CN1182977A - Piezoelectric resonator - Google Patents
Piezoelectric resonator Download PDFInfo
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- CN1182977A CN1182977A CN 97117632 CN97117632A CN1182977A CN 1182977 A CN1182977 A CN 1182977A CN 97117632 CN97117632 CN 97117632 CN 97117632 A CN97117632 A CN 97117632A CN 1182977 A CN1182977 A CN 1182977A
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- electrode
- piezoelectric resonator
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- ceramic substrate
- resonator
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Abstract
A piezoelectric resonator is equipped with electrodes which are arranged on two corresponding surfaces of a piezoelectric ceramic substrate and stimulates piezoelectric vibration between the corresponding electrodes. An insulation layer is at least arranged between one electrode and the piezoelectric ceramic substrate. Qm of ceramic materials is reduced to be suitable for obtaining the required Qm of relay time characteristics.
Description
The present invention relates to piezoelectric resonator, relate in particular to piezoelectric resonator with adjustable Qm.
In recent years, along with the expansion of digital technology, improvement had also been arranged based on many ladder filter of delay-time characteristic.In order to make ceramic resonator realize required delay-time characteristic, need be suppressed to about value of 100 to 200 to the Qm of ceramic resonator.
Because the Qm of the employed ceramic material of the Qm of conventional piezoelectric resonator foundation, so if do not use the material with required Qm, the product that then can not obtain to comprise ceramic resonator He have required Qm.
In order to address this problem, reduce specified Qm by using rubber sheet, weaken the vibration of piezoelectric resonator from machinery with big Qm.In addition, make resistor in the circuit in parallel and be connected in series on the resonator that constitutes ladder filter, to improve the group delay time characteristic in the circuit.
Yet these methods have increased the component number and the cost of filter, have also increased difficulty and the cost of making filter.
Preferred embodiment of the present invention provides a kind of piezoelectric resonator, has wherein reduced employed component number and has obtained Qm based on the required delay-time characteristic of electronic component or filter.
According to a preferred embodiment of the present invention, piezoelectric resonator comprises the electrode that places on two apparent surfaces of piezoelectric ceramic substrate, excites piezoelectric vibration between comparative electrode, places insulating barrier at least between an electrode and piezoelectric ceramic substrate.
Insulating barrier preferably places to have on the ceramic substrate that is higher than required Qm, places electrode on insulating barrier.Add high dc voltage to ceramic substrate, make it polarization, so that the substrate with piezoelectric property to be provided.Utilize insulating barrier, can obtain as mentioned above the Qm of filter be set at the Qm that is lower than the ceramic substrate material, and can obtain to be used to realize the Qm of required delay-time characteristic.
Because Qm generally reduces with the increase of thickness of insulating layer,, change Qm and needn't change employed ceramic material so can control Qm by the thickness of regulating insulating barrier.
Ladder filter is preferably used the resonator of square vibration mode.When preferred embodiment of the present invention is applied to the resonator of square vibration mode, can easily obtain to have the ladder filter of fabulous group delay time characteristic.
Can consider various insulating barriers.Want to use metal-oxide film, because it is easy to form required enough thin film, and can assurance and electrode and ceramic material safety and bonding reliably.By at first on ceramic material, forming thin metallic film, then this film is carried out oxidation and make it non-conductive, can easily form metal-oxide film.
Except the resonator of square vibration mode, also can be applicable to the piezoelectric resonator of other vibration mode according to the piezoelectric resonator of preferred embodiment of the present invention, the vibration mode that enlarges such as thickness and the vibration mode of thickness shear.Therefore, preferred embodiment of the present invention can be applicable to the device except ladder filter.
From following detailed description these and other element, the feature and advantage of preferred embodiment of the present invention are become obviously to the preferred embodiment of the present invention shown in the accompanying drawing.
Fig. 1 is the profile according to the piezoelectric resonator of the present invention's first preferred embodiment.
Fig. 2 is the figure that concerns between expression thickness of insulating layer and the Qm.
Fig. 3 is the profile according to the piezoelectric resonator of the present invention's second preferred embodiment.
