CN1186589C - Method of measuring two dimensional displacement quantity using conjugated optical channels - Google Patents
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- CN1186589C CN1186589C CNB021001154A CN02100115A CN1186589C CN 1186589 C CN1186589 C CN 1186589C CN B021001154 A CNB021001154 A CN B021001154A CN 02100115 A CN02100115 A CN 02100115A CN 1186589 C CN1186589 C CN 1186589C
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Abstract
The present invention relates to a method for measuring the amount of two-dimensional displacement through conjugate light paths. The method comprises steps that after incidence into a diffraction unit by a light beam sent from a light source, at least two beams of first diffraction light are generated; the first diffraction light turns back along the original light path after the action of a wavefront reconstruction optics assembly on the first diffraction light, and incidence into the diffraction unit by the first diffraction light is realized again so as to generate at least two beams of second diffraction light; at least two beams of interference light are then generated after the action of an interference optics assembly on the second diffraction light; the interference light is processed by the light interference phase demodulation technology. Consequently, the amounts of displacement in two linearly independent directions in two-dimensional motion can be obtained.
Description
Technical field
The present invention relates to length measuring instrument design of Optical System field, the optical principle that is particularly to the measurement principle of telecentric system (telecentric system) and wavefront are reappeared (wavefrontreconstruction) in conjunction with and form a kind of conjugated optical channels, and utilizing this conjugated optical channels, realization has the measurement of the two dimensional motion relative shift of high permissible variation.
Background technology
Existing two-dimensional displacement method for measurement is that two groups of one dimension displacements are measured module, combines with orthogonal manner.Yet when the precision requirement of system was more and more high, said method more and more difficulty reached, and also more and more high for the requirement of user's technical capability, increased the cost of education and training and the risk of the floating of professionals on foot.
United States Patent (USP) case numbers 5,204,524 discloses a kind of two-dimension displacement and has measured device.Yet, aspect resolution and precision, because the restriction of geometrical optics still can't effectively improve.
United States Patent (USP) case numbers 5,424,833 discloses another kind of two-dimension displacement and has measured device.Yet in this device, light beam is through three diffraction, and signal strength is low with respect to the efficient of the intensity of light source, and its system is for the assembly precision and relative raising of requirement of making quality of element.
United States Patent (USP) case numbers 5,530,543, the two-dimension displacement that discloses another kind of application monochromatic light grid measures device.Yet this device does not have the function of error self-compensating, has output signal in the application and is difficult for stable problem.
Summary of the invention
In view of this, the objective of the invention is to provide a kind of conjugated optical channels formula two-dimension displacement measurement method, utilize this method, can obtain the displacement on two linear independent, direction of above-mentioned diffraction unit in two-dimentional relative motion.
The object of the present invention is achieved like this:
A kind of method of utilizing the conjugated optical channels measuring two dimensional displacement quantity comprises the following steps:
From a light emitted one first incident light;
Behind the above-mentioned first incident light incident, one diffraction unit, produce the multi beam first diffraction light;
Select the above-mentioned first diffraction light of two bundle same orders, this two the bundle first diffraction light and above-mentioned first incident light axis symmetry;
Reappear optical module by wavefront, above-mentioned two bundles, the first diffraction light is followed the original optical path footpath above-mentioned diffraction unit of incident more respectively, and form two groups of conjugated optical channels;
The above-mentioned first diffraction light follows original optical path footpath again behind the above-mentioned diffraction unit of incident, produces the multi beam second diffraction light;
Select the above-mentioned second diffraction light of two pairs of same orders, wherein first pair second diffraction light and the above-mentioned first incident light axis symmetry, the second pair second diffraction light also with the above-mentioned first incident light axis symmetry;
Above-mentioned first pair second diffraction light produces one first interference light by an interferometric optical assembly, and second pair second diffraction light produces one second interference light by another interferometric optical assembly:
