CN118371899A - Method and system for detecting nozzle water break of micro-jet laser equipment - Google Patents

Abstract

The invention relates to a method and a system for detecting water break of a nozzle of a micro-jet laser device, wherein the method comprises the following steps: step 1: determining a hydraulic working interval of the micro-jet laser device; step 2: acquiring a water pressure signal of the micro-jet laser device; step 3: performing signal conversion on the water pressure signal to obtain a water pressure value; step 4: judging water interruption according to the water pressure value, and if the water pressure value exceeds the water pressure working interval, performing light-off treatment on a laser of the micro-jet laser device; step 5: and (4) ending the light-off treatment when the water pressure value is within the water pressure working interval so as to enable the laser to resume normal working, and repeating the steps 1 to 4. The invention judges the water break based on the water pressure of the detection micro-jet laser device, solves the hysteresis problem of the water break detection response, can timely close the laser, and realizes the nozzle protection, so that the whole protection system is efficient, reliable and safe.

Description

A method and system for detecting water cutoff of nozzle of micro jet laser equipment

Technical Field

The invention belongs to the technical field of semiconductor micro-jet laser processing, and in particular relates to a nozzle water cut-off detection method and system for micro-jet laser equipment.

Background technique

In micro jet laser equipment, the high pressure water system is extremely important, mainly used for coupling laser and cooling processing area. High pressure water is prepared by a pure water machine, pressurized by a high pressure pump and transported to the coupling module through a pipeline to achieve the coupling between laser and water. In the actual processing process, due to human error, poor factory conditions, loose pipeline connection and other reasons, the pure water machine and high pressure pump are more likely to stop making water, leak in the pipeline, stop pressurizing water from the high pressure pump and fluctuate in the water pressure. The water outage caused by these abnormal phenomena makes the nozzle of the laser head of the micro jet laser equipment dry burn, thereby causing nozzle damage. The process from water outage to nozzle dry burn or even damage is very short, so it is necessary to turn off the laser in time within a short time from the beginning of water outage to achieve nozzle protection. In addition, visual inspection cannot be used for water outage detection, because high pressure water circulates in non-transparent pipelines, and it is difficult to effectively observe through visual inspection equipment; and the visual system can only analyze, compare and judge after the water outage occurs. At this time, the nozzle has already been dry burned, and there is a large hysteresis.

Summary of the invention

In order to solve the above problems existing in the prior art, the present invention provides a method and system for detecting water cutoff of a nozzle of a micro jet laser device. The technical problem to be solved by the present invention is achieved by the following technical solutions:

The present invention provides a method for detecting water cutoff of a nozzle of a micro jet laser device, comprising:

Step 1: Determine the water pressure working range of the microjet laser device;

Step 2: Obtain the water pressure signal of the microjet laser device;

Step 3: Perform signal conversion on the water pressure signal to obtain a water pressure value;

Step 4: Determine water cut-off based on the water pressure value. If the water pressure value exceeds the water pressure working range, turn off the laser of the micro jet laser device.

Step 5: When the water pressure value is within the water pressure working range, end the light-off process to restore the laser to normal operation, and repeat steps 1 to 4.

In one embodiment of the present invention, step 1 comprises:

Step 1.1: Determine the water pressure working range of the water purifier, including the first alarm threshold, the second alarm threshold and the third alarm threshold; the first alarm threshold is the low pressure alarm threshold of the water purifier, the second alarm threshold is the lower limit alarm threshold of the pressure fluctuation of the water purifier, and the third alarm threshold is the upper limit alarm threshold of the pressure fluctuation of the water purifier;

Step 1.2: Determine the water pressure working range of the high-pressure pump, including the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold; the fourth alarm threshold is the low-pressure alarm threshold of the high-pressure pump, the fifth alarm threshold is the lower limit alarm threshold of the pressure fluctuation of the high-pressure pump, and the sixth alarm threshold is the upper limit alarm threshold of the pressure fluctuation of the high-pressure pump.