Fig. 4 is the group delay time characteristic comparison diagram that uses according to ladder filter with the ladder filter of using conventional piezoelectric resonator of preferred embodiment piezoelectric resonator of the present invention.
Fig. 5 is the circuit diagram of general four device ladder filter.
Fig. 6 is the profile according to the piezoelectric resonator of preferable the 3rd embodiment of the present invention.
Fig. 7 is the design drawing according to the piezoelectric resonator of the present invention's the 4th preferred embodiment.
Fig. 8 is the profile of being got along X-X line among Fig. 7.
Fig. 9 is the design according to the piezoelectric resonator of the present invention's the 5th preferred embodiment.
Figure 10 is the profile of being got along Y-Y line among Fig. 9.
It is piezoelectric resonator according to the present invention's first preferred embodiment that Fig. 1 illustrates.According to the piezoelectric resonator of this preferred embodiment as the parallel resonance device in the ladder filter, and with square vibration mode vibration.This piezoelectric resonator preferably includes and is essentially foursquare piezoelectric ceramic substrate 1, places insulating barrier 2 and 3 on the whole area of two apparent surface, is layered in the electrode 4 and 5 on insulating barrier 2 and the 3 whole areas.
Preferably thick and Qm is that about 500 to 600 PZT ceramic material is as piezoelectric ceramic substrate 1 about 0.35mm.Preferably pass through two surfaces, thereby metallic film such as nickel-copper alloy is added to each surface with the thickness sputter piezoelectric ceramic substrate 1 of about 0.3 to 0.9 μ m.Substrate 1 was stopped in heating furnace about 90 minutes, and it is about 850 ℃ oxidizing atmosphere that heating furnace has peak temperature.Metallic film is oxidized to non-conductive, to form insulating barrier 2 and 3.By carrying out sputter, on insulating barrier 2 and 3, form the electrode 4 and 5 that nickel-copper alloy is made with about identical thickness (for example, about 0.1 μ m).
After forming electrode 4 and 5, add the high dc voltage that is used to polarize for substrate 1, to make it having piezoelectric property.Then, the employed device of filter is handled, had the piezoelectric resonator of low Qm with formation.
Fig. 2 illustrates the relation between thickness of insulating layer and the Qm.Clearly visible from figure, Qm reduces with the increase of thickness of insulating layer.Utilize this relation, may command Qm and needn't change ceramic material.
Fig. 3 illustrates the piezoelectric resonator according to the present invention's second preferred embodiment.
In this preferred embodiment, piezoelectric resonator is also with square vibration mode vibration.This piezoelectric resonator comprises piezoelectric ceramic substrate 6, place the insulating barrier 7 and 8 and be layered in electrode 9 and 10 on insulating barrier 7 and 8 on the front and rear surfaces of substrate 6.Form the electrode 9 of institute's area coverage in the front side partly, on the whole surface of rear side, form electrode 10 less than the whole surface of front side.Insulating barrier 7 and 8 also forms the shape corresponding to electrode 9 and 10.
In this preferred embodiment insulating barrier 7 with 8 and electrode 9 identical with the condition of the described piezoelectric resonator of Fig. 1 with 10 condition such as thickness with material.
Fig. 4 illustrates use according to the ladder filter of preferred embodiment piezoelectric resonator of the present invention (have about 170 Qm) with use the comparative result of group delay time characteristic and filter amplitude characteristic between the ladder filter of conventional piezoelectric resonator (have about 500 Qm).Fig. 5 illustrates the circuit diagram of ladder filter.
In the ladder filter of foundation preferred embodiment of the present invention, piezoelectric resonator shown in Figure 1 is as parallel resonance device P, and piezoelectric resonator shown in Figure 3 is as resonance series device S.
As shown in Figure 4, reduce by half 32 μ s in the filter of foundation preferred embodiment of the present invention of the 68 μ ss of the deviation of group delay time from conventional filter in the 3-dB frequency band.Therefore, prove and obtained gratifying filter characteristic.