Above-mentioned first and second interference light is handled via interference of light phase demodulation technique respectively, obtains two the linear independent displacement amounts of above-mentioned diffraction unit in two-dimensional directional.And
Above-mentioned first incident light is a collimated light, and selects to form a kind of of group from following: the same light modulation of a linear polarization, the same light modulation of a circular polarization, the same light modulation of an elliptic polarization, the same light modulation of a linear polarization part, a circular polarization are partly with light modulation and the same light modulation of an elliptic polarization part;
Above-mentioned light source more includes collimation lens;
Above-mentioned first incident light is the above-mentioned diffraction unit of normal direction incident with above-mentioned diffraction unit;
Above-mentioned diffraction unit is to be formed to be selected from the following surface of forming one of group: a planar substrates, a cylinder substrate and a spherical substrate;
Above-mentioned diffraction unit is a reflective diffraction unit;
Above-mentioned diffraction unit is a penetration diffraction unit;
It is to select a kind of from following composition group that above-mentioned wavefront reappears optical module: the assembly that comprises collimation lens and a catoptron; One gradual index lens, wherein an end face of above-mentioned gradual index lens has a reflection horizon; An and corner cube;
Above-mentioned catoptron is arranged on the focus of above-mentioned collimation lens, and above-mentioned diffraction unit is arranged on another focus of above-mentioned collimation lens.Or
A kind of method of utilizing the conjugated optical channels measuring two dimensional displacement quantity comprises the following steps:
From a light emitted one first incident light;
Behind the above-mentioned first incident light incident, one diffraction unit, produce the multi beam first diffraction light;
Select the above-mentioned first diffraction light of four bundle same orders, this four the bundle first diffraction light and above-mentioned first incident light axis symmetry;
Reappear optical module by wavefront, above-mentioned four bundles, the first diffraction light is followed the original optical path footpath above-mentioned diffraction unit of incident more respectively, and form four groups of conjugated optical channels;
The above-mentioned first diffraction light follows original optical path footpath again behind the above-mentioned diffraction unit of incident, produces the multi beam second diffraction light;
Select the above-mentioned second diffraction light of two bundle same orders, the above-mentioned second diffraction light of above-mentioned two bundle same orders all equates with the angle of above-mentioned first incident light, handle via interference of light phase demodulation technique respectively, obtain two the linear independent displacement amounts of above-mentioned diffraction unit in two-dimensional directional.
Above-mentioned first incident light is a collimated light, and selects to form a kind of of group from following: the same light modulation of a linear polarization, the same light modulation of a circular polarization, the same light modulation of an elliptic polarization, the same light modulation of a linear polarization part, a circular polarization are partly with light modulation and the same light modulation of an elliptic polarization part;
Above-mentioned light source more includes collimation lens;
Above-mentioned first incident light is the above-mentioned diffraction unit of normal direction incident with above-mentioned diffraction unit;
Above-mentioned diffraction unit is to be formed to be selected from the following surface of forming one of group:
One planar substrates, a cylinder substrate and a spherical substrate;
Above-mentioned diffraction unit is a reflective diffraction unit;
Above-mentioned diffraction unit is a penetration diffraction unit;
It is to select a kind of from following composition group that wherein above-mentioned wavefront reappears optical module: the assembly that comprises collimation lens and a catoptron; One gradual index lens, wherein an end face of above-mentioned gradual index lens has a reflection horizon; An and corner cube;
Above-mentioned catoptron is arranged on the focus of above-mentioned collimation lens, and above-mentioned diffraction unit is arranged on another focus of above-mentioned collimation lens.
Because step of the present invention comprises:, behind incident one diffraction unit, produce at least two bundles first diffraction light by a light beam from a light source; Then, the above-mentioned first diffraction light follows original optical path and turns back after reappearing optical module (wavefront reconstruction optics) effect via wavefront, is incident in above-mentioned diffraction unit again, produces at least two bundles second diffraction light; Then, the above-mentioned second diffraction light via the effect of interferometric optical assembly after, produce at least two beam interferometer light; Then, above-mentioned interference light can obtain the displacement on two linear independent, direction of above-mentioned diffraction unit in two-dimentional relative motion after handling via interference of light phase demodulation technique.
