CN1191477C - Electrical characteristics determining device - Google Patents
Electrical characteristics determining device Download PDFInfo
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- CN1191477C CN1191477C CNB001302574A CN00130257A CN1191477C CN 1191477 C CN1191477 C CN 1191477C CN B001302574 A CNB001302574 A CN B001302574A CN 00130257 A CN00130257 A CN 00130257A CN 1191477 C CN1191477 C CN 1191477C
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- determining device
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Abstract
The present invention provided an electric characteristic measuring device capable of measuring accurately the electric characteristic of an electronic device. A second contact part 4 comprising high-resistance material is electrically connected to the measuring object, and thereafter a first contact part 3a comprising a good electric conductor is electrically connected to the measuring object.
Description
Technical field
The present invention relates to be used to measure the determinator of electrical characteristics, in particular, the present invention relates to following electrical characteristics determining device, it has the microstructure of thin-film head etc., with the more weak electron device of static or inrush current as determinand.
Background technology
As shown in Figure 7, the electrical characteristics determining device of the digital circuit analyzer in past etc. comprises that inside is provided with the main part 61 of electronic analyzer; Draw from main part 61, through 2 mensuration cables 62 of insulativity covering; The a pair of shaft-like electrode probe 63 of both positive and negative polarity, this is installed on the leading section of measuring cable 62 to electrode probe 63, be connected with conduction mode by measuring cable 62 and main part 61, this electrode probe 63 is by being matrix with nickel, the good conductor of electricity that has carried out the brass etc. of gold-plated processing forms, electrode probe 63 directly contacts with the portion of terminal of determinand, and the electrical characteristics of determinand are measured.
But, because the mensuration cable 62 with insulation adventitia in the electrical characteristics determining device in the past is for accumulating the structure of electric charge easily, in addition, electrode probe 63 is in the power ground end of relative main part 61, the state that static floats is so electrode probe 63 relative power ground ends have current potential easily.If electrode probe 63 or determinand 63 are charged, contacting between the electrode probe 63 when measuring and the portion of terminal of determinand, charged charge Q moment between determinand and electrode probe 63 is moved (several nanoseconds).In this manner, the occasion that charge Q moment moves even be under the situation of trace in charge Q, is big electric current as the electric current I=Δ Q/ Δ T of charge Q time diffusion.Because this big electric current, when determinand is electron device with microstructure (such as, thin-film head etc.), has the problem that determinand is subjected to electrostatic breakdown.
In addition, charged in order to prevent determinand or electrical characteristics determining device in the past, by ionization device determinand is removed electric treatment, or electrical characteristics determining device is transformed etc.But the cost of any mode is all higher, has the problem of complex management.
Summary of the invention
The object of the present invention is to provide electrical characteristics determining device, it does not make the electron device as determinand be subjected to electrostatic breakdown, and can correctly measure the electrical characteristics of electron device.
Electrical characteristics determining device of the present invention constitutes in the following manner, and this mode is: electrode probe comprises the base portion that is formed by good conductor of electricity; The 1st contact portion that forms by good conductor of electricity; The 2nd contact portion that forms greater than the electric conductor of above-mentioned the 1st contact portion by its resistance, above-mentioned base portion and the 1st, the 2nd contact portion is in the state of conducting, in the 2nd contact portion with after determinand is connected with conduction mode, the 1st contact portion is connected with conduction mode with this determinand, and the surface resistance of the 2nd contact portion is 10
6～10
12In the scope of Ω/.
In addition, electrode probe in the electrical characteristics determining device of the present invention has the base portion that is formed by good conductor of electricity, the 1st contact portion is formed by the part of above-mentioned base portion, the 2nd contact portion can move along the length direction of above-mentioned base portion, and relative the 1st contact portion of above-mentioned the 2nd contact portion, length direction along above-mentioned base portion is outstanding, can move according to the mode that retreats relative to the state of should giving prominence to.
In addition, be preferably in the electrical characteristics determining device of the present invention, be provided with spring members between the 2nd contact portion and the base portion.
Also have, be preferably in the electrical characteristics determining device of the present invention, above-mentioned spring members is connected base portion with the 2nd contact portion.
Have, be preferably in the electrical characteristics determining device of the present invention, the 1st contact portion and the 2nd contact portion are provided with according to mutual approaching mode.
In addition, be preferably in the electrical characteristics determining device of the present invention, the 2nd contact portion is the tubular of the periphery of the 1st contact portion that surrounds.