In one embodiment of the present invention, step 2 comprises:

Step 2.1: Obtain a first water pressure signal according to the water outlet pressure of the water purifier;

Step 2.2: Obtain a second water pressure signal according to the water outlet pressure of the high-pressure pump.

In one embodiment of the present invention, step 3 comprises:

Step 3.1: Perform analog-to-digital conversion on the first water pressure signal and the second water pressure signal respectively to obtain a first water pressure digital signal and a second water pressure digital signal;

Step 3.2: Filter the first water pressure digital signal and the second water pressure digital signal respectively to obtain a first water pressure value and a second water pressure value.

In one embodiment of the present invention, step 4 comprises:

Step 4.1: Compare the first water pressure value with the first alarm threshold. If the first water pressure value is ≥ the first alarm threshold, execute step 4.2; if the first water pressure value is < the first alarm threshold, jump to execute step 4.4;

Step 4.2: Compare the first water pressure value with the second alarm threshold. If the first water pressure value is ≥ the second alarm threshold, execute step 4.3; if the first water pressure value is < the second alarm threshold, jump to execute step 4.4;

Step 4.3: Compare the first water pressure value with the third alarm threshold. If the first water pressure value is ≥ the third alarm threshold, execute step 4.4; if the first water pressure value is < the third alarm threshold, jump to execute step 5;

Step 4.4: Turn off the laser of the microjet laser device.

In one embodiment of the present invention, step 4 further includes:

Step 4a: Compare the second water pressure value with the fourth alarm threshold. If the second water pressure value is ≥ the fourth alarm threshold, execute step 4b; if the second water pressure value is < the fourth alarm threshold, jump to execute step 4d;

Step 4b: Compare the second water pressure value with the fifth alarm threshold. If the second water pressure value is ≥ the fifth alarm threshold, execute step 4c; if the second water pressure value is < the fourth alarm threshold, jump to execute step 4d;

Step 4c: Compare the second water pressure value with the sixth alarm threshold. If the second water pressure value is ≥ the sixth alarm threshold, execute step 4d; if the second water pressure value is < the sixth alarm threshold, jump to execute step 5;

Step 4d: Turn off the laser of the microjet laser device.

The present invention also provides a nozzle water cut-off detection system for a micro-jet laser device, comprising: a sensor module, a signal conversion module, a control module, a protection module and an alarm module; the sensor module is arranged on the micro-jet laser device and is used to obtain the water pressure signal of the micro-jet laser device; the signal conversion module is electrically connected to the sensor module and the control module respectively, and is used to perform analog-to-digital conversion on the water pressure signal to obtain a water pressure digital signal; the control module is electrically connected to the protection module and the alarm module respectively, and is used to perform filtering processing on the water pressure digital signal to obtain a water pressure value, and perform water cut-off judgment according to the water pressure value to obtain a water cut-off judgment result; the protection module is used to perform light-off processing on the laser of the micro-jet laser device according to the water cut-off judgment result; and the alarm module is used to give an alarm according to the water cut-off judgment result.

In one embodiment of the present invention, the sensor module includes: a first sensor and a second sensor; the first sensor is used to detect the water outlet pressure of the water purifier to obtain a first water pressure signal; the second sensor is used to detect the water outlet pressure of the high-pressure pump to obtain a second water pressure signal.

In one embodiment of the present invention, the signal conversion module includes: a signal conditioning module and an analog-to-digital conversion module; the signal conditioning module is electrically connected to the analog-to-digital conversion module, the signal conditioning module is used to convert the water pressure signal from a current signal to a voltage signal, and the analog-to-digital conversion module is used to perform analog-to-digital conversion on the voltage signal to obtain a water pressure digital signal.

In one embodiment of the present invention, the control module is communicatively connected to an external control device, and the external control device adjusts the output power of the laser according to the water cut-off judgment result to implement light-off processing.

