CN118371899A - Method and system for detecting nozzle water break of micro-jet laser equipment - Google Patents
Method and system for detecting nozzle water break of micro-jet laser equipment Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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Abstract
The invention relates to a method and a system for detecting water break of a nozzle of a micro-jet laser device, wherein the method comprises the following steps: step 1: determining a hydraulic working interval of the micro-jet laser device; step 2: acquiring a water pressure signal of the micro-jet laser device; step 3: performing signal conversion on the water pressure signal to obtain a water pressure value; step 4: judging water interruption according to the water pressure value, and if the water pressure value exceeds the water pressure working interval, performing light-off treatment on a laser of the micro-jet laser device; step 5: and (4) ending the light-off treatment when the water pressure value is within the water pressure working interval so as to enable the laser to resume normal working, and repeating the steps 1 to 4. The invention judges the water break based on the water pressure of the detection micro-jet laser device, solves the hysteresis problem of the water break detection response, can timely close the laser, and realizes the nozzle protection, so that the whole protection system is efficient, reliable and safe.
Description
Technical Field
The invention belongs to the technical field of semiconductor micro-jet laser processing, and particularly relates to a method and a system for detecting water break of a nozzle of micro-jet laser equipment.
Background
In microfluidic laser devices, high-pressure water systems are of paramount importance, mainly for coupling lasers and cooling the processing area. The high-pressure water is prepared by a water purifier, pressurized by a high-pressure pump and then conveyed into the coupling module through a pipeline, so that the coupling of laser and water is realized. In the actual processing process, due to reasons such as manual misoperation, poor factory conditions, loose pipeline connection and the like, the water purifier and the high-pressure pump are easy to generate abnormal phenomena such as stopping water production, pipeline water leakage, stopping pressurized water outlet of the high-pressure pump, fluctuation of water outlet pressure and the like, and the water interruption caused by the abnormal phenomena causes dry burning of a nozzle of a laser head of the micro-jet laser device, so that the nozzle is damaged. The process from the occurrence of water interruption to the dry burning of the nozzle and even damage is very short, so that the laser needs to be turned off in time in a short time from the water interruption to achieve the protection of the nozzle. In addition, visual detection schemes cannot be adopted for water cut-off detection, because high-pressure water circularly flows in a non-transparent pipeline, and is difficult to effectively observe through visual detection equipment; and the visual system can only analyze, compare and judge after the water cut-off occurs, and the nozzle has been dry-burned at this time, so that the nozzle has larger hysteresis.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a method and a system for detecting water break of a nozzle of a micro-jet laser device. The technical problems to be solved by the invention are realized by the following technical scheme:
The invention provides a method for detecting water break of a nozzle of a micro-jet laser device, which comprises the following steps:
Step 1: determining a hydraulic working interval of the micro-jet laser device;
Step 2: acquiring a water pressure signal of the micro-jet laser device;
step 3: performing signal conversion on the water pressure signal to obtain a water pressure value;
step 4: judging water interruption according to the water pressure value, and if the water pressure value exceeds the water pressure working interval, performing light-off treatment on a laser of the micro-jet laser device;
step 5: and (4) ending the light-off treatment when the water pressure value is within the water pressure working interval so as to enable the laser to resume normal working, and repeating the steps 1 to 4.
In one embodiment of the present invention, step 1 comprises:
Step 1.1: determining a water pressure working range of the water purifier, wherein the water pressure working range comprises a first alarm threshold, a second alarm threshold and a third alarm threshold; the first alarm threshold value is a low-pressure alarm threshold value of the water purifier, the second alarm threshold value is a pressure fluctuation lower limit alarm threshold value of the water purifier, and the third alarm threshold value is a pressure fluctuation upper limit alarm threshold value of the water purifier;
Step 1.2: determining a hydraulic working interval of the high-pressure pump, wherein the hydraulic working interval comprises a fourth alarm threshold value, a fifth alarm threshold value and a sixth alarm threshold value; the fourth alarm threshold is a low-pressure alarm threshold of the high-pressure pump, the fifth alarm threshold is a pressure fluctuation lower limit alarm threshold of the high-pressure pump, and the sixth alarm threshold is a pressure fluctuation upper limit alarm threshold of the high-pressure pump.