In addition, be preferably in the electrical characteristics determining device of the present invention, the pars intermedia at the length direction of above-mentioned the 1st contact portion is provided with hollow bulb, and the 2nd contact portion is received in this hollow bulb.
Have, be preferably in the electrical characteristics determining device of the present invention, the 2nd contact portion is formed by Markite.As Markite, include the electroconductive polymer of polyacetylene etc., in plastics, be mixed with the material that forms as the metal powder of electroconductive stuffing etc., or the ionic conductivity macromolecule etc.
Perhaps, in electrical characteristics determining device of the present invention, the 2nd contact portion is formed by the electric conductivity pottery.As the electric conductivity pottery, include ZrO
2-Y
2O
3Deng the ion live-wire body.
Also have, in electrical characteristics determining device of the present invention, above-mentioned spring members is formed by beryllium copper.
Perhaps, in electrical characteristics determining device of the present invention, above-mentioned spring members is formed by phosphor bronze.
In addition, in electrical characteristics determining device of the present invention, the 1st contact portion is formed by the part of above-mentioned base portion, the 2nd contact portion is near the 1st contact portion, be installed on the above-mentioned base portion, the front position of the front end of the 1st contact portion and the 2nd contact portion is provided with according to the mode that the length direction with above-mentioned base portion is consistent.
Also have, in electrical characteristics determining device of the present invention, the 2nd contact portion is formed by Markite.
Have, in electrical characteristics determining device of the present invention, the 2nd contact portion is formed by the electric conductivity pottery again.
Description of drawings
Fig. 1 is the overall schematic of electrical characteristics determining device of the present invention;
Fig. 2 is the cut-open view of major part of the 1st embodiment of electrical characteristics determining device of the present invention;
Fig. 3 is the cut-open view of major part of the 2nd embodiment of electrical characteristics determining device of the present invention;
Fig. 4 is the cut-open view of major part of the 3rd embodiment of electrical characteristics determining device of the present invention;
Fig. 5 is the cut-open view of major part of the 4th embodiment of electrical characteristics determining device of the present invention;
Fig. 6 is the cut-open view of major part of the 5th embodiment of electrical characteristics determining device of the present invention;
Fig. 7 is the overall schematic of electrical characteristics determining device in the past.
Embodiment
At first, by Fig. 1 and Fig. 2 the 1st embodiment of the present invention is described.As shown in Figure 1, electrical characteristics determining device of the present invention comprises that its inside is provided with the main part 1 of probolog; Measure cable 2 for two, they are drawn from main part 1, realize that insulation coats; The pair of electrodes of both positive and negative polarity probe 3, it is installed on the leading section of measuring cable 2, by measuring cable 2, is connected with conduction mode with main part 1.
As shown in Figure 2, a pair of corresponding electrode probe 3 comprises base portion 3b, and this base portion 3b is by being matrix with nickel, and the good conductor of electricity that has carried out the brass etc. of gold-plated processing forms; The 1st 3a of contact portion, the 1st 3a of contact portion is the front end pars intermedia from base portion 3b, thinner shaft-like of the front end that extends along the length direction of base portion 3b; Spiral helicine spring members 5, this spring members 5 are formed by beryllium copper or phosphor bronze etc.; 4, the 2 contact portions 4 of the 2nd contact portion are formed by the highly-resistant material of Markite or electric conductivity pottery etc., and above-mentioned the 2nd contact portion 4 is the tubular with the essentially identical thickness of base portion 3b, offers through hole at the center.
In addition,, include, comprise the material of electroconductive stuffing of the inorganics etc. of metal powder or metal cladding, or have by polyoxyethylene and LiClO such as, the electroconductive polymer of polyacetylene etc. as Markite
4The conduction macromolecule that forms of potpourri etc., as the electric conductivity pottery, include ZrO
2-Y
2O
3Or Bi
2O
3-Y
2O
3Deng.
The 1st 3a of contact portion inserts in the through hole of the 2nd contact portion 4, and the periphery of the 1st 3a of contact portion is in the main body around the 2nd contact portion 4.In addition, the end face in the 2nd contact portion 4 is equipped with an end of spring members 5, and be installed on base portion 3b in the other end of spring members 5, the 2nd contact portion 4 is can relative the 1st 3a of contact portion, and along the state that the length direction of base portion 3b moves, 3b is connected with base portion.In addition, the 2nd contact portion 4 is in by spring members 5 with base portion 3b, realizes the state of conducting.During common before mensuration, the 2nd contact portion 4 is in along the length direction of base portion 3b, from the outstanding state of the 1st 3a of contact portion, and can be relatively should outstanding state, the elasticity of antagonistic spring parts 5 is moved back towards base portion 3b one rear flank.