Compared with the prior art, the present invention has the following beneficial effects:

The nozzle water cut-off detection method of the micro-jet laser device of the present invention includes water pressure signal acquisition, water pressure signal processing, water cut-off judgment and light-off protection. The water cut-off judgment is performed based on the water pressure of the micro-jet laser device, which solves the lag problem of the water cut-off detection response, can shut down the laser in time, and achieves nozzle protection, making the entire protection system efficient, reliable and safe.

The nozzle water cut-off detection system of the micro-jet laser device of the present invention obtains the water pressure signal through the sensor module, and processes it through the signal conversion module and the control module to reduce or even eliminate the noise interference in the water cut-off detection process, while meeting the requirements of signal smoothness and sensitivity. Finally, the protection module performs light-off processing and the alarm module gives an alarm, thereby improving the integration and intelligence of the micro-jet laser device.

The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following specifically cites a preferred embodiment and describes it in detail with the accompanying drawings as follows.

BRIEF DESCRIPTION OF THE DRAWINGS

1 is a flow chart of a method for detecting water cutoff in a nozzle of a micro jet laser device according to an embodiment of the present invention;

FIG2 is a flow chart of a water outage detection method for a water purifier according to an embodiment of the present invention;

3 is a flow chart of a method for detecting water failure of a high-pressure pump according to an embodiment of the present invention;

4 is a flow chart of nozzle water cut-off detection of a micro jet laser device according to an embodiment of the present invention;

5 is a schematic diagram of the water supply passage structure of the micro jet laser device according to an embodiment of the present invention;

FIG6 is a system architecture diagram of a nozzle water break detection system for a micro-jet laser device provided in an embodiment of the present invention.

Icons: 10-sensor module; 11-first sensor; 12-second sensor; 20-signal conversion module; 21-signal conditioning module; 22-analog-to-digital conversion module; 30-control module; 40-protection module; 50-alarm module; 1-pure water machine; 2-high-pressure pump; 3-laser.

Detailed ways

In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the following is a detailed description of a nozzle water cut-off detection method and system for a micro-jet laser device proposed in accordance with the present invention, in conjunction with the accompanying drawings and specific implementation methods.

The above and other technical contents, features and effects of the present invention are clearly presented in the following detailed description of the specific implementation modes in conjunction with the accompanying drawings. Through the description of the specific implementation modes, the technical means and effects adopted by the present invention to achieve the predetermined purpose can be more deeply and specifically understood. However, the attached drawings are only for reference and explanation purposes and are not used to limit the technical solutions of the present invention.

Embodiment 1

As shown in FIG1 , this embodiment provides a method for detecting water cutoff of a nozzle of a micro jet laser device, comprising:

Step 1: Determine the water pressure operating range of the microjet laser device.

In an optional embodiment, step 1 includes:

Step 1.1: Determine the water pressure working range of the water purifier, including the first alarm threshold, the second alarm threshold and the third alarm threshold;

Specifically, the first alarm threshold, the second alarm threshold and the third alarm threshold together constitute the water pressure working range of the water purifier. The first alarm threshold, the second alarm threshold and the third alarm threshold are respectively the low pressure alarm threshold of the water purifier, the lower limit alarm threshold of the pressure fluctuation of the water purifier and the upper limit alarm threshold of the pressure fluctuation of the water purifier. That is, in addition to the low pressure judgment of the water purifier, the water outage judgment process also includes the judgment of the pressure fluctuation of the water purifier to improve the timeliness of water outage detection.

Step 1.2: Determine the water pressure working range of the high-pressure pump, including the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold.

Specifically, the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold together constitute the water pressure working range of the high-pressure pump, and the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold are respectively the low-pressure alarm threshold of the high-pressure pump, the lower limit alarm threshold of the pressure fluctuation of the high-pressure pump and the upper limit alarm threshold of the pressure fluctuation of the high-pressure pump. Similarly, in addition to judging the low pressure of the high-pressure pump, the water outage judgment process also includes judging the pressure fluctuation of the high-pressure pump to improve the timeliness of water outage detection.

Step 2: Obtain the water pressure signal of the microjet laser device.

In an optional embodiment, step 2 includes:

Step 2.1: Obtain a first water pressure signal according to the water outlet pressure of the water purifier;

Step 2.2: Obtain a second water pressure signal according to the water outlet pressure of the high-pressure pump.

Step 3: Perform signal conversion on the water pressure signal to obtain the water pressure value.

In an optional embodiment, step 3 includes:

Step 3.1: Perform analog-to-digital conversion on the first water pressure signal and the second water pressure signal respectively to obtain a first water pressure digital signal and a second water pressure digital signal;

Step 3.2: Filter the first water pressure digital signal and the second water pressure digital signal respectively to obtain a first water pressure value and a second water pressure value.

It is worth noting that in order to meet the requirements of signal smoothness and sensitivity, in addition to the analog-to-digital conversion of the water pressure signal, further filtering processing is required. By performing algorithm filtering on the two sets of original digital signals, two sets of pressure values are obtained to eliminate the noise interference generated during the water cut detection signal acquisition process, while meeting the requirements of signal smoothness and sensitivity. Furthermore, since the water pressure signal is acquired in real time, the processing of the water pressure signal is also real-time, so that real-time water cut judgment can be performed in the subsequent steps, so that the laser of the microjet laser device can be turned off in time.

Step 4: Determine water cut-off based on the water pressure value. If the water pressure value exceeds the water pressure working range, turn off the laser of the microjet laser device.

As shown in FIG. 2 , in an optional implementation, firstly, it is determined whether the water output of the water purifier is normal, and step 4 includes:

Step 4.1: Compare the first water pressure value with the first alarm threshold. If the first water pressure value is ≥ the first alarm threshold, execute step 4.2; if the first water pressure value is < the first alarm threshold, jump to execute step 4.4;

Step 4.2: Compare the first water pressure value with the second alarm threshold. If the first water pressure value is ≥ the second alarm threshold, execute step 4.3; if the first water pressure value is < the second alarm threshold, jump to execute step 4.4;

Step 4.3: Compare the first water pressure value with the third alarm threshold. If the first water pressure value is ≥ the third alarm threshold, execute step 4.4; if the first water pressure value is < the third alarm threshold, jump to execute step 5;

Step 4.4: Turn off the laser of the microjet laser device.

After step 4.1 to step 4.3, if it is determined that the first water pressure value is within the water pressure working range, it means that the water output of the water purifier is normal and stable, and there is no risk of water interruption in the water output of the water purifier. Next, the water output of the high-pressure pump needs to be judged.

As shown in FIG3 , in an optional implementation, step 4 further includes:

Step 4a: Compare the second water pressure value with the fourth alarm threshold. If the second water pressure value is ≥ the fourth alarm threshold, execute step 4b; if the second water pressure value is < the fourth alarm threshold, jump to execute step 4d;

Step 4b: Compare the second water pressure value with the fifth alarm threshold. If the second water pressure value is ≥ the fifth alarm threshold, execute step 4c; if the second water pressure value is < the fourth alarm threshold, jump to execute step 4d;

Step 4c: Compare the second water pressure value with the sixth alarm threshold. If the second water pressure value is ≥ the sixth alarm threshold, execute step 4d; if the second water pressure value is < the sixth alarm threshold, jump to execute step 5;

Step 4d: Turn off the laser of the microjet laser device.

After step 4a to step 4c, if it is determined that the second water pressure value is within the water pressure working range, it means that the water output of the high-pressure pump is normal and stable, and there is no risk of water outage from the high-pressure pump, indicating that the water output of the micro-jet laser device is normal and the laser can be turned on normally. If it is determined that the water output pressure of either the pure water machine or the high-pressure pump does not meet the threshold requirements of the water pressure working range, the light is immediately turned off, that is, the laser is turned off to avoid dry burning.

It is worth noting that since the microjet laser equipment is working continuously, the high-pressure water and the laser are also continuously performing water-light coupling, and the first water pressure signal and the second water pressure signal are also acquired in real time. Therefore, the water-off judgment of the first water pressure value and the second water pressure value can be performed synchronously with the acquisition of the signal.

Step 5: When the water pressure value is within the water pressure working range, end the light-off process to restore the laser to normal operation, and repeat steps 1 to 4.

After troubleshooting, wait until the water pressure value is within the water pressure working range before stopping the light-off process, starting the laser to emit light and performing water-light coupling. As the water-light coupling is continuously repeated, steps 1 to 4 are continuously performed to continuously obtain and judge the water pressure.

The principle of the nozzle water cut-off detection method of the micro jet laser device of this embodiment is as follows:

As shown in FIG4 , after the water outage detection starts, the pressure is first acquired, and the acquired pressure signal is subjected to analog-to-digital conversion and filtering in turn; the water purifier pressure and the high-pressure pump pressure are judged according to the water pressure value obtained after the processing. If the judgment conditions are met, the micro-jet laser device can operate normally, and the water outage detection cycle is performed at this time. When the judgment conditions of either the water purifier pressure judgment or the high-pressure pump pressure judgment are not met, the light-off processing is immediately performed. Among them, the light-off processing includes the light-off processing performed by hardware and the light-off processing performed by communication. The two work together. At the same time as the light-off processing, the operator is reminded to pay attention through the sound and light alarm, and the fault that causes the micro-jet laser device to be cut off from water can be eliminated in time.

Specifically, firstly, the first water pressure signal and the second water pressure signal are obtained respectively, and the water pressure working range of the microjet laser device is determined according to the actual working condition of the microjet laser device; secondly, the first water pressure signal and the second water pressure signal are respectively subjected to analog-to-digital conversion and filtering processing to obtain the first water pressure value DP1 and the second water pressure value DP2, so as to facilitate water outage judgment by comparing with the threshold value; when making a water outage judgment, the first water pressure value DP1 is compared with the first alarm threshold value N11, if the first water pressure value DP1≥the first alarm threshold value N11, then the pressure fluctuation judgment of the water purifier is continued; the lower limit of the pressure fluctuation of the water purifier is judged, and the first water pressure value DP1 is continued to be compared with the second alarm threshold value N12, if the first water pressure value DP1≥the second alarm threshold value N12, then the upper limit of the pressure fluctuation of the water purifier is judged; if the first water pressure value DP1＜the third alarm threshold value N13, it indicates that the water output of the water purifier is stable; otherwise, the light is turned off immediately. Similarly, compare the second water pressure value DP2 with the fourth alarm threshold N21. If the second water pressure value DP2 ≥ the fourth alarm threshold N21, then proceed to judge the pressure fluctuation of the high-pressure pump; make a judgment on the lower limit of the pressure fluctuation of the high-pressure pump. If the second water pressure value DP2 ≥ the fifth alarm threshold N22, then proceed to judge the upper limit of the pressure fluctuation of the high-pressure pump; if the second water pressure value DP2 < the sixth alarm threshold N23, it means that the water output of the high-pressure pump is stable; that is, the first water pressure signal DP1 and the second water pressure signal DP2 are both within the normal range. When any of the above judgments is not established, immediately perform the light-off process to turn off the laser. Among them, the fourth alarm threshold N21 is the low-pressure alarm threshold of the high-pressure pump; the fifth alarm threshold N22 is the lower limit alarm threshold of the pressure fluctuation of the high-pressure pump; and the sixth alarm threshold N23 is the upper limit alarm threshold of the pressure fluctuation of the high-pressure pump.

The nozzle water cut-off detection method of the micro-jet laser device of the present invention includes water pressure signal acquisition, water pressure signal processing, water cut-off judgment and light-off protection. The water cut-off judgment is performed based on the water pressure of the micro-jet laser device, which solves the lag problem of the water cut-off detection response, can shut down the laser in time, and achieves nozzle protection, making the entire protection system efficient, reliable and safe.

Embodiment 2

The water supply passage of the micro-jet laser device in the embodiment of the present invention is shown in Figure 5, which includes a pure water machine 1, a high-pressure pump 2 and a laser 3 in sequence. The high-pressure pump 2 is connected to the laser 3 through a high-pressure pipeline and supplies high-pressure water to the laser 3. The laser 3 emits a laser that is coupled with the high-pressure water through an optical chip and finally forms a micro-jet laser through a nozzle. Among them, the sensor module 10 is arranged on the water supply passage to obtain a water pressure signal on the water supply passage.

Specifically, as shown in FIG6 , the sensor module 10 includes: a first sensor 11 and a second sensor 12; the first sensor 11 is used to detect the outlet water pressure of the water purifier 1 to obtain a first water pressure signal; the second sensor 12 is used to detect the outlet water pressure of the high-pressure pump 2 to obtain a second water pressure signal, and in subsequent modules, water cut-off judgment is performed based on the pressure signal obtained by the sensor module 10. The first sensor 11 is arranged at the outlet of the water purifier 1, and the second sensor 12 is arranged at the outlet of the high-pressure pump 2.

It is worth noting that both the first sensor 11 and the second sensor 12 directly measure through contact, convert the detected water pressure into a current value through a physical reaction, and transmit it as a current value signal. This is because the current value signal transmission has the characteristics of long transmission distance and strong anti-interference.

As shown in FIG. 6 , in this embodiment, a nozzle water cut-off detection system for a micro-jet laser device is provided, which includes: a sensor module 10 , a signal conversion module 20 , a control module 30 , a protection module 40 and an alarm module 50 .

The sensor module 10 is arranged on the micro-jet laser device and is used to obtain the water pressure signal of the micro-jet laser device; the signal conversion module 20 is electrically connected to the sensor module 10 and the control module 30 respectively, and is used to perform analog-to-digital conversion on the water pressure signal to obtain a water pressure digital signal; the control module 30 is electrically connected to the protection module 40 and the alarm module 50 respectively, and is used to filter the water pressure digital signal to obtain a water pressure value, and perform water cut-off judgment based on the water pressure value to obtain a water cut-off judgment result; the protection module 40 is used to turn off the laser 3 of the micro-jet laser device according to the water cut-off judgment result; the alarm module 50 is used to give an alarm according to the water cut-off judgment result.

In an optional embodiment, the signal conversion module 20 includes: a signal conditioning module 21 and an analog-to-digital conversion module 22; the signal conditioning module 21 is electrically connected to the analog-to-digital conversion module 22, the signal conditioning module 21 is used to convert the water pressure signal from a current signal to a voltage signal, and the analog-to-digital conversion module 22 is used to perform analog-to-digital conversion on the voltage signal to obtain a water pressure digital signal. Since the water pressure signal acquired by the sensor module 10 is transmitted in the form of a current value signal, before performing the analog-to-digital conversion, the current value needs to be converted into a voltage value. Specifically, the current signal is converted into a voltage signal through a resistor.

In an optional embodiment, the control module 30 is connected to the external control device for communication, and the external control device adjusts the output power of the laser 3 according to the water cut-off judgment result to realize the light-off processing. Specifically, the control module 30 performs the water cut-off judgment, and after obtaining the water cut-off judgment result, the hardware of the laser 3 is directly controlled by the protection module 40, and the physical gate switch (which can be an optical coupler) of the laser is quickly turned off to realize the fast protection light-off. At the same time, the water cut-off judgment result is also communicated to the external control device. After the external control device receives the alarm information, the output power of the laser 3 is automatically set to 0W through its alarm event triggering scheduling mechanism, forming a dual output light-off protection, that is, the light-off processing performed by the hardware and the light-off processing performed by the communication work together. In addition, the alarm module 50 is connected to the sound and light alarm, and the sound and light alarm reminds the operator to pay attention, and promptly eliminates the fault that causes the micro-jet laser device to be cut off from water.

