CN118130599A - Mass spectrum ion excitation method and device - Google Patents

Abstract

The invention discloses a mass spectrum ion excitation method and a device, which belong to the mass spectrum field, laser irradiates onto a reflecting surface of a reflecting mirror and is focused on a sample of a repulsive electrode after being reflected, the reflecting surface is a paraboloid or an ellipsoid, the direction of the reflected laser is vertical to a sample setting surface formed by the repulsive electrode so that the laser is vertically incident to the sample and a matrix, the sample is bombarded by the vertical laser to generate an ion beam reversely vertical, the repulsive electrode provides high pressure for ion initial kinetic energy modulation, the accelerating electrode provides high pressure for acceleration flight of ions, the ion beam flies out through an ion channel on the reflecting surface, and the reflecting mirror is adopted to reflect the laser, so that the problem that the laser cannot focus due to focus change caused by chromatic aberration of a laser spectrum can be avoided, different multiple laser spectrums can be adopted, and multiple matrixes can be used during detection; the laser is vertically incident to the sample through the reflecting surface, so that the 'oblique shadow effect' is avoided, and the sensitivity and resolution of mass spectrometry are improved.

Description

Mass spectrum ion excitation method and device

Technical Field

The invention relates to the field of mass spectrometry, in particular to a mass spectrometry ion excitation method and a device for implementing the mass spectrometry ion excitation method.

Background

The matrix assisted laser desorption ionization time of flight mass spectrometry (MALDI TOF MS) is a crystal formed by mixing a sample to be detected and a matrix, sample ions are generated under pulse laser bombardment, the flight time of ions with large mass-to-charge ratio is long, the flight time of ions with small mass-to-charge ratio is short under the action of the same accelerating electric field and a field-free flight area, and the accurate detection of the molecular mass of the sample is realized by detecting the difference of arrival detection time of the sample.

The core of the matrix-assisted laser desorption technology is matrix and laser, and the sample detection is different, and the adopted matrix and laser spectrum are different, for example, the absorption wavelength of matrix nicotinic acid (Nicotinic Acid) is 266nm, the absorption wavelength of sinapic acid (dihydroxybenzoic acid, DHB) is 337nm, and the like. The laser sources used in MALDI instruments are mainly classified into ultraviolet and infrared lasers according to the wavelength, wherein infrared lasers are mainly used in early research work, but most MALDI instruments use ultraviolet lasers mainly, such as 193nm, 248nm, 266nm, 308nm, 337nm, 355nm, and the like. At present, the bombardment light spot focusing of the MALDI laser light source is mainly a transmission light path, only a single-band pulse laser light source can be adopted, and other bands or lasers with similar bands are adopted, so that the existing chromatic aberration influences the excitation power of ions, and even the ion cannot be used.

In addition, the sample generates ion cloud when being bombarded by laser, has a certain initial speed, the speed and the direction are directly related to the incident angle of the laser, and the initial speed dispersion degree can greatly influence the sensitivity and the resolution of the instrument. As shown in fig. 1, the incident direction of the laser light is opposite to the ion excitation generation direction, and the incident angle thereof affects the shape of the sample recess and the ion generation direction, i.e., the "shadow effect". Therefore, as the laser incident angle is smaller, ion dispersion of ions on the ion optical axis is smaller, and thus performance of ion detection is also better.

The existing mass spectrometer generally adopts a single specific laser spectrum as a bombardment light source, can not switch the laser spectrum, and can only realize certain application defects and use cost of partial functions. Aiming at the continuous improvement of detection resolution and sensitivity indexes of application requirements, the problem of large ion initial speed dispersion influenced by laser tilt bombardment needs to be controlled, but the current related instrument manufacturers do much work in reducing the tilt angle, but still cannot solve the problem of vertical incidence.

Disclosure of Invention

In order to overcome the defects of the prior art, one of the purposes of the invention is to provide a mass spectrum ion excitation method which can be suitable for lasers in different spectral ranges and can be vertically incident.

In order to overcome the defects of the prior art, the second aim of the invention is to provide a mass spectrum ion excitation device which can be suitable for lasers with different spectral ranges and can make the lasers vertically incident.