If when measuring electrical characteristics, make the portion of terminal of the leading section of electrode probe 3 near determinand, then electrode probe 3, contacts with the portion of terminal of determinand in the 2nd contact portion 4 at first at first.At this moment, even under the charged situation of electrode probe 3 or determinand since the electric charge between electrode probe 3 and the determinand move because of the effect of the 2nd contact portion 4 of highly-resistant material slow, so big electric current does not flow through determinand.
In addition, because the 2nd contact portion 4 is around the periphery of the 1st 3a of contact portion, so the 1st 3a of contact portion contacts with the portion of terminal of determinand not prior to the 2nd contact portion 4.
Finish if move at electric charge, electrode probe 3 and determinand are after the same potential, electrode probe 3 is pressed against the portion of terminal of determinand, then under the flexible effect of spring members 5, the 2nd contact portion 4 retreats from outstanding state, and the front end of the 1st 3a of contact portion contacts with the portion of terminal of determinand.In addition, owing to be connected with conduction mode between the 1st 3a of contact portion that forms by good conductor of electricity and the determinand, so under the less state of the internal resistance in determinator, can correctly measure the electrical characteristics of determinand.
Below by Fig. 3, the 2nd embodiment of the present invention is described.The main part 1 of the 2nd embodiment with measure the identical of cable 2 and the 1st embodiment shown in Figure 1, as shown in Figure 3, the electrode probe 13 that is installed on the front end of measuring cable 2 comprises base portion 13b, and this base portion 13b is by being matrix with nickel, and the good conductor of electricity that has carried out the brass etc. of gold-plated processing forms; The 13c of hole portion, the 13c of this hole portion be from the leading section of this base portion 13b, is the concavity setting along the length direction of base portion 13b; Retainer 13d, its inside at the 13c of hole portion is outstanding; The 1st 13a of contact portion, the 1st 13a of contact portion is the part of base portion 13b, it is near the 13c of hole portion, thinner shaft-like of the front end that extends along the length direction of base portion 13b; Spring members 15, this spring members 15 are formed by beryllium copper or phosphor bronze etc.; The 2nd contact portion 14, the 2nd contact portion 14 is formed by the high-resistance material of Markite or electric conductivity pottery etc., and above-mentioned the 2nd contact portion 14 is thinner shaft-like of front end, and portion in its back-end, corresponding to the retainer 13d of the 13c of hole portion, be provided with towards the outstanding connection part 14a of periphery.
The 2nd contact portion 14 is received in the 13c of hole portion of base portion 13b with spring members 15, and spring members 15 is arranged between the 2nd contact portion 14 and the base portion 13b, and the 2nd contact portion 14 is in the state that can move along the length direction of base portion 13b thus.In addition, the 2nd contact portion 14 and base portion 13b pass through spring members 15, are in conducting state.During common before mensuration, 14 relative the 1st 13a of contact portion of the 2nd contact portion, outstanding along the length direction of base portion 13b.At this moment, because the retainer 13d among the through hole 13c contacts with connection part 14a in the 2nd contact portion 14, so the 2nd contact portion 14 that prevents pulls out from the 13c of hole portion.In addition, if the 2nd contact portion 14 is connected by spring members 15 with base portion 13b, connection part 14a in the 2nd contact portion 14 and the retainer 13d among the 13c of hole portion can be set also.
When measuring electrical characteristics, if keep vertical state with the portion of terminal of determinand substantially at the length direction that makes electrode probe 13, make the portion of terminal of the leading section of electrode probe 13 near determinand, then this electrode probe 13 is at first at first, in the 2nd contact portion 14, contact with the portion of terminal of determinand.At this moment, even under the charged situation of electrode probe 13 or determinand, because the 2nd contact portion 14 that the mobile reason high-resistance material of electric charge between electrode probe 13 and determinand forms and slowly, so big electric current does not flow through determinand.
Finish if move at electric charge, electrode probe 13 is in after the same potential with determinand, electrode probe 13 is pressed against on the portion of terminal of determinand, then because the elasticity of spring members 15, the 2nd contact portion 14 retreats from outstanding state, and the front end of the 1st 13a of contact portion contacts with the portion of terminal of determinand.In addition, owing to be connected with conduction mode between the 1st 3a of contact portion that forms by good conductor of electricity and the determinand, so the very little state of the internal resistance in determinator can correctly be measured the electrical characteristics of determinand.