In one embodiment of the present invention, step 2 comprises:
Step 2.1: obtaining a first water pressure signal according to the water outlet pressure of the water purifier;
step 2.2: and obtaining a second water pressure signal according to the water outlet pressure of the high-pressure pump.
In one embodiment of the present invention, step 3 comprises:
step 3.1: respectively carrying out analog-digital conversion on the first water pressure signal and the second water pressure signal to obtain a first water pressure digital signal and a second water pressure digital signal;
step 3.2: and respectively carrying out filtering treatment on the first water pressure digital signal and the second water pressure digital signal to obtain a first water pressure value and a second water pressure value.
In one embodiment of the present invention, step 4 comprises:
Step 4.1: comparing the first water pressure value with a first alarm threshold, and executing the step 4.2 if the first water pressure value is greater than or equal to the first alarm threshold; if the first water pressure value is smaller than the first alarm threshold value, executing the step 4.4 in a jumping manner;
Step 4.2: comparing the first water pressure value with a second alarm threshold, and executing the step 4.3 if the first water pressure value is greater than or equal to the second alarm threshold; if the first water pressure value is smaller than the second alarm threshold value, executing the step 4.4 in a jumping manner;
step 4.3: comparing the first water pressure value with a third alarm threshold, and executing the step 4.4 if the first water pressure value is greater than or equal to the third alarm threshold; if the first water pressure value is smaller than the third alarm threshold value, executing the step 5 in a jumping manner;
Step 4.4: and performing light-off treatment on the laser of the micro-jet laser device.
In one embodiment of the present invention, step 4 further comprises:
Step 4a: comparing the second water pressure value with a fourth alarm threshold, and if the second water pressure value is more than or equal to the fourth alarm threshold, executing the step 4b; if the second water pressure value is smaller than the fourth alarm threshold value, executing the step 4d in a jumping manner;
Step 4b: comparing the second water pressure value with a fifth alarm threshold, and executing the step 4c if the second water pressure value is greater than or equal to the fifth alarm threshold; if the second water pressure value is smaller than the fourth alarm threshold value, executing the step 4d in a jumping manner;
Step 4c: comparing the second water pressure value with a sixth alarm threshold, and executing the step 4d if the second water pressure value is greater than or equal to the sixth alarm threshold; if the second water pressure value is smaller than the sixth alarm threshold value, executing the step 5 in a jumping manner;
Step 4d: and performing light-off treatment on the laser of the micro-jet laser device.
The invention also provides a nozzle water-break detection system of the micro-jet laser device, which comprises: the system comprises a sensor module, a signal conversion module, a control module, a protection module and an alarm module; the sensor module is arranged on the micro-jet laser equipment and used for acquiring a water pressure signal of the micro-jet laser equipment; the signal conversion module is electrically connected with the sensor module and the control module respectively and is used for carrying out analog-to-digital conversion on the water pressure signal to obtain a water pressure digital signal; the control module is electrically connected with the protection module and the alarm module respectively, and is used for filtering the water pressure digital signal to obtain a water pressure value, and judging water break according to the water pressure value to obtain a water break judgment result; the protection module is used for performing light-off treatment on the laser of the micro-jet laser device according to the water-break judgment result; and the alarm module is used for alarming according to the water-break judgment result.
In one embodiment of the invention, the sensor module comprises: a first sensor and a second sensor; the first sensor is used for detecting the water outlet pressure of the water purifier to obtain a first water pressure signal; the second sensor is used for detecting the water outlet pressure of the high-pressure pump and obtaining a second water pressure signal.
In one embodiment of the present invention, the signal conversion module includes: the signal conditioning module and the analog-to-digital conversion module; the signal conditioning module is electrically connected with the analog-to-digital conversion module, and is used for converting the water pressure signal from a current signal to a voltage signal, and the analog-to-digital conversion module is used for carrying out analog-to-digital conversion on the voltage signal to obtain a water pressure digital signal.