One of the purposes of the invention is realized by adopting the following technical scheme:

a method of mass spectrometry ion excitation comprising the steps of:

laser incidence: the laser emits laser, wherein the laser is any one of multi-spectrum laser, an included angle is formed between the incidence direction of the laser and the vertical direction, and the laser is emitted into the vacuum chamber;

laser reflection: the laser irradiates onto a reflecting surface of a reflecting mirror, is reflected and then is focused on a sample of a repulsive electrode, the reflecting surface is a paraboloid or an ellipsoid, and the direction of the reflected laser is perpendicular to a sample placement surface formed by the repulsive electrode so that the laser is perpendicularly incident to the sample and a matrix;

Ion beam generation: after the sample is bombarded by vertical laser, an ion beam vertical in opposite direction is generated, a repulsive electrode provides high voltage for initial kinetic energy modulation of ions, an accelerating electrode provides high voltage for accelerated flight of ions, and the ion beam flies out through an ion channel on the reflecting surface.

Further, in the ion beam generating step, the accelerating electrode is located between the repulsive electrode and the reflecting surface.

Further, when the reflecting surface is an ellipsoid, the laser emitted by the laser is a light spot.

Further, when the reflecting surface is a paraboloid, the laser light emitted by the laser is modulated into parallel collimated light.

Further, in the step of generating the ion beam, an ion lens is used for focusing the ion beam, and the focused ion beam enters the ion channel.

Further, when the reflecting surface is a paraboloid, a parabolic equation of the paraboloid is determined by the radius of a light passing hole of the laser and the focal position of the ion lens.

Further, the focal point of the ion lens is located on the parabola, the focal point coordinate of the ion lens is (x _ion ,y_ion), the focal point coordinate of the ion lens is known, the intersection point of the upper edge and the lower edge of the parallel laser and the parabola is a ₂ coordinate and a ₁,A₂ coordinate is (x ₂ ,y₂）,A₁ coordinate is (x ₁ ,y₁), then y ₂- y₁ =r, r is the radius of the light transmission hole of the laser, and r is a known quantity (x ₁+x₂）/2= x_ion).

The second purpose of the invention is realized by adopting the following technical scheme:

The utility model provides a mass spectrum ion excitation device for implementing above-mentioned arbitrary mass spectrum ion excitation method, mass spectrum ion excitation device includes casing and incident window, the inside vacuum chamber that forms of casing, incident window install in the casing, incident window is used for laser incident to the vacuum chamber, mass spectrum ion excitation device still includes reflection subassembly, imaging module, accelerating electrode and repulsion electrode, reflection subassembly imaging module accelerating electrode and repulsion electrode install in vacuum intracavity and lie in proper order on the straight line, reflection subassembly includes the speculum, the speculum is equipped with the reflecting surface that the slope set up, the reflecting surface orientation incident window and imaging module, the reflecting surface is parabolic or ellipsoidal, the reflecting surface is equipped with the ion channel, the axis of ion channel with reflection subassembly imaging module accelerating electrode and the straight line that the repulsion electrode is located is the same, incident laser of incident window is through the reflecting surface reflection back vertical focusing is in on the vertical direction of the repulsion electrode on the vacuum chamber and on the straight line, the perpendicular direction of the sample of the reflection plane is passed through the perpendicular direction of the ion beam of the acceleration electrode and the perpendicular direction of the sample is passed through the laser beam of the ion beam of inertia is accelerated and is the perpendicular direction of the ion beam of the sample is passed through.

Further, the reflection assembly further comprises a support, the support comprises a main body and a mounting portion extending from the main body, the main body is provided with a through hole, the through hole and the ion channel are located on the same straight line, the reflection mirror is fixed to the main body, and the mounting portion is fixed to the shell.

Further, the mass spectrum ion excitation device further comprises an ion lens, the ion lens is arranged between the imaging component and the accelerating electrode, the ion lens comprises an electrostatic pole piece, a high-voltage pole piece and an electrostatic pole piece, and the ion lens is used for focusing ions.

Compared with the prior art, the mass spectrum ion excitation method is characterized in that laser irradiates a reflecting surface of a reflecting mirror and is focused on a sample of a repulsive electrode after being reflected, the reflecting surface is a paraboloid or an ellipsoid, the direction of the reflected laser is perpendicular to a sample placement surface formed by the repulsive electrode, so that the laser is perpendicularly incident on the sample and a matrix, after the sample is bombarded by perpendicular laser, an opposite perpendicular ion beam is generated, the repulsive electrode provides high voltage for ion initial kinetic energy modulation, the accelerating electrode provides high voltage for acceleration flight of ions, the ion beam flies out through an ion channel on the reflecting surface, and the problem that the laser cannot be focused on a sample target point due to focus change caused by chromatic aberration of a laser spectrum band due to refraction in the prior art is avoided by adopting the reflecting mirror to reflect the laser, so that the laser can adopt different multiple laser spectrums and multiple matrixes can be used during detection; the laser is vertically incident to the sample through the parabolic or ellipsoidal reflecting surface, so that the irradiation light spot of the laser can be effectively reduced, the unit energy density is improved, the laser beam can interact with the sample and the matrix more directly and effectively, the loss of energy in the transmission process is reduced, more ions are generated by excitation, and the sensitivity and the resolution of mass spectrometry are improved.

