CN1205665C - Method for manufacturing inlaid structure - Google Patents
Method for manufacturing inlaid structure Download PDFInfo
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- CN1205665C CN1205665C CN 01129351 CN01129351A CN1205665C CN 1205665 C CN1205665 C CN 1205665C CN 01129351 CN01129351 CN 01129351 CN 01129351 A CN01129351 A CN 01129351A CN 1205665 C CN1205665 C CN 1205665C
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- dielectric layer
- manufacture method
- metal level
- nitrogen
- vapor deposition
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Abstract
The present invention relates to a method for manufacturing inlaid structures, which comprises the following steps: a substrate is offered, and a dielectric layer is formed on the substrate; materials of the dielectric layer are nitrogen-oxygen silicides, and the reflectivity of the dielectric layer is about 1.55 to 1.74; subsequently, an opening is formed in the dielectric layer, and the opening is full of metal layers which are formed on the substrate; then, the surface of the dielectric layer is used as a grinding end point, and the metal layers outside the opening are removed by a chemical machinery grinding method. The ground removing rate of the dielectric layer is less than that of the metal layers.
Description
Technical field
The present invention relates to the manufacture method processing procedure of a kind of semiconductor subassembly (Semiconductor device), and be particularly related to the manufacture method of a kind of inlaying (Damascene) structure.
Background technology
In present semiconductor technology, because conductor material is imbedded in the dielectric layer to form the lead or the mosaic technology of formation contact hole (Contact)/interlayer hole (Via), have when conductor material changes, its process technology must not change thereupon, and the method for dielectric layer formation opening can adopt the electric paste etching method (Plasma Etching) or reactive ion-etching (the Reactive Ion Etch of technology maturation, RIE) realize, and fiting chemical mechanical milling method (ChemicalMechanical Polishing, CMP) use, possibility can reach the advantages such as global planarization of dielectric layer.Therefore, be the technology that has very much glamour with mosaic technology fiting chemical mechanical milling method with the process that forms mosaic texture.
The above-mentioned technology of known employing is after forming dielectric layer in the substrate that is formed with conductive region to form the method for mosaic texture, forms on dielectric layer and grinds stop layer.Then, in grinding stop layer and dielectric layer, form opening, this opening can be contact window, interlayer hole opening, lead raceway groove, inlay opening etc. one of them, and expose the conductive region of substrate.Then, deposit the layer of metal layer comprehensively and fill up opening in substrate.At last, again with the metal level outside the chemical mechanical milling method removal opening.
Yet, the mosaic texture that forms with above-mentioned technology has following problem: the grinding selectivity ratio of formed grinding stop layer of known technology and metal level is approaching, when metal level being ground with chemical mechanical milling method, and be ground to when grinding stop layer, the high area of pattern density on wafer, can be because metal level and the effect of being ground the close and pattern density (Pattern density) of the rate that removes of grinding stop layer, and cause the material of dielectric layer to run off, the generation of corrosion of metal level (Erosion) and dish effect problems such as (Dishing effect).
Summary of the invention
The present invention proposes a kind of manufacture method of mosaic texture, can use with metal level to have the dielectric layer of the material of high grinding selectivity ratio as mosaic texture, must additionally not form the grinding stop layer.
The present invention proposes a kind of manufacture method of mosaic texture, can avoid producing when with chemical mechanical milling method metal level being ground problems such as the corrosion of loss, metal level of dielectric layer and dish effect.
The present invention proposes a kind of manufacture method of mosaic texture, a substrate is provided, in substrate, form dielectric layer again, wherein the material of this dielectric layer is the nitrogen-oxygen-silicon thing, and this nitrogen-oxygen-silicon thing is to have 1.55 to 1.74 reflectivity under the rayed of 673nm at wavelength, and, have high grinding selectivity ratio between the predetermined metal level that forms of this dielectric layer and subsequent process steps.Then, in dielectric layer, form opening.Then, in substrate, form the metal level that fills up opening.Thereafter, using chemical mechanical milling method, serves as to grind stop layer with the dielectric layer surface, removes the metal level outside the opening.
The invention provides a kind of manufacture method of contact hole/interlayer hole, this manufacture method comprises provides a substrate; Form a dielectric layer in this substrate, wherein the material of this dielectric layer is the nitrogen-oxygen-silicon thing, and this dielectric layer has 1.55 to 1.74 reflectivity under the rayed of 673nm wavelength; In this dielectric layer, form one interlayer hole/contact window; On this dielectric layer, form a metal level that fills up this interlayer hole/contact window; With this dielectric layer surface is grinding endpoint, removes this metal level outside this interlayer hole/contact window with chemical mechanical milling method.
The invention provides a kind of manufacture method of plain conductor, this manufacture method comprises: a substrate is provided; Form a dielectric layer in this substrate, wherein the material of this dielectric layer is the nitrogen-oxygen-silicon thing, and this dielectric layer has 1.55 to 1.74 reflectivity under the rayed of 673nm wavelength; In this dielectric layer, form a lead raceway groove; On this dielectric layer, form a metal level that fills up this lead raceway groove; With this dielectric layer surface is grinding endpoint, removes this metal level outside this lead raceway groove with chemical mechanical milling method.
From the above, key character of the present invention is to use a kind of and metal level to have the dielectric layer of the material of high grinding selectivity ratio as mosaic texture.Because this dielectric layer itself promptly has high grinding selectivity ratio with metal level, therefore must on dielectric layer, additionally not form one deck again and grind stop layer or cap layer, and can reduce processing step.
And, because dielectric layer used in the present invention has high grinding selectivity ratio to metal level, just the quilt of the rate that removes less than metal level that ground of dielectric layer grinds the rate that removes, and be higher than the grinding selectivity ratio of known employed grinding stop layer to metal level, therefore, when metal level being ground to dielectric layer, can not produce problems such as the corrosion of loss, metal level of dielectric layer and dish effect with chemical mechanical milling method.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. elaborate:
Description of drawings
Figure 1A to Fig. 1 D is the section signal of manufacturing process of a kind of double-metal inlaid structure of preferred embodiment of the present invention.
Description of reference numerals:
100: substrate
102: conductive region
104: dielectric layer
106: opening
108: metal level
108a: conductor layer
Embodiment
Figure 1A to Fig. 1 D is the generalized section of manufacturing process of a kind of double-metal inlaid structure of preferred embodiment of the present invention.
At first, please refer to Figure 1A, a substrate 100 at first is provided, in substrate 100, be formed with conductive region 102.Then, in substrate 100, form one dielectric layer 104, wherein the material of this dielectric layer 104 is the nitrogen-oxygen-silicon thing, and this nitrogen-oxygen-silicon thing has the reflectivity about 1.55 to 1.74 under the rayed of 673nm wavelength, and, have high grinding selectivity ratio between the predetermined metal level that forms of dielectric layer 104 that this nitrogen-oxygen-silicon Chemistry and Physics Institute forms and subsequent process steps.The method that forms this dielectric layer for example is to use electricity slurry enhanced chemical vapor deposition method (Plasma Enhanced Chemical Vapor Deposition, PECVD), wherein implement this electricity slurry enhanced chemical vapor deposition rule temperature about 200 degree Celsius are spent to Celsius 600 in this way; With 0.1 degree; With 0.1 the holder to 5 the holder about operating pressure; And with the operand power about 50W to 1000W; Feeding silicomethane, nitrous oxide and nitrogen is that gas forms, and the ratio of silicomethane/nitrous oxide is about 0.05 to 1.5; The flow of nitrogen is about 10sccm to 1000sccm.
Then, please refer to Figure 1B, in dielectric layer 104, form the opening 106 of conduction region 102 below exposing, this opening 106 look different process can be contact window, interlayer hole opening, lead raceway groove or inlay opening one of them.The method that forms this opening 106 for example is to form patterned light blockage layer (not marking among the figure) on dielectric layer 104, is the cover curtain again with the photoresist layer, removes part dielectric layer 104 with the anisotropic etching method.
Then, please refer to Fig. 1 C, in substrate 100, form layer of metal layer 108, and this metal level 108 fills up opening 106.Wherein the material of metal level 106 for example be selected from group that aluminium, copper, tungsten metal formed one of them, the method that forms this metal level 108 for example is chemical vapour deposition technique or direct magnetic control sputtering method.
Then, please refer to Fig. 1 D, remove the metal level 108 of part, fill up the conductor layer 108a of opening 106 with formation.The method that wherein forms conductor layer 108a for example is to use chemical mechanical milling method, serves as to grind stop layer with the surface of dielectric layer 104, removes the metal level 108 outside the opening 106.In this cmp step, owing to have high grinding selectivity ratio between dielectric layer 104 used in the present invention and the metal level 108, just the quilt of the rate that removes less than metal level 108 that ground of dielectric layer 104 grinds the rate that removes, therefore, when metal level being ground to dielectric layer, can not produce problems such as the corrosion of loss, metal level of dielectric layer and dish effect with chemical mechanical milling method.
In sum, key character of the present invention is to use a kind of and metal level to have the dielectric layer of the material of high grinding selectivity ratio as mosaic texture.Because this dielectric layer itself promptly and between the metal level has high grinding selectivity ratio, therefore must on dielectric layer, additionally not form again and grind stop layer or cap layer, and can reduce processing step.
And, because dielectric layer used in the present invention has high grinding selectivity ratio to metal level, just the rate that removes of being ground of dielectric layer is removed rate less than grinding of metal level, and is higher than the grinding selectivity ratio of the employed grinding stop layer of known technology to metal level.Therefore, when metal level being ground to dielectric layer, can not produce problems such as the corrosion of loss, metal level of dielectric layer and dish effect with chemical mechanical milling method.
Though the present invention with preferred embodiment openly as above; but it is not in order to qualification the present invention, any those skilled in the art, without departing from the spirit and scope of the present invention; can do different changes and retouching, but protection scope of the present invention should be with being as the criterion that claims were limited.
Claims (12)
1. the manufacture method of a mosaic texture, it is characterized in that: this manufacture method comprises the following steps:
One substrate is provided;
Form a dielectric layer in this substrate, wherein the material of this dielectric layer is the nitrogen-oxygen-silicon thing, and this dielectric layer has 1.55 to 1.74 reflectivity under the rayed of 673nm wavelength;
In this dielectric layer, form an opening;
On this dielectric layer, form a metal level that fills up this opening;
With this dielectric layer surface is grinding endpoint, removes this metal level outside this opening with chemical mechanical milling method, and wherein the rate that removes of being ground of this dielectric layer is ground the rate that removes less than this metal level.
2. the manufacture method of mosaic texture according to claim 1, it is characterized in that: the method that forms this dielectric layer comprises an electricity slurry enhanced chemical vapor deposition method, and should comprise silicomethane, nitrous oxide and nitrogen by the employed process gas of electricity slurry enhanced chemical vapor deposition method.
3. the manufacture method of mosaic texture according to claim 2, it is characterized in that: the ratio of the silicomethane/nitrous oxide of this process gas is 0.05 to 1.5; The flow of nitrogen is 10sccm to 1000sccm.
4. the manufacture method of mosaic texture according to claim 2 is characterized in that: the temperature of implementing this electricity slurry enhanced chemical vapor deposition method is that 200 degree Celsius are to 600 degree Celsius; Operating pressure is that 0.1 holder is to 5 holders; Operand power is 50W to 1000W.