In one embodiment of the invention, the control module is in communication connection with an external control device, and the external control device adjusts the output power of the laser according to the water cut-off judgment result so as to realize light cut-off processing.
Compared with the prior art, the invention has the beneficial effects that:
The method for detecting the water break of the nozzle of the micro-jet laser equipment comprises the steps of water pressure signal acquisition, water pressure signal processing, water break judgment and light cut-off protection, and the water break judgment is carried out based on the water pressure of the micro-jet laser equipment, so that the problem of hysteresis of water break detection response is solved, the laser can be turned off in time, the nozzle protection is realized, and the whole protection system is efficient, reliable and safe.
According to the water-break detection system for the nozzle of the micro-jet laser equipment, the sensor module is used for acquiring the water pressure signal, and the water pressure signal is processed through the signal conversion module and the control module, so that noise interference in the water-break detection process is reduced or even eliminated, meanwhile, the requirements of signal smoothness and sensitivity are met, finally, the protection module is used for carrying out light-off processing and alarming through the alarm module, and the integration and intelligent degree of the micro-jet laser equipment are improved.
The foregoing description is only an overview of the present invention, and is intended to be implemented in accordance with the teachings of the present invention, as well as the preferred embodiments thereof, together with the following detailed description of the invention, given by way of illustration only, together with the accompanying drawings.
Drawings
FIG. 1 is a flow chart of a method for detecting nozzle water break of a micro-jet laser device according to an embodiment of the present invention;
FIG. 2 is a flow chart of a water cut-off detection method of the water purifier according to the embodiment of the invention;
FIG. 3 is a flow chart of a method of water cut detection for a high pressure pump according to an embodiment of the present invention;
FIG. 4 is a flow chart of nozzle water break detection for a microfluidic laser device according to an embodiment of the present invention;
Fig. 5 is a schematic view of a water supply path structure of a micro-jet laser apparatus according to an embodiment of the present invention;
Fig. 6 is a system architecture diagram of a nozzle water-break detection system of a micro-jet laser device according to an embodiment of the present invention.
Icon: 10-a sensor module; 11-a first sensor; 12-a second sensor; a 20-signal conversion module; a 21-signal conditioning module; 22-an analog-to-digital conversion module; 30-a control module; 40-a protection module; 50-an alarm module; 1-a water purifier; 2-high pressure pump; 3-laser.
Detailed Description
In order to further explain the technical means and effects adopted by the invention to achieve the preset aim, the following describes in detail a method and a system for detecting nozzle water break of a micro-jet laser device according to the invention with reference to the attached drawings and the detailed description.
The foregoing and other features, aspects, and advantages of the present invention will become more apparent from the following detailed description of the preferred embodiments when taken in conjunction with the accompanying drawings. The technical means and effects adopted by the present invention to achieve the intended purpose can be more deeply and specifically understood through the description of the specific embodiments, however, the attached drawings are provided for reference and description only, and are not intended to limit the technical scheme of the present invention.
Example 1
As shown in fig. 1, the present embodiment provides a method for detecting nozzle water break of a micro-jet laser device, including:
Step 1: and determining the hydraulic working range of the micro-jet laser device.
In an alternative embodiment, step 1 comprises:
Step 1.1: determining a water pressure working range of the water purifier, wherein the water pressure working range comprises a first alarm threshold, a second alarm threshold and a third alarm threshold;
specifically, the first alarm threshold, the second alarm threshold and the third alarm threshold together form a water pressure working interval of the water purifier, and the first alarm threshold, the second alarm threshold and the third alarm threshold are a low-pressure alarm threshold of the water purifier, a pressure fluctuation lower limit alarm threshold of the water purifier and a pressure fluctuation upper limit alarm threshold of the water purifier in sequence, namely, the water cut-off judging process comprises judging the pressure fluctuation of the water purifier except the low-pressure judgment of the water purifier so as to improve the timeliness of water cut-off detection.
Step 1.2: and determining a hydraulic working interval of the high-pressure pump, wherein the hydraulic working interval comprises a fourth alarm threshold value, a fifth alarm threshold value and a sixth alarm threshold value.
Specifically, the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold together form a hydraulic working interval of the high-pressure pump, and the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold are a low-pressure alarm threshold of the high-pressure pump, a pressure fluctuation lower limit alarm threshold of the high-pressure pump and a pressure fluctuation upper limit alarm threshold of the high-pressure pump in sequence. Similarly, in addition to determining the low pressure of the high pressure pump, the water cut-off determination process includes determining the pressure fluctuation of the high pressure pump to improve the timeliness of the water cut-off detection.
Step 2: and acquiring a water pressure signal of the micro-jet laser device.
In an alternative embodiment, step 2 comprises:
Step 2.1: obtaining a first water pressure signal according to the water outlet pressure of the water purifier;
step 2.2: and obtaining a second water pressure signal according to the water outlet pressure of the high-pressure pump.
Step 3: and performing signal conversion on the water pressure signal to obtain a water pressure value.
In an alternative embodiment, step 3 comprises:
step 3.1: respectively carrying out analog-digital conversion on the first water pressure signal and the second water pressure signal to obtain a first water pressure digital signal and a second water pressure digital signal;
step 3.2: and respectively carrying out filtering treatment on the first water pressure digital signal and the second water pressure digital signal to obtain a first water pressure value and a second water pressure value.
It is worth noting that, in order to meet the requirements of signal smoothness and sensitivity, in addition to analog-to-digital conversion of the water pressure signal, further filtering processing is needed, and two groups of pressure values are obtained by performing algorithm filtering on two groups of original digital signals, so that noise interference generated in the water cut-off detection signal acquisition process is eliminated, and meanwhile, the requirements of signal smoothness and sensitivity are met. Furthermore, because the water pressure signal is obtained in real time and the processing of the water pressure signal is also real-time, the real-time water cut-off judgment can be carried out in the subsequent steps, and thus the light cut-off processing can be carried out on the laser of the micro-jet laser device in time.
Step 4: and judging water interruption according to the water pressure value, and performing light-off treatment on the laser of the micro-jet laser device if the water pressure value exceeds the water pressure working interval.
As shown in fig. 2, in an alternative embodiment, first, it is determined whether the water outlet of the water purifier is normal, and step 4 includes:
Step 4.1: comparing the first water pressure value with a first alarm threshold, and executing the step 4.2 if the first water pressure value is greater than or equal to the first alarm threshold; if the first water pressure value is smaller than the first alarm threshold value, executing the step 4.4 in a jumping manner;
Step 4.2: comparing the first water pressure value with a second alarm threshold, and executing the step 4.3 if the first water pressure value is greater than or equal to the second alarm threshold; if the first water pressure value is smaller than the second alarm threshold value, executing the step 4.4 in a jumping manner;
step 4.3: comparing the first water pressure value with a third alarm threshold, and executing the step 4.4 if the first water pressure value is greater than or equal to the third alarm threshold; if the first water pressure value is smaller than the third alarm threshold value, executing the step 5 in a jumping manner;
Step 4.4: and performing light-off treatment on the laser of the micro-jet laser device.
After the steps 4.1 to 4.3, if the first water pressure value is judged to be located in the water pressure working interval, the water outlet of the water purifier is normal and stable, the water outlet of the water purifier is free from the risk of water interruption, and then the water outlet of the high-pressure pump is judged.
In an alternative embodiment, as shown in fig. 3, step 4 further includes:
Step 4a: comparing the second water pressure value with a fourth alarm threshold, and if the second water pressure value is more than or equal to the fourth alarm threshold, executing the step 4b; if the second water pressure value is smaller than the fourth alarm threshold value, executing the step 4d in a jumping manner;
Step 4b: comparing the second water pressure value with a fifth alarm threshold, and executing the step 4c if the second water pressure value is greater than or equal to the fifth alarm threshold; if the second water pressure value is smaller than the fourth alarm threshold value, executing the step 4d in a jumping manner;
Step 4c: comparing the second water pressure value with a sixth alarm threshold, and executing the step 4d if the second water pressure value is greater than or equal to the sixth alarm threshold; if the second water pressure value is smaller than the sixth alarm threshold value, executing the step 5 in a jumping manner;
Step 4d: and performing light-off treatment on the laser of the micro-jet laser device.