At this moment, because the 1st 13a of contact portion and the 2nd contact portion 14 are provided with according to approaching mutually mode, even event is under the less situation of the area of the portion of terminal of determinand, in the 2nd contact portion 14 and the contacted state of determinand, the 1st 13a of contact portion still can contact with determinand, thus, can prevent following situation, it is charged once more that this situation refers to that the contact because of the 2nd contact portion 14 removes the determinand of electricity, until contacting with the 1st 13a of contact portion.
Below by Fig. 4, the 3rd embodiment of the present invention is described.Main part 1 among the 3rd embodiment with measure the identical of cable 2 and the 1st embodiment shown in Figure 1, as shown in Figure 4, the electrode probe 23 that is installed on the front end of measuring cable 2 comprises base portion 23b, and this base portion 23b is by being matrix with nickel, and the good conductor of electricity that has carried out the brass etc. of gold-plated processing forms; The 1st 23a of contact portion, the 1st 23a of contact portion is the part of base portion 23b, it is the tubular that extends along the length direction of base portion 23b; Hollow bulb 23d, this hollow bulb 23d are arranged at the pars intermedia of the 1st 23a of contact portion of tubular, in its front, have opening port; Retainer 23e, the inside of the hollow bulb 23d of this retainer 23e in the 1st 23a of contact portion is outstanding; Spring members 25, this spring members 25 are formed by beryllium copper or phosphor bronze etc.; The 2nd contact portion 24, the 2nd contact portion 24 is formed by the high-resistance material of Markite or electric conductivity pottery etc., and above-mentioned the 2nd contact portion 24 is for being thinner shaft-like of front end, portion in its back-end, corresponding to retainer 23e, be provided with at the outstanding connection part 24a of peripheral part.
The 2nd contact portion 24 and spring members 25 are received in the hollow bulb 23d among the 1st 23a of contact portion, and spring members 25 is arranged between the 2nd contact portion 24 and the base portion 23b, and the 2nd contact portion 24 is in and can moves along the length direction of base portion 23b thus.In addition, by realizing conducting between spring members 25, the 2 contact portions 24 and the base portion 23b.During common before mensuration, 24 relative the 1st 23b of contact portion of the 2nd contact portion, outstanding along the length direction of base portion 23a.At this moment, because retainer 23e contacts with connection part 24a in the 2nd contact portion 24, prevent that so just 24 23c of relative opening portion of the 2nd contact portion from pulling out.In addition, if the 2nd contact portion 24 is connected by spring members 25 with base portion 23b, connection part 24a and retainer 23e in the 2nd contact portion 24 can be set also then.
When measuring electrical characteristics, if make electrode probe 23 according to keeping vertical mode near this portion of terminal with the portion of terminal of determinand basically, then electrode probe 23 at first at first in the 2nd contact portion 24, contact with the portion of terminal of determinand.At this moment, electric charge entrained on electrode probe 23 or the determinand moves between electrode probe 23 and determinand by the 2nd contact portion 24.It is slow that such electric charge moves the 2nd contact portion 24 that forms because of high-resistance material, do not produce big electric current.
Finish if move at electric charge, electrode probe 23 is in after the same potential with determinand, electrode probe 23 is pressed against on the portion of terminal of determinand, then because the elasticity of spring members 25, the 2nd contact portion 24 retreats from outstanding state, and the front end of the 1st 23a of contact portion contacts with the portion of terminal of determinand.In addition, owing to be connected with conduction mode between the 1st 23a of contact portion that forms by good conductor of electricity and the determinand, so the very little state of the internal resistance in determinator can correctly be measured the electrical characteristics of determinand.
At this moment, because the 2nd contact portion 24 is received in the hollow bulb 23d among the 1st 23a of contact portion, even event is under the less situation of the area of the portion of terminal of determinand, in the 2nd contact portion 24 and the contacted state of determinand, the 1st 23a of contact portion still can contact with determinand, thus, can prevent following situation, it is charged once more that this situation refers to that the contact because of the 2nd contact portion 24 removes the determinand of electricity, until contacting with the 1st 23a of contact portion.
