CN118066245A - Combined vibration damper and forming method - Google Patents
Combined vibration damper and forming method Download PDFInfo
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- CN118066245A CN118066245A CN202410082574.1A CN202410082574A CN118066245A CN 118066245 A CN118066245 A CN 118066245A CN 202410082574 A CN202410082574 A CN 202410082574A CN 118066245 A CN118066245 A CN 118066245A
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 230000009467 reduction Effects 0.000 claims abstract description 38
- 238000013016 damping Methods 0.000 claims description 135
- 239000003292 glue Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 5
- 229920001971 elastomer Polymers 0.000 claims description 5
- 238000003756 stirring Methods 0.000 claims description 4
- 230000006978 adaptation Effects 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 238000005553 drilling Methods 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 5
- 230000006835 compression Effects 0.000 abstract description 2
- 238000007906 compression Methods 0.000 abstract description 2
- 238000003384 imaging method Methods 0.000 description 13
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
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- 230000004048 modification Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- 230000000717 retained effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/3207—Constructional features
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/3271—Assembly or repair
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/43—Filling or drainage arrangements, e.g. for supply of gas
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/44—Means on or in the damper for manual or non-automatic adjustment; such means combined with temperature correction
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/50—Special means providing automatic damping adjustment, i.e. self-adjustment of damping by particular sliding movements of a valve element, other than flexions or displacement of valve discs; Special means providing self-adjustment of spring characteristics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention belongs to the technical field of scanning electron microscope, and particularly discloses a combined vibration reduction device and a forming method. In the combined vibration damper, the vibration damper is formed by enclosing the outer wall surfaces of the first flange, the second flange and the corrugated pipe to form a vibration damper cavity for placing the vibration damper, two ends of the vibration damper are respectively connected with the first flange and the second flange, the sample chamber and the pump body are respectively connected with the first flange and the second flange, the vibration damper and the vibration damper are arranged in a proper mode, one side of the outer wall of the corrugated pipe is covered by the vibration damper and is elastic, the compression degree and the stretching degree of the corrugated pipe can be buffered, the combined vibration damper can prevent the corrugated pipe from losing elasticity, meanwhile, two ends of the vibration damper are elastic, vibration generated when the pump body is vacuumized can be absorbed by the vibration damper, the vibration damper achieves a vibration damper effect.
Description
Technical Field
The invention relates to the technical field of scanning electron microscope, in particular to a combined vibration damping device and a forming method.
Background
The scanning electron microscope (scanning electron microscope for short) is a microscopic morphology observation means between the transmission electron microscope and the optical microscope, can directly utilize the material property of the sample surface material to perform microscopic imaging, has resolution reaching nanoscale and even better than 1.0 nanometer, and plays an irreplaceable role in the fields of new materials, new energy sources, national defense, scientific research and the like.
The scanning electron microscope uses high-energy electron beams to scan and image the sample, in order to ensure the imaging resolution, the electron beams need to be collimated and focused like light beams, and the high-energy electron beams impact air molecules to be absorbed or scattered, so that the collimation can be destroyed, and therefore, a molecular pump or other vacuum pumps need to be used for vacuumizing a scanning electron microscope sample chamber. However, the molecular pump can vibrate in the high-speed running process, and the vibration can be transmitted to the sample chamber, so that the resolution and definition of the scanning electron microscope imaging are obviously reduced, and even obvious 'burrs' appear on the image. The traditional vibration reduction mode is usually used for reducing vibration by elastic force, specifically, a corrugated pipe is installed between two flanges axially arranged on a scanning electron microscope, imaging quality is improved by utilizing a vibration reduction structure formed by the corrugated pipe, two limit strips which are hooked and connected are arranged in the corrugated pipe, and meanwhile, the two limit strips are connected with the two flanges respectively, so that elasticity is lost when the extension amount of the corrugated pipe is too large.
However, the two limiting strips are made of hard materials, so that the two limiting strips are in rigid connection after being hooked, and vibration of the molecular pump can be transmitted to one side of the sample chamber through the two limiting pieces, and vibration transmission still exists, so that imaging quality is affected.
Disclosure of Invention
Therefore, the invention provides a combined vibration damper to solve the problem that imaging quality is affected by vibration after two limit strips are installed in the prior art.
Specifically, the present invention provides a combined vibration damping device comprising:
The mounting assembly at least comprises a first flange and a second flange, the first flange is used for being connected with the sample chamber, the second flange is arranged at intervals with the first flange, and the second flange is used for being connected with the pump body;
The two axial ends of the corrugated pipe are respectively connected with the first flange and the second flange, and the outer wall surface of the corrugated pipe, the first flange, the second flange and the die enclose to form a vibration reduction cavity;
The vibration reduction piece, the vibration reduction piece with vibration reduction chamber adaptation type sets up, vibration reduction piece installs in vibration reduction chamber in the vibration reduction piece, at least the both ends that the axial set up and cover in one side of bellows outer wall have elasticity, and the both ends that the axial set up respectively with first flange with second flange fixed connection.
Optionally, the above-mentioned combined vibration damping device,
The corrugated pipe is provided with two first connecting parts and a vibration reduction part, the two first connecting parts are respectively connected with the first flange and the second flange, the vibration reduction part is arranged between the two first connecting parts, two ends of the vibration reduction part, which are axially arranged, are respectively connected with the two first connecting parts, and a plurality of concave gaps are formed on the outer wall surface of the vibration reduction part;
the first wall surfaces of the two first connecting parts, the second wall surface of the first flange, the third wall surface of the second flange and the fourth wall surface of the die form a vibration damping cavity.
Optionally, the combined vibration damping device further includes:
The connecting piece, the connecting piece includes butt portion and second connecting portion, the butt portion inlays and locates the damping piece, the one end of second connecting portion with the butt portion is connected, the other end of second connecting portion wears to locate the damping piece and extends outside the damping piece.
Optionally, the above-mentioned combined vibration damping device,
The connecting pieces are provided with a plurality of connecting pieces, the plurality of connecting pieces are divided into two groups, wherein the second connecting part of one group of connecting pieces is fixedly connected with the first flange, one end of the second connecting part of the other group of connecting pieces, which is used for limiting the vibration reduction piece, is far away from the sample chamber, and the second connecting part of the other group of connecting pieces is fixedly connected with the second flange, and the other end of the second connecting part of the other group of connecting pieces, which is used for limiting the vibration reduction piece, is far away from the pump body.
Optionally, the above-mentioned combined vibration damping device,
The first flange and the second flange are respectively provided with a through hole for the second connecting part to penetrate through;
The connecting device further comprises a fastener, and the fastener is fixedly connected with one side, far away from the abutting part, of the second connecting part.
The forming method of the combined vibration damper is applied to the combined vibration damper, and the forming method also uses a die, and comprises the following steps:
Step S1: the first flange, the second flange, the corrugated pipe, the mold, the connecting piece and the fastening piece are installed;
Step S2: preparing vibration reduction glue solution, filling the vibration reduction glue solution into a vibration reduction cavity through a glue filling hole, and cooling after filling;
Step S3: and (5) removing the die.
Optionally, the method for forming the combined vibration damping device further includes, before step S1:
Step S4: the mold size is determined.
Optionally, the step S4 includes:
Step S401: determining the working length of the corrugated pipe before glue filling according to the elastic modulus of the corrugated pipe and the weight of the pump body carried by the corrugated pipe, and obtaining the height dimension of the die;
step S402: and determining the radial dimension of the glue filling die through the damping coefficient of the rubber material.
Optionally, in the method for forming a combined vibration damping device, step S4 further includes:
Step S403: drilling holes at the first flange or the second flange to obtain glue filling holes communicated with the vibration reduction cavity.
Optionally, in the method for forming the combined vibration damping device, when the vibration damping glue solution is configured in the step S2, a hardening agent is added, and stirring is performed by using a vacuum deaerating machine.
The technical scheme provided by the invention has the following advantages:
the invention provides a combined vibration damper which comprises a mounting assembly, a corrugated pipe and a vibration damper. The mounting assembly at least comprises a first flange and a second flange, wherein the first flange is used for being connected with the sample chamber, the second flange is arranged at intervals with the first flange, and the second flange is used for being connected with the pump body; the two axial ends of the corrugated pipe are respectively connected with the first flange and the second flange, and the corrugated pipe, the first flange and the second flange are enclosed to form a vibration reduction cavity; the vibration reduction piece with vibration reduction chamber adaptation type sets up, vibration reduction piece installs in vibration reduction chamber, vibration reduction piece at least axial set up both ends and cover in one side of bellows outer wall have elasticity, and axial set up both ends respectively with first flange with second flange fixed connection.
The combined vibration damper comprises a first flange, a second flange and a corrugated pipe, wherein the first flange, the second flange and the corrugated pipe are enclosed to form a vibration damping cavity for placing a vibration damping piece, two ends of the vibration damping piece are connected with the first flange and the second flange respectively, a sample chamber and a pump body are connected with the first flange and the second flange respectively, the vibration damping piece and the vibration damping cavity are arranged in a proper mode, the vibration damping piece is covered on one side of the outer wall of the corrugated pipe and is elastic, the corrugated pipe can be buffered when the corrugated pipe is compressed or stretched, the corrugated pipe is prevented from losing elasticity when the combined vibration damper is provided with the limiting strips in the prior scheme, meanwhile, the two ends of the vibration damping piece are elastic, vibration generated when the pump body is vacuumized can be absorbed by the vibration damping piece, the vibration damping effect is achieved, compared with the prior scheme, the phenomenon that the limiting strips are prevented from being used to cause rigid connection is avoided, the influence of the vibration of the pump body on imaging quality is reduced, and the imaging quality of a scanning electron microscope is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a cross-sectional view of a combined vibration damping device according to a first embodiment of the present invention;
FIG. 2 is another cross-sectional view of a combined vibration damping device according to an embodiment of the present invention;
FIG. 3 is a schematic view of a combined vibration damping device according to an embodiment of the present invention after a first flange, a second flange, a bellows, a connecting member, and a fastener are assembled with a mold;
FIG. 4 is a schematic view of a part of the enlarged structure of the portion A in FIG. 3;
FIG. 5 is a flow chart of a method for forming a combined vibration damping device according to a second embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a mold used in a molding method of a combined vibration damping device according to a second embodiment of the present invention;
Reference numerals illustrate:
1-mounting an assembly; 11-a first flange; 111-a second wall; 12-a second flange; 121-a third wall;
2-bellows; 211-a first connection; 212-a vibration damping portion; 213-gap; 214-a first wall;
3-a vibration damping member;
4-a die; 411-fourth wall;
511-a vibration damping chamber;
a 6-connector; 611-abutment; 612-a second connection;
7-fasteners.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
In this embodiment, a combined vibration damping device is provided, as shown in fig. 1 to 4, comprising a mounting assembly 1, a bellows 2 and a vibration damping member 3. The mounting assembly 1 at least comprises a first flange 11 and a second flange 12, wherein the first flange 11 is used for being connected with the sample chamber, the second flange 12 is arranged at intervals with the first flange 11, such as along the axial direction of the corrugated pipe, and the second flange 12 is used for being connected with the pump body; the two axial ends of the corrugated pipe 2 are respectively connected with a first flange 11 and a second flange 12, and the outer wall surface of the corrugated pipe 2, the first flange 11, the second flange 12 and the die 4 are enclosed to form a vibration damping cavity 511; the vibration damping member 3 is arranged in the vibration damping cavity 511 in a proper manner, the vibration damping member 3 is arranged in the vibration damping cavity 511, at least two ends of the vibration damping member 3 which are axially arranged and one side which is covered on the outer wall of the corrugated pipe 2 are elastic, and the two ends of the vibration damping member which are axially arranged are fixedly connected with the first flange 11 and the second flange 12 respectively.
In the combined vibration damping device provided in the above embodiment, the first flange 11, the second flange 12 and the bellows 2 are enclosed to form the vibration damping cavity 511 for placing the vibration damping member 3, after two ends of the vibration damping member 3 are respectively connected with the first flange 11 and the second flange 12, and the sample chamber and the pump body are respectively connected with the first flange 11 and the second flange 12, the vibration damping member 3 and the vibration damping cavity 511 are arranged in a proper manner, and one side of the outer wall of the bellows 2 is covered with the vibration damping member 3 to have elasticity, so that the compression degree and the stretching degree of the bellows 2 can be buffered, and the capacity of the bellows 2 losing elasticity can be avoided when the combined vibration damping device is provided with the limit strips in the existing scheme; meanwhile, the two ends of the vibration reduction piece 3 are elastic, so that vibration generated when the pump body is vacuumized can be absorbed by the vibration reduction piece 3, the vibration reduction effect is achieved, compared with the existing scheme, the phenomenon that rigid connection is caused by the use of limiting strips is avoided, the influence of vibration of the pump body on imaging quality is reduced, and the imaging quality of a scanning electron microscope is improved.
In the combined vibration damping device according to the present embodiment, the material of the vibration damping member 3 is not particularly limited. May be one or more of rubber, silicone rubber and butyl rubber. In the present embodiment, the damper 3 is made of rubber. Therefore, the formed combined vibration damper can increase the damping coefficient of the combined vibration damper and reduce the influence of vibration on imaging quality through the combination of the structure of the corrugated pipe 2 and the vibration damper 3.
In the present embodiment, the damping coefficient of the mechanical vibration system isWhere m is the mass and k is the stiffness coefficient, representing the relationship between the force applied to the object and the deformation of the object. Zeta is a damping ratio, is a dimensionless coefficient, and the larger the value of zeta is, the more obvious the damping effect is. Damping ratio ζ=c/(2mω), where mω is the undamped natural frequency, which is the vibration frequency of the system without damping, related to mass and stiffness. Based on the expression of the damping ratio, the damping coefficient c can be expressed as/>
It should be noted that, in this embodiment, the damping coefficient of the combined vibration damping device may be adjusted according to the requirement, so as to meet different working conditions. As one embodiment, the material of the vibration damper 3 used previously is retained, and the structure of the mold 4 is changed at this time, for example: changing the spacing between the first flange 11 and the second flange 12; the distance between the first flange 11 and the second flange 12 is kept unchanged, and the thickness of the vibration damper 3 is changed; of course, in other alternative embodiments, the material and the amount of use of the vibration damping member 3 are changed.
It should be noted that, in the combined vibration damping device provided in this embodiment, the structure of the vibration damping cavity 511 is not limited specifically, and only the vibration damping member 3 and the vibration damping cavity need to be set in a proper shape.
As one embodiment, the bellows 2 is provided with two first connection portions 211 and a vibration damping portion 212, the two first connection portions 211 are respectively connected with the first flange 11 and the second flange 12, the vibration damping portion 212 is arranged between the two first connection portions 211, and two ends of the vibration damping portion 212, which are axially arranged, are respectively connected with the two first connection portions 211, and a plurality of concave gaps 213 are formed on the outer wall surface of the vibration damping portion 212; the plurality of gaps 213, the first wall surface 214 of the two first connection portions 211, the second wall surface 111 of the first flange 11 adjacent to the second flange 12, the third wall surface 121 of the second flange 12 adjacent to the first flange 11, and the fourth wall surface 411 of the mold 4 form a vibration damping chamber 511.
According to the combined vibration damper provided in the above embodiment, by arranging the vibration damper 3 and the vibration damper cavity 511 in a proper manner, each gap 213 of the vibration damper 3 can be completely filled, namely, air in the gap 213 of the corrugated tube 2 is discharged, and the corrugated tube 2 and the vibration damper 3 formed outside the corrugated tube 2 are tightly connected by means of intermolecular forces (van der Waals forces) to form a damping structure, so that vibration energy can be dissipated synchronously, inconsistent phenomenon of vibration attenuation is reduced, and stability of imaging quality is improved; in addition, by filling the gap 213, the space between the first flange 11 and the second flange 12 can be reduced at the same damping coefficient, thereby reducing the space volume occupied by the combined vibration damping device.
The shape of the radially disposed outer wall surface of the vibration damping member 3 is not particularly limited, and may be disposed according to the inner wall surface of the mold 4, that is, may be disposed according to the fourth wall surface 411 of the mold 4. For example, one or more of a cylindrical surface, a conical surface, and a spherical surface.
In the combined vibration damping device according to the present embodiment, the connection manner of the first connection portion 211 and the first flange 11 and the second flange 12 is not particularly limited.
As one embodiment, the two first connection portions 211 are welded and fixed to the first flange 11 and the second flange 12, respectively.
It should be noted that, in the combined vibration damping device provided in this embodiment, the connection manner between the two ends of the vibration damping member 3 and the first flange 11 and the second flange 12 is not limited in particular, and may be direct connection, such as adhesion, or indirect connection, that is, the vibration damping member 3, the first flange 11 and the second flange 12 are connected and fixed through an intermediate member.
As one embodiment, an indirect connection mode is selected, at this time, the combined vibration damping device further includes a connecting piece 6, the connecting piece 6 includes an abutting portion 611 and a second connecting portion 612, the abutting portion 611 is embedded in the vibration damping piece 3, one end of the second connecting portion 612 is connected with the abutting portion 611, and the other end of the second connecting portion 612 is penetrating through the vibration damping piece 3 and extends out of the vibration damping piece 3.
In the present embodiment, the plurality of connectors 6 are provided, and the plurality of connectors 6 are divided into two groups, wherein the second connecting portion 612 of one group of connectors 6 is fixedly connected to the first flange 11, the abutting portion 611 of the other group of connectors 6 is used for limiting one end of the vibration damper 3 to be away from the sample chamber, and the second connecting portion 612 of the other group of connectors 6 is fixedly connected to the second flange 12, and the abutting portion 611 of the other group of connectors 6 is used for limiting the other end of the vibration damper 3 to be away from the pump body.
It should be noted that, in this embodiment, the first flange 11 and the second flange 12 are provided with through holes for the second connection portion 612 to pass through, so as to facilitate the second connection portion 612 to pass through; the combined vibration damping device further comprises a fastener 7, and the fastener 7 is fixedly connected with one side of the second connecting portion 612 away from the abutting portion 611. In the present embodiment, the number of the fasteners 7 is arranged in one-to-one correspondence with the connection pieces 6. Specifically, the fastener 7 is selected to be a nut, and the second connecting portion 612 is provided with external threads that are adapted to the nut.
Example two
The present embodiment provides a method for forming a combined vibration damping device, which is applied to the combined vibration damping device provided in embodiment 1, wherein a mold 4 is used in the process of the forming method, specifically, the mold 4 is connected with a main body of the combined vibration damping device before glue filling, and the mold 4 is removed after glue filling, so that the formed combined vibration damping device containing the vibration damping member 3 can be obtained.
Specifically, as shown in fig. 1 to 6, the method for forming a combined vibration damping device according to the present embodiment includes the following steps:
Step S1: the first flange 11, the second flange 12, the corrugated pipe 2, the die 4, the connecting piece 6 and the fastening piece 7 are installed;
step S2: preparing vibration damping glue solution, filling the vibration damping glue solution into the vibration damping cavity 511 through a glue filling hole, and cooling after filling;
Step S3: the mould 4 is removed.
It may be noted that, in the method for forming the combined vibration damping device provided in this embodiment, when the vibration damping glue solution is configured in step S2, natural rubber is used as a matrix, and heated to 140-160 ℃, or silica gel is used as a matrix, and heated to 150-200 ℃, then a hardening agent such as stearic acid, nitrite, carbon black, silicate and the like is added, and stirring is performed by using a vacuum deaerating machine, so that bubbles generated in the stirring process are discharged, and the vibration damping effect of the formed vibration damping member 3 is prevented from being affected.
It may be noted that, in the method for forming the combined vibration damping device provided in this embodiment, when the step S2 is performed, after the vibration damping glue solution fills the vibration damping cavity, the vibration damping cavity is naturally cooled for 3-4 hours, so that the problem that large stress is generated in the colloid due to rapid forced cooling by adopting a water cooling or condenser, which causes deformation or cracking, is avoided, and after the vibration damping glue solution is solidified into a solid, the vibration damping piece 3 is formed, and then the step S3 is performed.
It should be noted that, in the method for forming a combined vibration damping device according to the present embodiment, preparation work before installation should be performed before step S1 is performed, for example, the forming method further includes:
Step S4: the mould 4 is dimensioned.
Specifically, step S4 includes:
Step S401: determining the working length of the corrugated pipe 2 before glue filling according to the elastic modulus of the corrugated pipe 2 and the weight of the pump body carried by the corrugated pipe, and obtaining the height dimension of the die 4, such as the height H1 shown in fig. 6;
step S402: the radial dimension of the potting mold 4 is determined by the damping coefficient of the rubber material, as illustrated by diameter D1 in fig. 6.
It should be noted that, in the method for forming a combined vibration damping device provided in this embodiment, the step S401 and the step S402 do not distinguish the sequence.
It should be noted that, after the step S401 and the step S402 in the step S4 are completed, the method for forming the combined vibration damping device according to the present embodiment should further include: the position of each connection piece 6 is adjusted to ensure that the spacing between the first flange 11 and the second flange 12 is the working length of the bellows 2.
After step S401 and step S402 are completed, step S4 further includes:
Step S403: drilling is performed at the first flange 11 or the second flange 12 to obtain a glue filling hole communicated with the vibration damping cavity 511.
As one embodiment, a glue-pouring hole is formed at the first flange 11.
After step S401 and step S402 are completed, step S4 further includes:
step S404: through holes for penetrating the second connecting part 612 of the connecting piece 6 are formed at the first flange 11 and the second flange 12.
After step S401 and step S402 are completed, step S4 further includes:
step S405: and a limiting structure for ensuring coaxiality with the corrugated pipe 2 is additionally arranged on the first flange 11 and the second flange 12.
The shape of the mold 4 obtained in step S4 is not particularly limited. As one embodiment, the resulting mold 4 may have a columnar shape or a truncated cone shape as a whole; in other embodiments, the resulting mold 4 may have a partial cylindrical shape or a truncated cone shape.
After the formation of the combined vibration damping device is completed, the combined vibration damping device, the sample chamber and the pump body are mounted. Specifically, the first flange 11 is fixed to a flange provided at the sample chamber using a caliper, and then the outlet end of the pump body is connected to the second flange 12, completing the installation. In this embodiment, the pump body is not limited in type, for example, a molecular pump, and at this time, an inlet end of the molecular pump is connected to the mechanical pump through a hose, and the mechanical pump is started before the molecular pump is started, so that a low vacuum environment is provided for the molecular pump when the molecular pump is started. Specifically, after the mechanical pump is started, the molecular pump is started when the vacuum degree in the environment reaches 10Pa, vibration generated during the molecular pump vacuumizing is absorbed by the vibration absorbing device, and the vibration absorbing piece 3 and the corrugated pipe 2 can absorb the vibration of the molecular pump, so that the imaging quality of the scanning electron microscope is improved.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (10)
1. A combination vibration damping device, comprising:
The mounting assembly (1) at least comprises a first flange (11) and a second flange (12), wherein the first flange (11) is used for being connected with the sample chamber, the second flange (12) is arranged at intervals with the first flange (11), and the second flange (12) is used for being connected with the pump body;
The corrugated pipe (2), two axial ends of the corrugated pipe (2) are respectively connected with a first flange (11) and a second flange (12), and a vibration reduction cavity (511) is formed by enclosing the outer wall surface of the corrugated pipe (2), the first flange (11), the second flange (12) and the die (4);
Vibration damping piece (3), vibration damping piece (3) with vibration damping chamber (511) adaptation type sets up, vibration damping piece (3) install in vibration damping chamber (511) in vibration damping piece (3), at least the both ends that the axial set up and cover in one side of bellows (2) outer wall have elasticity, and the both ends that the axial set up respectively with first flange (11) with second flange (12) fixed connection.
2. The combination vibration damping device according to claim 1, wherein,
The corrugated pipe (2) is provided with two first connecting parts (211) and a vibration reduction part (212), the two first connecting parts (211) are respectively connected with the first flange (11) and the second flange (12), the vibration reduction part (212) is arranged between the two first connecting parts (211), two ends of the vibration reduction part (212) which are axially arranged are respectively connected with the two first connecting parts (211), and a plurality of concave gaps (213) are formed on the outer wall surface of the vibration reduction part (212);
Wherein, a plurality of gaps (213), a first wall surface (214) of two first connecting parts (211), a second wall surface (111) of the first flange (11) close to the second flange (12), a third wall surface (121) of the second flange (12) close to the first flange (11), and a fourth wall surface (411) of the mold (4) form a vibration damping cavity (511).
3. The combination vibration damping device according to claim 2, further comprising:
The connecting piece (6), connecting piece (6) include butt portion (611) and second connecting portion (612), butt portion (611) inlays and locates damping piece (3), the one end of second connecting portion (612) with butt portion (611) are connected, the other end of second connecting portion (612) wears to locate damping piece (3) and extends to outside damping piece (3).
4. A combined vibration and damping device according to claim 3, characterized in that,
The connecting pieces (6) are provided with a plurality of connecting pieces (6), the plurality of connecting pieces (6) are divided into two groups, wherein a second connecting part (612) of one group of connecting pieces (6) is fixedly connected with the first flange (11), one end of the damping piece (3) is limited by an abutting part (611) of the connecting piece (6) in the group to be far away from the sample chamber, and a second connecting part (612) of the other group of connecting pieces (6) is fixedly connected with the second flange (12) and is used for limiting the other end of the damping piece (3) to be far away from the pump body by an abutting part (611) of the connecting piece (6) in the group.
5. The combination vibration damping device according to claim 4, wherein,
The first flange (11) and the second flange (12) are respectively provided with a through hole for the second connecting part (612) to penetrate through;
the device further comprises a fastener (7), wherein the fastener (7) is fixedly connected with one side, far away from the abutting part (611), of the second connecting part (612).
6. A method of forming a combined vibration damping device, applied to a combined vibration damping device according to any one of claims 1-5, characterized in that the forming method further uses a mold (4), the forming method comprising:
Step S1: the first flange (11), the second flange (12), the corrugated pipe (2), the die (4), the connecting piece (6) and the fastening piece (7) are installed;
Step S2: preparing vibration reduction glue solution, filling the vibration reduction glue solution into a vibration reduction cavity (511) through a glue filling hole, and cooling after filling;
Step S3: and (5) removing the die (4).
7. The method of forming a composite vibration damping device according to claim 6, further comprising, prior to step S1:
step S4: the size of the mould (4) is determined.
8. The method of forming a composite vibration damping device according to claim 7, wherein the step S4 includes:
Step S401: determining the working length of the corrugated pipe (2) before glue filling according to the elastic modulus of the corrugated pipe (2) and the weight of a pump body borne by the corrugated pipe to obtain the height dimension of the die (4);
Step S402: the radial size of the glue filling mould (4) is determined by the damping coefficient of the rubber material.
9. The method of forming a combined vibration damping device according to claim 8, wherein the step S4 further comprises:
Step S403: drilling is carried out on the first flange (11) or the second flange (12) to obtain a glue filling hole communicated with the vibration reduction cavity (511).
10. The method of forming a composite damping device according to claim 8, wherein the setting of the damping compound in step S2 is performed by placing a hardening agent and stirring the solution with a vacuum deaerating machine.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410082574.1A CN118066245A (en) | 2024-01-19 | 2024-01-19 | Combined vibration damper and forming method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410082574.1A CN118066245A (en) | 2024-01-19 | 2024-01-19 | Combined vibration damper and forming method |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4833899A (en) * | 1986-11-14 | 1989-05-30 | Helix Technology Corporation | Cryopump with vibration isolation |
| US6514146B1 (en) * | 2002-02-26 | 2003-02-04 | Kinzou Shinozuka | Low vibration shielded bellows shaft coupling |
| US20050204754A1 (en) * | 2004-03-22 | 2005-09-22 | Alcatel | Vacuum pump damping adapter |
| CN105840463A (en) * | 2016-06-17 | 2016-08-10 | 福州怡辉电力设备有限公司 | Anti-vibration external member for compressor |
| CN109386564A (en) * | 2017-08-11 | 2019-02-26 | 上海锆智电子科技有限公司 | Turbomolecular pump damper |
| CN211667089U (en) * | 2020-01-22 | 2020-10-13 | 苏州优波光电科技有限公司 | Vibration damper and electron microscope |
-
2024
- 2024-01-19 CN CN202410082574.1A patent/CN118066245A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4833899A (en) * | 1986-11-14 | 1989-05-30 | Helix Technology Corporation | Cryopump with vibration isolation |
| US6514146B1 (en) * | 2002-02-26 | 2003-02-04 | Kinzou Shinozuka | Low vibration shielded bellows shaft coupling |
| US20050204754A1 (en) * | 2004-03-22 | 2005-09-22 | Alcatel | Vacuum pump damping adapter |
| CN105840463A (en) * | 2016-06-17 | 2016-08-10 | 福州怡辉电力设备有限公司 | Anti-vibration external member for compressor |
| CN109386564A (en) * | 2017-08-11 | 2019-02-26 | 上海锆智电子科技有限公司 | Turbomolecular pump damper |
| CN211667089U (en) * | 2020-01-22 | 2020-10-13 | 苏州优波光电科技有限公司 | Vibration damper and electron microscope |
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