In an optional embodiment, the control module 30 performs filtering processing on the water pressure digital signal, and through filtering processing, eliminates the noise interference generated during the water outage detection process, while meeting the requirements of signal smoothness and sensitivity. Preferably, the filtering processing cycle of the two groups of water pressure digital signals can be set separately within the range of 100ms to 500ms.

In an optional embodiment, the control module 30 and the external control device, and the external control device and the micro jet laser device are connected via Ethernet communication, and a private protocol based on Ethernet is used for development. The Ethernet communication protocol is a high-speed communication protocol that can quickly and reliably transmit data. All the underlying data and control parameters, alarm information and other communication interfaces of the control module 30 and the laser 3 can be opened to the external control device, and displayed and monitored by the external control device, which can display two sets of pressure values, and can also display the operating data and operating status of the laser 3 and the control module 30, and can also modify and set the parameters of the laser 3.

The nozzle water cut-off detection system of the micro-jet laser device of the present invention obtains the water pressure signal through the sensor module, and processes it through the signal conversion module and the control module to reduce or even eliminate the noise interference in the water cut-off detection process, while meeting the requirements of signal smoothness and sensitivity. Finally, the protection module performs light-off processing and the alarm module gives an alarm, thereby improving the integration and intelligence of the micro-jet laser device.

It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants are intended to cover non-exclusive inclusion, so that the article or device including a series of elements includes not only those elements, but also other elements that are not explicitly listed. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the article or device including the elements. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The orientation or position relationship indicated by "up", "down", "left", "right", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention.

The above contents are further detailed descriptions of the present invention in combination with specific preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims (10)