Drawings

FIG. 1 is a schematic diagram of a shadow effect in the prior art;

FIG. 2 is a flow chart of a mass spectrometry ion excitation method of the present invention;

FIG. 3 is a perspective view of a mass spectrometry ion excitation device according to the present invention;

FIG. 4 is a perspective cross-sectional view of the mass spectrometry ion excitation device of FIG. 3;

FIG. 5 is a perspective view of a reflective component of the mass spectrometry ion excitation device of FIG. 3;

FIG. 6 is a schematic view of the reflective surface of the reflective assembly of FIG. 5 being parabolic;

FIG. 7 is an optical path diagram of a mass spectrometry ion excitation apparatus when the reflecting surface is a parabolic surface;

FIG. 8 is an optical path diagram of a mass spectrometry ion excitation device when the reflecting surface is an ellipsoid;

fig. 9 is a schematic view of laser focusing.

In the figure: 10. a housing; 20. an entrance window; 21. an incidence lens; 30. a reflective assembly; 31. a bracket; 310. a main body; 311. a through hole; 312. a mounting part; 32. a reflecting mirror; 321. an ion channel; 322. a reflecting surface; 40. an imaging assembly; 50. a lighting assembly; 60. an ion lens; 70. an accelerating electrode; 80. a repulsive electrode; 90. and (5) laser.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or be present as another intermediate element through which the element is fixed. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

As shown in fig. 2 and fig. 6-9, the mass spectrometry ion excitation method of the present invention comprises the following steps:

laser incidence: the laser emits laser 90, the laser 90 is any one of multi-spectrum laser, an included angle is formed between the incidence direction of the laser 90 and the vertical direction, and the laser 90 is emitted into the vacuum chamber;

Laser reflection: the laser 90 irradiates the reflecting surface 322 of the reflecting mirror 32, is reflected and focused on the sample of the repulsive electrode 80, the reflecting surface 322 is a paraboloid or an ellipsoid, and the direction of the reflected laser 90 is perpendicular to the sample mounting surface formed by the repulsive electrode 80 so that the laser 90 is perpendicularly incident to the sample and the substrate;

Ion beam generation: after the sample is bombarded by the vertical laser 90, an ion beam is generated in a reverse vertical direction, the repulsive electrode 80 provides a high voltage for initial kinetic energy modulation of the ions, the accelerating electrode 70 provides a high voltage for accelerated flight of the ions, and the ion beam flies out through the ion channel 321 on the reflecting surface 322.

In particular, because the substrates used are different when the samples are different, it is desirable to correspond to different laser spectra. Therefore, in the laser incidence step, the laser can emit laser light, and when the laser is specifically used, the laser light with the corresponding spectrum is adopted according to the type of the substrate. Because the reflection of mirror 32 is used to redirect laser light 90, the focus is not altered when using laser light of different spectral ranges, and thus laser light 90 is accurately focused on the sample and substrate. The problem that in the prior art, the laser cannot be focused on a sample target point due to the fact that the direction of the laser is changed by adopting a refraction and transmission system and the focus is changed due to chromatic aberration of a laser spectrum is solved. In the present embodiment, the incident direction of the laser light 90 is the horizontal direction. When the reflecting surface 322 is an ellipsoid, the laser light 90 emitted from the laser is a spot. When the reflecting surface 322 is parabolic, the laser light 90 from the laser is modulated into collimated light that is parallel.

Specifically, in the laser reflection step, based on the principle that a reflector does not have chromatic aberration, a single off-axis aspheric reflector is adopted, so that the pulse laser with multiple laser wavelengths can be switched freely. Firstly, the reflecting mirror 32 can be applied to any spectrum range (for example, the DUV hard aluminum film and the UV hard aluminum film can cover 190 nm-700 nm spectrum), and the focusing of laser bombardment light spots can be realized by adopting the same laser focusing optical system when lasers with different wave bands are used by combining the principle that the reflecting mirror has no chromatic aberration. In the prior art, when a single lens refraction system is adopted, the focus of a focusing light spot can change to a certain extent in different laser wave bands, and the focusing effect and the ion excitation efficiency are affected; while achromatic problems can be solved with an achromatic lens refractive system, the transmissivity of the lens is greatly reduced with multiple groups, and multiple groups of lenses cannot be arranged in space size. Meanwhile, the refractive system is limited by the transmittance and refractive index of materials in different spectral ranges, the selection is relatively less, and the reflective imaging system has a simple structure, is easy to process and manufacture, and is easy to expand to a large caliber size. Therefore, the application adopts off-axis aspheric mirror technology, and can realize free switching of pulse lasers with multiple laser wavelengths without adjusting an optical system in a vacuum cavity. In particular, the reflective surface 322 of the off-axis aspherical mirror is parabolic or elliptical.

Specifically, in the ion beam generation step, the laser 90 is perpendicularly incident, so that the irradiation area of the laser can be effectively reduced, and higher energy utilization efficiency is realized. Under normal incidence, the laser beam is able to interact more directly and more efficiently with the sample and the substrate, reducing the loss of energy during transmission. This helps to excite more ions and thus improve the sensitivity and resolution of mass spectrometry. Second, the normal incidence approach helps to reduce thermal damage to the sample. The laser beam is incident perpendicular to the surface of the sample, so that the sample is heated more uniformly, and the sample is prevented from being decomposed or disintegrated due to local overheating. This helps to maintain sample integrity and improves the accuracy of the analysis.

The accelerating electrode 70 is positioned between the repeller electrode 80 and the reflecting surface 322, the repeller electrode 80 providing a high voltage for ion initial kinetic energy modulation, typically using a silicon-based or steel-based target plate, and for placement of instrument samples and matrices. The accelerating electrode 70 provides high voltage for accelerating the flying of ions, and is connected with the ion lens 60; the ion lens 60 is mainly used for ion focusing, the ion lens 60 comprises an electrostatic pole piece, a high-voltage pole piece and an electrostatic pole piece, and the ion lens 60 is positioned in the vacuum cavity and between the accelerating electrode 70 and the reflecting component 30. The repeller electrode 80, the accelerator electrode 70, and the ion lens 60 are sequentially arranged in series. To increase the resolution of the instrument, the repulsive electric field 80 and the accelerating electric field 70 have field strengths on the order of kV/mm.

With continued reference to fig. 6 and 9, when the reflecting surface 322 is a paraboloid, the parabolic equation of the paraboloid is determined by the radius of the aperture of the laser and the focal position of the ion lens 60. Specifically, the focal point of the ion lens 60 is located on a parabola, the focal point coordinate of the ion lens 60 is (x _ion ,y_ion), the focal point coordinate of the ion lens 60 is known, the intersection points of the upper and lower edges of the parallel laser 90 and the parabola are respectively A2 and A1, the A2 coordinate is (x ₂ ,y₂), the A1 coordinate is (x ₁ ,y₁), then y ₂- y₁ =r, r is the radius of the light transmission hole of the laser, and r is a known quantity; (x ₁+x₂）/2= x_ion).

With continued reference to fig. 3 to 9, the present application further discloses a mass spectrometry ion excitation device for implementing the above mass spectrometry ion excitation method.

The mass spectrometry ion excitation apparatus comprises a housing 10, an entrance window 20, a reflection assembly 30, an imaging assembly 40, an illumination assembly 50, an ion lens 60, an accelerating electrode 70, and a repulsive electrode 80. The reflection assembly 30, the imaging assembly 40, the illumination assembly 50, the ion lens 60, the acceleration electrode 70, and the repulsive electrode 80 are sequentially disposed and positioned on a straight line.

The housing 10 has a hollow structure, in which a vacuum chamber is formed, and the reflection assembly 30, the imaging assembly 40, the illumination assembly 50, the ion lens 60, the acceleration electrode 70, and the repulsive electrode 80 are all installed in the vacuum chamber.

An incident window 20 is installed at a side portion of the case 10 for incidence of laser light. Specifically, the incident window 20 includes an incident lens 21, and the incident lens 21 is fixed to the housing 10.

The reflection assembly 30 includes a bracket 31 and a reflection mirror 32 fixed to the bracket 31. The bracket 31 includes a main body 310 and a plurality of mounting portions 312 extending from the main body 310. The body 310 is provided with a through hole 311, the through hole 311 being for the passage of the ion beam. The main body 310 is in a ring shape, and the plurality of mounting portions 312 are uniformly distributed on the bracket 31. The mounting portion 312 is used to fix the bracket 31 to the housing 10. The reflecting mirror 32 is provided with a reflecting surface 322, the reflecting surface 322 is curved, the reflecting surface 322 is obliquely arranged, and the reflecting surface 322 faces the incident window 20 and the imaging component 40. The reflective surface 322 is parabolic or elliptical. The reflecting surface 322 is provided with an ion channel 321, the ion channel 321 is used for the ion beam to pass through, and the ion channel 321 and the through hole 311 are positioned on the same straight line. Specifically, the reflector 32 can be applied to any spectrum range (e.g., DUV hard aluminum film and UV hard aluminum film can cover 190 nm-700 nm).

When the reflecting surface 322 is a paraboloid, the incidence of the laser 90 is adjusted to be collimated light, the collimated light enters the vacuum cavity through the incidence window 20, enters the reflecting surface 322, is focused on the sample position after being reflected, and achieves the function of focusing and vertically incidence of the laser.

When the reflecting surface 322 is an ellipsoid, light enters from one focal point of the ellipse, and is focused on the other focal point regardless of the entering direction.

The imaging assembly 40 includes a lens and a barrel, and the imaging assembly 40 is used for target plate state monitoring.

The illumination assembly 50 includes an LED lamp and an LED mount, and the illumination assembly 50 interfaces with the ion lens 60 for illumination of the imaging light path.

The ion lens 60 is used for focusing the ion beam, as shown in fig. 9, and can calculate the first order focal length fion 'of the ion beam and the ion beam focal diameter d' (typically less than 2 mm) by simulation. The first-order focus Fion' is the center of the off-axis aspheric mirror, the aperture area of the mirror 32 is the smallest, the reflection efficiency of the reflecting surface 322 is the highest, and meanwhile, the position far away from the high-voltage electric field is free from discharge risk and has a relatively wide space.

The accelerating electrode 70 provides high voltage for the accelerated flight of ions, the accelerating electric field 70 having a field strength of the order of kV/mm.

The repeller electrode 80 provides high voltage for ion-initiated kinetic energy modulation, typically using a silicon-based or steel-based target plate, and for placement of instrument samples and matrices.

When the mass spectrum ion excitation device is used, the laser device emits laser light 90, the laser light 90 is any one of multi-spectrum laser light, an included angle is formed between the incidence direction of the laser light 90 and the vertical direction, and the laser light 90 is emitted into the vacuum chamber; the laser 90 irradiates the reflecting surface 322 of the reflecting mirror 32, is reflected and focused on the sample of the repulsive electrode 80, the reflecting surface 322 is a paraboloid or an ellipsoid, and the direction of the reflected laser 90 is perpendicular to the sample mounting surface formed by the repulsive electrode 80 so that the laser 90 is perpendicularly incident to the sample and the substrate; after the sample is bombarded by the vertical laser 90, an ion beam is generated in a reverse vertical direction, the repulsive electrode 80 provides a high voltage for initial kinetic energy modulation of the ions, the accelerating electrode 70 provides a high voltage for accelerated flight of the ions, and the ion beam flies out through the ion channel 321 on the reflecting surface 322.

The application adopts the reflector 32 to reflect the laser 90, so as to avoid the problem that the laser 90 cannot be focused on a sample target point due to the change of the focus caused by chromatic aberration of the laser 90 spectrum band in the prior art, and the laser 90 can adopt different multiple laser 90 spectrum bands, and can use multiple matrixes during detection; the laser 90 is vertically incident to the sample through the parabolic or ellipsoidal reflecting surface 322, so that the irradiation light spot of the laser 90 can be effectively reduced, the unit energy density is improved, the laser 90 beam can interact with the sample and the matrix more directly and effectively, the loss of energy in the transmission process is reduced, and the excitation is facilitated to generate more ions, so that the sensitivity and resolution of mass spectrometry are improved.

The foregoing examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, it is possible to make several modifications and improvements without departing from the concept of the present invention, which are equivalent to the above embodiments according to the essential technology of the present invention, and these are all included in the protection scope of the present invention.

Claims (10)

1. A method of mass spectrometry ion excitation comprising the steps of:

laser incidence: the laser emits laser, wherein the laser is any one of multi-spectrum laser, an included angle is formed between the incidence direction of the laser and the vertical direction, and the laser is emitted into the vacuum chamber;

laser reflection: the laser irradiates onto a reflecting surface of a reflecting mirror, is reflected and then is focused on a sample of a repulsive electrode, the reflecting surface is a paraboloid or an ellipsoid, and the direction of the reflected laser is perpendicular to a sample placement surface formed by the repulsive electrode so that the laser is perpendicularly incident to the sample and a matrix;

Ion beam generation: after the sample is bombarded by vertical laser, an ion beam vertical in opposite direction is generated, a repulsive electrode provides high voltage for initial kinetic energy modulation of ions, an accelerating electrode provides high voltage for accelerated flight of ions, and the ion beam flies out through an ion channel on the reflecting surface.

2. The method of mass spectrometry ion excitation according to claim 1, wherein: in the ion beam generating step, the accelerating electrode is located between the repulsive electrode and the reflecting surface.

3. The method of mass spectrometry ion excitation according to claim 1, wherein: when the reflecting surface is an ellipsoid, the laser emitted by the laser is a light spot.

4. The method of mass spectrometry ion excitation according to claim 1, wherein: when the reflecting surface is a paraboloid, the laser emitted by the laser is modulated into parallel collimated light.

5. The method of mass spectrometry ion excitation according to claim 1, wherein: the ion beam generating step further includes focusing the ion beam with an ion lens, and the focused ion beam enters the ion channel.

6. The method of mass spectrometry ion excitation according to claim 5, wherein: when the reflecting surface is a paraboloid, a parabolic equation of the paraboloid is determined by the radius of a light passing hole of the laser and the focal position of the ion lens.

7. The method of mass spectrometry ion excitation according to claim 6, wherein: the focal point of the ion lens is located on the parabola, the focal point coordinate of the ion lens is (x _ion ,y_ion), the focal point coordinate of the ion lens is known, the intersection point of the upper edge and the lower edge of the parallel laser and the parabola is A ₂ and the coordinate of A ₁,A₂ are (x ₂ ,y₂）,A₁ is (x ₁ ,y₁), then y ₂- y₁ =r, r is the radius of a light-transmitting hole of the laser, and r is a known quantity (x ₁+x₂）/2= x_ion).

8. A mass spectrometry ion excitation device for performing a mass spectrometry ion excitation method according to any one of claims 1 to 7, the mass spectrometry ion excitation device comprising a housing, wherein a vacuum chamber is formed inside the housing, and an entrance window mounted to the housing, the entrance window being for laser light to enter the vacuum chamber, characterized in that: the device comprises a vacuum cavity, a sample, a reflection assembly, an acceleration electrode, a repulsion electrode, a reflection assembly, an imaging assembly, an acceleration electrode and the repulsion electrode, wherein the reflection assembly, the imaging assembly, the acceleration electrode and the repulsion electrode are arranged in the vacuum cavity and are sequentially positioned on a straight line, the reflection assembly comprises a reflection mirror, the reflection mirror is provided with a reflection surface which is obliquely arranged, the reflection surface faces the incidence window and the imaging assembly, the reflection surface is a paraboloid or an ellipsoid, the reflection surface is provided with an ion channel, the axis of the ion channel is in the same straight line with the straight line of the reflection assembly, the acceleration electrode and the repulsion electrode, laser incident on the incidence window is vertically focused on the sample of the repulsion electrode after being reflected by the reflection surface, a vertically upward ion beam is generated after being bombarded by vertical laser, and the ion beam passes through the electric field of the acceleration electrode to fly into the ion channel and fly out through the ion channel.

9. The mass spectrometry ion excitation device of claim 8, wherein: the reflection assembly further comprises a support, the support comprises a main body and a mounting part extending from the main body, the main body is provided with a through hole, the through hole and the ion channel are positioned on the same straight line, the reflection mirror is fixed on the main body, and the mounting part is fixed with the shell.

10. The mass spectrometry ion excitation device of claim 8, wherein: the mass spectrum ion excitation device further comprises an ion lens, the ion lens is arranged between the imaging component and the accelerating electrode, the ion lens comprises an electrostatic pole piece, a high-voltage pole piece and an electrostatic pole piece, and the ion lens is used for focusing ions.