One of advantage of the present invention is the present invention for the bit errors between the assembly precision between optical element, optical element and diffraction unit, and the making defective of diffraction unit itself, has the permissible variation of height.
Another advantage of the present invention is because have the permissible error of height, thus can effectively reduce the manufacturing and the assembly cost of element, and can further improve the quality of product, reach the purpose of product universalness.
Description of drawings
Fig. 1 is the synoptic diagram that summary shows the leading portion light path of first embodiment of the invention;
Fig. 2 is the synoptic diagram that summary shows the back segment light path of first embodiment of the invention;
Fig. 3 is the synoptic diagram that summary shows the leading portion light path of second embodiment of the invention;
Fig. 4 is the synoptic diagram that summary shows the back segment light path of second embodiment of the invention;
Fig. 5 shows that the summary that diffraction unit is formed on the planar substrates is graphic;
Fig. 6 is that to show that diffraction unit is formed at the suprabasil summary of a cylinder graphic;
Fig. 7 shows that the summary that diffraction unit is formed on the spherical substrate is graphic;
Fig. 8 summarily shows the reflective substrate with diffraction unit, in order to a kind of pattern of the two dimensional displacement quantity that measures this reflective substrate;
Fig. 9 summarily shows the transparent substrates with diffraction unit, in order to the another kind of pattern of the two dimensional displacement quantity that measures this transparent substrates:
Figure 10 to 12 is that summary shows the various types that constitutes wavefront reproduction optical module.
The figure number explanation:
10 reflective planar substrates 10 ' penetration planar substrates
20 cylinder substrates
30 sphere substrates
41,42,43,44 wavefront reappear optical module
51 gradual index lenses
61 corner cubes
101 diffraction units, 101 ' penetration diffraction unit
201 light sources
301,311,312,313,314 collimation lenses
401,402,403,404,411,412,413,414 catoptrons
501,502 polarizing beam splitters
901 first incident lights
911, the first diffraction light of 912,913,914 same orders
921, the second diffraction light of 922,923,924 same orders
941,942 interference lights, 1011 incident positions
4011,4021,4031,4041 reflection positions
The φ first diffraction angle φ ' the second diffraction light angle
Embodiment
First embodiment
Fig. 1 is the leading portion light path that summary shows first embodiment of the invention.With reference to figure 1, launch first incident light of a collimation from a light source 201, or produce first incident light of a collimation via collimation lens 301.Then, above-mentioned first incident light 901 with substantially perpendicular to a diffraction unit 101, an incident position 1011 of the above-mentioned diffraction unit 101 of incident.
As shown in Figure 1, in the first embodiment of the present invention, diffraction unit 101 is to be formed on the reflective planar substrates 10, has grating space 4 μ m, the two-dimentional string wave diffraction grating of the spoke height 0.2 μ m that shakes.On the X-Y coordinate plane, diffraction unit 101 have the conversion above-mentioned first incident light 901 transfer function f (x, y), it can be expressed as:
f(x，y)＝
[exp(i2Πkx)+exp(-i2Πkx)]×[exp(i2Πky)+exp(-i2Πky)]
Wherein, K is the constant (propagation constant) of advancing.
Then, as shown in Figure 1, above-mentioned first incident light 901 forms the first diffraction light 911,912,913,914 of four bundle same orders via after above-mentioned diffraction unit 101 reflections and changing.This four bundles, first diffraction light 911,912,913,914 all equates with the angle of 901 of above-mentioned first incident lights, this angle is the first diffraction angle φ, and these first diffraction light 911,912,913,914 projections on the X-Y coordinate plane point to (1 respectively, 1), (1,1), (1,-1), (1 ,-1) four direction.Between the above-mentioned diffraction unit 101 and first incident light 901, when on the X--Y coordinate plane, producing two-dimentional relative motion, because doppler shift effect (Doppler Effect), these first diffraction light 911,912,913,914 will be loaded with the phase deviation signal relevant with this two dimensional motion relative shift respectively, and its phase pushing figure can be expressed as respectively:
+Φx+Φy、-Φx+Φy、-Φx-Φy、+Φx-Φy。
Then,, choose the two bundle first diffraction light 911 and 913, reappear the effect of optical module 41 and 43, follow respectively that original optical path directly turns back and once more on the incident position 1011 of the above-mentioned diffraction unit 101 of incident by two groups of wavefront of correspondence with reference to figure 1.In first embodiment, it is to be made up of collimation lens 311,313 and 401,403 of catoptrons respectively that two groups of wavefront reappear optical module 41 and 43.