1. A method for detecting water cutoff of a nozzle of a micro jet laser device, characterized by comprising: Step 1: Determine the water pressure working range of the microjet laser device; Step 2: Obtain the water pressure signal of the microjet laser device; Step 3: performing signal conversion on the water pressure signal to obtain a water pressure value; Step 4: Perform water cut-off judgment according to the water pressure value, and if the water pressure value exceeds the water pressure working range, turn off the laser of the micro jet laser device; Step 5: When the water pressure value is within the water pressure working range, end the light-off process to restore the laser to normal operation, and repeat steps 1 to 4. 2. The nozzle water cut-off detection method of the micro jet laser device according to claim 1, characterized in that the step 1 comprises: Step 1.1: Determine the water pressure working range of the water purifier, including a first alarm threshold, a second alarm threshold and a third alarm threshold; the first alarm threshold is the low pressure alarm threshold of the water purifier, the second alarm threshold is the lower limit alarm threshold of the pressure fluctuation of the water purifier, and the third alarm threshold is the upper limit alarm threshold of the pressure fluctuation of the water purifier; Step 1.2: Determine the water pressure working range of the high-pressure pump, including the fourth alarm threshold, the fifth alarm threshold and the sixth alarm threshold; the fourth alarm threshold is the low-pressure alarm threshold of the high-pressure pump, the fifth alarm threshold is the lower limit alarm threshold of the pressure fluctuation of the high-pressure pump, and the sixth alarm threshold is the upper limit alarm threshold of the pressure fluctuation of the high-pressure pump. 3. The nozzle water cut-off detection method of the micro jet laser device according to claim 2, characterized in that the step 2 comprises: Step 2.1: Obtaining a first water pressure signal according to the water outlet pressure of the water purifier; Step 2.2: Obtain a second water pressure signal according to the water outlet pressure of the high-pressure pump. 4. The method for detecting water cutoff of a nozzle of a micro jet laser device according to claim 3, wherein step 3 comprises: Step 3.1: Perform analog-to-digital conversion on the first water pressure signal and the second water pressure signal respectively to obtain a first water pressure digital signal and a second water pressure digital signal; Step 3.2: Filter the first water pressure digital signal and the second water pressure digital signal respectively to obtain a first water pressure value and a second water pressure value. 5. The method for detecting water cutoff of a nozzle of a micro jet laser device according to claim 4, wherein step 4 comprises: Step 4.1: Compare the first water pressure value with the first alarm threshold. If the first water pressure value is ≥ the first alarm threshold, execute step 4.2; if the first water pressure value is < the first alarm threshold, jump to execute step 4.4; Step 4.2: Compare the first water pressure value with the second alarm threshold. If the first water pressure value is greater than or equal to the second alarm threshold, execute step 4.3; if the first water pressure value is less than the second alarm threshold, jump to execute step 4.4. Step 4.3: Compare the first water pressure value with the third alarm threshold. If the first water pressure value is ≥ the third alarm threshold, execute step 4.4; if the first water pressure value is < the third alarm threshold, jump to execute step 5; Step 4.4: Turn off the laser of the microjet laser device. 6. The method for detecting water cutoff of a nozzle of a micro jet laser device according to claim 4, wherein step 4 further comprises: Step 4a: Compare the second water pressure value with the fourth alarm threshold. If the second water pressure value is greater than or equal to the fourth alarm threshold, execute step 4b; if the second water pressure value is less than the fourth alarm threshold, jump to execute step 4d. Step 4b: Compare the second water pressure value with the fifth alarm threshold. If the second water pressure value is ≥ the fifth alarm threshold, execute step 4c; if the second water pressure value is < the fourth alarm threshold, jump to execute step 4d. Step 4c: Compare the second water pressure value with the sixth alarm threshold. If the second water pressure value is ≥ the sixth alarm threshold, execute step 4d; if the second water pressure value is < the sixth alarm threshold, jump to execute step 5; Step 4d: performing light-off processing on the laser of the micro-jet laser device. 7. A nozzle water cut-off detection system for a micro jet laser device, characterized in that it comprises: a sensor module, a signal conversion module, a control module, a protection module and an alarm module; The sensor module is arranged on the micro-jet laser device and is used to obtain the water pressure signal of the micro-jet laser device; The signal conversion module is electrically connected to the sensor module and the control module, respectively, and is used to perform analog-to-digital conversion on the water pressure signal to obtain a water pressure digital signal; The control module is electrically connected to the protection module and the alarm module, respectively, and is used to filter the water pressure digital signal to obtain a water pressure value, and perform water cut-off judgment according to the water pressure value to obtain a water cut-off judgment result; The protection module is used to shut off the laser of the micro jet laser device according to the water cut-off judgment result; The alarm module is used to generate an alarm according to the water outage judgment result. 8. The nozzle water cut-off detection system of the micro-jet laser equipment according to claim 7 is characterized in that the sensor module includes: a first sensor and a second sensor; the first sensor is used to detect the water outlet pressure of the pure water machine to obtain a first water pressure signal; the second sensor is used to detect the water outlet pressure of the high-pressure pump to obtain a second water pressure signal. 9. The nozzle water cut-off detection system of the micro jet laser device according to claim 7, characterized in that the signal conversion module comprises: a signal conditioning module and an analog-to-digital conversion module; The signal conditioning module is electrically connected to the analog-to-digital conversion module, the signal conditioning module is used to convert the water pressure signal from a current signal to a voltage signal, and the analog-to-digital conversion module is used to perform analog-to-digital conversion on the voltage signal to obtain a water pressure digital signal. 10. The nozzle water cut-off detection system of the micro-jet laser device according to claim 7 is characterized in that the control module is communicatively connected to an external control device, and the external control device adjusts the output power of the laser according to the water cut-off judgment result to achieve light-off processing.