a variety of causes, as the target material surface situation, power-supply fluctuation etc. can cause arc extinction unexpectedly usually.Usually also comprise the gas phase part because participate in the composition of plated film, the arc extinction of short period of time also can cause the fluctuation of plated film air pressure usually.Thereby cause the fluctuation of membranous layer ingredient, make structure, composition deviation occur, influence the performance of plating piece; Also can make product colour difference occur, influence the visual appearance of product.
Content of the present invention
But the objective of the invention is to provide in order to overcome shortcoming of the prior art a kind of when plated film begins arc automatic starting, when the trend of blow-out or blow-out in coating process, occurring, again fast automatic striking, can significantly reduce the number of times of complete blow-out, avoid composition, the structure of the film that causes because of blow-out inhomogeneous, can eliminate the vacuum arc arc automatic starting method of misalignment.
Another object of the present invention also is to provide a kind of vacuum arc arc automatic starting device that replaces mechanical arc initiation device.
Purpose of the present invention can realize by following measure:
Vacuum arc is in deposition process, and on the vacuum cathode surface, arc plasma is actually by many speckles to be formed.When electric arc had the trend of extinguishing, not all spot extinguished simultaneously, but the part spot extinguishes, and spot extinguish the rising that can cause arc voltage usually; Feedback was controlled the striking again automatically of electric arc after the present invention utilized this characteristic to adopt sensing element with this measure of the change just as a comparison signal.
A kind of vacuum arc arc automatic starting method comprises the steps:
When (1) blow-out or blow-out trend occurring in the ion plating coating process, utilize arc voltage fluctuation to judge the electric arc working order, again whether decision striking; Promptly detect the electric arc operating voltage V of primary source by a feedback element
R, and with this voltage feedback to one striking signal control link, by the electric arc operating voltage V of this controlling unit with primary source
RWith a reference voltage fV
WCompare, as electric arc operating voltage V
RGreater than reference voltage fV
WThe time, then this controlling unit is sent again the striking signal high pressure is added to striking element two ends, and electric arc ignites; Described reference voltage fV
WIn coefficient f be 1 to V
i/ V
W, V
iBe the primary source open circuit voltage, Vw is the electric arc normal working voltage;
(2) after electric arc ignites, the detected electric arc operating voltage of feedback element V
RSmaller or equal to reference voltage fV
WThe time, then controlling unit stops to send the striking signal.
Described striking signal control link also comprises a high pressure link and a Pulse-trigger control link.
Described arc automatic starting method is to utilize the high pressure of an energy storage to prepare at any time to carry out real-time restarting, and this high pressure is by pulse controlled method, extinguishes by judging whether electric arc extinguishes or be about to, and whether decision sends the striking signal.
On primary source, also be provided with high-pressure filteration protection link in addition.
Another object of the present invention also can realize by following measure:
A kind of vacuum arc arc automatic starting device comprises a feedback unit, a control unit; Wherein the input terminus of feedback unit links to each other with the output terminal of the electric arc work primary source of ion plating, the output terminal of primary source also links to each other with the two ends of control unit with the striking element by feedback unit, and the output terminal of feedback unit links to each other with the comparison input terminus of control unit, and the comparison input terminus of control unit also links to each other with a reference voltage.
Described control unit also comprises a high voltage unit and a Pulse-trigger control unit, and the electrical signal of feedback unit links to each other with the unitary relatively input terminus of the Pulse-trigger control of control unit; High voltage unit links to each other with the striking element by the unitary switch circuit of Pulse-trigger control.
Described switch circuit is a thyristor.
Described high voltage unit comprise boost, high-voltage rectifying, high-voltage energy storage are regulated, high-pressure energy storage, electrion pilot circuit.
This device also comprises a high-pressure filteration protected location, and this unit is connected across between the output terminal and arc electrode of primary source.
Described feedback unit is made up of arc voltage testing circuit and clamped circuit thereof.
The present invention has following advantage compared to existing technology:
1, by method of the present invention and device can be when the ion plating plated film begins arc automatic starting, when blow-out or blow-out trend in coating process, occurring, again fast automatic striking, can significantly reduce the number of times of complete blow-out, thereby avoided making the ununiformity of film forming composition, structure, eliminated the deviation of color because of the air pressure fluctuation that blow-out produces.