Fig. 6 illustrates the piezoelectric resonator according to third embodiment of the invention.This piezoelectric resonator is preferably with square vibration mode vibration.This piezoelectric resonator comprise piezoelectric ceramic substrate 11, only place insulating barrier 12 on substrate 11 front surfaces, place the preceding electrode 13 on the insulating barrier 12 and place rear electrode 14 on substrate 11 rear surfaces.The electrode 13 that forms and 14 covers the whole area of substrate.
In this preferred embodiment, owing on the front surface of substrate 11, form insulating barrier 12, so also can obtain the piezoelectric resonator that Qm is lower than ceramic material Qm.
In this preferred embodiment, also can form electrode 13 and 14 partly.
Fig. 7 and 8 illustrates the piezoelectric resonator according to the present invention's the 4th preferred embodiment.This piezoelectric resonator vibrates and is used for three end filters of Khz frequency band with square vibration mode.
This filter comprises square piezoelectric ceramic substrate 15.In the central authorities of substrate front surface, form the electrode 16 and the annular electrode 17 of X-shaped shape, form the grounding electrode 18 that covers the whole area in rear surface.
Insulating barrier 19 and 20 is located between the electrode 16 and annular electrode 17 and substrate 15 of X-shaped shape, and insulating barrier 21 is located between grounding electrode 18 and the substrate 15.Can omit any in the insulating barrier 19 to 21.
Fig. 9 and 10 illustrates the piezoelectric resonator according to the present invention's the 5th preferred embodiment.This piezoelectric resonator vibrates and is used for three end filters of Khz frequency band with square vibration mode.
This filter comprises square piezoelectric ceramic substrate 22.Near substrate front surface centre, form point-like electrode 23 and annular electrode 24, form the grounding electrode 25 that covers the whole area in rear surface.
Insulating barrier 26 and 27 is located between point-like electrode 23 and annular electrode 24 and the substrate 22, and insulating barrier 28 is located between grounding electrode 25 and the substrate 22.Can omit any in the insulating barrier 26 to 28.
Clearly visible from the above description, according to preferred embodiment of the present invention, can be set at required value arbitrarily to Qm owing to utilize existing ceramic material that insulating barrier is set between electrode and piezoelectric ceramic substrate, so can make electronic component or filter with required Qm value.A kind of fast and convenient solution that required Qm is provided to element is provided.
Because the add ons that does not need to weaken the add ons of piezoelectric resonator vibration from machinery or improve group delay time characteristic in the circuit also can reduce cost so can reduce the number of element.
Though illustrate and describe the present invention with reference to its preferred embodiment, the one skilled in the art should understand and can do above-mentioned and other variation to form and details therein, and does not deviate from the spirit and scope of the present invention.
Claims (20)
1. piezoelectric resonator is characterized in that comprising:
The piezoelectric ceramic substrate:
Place a plurality of electrodes on the piezoelectric ceramic substrate surface, thereby between electrode, excite piezoelectric vibration; And
At least one insulating barrier of placing between electrode in a plurality of electrodes and the piezoelectric ceramic substrate.
2. piezoelectric resonator as claimed in claim 1 is characterized in that described piezoelectric resonator vibrates with square vibration mode.
3. piezoelectric resonator as claimed in claim 1 is characterized in that described insulating barrier comprises metal-oxide film.
4. piezoelectric resonator as claimed in claim 1 is characterized in that also comprising a plurality of insulating barriers, and described insulating barrier places between piezoelectric ceramic substrate and a plurality of electrode.
5. piezoelectric resonator as claimed in claim 1 is characterized in that described piezoelectric resonator is with a kind of mode vibration in square vibration mode, thickness extension mode and the thickness-shear vibration mode formula.
6. piezoelectric resonator as claimed in claim 1, it is characterized in that at least one electrode in described a plurality of electrode so forms, thereby only local first first type surface that covers the piezoelectric ceramic substrate, another electrode in described a plurality of electrode so forms, thereby covers the whole area of piezoelectric ceramic substrate second first type surface.
7. piezoelectric resonator as claimed in claim 1 is characterized in that the piezoelectric ceramic substrate comprises the substrate that is essentially rectangle.
8. piezoelectric resonator as claimed in claim 1 is characterized in that the piezoelectric ceramic substrate comprises to be essentially foursquare substrate.