After the steps 4a to 4c, if the second water pressure value is judged to be located in the water pressure working interval, the high-pressure pump water outlet is normal and stable, the high-pressure pump water outlet also has no risk of water interruption, the water outlet of the micro-jet laser equipment is normal, and laser can be normally turned on. If the water outlet pressure of any one of the water purifier and the high-pressure pump is judged not to meet the threshold requirement of the water pressure working section, immediately performing light-off treatment, namely turning off the laser to avoid dry burning.
It is noted that, because the micro-jet laser device is continuously working, the high-pressure water and the laser are continuously coupled with each other, and the first water pressure signal and the second water pressure signal are obtained in real time, the water break judgment of the first water pressure number and the second water pressure number can be synchronously carried out along with the signal acquisition.
Step 5: and (4) ending the light-off treatment when the water pressure value is within the water pressure working interval so as to enable the laser to resume normal working, and repeating the steps 1 to 4.
After the water pressure value is in the water pressure working interval after the accident is eliminated, stopping the light-off treatment, starting the laser to emit light and carrying out water light coupling, and continuously carrying out water pressure acquisition and judgment along with the continuous repetition of the steps 1 to 4 of the water light coupling.
The principle of the nozzle water-break detection method of the micro-jet laser device of the embodiment is as follows:
As shown in fig. 4, after water cut-off detection is started, firstly, pressure acquisition is performed, and the acquired pressure signals are subjected to analog-to-digital conversion and filtering in sequence; and judging the pressure of the water purifier and the pressure of the high-pressure pump according to the water pressure value obtained after the treatment, and if the water pressure value and the high-pressure pump meet the judging conditions, enabling the micro-jet laser equipment to normally operate, and performing water cut-off detection circularly at the moment. When the judging condition of either the water purifier pressure judgment and the high-pressure pump pressure judgment is not met, immediately performing the light-off treatment. The light-off processing comprises light-off processing performed through hardware and light-off processing performed through communication, and the light-off processing are combined, so that an operator is reminded of paying attention through an audible and visual alarm when the light-off processing is performed, and the fault that water is cut off in the micro-jet laser equipment can be eliminated in time.
Specifically, first, a first water pressure signal and a second water pressure signal are respectively obtained, and a water pressure working interval of the micro-jet laser device is determined according to the working condition of the actual micro-jet laser device; performing analog-digital conversion and filtering treatment on the first water pressure signal and the second water pressure signal respectively to obtain a first water pressure value DP1 and a second water pressure value DP2 so as to facilitate water cut-off judgment through comparison with a threshold value; when the water cut-off judgment is carried out, comparing the first water pressure value DP1 with a first alarm threshold value N11, and if the first water pressure value DP1 is more than or equal to the first alarm threshold value N11, continuing to carry out the pressure fluctuation judgment of the water purifier; performing pressure fluctuation lower limit judgment of the water purifier, continuously comparing the first water pressure value DP1 with the second alarm threshold N12, and performing pressure fluctuation upper limit fluctuation judgment of the water purifier if the first water pressure value DP1 is more than or equal to the second alarm threshold N12; if the first water pressure value DP1 is smaller than the third alarm threshold value N13, the water outlet of the water purifier is stable; otherwise, immediately performing light-off treatment. Similarly, comparing the second water pressure value DP2 with a fourth alarm threshold value N21, and if the second water pressure value DP2 is more than or equal to the fourth alarm threshold value N21, continuing to judge the pressure fluctuation of the high-pressure pump; judging the lower limit of the pressure fluctuation of the high-pressure pump, and if the second water pressure value DP2 is more than or equal to the fifth alarm threshold N22, continuing to judge the upper limit of the pressure fluctuation of the high-pressure pump; if the second water pressure value DP2 is smaller than the sixth alarm threshold N23, the water output of the high-pressure pump is stable; that is, the first water pressure signal DP1 and the second water pressure signal DP2 are both in the normal range, and if any of the above-mentioned determinations is not true, the light-off process is immediately performed to turn off the laser. The fourth alarm threshold N21 is a low-pressure alarm threshold of the high-pressure pump; the fifth alarm threshold N22 is a pressure fluctuation lower limit alarm threshold of the high-pressure pump; the sixth alarm threshold value N23 is the upper limit alarm threshold value of the pressure fluctuation of the high-pressure pump.
The method for detecting the water break of the nozzle of the micro-jet laser equipment comprises the steps of water pressure signal acquisition, water pressure signal processing, water break judgment and light cut-off protection, and the water break judgment is carried out based on the water pressure of the micro-jet laser equipment, so that the problem of hysteresis of water break detection response is solved, the laser can be turned off in time, the nozzle protection is realized, and the whole protection system is efficient, reliable and safe.
Example two
The water supply channel of the micro-jet laser device in the embodiment of the invention is shown in fig. 5, which is sequentially a water purifier 1, a high-pressure pump 2 and a laser 3, wherein the high-pressure pump 2 is connected with the laser 3 through a high-pressure pipeline and supplies high-pressure water to the laser 3, laser emitted by the laser 3 is coupled with the high-pressure water through an optical wafer, and finally micro-jet laser is formed through a nozzle; the sensor module 10 is disposed on the water supply path and is used for acquiring a water pressure signal on the water supply path.
Specifically, as shown in fig. 6, the sensor module 10 includes: a first sensor 11 and a second sensor 12; the first sensor 11 is used for detecting the water outlet pressure of the water purifier 1 to obtain a first water pressure signal; the second sensor 12 is configured to detect a water outlet pressure of the high-pressure pump 2, obtain a second water pressure signal, and perform a water cut-off judgment in a subsequent module based on the pressure signal acquired by the sensor module 10. Wherein, the first sensor 11 is arranged at the water outlet of the water purifier 1, and the second sensor 12 is arranged at the water outlet of the high-pressure pump 2.
It is noted that, the first sensor 11 and the second sensor 12 are directly measured by contact, the detected water pressure is converted into a current value through a physical reaction, and the current value is transmitted as a current value signal, because the current value signal transmission has the characteristics of long transmission distance and strong interference resistance.
As shown in fig. 6, in this embodiment, there is provided a nozzle water break detection system of a micro-jet laser apparatus, including: sensor module 10, signal conversion module 20, control module 30, protection module 40, and alarm module 50.
The sensor module 10 is arranged on the micro-jet laser device and is used for acquiring a water pressure signal of the micro-jet laser device; the signal conversion module 20 is electrically connected with the sensor module 10 and the control module 30 respectively and is used for carrying out analog-to-digital conversion on the water pressure signal to obtain a water pressure digital signal; the control module 30 is electrically connected with the protection module 40 and the alarm module 50 respectively, and is used for filtering the water pressure digital signal to obtain a water pressure value, and judging water break according to the water pressure value to obtain a water break judgment result; a protection module 40, configured to perform light-off processing on the laser 3 of the micro-jet laser device according to the water-break judgment result; and the alarm module 50 is used for alarming according to the water cut-off judging result.
In an alternative embodiment, the signal conversion module 20 includes: a signal conditioning module 21 and an analog-to-digital conversion module 22; the signal conditioning module 21 is electrically connected to the analog-to-digital conversion module 22, the signal conditioning module 21 is configured to convert the water pressure signal from a current signal to a voltage signal, and the analog-to-digital conversion module 22 is configured to perform analog-to-digital conversion on the voltage signal to obtain a water pressure digital signal. Since the water pressure signal acquired by the sensor module 10 is transmitted in the form of a current value signal, the current value needs to be converted into a voltage value before the analog-to-digital conversion is performed. Specifically, the current signal is converted into a voltage signal through a resistor.
In an alternative embodiment, the control module 30 is communicatively connected to an external control device, and the external control device adjusts the output power of the laser 3 according to the water cut-off determination result to implement the light cut-off process. Specifically, after the control module 30 performs the water-break judgment, the protection module 40 directly controls the hardware of the laser 3 to quickly turn off the physical gate switch (which may be an optocoupler) of the laser, so as to realize quick protection and light-off. Meanwhile, the water cut-off judging result is communicated to the external control equipment, after the external control equipment receives the alarm information, the output power of the laser 3 is automatically set to be 0W through an alarm event triggering scheduling mechanism, and double-output light cut-off protection is formed, namely, light cut-off processing through hardware and light cut-off processing through communication are combined. In addition, the alarm module 50 is connected with an audible and visual alarm, and reminds operators of paying attention through audible and visual alarm and eliminates the fault that the micro-jet laser equipment breaks water in time.
In an alternative embodiment, the control module 30 performs a filtering process on the water pressure digital signal, and through the filtering process, noise interference generated in the water cut-off detection process is eliminated, and meanwhile, requirements of signal smoothness and sensitivity are met. Preferably, the period of the filtering process of the two sets of hydraulic pressure digital signals may be set individually in the range of 100ms to 500 ms.
In an alternative embodiment, the control module 30 is connected to the external control device, the external control device and the micro-jet laser device through ethernet communication, and the ethernet-based proprietary protocol is adopted for development, and the ethernet communication protocol is a high-speed communication protocol, so that data transmission can be performed quickly and reliably. All communication interfaces such as bottom data, control parameters, alarm information and the like of the control module 30 and the laser 3 can be opened to external control equipment, and the external control equipment can be used for displaying and monitoring, so that two groups of pressure values can be displayed, the operation data and the operation state of the laser 3 and the control module 30 can be displayed, and the parameters of the laser 3 can be modified and set.
According to the water-break detection system for the nozzle of the micro-jet laser equipment, the sensor module is used for acquiring the water pressure signal, and the water pressure signal is processed through the signal conversion module and the control module, so that noise interference in the water-break detection process is reduced or even eliminated, meanwhile, the requirements of signal smoothness and sensitivity are met, finally, the protection module is used for carrying out light-off processing and alarming through the alarm module, and the integration and intelligent degree of the micro-jet laser equipment are improved.
It should be noted that in this document relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in an article or device comprising the element. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The orientation or positional relationship indicated by "upper", "lower", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description and to simplify the description, and is not indicative or implying that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the invention.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (10)
1. A nozzle water break detection method of a micro-jet laser apparatus, comprising:
Step 1: determining a hydraulic working interval of the micro-jet laser device;
Step 2: acquiring a water pressure signal of the micro-jet laser device;
step 3: performing signal conversion on the water pressure signal to obtain a water pressure value;
Step 4: judging water interruption according to the water pressure value, and performing light-off treatment on a laser of the micro-jet laser device if the water pressure value exceeds the water pressure working interval;
step 5: and (3) ending the light-off treatment when the water pressure value is within the water pressure working interval so as to enable the laser to resume normal operation, and repeating the steps 1 to 4.
2. The method for detecting nozzle water break of a micro-jet laser apparatus according to claim 1, wherein the step 1 comprises:
Step 1.1: determining a water pressure working range of the water purifier, wherein the water pressure working range comprises a first alarm threshold, a second alarm threshold and a third alarm threshold; the first alarm threshold is a low-pressure alarm threshold of the water purifier, the second alarm threshold is a pressure fluctuation lower limit alarm threshold of the water purifier, and the third alarm threshold is a pressure fluctuation upper limit alarm threshold of the water purifier;
Step 1.2: determining a hydraulic working interval of the high-pressure pump, wherein the hydraulic working interval comprises a fourth alarm threshold value, a fifth alarm threshold value and a sixth alarm threshold value; the fourth alarm threshold is a low-pressure alarm threshold of the high-pressure pump, the fifth alarm threshold is a pressure fluctuation lower limit alarm threshold of the high-pressure pump, and the sixth alarm threshold is a pressure fluctuation upper limit alarm threshold of the high-pressure pump.
3. The method for detecting nozzle water break of a micro-jet laser apparatus according to claim 2, wherein the step 2 comprises:
Step 2.1: obtaining a first water pressure signal according to the water outlet pressure of the water purifier;
step 2.2: and obtaining a second water pressure signal according to the water outlet pressure of the high-pressure pump.