5. the manufacture method of a contact hole/interlayer hole, it is characterized in that: this manufacture method comprises the following steps:
One substrate is provided;
Form a dielectric layer in this substrate, wherein the material of this dielectric layer is the nitrogen-oxygen-silicon thing, and this dielectric layer has 1.55 to 1.74 reflectivity under the rayed of 673nm wavelength;
In this dielectric layer, form one interlayer hole/contact window;
On this dielectric layer, form a metal level that fills up this interlayer hole/contact window;
With this dielectric layer surface is grinding endpoint, removes this metal level outside this interlayer hole/contact window with chemical mechanical milling method.
6. the manufacture method of contact hole/interlayer hole according to claim 5, it is characterized in that: the method that forms this dielectric layer comprises an electricity slurry enhanced chemical vapor deposition method, and should comprise silicomethane, nitrous oxide and nitrogen by the employed process gas of electricity slurry enhanced chemical vapor deposition method.
7. the manufacture method of contact hole/interlayer hole according to claim 6, it is characterized in that: the ratio of the silicomethane/nitrous oxide of this process gas is 0.05 to 1.5; The flow of nitrogen is 10sccm to 1000sccm.
8. the manufacture method of contact hole/interlayer hole according to claim 6 is characterized in that: the temperature of implementing this electricity slurry enhanced chemical vapor deposition method is that 200 degree Celsius are to 600 degree Celsius; Operating pressure is that 0.1 holder is to 5 holders; Operand power is 50W to 1000W.
9. the manufacture method of a plain conductor, it is characterized in that: this manufacture method comprises the following steps:
One substrate is provided;
Form a dielectric layer in this substrate, wherein the material of this dielectric layer is the nitrogen-oxygen-silicon thing, and this dielectric layer has 1.55 to 1.74 reflectivity under the rayed of 673nm wavelength;
In this dielectric layer, form a lead raceway groove;
On this dielectric layer, form a metal level that fills up this lead raceway groove;
With this dielectric layer surface is grinding endpoint, removes this metal level outside this lead raceway groove with chemical mechanical milling method.
10. the manufacture method of plain conductor according to claim 9, it is characterized in that: the method that forms this dielectric layer comprises an electricity slurry enhanced chemical vapor deposition method, and should comprise silicomethane, nitrous oxide and nitrogen by the employed process gas of electricity slurry enhanced chemical vapor deposition method.
11. the manufacture method of plain conductor according to claim 9 is characterized in that: the ratio of the silicomethane/nitrous oxide of this process gas is 0.05 to 1.5; The flow of nitrogen is 10sccm to 1000sccm.
12. the manufacture method of plain conductor according to claim 9 is characterized in that: the temperature of implementing this electricity slurry enhanced chemical vapor deposition method is that 200 degree Celsius are to 600 degree Celsius; Operating pressure is that 0.1 holder is to 5 holders; Operand power is 50W to 1000W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01129351 CN1205665C (en) | 2001-06-13 | 2001-06-13 | Method for manufacturing inlaid structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01129351 CN1205665C (en) | 2001-06-13 | 2001-06-13 | Method for manufacturing inlaid structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1326222A CN1326222A (en) | 2001-12-12 |
| CN1205665C true CN1205665C (en) | 2005-06-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01129351 Expired - Lifetime CN1205665C (en) | 2001-06-13 | 2001-06-13 | Method for manufacturing inlaid structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1205665C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100337315C (en) * | 2004-02-03 | 2007-09-12 | 旺宏电子股份有限公司 | Method for self-flatening dielectric layer |
| JP5654365B2 (en) * | 2011-01-26 | 2015-01-14 | 株式会社ディスコ | Grinding equipment |
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2001
- 2001-06-13 CN CN 01129351 patent/CN1205665C/en not_active Expired - Lifetime
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| Publication number | Publication date |
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| CN1326222A (en) | 2001-12-12 |
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Granted publication date: 20050608 |