As shown in Figure 1, the optical axis of collimation lens 311,313 is placed on the light path of the above-mentioned first diffraction light 911 and 913,401,403 optical axises of catoptron perpendicular to above-mentioned collimation lens, and the reflection position 4011 of above-mentioned incident position 1011 with catoptron 401 placed respectively on first focus and second focus of collimation lens 311, the reflection position 4031 of above-mentioned incident position 1011 with catoptron 403 placed respectively on first focus and second focus of collimation lens 313, and form two groups of conjugated optical channels.
Fig. 2 is the back segment light path that summary shows first embodiment of the invention.As shown in Figure 2, the first diffraction light 911 and 913 follows that original optical path directly turns back and once more behind the incident diffraction unit 101, through diffraction unit 101 reflections and conversion, can form the multi beam second diffraction light.Wherein four the bundle same orders the second diffraction light 921,922,923,924 equate all that with the angle of 901 of first incident lights this angle is the second diffraction light included angle ', and the projection on the X-Y coordinate plane point to respectively+X ,+Y ,-X ,-the Y four direction.The second diffraction light 921 and 922 wherein is get through diffraction unit 101 reflection and conversion by the first diffraction light 913, and the second diffraction light 923 and 924 is through diffraction unit 101 reflections and change and get by the first diffraction light 911.
When above-mentioned two-dimentional relative motion takes place, because doppler shift effect, to be loaded with the phase deviation signal relevant with this two dimensional motion relative shift by the first diffraction light 913 formed second diffraction light 921 and 922 after diffraction unit 101 reflections and conversion, its phase pushing figure can be expressed as-2 Φ y and-2 Φ X; In like manner, will be loaded with the phase deviation signal relevant with this two dimensional motion relative shift by the first diffraction light 911 formed second diffraction light 923 and 924 after diffraction unit 101 reflections and conversion, its phase pushing figure can be expressed as+2 Φ y and+2 Φ x.
Because the second diffraction light 921 and 923 is loaded with the phase deviation signal of-2 Φ y and+2 Φ y respectively, as shown in Figure 2, with this a pair of second diffraction light 921 and 923 via a pair of catoptron 411 and 413 the reflection after, incident one interferometric optical assembly, for example a polarizing beam splitter (polarizing beamsplitter) 501 forms interference light 941 by polarizing beam splitter 501 with above-mentioned first pair second diffraction light beam 921 and 923 stacks.At last, interference light 941 is handled via interference of light phase demodulation technique, can obtain above-mentioned two-dimentional relative motion in the displacement of Y direction.
In the same manner, because the second diffraction light 922 and 924 is loaded with the phase deviation signal of-2 Φ x and+2 Φ x respectively, as shown in Figure 2, with this a pair of second diffraction light 922 and 924 via another to catoptron 412 and 414 the reflection after, another interferometric optical assembly of incident, for example another polarizing beam splitter 502 forms interference light 942 by polarizing beam splitter 502 with above-mentioned second pair second diffraction light beam 922 and 924 stacks.At last, interference light 942 is handled via interference of light phase demodulation technique, can obtain above-mentioned two-dimentional relative motion in the displacement of directions X.
Second embodiment
Fig. 3 is the leading portion light path that summary shows second embodiment of the invention.With reference to figure 3, launch first incident light of a collimation from a light source 201, or produce first incident light of a collimation via collimation lens 301.Then, above-mentioned first incident light 901 with substantially perpendicular to a diffraction unit 101, an incident position 1011 of the above-mentioned diffraction unit 101 of incident.
