CN109386564A - Turbomolecular pump damper - Google Patents
Turbomolecular pump damper Download PDFInfo
- Publication number
- CN109386564A CN109386564A CN201710683709.XA CN201710683709A CN109386564A CN 109386564 A CN109386564 A CN 109386564A CN 201710683709 A CN201710683709 A CN 201710683709A CN 109386564 A CN109386564 A CN 109386564A
- Authority
- CN
- China
- Prior art keywords
- cylinder
- stainless steel
- flange
- turbomolecular pump
- steel tubing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 46
- 239000010935 stainless steel Substances 0.000 claims abstract description 46
- 238000003466 welding Methods 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 18
- 238000000465 moulding Methods 0.000 claims description 7
- 239000002360 explosive Substances 0.000 claims description 3
- 238000013016 damping Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract description 3
- 230000003321 amplification Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
- F16F3/08—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber
- F16F3/10—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction
- F16F3/12—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of a material having high internal friction, e.g. rubber combined with springs made of steel or other material having low internal friction the steel spring being in contact with the rubber spring
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
The invention discloses a kind of turbomolecular pump damper, including flange one, cylinder one, corrugated stainless steel tubing, rubber filling object, cylinder two and flanges two.Turbomolecular pump damper provided by the invention, it is sealingly connected with scanning electron microscope sample room and turbomolecular pump respectively by upper and lower two flanges, by the collective effect of corrugated stainless steel tubing and rubber filling object, the vibration that turbomolecular pump generates during operation can be effectively prevented and transmitted to scanning electron microscope sample room.The installation that the present invention completes turbomolecular pump again while solving the problems, such as turbomolecular pump damping is fixed, and the complexity of assembling process is greatly simplified.
Description
Technical field
It is specifically a kind of for reducing the vibration generated in turbomolecular pump operating the present invention relates to a kind of dampening arrangement
The device transmitted to scanning electron microscope sample room.
Background technique
The amplification factor of electron microscope is up to hundreds of thousands times, and any vibration of sample can all directly affect image quality,
This requires putting the sample stage of sample to have the characteristics that high stability, but for multi-angle, multiposition observes sample, modern
Electron microscope sample desk is mostly 5 axis cantilever designs, is needed using linear guide, these components have low damping characteristic, can be produced
Raw microvibration.
Scanning electron microscope requires work under vacuum conditions, needs to continue working using turbomolecular pump, molecular pump
Vacuum is obtained by high-speed rotating turbo blade, turbomolecular pump can inherently generate vibration, if in turbomolecular pump and swept
Retouching between electron microscope sample room does not have damping device, can seriously affect image quality.
It is undesirable all to there is damping effect in current vibration reducing measure, and installation is complicated, problem at high cost.
Summary of the invention
The present invention aiming at the above shortcomings existing in the prior art, provides a kind of turbomolecular pump damper.
The present invention is achieved by the following technical solutions.
A kind of turbomolecular pump damper, including flange one, cylinder one, corrugated stainless steel tubing, rubber filling object, cylinder two
And flange two, in which:
Flange one, material are 316L stainless steel, and Laser Welding welding fabrication is used between the flange one and cylinder one；
Cylinder one, material are 316L stainless steel, and laser is respectively adopted between the cylinder one and flange one and corrugated stainless steel tubing
Weld welding fabrication；
Corrugated stainless steel tubing, material are 316L stainless steel, explosive forming, wall thickness 0.25mm ~ 0.35mm, the corrugated stainless steel tubing
Laser Welding welding fabrication is respectively adopted between cylinder one and cylinder two；
Rubber filling object, material are fluorubber, and with corrugated stainless steel tubing using disposable whole cast molding, combining closely becomes
One entirety；
Cylinder two, material are 316L stainless steel, and laser is respectively adopted between the cylinder two and flange two and corrugated stainless steel tubing
Weld welding fabrication；
Flange two, material are 316L stainless steel, and Laser Welding welding fabrication is used between the flange two and cylinder two.
Further, the rubber filling object and corrugated stainless steel tubing are using disposable whole cast molding.
Further, Laser Welding welding fabrication is respectively adopted between the corrugated stainless steel tubing and cylinder one and cylinder two.
Further, Laser Welding welding fabrication is used between the flange one and cylinder one.
Further, Laser Welding welding fabrication is used between the flange two and cylinder two.
Turbomolecular pump damper provided by the invention, by upper and lower two flanges respectively with scanning electron microscope sample
Product room and turbomolecular pump sealingly connect, and by the collective effect of corrugated stainless steel tubing and rubber filling object, can be effectively prevented
The vibration that turbomolecular pump generates during operation is transmitted to scanning electron microscope sample room.
The installation that the present invention completes turbomolecular pump again while solving the problems, such as turbomolecular pump damping is fixed, greatly
Ground simplifies the complexity of assembling process.
Detailed description of the invention
Fig. 1 is structure chart of the invention；
In figure: 1 is flange one, and 2 be cylinder one, and 3 be rubber filling object, and 4 be corrugated stainless steel tubing, and 5 be cylinder two, and 6 be flange
Two.
Specific embodiment
Elaborate below to the embodiment of the present invention: the present embodiment carries out under the premise of the technical scheme of the present invention
Implement, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to following implementation
Example.
Present embodiments provide a kind of turbomolecular pump damper, including flange one, cylinder one, corrugated stainless steel tubing, rubber
Glue filler, cylinder two and flange two, in which:
Flange one, material are 316L stainless steel, and Laser Welding welding fabrication is used between the flange one and cylinder one；
Cylinder one, material are 316L stainless steel, and laser is respectively adopted between the cylinder one and flange one and corrugated stainless steel tubing
Weld welding fabrication；
Corrugated stainless steel tubing, material are 316L stainless steel, explosive forming, wall thickness 0.25mm ~ 0.35mm, the corrugated stainless steel tubing
Laser Welding welding fabrication is respectively adopted between cylinder one and cylinder two；
Rubber filling object, material are fluorubber, and with corrugated stainless steel tubing using disposable whole cast molding, combining closely becomes
One entirety；
Cylinder two, material are 316L stainless steel, and laser is respectively adopted between the cylinder two and flange two and corrugated stainless steel tubing
Weld welding fabrication；
Flange two, material are 316L stainless steel, and Laser Welding welding fabrication is used between the flange two and cylinder two.
Further, the rubber filling object and corrugated stainless steel tubing are using disposable whole cast molding.
Further, Laser Welding welding fabrication is respectively adopted between the corrugated stainless steel tubing and cylinder one and cylinder two.
Further, Laser Welding welding fabrication is used between the flange one and cylinder one.
Further, Laser Welding welding fabrication is used between the flange two and cylinder two.
In the present embodiment, flange one, cylinder one, corrugated stainless steel tubing, cylinder two, flange two is all made of the stainless steel of 316L
It makes, and an entirety is welded by vacuum welding technology, not only ensure that the air-tightness of the present apparatus in this way, but also can effectively subtract
The quality of few number of components and device itself.
Rubber filling object and corrugated stainless steel tubing can effectively be absorbed more in this way using disposable whole cast molding
The shock wave of a wave band improves the stability of sample room.
Connection through the invention, turbomolecular pump can be directly installed on the lower section of sample room, without being fixed on
Elsewhere, installation process is greatly simplified.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (5)
1. a kind of turbomolecular pump damper, which is characterized in that including flange one, cylinder one, corrugated stainless steel tubing, rubber filling
Object, cylinder two and flange two, in which:
Flange one, material are 316L stainless steel, and Laser Welding welding fabrication is used between the flange one and cylinder one；
Cylinder one, material are 316L stainless steel, and laser is respectively adopted between the cylinder one and flange one and corrugated stainless steel tubing
Weld welding fabrication；
Corrugated stainless steel tubing, material are 316L stainless steel, explosive forming, wall thickness 0.25mm ~ 0.35mm, the corrugated stainless steel tubing
Laser Welding welding fabrication is respectively adopted between cylinder one and cylinder two；
Rubber filling object, material are fluorubber, and with corrugated stainless steel tubing using disposable whole cast molding, combining closely becomes
One entirety；
Cylinder two, material are 316L stainless steel, and laser is respectively adopted between the cylinder two and flange two and corrugated stainless steel tubing
Weld welding fabrication；
Flange two, material are 316L stainless steel, and Laser Welding welding fabrication is used between the flange two and cylinder two.
2. turbomolecular pump damper according to claim 1, which is characterized in that the rubber filling object and stainless steel wave
Line pipe is using disposable whole cast molding.
3. turbomolecular pump damper according to claim 1, which is characterized in that the corrugated stainless steel tubing and cylinder one
Laser Welding welding fabrication is respectively adopted between cylinder two.
4. turbomolecular pump damper according to claim 1, which is characterized in that adopted between the flange one and cylinder one
With Laser Welding welding fabrication.
5. turbomolecular pump damper according to claim 1, which is characterized in that adopted between the flange two and cylinder two
With Laser Welding welding fabrication.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710683709.XA CN109386564A (en) | 2017-08-11 | 2017-08-11 | Turbomolecular pump damper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710683709.XA CN109386564A (en) | 2017-08-11 | 2017-08-11 | Turbomolecular pump damper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109386564A true CN109386564A (en) | 2019-02-26 |
Family
ID=65414530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710683709.XA Pending CN109386564A (en) | 2017-08-11 | 2017-08-11 | Turbomolecular pump damper |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109386564A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114658785A (en) * | 2022-03-01 | 2022-06-24 | 国仪量子(合肥)技术有限公司 | Combined vibration damper and scanning electron microscope |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1958137A1 (en) * | 1969-11-19 | 1971-05-27 | Rudolf Stender Kg | Elastic pipe connection |
| CN2158483Y (en) * | 1993-05-03 | 1994-03-09 | 李同文 | Elastic shock-proof arrangement for pipeline |
| JP2000073986A (en) * | 1998-08-28 | 2000-03-07 | Jeol Ltd | Vibration restraining unit for turbo-molecular pump |
| CN1673550A (en) * | 2004-03-22 | 2005-09-28 | 阿尔卡特公司 | Damping connection for vacuum pump |
| CN102003487A (en) * | 2010-12-10 | 2011-04-06 | 北京首航波纹管制造有限公司 | Damping compensator |
| CN205298868U (en) * | 2016-01-15 | 2016-06-08 | 浙江乐鼎波纹管有限公司 | Compound damping exhaust bellows |
| CN205477859U (en) * | 2016-01-12 | 2016-08-17 | 广西玉柴机器股份有限公司 | Engine whirlpool final vacuum return bend |
| CN207621234U (en) * | 2017-08-11 | 2018-07-17 | 上海锆智电子科技有限公司 | Turbomolecular pump damper |
-
2017
- 2017-08-11 CN CN201710683709.XA patent/CN109386564A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1958137A1 (en) * | 1969-11-19 | 1971-05-27 | Rudolf Stender Kg | Elastic pipe connection |
| CN2158483Y (en) * | 1993-05-03 | 1994-03-09 | 李同文 | Elastic shock-proof arrangement for pipeline |
| JP2000073986A (en) * | 1998-08-28 | 2000-03-07 | Jeol Ltd | Vibration restraining unit for turbo-molecular pump |
| CN1673550A (en) * | 2004-03-22 | 2005-09-28 | 阿尔卡特公司 | Damping connection for vacuum pump |
| CN102003487A (en) * | 2010-12-10 | 2011-04-06 | 北京首航波纹管制造有限公司 | Damping compensator |
| CN205477859U (en) * | 2016-01-12 | 2016-08-17 | 广西玉柴机器股份有限公司 | Engine whirlpool final vacuum return bend |
| CN205298868U (en) * | 2016-01-15 | 2016-06-08 | 浙江乐鼎波纹管有限公司 | Compound damping exhaust bellows |
| CN207621234U (en) * | 2017-08-11 | 2018-07-17 | 上海锆智电子科技有限公司 | Turbomolecular pump damper |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114658785A (en) * | 2022-03-01 | 2022-06-24 | 国仪量子(合肥)技术有限公司 | Combined vibration damper and scanning electron microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 200086 room 8405, No. 315, Emei Road, Hongkou District, Shanghai Applicant after: Guoyi quantum (Shanghai) Measurement Technology Co.,Ltd. Address before: 201210 Room 501, 14 Lane 193, Ziwei Road, Pudong New Area, Shanghai. Applicant before: SHANGHAI GAOZHI ELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: E3-304, Phase II, Innovation Industrial Park, No. 2800, Innovation Avenue, High tech Zone, China (Anhui) Pilot Free Trade Zone, Hefei, Anhui Province, 230000 Applicant after: Hefei Guoyi Precision Technology Co.,Ltd. Address before: Room 8405, 315 Emei Road, Hongkou District, Shanghai 200086 Applicant before: Guoyi quantum (Shanghai) Measurement Technology Co.,Ltd. |