CN1182210A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN1182210A CN1182210A CN 96120630 CN96120630A CN1182210A CN 1182210 A CN1182210 A CN 1182210A CN 96120630 CN96120630 CN 96120630 CN 96120630 A CN96120630 A CN 96120630A CN 1182210 A CN1182210 A CN 1182210A
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- pressure
- sensitive element
- pressure transducer
- sensor
- sensitivity
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Abstract
The pressure sensor is produced based on available membrance type one and is one pressurized completely sealed structure. Into cavity, some gas or liquid medium of certain pressure is filled so that the sensitive element produces one reverse prestrain. Therefore, the long-term stability of sensor is raised, and the measurement range and sensitivity is raised proportionally with the pressure of filled medium.
Description
The present invention relates to a kind of pressure transducer, relate in particular to a kind of pressure transducer that adopts the pressurized type all-sealed structure.It can make the proportional raisings of performance such as long-time stability, signal output sensitivity of existing diaphragm-type pressure transducer.Simultaneously, this pressure transducer also has characteristics such as resisting temperature interference.
At present, the kind of the pressure transducer of development is a lot of both at home and abroad, and its form adopts the flat diaphragm structure mostly, and wherein strain pressure transducer output sensitivity representative value is 1～2mV/V.Its typical structure is as shown in Figure 1: mainly be made up of pressure inlet 1, sensitive element 2, conversion element 3 and shell 4.Institute's measuring pressure acts directly on the sensitive element 2 by the pressure inlet hole, makes sensitive element 2 produce distortion, and the conversion element (as strain ga(u)ge) that sticks on the sensitive element 2 produces respective change with the size of the mechanically deform amount of sensitive element 2.Through the conversion of conversion element, pressure is transformed into electric signal output, finish the sensing process of pressure.
Adopt the pressure transducer that fills dielectric structure that the unit development is also arranged, for example: a kind of corrosion pressure sensor of No. 89210263.2 Patent publish, it adopts oil-filled mode, carry out the pressure conduction by oil, thereby make this sensor have antiseptic property, but pressure show it then is to show that by pointer gauge its measuring accuracy is subjected to the restriction of structure, and do not have electric signal output, be unfavorable for robotization control.Again for example: Russian Patent SU-495-572, SU-574-651, SU-882-296, SU-489-013, the structure that has also adopted medium to conduct similarly, the measuring accuracy of sensor, output sensitivity are all restricted.
The object of the invention is to provide a kind of hermetically sealed pressurized type pressure transducer, and the change by structure makes existing sensor stability and measures the proportional raising of output signal, thereby improves its performance comprehensively.
The object of the present invention is achieved like this: adopt the pressurized type all-sealed structure, in sensor cavity, inject the gas or the liquid medium (as nitrogen, silicone oil etc.) of a certain pressure by non-return valve, because the pressurized sensitive element can produce a reverse predeformation, sensitive element just can be changed to forward deformation from reverse strain during pressure measurement, transducer range and sensitivity also improve thereupon pro rata, and the stability indicator of sensor also improves thereupon like this.
Fig. 1 is the typical structure of pressure transducer.
Fig. 2 is a structure diagram of the present invention.
Further set forth the present invention below in conjunction with accompanying drawing.
This pressure transducer partly is made up of pressure inlet 1, sensitive element 2, conversion element 8, temperature element 3, sealing-plug 4, non-return valve and shell 9 etc.Non-return valve is made up of valve rod 5, spring 7 and O-ring seal 6, and is installed on shell 9 housings.The sensor extension line is drawn from housing 9 by sealing-plug.Thereby shell 9 and pressure inlet 1 are just formed sealed cavity after integrally welded.Be pasted with conversion element 8 on sensitive element 2, temperature element 3 is installed on the inner chamber compensating plate.Make cavity be full of the gas or the liquid medium of a certain pressure (generally being no more than the sensitive element rated pressure) by non-return valve, and make it to be sealed in the cavity.Protection and the precompression effect of sensitive element 2 because of being subjected to above-mentioned medium, its zero-bit is then more stable.During pressure measurement, just can act on the sensitive element 2, make sensitive element 2 that forward deformation take place, and make stickup strainometer 8 thereon that the signal variation take place, finish the sensing process of pressure by pressure inlet 1 pressure.Because sensitive element 2 has a reverse predeformation in advance, so the maximum pressure of surveying can be brought up to pressure medium sum in sensitive element rated pressure and the cavity.This moment, transducer sensitivity and range improved in proportion, were up to the twice value of former design range.