Below by Fig. 5, the 4th embodiment of the present invention is described.Main part 1 among the 4th embodiment with measure the identical of cable 2 and the 1st embodiment shown in Figure 1, as shown in Figure 5, the electrode probe 33 that is installed on the front end of measuring cable 2 comprises base portion 33b, and this base portion 33b is by being matrix with nickel, and the good conductor of electricity that has carried out the brass etc. of gold-plated processing forms; The 1st 33a of contact portion, the 1st 33a of contact portion is the part of base portion 33b, it is from the leading section of base portion 33b, thinner shaft-like of the front end that extends along the length direction of base portion 33b; The 2nd contact portion 34, the 2nd contact portion 34 is formed by the high-resistance material of Markite or electric conductivity pottery etc., above-mentioned the 2nd contact portion 34 is identical with the 1st 33a of contact portion, be thinner shaft-like of front end, the 2nd contact portion 34 is near the 1st 33a of contact portion, be fixedly installed on the base portion 33b, the position of the front end of the 1st 33a of contact portion and the front end of the 2nd contact portion 34 is provided with according to the mode that the length direction with base portion 33b is consistent.
When measuring electrical characteristics, shown in the solid line among Fig. 5, the state in that electrode probe 33 tilts at first at first, makes the 2nd contact portion 34 contact with the portion of terminal of determinand.At this moment, even under the charged situation of electrode probe 33 or determinand, because the 2nd contact portion 34 that the mobile reason high-resistance material of electric charge between electrode probe 33 and determinand forms and slowly, so big electric current can not flow through determinand.
In addition, move at electric charge and to finish, electrode probe 23 is in after the same potential with determinand, shown in the dotted line among Fig. 5, make the base portion 33b rotation in the electrode probe 33, make the 1st 33a of contact portion, contact with the portion of terminal of the determinand that contacts with the 2nd contact portion 34.In addition, if make base portion 33b rotation along equidirectional, the 2nd contact portion 34 is left with the portion of terminal of determinand, and only the 1st 33a of contact portion is in and the contacted state of the portion of terminal of determinand.In addition, owing to be connected with conduction mode between the 1st 33a of contact portion that forms by good conductor of electricity and the determinand, so the very little state of the internal resistance in determinator can correctly be measured the electrical characteristics of determinand.
At this moment, because before the 2nd contact portion 34 is left with the portion of terminal of determinand, the 1st 33a of contact portion contacts with the portion of terminal of determinand, so following situation does not take place, it is charged once more that this situation refers to that the contact because of the 2nd contact portion 34 removes the determinand of electricity, until contacting with the 1st 33a of contact portion.In addition, when being connected with conduction type between the determinand by the 1st 33a of contact portion when measuring, because the 2nd contact portion 34 leaves with portion of terminal, so can more correctly measure.
Below by Fig. 6, the 5th embodiment of the present invention is described.Main part 1 among the 5th embodiment is identical with described the 1st embodiment of Fig. 1, and it comprises the electrode probe 43 that is connected with conduction mode with main part 1.
As shown in Figure 6, electrode probe 43 comprises tubular base portion 43b, and this base portion 43b is formed by electric conductor, is provided with through hole; A pair of the 1st 43a of contact portion, by being matrix with nickel, the good conductor of electricity that has carried out the brass etc. of gold-plated processing forms to the 1st 43a of contact portion for this, and it is thinner shaft-like of front end; Spiral helicine spring members 45, this spring members 45 are formed by beryllium copper or phosphor bronze etc.; 44, the 2 contact portions 44 of the 2nd contact portion are formed by the high-resistance material of Markite or electric conductivity pottery etc., and above-mentioned the 2nd contact portion 44 is provided with two through holes abreast, and the 2nd contact portion 44 is tubular.
One 43a of docking point portion is connected with conduction mode with the both positive and negative polarity of main part 1 respectively.
During common before mensuration, the 2nd contact portion 44 is in relative the 1st 43a of contact portion, and along the outstanding state of the length direction of base portion 43b, and from this outstanding state, the elasticity of antagonistic spring parts 45 can be moved back towards base portion 43a one rear flank.
When measuring electrical characteristics, if make the portion of terminal of the leading section of electrode probe 43 near determinand, then electrode probe 43, contacts with the portion of terminal of determinand in the 2nd contact portion 44 at first at first.At this moment, even under the charged situation of electrode probe 43 or determinand, because that the electric charge between electrode probe 43 and determinand moves the 2nd contact portion 44 that the reason high-resistance material forms is slow, big electric current does not still flow through determinand.
Also have, surround,, in addition, do not contact between the 1st 43a of contact portion so should contact with the portion of terminal of determinand to the 1st 43a of contact portion not prior to the 2nd contact portion 44 because the corresponding periphery of a pair of the 1st 43a of contact portion is the 2nd contact portion 44.
Finish if move at electric charge, electrode probe 43 is in after the same potential with determinand, electrode probe 43 is pressed against on the portion of terminal of determinand, then because the elasticity of spring members 45, the 2nd contact portion 44 retreats from outstanding state, the respective front ends of a pair of the 1st 43a of contact portion contacts with the portion of terminal of determinand, contacts with conduction mode during the positive and negative electrodes in same of main part 1 with between the determinand.Like this, the state that the internal resistance in determinator is very little can correctly be measured the electrical characteristics of determinand.
In the manner described above, by electrode probe 3 being pressed against on the portion of terminal of determinand, contact with conduction mode during the positive and negative electrodes in same of main part 1 with between the determinand.Because can keep electrode probe 3 this moment by a hand, and it is measured, so compare with following occasion, can measure easilier, this occasion refers to just be provided with respectively, the pair of electrodes probe of negative pole keeps the pair of electrodes probe by two hands respectively, and it is measured.
In electrical characteristics determining device of the present invention, with after determinand contacts with conduction mode, the 1st contact portion that is formed by good conductor of electricity contacts with conduction mode with determinand in the 2nd contact portion that is formed by high-resistance material.
In such electrical characteristics determining device, even under the charged situation of electrode probe or determinand, owing to the 2nd contact portion of the mobile reason high-resistance material formation of electric charge between electrode probe and determinand slowly, big electric current does not still flow through determinand, can prevent the electrostatic breakdown of determinand.In addition, electric charge move finish after, the 1st contact portion contacts with conduction mode with determinand, at the less state of internal resistance, can correctly measure the electrical characteristics of determinand.
In addition, in electrical characteristics determining device of the present invention, above-mentioned the 2nd contact portion is removable, and above-mentioned the 2nd contact portion can relative the 1st contact portion, and is outstanding along the length direction of above-mentioned base portion, should retreat by outstanding state relatively.
In such electrical characteristics determining device, because relative the 1st contact portion of above-mentioned the 2nd contact portion is outstanding, so when measuring, the 1st contact portion prior to the 2nd contact portion, does not contact with determinand, can prevent the electrostatic breakdown of determinand.
In addition, electrical characteristics determining device of the present invention is provided with spring members between above-mentioned the 2nd contact portion and base portion.
In such electrical characteristics determining device,,, can prevent because of being pressed against the destruction of the portion of terminal that causes in the 2nd contact portion so the 2nd contact portion moves easily because moving of the 2nd contact portion undertaken by the elasticity of spring members.
Also have, in electrical characteristics determining device of the present invention, above-mentioned spring members is connected above-mentioned base portion with the 2nd contact portion.
In such electrical characteristics determining device and since the 2nd contact portion relatively base portion stir, what need not the 2nd contact portion only pulls out structure, so can make simple in structure.
Have, in electrical characteristics determining device of the present invention, above-mentioned the 1st contact portion and the 2nd contact portion are provided with in mutual approaching mode again.
In such electrode probe structure, even under the less situation of the area of the portion of terminal of determinand, because at the 2nd contact portion and the contacted state of determinand, the 1st contact portion is contacted with determinand, so it is charged once more to prevent that contact by the 2nd contact portion from removing electric determinand, until contacting with the 1st contact portion.
In addition, in electrical characteristics determining device of the present invention, above-mentioned the 2nd contact portion is the tubular of the periphery of the 1st contact portion that surrounds.
In such electrical characteristics determining device, because being the 2nd contact portion, the 1st contact portion surrounds, so even favouring under the approaching situation of the state of determinand at electrode probe, the 1st contact portion still not prior to the 2nd contact portion, contacts with portion of terminal.
In addition, in electrical characteristics determining device of the present invention, the pars intermedia of the length direction of above-mentioned the 1st contact portion is provided with hollow bulb, and this hollow bulb is received in the 2nd contact portion.
In such electrode probe structure, even under the less situation of the area of the portion of terminal of determinand, because at the 2nd contact portion and the contacted state of determinand, the 1st contact portion is contacted with determinand, so it is charged once more to prevent that contact because of the 2nd contact portion from removing electric determinand, until contacting with the 1st contact portion.
In addition, in electrical characteristics determining device of the present invention, the surface resistance of the 2nd contact portion is 10
6～10
12In the scope of Ω/.
In such electrical characteristics determining device, the electric current that the movement of electric charges in the time of can making the contact of the 2nd contact portion forms is littler.
Also have, in electrical characteristics determining device of the present invention, the 2nd contact portion is formed by Markite.
Even under the situation of attaching surface activating agent or moisture on the surface of insulating material, still can make surface resistance 10
6～10
12In the scope of Ω/, and the 2nd contact portion is formed by Markite, thereby can obtain stable sheet resistance value.
Perhaps, in electrical characteristics determining device of the present invention, the 2nd contact portion is formed by the electric conductivity pottery.
Even under the situation of attaching surface activating agent or moisture, still can make surface resistance on the surface of insulating material 10
6～10
12In the scope of Ω/, and the 2nd contact portion is formed by the electric conductivity pottery, thereby can obtain stable sheet resistance value.
In addition, in electrical characteristics determining device of the present invention, spring members is formed by beryllium copper.In such electrical characteristics determining device, the electric current that the movement of electric charges in the time of can making the contact of the 2nd contact portion forms is littler.
Have, in electrical characteristics determining device of the present invention, spring members is formed by phosphor bronze again.In such electrical characteristics determining device, the electric current that the movement of electric charges in the time of can making the contact of the 2nd contact portion forms is littler.
In addition, in electrical characteristics determining device of the present invention, the position of the front end of the front end of the 1st contact portion and the 2nd contact portion is provided with according to the mode that the length direction with above-mentioned base portion is consistent.
In such electrical characteristics determining device, because after the contact of the determinand of the state when contacting with the 2nd contact portion in the 1st contact portion, the portion of terminal of the 2nd contact portion and determinand is left, only the 1st contact portion is in and the contacted state of the portion of terminal of determinand, so following situation does not take place, it is charged once more that promptly the contact by the 2nd contact portion removes electric determinand, until contacting with the 1st contact portion 33.In addition, because when being connected with conduction mode with determinand by the 1st contact portion, when measuring, the portion of terminal of the 2nd contact portion and determinand is left, so can carry out more correct mensuration.
In addition, the surface resistance of the 2nd contact portion in the electrical characteristics determining device of the present invention is 10
6～10
12In the scope of Ω/.
In such electrical characteristics determining device, the electric current that the movement of electric charges in the time of can making the contact of the 2nd contact portion forms is littler.
In addition, the 2nd contact portion in the electrical characteristics determining device of the present invention is formed by Markite.
Even under the situation of attaching surface activating agent or moisture on the surface of insulating material, still can make surface resistance 10
6～10
12In the scope of Ω/, and the 2nd contact portion is formed by Markite, thereby can obtain stable sheet resistance value.
Perhaps, the 2nd contact portion in the electrical characteristics determining device of the present invention is formed by the electric conductivity pottery.
Even under the situation of attaching surface activating agent or moisture on the surface of insulating material, still can make surface resistance 10
6～10
12In the scope of Ω/, and the 2nd contact portion is formed by the electric conductivity pottery, thereby can obtain stable sheet resistance value.
Claims (17)
1. an electrical characteristics determining device is characterized in that electrode probe comprises the base portion that is formed by good conductor of electricity; The 1st contact portion that forms by good conductor of electricity; The 2nd contact portion that forms greater than the electric conductor of above-mentioned the 1st contact portion by its resistance, above-mentioned base portion and the 1st, the 2nd contact portion is in the state of conducting, in the 2nd contact portion with after determinand is connected with conduction mode, the 1st contact portion is connected with conduction mode with this determinand, and the surface resistance of the 2nd contact portion is 10
6～10
12In the scope of Ω/.
2. electrical characteristics determining device according to claim 1, it is characterized in that above-mentioned the 1st contact portion is formed by the part of above-mentioned base portion, above-mentioned the 2nd contact portion is near above-mentioned the 1st contact portion, be installed on the above-mentioned base portion, the position of the front end of the front end of above-mentioned the 1st contact portion and above-mentioned the 2nd contact portion is provided with according to the mode that the length with above-mentioned base portion is consistent.
3. electrical characteristics determining device according to claim 2 is characterized in that above-mentioned the 2nd contact portion is formed by Markite.
4. electrical characteristics determining device according to claim 2 is characterized in that above-mentioned the 2nd contact portion is formed by the electric conductivity pottery.
5. electrical characteristics determining device according to claim 1, the 1st contact portion in the above-mentioned electrode probe that it is characterized in that is formed by the part of above-mentioned base portion, the 2nd contact portion can move along the length direction of above-mentioned base portion, and above-mentioned the 2nd contact portion can relative the 1st contact portion, length direction along above-mentioned base portion is outstanding, retreats from this outstanding state.
6. electrical characteristics determining device according to claim 5 is characterized in that being provided with spring members between above-mentioned the 2nd contact portion and above-mentioned base portion.
7. electrical characteristics determining device according to claim 6 is characterized in that above-mentioned spring members is connected above-mentioned base portion with the 2nd contact portion.
8. electrical characteristics determining device according to claim 7 is characterized in that above-mentioned the 1st contact portion and the 2nd contact portion are provided with according to mutual close mode.
9. electrical characteristics determining device according to claim 8 is characterized in that above-mentioned the 2nd contact portion is the tubular of the periphery of the 1st contact portion that surrounds.
10. electrical characteristics determining device according to claim 9 is characterized in that being provided with hollow bulb at the pars intermedia of the length direction of above-mentioned the 1st contact portion, and the 2nd contact portion is received in this hollow bulb.
11. electrical characteristics determining device according to claim 10 is characterized in that above-mentioned spring members is formed by beryllium copper.
12. electrical characteristics determining device according to claim 10 is characterized in that above-mentioned spring members is formed by phosphor bronze.
13. electrical characteristics determining device according to claim 2 is characterized in that above-mentioned the 1st contact portion and the 2nd contact portion are provided with according to mutual approaching mode.
14. electrical characteristics determining device according to claim 2 is characterized in that above-mentioned the 2nd contact portion is the tubular of the periphery of the 1st contact portion that surrounds.
15. electrical characteristics determining device according to claim 2 is characterized in that being provided with hollow bulb at the pars intermedia of the length direction of above-mentioned the 1st contact portion, the 2nd contact portion is received in this hollow bulb.
16. electrical characteristics determining device according to claim 6 is characterized in that above-mentioned spring members is formed by beryllium copper.
17. electrical characteristics determining device according to claim 6 is characterized in that above-mentioned spring members is formed by phosphor bronze.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31686499 | 1999-11-08 | ||
| JP316864/1999 | 1999-11-08 | ||
| JP187527/2000 | 2000-06-19 | ||
| JP2000187527A JP3315683B2 (en) | 1999-11-08 | 2000-06-19 | Electrical property measurement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1295252A CN1295252A (en) | 2001-05-16 |
| CN1191477C true CN1191477C (en) | 2005-03-02 |
Family
ID=26568835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB001302574A Expired - Fee Related CN1191477C (en) | 1999-11-08 | 2000-11-02 | Electrical characteristics determining device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3315683B2 (en) |
| CN (1) | CN1191477C (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7124927B2 (en) | 1999-02-25 | 2006-10-24 | Reiber Steven F | Flip chip bonding tool and ball placement capillary |
| US7389905B2 (en) | 1999-02-25 | 2008-06-24 | Reiber Steven F | Flip chip bonding tool tip |
| US6905350B1 (en) | 2002-04-05 | 2005-06-14 | Maxtor Corporation | Two-step electrical connector and method using high resistance path for electrostatic discharge |
| JP3981042B2 (en) | 2003-06-09 | 2007-09-26 | アルプス電気株式会社 | Contact probe, probe socket, electrical characteristic measuring apparatus, and contact probe pressing method |
| CN100339714C (en) * | 2004-05-20 | 2007-09-26 | 华硕电脑股份有限公司 | Test probe |
| JP4952076B2 (en) * | 2006-06-12 | 2012-06-13 | セイコーエプソン株式会社 | Electrical characteristic measuring apparatus and electrical characteristic measuring method |
| US10012686B2 (en) * | 2016-08-15 | 2018-07-03 | Tektronix, Inc. | High frequency time domain reflectometry probing system |
| CN107525953A (en) * | 2017-09-25 | 2017-12-29 | 惠科股份有限公司 | A kind of probe unit |
-
2000
- 2000-06-19 JP JP2000187527A patent/JP3315683B2/en not_active Expired - Fee Related
- 2000-11-02 CN CNB001302574A patent/CN1191477C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001201515A (en) | 2001-07-27 |
| JP3315683B2 (en) | 2002-08-19 |
| CN1295252A (en) | 2001-05-16 |
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Granted publication date: 20050302 Termination date: 20101102 |