As shown in Figure 3, in the second embodiment of the present invention, diffraction unit 101 is to be formed on the reflective planar substrates 10, has grating space 4 μ m, the two-dimentional string wave diffraction grating of the spoke height 0.2 μ m that shakes.On the X-Y coordinate plane, diffraction unit 101 have the conversion above-mentioned first incident light 901 transfer function f (x, y), it can be expressed as:
f(x，y)＝
[exp(i2Πkx)+exp(-i2Πkx)]×[exp(i2Πky)+exp(-i2Πky)]
Wherein, K is the constant (propagation constant) of advancing.
Then, as shown in Figure 3, above-mentioned first incident light 901 forms the first diffraction light 911,912,913,914 of four bundle same orders via after above-mentioned diffraction unit 101 reflections and changing.This four bundles, first diffraction light 911,912,913,914 all equates with the angle of 901 of above-mentioned first incident lights, this angle is the first diffraction angle φ, and these first diffraction light 911,912,913,914 projections on the X-Y coordinate plane point to (1 respectively, 1), (1,1), (1,-1), (1 ,-1) four direction.Between the above-mentioned diffraction unit 101 and first incident light 901, when on the X-Y coordinate plane, producing two-dimentional relative motion, because doppler shift effect, these first diffraction light 911,912,913,914 will be loaded with the phase deviation signal relevant with this two dimensional motion relative shift respectively, and its phase pushing figure can be expressed as respectively:
+Φx+Φy、-Φx+Φy、-Φx-Φy、+Φx-Φy。
Then, with reference to figure 3, with this four bundles, first diffraction light 911,912,913,914, reappear the effect of optical modules 41,42,43,44 by four groups of wavefront of correspondence, follow original optical path respectively and directly turn back and be incident in once more on the incident position 1011 of above-mentioned diffraction unit 101.In second embodiment, four groups of wavefront reappear optical module the 41,42,43, the 44th, are made up of collimation lens 311,312,313,314 and 401,402,403,404 of catoptrons respectively.
As shown in Figure 3, the optical axis of collimation lens 311,312,313,314 is placed on the light path of the above-mentioned first diffraction light 911,912,913,914,401,402,403,404 optical axises of catoptron perpendicular to above-mentioned collimation lens, and the reflection position 4011,4021,4031,4041 of above-mentioned incident position 1011 with catoptron 401,402,403,404 placed respectively on first focus and second focus of collimation lens 311,312,313,314, and form four groups of conjugated optical channels.
Fig. 4 is the back segment light path that summary shows second embodiment of the invention.As shown in Figure 4, the first diffraction light 911,912,913,914 follows that original optical path directly turns back and once more behind the incident diffraction unit 101, through diffraction unit 101 reflections and conversion, can form the multi beam second diffraction light.Wherein four the bundle same orders the second diffraction light 921,922,923,924 equate all that with the angle of 901 of first incident lights this angle is the second diffraction light included angle ', and the projection on the X-Y coordinate plane point to respectively+X ,+Y ,-X ,-the Y four direction.
In this second embodiment, the second diffraction light 921 is to be superposeed through diffraction unit 101 reflections and conversion back by the first diffraction light 912 and 913 simultaneously and get.When two-dimentional relative motion takes place, because doppler shift effect, to be loaded with+the phase deviation signal of 2 Φ y by the first diffraction light 912 formed part after diffraction unit 101 reflection and conversion in the second diffraction light 921, to be loaded with the phase deviation signal of-2 Φ y by the first diffraction light 913 through the formed part of diffraction unit 101 reflection and conversion back in the second diffraction light 921, that is the second diffraction light 921 is loaded with phase deviation signal by the phase deviation signal of+2 Φ y and-2 Φ y formed interference signal that superposes.At last, the second diffraction light 921 is handled via interference of light phase demodulation technique, can obtain above-mentioned two-dimentional relative motion in the displacement of Y direction.
In like manner, the second diffraction light 922 is to be superposeed through diffraction unit 101 reflections and conversion back by the first diffraction light 913 and 914 simultaneously and get.When two-dimentional relative motion takes place, because doppler shift effect, to be loaded with the phase deviation signal of-2 Φ x in the second diffraction light 922 by the first diffraction light 913 formed part after diffraction unit 101 reflections and conversion, to be loaded with+the phase deviation signal of 2 Φ x through the formed part of diffraction unit 101 reflection and conversion back by the first diffraction light 914 in the second diffraction light 922, that is the second diffraction light 922 is loaded with phase deviation signal by the phase deviation signal of-2 Φ x and+2 Φ x formed interference signal that superposes.At last, the second diffraction light 922 is handled via interference of light phase demodulation technique, can obtain above-mentioned two-dimentional relative motion in the displacement of directions X.The second diffraction light 923 and 924 also can in like manner be analogized.
Fig. 5 shows that the summary that diffraction unit is formed on the planar substrates is graphic; Fig. 6 is that to show that diffraction unit is formed at the suprabasil summary of a cylinder graphic; And Fig. 7 shows that the summary that diffraction unit is formed on the spherical substrate is graphic.To shown in Figure 7, in the present invention, above-mentioned diffraction unit 101 can be formed in the substrate of a plane 10, a cylinder 20 or a sphere 30 as Fig. 5.
Fig. 8 is that to show that diffraction unit is formed at the summary of a reflective substrate graphic; And Fig. 9 is that to show that diffraction unit is formed at the summary of a penetration substrate graphic.As shown in Figure 8, above-mentioned diffraction unit 101 is to be formed in the reflective substrate 10; Therefore, diffraction unit 101 is reflective diffraction units.As shown in Figure 9, above-mentioned diffraction unit 101 is to be formed in the penetration substrate 10 '; Therefore, diffraction unit 101 is penetration diffraction units.
Figure 10 to Figure 12 is that summary shows the various types that constitutes wavefront reproduction optical module.To shown in Figure 12, wavefront reappears optical module can be selected from following a kind of of group that form as Figure 10: the assembly 41 that comprises collimation lens 311 and a catoptron 401; One gradual index lens (GRIN lens) 51, wherein an end face 51a of this gradual index lens 51 has a reflection horizon 51b; An and corner cube (corner cube) 61.In conjugated optical channels, by reappearing optical principle, allow a light beam follow same light path, produced the self-compensating effect, before the light wave wavefront of the second diffraction light being returned back to have the parallel wave of same characteristic with first incident light through aberration after twice fourier transform at same point diffraction twice.Therefore, can effectively improve the off normal permissibility of system.
In the present invention, light source 201 provides together light modulation or partly same light modulation; Wherein, above-mentioned can be a linearly polarized light, a circularly polarized light or an elliptically polarized light with light modulation or part with light modulation.
Claims (18)
1, a kind of method of utilizing the conjugated optical channels measuring two dimensional displacement quantity is characterized in that, comprises the following steps: at least
From a light emitted one first incident light;
Behind the above-mentioned first incident light incident, one diffraction unit, produce the multi beam first diffraction light;
Select the above-mentioned first diffraction light of two bundle same orders, this two the bundle first diffraction light and above-mentioned first incident light axis symmetry;
Reappear optical module by wavefront, above-mentioned two bundles, the first diffraction light is followed the original optical path footpath above-mentioned diffraction unit of incident more respectively, and form two groups of conjugated optical channels;
The above-mentioned first diffraction light follows original optical path footpath again behind the above-mentioned diffraction unit of incident, produces the multi beam second diffraction light;
Select the above-mentioned second diffraction light of two pairs of same orders, wherein first pair second diffraction light and the above-mentioned first incident light axis symmetry, the second pair second diffraction light also with the above-mentioned first incident light axis symmetry;
Above-mentioned first pair second diffraction light produces one first interference light by an interferometric optical assembly, and second pair second diffraction light produces one second interference light by another interferometric optical assembly: and
Above-mentioned first and second interference light is handled via interference of light phase demodulation technique respectively, obtains two the linear independent displacement amounts of above-mentioned diffraction unit in two-dimensional directional.
