CN1206553C - One-dimensinal micromechanical electronic NXN optical space exchanger - Google Patents

One-dimensinal micromechanical electronic NXN optical space exchanger Download PDF

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CN1206553C
CN1206553C CNB031415415A CN03141541A CN1206553C CN 1206553 C CN1206553 C CN 1206553C CN B031415415 A CNB031415415 A CN B031415415A CN 03141541 A CN03141541 A CN 03141541A CN 1206553 C CN1206553 C CN 1206553C
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output
micromirror
light
dimension
slab
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CN1477412A (en
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朱慎立
胡卫生
姜淳
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The present invention relates to a one-dimensional micromechanical electronic N*N optical space switch which belongs to the technical field of optical devices. The present invention comprises micro lenses, output panels, torsion pendulum elastic devices, output collimators and N*1 output couplers / multiplexers, wherein the micro lenses are arranged in parallel in a one-dimensional mode, and are driven by the torsion pendulum elastic devices; the torsion pendulum elastic devices are arranged under the micro lenses, the output collimators are embedded on the output panels, and the couplers / multiplexers are arranged behind the output panels; the output ends of the N output collimator are connected with the N input ends of the N*1 output coupler / multiplexer on each output panel, and the output ends of the N*1 couplers / multiplexers are respectively used as one output end of the N*N switch. The present invention adopts the combination of micro-electromechanical system (MEMS) techniques and coupling/multiplexing techniques and a simple semi-digital control method to complete non-blocking N*N optical switching. The number of the lenses is reduced, and meanwhile, the present invention has the advantages of convenient control and simple structure.