2, the present invention adopts the mode striking replacement mechanical type striking that electricity triggers, and has avoided the pollution of using mechanical strikings such as starting rod, silk to cause, the Problem of Failure of also having avoided striking silk and negative electrode adhesion to be caused.
Description of drawings
Fig. 1 is the applied 90 ° of arc of curvature magnetic filters of the present invention
1-arc electrode 2-striking element 3-bent magnetic field coil 4-crooked pipeline
5-focusing magnetic field coil 6-negative electrode 7-ventilating pit
Fig. 2 is arc automatic starting schematic circuit diagram of the present invention
Fig. 3 (a) is a feedback unit schematic circuit of the present invention (b)
Fig. 4 is the work schedule oscillogram of primary source of the present invention and arc automatic starting system
Fig. 5 is the synchronous working timing waveform of primary source of the present invention and arc automatic starting system
Embodiments of the present invention
The present invention also will be described in further detail embodiment in conjunction with the accompanying drawings:
A kind of vacuum arc arc automatic starting method comprises the steps:
(1) when the ion plating plated film begins and occur blow-out or blow-out trend in coating process, utilize arc voltage fluctuation to judge the electric arc working order, again whether decision striking; Promptly detect the electric arc operating voltage V of primary source by a feedback element
W, and with this voltage feedback to one striking signal control link, described striking signal control link also comprises a high pressure link and a Pulse-trigger control link; By the electric arc operating voltage V of this controlling unit with primary source
WWith a reference voltage fV
WCompare, as electric arc operating voltage V
WGreater than reference voltage fV
WThe time, then this controlling unit is sent again the striking signal high pressure is added to the two ends of striking element 2, and electric arc ignites; Described reference voltage fV
WIn coefficient f be 1 to V
i/ V
W, V
iBe the primary source open circuit voltage;
(2) after electric arc ignites, the detected electric arc operating voltage of feedback element V
WSmaller or equal to reference voltage fV
WThe time, then controlling unit stops to send the striking signal.
On primary source, also be provided with high-pressure filteration protection link in addition.
The present invention can also be used on other vacuum arc source except that being used for multi-arc ion coating.Arc electrode 1 sends the striking pulse by striking element 2 in negative electrode 6 one sides, lights electric arc, and plasma body is shifted front end face onto under the driving in magnetic field, start working.Fig. 1 meets the example that the present invention uses.The vacuum arc source of being made up of negative electrode 6, arc electrode 1, striking element 2 etc. is installed on the crooked magnetic filter of 90 degree of being made up of bent magnetic field coil 3 and crooked pipeline 4.Cathode material can be selected titanium, copper, carbon etc. for use, or other electro-conductive materials or non-metallic material.
Fig. 2 is arc automatic starting schematic circuit diagram of the present invention.In conjunction with Fig. 2,3, device of the present invention is described.A kind of vacuum arc arc automatic starting device comprises a feedback unit, a control unit; Wherein control unit also comprises a high voltage unit and a Pulse-trigger control unit; Electric arc work primary source links to each other with the striking element of the high voltage unit of control unit, to the high-voltage energy storage capacitor charging, high-voltage energy storage capacitor is that silicon controlled rectifier links to each other by the discharge controlling resistance with the unitary thyristor of Pulse-trigger control to the step-up transformer output voltage after regulating resistance adjustment by its energy storage after the rectification; Wherein the input terminus of feedback unit links to each other with the output terminal of the electric arc work primary source of ion plating, and the output electrical signal of feedback unit links to each other with the comparison input terminus of the Pulse-trigger control device of control unit; One reference voltage also links to each other with the comparison input terminus of Pulse-trigger control device, with the output signal of feedback unit and the reference voltage back output control pulse producer signal of tripping pulse whether relatively, the signal of surge generator can be used for controlling the switch of thyristor by pulse manipulator.
In addition between the output terminal of primary source and arc electrode 1, also be connected with a high-pressure filteration protected location.
Described feedback unit is made up of arc voltage testing circuit and clamped circuit thereof.
With reference to Fig. 3 a is an embodiment of feedback unit of the present invention, and wherein voltage detecting circuit is made up of adjustable resistance R401, resistance R 402 and Zener diode Z401, and voltage stabilizing tube Z402 constitutes clamped circuit; The output terminal of feedback unit is that the electric arc two ends link to each other with the output terminal of primary source, and its output terminal links to each other with the pulse manipulator of control unit.
With reference to Fig. 3 b is another embodiment of feedback unit of the present invention, and wherein voltage detecting circuit is made up of adjustable resistance R401, R404, resistance R 402, R403 and voltage stabilizing tube Z401, Z402, diode D401, D402, triode N401; Voltage stabilizing tube Z403 constitutes clamped circuit.The carrying capacity of the reaction circuit of Fig. 3 b strengthens.
Above-mentioned feedback unit and control unit also can adopt the relative circuit of deriving, or adopt other known circuits.
4,5 work schedules that device of the present invention is described in conjunction with the accompanying drawings more below.1 is that main power voltage wave, 2 is that striking pulse, 3 is that high-voltage energy storage element voltage waveform, 4 is that control unit signal curve, 5 is that striking pulse triggering signal curve, 6 is surge generator pulse output waveform curve among Fig. 4,5.
With reference to Fig. 4, at t
0Constantly, primary source is opened, be ready to work after, control unit output high level control unit signal sends triggering command (curve 4), the high-voltage energy storage element is recharged (curve 3) simultaneously, but because striking pulse triggering signal and surge generator time-delay, at t
1Constantly just open.Therefore, t
0Not striking pulse triggering signal (curve 5) and striking pulse (curve 2) constantly.At t
1Constantly, the surge generator after the time-delay begins to send continuously tripping pulse (curve 6).This moment, the pulse that surge generator is sent passed, at t because the control unit signal still is high level (curve 4)
1Constantly, obtain first striking pulse triggering signal (curve 5); Thyristor is triggered, high-voltage energy storage assembly discharge (curve 3), therefore, t
1Constantly, obtain first striking pulse (curve 2).At this moment, if ignited electric arc, main power voltage descends (curve 1), at t
3Constantly, the high-voltage energy storage element voltage after the discharge is not enough to keep the thyristor conducting, and thyristor automatically shuts down.The high-voltage energy storage assembly begins charging once more, arrives up to second striking pulse triggering signal, sends second triggering signal.Go round and begin again like this.When main power voltage by open circuit voltage V
iDrop to fV
wThe time (at t
3), control unit output low level (curve 4) filters the pulse signal (curve 6) of surge generator.The energy storage again of high-voltage energy storage element is in noble potential.If in plated film, blow-out has taken place, perhaps part blow-out, control unit finds that main power voltage (curve 1) rises to fV
wThe time (at time t
4The place), redirect is high level (curve 4), and the signal of surge generator passes through, and sends striking triggering signal (curve 5) again, and high-voltage energy storage element discharge (curve 3) is sent striking pulse (curve 2), at time t
5The place, electric arc is ignited, and main power voltage descends, and arrives fV at main power voltage
wAfter, the control unit upset is lower level, arc process finishes again.
After plated film finished, primary source cut out, and surge generator stops to send pulse, and the high-voltage energy storage element slowly discharges.
From top trigger process, as can be seen, suitably choose fV
w, can also can play the effect that prevents blow-out so that electric arc when being about to extinguish (perhaps part is extinguished), sending the restarting instruction, thereby plays the effect of quick striking.Make coating process very level and smooth.
It is pointed out that the used surge generator of striking in conjunction with the control unit signal, also can be operated in other array mode of similar approach.Fig. 5 has provided another pulsed mode sequential chart.Among the figure:
1: the main power voltage wave;
2: the striking pulse;
3: high-voltage energy storage element voltage waveform;
4: the control unit signal curve;
5: striking pulse triggering signal curve;
6: surge generator pulse output waveform curve.
Among Fig. 5, signal and control unit signal that surge generator produces are synchronous, also are to find that when feedback unit voltage of supply is higher than fV
wAfter, the control unit signal becomes high level (curve 4), and simultaneously, surge generator begins to send pulse (curve 6), and the pulse of sending triggers high-pressure thyristor as striking pulse triggering signal (curve 5), high-voltage energy storage element discharge (curve 3); Send striking pulse (curve 2), electric arc ignites.
The example of two quick reaction circuit schematic diagrams that Fig. 3 a and Fig. 3 b provide.Resistance R 401 and the different coefficient f of R402 decision.From schematic circuit diagram 3a, draw:
fV
w/(Uz
401+U
output)＝(R
401+R
402)/R
402
f＝(Uz
401+U
output)(R
401+R
402)/(R
402V
w)
V
wDifferent with plasma jet and change along with different cathode materials, R401 can manual adjustment.