2, the method for claim 1, it is characterized in that, above-mentioned first incident light is a collimated light, and selects to form a kind of of group from following: the same light modulation of a linear polarization, the same light modulation of a circular polarization, the same light modulation of an elliptic polarization, the same light modulation of a linear polarization part, a circular polarization are partly with light modulation and the same light modulation of an elliptic polarization part.
3, method as claimed in claim 2 is characterized in that, above-mentioned light source more includes collimation lens.
4, the method for claim 1 is characterized in that, above-mentioned first incident light is the above-mentioned diffraction unit of normal direction incident with above-mentioned diffraction unit.
5, the method for claim 1 is characterized in that, above-mentioned diffraction unit is to be formed to be selected from the following surface of forming one of group: a planar substrates, a cylinder substrate and a spherical substrate.
6, method as claimed in claim 5 is characterized in that, above-mentioned diffraction unit is a reflective diffraction unit.
7, method as claimed in claim 5 is characterized in that, above-mentioned diffraction unit is a penetration diffraction unit.
8, the method for claim 1 is characterized in that, it is to select a kind of from following composition group that above-mentioned wavefront reappears optical module: the assembly that comprises collimation lens and a catoptron; One gradual index lens, wherein an end face of above-mentioned gradual index lens has a reflection horizon; An and corner cube.
9, method as claimed in claim 8 is characterized in that, wherein above-mentioned catoptron is arranged on the focus of above-mentioned collimation lens, and above-mentioned diffraction unit is arranged on another focus of above-mentioned collimation lens.
10, a kind of method of utilizing the conjugated optical channels measuring two dimensional displacement quantity comprises the following steps:
From a light emitted one first incident light;
Behind the above-mentioned first incident light incident, one diffraction unit, produce the multi beam first diffraction light;
Select the above-mentioned first diffraction light of four bundle same orders, this four the bundle first diffraction light and above-mentioned first incident light axis symmetry;
Reappear optical module by wavefront, above-mentioned four bundles, the first diffraction light is followed the original optical path footpath above-mentioned diffraction unit of incident more respectively, and form four groups of conjugated optical channels;
The above-mentioned first diffraction light follows original optical path footpath again behind the above-mentioned diffraction unit of incident, produces the multi beam second diffraction light;
Select the above-mentioned second diffraction light of two bundle same orders, the above-mentioned second diffraction light of above-mentioned two bundle same orders all equates with the angle of above-mentioned first incident light, handle via interference of light phase demodulation technique respectively, obtain two the linear independent displacement amounts of above-mentioned diffraction unit in two-dimensional directional.
11, method as claimed in claim 10, it is characterized in that, above-mentioned first incident light is a collimated light, and selects to form a kind of of group from following: the same light modulation of a linear polarization, the same light modulation of a circular polarization, the same light modulation of an elliptic polarization, the same light modulation of a linear polarization part, a circular polarization are partly with light modulation and the same light modulation of an elliptic polarization part.
As the method for claim 11, it is characterized in that 12, above-mentioned light source more includes collimation lens.
13, method as claimed in claim 10 is characterized in that, above-mentioned first incident light is the above-mentioned diffraction unit of normal direction incident with above-mentioned diffraction unit.
14, method as claimed in claim 10 is characterized in that, above-mentioned diffraction unit is to be formed to be selected from the following surface of forming one of group: a planar substrates, a cylinder substrate and a spherical substrate.
15, method as claimed in claim 14 is characterized in that, above-mentioned diffraction unit is a reflective diffraction unit.
16, method as claimed in claim 14 is characterized in that, above-mentioned diffraction unit is a penetration diffraction unit.
17, method as claimed in claim 10 is characterized in that, it is to select a kind of from following composition group that wherein above-mentioned wavefront reappears optical module: the assembly that comprises collimation lens and a catoptron; One gradual index lens, wherein an end face of above-mentioned gradual index lens has a reflection horizon; An and corner cube.
18, method as claimed in claim 17 is characterized in that, above-mentioned catoptron is arranged on the focus of above-mentioned collimation lens, and above-mentioned diffraction unit is arranged on another focus of above-mentioned collimation lens.
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