Description

One dimension micromechanics electronics N * N light space switch
Technical field
The present invention relates to a kind of micromechanics electronic exchanger, the particularly a kind of one dimension micromechanics electronics N * N light space switch that can carry out clog-free light exchange belongs to the optical device field.
Background technology
MEMS light space switch is the core devices of optical cross-connect (OXC) and light bifurcated multiplexer (OADM).At present, the ripe MEMS light space switch that has been reported in media has the 3-D light space switch of Lucent, the digital smooth space switch of the 2-D of OMM, or the like.These light space switch have eyeglass quantity many respectively under same give-and-take conditions, the shortcoming that control is complicated.Find by literature search, people such as De P Dobblaere are at IEEECommunication Magazine (ieee communication magazine), 2002, (3), on delivered " Digital MEMSfor Optical Switching. " (" the digital mems optical switch that is used for the light exchange ") literary composition, this article has been introduced OMM light space switch, the eyeglass of this smooth space switch is 2-D and arranges, on silicon substrate, right by the micro lens that orthogonal configuration is fixing, the movable mirror of configuration on its right angle orientation, by the optical fiber emitted light beams, after micro lens becomes light beam in space transmission, the movable mirror that in the light transmission way, is provided with or perpendicular to thirty years of age of substrate, by small driver, light beam is changed into the right angle, or lie in and do not hinder light beam directly to advance on the substrate, play on-off action, but this light space switch exists eyeglass quantity many, the deficiency that control is complicated.
Summary of the invention
The present invention is directed to deficiency and defective in the background technology, propose a kind of one dimension micromechanics electronics N * N light space switch, this light space switch eyeglass quantity is few, and adopts easy half digital control mode, makes it solve above-mentioned deficiency.
The present invention is achieved by the following technical solutions, the present invention includes: micromirror, output slab rocks elastic device, output collimator, N * 1 output coupling/multiplexer.Its connected mode is: micromirror is arranged in parallel by one dimension, and by rocking the elastic device driving, rock elastic device and be arranged on the below of micromirror, output collimator is embedded on the output slab, coupling/multiplexer is in the back of output slab, the output terminal of N all output collimators connects N input end of N * 1 output coupling/multiplexer on each output slab, and the output terminal of N * 1 output coupling/multiplexer is as an output terminal output of one dimension micromechanics electronics N * N light space switch.The input parallel light is incident in micromirror, and according to the different conditions of a spatial degrees of freedom of micromirror, reflection enters different output faces respectively, is embedded with output collimator in the output face, converges into same coupling mechanism after the output collimator output of each output face.Finished clog-free N * N light exchange like this.
N restraints N the input of parallel input light as N * N optical exchanger, and the input back relies on by rocking the micromirror reflection that elastic device drives.Rock elastic device and be located at the below of micromirror, when impressed voltage, the action of rocking elastic device drives micromirror and rotates, micromirror has the rotational action of rocking of a spatial degrees of freedom, and the direction vector that rocks is always parallel with the normal direction of micromirror with the plane that parallel input light direction vector is formed.
Reflection output light is reflected into the output slab that is embedded with output collimator, and the output collimator of the N on each output slab is perpendicular to this output slab, and reflection output light positive is for the input end incident of output collimator, promptly perpendicular to each output slab incident.Parallel input light direction vector is parallel with the normal direction of micromirror all the time with the plane that reflection output light direction vector is formed.
The present invention has substantial characteristics and marked improvement, the present invention is directed to the deficiency that exists in the background technology, one dimension micromechanics electronics N * N light space switch is proposed, use minimum micromirror, but can obtain identical N * N and exchange effect, with 4 * 4 array of photoswitch is example, one dimension micromechanics electronic light switch arrays use 4 micromirror, two dimension micromechanics electronic light switch arrays use 16, when N is big, one dimension micromechanics electronic light switch arrays use N piece micromirror, and two-dimentional micromechanics electronic light switch arrays use N 2Piece; Drive micromirror along separate routes by rocking elastic device, close the road with output coupling/multiplexer again, promptly adopted the combination of MEMS technology and coupling/multiplex technique light, when having reduced eyeglass quantity, control method and simple in structure.And the reflection spot of one dimension micromechanics electronic light switch arrays is equally far away apart from the distance of each output slab, so the problem (being that port number is limited in 32 * 32) of two-dimentional micromechanics electronic light switch arrays can not occur.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention
Fig. 2 is the structural representation of output slab of the present invention
Fig. 3 is an A face output shown in Figure 1 back coupling/multiplexing synoptic diagram
Fig. 4 is the present invention's 1 * 4 lens array synoptic diagram
Embodiment
As shown in Figure 1, the present invention includes: micromirror 1, output slab 2 rocks elastic device 3, output collimator 4, N * 1 output coupling/multiplexer 5.Its connected mode is: micromirror 1 is arranged in parallel by one dimension, and by rocking elastic device 3 drivings, rock elastic device 3 and be arranged on the below of micromirror 1, output collimator 4 is embedded on the output slab 2, N * 1 output coupling/multiplexer 5 is in the back of output slab 2, the output terminal of N all output collimators 4 connects N input end of N * 1 output coupling/multiplexer 5 on each output slab 2, and the output terminal of N * 1 output coupling/multiplexer 5 is as an output terminal output of whole interchanger.
N restraints N the input of parallel input light as the overall optical interchanger, and the input back relies on by rocking micromirror 1 reflection that elastic device 3 drives.Rock elastic device 3 and be placed in the below of micromirror 1, when impressed voltage, the action of rocking elastic device 3 drives micromirror 1 and rotates, micromirror 1 has the rotational action of rocking of a spatial degrees of freedom, and the direction vector that rocks is always parallel with the normal direction of micromirror with the plane that parallel input light direction vector is formed.
Reflection output light is reflected into the output slab 2 that is embedded with output collimator 4, N output collimator 4 on each output slab 2 is perpendicular to this output slab 2, reflection output light positive is for the input end incident of output collimator 4, promptly perpendicular to each output slab 2 incident.Parallel input light direction vector is parallel with the normal direction of micromirror all the time with the plane that reflection output light direction vector is formed.
As shown in Figure 2, the A on the output slab 2, B, C, D4 face, the circle that red point is arranged on each face represent that this output collimator 4 has light, this shows and have only an output collimator 4 that light is arranged on each output slab, and figure as can be known thus, this routine routing is 1->3,2->1,3->4,4->2.
As shown in Figure 3, the light of 4 output collimators, 4 outputs on the A face is coupled by one 4 * 1 output coupling/multiplexer 5, other B, and C, the output coupling/multiplexed situation of D output face is similar.A face coupling/multiplexing output offspring mass color exchanges to 1 channel, and B face coupling/multiplexing output offspring mass color exchanges to 2 channels, and C face coupling/multiplexing output offspring mass color exchanges to 3 channels, and D face coupling/multiplexing output offspring mass color exchanges to 4 channels.
As shown in Figure 4, with 4 inputs, 1 * 4 lens array of 4 outputs is an example, and control method of the present invention is described below:
Because the state one of the eyeglass of one dimension micromechanics electronics 4 * 4 array of photoswitch has 4 kinds, so available half digital (why being referred to as the half word, is the digital difference with 2-D) rocks the control of eyeglass drive controlling method.The interface circuit serial input control code of one dimension micromechanics electronic switch relies on a serial line interface, and the electrical specification of whole interface group is almost completely the same with the interface of 2-D.
Serial input and corresponding micromirror are rotated and are seen as giving a definition:
Serial input control code " 00 " is rocked corresponding to micromirror and is made reflection output light turn to the A face;
Serial input control code " 01 " is rocked corresponding to micromirror and is made reflection output light turn to the B face;
Serial input control code " 10 " is rocked corresponding to micromirror and is made reflection output light turn to the C face;
Serial input control code " 11 " is rocked corresponding to micromirror and is made reflection output light turn to the D face.
For example when routing be 1->3,2->1,3->4,4->2 o'clock should turn to the C face with the light of input 1, the light of input 2 turns to the A face, the light of input 3 turns to the D face, the light of input 4 turns to the B face, corresponding serial input control code " 10001101 ".
Be generalized to one dimension micromechanics electronics 2 N* 2 NArray of photoswitch, the control code of serial input is N * 2 NThe position, coded system is to top similar.

Claims (4)

1, a kind of one dimension micromechanics electronics N * N light space switch, comprise: micromirror (1), output slab (2), rock elastic device (3), output collimator (4), N * 1 output coupling/multiplexer (5), it is characterized in that, connected mode is: micromirror (1) is arranged in parallel by one dimension, and by rocking elastic device (3) driving, rock elastic device (3) and be arranged on the below of micromirror (1), output collimator (4) is embedded on the output slab (2), N * 1 output coupling/multiplexer (5) is in the back of output slab (2), and the output terminal that each output slab (2) is gone up all N output collimators (4) connects N the input end that coupling/multiplexer (5) is exported in N * 1, and the output terminal of N * 1 output coupling/multiplexer (5) is as an output terminal output of one dimension micromechanics electronics N * N light space switch.
2, one dimension micromechanics electronics N according to claim 1 * N light space switch, it is characterized in that, N output collimator (4) on each output slab (2) is perpendicular to this output slab (2), reflection output light positive is for the input end incident of output collimator (4), promptly perpendicular to each output slab (2) incident, parallel input light direction vector is parallel with the normal direction of micromirror (1) all the time with the plane that reflection output light direction vector is formed.
3, one dimension micromechanics electronics N according to claim 1 * N light space switch, it is characterized in that, N restraints N the input of parallel input light as the overall optical interchanger, the input back relies on micromirror (1) reflection, when impressed voltage, the action of rocking elastic device (3) drives micromirror (1) and rotates, and micromirror (1) has the rotational action of rocking of a spatial degrees of freedom, and the direction vector that rocks is always parallel with the normal direction of micromirror (1) with the plane that parallel input light direction vector is formed.
4, according to claim 1 or 2 or 3 described one dimension micromechanics electronics N * N light space switch, it is characterized in that, by the half digital eyeglass drive controlling of rocking.
CNB031415415A 2003-07-10 2003-07-10 One-dimensinal micromechanical electronic NXN optical space exchanger Expired - Fee Related CN1206553C (en)

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CN1206553C true CN1206553C (en) 2005-06-15

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CN108828712B (en) * 2018-06-11 2020-10-16 上海交通大学 Large-scale integrated optical switch chip based on optical phased array

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