Among the embodiment, select strain pressure transducer for use, the employing range is 10MPa, sensitivity is that (the flat diaphragm external diameter is Φ 11mm for the flat diaphragm type sensitive element of 1.92mv/v, internal diameter is Φ 6.6mm, thick 0.46mm), conversion element is strain ga(u)ge (BA800-6.6KA).Adopt the pressurized type structure, in the chamber, be full of 10MPa nitrogen by non-return valve after, its range can be expanded as 20MPa, 3.81mv/v is brought up in its sensitivity pro rata after measured, zero-bit is also stable than state of nature because of the protection of diaphragm pressurized and medium.If its range is considered as 15MPa, its sensitivity is increased to 2.87mv/v, and its linear error also is reduced to 0.065% from 0.08%.Select the diaphragm of different ranges for use, in fill the nitrogen of different tests pressure after, through repetition test, its range and sensitivity all correspondingly improve in proportion.In addition, select the above-mentioned performance of diffuse si or splashing type pressure transducer test can the improvement equally sensor for use.Therefore prove that the present invention truly has superior Practical Performance.
In addition, because the variation of environment temperature, pressure medium can change thereupon in the seal chamber, and be installed on the size that temperature element in the chamber is measured temperature variation at any time, according to reverse media pressure and temp family curve in the temperature characteristics of sensor and the annular seal space, after data processing, pressure is carried out correction-compensation, thereby guarantee the measuring accuracy of sensor in range of temperature.
Claims (3)
1. a pressure transducer comprises pressure inlet part, sensitive element part, conversion element part, temperature element part, sealing-plug part, non-return valve and housing parts.It is characterized in that: adopted the pressurized type all-sealed structure, in cavity, be full of the gas or the liquid medium (as nitrogen, silicone oil etc.) of a certain pressure.
2. pressure transducer as claimed in claim 1 is characterized in that: non-return valve and pressure-resistant seal plug have been installed on the housing.
3. pressure transducer as claimed in claim 1, it is characterized in that: inner chamber is equipped with temperature element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96120630 CN1105907C (en) | 1996-11-12 | 1996-11-12 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96120630 CN1105907C (en) | 1996-11-12 | 1996-11-12 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1182210A true CN1182210A (en) | 1998-05-20 |
| CN1105907C CN1105907C (en) | 2003-04-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96120630 Expired - Fee Related CN1105907C (en) | 1996-11-12 | 1996-11-12 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1105907C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010017773A1 (en) * | 2008-08-13 | 2010-02-18 | 田立 | Online vibration detector for continuous caster crystallizer |
| CN101201275B (en) * | 2006-12-14 | 2011-04-27 | 柳州欧维姆机械股份有限公司 | Sensor for measuring force as well as method for measuring pre-stress anchor wire and bridge support stress |
| CN101629862B (en) * | 2008-07-18 | 2012-12-26 | 威卡亚历山大威甘德股份有限公司 | Pressure gauge |
| CN106052953A (en) * | 2016-08-15 | 2016-10-26 | 西安森瑟斯传感器有限公司 | Shock-resistant ice-blockage resistant pressure transmitter |
| CN110077087A (en) * | 2019-06-05 | 2019-08-02 | 苏州安洁科技股份有限公司 | Laminating apparatus based on pressure detecting |
| CN110091573A (en) * | 2019-06-05 | 2019-08-06 | 苏州安洁科技股份有限公司 | Fit body based on pressure detecting |
| CN116046226A (en) * | 2023-01-07 | 2023-05-02 | 常州大学怀德学院 | MEMS pressure sensor for depth-to-width ratio etching |
-
1996
- 1996-11-12 CN CN 96120630 patent/CN1105907C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101201275B (en) * | 2006-12-14 | 2011-04-27 | 柳州欧维姆机械股份有限公司 | Sensor for measuring force as well as method for measuring pre-stress anchor wire and bridge support stress |
| CN101629862B (en) * | 2008-07-18 | 2012-12-26 | 威卡亚历山大威甘德股份有限公司 | Pressure gauge |
| WO2010017773A1 (en) * | 2008-08-13 | 2010-02-18 | 田立 | Online vibration detector for continuous caster crystallizer |
| CN106052953A (en) * | 2016-08-15 | 2016-10-26 | 西安森瑟斯传感器有限公司 | Shock-resistant ice-blockage resistant pressure transmitter |
| CN110077087A (en) * | 2019-06-05 | 2019-08-02 | 苏州安洁科技股份有限公司 | Laminating apparatus based on pressure detecting |
| CN110091573A (en) * | 2019-06-05 | 2019-08-06 | 苏州安洁科技股份有限公司 | Fit body based on pressure detecting |
| CN116046226A (en) * | 2023-01-07 | 2023-05-02 | 常州大学怀德学院 | MEMS pressure sensor for depth-to-width ratio etching |
| CN116046226B (en) * | 2023-01-07 | 2023-12-29 | 厚盟深科(杭州)科技有限公司 | MEMS pressure sensor for depth-to-width ratio etching |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1105907C (en) | 2003-04-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: XIANGFAN TAIHE ELECTRIC CO., LTD. Free format text: FORMER NAME OR ADDRESS: TAIHE ELECTRICAL (XIANGFAN) CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Patentee after: Xiangfan Taihe electric Co., Ltd. Patentee before: Taihe Electric (Xiangfan) Co., Ltd. |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |