CN118039442A - Multi-pulse driving method of radio frequency power supply - Google Patents
Multi-pulse driving method of radio frequency power supply Download PDFInfo
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- CN118039442A CN118039442A CN202410193853.5A CN202410193853A CN118039442A CN 118039442 A CN118039442 A CN 118039442A CN 202410193853 A CN202410193853 A CN 202410193853A CN 118039442 A CN118039442 A CN 118039442A
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
- H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
- H02M7/53871—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
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- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Inverter Devices (AREA)
Abstract
The invention relates to a multi-pulse driving method of a radio frequency power supply, belongs to the technical field of radio frequency power supplies, and solves the problem that the existing radio frequency power supply is poor in stability during pulse switching. A multi-pulse driving method of a radio frequency power supply, the driving method comprising: before the power supply of the radio frequency power supply, setting a reference signal, and determining the total series of the pulse signals and the output power and frequency of the pulse signals of each stage according to the reference signal; wherein, the output power and frequency of each stage of pulse signals are different; when the radio frequency power supply supplies power, based on a reference signal, each stage of pulse signals are generated by using a multi-pulse generator; the switch is used for switching the multi-stage pulse signals generated by the multi-pulse generator and outputting the multi-stage pulse signals to the inverter to drive the radio frequency power supply, and the output power and the frequency of the radio frequency power supply are switched.
Description
The application relates to a multi-pulse driving generating device of a radio frequency power supply, which is a division application of a master case, wherein the application is 202311638758.3 and the name of the multi-pulse driving generating device is filed on 12-month 04 of 2023.
Technical Field
The invention belongs to the technical field of radio frequency power supplies, and particularly relates to a multi-pulse driving method of a radio frequency power supply.
Background
The architecture of the whole radio frequency plasma power supply system comprises a radio frequency power supply, a matcher and a chamber load, wherein the radio frequency power supply outputs a power signal to the matcher, and the matcher performs impedance matching and transfers the power signal to the chamber load. In the operation process, the radio frequency power supply outputs an alternating current power signal, the alternating current power signal is supplied to a chamber load through pulse excitation with a certain duty ratio, so that the input gas in the chamber receives enough electric energy to strike a fire, the gas is ionized, and the plasma is moved in the direction of a magnetic field formed by the electrodes to perform a related process.
During non-pulsed excitation, the chamber load may stall due to insufficient power, and thus it is desirable to provide a pulsed excitation that maintains a minimum ionization energy.
But at present, the main modules in the conventional radio frequency power supply comprise an ADC module, a power amplifier, a VI sensor and a main control module. The power amplifier mainly comprises an inverter and a transformer, and a filter is additionally arranged if necessary. The inverter in the power amplifier mostly adopts an H-bridge inverter circuit, but during pulse switching, a plurality of switching tubes of the H-bridge circuit can form full tube conduction due to the influence of continuous current, so that the circuit is damaged.
Disclosure of Invention
In view of the above analysis, the present invention aims to disclose a multi-pulse driving generating device of a radio frequency power supply, which is used for solving the problem of poor stability of the existing radio frequency power supply during pulse switching.
The invention discloses a multi-pulse driving method of a radio frequency power supply, which comprises the following steps:
before the power supply of the radio frequency power supply, setting a reference signal, and determining the total series of the pulse signals and the output power and frequency of the pulse signals of each stage according to the reference signal; wherein, the output power and frequency of each stage of pulse signals are different;
When the radio frequency power supply supplies power, based on a reference signal, each stage of pulse signals are generated by using a multi-pulse generator;
The switch is used for switching the multi-stage pulse signals generated by the multi-pulse generator and outputting the multi-stage pulse signals to the inverter to drive the radio frequency power supply, and the output power and the frequency of the radio frequency power supply are switched.
Based on the scheme, the invention also makes the following improvements:
Further, the switching of the multi-stage pulse signal generated by the multi-pulse generator by the switcher performs:
switching the multi-stage pulse signals generated by the multi-pulse generator by using a switcher to generate control signals of the inverter;
the inverter drives the radio frequency power supply based on a control signal of the inverter.
Further, the generating the control signal of the inverter performs:
setting the generated control signal of the inverter to zero in the switching process of the multi-stage pulse signals;
and in the non-switching process of the multi-stage pulse signals, generating control signals of the inverter according to the accessed pulse signals.
Further, the generating the control signal of the inverter performs:
Judging the current switching state, and if the switching state is the switching process of the multi-stage pulse signal, outputting a low potential by the encoder; if the non-switching process of the multi-stage pulse signal is performed, the encoder outputs a high potential;
converting the pulse signal accessed by the switcher to generate an inverter control reference signal;
and performing AND operation on the potential output by the encoder and an inverter control reference signal to generate a control signal of the inverter.
Further, the generating the inverter control reference signal performs:
Converting the pulse signal accessed by the switcher into an analog signal serving as a positive-phase analog signal;
Inverting the normal phase analog signal to obtain an inverted phase analog signal;
Respectively filtering the normal phase analog signals and the reverse phase analog signals;
comparing the filtered normal phase analog signal and the filtered reverse phase analog signal to obtain a comparison signal which is used as a normal comparison signal;
Inverting the positive comparison signal to obtain an inverted comparison signal;
and combining the positive comparison signal and the reverse comparison signal to obtain the inverter control reference signal.
Further, the inverter is an H-bridge inverter, H1/H2 is one half-bridge control path of an H bridge, and H3/H4 is the other half-bridge control path of the H bridge;
the multi-pulse generator includes N levels of pulse generators for generating pulse signals of levels from LV1 to LVN.
Further, the pulse generator with the level of LVn respectively generates pulse signals with the level of LVn for driving the H1/H2 half-bridge control path and the H3/H4 half-bridge control path of the H bridge inverter;
N has a value of 1 to N respectively.
Further, at least two stages of pulse signals are started in the multi-stage pulse signals generated by the multi-pulse generator; meanwhile, in the switching process of the multi-stage pulse signals, only the enabled pulse signals at all stages are switched.
Further, the sum of the total operating time of the enabled pulse signals at each stage and the total operating time of the encoder kept at a low level is smaller than the operating time of one period of the reference signal.
Further, the multi-pulse generator generates at least two stages of pulse signals, including a high excitation pulse signal and a low excitation pulse signal; wherein,
The high excitation pulse signal is used for ignition, ionization and process operation,
The low excitation pulse signal is used to maintain two levels of ionization energy.
The invention can realize one of the following beneficial effects:
The multi-pulse driving method of the radio frequency power supply can realize the switching of multi-stage pulse signals so as to correspondingly switch the output power and the frequency of the radio frequency power supply. Meanwhile, the control signal of the inverter is set to zero in the switching process of the multi-stage pulse signal, so that the full-tube conduction of an H-bridge in the inverter is effectively avoided, the radio frequency power supply can still stably operate in the pulse switching overshoot, the problem of poor stability of the existing radio frequency power supply in the pulse switching period is well solved, and the method is suitable for various radio frequency power supplies or combination of the radio frequency power supplies.
In addition, the invention also provides a specific process of switching enabling, the implementation mode is simple, the control logic is strict, the guarantee is provided for providing reliable and stable inverter control signals, and the technical guidance is provided for specific implementation of the scheme by a person skilled in the art.
Finally, when multi-pulse signals with more than three stages are adopted, the number of stages to be adopted can be flexibly selected according to actual requirements. When the two-stage pulse signal is selected, ionization and process are carried out in the pulse high-excitation period, the plasma ionization state is maintained in the pulse low-excitation period, and the pulse switching can be performed stably.
In the invention, the technical schemes can be mutually combined to realize more preferable combination schemes. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the invention, like reference numerals being used to designate like parts throughout the drawings;
Fig. 1 is a schematic diagram of a first structure of a multi-pulse driving generator of a radio frequency power supply according to an embodiment of the present invention;
Fig. 2 is a schematic diagram of a second structure of a multi-pulse driving generator of a radio frequency power supply according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a third structure of a multi-pulse driving generator of a radio frequency power supply according to an embodiment of the present invention;
fig. 4 is a fourth schematic structural diagram of a multi-pulse driving generator of a radio frequency power supply according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a fifth structure of a multi-pulse driving generator of a rf power supply according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a sixth structure of a multi-pulse driving generator of a rf power supply according to an embodiment of the present invention;
FIG. 7 is a timing diagram of the driving control of the multi-pulse driving generator of the RF power supply according to the embodiment of the present invention;
FIG. 8 is a timing diagram of a driving control output according to an embodiment of the present invention;
FIG. 9 is a single-phase power input RF power provided by an embodiment of the present invention;
Fig. 10 is a schematic diagram of a three-phase power input rf power supply according to an embodiment of the present invention.
Fig. 11 is a flowchart of a multi-pulse driving method of a radio frequency power supply according to an embodiment of the present invention.
Detailed Description
Preferred embodiments of the present application are described in detail below with reference to the attached drawing figures, which form a part of the present application and are used in conjunction with embodiments of the present application to illustrate the principles of the present application.
The invention discloses a multi-pulse driving generating device of a radio frequency power supply, the structure schematic diagram of which is shown in figure 1, and the multi-pulse driving generating device of the radio frequency power supply comprises a multi-pulse generator and a switcher; wherein the switcher is connected between the multi-pulse generator and an inverter of a radio frequency power supply; the multi-pulse generator generates multi-stage pulse signals based on the reference signals, and the output power and the frequency of each stage of pulse signals are different; the switcher switches the multi-stage pulse signals generated by the multi-pulse generator and outputs the multi-stage pulse signals to the inverter to drive the radio frequency power supply, and the output power and the frequency of the radio frequency power supply are switched.
Preferably, the multi-pulse driving generating device further comprises a switching enabling controller, and at this time, a schematic structural diagram of the multi-pulse driving generating device of the radio frequency power supply is shown in fig. 2. Wherein the switching enabling controller is connected between the switcher and an inverter of a radio frequency power supply; the switching enabling controller is used for setting the control signal of the inverter to zero in the switching process of the multi-stage pulse signals; the control signal of the inverter is generated according to the accessed pulse signal in the non-switching process of the multi-stage pulse signal; the inverter drives a radio frequency power supply based on a control signal of the inverter.
In this embodiment, the multi-stage pulse signals generated by the multi-pulse generator are stored in the FPGA, the MCU, or similar electronic operation devices capable of reading parameters and outputting signals corresponding to the parameters, and the switching between the multi-stage pulse signals is processed by the internal operation of the FPGA and is soft control switching output; the system signal generating circuit can also be used; the device can also be a soft drive hard control module with both soft and hard functions. In an implementation, the multi-pulse generator generates at least two stages of pulse signals, including a high excitation pulse signal and a low excitation pulse signal. Wherein a high excitation pulse signal is used for ignition, ionization and process operation and a low excitation pulse signal is used for maintaining two levels of ionization energy.
Preferably, the switching enable controller includes an Encoder (ENC), a pulse signal converter, and an inverter controller. At this time, a schematic structural diagram of the multi-pulse driving generator of the rf power supply is shown in fig. 3. In fig. 3, an encoder for outputting a high potential (representing digital signal 1) or a low potential (representing digital signal 0); the pulse signal converter is used for converting the pulse signal accessed by the switcher to obtain an inverter control reference signal; the inverter controller is used for setting the control signal of the inverter output by the inverter controller to zero according to the low potential of the set time width provided by the encoder in the switching process of the multi-stage pulse signals and closing a switching tube of the inverter; in the non-switching process of the multi-stage pulse signal, the inverter control reference signal is output to a switching tube of the inverter as the control signal of the inverter according to the high potential of the set time width provided by the encoder, so as to drive power.
Preferably, the pulse signal converter includes a DAC module, a first inverting module, a filtering module, a comparing module, and a second inverting module, which are sequentially disposed. At this time, a schematic structural diagram of the multi-pulse driving generator of the rf power supply is shown in fig. 4. In fig. 4, the switch outputs the incoming pulse signal in the form of a digital signal; the DAC module converts the accessed pulse signal into an analog signal to be used as a positive analog signal; the first inversion module inverts the positive-phase analog signal to obtain an inverted analog signal; the filtering module is used for filtering the normal phase analog signals and the reverse phase analog signals respectively; the comparison module is used for comparing the filtered normal phase analog signals and the filtered reverse phase analog signals to obtain comparison signals which are used as positive comparison signals; the second inverting module inverts the positive comparison signal to obtain an inverted comparison signal; and combining the positive comparison signal and the reverse comparison signal to obtain the inverter control reference signal.
In this embodiment, the inverter is an H-bridge inverter, H1/H2 is one half-bridge control path of the H-bridge, and H3/H4 is the other half-bridge control path of the H-bridge. The multi-pulse generator comprises N levels of pulse generators for generating pulse signals with levels from LV1 to LVN; the pulse generator with the level of LVn comprises a LVn-H1/H2 module and a LVn-H3/H4 module; the LVn-H1/H2 module and the LVn-H3/H4 module respectively generate pulse signals for driving the H1/H2 half-bridge control path and the H3/H4 half-bridge control path of the H bridge inverter, wherein the level of the pulse signals is LVn; n has a value of 1 to N respectively.
Preferably, the switch comprises a ganged set of switches T1 and a ganged set of switches T2. At this time, a schematic structural diagram of the multi-pulse driving generator of the rf power supply is shown in fig. 5. The change-over switch group T1 includes N switches: switches T1-LV1-H1/H2 to T1-LVN-H1/H2; the switch T1-LVn-H1/H2 is used for controlling the LVn-H1/H2 module to operate; the change-over switch group T2 includes N switches: switches T2-LV1-H3/H4 to T2-LVN-H3/H4; the switch T2-LVn-H3/H4 is used for controlling the LVn-H3/H4 module to operate; when switching to the pulse signal with the level of LVn, the switches T1-LVn-H1/H2 and T2-LVn-H3/H4 of the pulse signal with the level of LVn are closed in a linkage way, and the other switches are all opened.
In fig. 5, the DAC module includes a first DAC unit and a second DAC unit; the first inverting module comprises a first inverter and a second inverter; the filtering module comprises a first filter, a second filter, a third filter and a fourth filter; the comparison module comprises a first differential comparator and a second differential comparator; the second inverting module comprises a third inverter and a fourth inverter; the output end of the change-over switch group T1 is connected with the input end of the first DAC unit; one path of the output end of the first DAC unit is connected to the input end of the first filter, the other path of the output end of the first DAC unit is connected to the input end of the second filter after being inverted through the first inverter, and the output ends of the first filter and the second filter are respectively connected to the non-inverting input end and the inverting input end of the first differential comparator; the output end of the first differential comparator is connected with the input end of the third inverter; the output end of the change-over switch group T2 is connected with the input end of the second DAC unit; one path of the output end of the second DAC unit is connected to the input end of the third filter, the other path of the output end of the second DAC unit is connected to the input end of the fourth filter after being inverted through the second inverter, and the output ends of the third filter and the fourth filter are respectively connected to the non-inverting input end and the inverting input end of the second differential comparator; the output end of the second differential comparator is connected with the input end of the fourth inverter; the output end of the first differential comparator, the output end of the third inverter, the output end of the second differential comparator and the output end of the fourth inverter are combined to form the inverter control reference signal.
Preferably, the inverter controller includes a first and gate, a second and gate, a third and gate, and a fourth and gate; the output end of the first differential comparator is connected with the first input end of the first AND gate, the output end of the third inverter is connected with the first input end of the second AND gate, the output end of the second differential comparator is connected with the first input end of the third AND gate, and the output end of the fourth inverter is connected with the first input end of the fourth AND gate; the second input ends of the first AND gate, the second AND gate, the third AND gate and the fourth AND gate are respectively connected with the output end of the encoder; and the output ends of the first AND gate, the second AND gate, the third AND gate and the fourth AND gate are respectively connected with the control ends of H1, H2, H3 and H4. At this time, a schematic structural diagram of the multi-pulse driving generator of the rf power supply is shown in fig. 6.
Preferably, at least two stages of pulse signals are enabled in the multi-stage pulse signals generated by the multi-pulse generator; meanwhile, in the switching process of the multi-stage pulse signals, only the enabled pulse signals at all stages are switched. That is, when the total number of stages of all pulse signals generated by the multi-pulse generator is N, the number of stages of the pulse signals which are started is set to be m, and m is more than or equal to 2 and less than or equal to N; in the switching process of the multi-stage pulse signals, only the m-stage pulse signals which are started are switched. In addition, the sum of the total operation time length of the enabled pulse signals of each stage and the total operation time length of the encoder kept at a low level in one period of the reference signal is smaller than the operation time length of one period of the reference signal.
The operation of the multi-pulse drive generator of the rf power supply will be described below assuming that the frequency of the reference signal is 1KHz and the duty cycle is 50% (denoted as REF-1 KHz-50%) and taking the switching of the two-stage pulse signal as an example.
And selecting control data of H1/H2/H3/H4 of corresponding level according to the level of the pulse signal. In the present embodiment of the present invention, in the present embodiment,
The control scheme corresponding to the pulse signal of level LV1 for H1/H2/H3/H4 is denoted as path A, and the control scheme corresponding to the pulse signal of level LV2 for H1/H2/H3/H4 is denoted as path B. In this embodiment, the reference signal is used as a reference to drive and control the on-off (or switching) of the path a/B and the 0-1 switching process of the ENC, and the timing chart of the drive and control of the multi-pulse drive generator of the rf power supply is shown in fig. 7. In fig. 7, path a and path B are alternately switched, and ENC is switched during the alternation of path a and path B. Wherein the duty cycle of the ENC start-up time does not exceed 1% of the period duration of the reference signal, in principle the smaller the better. The timing diagram in fig. 7 is described as follows:
(1) When the reference signal is switched to a high level (belonging to the switching process of the multi-stage pulse signal), the ENC outputs a low level, so that all switching tubes of the inverter are closed, and the inverter outputs zero potential;
(2) When the reference signal keeps high level (belongs to the non-switching process of the multi-stage pulse signal), the ENC outputs high level, so that the on-off state of a switching tube in the inverter is matched with the path A, and the inverter is driven by power through the pulse signal LV1 of the corresponding level of the path A;
(3) When the reference signal is switched to a low level (belonging to the switching process of the multi-stage pulse signal), the ENC outputs the low level, so that all switching tubes of the inverter are closed, and the inverter outputs zero potential;
(4) When the reference signal keeps low level (belongs to the non-switching process of the multi-stage pulse signal), the ENC outputs high level, so that the on-off state of a switching tube in the inverter is matched with the path B, and the pulse signal LV2 of the corresponding level of the path B is utilized to drive the power of the inverter.
Specifically, during the alternate switching of path a and path B, the basic signal (output signal of the pulse signal converter) of the rf power is switched between LV1 and LV2, and the pulse signal converter forms corresponding power and frequency output for LV1/LV 2. Meanwhile, ENC is conventionally 1, and during the switching of path a and path B, ENC will have a very small duty cycle time to output 0 power. According to the structure of the multi-pulse driving generator of the RF power supply, the output of ENC is logically output by AND gate with the basic signal of the RF power, and the truth table of AND gate shows that either input is 0 and output is 0, so that when ENC is 0, the ENC is 0 regardless of the connection with the basic signal output of any stage. Therefore, during the alternate switching of path a and path B, the inverter is not operated during this period because the control signals to the inverter are all 0. The timing chart of the drive control output is shown in fig. 8. In fig. 8, a waveform having a relatively low amplitude illustrates a waveform detail timing chart of the driving control signal corresponding to the LV2 pulse signal in fig. 7, and a waveform having a relatively high amplitude illustrates a waveform detail timing chart of the driving control signal corresponding to the LV1 pulse signal in fig. 7. A waveform with an intermediate amplitude of approximately 0 between the two waveforms illustrates a timing diagram of waveform details when the drive control signal is 0. Therefore, the situation that the H-bridge switching tube is fully conducted does not exist. The mode is suitable for single-phase power input and three-phase power input. The radio frequency power sources of the single-phase power input and the three-phase power input are shown in fig. 9 and 10 respectively. Meanwhile, in fig. 9 and 10, an inverter structure in a radio frequency power supply is illustrated.
When switching to the path A, the paths A1 (LV 1-H1/H2) and A2 (LV 1-H3/H4) are alternately switched according to the frequency of the pulse signal LV1, and the switching switch can be a software switch or a hardware switch. Referring to fig. 6, when the path A1 is in the path, the FPGA outputs a control signal X for H1/H2 of LV1, the signal X is a digital signal, and is converted into an analog signal X 'by the DAC, the analog signal X' is divided into two paths, one path passes through a NOT GATE (NOT GATE) to form two positive inverted signals X1 and X2, the two signals are respectively filtered and then input into a differential comparator to obtain a control signal Y, the signal Y is divided into two paths identically, and one path passes through the NOT GATE to form two positive inverted signals Y1 and Y2 for controlling H1 and H2 of the same half bridge. Similarly, during the path A2, the FPGA outputs control signals for H3/H4 of LV1, so as to control H3 and H4 of the same half bridge. In principle, H1 and H3 are on with a duty cycle and H2 and H4 are on with a duty cycle. Similarly, when switching to path B, paths B1 (LV 2-H1/H2) and B2 (LV 2-H3/H4) alternate paths according to frequency, so that H1/H3, H2/H4 of LV2 are alternately switched. In the above-mentioned switching process of the path A/B, when the path A/B is a physical circuit, the path A/B can be replaced by a path selector.
In summary, the multi-pulse driving generating device of the rf power supply provided in this embodiment may implement switching of multi-stage pulse signals to correspondingly switch the output power and frequency of the rf power supply. Meanwhile, the control signal of the inverter is set to zero in the switching process of the multi-stage pulse signal, so that the full-tube conduction of an H-bridge in the inverter is effectively avoided, the radio frequency power supply can still stably operate in the pulse switching overshoot, the problem of poor stability of the existing radio frequency power supply in the pulse switching period is well solved, and the method is suitable for various radio frequency power supplies or combination of the radio frequency power supplies. In addition, the embodiment also provides a specific structure of the switching enabling controller, the circuit structure is simple, the control logic is strict, the guarantee is provided for providing reliable and stable inverter control signals, and the technical guidance is provided for specific implementation of the embodiment by a person skilled in the art. Finally, when multi-pulse signals with more than three stages are adopted, the number of stages to be adopted can be flexibly selected according to actual requirements. When the two-stage pulse signal is selected, ionization and process are carried out in the pulse high-excitation period, the plasma ionization state is maintained in the pulse low-excitation period, and the pulse switching can be performed stably.
In addition, the embodiment of the invention also provides a multi-pulse driving method of the radio frequency power supply, a flow chart is shown in fig. 11, and the driving method comprises the following steps:
Step S1: before the power supply of the radio frequency power supply, setting a reference signal, and determining the total series of the pulse signals and the output power and frequency of the pulse signals of each stage according to the reference signal; wherein, the output power and frequency of each stage of pulse signals are different.
Meanwhile, it should be noted that in this embodiment, the inverter is an H-bridge inverter, H1/H2 is one half-bridge control path of the H-bridge, and H3/H4 is the other half-bridge control path of the H-bridge; the multi-pulse generator includes N levels of pulse generators for generating pulse signals of levels from LV1 to LVN. The pulse generator with the level of LVn respectively generates pulse signals with the level of LVn for driving the H1/H2 half-bridge control path and the H3/H4 half-bridge control path of the H bridge inverter; n has a value of 1 to N respectively.
Step S2: when the radio frequency power supply supplies power, the set pulse signals of all levels are generated by utilizing the multi-pulse generator based on the reference signal.
Step S3: the switch is used for switching the multi-stage pulse signals generated by the multi-pulse generator and outputting the multi-stage pulse signals to the inverter to drive the radio frequency power supply, and the output power and the frequency of the radio frequency power supply are switched.
Preferably, the specific implementation procedure of step S3 is described as follows:
Step S31: the multi-stage pulse signals generated by the multi-pulse generator are switched by the switcher, and control signals of the inverter are generated.
Step S32: the inverter drives the radio frequency power supply based on a control signal of the inverter.
Specifically, the process of generating the control signal of the inverter in step S31 may be described as: setting the generated control signal of the inverter to zero in the switching process of the multi-stage pulse signals; and in the non-switching process of the multi-stage pulse signals, generating control signals of the inverter according to the accessed pulse signals. In addition, the embodiment also provides a specific implementation manner for generating the control signal of the inverter, which is described as follows:
step S311: judging the current switching state, and if the switching state is the switching process of the multi-stage pulse signal, outputting a low potential by the encoder; if the non-switching process of the multi-stage pulse signal is performed, the encoder outputs a high potential;
Step S312: converting the pulse signal accessed by the switcher to generate an inverter control reference signal;
step S313: and performing AND operation on the potential output by the encoder and an inverter control reference signal to generate a control signal of the inverter.
In step S312, an inverter control reference signal may be generated in the following manner:
Step S3121: converting the pulse signal accessed by the switcher into an analog signal serving as a positive-phase analog signal;
step S3122: inverting the normal phase analog signal to obtain an inverted phase analog signal;
Step S3123: respectively filtering the normal phase analog signals and the reverse phase analog signals;
step S3124: comparing the filtered normal phase analog signal and the filtered reverse phase analog signal to obtain a comparison signal which is used as a normal comparison signal;
step S3125: inverting the positive comparison signal to obtain an inverted comparison signal;
Step S3126: and combining the positive comparison signal and the reverse comparison signal to obtain the inverter control reference signal.
The specific implementation process of the method embodiment of the present invention may be referred to the above device embodiment, and this embodiment is not described herein.
Since the principle of the embodiment is the same as that of the embodiment of the device, the method also has the corresponding technical effects of the embodiment of the device.
Those skilled in the art will appreciate that all or part of the flow of the methods of the embodiments described above may be accomplished by way of a computer program to instruct associated hardware, where the program may be stored on a computer readable storage medium. Wherein the computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory, etc.
The present invention is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention.
Claims (10)
1. A multi-pulse driving method of a radio frequency power supply, the driving method comprising:
before the power supply of the radio frequency power supply, setting a reference signal, and determining the total series of the pulse signals and the output power and frequency of the pulse signals of each stage according to the reference signal; wherein, the output power and frequency of each stage of pulse signals are different;
When the radio frequency power supply supplies power, based on a reference signal, each stage of pulse signals are generated by using a multi-pulse generator;
The switch is used for switching the multi-stage pulse signals generated by the multi-pulse generator and outputting the multi-stage pulse signals to the inverter to drive the radio frequency power supply, and the output power and the frequency of the radio frequency power supply are switched.
2. The multi-pulse driving method of a radio frequency power supply according to claim 1, wherein the switching of the multi-stage pulse signal generated by the multi-pulse generator by the switcher performs:
switching the multi-stage pulse signals generated by the multi-pulse generator by using a switcher to generate control signals of the inverter;
the inverter drives the radio frequency power supply based on a control signal of the inverter.
3. The multi-pulse driving method of a radio frequency power supply according to claim 2, wherein the generating of the control signal of the inverter performs:
setting the generated control signal of the inverter to zero in the switching process of the multi-stage pulse signals;
and in the non-switching process of the multi-stage pulse signals, generating control signals of the inverter according to the accessed pulse signals.
4. A multi-pulse driving method of a radio frequency power supply according to claim 3, wherein the generating of the control signal of the inverter performs:
Judging the current switching state, and if the switching state is the switching process of the multi-stage pulse signal, outputting a low potential by the encoder; if the non-switching process of the multi-stage pulse signal is performed, the encoder outputs a high potential;
converting the pulse signal accessed by the switcher to generate an inverter control reference signal;
and performing AND operation on the potential output by the encoder and an inverter control reference signal to generate a control signal of the inverter.
5. The method of claim 4, wherein generating the inverter control reference signal is performed by:
Converting the pulse signal accessed by the switcher into an analog signal serving as a positive-phase analog signal;
Inverting the normal phase analog signal to obtain an inverted phase analog signal;
Respectively filtering the normal phase analog signals and the reverse phase analog signals;
comparing the filtered normal phase analog signal and the filtered reverse phase analog signal to obtain a comparison signal which is used as a normal comparison signal;
Inverting the positive comparison signal to obtain an inverted comparison signal;
and combining the positive comparison signal and the reverse comparison signal to obtain the inverter control reference signal.
6. The method of claim 5, wherein the inverter is an H-bridge inverter, H1/H2 is one half-bridge control path of an H-bridge, and H3/H4 is the other half-bridge control path of the H-bridge;
the multi-pulse generator includes N levels of pulse generators for generating pulse signals of levels from LV1 to LVN.
7. The method of claim 6, wherein the pulse generators of level LVn generate pulse signals of level LVn driving the H-bridge inverter H1/H2 half-bridge control path and the H3/H4 half-bridge control path, respectively;
N has a value of 1 to N respectively.
8. The method of multi-pulse driving of a radio frequency power supply according to any one of claims 1 to 7, wherein at least two stages of pulse signals are enabled in a multi-stage pulse signal generated by the multi-pulse generator; meanwhile, in the switching process of the multi-stage pulse signals, only the enabled pulse signals at all stages are switched.
9. The multi-pulse driving method of a radio frequency power supply according to claim 8, wherein a sum of a total operation duration of the enabled pulse signals of each stage and a total operation duration of the encoder kept at a low level is smaller than an operation duration of one period of the reference signal.
10. The method of multi-pulse driving of a radio frequency power supply according to any one of claims 1-7, wherein the multi-pulse generator generates at least two stages of pulse signals including a high-excitation pulse signal and a low-excitation pulse signal; wherein,
The high excitation pulse signal is used for ignition, ionization and process operation,
The low excitation pulse signal is used to maintain two levels of ionization energy.
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