CN1204388C - Method of preparing electron microscopic film sample of macro powder-particle material - Google Patents

Method of preparing electron microscopic film sample of macro powder-particle material Download PDF

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Publication number
CN1204388C
CN1204388C CN 03136601 CN03136601A CN1204388C CN 1204388 C CN1204388 C CN 1204388C CN 03136601 CN03136601 CN 03136601 CN 03136601 A CN03136601 A CN 03136601A CN 1204388 C CN1204388 C CN 1204388C
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film
preparation
powder
powder particle
copper
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CN1455238A (en
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田文怀
高红叶
阎时建
其鲁
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Peking University
University of Science and Technology Beijing USTB
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Peking University
University of Science and Technology Beijing USTB
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Abstract

The present invention provides a method for preparing an electron microscopic film sample of a large powder-particle material, which comprises the preparation of an electrodeposited film, the preparation of an electrolytic film and ion thinning technology. A DC power supply is used in electrodeposition; an anode 3 and a cathode 4 are inserted into electrodepositing solution 9; the electrodepositing solution comprises the following ingredients: 170 g/l to 260 g/l of CuSO4, 50 g/l to 80 g/l of H2SO4 and 0.01 g/l to 0.1 g/l of Cl<->. A magnetic stirring device is used for agitation in the electrodepositing process; the agitating speed is between 60 r/m to 125 r/m. Electrolytic double spraying technology is used for further thinning the electrodeposited film. As for nonconductive powder particles, the ion thinning technology is used for further thinning the electrolytic film. The present invention has the advantages that a large granule powder material can be made into an electron microscope film sample, and the direct observation of an electron microscope is successfully realized.

Description

A kind of method for preparing the electron microscope film sample of big powder particle material
Technical field:
The invention belongs to the electron microscope film sample preparing technical field, particularly provide a kind of method for preparing the electron microscope film sample of big powder particle material, the problem of the preparation difficulty of electron microscope film sample when solving big powder particle material and carrying out microstructure, crystal structure, constituent analysis.
Background technology:
The sample that is used for transmission electron microscope observation owing to a little less than the penetration capacity of electronics, require its thickness as thin as a wafer, is generally between 5~200nm.Sample by this requirement preparation is called as electron microscope film sample.For the bulk metal sample, general by (1) mechanical reduction, (2) chemical reduction, these three processes of (3) electropolishing attenuate are directly made film.For the dusty material of granularity, usually powder particle is placed on and supports that thinner powder then need be placed on the supporting film and directly observe on the net less than 200nm.But, when disperseing, can not reach homodisperse effect with common little grid because particle is less.Sample usually has agglomeration when observing under Electronic Speculum, makes the viewing area thickening, and electronics is worn not saturating sample, thereby can not form diffraction and transmission spot, also just can not form diffraction contrast image, makes the electron microscopic observation failure.For special sample, need to adopt special method to prepare.As patent " technology of preparing of magnetic liquid electron microscopic sample " by South China Science ﹠ Engineering University's application, application number 98121493.2, this invention has solved the problem with Electronic Speculum Direct observation and research magnetic liquid, sample making is simple, utilization factor is high, can be reflected in surface appearance feature and the internal particle pattern and the distribution of the magnetic liquid under the action of a magnetic field.
For bigger powder particle, as the dusty material of granularity greater than 500nm, because particle is bigger, adopting common little grid to disperse is to meet the requirements of.Even the dusty material that granularity is little owing to the existence of agglomeration, does not reach expected effect when adopting little grid to disperse.For these problems at present in document record method also still not yet in effect solve.
Summary of the invention:
The objective of the invention is to: a kind of method for preparing the electron microscope film sample of big powder particle material is provided, solve the dusty material of big (diameter is greater than 500nm) of (1) particle, particularly nonconducting powdered sample, because particle is bigger, disperse with common little grid, under Electronic Speculum, do not reach observing effect; (2) even the dusty material of particle less (less than 500nm), makes the Direct observation failure of Electronic Speculum because the existence of agglomeration does not reach homodisperse effect yet.In order to address these problems, the present invention adopts following method and technology, makes oarse-grained dusty material also can make electron microscope film sample, has successfully realized the Direct observation of Electronic Speculum.
The present invention includes: the preparation of electrodeposited film, the preparation of electrolytic membrane, ion milling technology.
(1) preparation of electrodeposited film: adopt direct supply in electro-deposition, voltage is: 1 volt~15 volts, current density is: 20 milliamperes/decimeter 2~2 peace/decimetres 2, anode 3, negative electrode 4 are inserted in the electric depositing solution 9, anode is a fine copper, the composition of electric depositing solution is CuSO 4: 170~260 grams per liters, H 2SO 4: 50~80 grams per liters, Cl -: 0.01~0.1 grams per liter sees Table 2.Use magnetic stirrer in electrodeposition process, speed is 60~125 rev/mins, and the effect of magnetic stirring apparatus is to guarantee that solution concentration is even, and can take away the blibbing of electro-deposition sample, guarantees surface quality.Thermometer 6 and well heater 10 have been formed temperature-controlling system, make under the constant temperature that is deposited on 30 ℃~50 ℃ to carry out.Filtrator 7 can filtration residue, because residue can have influence on the deposited samples surface quality.Can control sample thickness by the control time, the time is controlled between 10 minutes~2 hours.Adopt the method for electro-deposition that powder packets is embedded in the fine copper.For powder can be distributed equably, in electrodeposition process, utilize electric absorption principle that powder is adsorbed on the copper matrix equably.Electro-deposition process parameter sees Table 1, and the electric depositing solution composition sees Table 2, and the technology of preparing synoptic diagram of electrodeposited film is seen Fig. 1.
(2) preparation of electrolytic membrane: utilize the two spray techniques of electrolysis that electrodeposited film is carried out further attenuate.In the thin district that the two sprays of electrolysis obtain, just can see the powder particle that is buried by copper-clad.If powder particle can conduct electricity, powder particle also can be along with copper is thinned together.If powder particle is non-conductive, though powder particle can not be thinned because the copper sheet matrix by attenuate gradually, makes powder particle expose surface at the copper sheet matrix.
(3) ion milling: for nonconducting powder particle, adopt the ion milling technology that electrolytic membrane is carried out further attenuate, at this moment powder particle can obtain sufficient attenuate, until carrying out electron microscopic observation owing to expose on the surface of copper film matrix.
Table 1 electro-deposition process parameter
Voltage 1 volt~15 volts
Current density 20 milliamperes/decimeter 2~2 peace/decimetres 2
Temperature 30℃~50℃
Magnetic stirring apparatus speed 60~125 rev/mins
Anode material Cu
Cathode material Stainless steel, Ti
Electrodeposition time 10 minutes~3 hours
Electric depositing solution composition such as table 2:
Table 2 electric depositing solution composition
CuSO 4 170~260 grams per liters
H 2SO 4 50~80 grams per liters
Cl - 0.01~0.1 grams per liter
Water Surplus
The invention has the advantages that: make oarse-grained dusty material can make electron microscope film sample, successfully realized the Direct observation of Electronic Speculum.
Description of drawings:
Fig. 1 is the technology of preparing synoptic diagram of electrodeposited film of the present invention, wherein direct supply 1, controller 2, anode 3, negative electrode 4, stirrer 5, thermometer 6, filtrator 7, pump 8, electric depositing solution 9, well heater 10.
Embodiment:
As Fig. 1 anode is fine copper, and negative electrode is a corrosion resistant plate, with electric depositing solution (CuSO 4200g/l, H 2SO 460g/l, Cl -0.05g/l) and the big powder that will deposit, then negative electrode (fine copper) and anode (stainless steel) are inserted respectively in the electric depositing solution, the two poles of the earth are applied certain voltage just can begin deposition.Control sedimentation velocity and deposition quality by Control current, voltage, temperature.The effect of stirrer is to guarantee that solution concentration is even, and can take away the blibbing of electro-deposition sample, guarantees surface quality.Thermometer and well heater have been formed temperature-controlling system, make to be deposited under the constant temperature to carry out.Filtrator can filtration residue, because residue can have influence on the deposited samples surface quality.Can control sample thickness by the control time.
Example 1: concrete implementation condition is as shown in table 3
Concrete implementation condition of table 3 and result
Project Implementation condition and electrodeposited film effect
The electric depositing solution composition CuSO 4180 grams per liters, H 2SO 460 grams per liters, Cl -0.05 all the other are water for grams per liter
Electro-deposition process parameter Voltage: 5 volts of current densities: 80 milliamperes/decimeter 2Temperature: 40 ℃, magnetic stirring apparatus speed: 80 rev/mins, anode material: copper, cathode material: stainless steel, electrodeposition time: 30 minutes
The electrodeposited film effect Surface quality: bright and clean, film thickness: 70 μ m
Example 2: concrete implementation condition is as shown in table 4
Concrete implementation condition of table 4 and result
Project Implementation condition and electrodeposited film effect
The electric depositing solution composition CuSO 4200 grams per liters, H 2SO 470 grams per liters, Cl -0.08 all the other are water for grams per liter
Electro-deposition process parameter Voltage: 8 volts, current density: 200 milliamperes/decimeter 2Temperature: 50 ℃, magnetic stirring apparatus speed: 120 rev/mins, anode material: copper, cathode material: stainless steel, electrodeposition time: 2 hours
The electrodeposited film effect Surface quality: bright and clean, film thickness: 500 μ m
Example 3: concrete implementation condition is as shown in table 5
Concrete implementation condition of table 5 and result
Project Implementation condition and electrodeposited film effect
The electric depositing solution composition CuSO 4220 grams per liters, H 2SO 470 grams per liters, Cl -0.1 all the other are water for grams per liter
Electro-deposition process parameter Voltage: 10 volts, current density: 1 peace/decimetre 2Temperature: 50 ℃, magnetic stirring apparatus speed: 120 rev/mins, anode material: copper, cathode material: stainless steel, electrodeposition time: 30 minutes
The electrodeposited film effect Surface quality: bright and clean, film thickness: 100 μ m

Claims (2)

1, a kind of method for preparing the electron microscope film sample of big powder particle material comprises the preparation of electrodeposited film, the preparation of electrolytic membrane, and the ion milling technology is characterized in that:
The preparation of a, electrodeposited film: adopt direct supply in electro-deposition, voltage is: 1 volt~15 volts, current density is: 20 milliamperes/decimeter 2~2 peace/decimetres 2, anode (3), negative electrode (4) are inserted in the electric depositing solution (9), anode is a fine copper, the composition of electric depositing solution is CuSO 4: 170~260 grams per liters, H 2SO 4: 50~80 grams per liters, Cl -: 0.01~0.1 grams per liter; Use magnetic stirrer in electrodeposition process, stirring rate is 60~125 rev/mins; Thermometer (6) and well heater (10) have been formed temperature-controlling system, make under the constant temperature that is deposited on 30 ℃~50 ℃ and carry out; Filtrator (7) can filtration residue, and the control time is to control sample thickness in 10 minutes~2 hours; Adopt the method for electro-deposition that powder packets is embedded in the fine copper; In electrodeposition process, utilize electric absorption principle that powder is adsorbed on the copper matrix equably;
The preparation of b, electrolytic membrane: utilize the two spray techniques of electrolysis that electrodeposited film is carried out further attenuate, in the thin district that the two sprays of electrolysis obtain, just can see the powder particle that is buried by copper-clad.
2, the method for the electron microscope film sample of the big powder particle material of preparation according to claim 1, it is characterized in that: for nonconducting powder particle, adopt the ion milling technology that electrolytic membrane is carried out further attenuate, at this moment powder particle is owing to the surface of exposing at the copper film matrix, can obtain sufficient attenuate, until carrying out electron microscopic observation.
CN 03136601 2003-05-19 2003-05-19 Method of preparing electron microscopic film sample of macro powder-particle material Expired - Fee Related CN1204388C (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101581637B (en) * 2009-06-19 2011-08-17 武汉钢铁(集团)公司 Method for preparing electron microscope film sample with silicon steel sheet coating
CN107121316A (en) * 2017-03-22 2017-09-01 华南理工大学 A kind of preparation method of micron order Ni-base Superalloy Powder transmission electron microscope film sample

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101644638B (en) * 2009-09-10 2011-12-21 中国科学院等离子体物理研究所 Method for preparing infrared solid membrane sample
CN101832890B (en) * 2010-04-16 2011-12-28 西安石油大学 Technology for preparing micro-powder sample
CN102304748B (en) * 2011-09-14 2013-11-06 哈尔滨工业大学 Preparation method of transmission electron microscope film sample through rapidly solidifying aluminum alloy powder
CN103792121A (en) * 2014-02-10 2014-05-14 河北钢铁股份有限公司邯郸分公司 Preparation method for metallurgical powdered test sample

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101581637B (en) * 2009-06-19 2011-08-17 武汉钢铁(集团)公司 Method for preparing electron microscope film sample with silicon steel sheet coating
CN107121316A (en) * 2017-03-22 2017-09-01 华南理工大学 A kind of preparation method of micron order Ni-base Superalloy Powder transmission electron microscope film sample

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