Adopt the present invention, use the result good, make coating process very steady, the number of times of blow-out reduces greatly fully, again the time of striking very fast, be difficult for usually discovering.Make coating process and steadily.
Claims (9)
1, a kind of vacuum arc arc automatic starting method comprises the steps:
When (1) blow-out or blow-out trend occurring in the ion plating coating process, utilize arc voltage fluctuation to judge the electric arc working order, again whether decision striking; Promptly detect the electric arc operating voltage V of primary source by a feedback element
R, and with this voltage feedback to one striking signal control link, by the electric arc operating voltage V of this controlling unit with primary source
RWith a reference voltage fV
WCompare, as electric arc operating voltage V
RGreater than reference voltage fV
WThe time, then this controlling unit is sent again the striking signal high pressure is added to the two ends of striking element (2), and electric arc ignites; Described reference voltage fV
WIn coefficient f be 1 to V
i/ V
W
(2) after electric arc ignites, the detected electric arc operating voltage of feedback element V
RSmaller or equal to reference voltage fV
WThe time, then controlling unit stops to send the striking signal.
2, vacuum arc arc automatic starting method as claimed in claim 1, it is characterized in that described arc automatic starting method is to utilize the high pressure of an energy storage to prepare to carry out real-time restarting at any time, and this high pressure is by pulse controlled method, extinguish by judging whether electric arc extinguishes or be about to, and whether decision sends the striking signal.
3, vacuum arc arc automatic starting method as claimed in claim 2 is characterized in that also protecting primary source by set up the method for high-pressure filteration protection link at primary source.
4, a kind of vacuum arc arc automatic starting device is characterized in that this device comprises a feedback unit, a control unit; Wherein the input terminus of feedback unit links to each other with the output terminal of the electric arc work primary source of ion plating, the output terminal of primary source also links to each other with striking element (2) with control unit by feedback unit, and the output terminal of feedback unit links to each other with the comparison input terminus of control unit, and the control unit input terminus also links to each other with a reference voltage.
5, vacuum arc arc automatic starting device as claimed in claim 4, it is characterized in that described control unit also comprises a high voltage unit and a Pulse-trigger control unit, the electrical signal of feedback unit links to each other with the unitary relatively input terminus of the Pulse-trigger control of control unit; High voltage unit links to each other with the striking element by the unitary switch circuit of Pulse-trigger control.
6, vacuum arc arc automatic starting device as claimed in claim 5 is characterized in that described switch circuit is a thyristor.
7, vacuum arc arc automatic starting device as claimed in claim 5, it is characterized in that described high voltage unit comprise boost, high-voltage rectifying, high-voltage energy storage are regulated, high-pressure energy storage, electrion pilot circuit.
8, vacuum arc arc automatic starting device as claimed in claim 4 is characterized in that this device also comprises a high-pressure filteration protected location, and this unit is connected across between the output terminal and arc electrode (1) of primary source.
9, vacuum arc arc automatic starting device as claimed in claim 4 is characterized in that described feedback unit is made up of arc voltage testing circuit and clamped circuit thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02141205 CN1207433C (en) | 2002-07-02 | 2002-07-02 | Vacuum electric arc automatic arc-striking method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02141205 CN1207433C (en) | 2002-07-02 | 2002-07-02 | Vacuum electric arc automatic arc-striking method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1465739A CN1465739A (en) | 2004-01-07 |
| CN1207433C true CN1207433C (en) | 2005-06-22 |
Family
ID=34147745
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02141205 Expired - Fee Related CN1207433C (en) | 2002-07-02 | 2002-07-02 | Vacuum electric arc automatic arc-striking method and apparatus |
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| Country | Link |
|---|---|
| CN (1) | CN1207433C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103981493B (en) * | 2014-05-30 | 2016-04-27 | 大连理工常州研究院有限公司 | A kind of plasma film coating equipment arc initiation device |
| CN113671415A (en) * | 2021-10-21 | 2021-11-19 | 国网陕西省电力公司电力科学研究院 | High-voltage single-phase grounding test device and use method |
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2002
- 2002-07-02 CN CN 02141205 patent/CN1207433C/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN1465739A (en) | 2004-01-07 |
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