9. piezoelectric resonator as claimed in claim 1, it is characterized in that an electrode in a plurality of electrodes comprises annular electrode, another electrode in a plurality of electrodes comprises the electrode of X-shaped shape basically, and the electrode that is essentially the X-shaped shape is surrounded by annular electrode and places on the common sides of annular electrode.
10. piezoelectric resonator as claimed in claim 9 is characterized in that insulating barrier is between electrode that is essentially the X-shaped shape and annular electrode.
11. piezoelectric resonator as claimed in claim 1, it is characterized in that an electrode in a plurality of electrodes comprises the electrode that is essentially point-like, another electrode in a plurality of electrodes comprises the electrode that is essentially the X-shaped shape, and the electrode that is essentially the X-shaped shape is surrounded by annular electrode and places on the common sides of annular electrode.
12. piezoelectric resonator as claimed in claim 11 is characterized in that insulating barrier places between the electrode and annular electrode that is essentially point-like.
13. a piezoelectric resonator is characterized in that comprising:
The piezoelectric ceramic substrate:
Place a plurality of electrodes on the piezoelectric ceramic substrate surface, thereby between electrode, excite piezoelectric vibration; And
The Qm that at least one insulating barrier is used to reduce the piezoelectric ceramic substrate is set.
14. piezoelectric resonator as claimed in claim 13 is characterized in that described piezoelectric resonator vibrates with square vibration mode.
15. piezoelectric resonator as claimed in claim 13 is characterized in that described insulating barrier comprises metal-oxide film.
16. piezoelectric resonator as claimed in claim 13 is characterized in that also comprising a plurality of insulating barriers, described insulating barrier places between piezoelectric ceramic substrate and a plurality of electrode.
17. piezoelectric resonator as claimed in claim 13 is characterized in that described piezoelectric resonator is with a kind of mode vibration in square vibration mode, thickness extension mode and the thickness-shear vibration mode formula.
18. piezoelectric resonator as claimed in claim 13, it is characterized in that at least one electrode in described a plurality of electrode so forms, thereby only local first first type surface that covers the piezoelectric ceramic substrate, another electrode in described a plurality of electrode so forms, thereby covers the whole area of piezoelectric ceramic substrate second first type surface.
19. piezoelectric resonator as claimed in claim 13 is characterized in that the piezoelectric ceramic substrate comprises the substrate that is essentially rectangle.
20. piezoelectric resonator as claimed in claim 13 is characterized in that the piezoelectric ceramic substrate comprises to be essentially foursquare substrate.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP241188/96 | 1996-08-23 | ||
| JP24118896A JPH1065484A (en) | 1996-08-23 | 1996-08-23 | Piezoelectric resonator |
| JP241188/1996 | 1996-08-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1182977A true CN1182977A (en) | 1998-05-27 |
| CN1118134C CN1118134C (en) | 2003-08-13 |
Family
ID=17070539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN97117632A Expired - Fee Related CN1118134C (en) | 1996-08-23 | 1997-08-19 | Piezoelectric resonator |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH1065484A (en) |
| CN (1) | CN1118134C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030064530A (en) * | 2002-01-28 | 2003-08-02 | 엘지이노텍 주식회사 | Film bulk acoustic resonator |
| DE102005043034A1 (en) * | 2005-09-09 | 2007-03-15 | Siemens Ag | Apparatus and method for moving a liquid |
| CN113126181B (en) * | 2021-03-08 | 2023-04-18 | 昆明理工大学 | Multi-rotor unmanned aerial vehicle for atmospheric electric field detection and measuring method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4760358A (en) * | 1985-08-07 | 1988-07-26 | Murata Manufacturing Co., Ltd. | Piezoelectric element |
| US5202600A (en) * | 1988-08-31 | 1993-04-13 | Seikosha Co., Ltd. | Piezoelectric device and related converting devices |
-
1996
- 1996-08-23 JP JP24118896A patent/JPH1065484A/en active Pending
-
1997
- 1997-08-19 CN CN97117632A patent/CN1118134C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1118134C (en) | 2003-08-13 |
| JPH1065484A (en) | 1998-03-06 |
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