4. A nozzle water break detection method of a micro-jet laser device according to claim 3, wherein the step 3 comprises:
Step 3.1: respectively carrying out analog-digital conversion on the first water pressure signal and the second water pressure signal to obtain a first water pressure digital signal and a second water pressure digital signal;
step 3.2: and respectively carrying out filtering treatment on the first water pressure digital signal and the second water pressure digital signal to obtain a first water pressure value and a second water pressure value.
5. The method for detecting nozzle water break of a micro-jet laser apparatus according to claim 4, wherein said step 4 comprises:
Step 4.1: comparing the first water pressure value with the first alarm threshold, and executing the step 4.2 if the first water pressure value is greater than or equal to the first alarm threshold; if the first water pressure value is smaller than the first alarm threshold value, skipping to execute the step 4.4;
Step 4.2: comparing the first water pressure value with the second alarm threshold, and executing the step 4.3 if the first water pressure value is greater than or equal to the second alarm threshold; if the first water pressure value is smaller than the second alarm threshold value, skipping to execute the step 4.4;
step 4.3: comparing the first water pressure value with the third alarm threshold, and executing the step 4.4 if the first water pressure value is greater than or equal to the third alarm threshold; if the first water pressure value is smaller than the third alarm threshold value, executing the step 5 in a jumping manner;
step 4.4: and performing light-off treatment on the laser of the micro-jet laser device.
6. The method for detecting nozzle water break of a micro-jet laser apparatus according to claim 4, wherein said step 4 further comprises:
Step 4a: comparing the second water pressure value with the fourth alarm threshold, and executing the step 4b if the second water pressure value is more than or equal to the fourth alarm threshold; if the second water pressure value is smaller than the fourth alarm threshold value, skipping to execute the step 4d;
step 4b: comparing the second water pressure value with the fifth alarm threshold, and executing the step 4c if the second water pressure value is greater than or equal to the fifth alarm threshold; if the second water pressure value is smaller than the fourth alarm threshold value, skipping to execute the step 4d;
step 4c: comparing the second water pressure value with the sixth alarm threshold, and executing the step 4d if the second water pressure value is greater than or equal to the sixth alarm threshold; if the second water pressure value is smaller than the sixth alarm threshold value, the step 5 is skipped;
step 4d: and performing light-off treatment on the laser of the micro-jet laser device.
7. A nozzle water break detection system of a microfluidic laser device, comprising: the system comprises a sensor module, a signal conversion module, a control module, a protection module and an alarm module;
The sensor module is arranged on the micro-jet laser equipment and is used for acquiring a water pressure signal of the micro-jet laser equipment;
The signal conversion module is electrically connected with the sensor module and the control module respectively and is used for carrying out analog-to-digital conversion on the water pressure signal to obtain a water pressure digital signal;
The control module is electrically connected with the protection module and the alarm module respectively and is used for filtering the water pressure digital signal to obtain a water pressure value, and judging water break according to the water pressure value to obtain a water break judgment result;
the protection module is used for performing light-off treatment on the laser of the micro-jet laser device according to the water-break judgment result;
And the alarm module is used for alarming according to the water-break judgment result.
8. The nozzle water break detection system of a microfluidic laser device according to claim 7, wherein the sensor module comprises: a first sensor and a second sensor; the first sensor is used for detecting the water outlet pressure of the water purifier to obtain a first water pressure signal; the second sensor is used for detecting the water outlet pressure of the high-pressure pump and obtaining a second water pressure signal.
9. The nozzle water break detection system of a microfluidic laser device according to claim 7, wherein the signal conversion module comprises: the signal conditioning module and the analog-to-digital conversion module;
The signal conditioning module is electrically connected with the analog-to-digital conversion module, the signal conditioning module is used for converting the water pressure signal from a current signal to a voltage signal, and the analog-to-digital conversion module is used for carrying out analog-to-digital conversion on the voltage signal to obtain a water pressure digital signal.
10. The system for detecting nozzle water break of a micro-jet laser device according to claim 7, wherein the control module is in communication connection with an external control device, and the external control device adjusts the output power of the laser according to the water break judgment result so as to realize light-off processing.
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